CN105628196B - A kind of ultraviolet focal-plane array response characteristic test device and method - Google Patents
A kind of ultraviolet focal-plane array response characteristic test device and method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
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Abstract
The present invention proposes a kind of ultraviolet focal-plane array response characteristic measuring device, including：The ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser import integrating sphere, beam expanding lens, standard detector, two-dimension translational platform, fixed platform, shading camera bellows, light source, laser power stabilizing system, cooling system；The delivery outlet that the ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser import integrating sphere is connected on shading camera bellows by the perforate of shading camera bellows；The fixed platform of two-dimension translational platform and detector is placed in shading camera bellows；Light source 1 corresponds to the ultraviolet integrating sphere of continuous spectrum, is lighted jointly using deuterium lamp and ultraviolet LED；Light source 2 corresponds to monochromatic LED integrating sphere, is lighted using monochromatic ultraviolet LED；Laser imports integrating sphere and uses ultraviolet laser light source, and is imported by entering laser after laser power stability system in integrating sphere.
Description
Technical field
The present invention relates to technical field of measurement and test, more particularly to a kind of ultraviolet focal-plane array response characteristic test device, also
It is related to a kind of ultraviolet focal-plane array response characteristic test method.
Background technology
Current photoelectron technology, wavelength has been had been extended in 10nm-400nm UV light region.At the same time, it is purple
External detector and correlation technique have also obtained rapid development.At dual-use aspect, ultraviolet detection technology has very high
Application value.In military affairs, ultraviolet detection technology can apply to the fields such as missile guidance, missile warning, Ultraviolet Communication；It is civilian
On, ultraviolet detection technology can apply to the neck such as combustion enginnering, the ultraviolet measurement in ultraviolet purifying water process, flame detecting
Domain.
By development for many years, ultraviolet detector has developed into the focal plane arrays (FPA) of array type from single-element detector
(FPA).It is contemplated that in current and following acquisition of information field, ultraviolet focal-plane array will play the part of more and more important angle
Color.The calibration of all too busy to get away ultraviolet focal-plane array characteristics parameter of development, production, detection and application of ultraviolet focal-plane array/
Test.Each characterisitic parameter of accurate measurement ultraviolet focal-plane array, it is the premise of accurate evaluation focal plane array device performance,
Guidance is provided for material selection, process modification, compensation data, Optical System Design, image procossing, while is also to infer ultraviolet force
The important evidence of device equipment Efficacy.Therefore, ultraviolet focal-plane array device performance parameter calibration/test manufactures and designs for device
All there is very important directive significance for person, imaging equipment system design producer and device user.
The response characteristic of ultraviolet focal-plane array is one of its most basic parameter, and existing apparatus is made using xenon lamp or deuterium lamp
For light source, by producing monochromatic light after monochromator, it is non-homogeneous to shine directly into progress noise, responsiveness on ultraviolet focal-plane array
The test of the parameters such as property, relative spectral response.The program is approximately uniform light the output light of monochromator slit, one side light source
Uniformity it is not high enough, cause measurement result precision low, have larger error；Luminous power of deuterium lamp light source itself is weaker simultaneously,
It can be brought some inconvenience to test.
In addition, also have using the scheme of parallel light tube to obtain face battle array uniform source of light, but this scheme is still present uniformly
The shortcomings that property is not high enough, and device used can only be often tested specific device.Meanwhile for responsiveness etc.
Parameter, there has been no the test device to the parameter at present.
It is relatively common at present still without the test device of ultraviolet focal-plane array monochrome responsiveness parameter from the point of view of to sum up
It is the test of nonuniformity parameter, test parameter is more single；And existing apparatus is often just for specific response wave band, spy
Determine the device of array scale, applicability is not strong
The content of the invention
To solve above-mentioned the deficiencies in the prior art, the present invention proposes a kind of ultraviolet focal-plane array response characteristic test dress
Put and method.
