CN1056159A - Solar selective absorbing film and preparation - Google Patents
Solar selective absorbing film and preparation Download PDFInfo
- Publication number
- CN1056159A CN1056159A CN91103789A CN91103789A CN1056159A CN 1056159 A CN1056159 A CN 1056159A CN 91103789 A CN91103789 A CN 91103789A CN 91103789 A CN91103789 A CN 91103789A CN 1056159 A CN1056159 A CN 1056159A
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- metal
- absorbing film
- nitrogen
- selective absorbing
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S70/00—Details of absorbing elements
- F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
- F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physical Vapour Deposition (AREA)
Abstract
What the present invention relates to is a kind of aluminum oxynitride solar selective absorbing film layer that is applied to plate solar collector and vacuum tube collector core metal sheet.This rete adopt magnetron sputtering aluminium target in the atmosphere of argon gas and reactant gases nitrogen, oxygen sputtering sedimentation on the metal absorber plate that light was handled, with the metal absorber plate as infrared reflecting layer, sputtering sedimentation AlN in continuous change nitrogen oxide flow and negative bias
xO
yMetal-free ceramic-type gradual change absorbing membranous layer.Owing to adopt in the preparation to measures such as the bombardment cleaning of metal and negative biass.Make rete and matrix bond good, and, have the antireflective provide protection, thereby improved wear-resistant, corrosion resistance at film surface deposition one deck aluminum oxide film.Its specific absorption α=0.90-0.94, infrared emittance ε=0.07-0.12.
Description
What the present invention relates to is a kind of solar selective absorbing film that utilizes physical vacuum gas-phase reaction deposition magnetron sputtering ion plating technology to prepare plate solar collector absorber plate and vacuum tube collector baffle core.
The absorber plate that the key element of solar energy collector is made up of solar selective absorbing film, it is made up of the pipe of selective absorbing film and logical working medium (water).Mainly by the performance decision of absorbing film, must possess has high specific absorption to the efficient of heat collector in the solar energy spectral limit, low infrared emittance is arranged in infrared range of spectrum.UsPatNo.4,059,094 what mention is a kind of focus solar collector absorbing film at the outer japanning of pipe.UsPatNo3,952,724 what mention is a kind ofly to be coated with the black chromium of one deck in copper pipe surface.UsPatNo4,339,484 what mention is the sputter copper facing on Glass tubing of a kind of elder generation.And then the selective absorbing film of sputter layer of metal (iron, nickel and chromium) carbide.The glass tube vacuum heat collector that has is to adopt dual-target sputtering, sputters at the glass tube exterior surface layer of copper earlier, and the carbide of sputter layer of metal again prepares absorbing membranous layer.Above-mentioned various absorbing membranous layer, some is the solar absorptance height, but infrared emittance is also bigger; Some better performances, but need dual-target sputtering.The more important thing is that these absorbing films can only use under vacuum state, can not adapt to general flat plate collector environment and use.
It is lower that purpose of the present invention works out a kind of cost exactly, both has been applicable to the absorbing film of vacuum tube collector, solar selective absorbing film and the technology of preparing thereof with higher absorption rate and lower infrared emittance that can use in the flat plate collector environment again.
Solar selective absorbing film layer of the present invention is to adopt in vacuum oven an aluminium target by the AlNxOy selective absorption film (wherein x be the ratio of nitrogen-atoms and aluminium atom, y be the ratio of Sauerstoffatom and aluminium atom) of reactive sputter-deposition to bright metallic surface of handling.Its metal is aluminium, copper and their the low material of infrared emittances such as alloy that light was handled.Metal sheet that light was handled such as copper, aluminium clean up, packs into to have bombardment and clean, and negative bias, but heated baking and work rest rotation in the magnetron sputtering coater of characteristics such as revolution, vacuumize the interior vacuum to 0.1 of stove * 10
-2-1 * 10
-2About pa, add hot basal body after 100 ℃ of-200 ℃ of temperature of needs, give and feed argon gas in the stove, in argon gas atmosphere, meet negative DC voltage 600-1200V and bombard cleaning, add negative bias then, negative electrode aluminium target is connected negative direct current and is played the target sputter, and reactant gases nitrogen, oxygen are fed in the stove to required flux values by fine tuning valve control, carry out the reactive sputter-deposition film forming.The nitrogen that feeds is 20-100cm
3/ s, the oxygen of feeding is 10-30cm
3/ s.The argon gas that feeds is 30-100cm
3/ s.Adding negative bias values is 100V-300V.In the reactive deposition process, the flow of nitrogen and oxygen is along with the plated film time increases gradually.Generate the graded films of the strong aluminum oxynitride compound (AlNxOy) of one deck bonding force like this at metal sheet surface, change the descending rete that makes of negative bias gradually simultaneously and have good bonding force, have crystallographic orientation again specific absorption is improved.Whole absorbing film the first layer is the infrared reflecting layer that metallic matrix constitutes.The second layer is the gradual change metal-free ceramic-type absorbing membranous layer of forming at negative bias effect deposit aluminium atom and nitrogen, Sauerstoffatom, and its thickness is 0.1 * 10
-6-0.5 * 10
-6M, the 3rd layer is that thickness is 0.01 * 10
-6-0.1 * 10
-6The pellumina of m.The sedimentary absorbing membranous layer thickness of whole metal base surface is 0.2 * 10
-6-0.6 * 10
-6M.
