CN105629420A - Inclination adjustment verification device for microscope object lens - Google Patents

Inclination adjustment verification device for microscope object lens Download PDF

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Publication number
CN105629420A
CN105629420A CN201610028617.3A CN201610028617A CN105629420A CN 105629420 A CN105629420 A CN 105629420A CN 201610028617 A CN201610028617 A CN 201610028617A CN 105629420 A CN105629420 A CN 105629420A
Authority
CN
China
Prior art keywords
reflecting mirror
object lens
installing hole
hole
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610028617.3A
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Chinese (zh)
Inventor
张蓓
高枫
闫鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beihang University
Original Assignee
Beihang University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beihang University filed Critical Beihang University
Priority to CN201610028617.3A priority Critical patent/CN105629420A/en
Publication of CN105629420A publication Critical patent/CN105629420A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/021Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives

Abstract

The invention relates to the microscope technology field and particularly relates to an inclination adjustment verification device for a microscope object lens, which is used for the inclination adjustment and verification of the microscope object lens. The inclination adjustment verification device comprises a reflector and a reflector support; the reflector support is provided with a reflector installation hole and an external thread; the external thread is in cooperation connection with the object lens installation hole on the object lens rack, and the axis of the reflector installation hole is superposed with the axis of the object lens installation hole; the reflector is installed inside the reflector installation hole and is perpendicular to the axis of the reflector installation hole; and the reflection surface of the reflector faces the external laser source; when the laser beam is utilized to be radiated on the reflection surface of the reflector, the reflection light determines whether the object lens rack is declined according to the theory that the reflection light returns along the same way, and the adjustment and verification are performed on the object lens rack in order to guarantee that no inclination angle exists between the object lens installation hole on the object lens installation rack and the laser beam center. As a result, the invention guarantees that no inclination exists between the object lens center and the laser beam center so as to guarantee higher imaging quality.

