CN105626488B - The linear valve piezoelectric pump of sine and cosine - Google Patents
The linear valve piezoelectric pump of sine and cosine Download PDFInfo
- Publication number
- CN105626488B CN105626488B CN201610024674.4A CN201610024674A CN105626488B CN 105626488 B CN105626488 B CN 105626488B CN 201610024674 A CN201610024674 A CN 201610024674A CN 105626488 B CN105626488 B CN 105626488B
- Authority
- CN
- China
- Prior art keywords
- valve
- pump
- cosine
- sine
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 claims abstract description 14
- 230000008676 import Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 238000010276 construction Methods 0.000 abstract description 3
- 238000009434 installation Methods 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 description 17
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012858 resilient material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/108—Valves characterised by the material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The present invention relates to a kind of linear valve piezoelectric pump of sine and cosine, including piezoelectric vibrator（1）, pump cover（2）, valve seat（3）, screw（4）, pump seat（6）, sealing ring（7）, sealing ring（8）, screw（9）, the pump seat（6）Top is provided with pump cover（2）, pump seat（6）Upper end is valve seat（3）, valve seat（3）With pump seat（6）Between be provided with sealing ring（7）, valve seat（3）With pump cover（2）Between be provided with sealing ring（8）, valve seat（3）Top is provided with piezoelectric vibrator（1）, the piezoelectric vibrator（1）Located at valve seat（3）And pump cover（2）Between, the piezoelectric vibrator（1）With pump cover（2）, valve seat（3）And pump seat（6）Between pass through screw（9）It is fixedly connected, in valve seat（3）Inlet and outlet pass through screw（4）A pair of mutual inverted linear check valves of sine and cosine (5) are separately installed with, have that efficiency high, flow be big, simple in construction, easy for installation, low cost and other advantages.
Description
Technical field
The present invention relates to the linear valve piezoelectric pump of sine and cosine, belong to field of fluid machinery.
Background technology
Pump is trandfer fluid or the machinery for transmitting energy.Traditional pump is usually to be driven by motor.It is no matter resonable
By in upper, design method or manufacturing technology, very perfect degree is reached.But limited by operation principle and structure, such as needed
Additional drives motor is wanted, then volume is larger, by electromagnetic interference, is difficult to control tiny flow quantity, thus is difficult to meet that current aerospace navigates
Its device, robot, automobile, medicine equipment, biological gene engineering, the application demand of micromachine.
Piezoelectric pump is a kind of novel fluid driver.It does not need additional drives motor, but utilizes the inverse of piezoelectric ceramics
Piezo-electric effect is deformed piezoelectric vibrator, then realizes fluid output by the volume change of deformation generation pump chamber or utilize piezoelectricity
Oscillator produces fluctuation to transmit liquid.
Piezoelectric pump has the characteristics of not available for conventional pump, can be by driving source part, running part and the pump housing of conventional pump
Three is integrated, and simple in construction, small volume, in light weight, the low, noiseless that consumes energy can be achieved, without electromagnetic interference, can be according to application
Voltage or FREQUENCY CONTROL output tiny flow quantity.History of the invention with development only more than 30 year that let it be to the greatest extent, in above-mentioned field
The application succeeded.
The species of piezoelectric pump is various, and form is different, is classified according to different criteria for classifications different.It can divide from the presence or absence of valve body
To have valve piezoelectric pump and Valveless piezoelectric pump；Can be divided into from the type of drive of valve body opening and closing active has valve piezoelectric pump and passive type to have
Valve piezoelectric pump.There is the inlet and outlet that valve piezoelectric pump is often referred to be separately mounted to pump by a pair of mutual inverted check valves, use
In the flow direction of control fluid.The opening and closing of the active valve body for having a valve piezoelectric pump needs to be controlled with additional driving power and control device
The unlatching of valve body processed, add the design, installation and controlling unit of piezoelectric pump.Passive type has valve piezoelectric pump to refer to valve in piezoelectric pump
The opening and closing of body is that the periodically variable pressure of pump chamber in the work period by piezoelectric pump opens and closes valve body, so as to realizing
The effect of pump.