The selective absorption film that generates in this technology is to be infrared reflecting layer with metallic matrix (aluminium or copper), deposition oxynitrides ceramic mould metal dielectric-coating on matrix, and the specific refractory power of its rete changes along with the composition of rete.To the surface of rete, because the feeding of oxygen increase, and generate one deck aluminum oxide film.Play the antireflective effect, increased abrasion resistance and corrosion resistance nature.The bonding force of film and metallic matrix is good.This film specific absorption α=0.9-0.94, infrared emittance ε=0.07-0.12.This film both had been adapted to do the absorbing membranous layer of plate core in vacuum tube collector, also be adapted to do in the flat plate collector preferably in sealing property the absorbing membranous layer of absorber plate.
Embodiment 1:
To pack into one through the copper sheet matrix that cleans and light was handled and have the bombardment cleaning.In the φ 300mm magnetron sputtering coater of negative bias and baking heating.Be evacuated down to 0.1 * 10
-2Behind the pa, matrix is heated to 150 ℃, feeds 30cm
3/ s argon gas added bombardment volts DS-800V about 10 minutes, met negative bias 300V to matrix, and the energising of sputtered aluminum target feeds nitrogen 20cm
3/ s, oxygen 10cm
3/ s, the flow of adjustments of gas is sent into from small to large gradually as required, reduces negative bias simultaneously gradually.Sputtering sedimentation thicknesses of layers 0.2 * 10
-6Shut down about m.
Solar absorptance α=0.90 of the solar selective absorbing film of this rete preparation, infrared emittance ε=0.07.
Embodiment 2:
To pack into one to have to bombard through the copper sheet that cleans and light is handled and clean.In the φ 1000mm magnetron sputtering stove of negative bias and baking heating, be evacuated down to 1 * 10
-2Behind the pa, be heated to 200 ℃, feed argon gas 100cm to matrix
3/ s added bombardment volts DS-1000V about 15 minutes.Matrix is added negative bias 200V.The energising of sputtered aluminum target feeds nitrogen 80cm
3/ s, oxygen 20cm
3/ s.The adjustments of gas flow is sent into from small to large gradually as required, reduces negative bias simultaneously gradually.The sputtering sedimentation thicknesses of layers reaches 0.3 * 10
-6-0.4 * 10
-6During the m left and right sides, stop logical nitrogen, continue aerating oxygen, sputter generation thickness is 0.01 * 10 again
-6Stop about m.
This film solar specific absorption α=0.92, infrared emittance ε=0.09.
Embodiment 3:
To pack in the used magnetron sputtering coater of embodiment 2 through the aluminium flake matrix that cleans and light was handled, be evacuated down to 0.5 * 10
-2Behind the pa, add hot basal body to 100 ℃, added bombarding voltage-600V about 20 minutes.Matrix adds negative bias 100V, feeds 80cm
3/ s argon gas, nitrogen 100cm
3/ s, oxygen 30cm
3/ s, the energising of sputtered aluminum target.Adjustments of gas flow is as required ascendingly sent into gradually, reduces negative bias gradually simultaneously, waits rete to be plated to 0.5 * 10
-6During the m left and right sides, stop nitrogen and feed, in continuing aerating oxygen, sputter generates aluminum oxide film thick approximately 0.05 * 10 again
-6Shut down about m.