Description

A kind of tilt adjustments calibration equipment of microscope objective
Technical field
The present invention relates to microscopy field, particularly relate to the tilt adjustments calibration equipment of a kind of microscope objective.
Background technology
Microscopical amplification depends primarily on object lens, and object lens are by several lens combinations battery of lens. Object lens are as the most important optics of microscope, and direct relation and affect every optical technology parameter such as quality and resolution of imaging, is also the primary standard of one microscope quality of measurement. Along with the fast development of the technology of image quality, the raising of resolution requirement and various breakthrough optical diffraction limit, the solid leaching object lens of various high-NAs such as water logging, oil immersion and more high-NA arise at the historic moment. In the process of optical detection, if microscopical object lens inclining or deviation object lens center, light center, can cause that aberration increases, light gathering and numerical aperture is made to be difficult to abundant use, directly reduce the technical parameters such as the quality of imaging and resolution, even result in some method breaking through diffraction limit and lost efficacy. Therefore, it is necessary before detection that the objective carrier to installing object lens in microscope carries out tilt adjustments and verification, so that the center of object lens installing hole on objective carrier and light central coaxial, thus ensure center and the light central coaxial of object lens so that light does not deviate by object lens center.
But, in the market but without the tilt adjustments calibration equipment that may be used for high-NA microcobjective, when causing optical detection, it is impossible to accurately judge object lens whether run-off the straight, also just cannot ensure image quality.
Summary of the invention
(1) to solve the technical problem that
The technical problem to be solved in the present invention is that prior art lacks the tilt adjustments calibration equipment that may be used for high-NA microcobjective, the problem causing cannot accurately judging during optical detection object lens whether run-off the straight.
(2) technical scheme
In order to solve above-mentioned technical problem, the invention provides the tilt adjustments calibration equipment of a kind of microscope objective, tilt adjustments and verification for objective carrier, including: reflecting mirror and mirror support, mirror support is provided with reflecting mirror installing hole and external screw thread, external screw thread can be connected with the object lens installing hole on objective carrier, and makes the axis of reflecting mirror installing hole and the dead in line of object lens installing hole; Reflecting mirror is located in reflecting mirror installing hole and vertical with the axis of reflecting mirror installing hole, and the reflecting surface of reflecting mirror is towards external world's LASER Light Source.
According to the present invention, the reflecting surface of reflecting mirror is provided with several donut graduation marks centered by the center of reflecting surface, and reflecting surface is centrally located on the axis of reflecting mirror installing hole.
According to the present invention, the through mirror support of reflecting mirror installing hole.
According to the present invention, reflecting mirror is removably embedded at reflecting mirror installing hole.
According to the present invention, the hole wall of reflecting mirror installing hole offers tapped through hole, in tapped through hole, be provided with screw; The axis of the axis of tapped through hole and reflecting mirror installing hole intersects vertically, and the side of screw and reflecting mirror offsets.
According to the present invention, reflecting mirror installing hole is step through-hole, and step through-hole includes hole, big footpath and diameter holes, and reflecting mirror is located in hole, big footpath, and external screw thread is located at the outer surface of the hole wall of diameter holes.
(3) beneficial effect
The technique scheme of the present invention has the advantage that
(1) the tilt adjustments calibration equipment of the microscope objective of the present invention, can be connected with the object lens installing hole on objective carrier by the external screw thread on mirror support, and laser beam is mapped on the reflecting surface of reflecting mirror, when utilizing laser beam to impinge perpendicularly on the reflecting surface of reflecting mirror, by the principle of backtracking, reflection light will judge whether objective carrier tilts: if reflection light is by backtracking, then judge that objective carrier does not tilt; If reflection light is not by backtracking, then judge that objective carrier exists angle of inclination, tackle it and be adjusted verification, until reflection light is by backtracking. Thus achieve the accurate judgement that whether objective carrier is existed inclination, and it can be adjusted verification, ensure that on objective carrier, object lens installing hole relative laser beam center is absent from angle of inclination, thus ensureing to be absent between object lens center and laser beam center, and then ensure higher image quality, meet the demand that high-resolution and high imaging quality are grown with each passing day by optical detection.
(2) the tilt adjustments calibration equipment of the microscope objective of the present invention is provided with several donut graduation marks centered by the center of reflecting surface on the reflecting surface of reflecting mirror, and all of donut graduation mark is all centered by the axis of reflecting mirror installing hole, so that when laser light beam is on the reflecting surface of reflecting mirror, can observe intuitively and judge whether it penetrates the center in mirror reflection surface, thus can determine whether that the no center with laser beam, the center of object lens installing hole is in same axis, namely judge whether the center of object lens installing hole is directed at the center of laser beam: if laser light beam is in the center of mirror reflection surface, then judge that the center of object lens installing hole is directed at the center of laser beam, if laser beam does not penetrate the center in mirror reflection surface, then judge the center of object lens installing hole and the center misalignment of laser beam, objective carrier need to be adjusted, until laser light beam is in the center of mirror reflection surface. whether what be thus directed at the center of laser beam at the center achieving the object lens installing hole to objective carrier accurately judges and quickly regulates verification. the setting of several donut graduation marks, is conducive to finding accurately quickly and easily the center of mirror reflection surface on the one hand, consequently facilitating regulate, also help the quality to launching spot on the other hand to be analyzed.
(3) the tilt adjustments calibration equipment of the microscope objective of the present invention is by being removably embedded in reflecting mirror installing hole by reflecting mirror, this device can be realized and be arranged on objective carrier positive and negative two sides, therefore can according to the real space size of both sides before and after object lens in microscopic system, select to be arranged on this device the front or back of objective carrier, add its suitability.
Accompanying drawing explanation
Fig. 1 is the structural representation of the tilt adjustments calibration equipment of embodiment of the present invention microscope objective;
Fig. 2 is the tilt adjustments calibration equipment cross-sectional schematic longitudinally of the microscope objective shown in Fig. 1;
Fig. 3 is the tilt adjustments calibration equipment of the microscope objective shown in Fig. 1 schematic diagram when being arranged on objective carrier front;
Fig. 4 is the tilt adjustments calibration equipment of the microscope objective shown in Fig. 1 schematic diagram when being arranged on objective carrier reverse side;
Fig. 5 is the working state figure during existence inclination of microscopical objective carrier;
Working state schematic representation when Fig. 6 is that the tilt adjustments calibration equipment of the microscope objective shown in Fig. 1 is arranged on objective carrier front and objective carrier exists;
Working state schematic representation when Fig. 7 is that the tilt adjustments calibration equipment of the microscope objective shown in Fig. 1 is arranged on objective carrier reverse side and objective carrier exists.
In figure: 1: reflecting mirror; 2: mirror support; 20: reflecting mirror installing hole; 201: big hole, footpath; 202: diameter holes; 3: donut graduation mark; 4: tapped through hole; 40: female thread; 5: external screw thread; 6: objective carrier; 60: object lens installing hole; 7: lasing light emitter; 8: diaphragm; 9: object lens.
Detailed description of the invention
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is a part of embodiment of the present invention, rather than whole embodiments. Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the premise not making creative work, broadly fall into the scope of protection of the invention.
As shown in Figures 1 to 4, a kind of embodiment of the tilt adjustments calibration equipment of microscope objective of the present invention. The tilt adjustments calibration equipment of the microscope objective of the present embodiment can be used for tilt adjustments and the verification of objective carrier. As depicted in figs. 1 and 2, the tilt adjustments calibration equipment of the microscope objective of the present embodiment includes: reflecting mirror 1 and mirror support 2. Wherein, mirror support 2 is provided with reflecting mirror installing hole 20 and external screw thread 5, and external screw thread 5 is RMS type object lens screw thread, and external screw thread 5 can be connected with the object lens installing hole on objective carrier, and makes the axis of reflecting mirror installing hole 20 and the dead in line of object lens installing hole. The basic size of RMS type object lens screw thread is: the angle of rifling 55 ��, pitch 0.706mm, the high 0.678mm of basic triangle, nominal diameter 20.320mm, the external screw thread of mirror support 2 adopts RMS type object lens screw thread, both can be general with traditional fiber mirror holder, it is also possible in new-type cage construction microscope or other novel microscope. Reflecting mirror 1 is located in reflecting mirror installing hole 20 and vertical with the axis of reflecting mirror installing hole 20, and the reflecting surface of reflecting mirror 1 is towards external world's LASER Light Source. The reflecting surface of reflecting mirror 1 is provided with several donut graduation marks 3 centered by the center of reflecting surface, and reflecting surface is centrally located on the axis of reflecting mirror installing hole 20, and namely all of donut graduation mark 3 is all centered by the axis of reflecting mirror installing hole 20.
Preferably, as in figure 2 it is shown, the through mirror support 2 of the reflecting mirror installing hole 20 of the present embodiment, reflecting mirror installing hole 20 is set to step through-hole, and step through-hole includes hole, big footpath 201 and diameter holes 202. External screw thread 5 is located at the outer surface of the hole wall of diameter holes 202. Reflecting mirror 1 is removably embedded in hole, big footpath 201, particularly as follows: the hole wall in the hole, big footpath 201 of reflecting mirror installing hole 20 offers tapped through hole 4, the inwall of tapped through hole 4 is provided with female thread 40, the screw (not shown) being connected with female thread 40 it is provided with in tapped through hole 4, the axis of the axis of tapped through hole 4 and reflecting mirror installing hole 20 intersects vertically, and the side of screw and reflecting mirror 1 offsets, tighten screw can be fixed in hole, big footpath 201 by reflecting mirror 1, unscrew screw and then reflecting mirror 1 can be taken out in hole, big footpath 201. So that the installation and removal of reflecting mirror 1 are very convenient, thus convenient change reflecting mirror 1 reflecting surface towards. As shown in Figure 3, the mirror support 2 of the tilt adjustments calibration equipment of the microscope objective of the present embodiment may be mounted at the front of objective carrier 6, namely mirror support 2 is provided with the part of diameter holes 202 and inserts its object lens installing hole from the front of objective carrier 6, and be connected with object lens installing hole by external screw thread 5, now the reflecting surface of reflecting mirror 1 towards hole, big footpath 201 near one end of diameter holes 202 so that laser beam can be mapped on the reflecting surface of reflecting mirror 1. As shown in Figure 4, the mirror support 2 of the tilt adjustments calibration equipment of the microscope objective of the present embodiment can also be arranged on the reverse side of objective carrier 6, namely mirror support 2 is provided with the part of diameter holes 202 and inserts its object lens installing hole from the reverse side of objective carrier 6, and be connected with object lens installing hole by external screw thread 5, now the reflecting surface of reflecting mirror 1 towards hole, big footpath 201 one end away from diameter holes 202 so that laser beam can be mapped on the reflecting surface of reflecting mirror 1. Thus, the tilt adjustments calibration equipment of the microscope objective of the present embodiment is by being removably embedded in reflecting mirror installing hole 20 by reflecting mirror 1, this device can be realized and be arranged on objective carrier 6 positive and negative two sides, therefore can according to the real space size of both sides before and after object lens in microscopic system, select to be arranged on this device the front or back of objective carrier, add its suitability. It should be noted that the front of above-mentioned objective carrier 6 refers to that the face installing object lens on objective carrier 6, the reverse side of objective carrier 6 refer to the face that objective carrier 6 is relative with extraneous lasing light emitter, the front of objective carrier 6 is then opposing with the reverse side of objective carrier 6.
Fig. 5 illustrates that the duty of inclination conditions occur in microscope object lens in use, and object lens 9 are arranged in the object lens installing hole 60 of objective carrier 6, and the reverse side of objective carrier is relative with lasing light emitter 7, and the laser beam that lasing light emitter 7 is launched is mapped on object lens 9 through diaphragm 8. When objective carrier 6 run-off the straight makes object lens 9 tilt, the center of object lens 9 and the center of laser beam are deviateed, thus affecting image quality. The tilt adjustments calibration equipment of the above-mentioned microscope objective of this enforcement can whether run-off the straight judges and it is adjusted verification to objective carrier 6.
Fig. 6 and Fig. 7 illustrates that when the tilt adjustments calibration equipment of the microscope objective of the present embodiment is separately mounted to the obverse and reverse of objective carrier 6, the duty of inclination conditions occurs in objective carrier 6. as shown in Figure 6 and Figure 7, the tilt adjustments calibration equipment of the microscope objective of the present embodiment is in use, the external screw thread 5 that can pass through on mirror support 2 is connected with the object lens installing hole 60 on objective carrier 6, and the laser beam that lasing light emitter 7 is launched is mapped on the reflecting surface of reflecting mirror 1, when utilizing laser beam to impinge perpendicularly on the reflecting surface of reflecting mirror 1, by the principle of backtracking, reflection light will judge whether objective carrier tilts: if reflection light is by backtracking, then judge that objective carrier 6 does not tilt, if reflection light is not by backtracking, then judge that objective carrier 6 exists angle of inclination, tackle it and be adjusted verification, until reflection light is by backtracking. thus achieve the accurate judgement that whether objective carrier 6 is existed inclination, and it can be adjusted verification, ensure that on objective carrier 6, the center of object lens installing hole 60 relative laser light beam is absent from angle of inclination, thus ensureing to be absent between object lens center and laser beam center, and then ensure higher image quality, meet the demand that high-resolution and high imaging quality are grown with each passing day by optical detection. in addition, the tilt adjustments calibration equipment of the above-mentioned microscope objective of the present embodiment is provided with several donut graduation marks 3 centered by the center of reflecting surface on the reflecting surface of reflecting mirror 1, and all of donut graduation mark 3 is all centered by the axis of reflecting mirror installing hole 20, so that when laser light beam is on the reflecting surface of reflecting mirror 1, can observe and judge whether it penetrates in the center of reflecting mirror 1 reflecting surface intuitively, thus can determine whether that the no center with laser beam, the center of object lens installing hole 60 is in same axis, namely judge whether the center of object lens installing hole 60 is directed at the center of laser beam: if laser light beam is in the center of reflecting mirror 1 reflecting surface, then judge that the center of object lens installing hole 60 is directed at the center of laser beam, if laser beam does not penetrate the center at reflecting mirror 1 reflecting surface, then judge the center of object lens installing hole 60 and the center misalignment of laser beam, objective carrier 6 need to be adjusted, until laser light beam is in the center of reflecting mirror 1 reflecting surface. whether what be thus directed at the center of laser beam at the center achieving the object lens installing hole 60 to objective carrier 6 accurately judges and quickly regulates verification. the setting of several donut graduation marks 3, is conducive to finding accurately quickly and easily the center of reflecting mirror 1 reflecting surface on the one hand, consequently facilitating regulate, also help the quality to launching spot on the other hand to be analyzed. to the gradient of object lens installing hole 60 relative laser beam center on objective carrier 6 and center thereof and laser beam center be directed at adjustment verification after, namely it is unloaded down by rotatable mirror support 2 from object lens installing hole 60, then is installed in object lens installing hole 60 to detect by object lens 9.
The tilt adjustments calibration equipment of the microscope objective of the present embodiment is applicable to alignment and the tilt adjustments verification of all kinds of microscope objectives, is particularly suited for alignment and the tilt adjustments verification of high-NA microscope objective. By the adjustment of object lens is verified, can guarantee that its center is directed at the center of laser beam and coaxial, thus reducing aberration, ensure that the effective numerical aperture of microscopic system reaches maximum, improve the definition of the resolution of microscope objective and imaging, ensure that some extremely rely on the enforcement of the technology such as the super-resolution rate microtechnique such as surface plasma in system value aperture is micro-simultaneously.
Last it is noted that above example is only in order to illustrate technical scheme, it is not intended to limit; Although the present invention being described in detail with reference to previous embodiment, it will be understood by those within the art that: the technical scheme described in foregoing embodiments still can be modified by it, or wherein portion of techniques feature is carried out equivalent replacement; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.