So far, there is valve piezoelectric pump to invent many structure types, have been obtained for being widely applied.There is valve piezoelectric pump
Function mainly realize that therefore, the structure of check valve has decision to the performance of piezoelectric pump by the check valve of controlling stream direction of flow
The influence of property.The check valve that tradition has valve piezoelectric pump is simple cantilever beam shape, and its opening and closing lag behind piezoelectric pump driving
Source is a lot, gap easily be present between the executable portion and valve seat of valve, causes the property followed and cut-off property bad, and piezoelectric pump is dynamic
The Oscillation Amplitude of power source piezoelectric ceramics is very low, so the frequency of piezoelectric pump, flow and pressure just do not increase.Asked to solve these
Topic, someone have invented soft funnel shaped valve, chevron valve, wheeled flap type etc..But these valves still have limitation, for example leak
The valve of bucket shape needs space big, and manufacturing procedure is complicated, and cost is high；The area of chevron valve is big；Wheeled flap type valve block and valve seat
Technique for fixing is complicated, the bad of valve block flatness, the cutoff performance reduction of valve etc. easily occurs.
The content of the invention
In order to overcome have the shortcomings that complicated valve piezoelectric pump, followability and cut-off property it is bad, cost is high, mesh of the invention
Be to provide a kind of linear valve piezoelectric pump of sine and cosine, the inlet and outlet of valve seat be separately installed with a pair mutually it is inverted just
The linear check valve of cosine, for controlling the flow direction of fluid.When suction, piezoelectric vibrator is bent upwards, and the volume of pump chamber becomes big
Pressure is reduced, and the linear check valve of sine and cosine of entrance is opened and the closing in exit, such fluid just flow into pump chamber；Scheduling
When, piezoelectric vibrator is bent downwardly, and the volume of pump chamber diminishes pressure rise, the linear closed check valve of sine and cosine of entrance, goes out
Opening at mouthful, such fluid just flow out from exit.By one complete cycle of suction and scheduling, pump is achieved that fluid
One-way transmission.This pump has that efficiency high, flow be big, simple in construction, easy for installation, low cost and other advantages.
The technical solution adopted for the present invention to solve the technical problems is：A kind of linear valve piezoelectric pump of sine and cosine, including pressure
Electric tachometer indicator, pump cover, valve seat, screw, pump seat, sealing ring, are provided with pump cover at the top of the pump seat, and pump seat upper end is valve seat, valve seat and
Sealing ring is provided between pump seat, sealing ring is provided between pump seat and pump cover, piezoelectric vibrator, the piezoelectric vibrator are provided with the top of pump seat
Between pump seat and pump cover, the piezoelectric vibrator is fixedly connected between pump cover, valve seat and pump seat by screw, in valve seat
Inlet and outlet is separately installed with a pair of mutual inverted linear check valves of sine and cosine, the linear list of sine and cosine by screw
It is corresponding to the valve body of valve and the inlet hole and outlet opening of valve seat, the linear list of sine and cosine of valve seat entrance is arranged on by screw
It is inlet valve to valve, the linear check valve of sine and cosine that valve seat exit is arranged on by screw is dump valve.
The linear check valve of sine and cosine of the present invention is arranged on the import and export of valve seat, sine and cosine by screw by locator
The valve body of linear check valve is corresponding with the inlet and outlet of valve seat；The shape and inlet and outlet of the valve body of the linear check valve of sine and cosine
The shape in hole matches, and its size is more than the size of flow hole；The valve body and locator of the linear check valve of sine and cosine it
Between be connected by the linear cantilever of sine and cosine, the linear cantilever of the sine and cosine is shaped as sinusoidal line or cosine line；It is described just remaining
String of a musical instrument shape check valve is made up of elastic metallic or nonmetallic materials.
After above technical scheme, the beneficial effects of the invention are as follows：The linear check valve of sine and cosine belongs to cantilever valve, knot
Structure is simple, and cost is low, and its cantilever shape is that including but not limited to the trigonometric function line of sinusoidal line or cosine line, brachium ratio are traditional
Cantilever beam check valve be higher by several times, thus it is quick on the draw to pump chamber pressure change, and followability is good, and the valve can be by metal
Or non-metallic elastic material is made, there is preferable cutoff performance, can effectively realize the opening and closing of piezoelectric pump.
Brief description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the linear structural representation for having valve piezoelectric pump of sine and cosine of the present invention.
Fig. 2 is the linear top view for having valve piezoelectric pump of sine and cosine of the present invention.
Fig. 3 is the sectional view of the linear check valve front view of sine and cosine of the present invention.
Fig. 4 is the top view of the linear check valve of sine and cosine of the present invention.
The linear check valve of entrance sine and cosine opens the state diagram that exit is closed when Fig. 5 is fluid suction of the present invention.
Sine and cosine linear check valve in exit opens the state diagram that porch is closed when Fig. 6 is fluid scheduling of the present invention.
Fig. 7 is the linear fundamental diagram for having valve piezoelectric pump of sine and cosine of the present invention.
Embodiment
According to Fig. 1, Fig. 2, Fig. 3, Fig. 4, a kind of linear valve piezoelectric pump of sine and cosine of the present invention, including piezoelectric vibrator 1, pump
Lid 2, valve seat 3, screw, pump seat 6, sealing ring, the top of pump seat 6 are provided with pump cover 2, and the upper end of pump seat 6 is valve seat 3, valve seat 3 and pump
Sealing ring 7 is provided between seat 6, sealing ring 8 is provided between pump seat 6 and pump cover 2, the top of valve seat 3 is provided with piezoelectric vibrator 1, the pressure
Electric tachometer indicator 1 is located between valve seat 3 and pump cover 2, solid by screw 9 between the piezoelectric vibrator 1 and pump cover 2, valve seat 3 and pump seat 6
Fixed connection, a pair of mutual inverted linear check valves of sine and cosine are separately installed with the inlet and outlet of valve seat 3 by screw 4
5, the valve body 11 of the linear check valve 5 of sine and cosine is corresponding with the inlet hole and outlet opening of valve seat 3, is arranged on by screw 4
The linear check valve 5 of sine and cosine of the entrance of valve seat 3 is inlet valve, and the sine and cosine that the exit of valve seat 3 is arranged on by screw 4 is linear
Check valve 5 is dump valve.
The linear check valve 5 of sine and cosine of the present invention is arranged on the import and export of valve seat 3 by screw 4 by locator 10,
The valve body 11 of the linear check valve 5 of sine and cosine is corresponding with flow hole, and its size is more than the size of flow hole；The sine and cosine
The shape and the shape of the flow hole of valve seat 3 of the valve body 11 of linear check valve 5 match, the linear check valve 5 of sine and cosine
Valve body 11 and valve seat 3 flow hole shape can be circle, or other geometries；The sine and cosine is linear
It is connected between the valve body 11 and locator 10 of check valve 5 by the linear cantilever 12 of sine and cosine, the shape of the linear cantilever of the sine and cosine
Shape is the including but not limited to trigonometric function line of sinusoidal line or cosine line；The linear check valve 5 of sine and cosine is by metal or non-
Metallic resilient material is made, such as：Beryllium-bronze or spring steel.
According to Fig. 5, Fig. 6, the linear check valve 5 of sine and cosine of the present invention is arranged on inside the inlet hole of valve seat 3 with screw 4
It is inlet valve, it is dump valve that the linear check valve 5 of sine and cosine is arranged on outside the outlet opening of valve seat 3 with screw 4, when pump chamber becomes
When change causes the cavity fluid pressure to change, the linear check valve 5 of sine and cosine, which can be realized, under action of a fluid unidirectional open and closes
Close.
According to Fig. 7, the fundamental diagram of the linear valve piezoelectric pump of sine and cosine of the present invention, during piezoelectricity pump work, to piezoelectricity
Oscillator 1 applies ac signal, and under the incentive action of electric signal, piezoelectric vibrator 1 produces cyclic bending deformation vibration, causes pump
Cavity volume and pressure alternately change, and the course of work that sine and cosine is linear valve piezoelectric pump is as follows：
First stage（0~1/4T）, with the continuous increase of voltage, piezoelectric vibrator 1 is constantly bent upwards fortune by equilbrium position
Move to extreme position, pump chamber volume increases to maximum, and negative pressure, the valve of the linear check valve 5 of sine and cosine of the entrance of valve seat 3 occurs in intracavitary
Body 11 is opened, and fluid flows into pump chamber by inlet hole.