The solar absorptance α of this solar selective absorbing film layer=0.94, infrared emittance ε=0.12.
Claims (8)
1, the solar selective absorbing film of a kind of plate solar collector and heat pipe vacuum tube hot collector core metal sheet.It is characterized in that depositing layer of aluminum-nitrogen-oxygen metal-free ceramic-type graded films on the metal heat-absorbing plate core that light was handled, thickness is 0.1 * 10
-6-0.5 * 10
-6M deposits one deck aluminum oxide antireflective protective membrane more thereon.
2, solar selective absorbing film according to claim 1 is characterized in that the metal heat-absorbing plate core is aluminium, copper and their alloy.
3, the preparation method of the solar selective absorbing film of a kind of plate solar collector and heat pipe vacuum tube hot collector core metal sheet, it is characterized in that to put into as matrix through the metal that cleans and light was handled and have the bombardment cleaning, in the magnetron sputtering coater of negative bias and baking heating unit, vacuumize, in argon gas,, bombard cleaning with the matrix heating; Add negative bias to matrix then, give negative electrode aluminium target energising sputter simultaneously, feed reactant gases nitrogen and oxygen gradually,, reduce the flow that negative bias strengthens oxygen and nitrogen gradually along with the increase of plated film time; When aluminium-nitrogen on the matrix-when oxygen metal-free ceramic-type graded films deposits to and needs thickness, stop to continue aerating oxygen for nitrogen; When shutting down behind deposition one deck aluminum oxide antireflective protective membrane on aluminium-nitrogen-oxygen metal-free ceramic-type graded films.
4, the preparation method of solar selective absorbing film according to claim 3 is characterized in that reactant gases oxygen is 10-30cm
3/ s, nitrogen are 20-100cm
3/ s.
5, the preparation method of solar selective absorbing film according to claim 3 is characterized in that the metallic matrix Heating temperature is 100-200 ℃.
6, the preparation method of solar selective absorbing film according to claim 3 is characterized in that argon gas feeding amount is 30-100cm
3/ s.
7, the preparation method of solar selective absorbing film according to claim 3, it is characterized in that vacuumizing in the magnetron sputtering coater is 0.1 * 10
-2-1 * 10
-2Pa.
8, the preparation method of solar selective absorbing film according to claim 3 is characterized in that negative bias is 300-100V.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN91103789A CN1018021B (en) | 1991-06-18 | 1991-06-18 | Solar energy selective absorption film and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN91103789A CN1018021B (en) | 1991-06-18 | 1991-06-18 | Solar energy selective absorption film and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1056159A true CN1056159A (en) | 1991-11-13 |
| CN1018021B CN1018021B (en) | 1992-08-26 |
Family
ID=4906257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN91103789A Expired CN1018021B (en) | 1991-06-18 | 1991-06-18 | Solar energy selective absorption film and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1018021B (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100381764C (en) * | 2002-11-09 | 2008-04-16 | 徐宝安 | Method for forming light absorption membrane possessing mirroring option for solar powered vacuum heat collection bube |
| CN100487337C (en) * | 2007-01-22 | 2009-05-13 | 罗赞继 | Selective absorbing composite membrane coated absorber plate core of solar energy and making method thereof |
| CN101273238B (en) * | 2005-08-02 | 2010-04-07 | 桑斯翠普有限公司 | Nickel-alumina coated solar absorbers |
| CN101344334B (en) * | 2008-08-18 | 2010-06-02 | 范天方 | Solar spectrum selective absorption film and preparation method thereof |
| CN101818328A (en) * | 2010-04-22 | 2010-09-01 | 常州博士新能源科技有限公司 | Preparation method of multilayer compound solar energy selective absorption plating layer |
| CN102373427A (en) * | 2010-08-18 | 2012-03-14 | 鸿富锦精密工业（深圳）有限公司 | Surface anti-corrosion treatment process of aluminium alloy and product thereof |
