CN105653100A - Array substrate and manufacturing method thereof and display panel - Google Patents
Array substrate and manufacturing method thereof and display panel Download PDFInfo
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- CN105653100A CN105653100A CN201610200669.4A CN201610200669A CN105653100A CN 105653100 A CN105653100 A CN 105653100A CN 201610200669 A CN201610200669 A CN 201610200669A CN 105653100 A CN105653100 A CN 105653100A
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- bracer
- line
- touch
- control sensing
- array base
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
Abstract
The invention discloses an array substrate and a manufacturing method thereof and a display pane. The array substrate comprises a substrate base plate, a plurality of data lines, scanning lines, at least one touch sensing line, and at least one support block, wherein the data lines, the scanning lines, the touch sensing lines, and the support blocks are arranged on the substrate base plate. The support blocks correspond to the touch sensing lines one by one, and the touch sensing lines are arranged above the corresponding support blocks. The support blocks are adjacent and parallel to at least one of the data lines and the scanning lines. The height of the support blocks is larger than the data lines, and/or larger than the scanning lines. In this arrangement, the problem that the touch sensing lines and the data lines and/or scanning lines parallel to the touch sensing lines can be solved, and aperture opening rate can be increased.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of array base palte and preparation method thereof, display floater.
Background technology
Along with developing rapidly of Display Technique, the application of display device is also more and more extensive. Along with the development of science and technology, the display device only with display function can not meet the demand of people. In order to meet the demand of people, production firm works out the display device of integrated touch controllable function.
The display device of integrated touch controllable function integrated touch controllable function in existing display device is formed. In order to realize touch controllable function, touch-control sensing line can be made in a display device and sense with the touching signals to user. Simple and simple for production in order to design, generally touch-control sensing line is be arranged in parallel with original data wire in display device and/or scanning line, and touch-control sensing line, data wire and scanning line are arranged the region (light tight region) that black matrix" in a display device covers.
The above-mentioned scheme being be arranged in parallel with data wire and/or scanning line by touch-control sensing line is a kind of challenge for the spacing between touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line: if spacing is excessive, although making simpler, but, owing to touch-control sensing line, data wire and scanning line are arranged on light tight region, therefore, the aperture opening ratio of display device can be reduced; If spacing is too small, the reason of aligning accuracy during owing to making, touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line can be caused to have the phenomenon of overlap, the load of touch-control the parasitic capacitance between touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line can be increased, thus can be increased.
Summary of the invention
The embodiment of the present invention provides a kind of array base palte and preparation method thereof, display floater, the problem excessive or too small to solve in prior art spacing between touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line.
For reaching this purpose, the present invention by the following technical solutions:
First aspect, embodiments provides a kind of array base palte, including: underlay substrate, and it is positioned at a plurality of data lines on described underlay substrate, multi-strip scanning line, at least one touch-control sensing line and at least one bracer;
Described bracer and described touch-control sensing line one_to_one corresponding, described touch-control sensing line is arranged on the top of described bracer of correspondence;
Scanning line described in data wire and/or at least one described in described bracer and at least one is adjacent and be arranged in parallel;
The height of described bracer more than the height of described data wire, and/or, the height of described bracer is more than the height of described scanning line.
Second aspect, the embodiment of the present invention additionally provides a kind of display floater, including: the array base palte described in first aspect.
The third aspect, the embodiment of the present invention additionally provides the manufacture method of a kind of array base palte as described in relation to the first aspect, including:
Underlay substrate is provided;
A plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer is formed on described underlay substrate;
Wherein, described bracer and described touch-control sensing line one_to_one corresponding, described touch-control sensing line is arranged on the top of described bracer of correspondence;
Scanning line described in data wire and/or at least one described in described bracer and at least one is adjacent and be arranged in parallel;
The height of described bracer more than the height of described data wire, and/or, the height of described bracer is more than the height of described scanning line.
Array base palte that the embodiment of the present invention provides and preparation method thereof, display floater, by the bracer of being arranged below at touch-control sensing line, and bracer and at least one data wire and/or to scan line adjacent and be arranged in parallel, achieve touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line does not have overlapping phenomenon, from without increasing the parasitic capacitance between touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line, and then the load of touch-control will not be increased; And utilize the distance that a bracer achieves between touch-control sensing line and the data wire parallel with touch-control sensing line and/or scanning line less such that it is able to increase aperture opening ratio.
Accompanying drawing explanation
By reading the detailed description that non-limiting example is made made with reference to the following drawings, the other features, objects and advantages of the present invention will become more apparent upon:
Fig. 1 is the schematic top plan view of the structure of a kind of implementation of the array base palte that the embodiment of the present invention provides.
Fig. 2 is the cross-sectional schematic in Fig. 1 along the structure of line A-A.
Fig. 3 is the schematic top plan view of the structure of the another kind of implementation of the array base palte that the embodiment of the present invention provides.
Fig. 4 is the cross-sectional schematic in Fig. 3 along the structure of line B-B.
Fig. 5 is the schematic top plan view of the structure of the another kind of implementation of the array base palte that the embodiment of the present invention provides.
Fig. 6 is the cross-sectional schematic in Fig. 5 along the structure of line C-C.
Fig. 7 is the schematic top plan view of the structure of a kind of implementation of the color membrane substrates that the embodiment of the present invention provides.
Fig. 8 is the schematic flow sheet of a kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides.
Fig. 9 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides.
Figure 10 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides.
Figure 11 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides.
Figure 12 is the schematic flow sheet of a kind of implementation forming a bracer on insulating barrier in the manufacture method of the array base palte that the embodiment of the present invention provides.
Figure 13 is the cross-sectional schematic that the step in the manufacture method of the array base palte that the embodiment of the present invention provides sequentially forms the structure on insulating barrier and barrier layer on insulating barrier.
Insulating barrier and barrier layer are performed etching by the step that Figure 14 is in the manufacture method of the array base palte that the embodiment of the present invention provides, and form the cross-sectional schematic of the structure of collets and stopper.
Figure 15 is the cross-sectional schematic that the step in the manufacture method of the array base palte that the embodiment of the present invention provides forms the structure of metal level on the structure forming a bracer.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in further detail. It is understood that specific embodiment described herein is used only for explaining the present invention, but not limitation of the invention. It also should be noted that, for the ease of describing, accompanying drawing illustrate only part related to the present invention but not full content.
Embodiments provide a kind of array base palte.
Fig. 1 is the schematic top plan view of the structure of a kind of implementation of the array base palte that the embodiment of the present invention provides. Fig. 2 is the cross-sectional schematic in Fig. 1 along the structure of line A-A. As depicted in figs. 1 and 2, this array base palte includes: underlay substrate 101, and is positioned at a plurality of data lines 102 on underlay substrate 101, multi-strip scanning line 103, at least one touch-control sensing line 104 and at least one bracer 105.
Wherein, propping up bracer 105 and touch-control sensing line 104 one_to_one corresponding, touch-control sensing line 104 is arranged on the top of a bracer 105 of correspondence; Bracer 105 is adjacent with at least one data wire 102 and be arranged in parallel; Prop up the height height (achieving the electric insulation between touch-control sensing line 104 and data wire 102) more than data wire 102 of bracer 105.
The array base palte that Fig. 1 and Fig. 2 provides, by the bracer 105 of being arranged below at touch-control sensing line 104, and a bracer 105 is adjacent with at least one data wire 102 and be arranged in parallel, achieve touch-control sensing line 104 and the data wire 102 parallel with touch-control sensing line 104 does not have overlapping phenomenon, from without increasing the parasitic capacitance between touch-control sensing line 104 and the data wire 102 parallel with touch-control sensing line 104, and then the load of touch-control will not be increased; And utilize the distance that a bracer 105 achieves between touch-control sensing line 104 and the data wire 102 parallel with touch-control sensing line 104 less such that it is able to increase aperture opening ratio.