Second stage（1/4T~2/4T）, in this process, voltage constantly reduces, and the deflection of piezoelectric vibrator 1 reduces,
Pump chamber volume also constantly reduces, and intracavitary pressure constantly increases, and the valve body 11 of the linear check valve 5 of sine and cosine of the entrance of valve seat 3 exists
It is close to the upper end of the import of valve seat 3 in the presence of pressure, closes import.
Phase III（2/4T~3/4T）, piezoelectric vibrator 1 does downwards bending motion extremely with the increase of voltage by equilbrium position
Minimum point, pump chamber volume constantly reduce, and cavity pressure increases to maximum, the valve body of the linear check valve 5 of sine and cosine in the exit of valve seat 3
11 open, and fluid flows out pump chamber by outlet opening.
Fourth stage (3/4T ~ T）, in this stage, the voltage on piezoelectric vibrator constantly reduces, the deformation of piezoelectric vibrator 1
Amount constantly reduces, and pump chamber volume increase, intracavitary pressure constantly reduces, the valve body of the linear check valve 5 of sine and cosine in the exit of valve seat 3
11 are close to the lower end of outlet under the effect of the pressure, close import.
When piezoelectric vibrator 1 moves along S4 → S1 → S2, pump chamber is in diastole state, the increase of pump chamber volume, and intracavitary occurs
Negative pressure, now the linear check valve 5 of the sine and cosine in the exit of valve seat 3 close, the linear check valve 5 of sine and cosine of entrance is opened, stream
Body flows into pump chamber, is the suction of pump；When piezoelectric vibrator 1 moves along S2 → S3 → S4, pump chamber volume compression, intracavitary pressure increases
Greatly, now the linear check valve 5 of the sine and cosine of the entrance of valve seat 3 is closed, and the linear check valve 5 of sine and cosine in exit is opened, fluid
Pump chamber is flowed out, is the scheduling of pump.In this way, within a work period, the suction and discharge of fluid are realized.
Claims (5)
1. a kind of linear valve piezoelectric pump of sine and cosine, including piezoelectric vibrator（1）, pump cover（2）, valve seat（3）, screw（4）, pump seat（6）、
Sealing ring（7）, sealing ring（8）, screw（9）, the pump seat（6）Top is provided with pump cover（2）, pump seat（6）Upper end is valve seat（3）,
Valve seat（3）With pump seat（6）Between be provided with sealing ring（7）, valve seat（3）With pump cover（2）Between be provided with sealing ring（8）, valve seat（3）Top
Portion is provided with piezoelectric vibrator（1）, the piezoelectric vibrator（1）Located at valve seat（3）And pump cover（2）Between, the piezoelectric vibrator（1）With pump
Lid（2）, valve seat（3）And pump seat（6）Between pass through screw（9）It is fixedly connected, it is characterised in that in valve seat（3）Inlet and outlet
Place passes through screw（4）It is separately installed with a pair of mutual inverted linear check valves of sine and cosine (5), the linear check valve of sine and cosine
（5）Valve body（11）With valve seat（3）Inlet hole and outlet opening it is corresponding, pass through screw（4）Installed in valve seat（3）Entrance
The linear check valve of sine and cosine（5）For inlet valve, pass through screw（4）Installed in valve seat（3）The linear check valve of sine and cosine in exit
（5）For dump valve.
2. the linear valve piezoelectric pump of a kind of sine and cosine according to claim 1, it is characterised in that the sine and cosine is linear unidirectional
Valve（5）By screw（4）Pass through locator（10）Installed in valve seat（3）Import and export, the linear check valve of sine and cosine（5）Valve body
（11）With valve seat（3）Flow hole is corresponding, and its size is more than valve seat（3）Flow hole size.
3. the linear valve piezoelectric pump of a kind of sine and cosine according to claim 1, it is characterised in that the sine and cosine is linear unidirectional
Valve（5）Valve body（11）Be shaped as and valve seat（3）The shape of flow hole matches.
4. the linear valve piezoelectric pump of a kind of sine and cosine according to claim 1, it is characterised in that the sine and cosine is linear unidirectional
Valve（5）Valve body（11）And locator（10）Between pass through the linear cantilever of sine and cosine（12）It is connected.
5. the linear valve piezoelectric pump of a kind of sine and cosine according to claim 1, it is characterised in that the sine and cosine is linear unidirectional
Valve（5）It is made up of elastic metallic or nonmetallic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610024674.4A CN105626488B (en) | 2016-01-15 | 2016-01-15 | The linear valve piezoelectric pump of sine and cosine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610024674.4A CN105626488B (en) | 2016-01-15 | 2016-01-15 | The linear valve piezoelectric pump of sine and cosine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105626488A CN105626488A (en) | 2016-06-01 |
| CN105626488B true CN105626488B (en) | 2017-11-24 |
Family
ID=56041737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610024674.4A Expired - Fee Related CN105626488B (en) | 2016-01-15 | 2016-01-15 | The linear valve piezoelectric pump of sine and cosine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105626488B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6116866A (en) * | 1997-01-30 | 2000-09-12 | Kasei Optonix, Ltd. | Reed valve for a pump |
| JP2000265964A (en) * | 1999-03-17 | 2000-09-26 | Kasei Optonix Co Ltd | Small-sized pump |
| CN103016319A (en) * | 2012-12-06 | 2013-04-03 | 浙江师范大学 | Self-measuring piezoelectric pump |
| CN104832704A (en) * | 2015-04-03 | 2015-08-12 | 3M创新有限公司 | Limiting element, one-way valve, composition, elastomer material, and grafting graphite and preparation method thereof |
-
2016
- 2016-01-15 CN CN201610024674.4A patent/CN105626488B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6116866A (en) * | 1997-01-30 | 2000-09-12 | Kasei Optonix, Ltd. | Reed valve for a pump |
| JP2000265964A (en) * | 1999-03-17 | 2000-09-26 | Kasei Optonix Co Ltd | Small-sized pump |
| CN103016319A (en) * | 2012-12-06 | 2013-04-03 | 浙江师范大学 | Self-measuring piezoelectric pump |
| CN104832704A (en) * | 2015-04-03 | 2015-08-12 | 3M创新有限公司 | Limiting element, one-way valve, composition, elastomer material, and grafting graphite and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105626488A (en) | 2016-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| AU2016200869B2 (en) | Pump with disc-shaped cavity | |
| US8123502B2 (en) | Acoustic pump utilizing radial pressure oscillations | |
| CN101328879B (en) | Valve and vibrator integrated piezoelectric pump with valve | |
| CN106762566B (en) | Valve piezoelectric pump semi-flexible and its working method | |
| CN203926233U (en) | The resonant hydraulic filter of a kind of electromagnetic type automated variable rigidity | |
| CN206448925U (en) | Semi-flexible valve piezoelectric pump | |
| CN101285459A (en) | Piezoelectric pump with valve | |
| CN103994059B (en) | Resonance piezoelectric fan with cymbal-shaped cavity | |
| CN107387378A (en) | built-in compliant structure valveless piezoelectric pump | |
| CN103994056A (en) | Multi-vibrator axial cross-flow piezoelectric pump | |
| CN107524584A (en) | New more oscillator piezoelectric pumps | |
| CN1936326A (en) | Valve-free micro-pressure electric pump | |
| CN205533129U (en) | Linear valve piezoelectric pump of spiral | |
| CN103557142A (en) | Displacement pump with magnetic liquid driven by electromagnets | |
| CN105626488B (en) | The linear valve piezoelectric pump of sine and cosine | |
| CN206000713U (en) | A kind of linear valve piezoelectric pump of symmetric helix | |
| CN103994057A (en) | Movable valve type piezoelectric pump | |
| CN111980889A (en) | Semi-flexible integrated valve active piezoelectric pump | |
| Ji et al. | A serial piezoelectric gas pump with variable chamber height | |
| CN114060255B (en) | Magnetorheological fluid micropump driven by gradient magnetic field | |
| CN105649961A (en) | Piezoelectric pump with spiral-line-shaped valves | |
| RU2462623C2 (en) | Energy-saving vibratory pump | |
| CN205330935U (en) | Cymbals type pump body piezoelectric pump | |
| CN105927517A (en) | Symmetrical spiral linear valve piezoelectric pump | |
| CN201221459Y (en) | Piezoelectric pump with valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 225312 Tianxing Road, Taizhou medical high tech Zone, Taizhou, Jiangsu Patentee after: Taizhou Polytechnic College Address before: 225300 Jiangsu Province, Taizhou City Hailing District Yingchun Road No. 8 Patentee before: Taizhou Polytechnic College |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171124 Termination date: 20210115 |