| CN102384599A (en) * | 2011-10-11 | 2012-03-21 | 李德杰 | Solar heat collecting tube |
| CN102400092A (en) * | 2010-09-10 | 2012-04-04 | 鸿富锦精密工业（深圳）有限公司 | Housing and manufacturing method thereof |
| CN102453851A (en) * | 2010-10-19 | 2012-05-16 | 鸿富锦精密工业（深圳）有限公司 | Film-coated part and preparation method thereof |
| CN102534495A (en) * | 2012-02-24 | 2012-07-04 | 哈尔滨工业大学 | Preparation method for durable high-reflection film |
| CN102644047A (en) * | 2011-02-18 | 2012-08-22 | 鸿富锦精密工业（深圳）有限公司 | Shell and manufacturing method thereof |
| CN102676989A (en) * | 2011-03-11 | 2012-09-19 | 鸿富锦精密工业（深圳）有限公司 | Film coating part and preparation method thereof |
| CN102691045A (en) * | 2011-03-23 | 2012-09-26 | 鸿富锦精密工业（深圳）有限公司 | Aluminum or aluminum alloy shell and manufacturing method thereof |
| CN102721206A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Thermal collection tube of intermediate-and-low temperature solar thermal collector |
| CN102721210A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collecting device |
| CN104797926A (en) * | 2012-11-30 | 2015-07-22 | 松下知识产权经营株式会社 | Optical sensor apparatus, and method for manufacturing optical element to be used in optical sensor apparatus |
-
1991
- 1991-06-18 CN CN91103789A patent/CN1018021B/en not_active Expired
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100381764C (en) * | 2002-11-09 | 2008-04-16 | 徐宝安 | Method for forming light absorption membrane possessing mirroring option for solar powered vacuum heat collection bube |
| CN101273238B (en) * | 2005-08-02 | 2010-04-07 | 桑斯翠普有限公司 | Nickel-alumina coated solar absorbers |
| CN100487337C (en) * | 2007-01-22 | 2009-05-13 | 罗赞继 | Selective absorbing composite membrane coated absorber plate core of solar energy and making method thereof |
| CN101344334B (en) * | 2008-08-18 | 2010-06-02 | 范天方 | Solar spectrum selective absorption film and preparation method thereof |
| CN101818328A (en) * | 2010-04-22 | 2010-09-01 | 常州博士新能源科技有限公司 | Preparation method of multilayer compound solar energy selective absorption plating layer |
| CN102373427A (en) * | 2010-08-18 | 2012-03-14 | 鸿富锦精密工业（深圳）有限公司 | Surface anti-corrosion treatment process of aluminium alloy and product thereof |
| CN102400092B (en) * | 2010-09-10 | 2014-07-09 | 鸿富锦精密工业（深圳）有限公司 | Housing and manufacturing method thereof |
| CN102400092A (en) * | 2010-09-10 | 2012-04-04 | 鸿富锦精密工业（深圳）有限公司 | Housing and manufacturing method thereof |
| CN102453851A (en) * | 2010-10-19 | 2012-05-16 | 鸿富锦精密工业（深圳）有限公司 | Film-coated part and preparation method thereof |
| CN102644047A (en) * | 2011-02-18 | 2012-08-22 | 鸿富锦精密工业（深圳）有限公司 | Shell and manufacturing method thereof |
| CN102676989A (en) * | 2011-03-11 | 2012-09-19 | 鸿富锦精密工业（深圳）有限公司 | Film coating part and preparation method thereof |
| CN102691045A (en) * | 2011-03-23 | 2012-09-26 | 鸿富锦精密工业（深圳）有限公司 | Aluminum or aluminum alloy shell and manufacturing method thereof |
| CN102384599A (en) * | 2011-10-11 | 2012-03-21 | 李德杰 | Solar heat collecting tube |
| CN102534495A (en) * | 2012-02-24 | 2012-07-04 | 哈尔滨工业大学 | Preparation method for durable high-reflection film |
| CN102721206A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Thermal collection tube of intermediate-and-low temperature solar thermal collector |
| CN102721210A (en) * | 2012-06-29 | 2012-10-10 | 苏州嘉言能源设备有限公司 | Heat collecting plate of solar heat collecting device |
| CN104797926A (en) * | 2012-11-30 | 2015-07-22 | 松下知识产权经营株式会社 | Optical sensor apparatus, and method for manufacturing optical element to be used in optical sensor apparatus |
| US9651475B2 (en) | 2012-11-30 | 2017-05-16 | Panasonic Intellectual Property Management Co., Ltd. | Optical sensor apparatus and method of producing optical element used in optical sensor apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1018021B (en) | 1992-08-26 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB02 | Change of applicant information |
Applicant after: Beijing SED Solar Technology Co., Ltd. Applicant before: Beijing Solar Energy Research Inst. |
|
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
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| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |