CN105606477B - The fretting wear experimental rig of X-ray photoelectron spectroscopic analysis can be carried out in situ - Google Patents
The fretting wear experimental rig of X-ray photoelectron spectroscopic analysis can be carried out in situ Download PDFInfo
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- CN105606477B CN105606477B CN201610141119.XA CN201610141119A CN105606477B CN 105606477 B CN105606477 B CN 105606477B CN 201610141119 A CN201610141119 A CN 201610141119A CN 105606477 B CN105606477 B CN 105606477B
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- vacuum chamber
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- ray photoelectron
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/56—Investigating resistance to wear or abrasion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
- G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/04—Chucks
Abstract
A kind of fretting wear experimental rig that can carry out X-ray photoelectron spectroscopic analysis in situ, primary structure are:The middle and lower part of the force application rod of fretting apparatus and the following equal sealed envelope of all components are in vacuum chamber;Vacuum meter is installed, the left part of vacuum chamber is connect by connecting tube with the vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument on vacuum chamber;Vacuum chamber rear portion is connect with vacuum pump;The right part of vacuum chamber is tightly connected with magnetic rod;The inner cavity of magnetic rod is cased with push rod, the magnetic magnetic ring of peripheral surface fitting of magnetic rod;The right part carrying magnetic of push rod, the left part of push rod are equipped with the clamping close device that can be engaged with the lower fixture of fretting apparatus.The device can vacuum fretting wear after the test, immediately under same vacuum environment, in situ X-ray diffraction XPS Analysis is carried out to worn-out surface and abrasive dust components, so as to which more accurate, more reliable the obtains fine motion military service performance and its micromechanism of damage of the material in vacuum environment.
Description
Technical field
The present invention relates to fretting wear experimental rig more particularly to belong to one kind under vaccum working condition measure material it is tangentially micro-
The vacuum fretting wear test method of dynamic polishing machine, especially studies abrasive dust components Evolution.
Technical background
Fretting wear refers to the reciprocating motion for causing the surface combined closely that micron dimension amplitude occurs due to extraneous vibration.
Component of machine contact surface caused by fine motion is destroyed or caused crack initiation, extension and fracture, will cause entirely to operate system
System failure.Wherein abrasive dust formation and oxidation great influence is played in fretting wear process.
Under different vacuum degrees, partial pressure of oxygen and inert ambient environment, the formation of abrasive dust and oxygen between the material to contact with each other
Change has differences, and makes Fretting that significant changes occur.Existing fretting apparatus contains tangential, radial direction, turns round
Four classes such as turn, roll, can real-time testing go out the friction coefficient of the material in atmospheric environment or etchant solution, and complete in experiment
The wear rate of material is calculated afterwards.Also test specimen X-ray diffraction facies analysis or x-ray photoelectron can be taken out after the completion of experiment
Energy spectrum analysis (XPS, X-ray photoelectron spectroscopy) carries out constituent analysis to worn-out surface and abrasive dust.
But the experiment of test specimen takes fortune process to be exposed in atmospheric environment, and air is easily attached to surface of test piece, the worn-out surface of test specimen
By air pollution, it is impossible to the accurate abrasive dust components and its development law for measuring test specimen fine motion military service under vacuum conditions.
With the development of space flight and aviation, more and more machineries (aircraft, rocket, satellite) are under vacuum and hypobaric
It is on active service.Need more accurately to measure the abrasive dust components and its development law of test specimen fine motion military service under vacuum conditions, so as to
Go out fine motion military service performance and its micromechanism of damage of the material in vacuum environment, reliable data branch is provided to improve its service life
Support.
Invention content
The goal of the invention of the present invention is the provision of a kind of fretting wear that can carry out X-ray photoelectron spectroscopic analysis in situ
Experimental rig.The device can be carried out under different vacuum degree environment, the fretting wear experiment of Different Plane material and sphere material;
And after the test, x-ray photoelectron spectroscopy in situ can be carried out to worn-out surface and abrasive dust components under same vacuum environment
Analysis, so as to which more accurate, more reliable the obtains fine motion military service performance and its micromechanism of damage of the material in vacuum environment.