The technical proposal of the invention is realized in this way：
A kind of ultraviolet focal-plane array response characteristic measuring device, including：The ultraviolet integrating sphere of continuous spectrum, monochromatic LED integration
Ball, laser importing integrating sphere, beam expanding lens, standard detector, two-dimension translational platform, fixed platform, shading camera bellows, light source, laser are steady
Power system, cooling system；
The ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser import delivery outlet the opening by shading camera bellows of integrating sphere
Hole is connected on shading camera bellows, wherein, the ultraviolet integrating sphere of continuous spectrum and shading camera bellows are joined directly together, monochromatic LED integrating sphere, laser
Integrating sphere is imported by being connected after beam expanding lens with shading camera bellows；
The fixed platform of two-dimension translational platform and detector is placed in shading camera bellows；
Light source 1 corresponds to the ultraviolet integrating sphere of continuous spectrum, is lighted jointly using deuterium lamp and ultraviolet LED；Light source 2 corresponds to monochrome
LED integrating spheres, lighted using monochromatic ultraviolet LED；Laser imports integrating sphere and uses ultraviolet laser light source, and passes through laser power
Laser is entered after systems stabilisation to import in integrating sphere.
The ultraviolet focal-plane array response characteristic measuring device of the present invention, in addition to stability supervision equipment, in continuous spectrum
Ultraviolet integrating sphere, monochromatic LED integrating sphere, laser import above integrating sphere and have been respectively arranged monitoring photodiode detector, light
Electric diode detector converts optical signals into current signal, is converted to voltage signal by I/V converter, computer passes through
USB interface remote control data capture card, measurement voltage signal realize the monitoring of ultraviolet integrating sphere reference light source radiation characteristic.
Alternatively, the light source 2 is LED luminescence units, there is two kinds：One of which peak wavelength is 365nm, its luminous power
Reach 900mW；Another peak wavelength is 280nm, and its luminous power reaches 90mW；To 365nm wavelength points and 280nm wavelength points
Carry out responsiveness demarcation.
Alternatively, the beam expanding lens f/# is designed as 2.5, and light-emitting window intended diameter is 50mm, and beam expanding lens focal length is 250mm,
The angle of divergence of light source is about 2.86 °.
Alternatively, the laser is imported integrating sphere and speckle caused by laser is removed using ball internal rotation diffusing panel,
The speculum that outside laser is imported below integrating sphere by laser imported into the diffusing reflection plate that laser is imported inside integrating sphere
On, speculum is arranged on three-dimensional platform；Imported in laser on integrating sphere and DC micromotor is installed, the rotation of motor driven diffusing panel
Turn, outside laser light incident drives diffusing panel to rotate on rotating diffuser plate, with stepper motor, and the speed of pulse is sent by controlling
Adjust the rotating speed of diffusing panel.
Alternatively, the radiating of the deuterium lamp passes through the air-cooled realization of radiator fan, the ultraviolet integrating sphere of continuous spectrum and monochromatic LED product
The LED luminescence units installed on bulb separation are freezed by temperature control.
Alternatively, radiating temperature control is carried out using compression mechanism water-cooling pattern, recirculated water entered refrigeration temperature control in cooling-water machine
Output, passes sequentially through LED luminescence unit radiating subassemblies, finally returns to inside cooling-water machine and carries out cooling down temperature control processing, forms temperature control
Closed loop.
Alternatively, LED is connected on copper base directly against welding equipment, and copper-based back smears high-cooling property silicone grease, is then pressed
On water-cooled block, the snakelike tank of water-cooled block medium design.
Alternatively, the shading camera bellows front end is provided with three integrating spheres and enters light perforate, and casing is integrally using two halves, oblique folding
Structure, metal hinge connected mode；There is generous perforate casing both sides, in order to the operation and observation of side, using translation side door
Mode, please side door is closed during measurement, there be the perforate of cable outlet side, also has cover plate to block perforate.
Based on said apparatus, present invention also offers a kind of ultraviolet focal-plane array response characteristic measurement method, actual work
When making, tested detector or standard detector are placed on the support of two-dimension translational platform, and keep one with integrating sphere delivery outlet
Set a distance；Displacement platform is adjusted, makes the delivery outlet of detector face integrating sphere；When carrying out the measurement of responsiveness parameter, detector
It is placed on monochromatic LED integrating sphere or laser imports the front of integrating sphere；Integrating sphere emergent light by standard detector and is tested respectively
After detector receives, test data is sent to computer；When carrying out responsiveness heterogeneity, noise parameter measurement, it is tested
Detector is placed on immediately ahead of the ultraviolet integrating sphere of continuous spectrum, after integrating sphere emergent light is received by tested detector, by test data
It is sent to computer.
The beneficial effects of the invention are as follows：
(1) measurement parameter is complete, the wide coverage of test：Can be to ultraviolet focal-plane array monochrome responsiveness, responsiveness
The parameters such as heterogeneity, noise are tested；LED light source and laser are used cooperatively simultaneously, there is provided the monochrome of multi-wavelength
Light source, disclosure satisfy that different type, different response wave bands detector test；The larger output bore of integrating sphere can also meet
The measurement of large area array ultraviolet focal-plane array；
(2) measurement accuracy is high：Using integration sphere light source system provide uniform UV light radiation, while the use of beam expander and rationally
Structure design, the heterogeneity of light source is reached within 1%；Laser adds Ultra-Violet Laser power before importing integrating sphere
Systems stabilisation, it can more improve the uniformity and stability of light source；
(3) stability is good：Refrigeration temperature control system is devised for integrating sphere light source, while in order to further monitor ultraviolet integration
The radiation characteristic of ball reference light source, devises stability monitoring system, can so ensure that measurement apparatus has higher stability；
(4) it is easy to operate.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is ultraviolet focal-plane array response characteristic measuring device schematic diagram of the present invention；
Fig. 2 is monochromatic LED integrating sphere schematic diagram.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In the development, production and application process of ultraviolet focal-plane array, ultraviolet focal-plane array characteristics ginseng is all be unable to do without
Several tests.Each characterisitic parameter of accurate measurement ultraviolet focal-plane array, is accurate evaluation focal plane array device performance
Premise.The response characteristic of ultraviolet focal-plane array is one of its most basic parameter, currently for ultraviolet focal-plane array response
The shortcomings of test generally existing measurement accuracy of characteristic is low, measurement parameter is single, applicable surface is narrow.
For above-mentioned problem, the present invention provides a kind of ultraviolet focal-plane array response characteristic measuring device and side
Method, measured parameter include monochromatic responsiveness, responsiveness heterogeneity, noise etc..Different ultraviolet face battle arrays is provided using integrating sphere
Uniform source of light, tested with the response characteristic to ultraviolet focal-plane array.Apparatus structure provided by the invention is simple, can be right
The performance parameter of ultraviolet detector is accurately measured, and is provided help for the development and production of ultraviolet focal-plane array, is improved detection
The Development Level of device simultaneously ensures that ultraviolet focal-plane array parameter value is unified.
As shown in figure 1, the ultraviolet focal-plane array response characteristic measuring device of the present invention mainly includes：The ultraviolet product of continuous spectrum
Bulb separation, monochromatic LED integrating sphere, laser import integrating sphere, beam expanding lens, standard detector, two-dimension translational platform, fixed platform, shading
Camera bellows, light source, laser power stabilizing system, cooling system and stability supervision equipment.
In the present invention, the delivery outlet that the ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser import integrating sphere passes through screening
The perforate of brightness case is connected on shading camera bellows, and wherein the ultraviolet integrating sphere of continuous spectrum and shading camera bellows are joined directly together, monochromatic LED product
Bulb separation, laser import integrating sphere by being connected after beam expanding lens with shading camera bellows.
The fixed platform of two-dimension translational platform and detector is placed in camera bellows, one of two-dimension translational platform mainly realizes monochrome
The measurement of the parameters such as responsiveness, therefore it is also equipped with standard detector.
Each integrating sphere is equipped with different light sources, and wherein light source 1 corresponds to the ultraviolet integrating sphere of continuous spectrum, using deuterium lamp and
Ultraviolet LED lights jointly；Light source 2 corresponds to monochromatic LED integrating sphere, is lighted using monochromatic ultraviolet LED；Laser imports integrating sphere and adopted
With ultraviolet laser light source, and by being entered after laser power stability system in integrating sphere.
During real work, tested detector or standard detector are placed on the support of two-dimension translational platform, and and integration
Ball delivery outlet keeps certain distance；Displacement platform is adjusted, makes the delivery outlet of detector face integrating sphere；When parameters such as progress responsivenesses
Measurement when, detector is placed on the front that LED integrating spheres or laser import integrating sphere, is specifically depended on from which integrating sphere
Calibrate wavelength points；After integrating sphere emergent light is received by standard detector and tested detector respectively, test data is sent to meter
Calculation machine；When carrying out the parameter measurements such as responsiveness heterogeneity, noise, before tested detector is placed on continuous spectrum integrating sphere just
Side, after integrating sphere emergent light is received by tested detector, test data is sent to computer.
The ultraviolet integrating sphere of continuous spectrum, which aims to provide, meets CCD responses, dynamic range adjustment and uniformity measurement requirement, internal
Diameter design is Φ 280mm, and output bore is designed as Φ 90mm, and aperture efficiency is about 3.6%.Its light source 1 is made up of two parts, point
Not Wei LED luminescence units and deuterium lamp luminescence unit, the use of two luminescence units ensure that integrating sphere light-emitting window can provide enough
Light energy.
Monochromatic LED irradiation level integrating sphere mainly provides monochromatic uniform source of light, to meet ultraviolet detector monochrome responsiveness
Test.Its light source 2 is LED luminescence units, there is two kinds：One of which peak wavelength is 365nm, and its luminous power reaches 900mW；Separately
A kind of outer peak wavelength is 280nm, and its luminous power reaches 90mW；365nm wavelength points and 280nm wavelength points can be responded
Rate is demarcated.Monochromatic LED irradiation level integrating sphere inside diameter is designed as Φ 100mm, and output bore is designed as Φ 10mm, by adjusting
The aperture efficiency of integrating sphere is about 4.1%, ensures that the uniformity at integrating sphere light-emitting window is better than 99%.Accumulated in monochromatic LED irradiation level
Increase beam expanding lens system at bulb separation light-emitting window, illuminated as shown in Fig. 2 so designing to improve output illuminance uniformity and reduce
Measurement of the distance on ultraviolet detector influences, while can reduce the bore of integrating sphere, improves the efficiency of light energy utilization.
Beam expanding lens f/# is designed as 2.5, and light-emitting window intended diameter is 50mm, with ensure Uniform Illumination area reach 25mm ×
25mm.Beam expanding lens system focal length is 250mm, and the angle of divergence of light source is about 2.86 °.
Laser importing integrating sphere optical design method is identical with LED irradiation level integrating spheres, and its inside diameter is designed as Φ
100mm, output bore are designed as Φ 10mm, and the beam expanding lens system optical parametric of design is also completely the same.Light source 3 is Ultra-Violet Laser
Device, imported through ultraviolet steady power system in integrating sphere, there is provided stabilization, monochromaticjty, uniform monochromatic light.Laser import integrating sphere and
Monochromatic LED integrating sphere is used cooperatively, and can multiple wavelength points be carried out with the demarcation of monochromatic responsiveness.
Laser imports in the design of integrating sphere and also speckle caused by laser is gone with ball internal rotation diffusing panel method
Remove, outside laser is imported on the diffusing reflection plate inside integrating sphere by a speculum below integrating sphere, speculum installation
On three-dimensional fine-tuning platform.DC micromotor, the rotation of motor driven diffusing panel are installed on integrating sphere, outside laser enters
Penetrate on rotating diffuser plate, drive diffusing panel to rotate with stepper motor, the speed that pulse is sent by controlling adjusts diffusing panel
Rotating speed.
The radiating of deuterium lamp luminescence unit passes through the air-cooled realization of radiator fan, the ultraviolet integrating sphere of continuous spectrum and monochromatic LED integration
The LED luminescence units installed on ball are required to temperature control refrigeration.Radiating temperature control is carried out using compression mechanism water-cooling pattern herein, circulated
Water entered refrigeration temperature control output in cooling-water machine, passes sequentially through 8 LED luminescence unit radiating subassemblies, finally returns in cooling-water machine
Face carries out cooling down temperature control processing, forms temperature control closed loop, the refrigeration temperature control precision of cooling-water machine is ± 0.2 DEG C.
In structure design, great power LED is connected on copper base directly against welding equipment, and copper-based back smears high-cooling property silicon
Fat, then it is fitted in above water-cooled block.
The snakelike tank of water-cooled block medium design, to increase the increase heat exchange of effective contact area of current and metal sink
Amount, circulating water take away heat.The advantages of this refrigeration modes is that heat dissipation capacity is big, and accuracy of temperature control is high.
In order to further monitor the radiation characteristic of ultraviolet integrating sphere reference light source, stability monitoring system is devised.Exist
The ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser, which are imported above integrating sphere, has been respectively arranged the detection of monitoring photodiode
Device.Photodiode detector converts optical signals into current signal, and voltage signal is converted to by I/V converter.Master control electricity
For brain by USB interface remote control data capture card, measurement voltage signal realizes ultraviolet integrating sphere reference light source radiation characteristic
Monitoring.
Shading camera bellows, which is used for optical precision in optical laboratory, to be tested, and has totally-enclosed, full inwall blacking, good shading
The characteristic such as effect, simplicity operation, improves laboratory UV CCD detections, the dark room conditions condition of light radiation Characteristics Detection.Casing
The optical table that monnolithic case size is more than L600 × H600 × W1100mm, and width 1200mm matches, and camera bellows front end is provided with
Three integrating spheres enter light perforate, and with the function that can be closed when not in use；Casing integrally using two halves, oblique opening-closing structure,
Installation fixing hole is arranged at metal hinge connected mode, casing main part bottom, can be with the installation of standard hole pitch on optical table
Hole is fixed；Folding can be facilitated equipped with handle on case lid, when lid is opened, case lid is the top for being in casing, such rear end
Open wide very greatly, this is the benefit of oblique subdivision, has the purposes that the installation of more convenient internal optical is fixed and adjusts；Casing is whole
Body shares four handles, to facilitate the carrying of casing and placement；There is generous perforate casing both sides, in order to side operation and
Observation, please side door being closed by the way of side door is translated, during measurement, there be the perforate of cable outlet side,
There is cover plate to block perforate.
The present invention imports three different products such as integrating sphere using the ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser
Sub-earth system, on the one hand can avoid sharing perforate excessive inside caused integrating sphere, ensure integrating sphere uniformity and
Power output, it is ensured that ultraviolet detector obtains enough signal to noise ratio；On the other hand integrating sphere is separated, then can the company of offer
It is continuous to compose a variety of monochromatic uniforms source of light such as ultraviolet uniform source of light and 266nm, 280nm, 365nm, different type, different sound can be met
Answer the test of band detector parameter.
Its light source of the ultraviolet integrating sphere of continuous spectrum is made up of two parts, respectively LED luminescence units and deuterium lamp luminescence unit, and two
The use of individual luminescence unit ensure that integrating sphere light-emitting window can provide enough light energies, and the big bore that exports disclosure satisfy that large area array
The nonuniform measurement of ultraviolet focal-plane array.
Uniformity at monochromatic LED integrating sphere light-emitting window is better than 99%, and increases beam expanding lens at integrating sphere light-emitting window
System, improving output illuminance uniformity and reducing measurement of the illumination distances on ultraviolet detector influences, while can reduce integration
The bore of ball, improve the efficiency of light energy utilization.
Between 266nm lasers and laser import integrating sphere, laser power stability system is added, can be swashed ultraviolet
Radiant power stability makes laser facula have more preferable uniformity and stability, improves the survey to detector 8/10000ths
Accuracy of measurement.
The light source of integrating sphere combines refrigeration using radiator fan is air-cooled with compression mechanism water-cooling pattern, and wherein deuterium lamp is luminous single
The radiating of member passes through the air-cooled realization of radiator fan；LED luminescence units carry out radiating temperature control, cold water using compression mechanism water-cooling pattern
The refrigeration temperature control precision of machine is ± 0.2 DEG C.
Great power LED is connected on copper base directly against welding equipment, and copper-based back smears high-cooling property silicone grease, is then fitted in
Above water-cooled block.The snakelike tank of water-cooled block medium design, handed over increasing effective contact area of current and metal sink increase heat
The amount of changing, circulating water take away heat, and heat dissipation capacity is big, and accuracy of temperature control is high.
The present invention have also been devised stability monitoring system, eliminate the adverse effect that ultraviolet source power swing is brought as far as possible.
The shading camera bellows of the present invention is totally-enclosed, full inwall blacking design, and casing is integrally using two halves, oblique opening-closing structure, gold
Belong to hinge connecting mode, when lid is opened, case lid is the top in casing, and such rear end open is very big, is more convenient internal
The installation fixation and adjustment of optical module.Casing both sides carry out perforate by the way of side door is translated, in order to the operation of side
And observation.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God any modification, equivalent substitution and improvements made etc., should be included in the scope of the protection with principle.
Claims (10)
- A kind of 1. ultraviolet focal-plane array response characteristic measuring device, it is characterised in that including：The ultraviolet integrating sphere of continuous spectrum, list Color LED integrating spheres, laser import integrating sphere, beam expanding lens, standard detector, two-dimension translational platform, fixed platform, shading camera bellows, light Source, laser power stabilizing system, cooling system；The delivery outlet that the ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser import integrating sphere is connected by the perforate of shading camera bellows It is connected on shading camera bellows, wherein, the ultraviolet integrating sphere of continuous spectrum and shading camera bellows are joined directly together, and monochromatic LED integrating sphere, laser import Integrating sphere after beam expanding lens with shading camera bellows by being connected；The fixed platform of two-dimension translational platform and detector is placed in shading camera bellows；Light source（ 1）Corresponding to the ultraviolet integrating sphere of continuous spectrum, lighted jointly using deuterium lamp and ultraviolet LED；Light source（ 2）Correspond to Monochromatic LED integrating sphere, lighted using monochromatic ultraviolet LED；Laser imports integrating sphere and uses ultraviolet laser light source, and passes through laser Laser is entered after power stablizing system to import in integrating sphere.
- 2. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that also including stability Supervision equipment, imported in the ultraviolet integrating sphere of continuous spectrum, monochromatic LED integrating sphere, laser above integrating sphere and be respectively arranged monitoring light Electric diode detector, photodiode detector convert optical signals into current signal, and electricity is converted to by I/V converter Signal is pressed, for computer by USB interface remote control data capture card, measurement voltage signal realizes ultraviolet integrating sphere reference light source The monitoring of radiation characteristic.
- 3. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that the light source（ 2） For LED luminescence units, there are two kinds：One of which peak wavelength is 365nm, and its luminous power reaches 900mW；Another peak value ripple A length of 280nm, its luminous power reach 90mW；Responsiveness demarcation is carried out to 365nm wavelength points and 280nm wavelength points.
- 4. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that the beam expanding lens F/# is designed as 2.5, and light-emitting window intended diameter is 50mm, and beam expanding lens focal length is 250mm, and the angle of divergence of light source is about 2.86 °.
- 5. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that the laser imports Integrating sphere is removed using ball internal rotation diffusing panel to speckle caused by laser, and outside laser is imported under integrating sphere by laser One speculum of side imported into laser and imported on the rotating diffuser plate inside integrating sphere, and speculum is arranged on three-dimensional platform； Imported in laser on integrating sphere and DC micromotor is installed, DC micromotor drives diffusing panel rotation, and DC micromotor is Stepper motor, the speed that pulse is sent by controlling adjust the rotating speed of diffusing panel.
- 6. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that the deuterium lamp dissipates By the air-cooled realization of radiator fan, the LED luminescence units installed on the ultraviolet integrating sphere of continuous spectrum and monochromatic LED integrating sphere pass through heat Temperature control is freezed.
- 7. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 6, it is characterised in that using compression mechanism Water-cooling pattern carries out radiating temperature control, and recirculated water exports after cooling-water machine back warp crosses refrigeration temperature control, passes sequentially through LED luminescence units and dissipates Hot component, finally return to inside cooling-water machine and carry out cooling down temperature control processing, form temperature control closed loop.
- 8. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 7, it is characterised in that LED is directly mounted It is welded on copper base, copper-based back smears high-cooling property silicone grease, is then fitted in above water-cooled block, water-cooled block medium design Snakelike tank.
- 9. ultraviolet focal-plane array response characteristic measuring device as claimed in claim 1, it is characterised in that the shading camera bellows Front end is provided with three integrating spheres and enters light perforate, and casing is integrally using two halves, oblique opening-closing structure, metal hinge connected mode；Casing There is generous perforate both sides, in order to the operation and observation of side, block generous perforate by the way of side door is translated, side during measurement Door is closed, and blocks generous perforate, there be the perforate of cable outlet side, also has cover plate to block perforate.
- 10. based on the ultraviolet focal-plane array response characteristic measurement method of any one of claim 1 to 9 measurement apparatus, its It is characterised by,During real work, tested detector or standard detector are placed on the support of two-dimension translational platform, and defeated with integrating sphere Outlet keeps certain distance；Two-dimension translational platform is adjusted, makes the delivery outlet of detector face integrating sphere；When progress responsiveness parameter During measurement, detector is placed on monochromatic LED integrating sphere or laser imports the front of integrating sphere；Integrating sphere emergent light is respectively by standard After detector and tested detector receive, test data is sent to computer；When progress responsiveness heterogeneity, noise parameter During measurement, tested detector is placed on immediately ahead of the ultraviolet integrating sphere of continuous spectrum, after integrating sphere emergent light is received by tested detector, Test data is sent to computer.
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| CN106501702B (en) * | 2016-12-31 | 2023-08-01 | 上海复展智能科技股份有限公司 | Vacuum ultraviolet LED junction temperature and radiation measurement system based on integrating sphere |
| US10455779B2 (en) * | 2017-07-24 | 2019-10-29 | Osram Sylvania Inc. | Irradiance-controlled fixture for horticultural applications |
| CN108981911A (en) * | 2018-08-01 | 2018-12-11 | 合肥中科九衡科技有限公司 | Optical measuring system based on integrating sphere |
| CN109323851B (en) * | 2018-11-15 | 2020-08-11 | 中国电子科技集团公司第四十一研究所 | Terahertz focal plane response rate and response rate nonuniformity test system and method |
| CN110895167A (en) * | 2019-11-15 | 2020-03-20 | 中山大学 | Switch response calibration system and test method of vacuum ultraviolet light detector |
| CN110926762B (en) * | 2019-11-22 | 2021-08-27 | 国网浙江省电力有限公司电力科学研究院 | System and method for detecting out-of-band inhibition capability of ultraviolet imager |
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| CN101915612B (en) * | 2010-08-05 | 2012-07-04 | 中国兵器工业第二〇五研究所 | Ultraviolet radiation comprehensive test device |
| CN102735628A (en) * | 2012-06-21 | 2012-10-17 | 南京邮电大学 | Real-time dynamic absorption spectrum test method |
| CN103712777B (en) * | 2014-01-09 | 2016-03-02 | 西安电子科技大学 | Detect device and the detection method of ultraviolet light photo imaging system performance parameter |
| CN204554451U (en) * | 2015-04-16 | 2015-08-12 | 中国电子科技集团公司第四十一研究所 | A kind of day blind ultraviolet uniform source of light |
| CN104990688A (en) * | 2015-06-29 | 2015-10-21 | 南京理工大学 | Double-light-path image intensifier signal to noise ratio testing device |
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