Claims (6)

1. the tilt adjustments calibration equipment of a microscope objective, tilt adjustments and verification for objective carrier, it is characterized in that, including: reflecting mirror (1) and mirror support (2), described mirror support (2) is provided with reflecting mirror installing hole (20) and external screw thread (5), described external screw thread (5) can be connected with the object lens installing hole (60) on described objective carrier (6), and makes the axis of described reflecting mirror installing hole (20) and the dead in line of described object lens installing hole (60); Described reflecting mirror (1) is located in described reflecting mirror installing hole (20) and vertical with the axis of described reflecting mirror installing hole (20), and the reflecting surface of described reflecting mirror (1) is towards external world's LASER Light Source.
2. the tilt adjustments calibration equipment of microscope objective according to claim 1, it is characterized in that, the reflecting surface of described reflecting mirror (1) is provided with several donuts graduation mark (3) centered by the center of described reflecting surface, and described reflecting surface is centrally located on the axis of described reflecting mirror installing hole (20).
3. the tilt adjustments calibration equipment of microscope objective according to claim 1, it is characterised in that the through described mirror support (2) of described reflecting mirror installing hole (20).
4. the tilt adjustments calibration equipment of microscope objective according to claim 3, it is characterised in that described reflecting mirror (1) is removably embedded at described reflecting mirror installing hole (20).
5. the tilt adjustments calibration equipment of microscope objective according to claim 4, it is characterized in that, offering tapped through hole (4) on the hole wall of described reflecting mirror installing hole (20), described tapped through hole is provided with screw in (4); The axis of the axis of described tapped through hole (4) and described reflecting mirror installing hole (20) intersects vertically, and the side of described screw and described reflecting mirror (1) offsets.
6. the tilt adjustments calibration equipment of microscope objective according to claim 3, it is characterized in that, described reflecting mirror installing hole (20) is step through-hole, described step through-hole includes hole, big footpath (201) and diameter holes (202), described reflecting mirror (1) is located in hole, described big footpath (201), and described external screw thread (5) is located at the outer surface of the hole wall of described diameter holes (202).
CN201610028617.3A 2016-01-15 2016-01-15 Inclination adjustment verification device for microscope object lens Pending CN105629420A (en)

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Application Number Priority Date Filing Date Title
CN201610028617.3A CN105629420A (en) 2016-01-15 2016-01-15 Inclination adjustment verification device for microscope object lens

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Application Number Priority Date Filing Date Title
CN201610028617.3A CN105629420A (en) 2016-01-15 2016-01-15 Inclination adjustment verification device for microscope object lens

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CN105629420A true CN105629420A (en) 2016-06-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111381353A (en) * 2018-12-28 2020-07-07 致茂电子(苏州)有限公司 Separated microscope system and its regulating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018920A (en) * 2012-12-20 2013-04-03 江苏康莱特科技有限公司 Method for reflectively adjusting optical-mechanical coaxiality of optical fiber collimator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103018920A (en) * 2012-12-20 2013-04-03 江苏康莱特科技有限公司 Method for reflectively adjusting optical-mechanical coaxiality of optical fiber collimator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111381353A (en) * 2018-12-28 2020-07-07 致茂电子(苏州)有限公司 Separated microscope system and its regulating method

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Application publication date: 20160601