The present invention realizes above-mentioned purpose the technical scheme adopted is that one kind can carry out x-ray photoelectron spectroscopy point in situ
The fretting wear experimental rig of analysis, including X-ray photoelectron spectroscopic analysis instrument, fretting apparatus, fretting apparatus
On force application rod, three-dimensional force sensor, upper fixture, lower fixture and lower clamp fixing mechanism, it is characterised in that:
The middle and lower part of the force application rod and three-dimensional force sensor, upper fixture, lower fixture and lower clamp fixing mechanism are close
Package is rolled in vacuum chamber, and the bottom of vacuum chamber is mounted on the top of the pedestal of box;
Vacuum meter is installed, the left part of vacuum chamber is equipped with horizontal connecting tube, and connecting tube passes through method on the vacuum chamber
Orchid connect with the vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument;The vacuum chamber also by the flange at rear portion with
Vacuum pump connects;
The right part of the vacuum chamber is tightly connected with magnetic rod;The inner cavity of magnetic rod is cased with rectangular push rod, magnetic rod
The magnetic magnetic ring of peripheral surface fitting;The right part carrying magnetic of push rod, push rod stretches into the left part of vacuum chamber, and be equipped with can be with
The clamping close device of the lower fixture engaging of fretting apparatus.
Working process and principle of the invention are:
By spherical upper specimen holder in upper fixture, block-like lower specimen holder is on lower fixture;Lower fixture is consolidated again
Due on lower clamp fixing mechanism;Then force application rod moves down spherical, blocky test specimen contact, and passes through force application rod straight down
Apply the load of setting.Vacuum pump is opened, when gauge reading reaches setting value, closes vacuum pump.It is fixed by lower fixture
The lower fixture of mechanism driving and its spherical test specimen reciprocal fine motion in the horizontal direction, carry out the fretting wear experiment between two test specimens;Meanwhile
Three-dimensional force sensor measures the direct stress and frictional force between two test specimens.
After fretting test, the magnetic ring that is moved to the left on magnetic rod makes the clamping close device of the push rod of magnetic rod inner sleeve
It is moved to the left and engages with lower fixture;The valve of the left part connecting tube of vacuum chamber is opened, continues to be moved to the left the magnetic on magnetic rod
Power ring makes push rod that lower fixture and its lower test specimen are sent into the vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument, finally enters
Analysis cavity.X-ray photoelectron spectroscopic analysis instrument carries out constituent analysis to test specimen worn-out surface under bulk and abrasive dust immediately.Fine motion tries
It tests and analyzes two processes with x-ray photoelectron and be spatially positioned in interconnected same vacuum environment, on the time then before one
It is carried out in succession after one;Worn-out surface and abrasive dust are in whole experiment process and are not affected by the pollution of atmospheric environment, it is achieved thereby that micro-
The in situ X-ray diffraction XPS Analysis of dynamic wear test.
Compared with prior art, the beneficial effects of the invention are as follows:
Vacuum fretting test machine is combined as a whole by the present apparatus with x-ray photoelectron spectroscopy, and spherical, blocky test specimen is not
With fretting test is first carried out under vacuum degree environment, after the completion of fretting test, blocky sample is directly directly sent into X from vacuum chamber
The vacuum sample cavity of ray photoelectron spectroscopic analysis instrument, finally enters analysis cavity, carries out the X ray of worn-out surface and abrasive dust immediately
XPS Analysis.Fretting test analyzes two processes in interconnected same vacuum environment with x-ray photoelectron, and one
It is carried out in succession after previous, worn-out surface and abrasive dust are in whole experiment process and are not affected by the pollution of atmospheric environment, realize fine motion
The in situ X-ray diffraction XPS Analysis of wear test;So as to more accurately measure test specimen, fine motion is on active service under vacuum conditions
Property abrasive dust components and its development law, more reliably obtain material the fine motion military service performance of vacuum environment and its damage machine
Reason, the parts design being on active service for fine motion under vacuum environment, manufacture provide more reliable data support.
The concrete structure of above-mentioned clamping close device is:
The left part of push rod is fixed with horizontal, rectangle posting, is equipped with and lower fixture in the middle part of the left bar of posting
The matched positioning column of location hole;The interior cavity inner sleeve circular shaft of push rod;Right part carrying magnetic, the left end of circular shaft are fixedly connected with eccentric wheel;Partially
Heart wheel is located in posting, and the left end bottom of push rod is also connected with horizontal copper sheet, and the left part of copper sheet is located at the lower section of positioning column,
And the left part of copper sheet is bent to form to the right grab, the grab and the pocket matches of lower clamp base upwards.
The working process and principle of this clamping close device are:
Rotation magnetic force ring control circular shaft band movable eccentric wheel rotates, and then be bent downwardly copper sheet by the outer rim of eccentric wheel, makes
Copper sheet can avoid the blocking of lower clamp ends in subsequent be moved to the left.Then, being moved to the left magnetic ring makes push rod water to the left
The location hole of fixture, the grab of copper sheet left end are moved to the underface of lower fixture card slot under translation is dynamic, positioning column is inserted into;Negative side again
Rotate circular shaft negative direction to rotation magnetic force ring, the outer rim of eccentric wheel made to restore to the original state far from copper sheet, copper sheet, the grab of copper sheet to
On bounce and then hook the card slot of lower clamp base, complete push rod engaging with lower fixture.
In short, this clamping close device passes through magnetic force by the peripheral operation of the magnetic magnetic ring of magnetic rod circumferential surface fitting
Effect drives circular shaft, push rod and its lower fixture of vacuum chamber, the movement of lower test specimen.So as to simply and easily realize test specimen
Controlled motion in vacuum environment so that, can be easily directly by blocky test specimen directly from vacuum chamber after the completion of fretting test
The vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument is sent into, carries out the x-ray photoelectron spectroscopy point of worn-out surface and abrasive dust
Analysis.It ensure that two processes of fretting test and x-ray photoelectron analysis can be in interconnected same vacuum environment, one is previous
It carries out in succession afterwards.
Concrete structure of the middle and lower part sealed envelope of above-mentioned force application rod in vacuum chamber be:
The top of the force application rod is pierced by the upper connector of vacuum chamber, and force application rod is pierced by the part housing ripple of vacuum chamber
Pipe;The upper end of bellows is tightly connected with force application rod, and the lower end of bellows and the upper connector of vacuum chamber are tightly connected.
In this way, bellows can with force application rod vertical and straight movement telescopic variation, simply and easily so that test specimen between plus
It carries and unloading is achieved, and vacuum environment can be maintained.
The composition of above-mentioned lower clamp fixing mechanism is:
Pedestal is fixed on the trestle table of vacuum chamber, the forepart installation piezoelectric ceramic actuator of base upper surface;Piezoelectricity is made pottery
The rear end of porcelain driver is fixedly connected with holder;Holder bottom is connect by line slide rail with pedestal, the forepart of holder be equipped with to
The front wall of upper protrusion;The horizontal concrete chute cooperation at the middle part of the transverse slider and holder of retaining wall bottom, the rear portion of holder after activity
It is fixed with supporting block;The top of supporting block and the forepart of latch segment are hinged;The nose threads connection lock-screw of latch segment;Locking
The end of screw is resisted after activity behind retaining wall, and the end of lock-screw is hemispherical;The hinge shaft of the rear end of latch segment with
The connection elongated slot cooperation of pull rod lower part;Pull rod upper end and force application rod lower hinge;After front wall and activity two are placed between retaining wall
The opposite L-type cushion block of a notch;Lower fixture is placed between the notch of two L-type cushion blocks.
The working process and principle of this lower clamp fixing mechanism are:
Before fretting test starts, by two L-type cushion block notches are opposite be put in before after shelves wall and activity between shelves wall, then will
The lower fixture for being placed with test specimen under bulk is put between the notch of two L-type cushion blocks;It by latch segment leveling and tightens, makes latch segment water
Flat retaining wall after holding out against activity from back to front, and then make retaining wall and the lower test specimen of front wall clamping after activity.Restart piezoelectric ceramics
Driver makes holder and its lower fixture does linear reciprocating motion, realizes that the fretting wear of blocky lower test specimen and spherical upper test specimen tries
It tests.
After fretting test, the clamping close device of the left end of push rod is engaged with lower fixture right end.Then control force
Bar moves straight up, and pull rod is driven to move up, and makes that the rear end of latch segment moves up and front end moves down;The lock-screw of latch segment front end
Button-head also to be rotated down centered on the hinged place of latch segment and supporting block, the rear surface of retaining wall after disengaging activity, from
And it releases and effect is held out against to retaining wall after activity;Retaining wall no longer clamps lower fixture and lower test specimen, lower clamp fixing mechanism after activity
Release the fixation to lower fixture.Lower fixture and lower test specimen are sent to x-ray photoelectron energy by the effect of magnetic ring and push rod again
In the vacuum sample cavity of spectrum analysis instrument.
This lower fixture fixed structure simply realizes and lower the fixed of examination tool is released, while can completely is kept again
Vacuum environment.
Description of the drawings
Fig. 1 is the structure diagram of the present invention.
Fig. 2 is the A-A schematic cross-sectional views of Fig. 1.
The enlarged structure schematic diagram of the clamping close device of Fig. 3 present invention.
Corresponding to label 27 it is lower test specimen in Fig. 2, Fig. 3.
Specific embodiment
Embodiment
Fig. 1-3 shows that a kind of specific embodiment of the invention, one kind can carry out X-ray photoelectron spectroscopic analysis in situ
Fretting wear experimental rig, including on X-ray photoelectron spectroscopic analysis instrument, fretting apparatus, fretting apparatus
Force application rod 9, three-dimensional force sensor 7, upper fixture 6, lower fixture 29 and lower clamp fixing mechanism, it is characterised in that:
The middle and lower part of the force application rod 9 and three-dimensional force sensor 7, upper fixture 6, lower fixture 29 and lower clamp fixing mechanism
For equal sealed envelope in vacuum chamber 3, the bottom of vacuum chamber 3 is mounted on the top of the pedestal 1 of box;
Vacuum meter 28 is installed, the left part of vacuum chamber 3 is equipped with horizontal connecting tube 3a, connecting tube on the vacuum chamber 3
3a is connect by flange with the vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument;The vacuum chamber 3 also connecing by rear portion
Mouth flange 3b is connect with vacuum pump;
The right part of the vacuum chamber 3 is tightly connected with magnetic rod 13;The inner cavity of magnetic rod 13 is cased with rectangular push rod 15,
The magnetic magnetic ring 14 of peripheral surface fitting of magnetic rod 13;The right part carrying magnetic of push rod 15, push rod 15 stretch into a left side for vacuum chamber 3
End is equipped with the clamping close device that can be engaged with the lower fixture 29 of fretting apparatus.
The concrete structure of the clamping close device of this example is:
The left part of push rod 15 is fixed with horizontal, rectangle posting 10, is equipped with under in the middle part of the left bar of posting 10
The matched positioning column 10a of location hole 29a of fixture 29;The interior cavity inner sleeve circular shaft 12 of push rod 15;The right part carrying magnetic of circular shaft 12, a left side
End is fixedly connected with eccentric wheel 11;Eccentric wheel 11 is located in posting 10, and the left end bottom of push rod 15 is also connected with horizontal copper sheet 16,
The left part of copper sheet 16 is located at the lower section of positioning column 10a, and the left part of copper sheet 16 is bent to form to the right grab 16a, institute upwards
The grab 16a stated is matched with the card slot 29b of lower 29 bottom of fixture.
Concrete structure of the middle and lower part sealed envelope of the force application rod 9 of this example in vacuum chamber 3 be:
The top of the force application rod 9 is pierced by the upper connector of vacuum chamber 3, and force application rod 9 is pierced by the part housing of vacuum chamber 3
Bellows 26;The upper end of bellows 26 is tightly connected with force application rod 9, and the lower end of bellows 26 and the upper connector of vacuum chamber 3 are close
Envelope connection.
The composition of the lower clamp fixing mechanism of this example is:
Pedestal 18 is fixed on the trestle table 2 of vacuum chamber 3, the forepart installation piezoelectric ceramic actuator 4 of 18 upper surface of pedestal;
The rear end of piezoelectric ceramic actuator 4 is fixedly connected with holder 20;20 bottom of holder is connect by line slide rail 19 with pedestal 18, folder
The forepart of seat 20 is equipped with the front wall 20a to raise up;The middle part of the transverse slider and holder 20 of retaining wall 20b bottoms after activity
Horizontal concrete chute coordinates, and the rear portion of holder 20 is fixed with supporting block 21;The top of supporting block 21 and the forepart of latch segment 23 are hinged;Lock
The nose threads connection lock-screw 24 of tight block 23;The end of lock-screw 24 is resisted after activity behind retaining wall 20b, and is locked
The end of screw 24 is hemispherical;The hinge shaft 22 of the rear end of latch segment 23 coordinates with the connection elongated slot of 25 lower part of pull rod;Pull rod 25
Upper end and 9 lower hinge of force application rod;The L-type cushion block that two notches of placement are opposite between front wall 20a and retaining wall 20b after activity
17;Lower fixture 29 is placed between the notch of two L-type cushion blocks 17.
Claims (4)
1. a kind of fretting wear experimental rig that can carry out X-ray photoelectron spectroscopic analysis in situ, including x-ray photoelectron spectroscopy
Analyzer, fretting apparatus, the force application rod (9) on fretting apparatus, three-dimensional force sensor (7), upper fixture (6),
Lower fixture (29) and lower clamp fixing mechanism, it is characterised in that:
The middle and lower part of the force application rod (9) and three-dimensional force sensor (7), upper fixture (6), lower fixture (29) and lower fixture are fixed
For the equal sealed envelope of mechanism in vacuum chamber (3), the bottom of vacuum chamber (3) is mounted on the top of the pedestal (1) of box;
Vacuum meter (28) is installed, the left part of vacuum chamber (3) is equipped with horizontal connecting tube (3a), even on the vacuum chamber (3)
(3a) is taken over to connect with the vacuum sample cavity of X-ray photoelectron spectroscopic analysis instrument by flange;The vacuum chamber (3) also passes through
The flange (3b) at rear portion is connect with vacuum pump;
The right part of the vacuum chamber (3) is tightly connected with magnetic rod (13);The inner cavity of magnetic rod (13) is cased with rectangular push rod
(15), the magnetic magnetic ring of peripheral surface fitting (14) of magnetic rod (13);The right part carrying magnetic of push rod (15), push rod (15) are stretched
The left part for entering vacuum chamber (3) is equipped with the clamping close device that can be engaged with the lower fixture (29) of fretting apparatus.
2. the fretting wear experimental rig of X-ray photoelectron spectroscopic analysis, feature can be carried out in situ as described in claim 1
It is, the concrete structure of the clamping close device is:
The left part of push rod (15) is fixed with horizontal, rectangle posting (10), be equipped in the middle part of the left bar of posting (10) with
Location hole (29a) matched positioning column (10a) of lower fixture (29);The interior cavity inner sleeve circular shaft (12) of push rod (15);Circular shaft (12)
Right part carrying magnetic, left end be fixedly connected with eccentric wheel (11);Eccentric wheel (11) is in posting (10), the left end of push rod (15)
Bottom is also connected with horizontal copper sheet (16), and the left part of copper sheet (16) is located at the lower section of positioning column (10a), and a left side for copper sheet (16)
End is bent to form to the right grab (16a) upwards, and the grab (16a) is matched with the card slot (29b) of lower fixture (29) bottom.
3. the fretting wear experimental rig of X-ray photoelectron spectroscopic analysis, feature can be carried out in situ as described in claim 1
It is, the concrete structure of the middle and lower part sealed envelope of the force application rod (9) in vacuum chamber (3) is:
The top of the force application rod (9) is pierced by the upper connector of vacuum chamber (3), and force application rod (9) is pierced by the part of vacuum chamber (3)
Housing bellows (26);The upper end of bellows (26) is tightly connected with force application rod (9), the lower end of bellows (26) and vacuum chamber
(3) upper connector is tightly connected.
4. the fretting wear experimental rig of X-ray photoelectron spectroscopic analysis, feature can be carried out in situ as described in claim 1
It is, the composition of the lower clamp fixing mechanism is:
Pedestal (18) is fixed on the trestle table (2) of vacuum chamber (3), the forepart installation Piezoelectric Ceramic of pedestal (18) upper surface
Device (4);The rear end of piezoelectric ceramic actuator (4) is fixedly connected with holder (20);Holder (20) bottom passes through line slide rail (19)
It is connect with pedestal (18), the forepart of holder (20) is equipped with the front wall (20a) to raise up;Retaining wall (20b) bottom after activity
Transverse slider and the horizontal concrete chute at the middle part of holder (20) coordinate, and the rear portion of holder (20) is fixed with supporting block (21);Supporting block
(21) forepart on top and latch segment (23) is hinged;The nose threads connection lock-screw (24) of latch segment (23);Locking screw
The end of nail (24) is resisted after activity behind retaining wall (20b), and the end of lock-screw (24) is hemispherical;Latch segment (23)
The connection elongated slot of hinge shaft (22) and pull rod (25) lower part of rear end coordinate;Pull rod (25) upper end and force application rod (9) lower hinge;
The L-type cushion block (17) that two notches of placement are opposite between retaining wall (20b) after front wall (20a) and activity;Two L-type cushion blocks (17)
Notch between place lower fixture (29).
Priority Applications (1)
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CN201610141119.XA CN105606477B (en) | 2016-03-14 | 2016-03-14 | The fretting wear experimental rig of X-ray photoelectron spectroscopic analysis can be carried out in situ |
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CN201610141119.XA CN105606477B (en) | 2016-03-14 | 2016-03-14 | The fretting wear experimental rig of X-ray photoelectron spectroscopic analysis can be carried out in situ |
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CN105606477B true CN105606477B (en) | 2018-07-06 |
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CN107991205A (en) * | 2018-01-17 | 2018-05-04 | 合肥工业大学 | A kind of reciprocating high temperature friction and wear testing machine of micro linear |
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CN112730126A (en) * | 2020-12-08 | 2021-04-30 | 兰州空间技术物理研究所 | Multi-environment vacuum friction and wear test system |
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