In the implementation of the array base palte shown in Fig. 1 and Fig. 2, touch-control sensing line 104 is all adjacent with all of data wire 102, it is understandable that, due in actual design process, the quantity of required touch-control sensing line 104 is fewer than the quantity of data wire 102, therefore, touch-control sensing line 104 can also be only adjacent with segment data line 102. Data wire 102 in array base palte shown in Fig. 1 and Fig. 2, scanning line 103, touch-control sensing line 104 and the length of support column 105, width and thickness are for illustrating that the structure of the array base palte that the embodiment of the present invention provides carries out schematically describing and illustrating, at this, it is not limited, such as: data wire 102, scanning line 103 and touch-control sensing line 104 are generally made by metal wire, now, it is thinner, it may be assumed that width is less. It is understandable that, Fig. 1 and Fig. 2 all illustrate only the structure of part related to the present invention in array base palte, not showing that the entire infrastructure of array base palte, those skilled in the art can obtain the entire infrastructure of array base palte in conjunction with the content that prior art and the embodiment of the present invention describe.
Touch-control sensing line 104 and at least one data wire 102 that prop up bracer 105 adjacent corresponding with touch-control sensing line 104 can be made in same processing technology. This kind of processing technology mode, it is possible to concurrently form touch-control sensing line 104 and at least one data wire 102 adjacent with touch-control sensing line 104, it is possible to save technological process.
Due in actual design process, the quantity of required touch-control sensing line 104 is fewer than the quantity of data wire 102, therefore, a part for data wire 102 in the data wire 102 simply array base palte now made in same processing technology with touch-control sensing line 104, in addition, not adjacent with touch-control sensing line 104 data wire 102 can also be made in same processing technology with touch-control sensing line 104, and this kind of processing technology can be saved technological process and reduce process complexity.
Especially, can be identical with the quantity of data wire 102 by the quantitative design of touch-control sensing line 104, now, all of data wire 102 all can be made in same processing technology with touch-control sensing line 104, processing technology can be simplified, after completing, only required touch-control sensing line 104 is electrically connected with chip, unwanted touch-control sensing line 104 does not electrically connect with chip, owing to the distance between touch-control sensing line 104 and the data wire 102 adjacent with touch-control sensing line 104 is less and touch-control sensing line 104 is thinner, the touch-control sensing line 104 not electrically connected with chip will not increase aperture opening ratio.
As in figure 2 it is shown, a bracer 105 can include the collets 106 and the stopper 107 that stack gradually from bottom to top.
Wherein, the material of collets 106 can be silicon nitride or organic membrane; The material of stopper 107 can be titanium.
It should be noted that, when the material of stopper 107 is titanium, although titanium is metal, can conduct electricity, but owing to its resistivity is bigger, touch-control sensing line 104 can not be multiplexed with, therefore, it is also desirable to utilize the material of resistivity less (such as: aluminum) to make touch-control sensing line 104 above stopper 107. The existence of stopper 107 is to form collets 106, the manufacture method of the array base palte that particular content can provide referring to the following embodiment of the present invention, does not repeat them here.
As in figure 2 it is shown, the cross sectional shape of a bracer 105 can be inverted trapezoidal. It should be noted that the cross sectional shape of a bracer 105 can also is that rectangle. By the cross sectional shape of a bracer 105 is set to rectangle or inverted trapezoidal, can when utilizing same processing technology to make touch-control sensing line 104 and the data wire 102 adjacent with touch-control sensing line 104, it is achieved near the edge 108 of the data wire 102 adjacent with touch-control sensing line 104 and data wire 102, the distance between the edge 109 of the touch-control sensing line 104 adjacent with data wire 102 is 0 to touch-control sensing line 104.
As shown in Figure 2, touch-control sensing line 104, and the spacing that adjacent at least one data wire 102 of corresponding with touch-control sensing line 104 bracer 105 project on underlay substrate 101 is 0, it may be assumed that " the touch-control sensing line 104 distance between the edge 109 of close adjacent with the data wire 102 touch-control sensing line 104 in the edge 108 of the data wire 102 adjacent with touch-control sensing line 104 and data wire 102 is 0 " described above. This kind of set-up mode, it is possible to the distance between touch-control sensing line 104 and the data wire 102 adjacent with touch-control sensing line 104 is accomplished minimum such that it is able to increase aperture opening ratio to the full extent.
As in figure 2 it is shown, this array base palte also includes: the first insulating barrier 110.
Wherein, scanning line 103 (not shown) between underlay substrate 101 and the first insulating barrier 110; Prop up bracer 105 and data wire 102 is positioned on the first insulating barrier 110. That is: scanning line 103 is positioned at the lower section of data wire 102 place rete.
As it is shown in figure 1, this array base palte also includes: multiple pixel cells 111.
Fig. 3 is the schematic top plan view of the structure of the another kind of implementation of the array base palte that the embodiment of the present invention provides. Fig. 4 is the cross-sectional schematic in Fig. 3 along the structure of line B-B. As Figure 1-Figure 4, no with the implementation of the array base palte shown in Fig. 1 and Fig. 2, in the implementation of the array base palte shown in Fig. 3 and Fig. 4, a bracer 105 is adjacent with at least one scanning line 103 and be arranged in parallel; Prop up the height height (achieving the electric insulation between touch-control sensing line 104 and scanning line 103) more than scanning line 103 of bracer 105. This array base palte also includes: the second insulating barrier 112. Wherein, data wire 102 (not shown) between underlay substrate 101 and the second insulating barrier 112; Prop up bracer 105 and scanning line 103 is positioned on the second insulating barrier 112.
The array base palte that Fig. 3 and Fig. 4 provides, by the bracer 105 of being arranged below at touch-control sensing line 104, and a bracer 105 is adjacent with at least one scanning line 103 and be arranged in parallel, achieve touch-control sensing line 104 and the scanning line 103 parallel with touch-control sensing line 104 does not have overlapping phenomenon, from without increasing the parasitic capacitance between touch-control sensing line 104 and parallel with touch-control sensing line 104 scanning line 103, and then the load of touch-control will not be increased; And utilize the distance that a bracer 105 achieves between touch-control sensing line 104 and the scanning line 103 parallel with touch-control sensing line 104 less such that it is able to increase aperture opening ratio.
Other content in array base palte shown in Fig. 3 and Fig. 4 does not repeat them here, can referring to the array base palte shown in Fig. 1 and Fig. 2.
Fig. 5 is the schematic top plan view of the structure of the another kind of implementation of the array base palte that the embodiment of the present invention provides. Fig. 6 is the cross-sectional schematic in Fig. 5 along the structure of line C-C. As shown in Figure 1, Figure 2, shown in Fig. 5 and Fig. 6, with the array base palte shown in Fig. 1 and Fig. 2 the difference is that, the array base palte shown in Fig. 5 and Fig. 6 also includes: a plurality of grid line 113.
Wherein, grid line 113 is vertical with data wire 102, and scanning line 103 is parallel with data wire 102; Every scanning line 103 electrically connects with at least one corresponding grid line 113. Scanning line 103 is provided for each row pixel cell 111 by grid line 113 and scans signal accordingly.
It is adjacent and be arranged in parallel that bracer 105 scans line 103 with at least one data wire 102 and at least one; Prop up the height height more than data wire 102 of bracer 105, and the height of a bracer 105 is more than the height of scanning line 103.
As it is shown in figure 5, every scanning line 103 can pass through via 114 with at least one corresponding grid line 113 and electrically connect. That is: now, grid line 113 and scanning line 103 are positioned at different rete.
As shown in Figure 6, this array base palte also includes: the 3rd insulating barrier 115.
Wherein, grid line 113 (not shown) between underlay substrate 101 and the 3rd insulating barrier 115; Prop up bracer 105, scanning line 103 and data wire 102 to be positioned on the 3rd insulating barrier 115.
As it is shown in figure 5, be provided with gap 117 between two often adjacent pixel cell row 116, the direction that pixel cell row 116 extend is identical with the direction that data wire 102 extends, and is the vertical direction in Fig. 5; Two data line 102 that every two data line 102 are adjacent and adjacent are arranged at gap 117 place of even number position; Two scanning lines 103 that every two scanning lines 103 are adjacent and adjacent are arranged at gap 117 place of odd positions. The pixel cell row 116 of two often adjacent data line 102 respectively both sides provide corresponding data signal.In addition, two adjacent data line 102 can be arranged at gap 117 place of odd positions, and two adjacent scanning lines 103 can be arranged at gap 117 place of even number position.
As shown in Figure 6, a bracer 105 is arranged between two adjacent data wires 102, and/or, a bracer 105 is arranged between two adjacent scanning lines 103.
It should be noted that, array base palte shown in Fig. 5 and Fig. 6, owing to scanning line 103 scans signal by grid line 113 accordingly for the offer of corresponding pixel cell row, therefore, grid line 113 is no longer necessary to draw from the both sides of array base palte, and therefore, the both sides of array base palte do not need frame, therefore, the array base palte shown in Fig. 5 and Fig. 6 is suitable for the display floater of large scale Rimless.
The embodiment of the present invention additionally provides a kind of display floater. This display floater includes the array base palte that the above embodiment of the present invention provides. This display floater can be display panels, it is also possible to be organic electroluminescence display panel.
It is to be understood that when display floater is display panels, display floater also includes: the color membrane substrates being oppositely arranged with array base palte. Fig. 7 is the schematic top plan view of the structure of a kind of implementation of the color membrane substrates that the embodiment of the present invention provides. As it is shown in fig. 7, color membrane substrates includes multiple colored light-filtering units 118 arranged in arrays and the black matrix 119 between colored light-filtering units 118; View field on the black matrix 118 underlay substrate 101 in array base palte covers touch-control sensing line 104, and at least one data wire 102 and/or at least one that prop up bracer 105 adjacent corresponding with touch-control sensing line 104 scans the line 103 view field on underlay substrate 101. Owing to black matrix 118 is made by light-proof material, therefore, this kind of set-up mode realizes touch-control sensing line 104, and adjacent at least one data wire 102 of corresponding with touch-control sensing line 104 bracer 105 and/or at least one scanning line 103 are arranged on light tight region, and then without influence on the display effect of display floater.
The embodiment of the present invention additionally provides a kind of display device. This display device includes the display floater that the above embodiment of the present invention provides.
It is understood that this display floater and display device are integrated with touch controllable function. Display floater and display device that the embodiment of the present invention provides have the beneficial effect that above-mentioned array base palte can reach, and specifically referring to above-described embodiment, can not repeat them here.
The embodiment of the present invention additionally provides the manufacture method of a kind of array base palte.
Fig. 8 is the schematic flow sheet of a kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides. As shown in Figure 8, the method comprises the following steps:
Step 801, offer underlay substrate.
Step 802, a plurality of data lines that formed on underlay substrate, multi-strip scanning line, at least one touch-control sensing line and at least one bracer.
Wherein, propping up bracer and touch-control sensing line one_to_one corresponding, touch-control sensing line is arranged on the top of a bracer of correspondence; It is adjacent and be arranged in parallel that bracer and at least one data wire and/or at least one scan line; Prop up the height height more than data wire of bracer, and/or, the height of a bracer is more than the height of scanning line.
Can make through the method and obtain the array base palte that above-described embodiment provides. Therefore, the manufacture method of the array base palte that the embodiment of the present invention provides has the beneficial effect that above-mentioned array base palte can reach, and specifically referring to above-described embodiment, can not repeat them here.
It should be noted that, what said method described is only the part relevant with the inventive point of the manufacture method of the array base palte that the embodiment of the present invention provides, and whole content is not depicted, those skilled in the art can obtain the full content of the manufacture method of array base palte in conjunction with the manufacture method of the array base palte that prior art and the embodiment of the present invention provide. The formation order forming a plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer on underlay substrate can be arbitrary, it is possible to carrys out specific design according to the structure of the array base palte to be formed. Below the manufacture method of the array base palte shown in Fig. 1-Fig. 6 is carried out illustrative explanation.
Fig. 9 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides. Method shown in Fig. 9 can make the array base palte obtained shown in Fig. 1 and Fig. 2. As it is shown in figure 9, the method comprises the following steps:
Step 901, offer underlay substrate.
Step 902, on underlay substrate formed multi-strip scanning line.
The scanning line that this step 902 is formed is the scanning line 103 in Fig. 1.
Step 903, scanning line on form the first insulating barrier.
The first insulating barrier that this step 903 is formed is the first insulating barrier 110 in Fig. 2.
Step 904, on the first insulating barrier, form at least one bracer.
The bracer that this step 904 is formed is the bracer 105 in Fig. 2, and detailed process can referring to the content described by the following examples.
Step 905, a plurality of data lines that formed on the first insulating barrier, and form the touch-control sensing line of correspondence on a bracer, wherein prop up bracer simultaneously and at least one data wire is adjacent and be arranged in parallel.
This step 905 achieves touch-control sensing line and the data wire adjacent with touch-control sensing line is made in same processing technology. Its detailed process may is that and makes layer of metal layer on the structure that step 904 is formed, existence due to a bracer, when making metal level, metal level can in two edge drop of a bracer, a part is retained on a bracer, a part drops on (and adjacent with a bracer) on the first insulating barrier, and its concrete structure can referring to the content described in example below; Etch away unwanted part again, retain the metal level (metal level herein forms data wire) of linear position data and the metal level (metal level herein forms touch-control sensing line) on a bracer.
Figure 10 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides. Method shown in Figure 10 can make the array base palte obtained shown in Fig. 3 and Fig. 4. As shown in Figure 10, the method comprises the following steps:
Step 1001, offer underlay substrate.
Step 1002, on underlay substrate formed a plurality of data lines.
The data wire that this step 1002 is formed is the data wire 102 in Fig. 3.
Step 1003, on data wire, form the second insulating barrier.
The second insulating barrier that this step 1003 is formed is the second insulating barrier 112 in Fig. 4.
Step 1004, on the second insulating barrier, form at least one bracer.
The bracer that this step 1004 is formed is the bracer 105 in Fig. 4, and detailed process can referring to the content described by the following examples.
Step 1005, on the second insulating barrier, form multi-strip scanning line, and on a bracer, form the touch-control sensing line of correspondence simultaneously, wherein prop up bracer and at least one to scan line adjacent and be arranged in parallel.
This step 1005 achieves touch-control sensing line and the scanning line adjacent with touch-control sensing line is made in same processing technology.Its detailed process may is that and makes layer of metal layer on the structure that step 1004 is formed, existence due to a bracer, when making metal level, metal level can in two edge drop of a bracer, a part is retained on a bracer, a part drops on (and adjacent with a bracer) on the first insulating barrier, and its concrete structure can referring to the content described in example below; Etch away unwanted part again, retain the metal level (metal level herein forms scanning line) of scan line position and the metal level (metal level herein forms touch-control sensing line) on a bracer.
Figure 11 is the schematic flow sheet of the another kind of implementation of the manufacture method of the array base palte that the embodiment of the present invention provides. Method shown in Figure 11 can make the array base palte obtained shown in Fig. 5 and Fig. 6. As shown in figure 11, the method comprises the following steps:
Step 1101, offer underlay substrate.
Step 1102, on underlay substrate, form a plurality of grid line.
The grid line that this step 1102 is formed is the grid line 113 in Fig. 5.
Step 1103, on grid line formed the 3rd insulating barrier.
The 3rd insulating barrier that this step 1103 is formed is the 3rd insulating barrier 115 in Fig. 6.
Additionally, further comprise the steps of: in the 3rd insulating barrier above grid line 113 via 114 being formed in Fig. 5 after step 1103, grid line 113 and the scanning line formed in corresponding following step are electrically connected by via 114.
Step 1104, on the 3rd insulating barrier, form at least one bracer.
The bracer that this step 1104 is formed is the bracer 105 in Fig. 6, and detailed process can referring to the content described by the following examples.
Step 1105, formed on the 3rd insulating barrier multi-strip scanning line and a plurality of data lines, and form the touch-control sensing line of correspondence on a bracer, wherein prop up bracer and scan line with at least one and/or data wire is adjacent and be arranged in parallel simultaneously.
This step 1105 achieves touch-control sensing line and the data wire adjacent with touch-control sensing line and scanning line is made in same processing technology. Its detailed process may is that and makes layer of metal layer on the structure that step 1104 is formed, existence due to a bracer, when making metal level, metal level can in two edge drop of a bracer, a part is retained on a bracer, a part drops on (and adjacent with a bracer) on the first insulating barrier, and its concrete structure can referring to the content described in example below; Etch away unwanted part again, retain the metal level (metal level herein forms scanning line) of the metal level (metal level herein forms data wire) of linear position data, scan line position and the metal level (metal level herein forms touch-control sensing line) on a bracer.
Figure 12 is the schematic flow sheet of a kind of implementation forming a bracer on insulating barrier in the manufacture method of the array base palte that the embodiment of the present invention provides, wherein, this insulating barrier can be the first insulating barrier described in above-described embodiment, the second insulating barrier or the 3rd insulating barrier. As shown in figure 12, the method comprises the following steps:
Step 1201, on insulating barrier, sequentially form insulating barrier and barrier layer.
Figure 13 is the cross-sectional schematic that the step in the manufacture method of the array base palte that the embodiment of the present invention provides sequentially forms the structure on insulating barrier and barrier layer on insulating barrier. As shown in figure 13, on insulating barrier 1301, insulating barrier 1302 and barrier layer 1303 are sequentially formed.It should be noted that part under not shown insulating barrier 1301 in Figure 13, those skilled in the art can obtain the structure under insulating barrier 1301 according to the content that prior art and the embodiment of the present invention describe.
Step 1202, insulating barrier and barrier layer are performed etching, form collets and stopper.
Insulating barrier and barrier layer are performed etching by the step that Figure 14 is in the manufacture method of the array base palte that the embodiment of the present invention provides, and form the cross-sectional schematic of the structure of collets and stopper. As shown in figure 14, due to the difference of insulating barrier 1302 and barrier layer 1303 material, both etching speeds are also different, therefore, when both are performed etching, can form the structure of inverted trapezoidal, collets 106 and stopper 107 and constitute a bracer 105.
Figure 15 is the cross-sectional schematic that the step in the manufacture method of the array base palte that the embodiment of the present invention provides forms the structure of metal level on the structure forming a bracer. As shown in figure 15, existence due to a bracer 105, when making metal level 1501, metal level 1501 can in two edge drop of a bracer 105, a part is retained on a bracer 105, and a part drops on (and adjacent with a bracer 105) on insulating barrier 1301 (insulating barrier 1301 herein can be the first insulating barrier described in above-described embodiment, the second insulating barrier or the 3rd insulating barrier).
Note, above are only presently preferred embodiments of the present invention and institute's application technology principle. It will be appreciated by those skilled in the art that and the invention is not restricted to specific embodiment described here, various obvious change can be carried out for a person skilled in the art, readjust and substitute without departing from protection scope of the present invention. Therefore, although the present invention being described in further detail by above example, but the present invention is not limited only to above example, when without departing from present inventive concept, other Equivalent embodiments more can also be included, and the scope of the present invention is determined by appended right.
Claims (20)
1. an array base palte, it is characterised in that including: underlay substrate, and it is positioned at a plurality of data lines on described underlay substrate, multi-strip scanning line, at least one touch-control sensing line and at least one bracer;
Described bracer and described touch-control sensing line one_to_one corresponding, described touch-control sensing line is arranged on the top of described bracer of correspondence;
Scanning line described in data wire and/or at least one described in described bracer and at least one is adjacent and be arranged in parallel;
The height of described bracer more than the height of described data wire, and/or, the height of described bracer is more than the height of described scanning line.
2. array base palte according to claim 1, it is characterised in that described touch-control sensing line, and corresponding with described touch-control sensing line bracer adjacent at least one described in scanning line described in data wire and/or at least one make in same processing technology.
3. array base palte according to claim 1, it is characterised in that described bracer includes the collets and the stopper that stack gradually from bottom to top.
4. array base palte according to claim 3, it is characterised in that the material of described collets is silicon nitride or organic membrane; The material of described stopper is titanium.
5. array base palte according to claim 1, it is characterised in that the cross sectional shape of described bracer is rectangle or inverted trapezoidal.
6. according to the arbitrary described array base palte of claim 1-5, it is characterized in that, described touch-control sensing line, and corresponding with described touch-control sensing line bracer adjacent at least one described in the spacing that projects on described underlay substrate of scanning line described in data wire and/or at least one be 0.
7. array base palte according to claim 1, it is characterised in that also include: the first insulating barrier;
Described scanning line is between described underlay substrate and described first insulating barrier;
Described bracer and described data line bit are on described first insulating barrier.
8. array base palte according to claim 1, it is characterised in that also include: the second insulating barrier;
Described data line bit is between described underlay substrate and described second insulating barrier;
Described bracer and described scanning line are positioned on described second insulating barrier.
9. array base palte according to claim 1, it is characterised in that also include: a plurality of grid line;
Described grid line is vertical with described data wire, and described scanning line is parallel with described data wire;
Every described scanning line electrically connects with grid line described in corresponding at least one.
10. array base palte according to claim 9, it is characterised in that every described scanning line is electrically connected by via with grid line described in corresponding at least one.
11. array base palte according to claim 9, it is characterised in that also include: the 3rd insulating barrier;
Described grid line is between described underlay substrate and described 3rd insulating barrier;
Described bracer, described scanning line and described data line bit are on described 3rd insulating barrier.
12. array base palte according to claim 11, it is characterised in that also include: multiple pixel cells;
Being provided with gap between two often adjacent pixel cell row, the direction that described pixel cell row extend is identical with the direction that described data wire extends;
Two described data wires that every two described data wires are adjacent and adjacent are arranged at odd positions or the gap location of even number position;
Two described scanning lines that every two described scanning lines are adjacent and adjacent are arranged at the gap location of even number position or odd positions.
13. array base palte according to claim 12, it is characterised in that described bracer is arranged between two adjacent described data wires, and/or, described bracer is arranged between two adjacent described scanning lines.
14. the arbitrary described array base palte of a display floater, it is characterised in that including: claim 1-13.
15. display floater according to claim 14, it is characterised in that described display floater is display panels or organic electroluminescence display panel.
16. display floater according to claim 14, it is characterised in that also include: color membrane substrates;
Described color membrane substrates and described array base palte are oppositely arranged;
Described color membrane substrates includes multiple colored light-filtering units arranged in arrays and the black matrix between described colored light-filtering units;
Described black matrix view field on described underlay substrate covers described touch-control sensing line, and the bracer corresponding with described touch-control sensing line adjacent at least one described in scanning line view field on described underlay substrate described in data wire and/or at least one.
17. one kind as arbitrary in claim 1-13 as described in the manufacture method of array base palte, it is characterised in that including:
Underlay substrate is provided;
A plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer is formed on described underlay substrate;
Wherein, described bracer and described touch-control sensing line one_to_one corresponding, described touch-control sensing line is arranged on the top of described bracer of correspondence;
Scanning line described in data wire and/or at least one described in described bracer and at least one is adjacent and be arranged in parallel;
The height of described bracer more than the height of described data wire, and/or, the height of described bracer is more than the height of described scanning line.
18. method according to claim 17, it is characterised in that form a plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer on described underlay substrate and include:
Multi-strip scanning line is formed on described underlay substrate;
The first insulating barrier is formed on described scanning line;
At least one bracer is formed on described first insulating barrier;
Forming a plurality of data lines on described first insulating barrier, and form corresponding touch-control sensing line simultaneously on described bracer, data wire described in wherein said bracer and at least one is adjacent and be arranged in parallel.
19. method according to claim 17, it is characterised in that form a plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer on described underlay substrate and include:
A plurality of data lines is formed on described underlay substrate;
The second insulating barrier is formed on described data wire;
At least one bracer is formed on described second insulating barrier;
Forming multi-strip scanning line on described second insulating barrier, and form corresponding touch-control sensing line simultaneously on described bracer, scanning line described in wherein said bracer and at least one is adjacent and be arranged in parallel.
20. method according to claim 17, it is characterized in that, described array base palte also includes: a plurality of grid line, and described grid line is vertical with described data wire, described scanning line is parallel with described data wire, and every described scanning line electrically connects with grid line described in corresponding at least one;
A plurality of data lines, multi-strip scanning line, at least one touch-control sensing line and at least one bracer is formed on described underlay substrate, including:
A plurality of grid line is formed on described underlay substrate;
The 3rd insulating barrier is formed on described grid line;
At least one bracer is formed on described 3rd insulating barrier;
On described 3rd insulating barrier, form multi-strip scanning line and a plurality of data lines, and to form the touch-control sensing line of correspondence, scanning line described in wherein said bracer and at least one and/or described data wire on described bracer adjacent and be arranged in parallel simultaneously.
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| CN105653100B (en) | 2018-09-21 |
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