CN105606219A - Micro spectrometer with wedge-shaped waveguide layer guided-mode resonance filter - Google Patents
Micro spectrometer with wedge-shaped waveguide layer guided-mode resonance filter Download PDFInfo
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- CN105606219A CN105606219A CN201610088442.5A CN201610088442A CN105606219A CN 105606219 A CN105606219 A CN 105606219A CN 201610088442 A CN201610088442 A CN 201610088442A CN 105606219 A CN105606219 A CN 105606219A
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- mode resonance
- resonance filter
- wedge
- light
- filter plate
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- 230000010287 polarization Effects 0.000 claims abstract description 15
- 239000002131 composite material Substances 0.000 claims abstract description 5
- 238000010183 spectrum analysis Methods 0.000 claims abstract description 5
- 238000001228 spectrum Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 abstract description 10
- 238000004458 analytical method Methods 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 240000008067 Cucumis sativus Species 0.000 description 1
- 235000010799 Cucumis sativus var sativus Nutrition 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
Abstract
The invention relates to a micro spectrometer with a wedge-shaped waveguide layer guided-mode resonance filter. The micro spectrometer comprises a composite light source, a collimation beam expansion system, a polaroid, a semitransparent mirror, the wedge-shaped waveguide layer guided-mode resonance filter and a plane array detector, wherein light emitted by the composite light source passes through the collimation beam expansion system to realize output of parallel light, the parallel light passes through the polaroid to realize output of polarization light, the polarization light is projected to the semitransparent mirror with a 45-DEG inclination angle, the reflection light perpendicularly radiates on the wedge-shaped waveguide layer guided-mode resonance filter and is reflected by the wedge-shaped waveguide layer guided-mode resonance filter, the reflected light transmits out through the semitransparent mirror, the continuous spectral face information in a wave band scope reflected by the wedge-shaped waveguide layer guided-mode resonance filter is received by the plane array detector, and thereby spectral analysis in a linear polarization state is realized. The system has advantages of simple structure, small volume and low cost, can realize acquisition of the continuous spectral information, can further satisfy polarization state demands of certain substance analysis and realizes precise substance analysis.
Description
Technical field
The present invention relates to a kind of minitype polarization spectral instrument, particularly a kind of micro spectrometer with wedge wave conducting shell guide mode resonance filter plate.
Background technology
Spectrometer is the core component in spectral measurement system, spectral instrument is the basic equipment that Application Optics, electronics and computer technology are analyzed and measured composition and the structure etc. of material, is widely used in the fields such as environmental monitoring, Industry Control, chemical analysis, food inspection, material analysis, Aero-Space remote sensing and education of science. Because traditional spectrometer exists, complex structure, environment for use are limited, not Portable belt and the shortcoming such as expensive, can not meet Site Detection and the demand of monitoring in real time. Therefore, micro spectrometer becomes an important research direction of spectral instrument development. In recent years, due to development and the maturation of optical fiber technology, grating technology and array type detector technology, make spectral detection system form light source, sampling unit and take the photograph the version that spectrum unit is separated, whole system structure has more modularization, use convenient flexibly, thereby make micro spectrometer become Site Detection and the first-selected instrument of monitoring in real time. At present, on market, use many have micro Raman spectrometer, XRF, with the micro spectrometer of real-time temperature compensation function etc., relatively innovation has a spectrometer based on Colloidal Quantum Dots nano material.
Summary of the invention
The present invention be directed to traditional spectrometer and exist that complex structure, environment for use are limited, not Portable belt and expensive problem, a kind of micro spectrometer with wedge wave conducting shell guide mode resonance filter plate has been proposed, using wedge wave conducting shell guide mode resonance filter plate as light-splitting device, the minitype polarization spectrometer forming in conjunction with light source, polarizer, semi-transparent semi-reflecting lens and planar array detector. Utilize resonant positions to change with the linear change of ducting layer thickness, a branch of complex light of incident, through polarizer wave plate after filtration again, will produce the phenomenon of light splitting, thereby can obtain the spectrum face of certain wave band.
Technical scheme of the present invention is: a kind of wedge wave conducting shell guide mode resonance filter plate micro spectrometer, comprise composite light source, collimating and beam expanding system, polarizer, semi-transparent semi-reflecting lens, wedge wave conducting shell guide mode resonance filter plate, planar array detector, secondary color light source emergent light is exported directional light after collimating and beam expanding system, pass through again polarizer output polarization light, polarised light projects on the semi-transparent semi-reflecting lens at 45 degree inclinations angle, reverberation is vertically beaten on wedge wave conducting shell guide mode resonance filter plate, the light reflecting through wedge wave conducting shell guide mode resonance filter plate again process semi-transparent semi-reflecting lens transmission is gone out, received by the continuous spectrum surface information in the wavelength band of wedge wave conducting shell guide mode resonance filter plate reflection by planar array detector, realize the spectrum analysis under linear polarization.
It is 180nm-300nm continually varying Ta2O5 ducting layer that described wedge wave conducting shell guide mode resonance filter plate is selected ducting layer thickness, and grating layer is selected the grating that incisure density is 990line/mm.
Beneficial effect of the present invention is: the micro spectrometer of band wedge wave conducting shell guide mode resonance filter plate of the present invention, and simple in structure, cheap, can accomplish very little structure, carry aspect.
Brief description of the drawings
Fig. 1 is the micro spectrometer structural representation of band wedge wave conducting shell guide mode resonance filter plate of the present invention;
Fig. 2 is that the present invention is the spectral line analog simulation figure of 180-300nm guide mode resonance filter plate minitype polarization spectrometer in wedge wave conducting shell excursion.
Detailed description of the invention
Wedge wave conducting shell guide mode resonance filter plate micro spectrometer structural representation as shown in Figure 1, spectrometer comprises composite light source 1, collimating and beam expanding system 2, polarizer 3, semi-transparent semi-reflecting lens 4, wedge wave conducting shell guide mode resonance filter plate 5, planar array detector 6.
Adopt ion beam etching technology and exposure imaging technology to make wedge wave conducting shell guide mode resonance filter plate 5, cardinal principle is to utilize the guide mode resonance mechanism of wedge wave conducting shell guide mode resonance filter plate, using under secondary color light source vertical incidence condition, its reverberation is a continuous spectrum face, thereby obtain the spectral information in certain wave band, realize spectrum analysis. It is 180nm-300nm continually varying Ta2O5 ducting layer that wedge wave conducting shell guide mode resonance filter plate 5 is selected ducting layer thickness, grating layer is selected the grating that incisure density is 990line/mm, by the calculating emulation to this infrastructure software, find the linear change along with ducting layer thickness, there is the existing picture of peak shift in the reflection peak of continuous spectrum, is the spectral line analog simulation figure (in figure, abscissa and ordinate are respectively wavelength and the reflection efficiencies of formant) of 180-300nm guide mode resonance filter plate minitype polarization spectrometer as shown in Figure 2 in wedge wave conducting shell excursion. The micro spectrometer of this patent is different from general spectrometer system, export directional light by secondary color light source 1 through collimating and beam expanding system 2, through polarizer 3 output polarization light, polarised light projects the semi-transparent semi-reflecting lens 4 at 45 degree inclinations angle, vertically beat on wedge wave conducting shell guide mode resonance filter plate 5 after reflection, its reverberation is the continuous spectrum face in certain wavelength band, the light that wedge wave conducting shell guide mode resonance filter plate 5 reflects again process semi-transparent semi-reflecting lens 4 transmissions is gone out, receive spectrum surface information by planar array detector 6, realize the spectrum analysis under linear polarization. The spectrometer that this patent relates to has microminiaturized feature, simple in structure, volume is little, cheap, can realize the collection of continuous spectrum information. Meanwhile, meet Cucumber analysis to the demand under polarization state, realize the accurate analysis of material.
Claims (2)
1. a wedge wave conducting shell guide mode resonance filter plate micro spectrometer, it is characterized in that, comprise composite light source, collimating and beam expanding system, polarizer, semi-transparent semi-reflecting lens, wedge wave conducting shell guide mode resonance filter plate, planar array detector, secondary color light source emergent light is exported directional light after collimating and beam expanding system, pass through again polarizer output polarization light, polarised light projects on the semi-transparent semi-reflecting lens at 45 degree inclinations angle, reverberation is vertically beaten on wedge wave conducting shell guide mode resonance filter plate, the light reflecting through wedge wave conducting shell guide mode resonance filter plate again process semi-transparent semi-reflecting lens transmission is gone out, received by the continuous spectrum surface information in the wavelength band of wedge wave conducting shell guide mode resonance filter plate reflection by planar array detector, realize the spectrum analysis under linear polarization.
2. wedge wave conducting shell guide mode resonance filter plate micro spectrometer according to claim 1, it is characterized in that, it is 180nm-300nm continually varying Ta2O5 ducting layer that described wedge wave conducting shell guide mode resonance filter plate is selected ducting layer thickness, and grating layer is selected the grating that incisure density is 990line/mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610088442.5A CN105606219B (en) | 2016-02-17 | 2016-02-17 | Micro spectrometer with wedge wave conducting shell guide mode resonance filter plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610088442.5A CN105606219B (en) | 2016-02-17 | 2016-02-17 | Micro spectrometer with wedge wave conducting shell guide mode resonance filter plate |
Publications (2)
| Publication Number | Publication Date |
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| CN105606219A true CN105606219A (en) | 2016-05-25 |
| CN105606219B CN105606219B (en) | 2017-11-28 |
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| CN201610088442.5A Active CN105606219B (en) | 2016-02-17 | 2016-02-17 | Micro spectrometer with wedge wave conducting shell guide mode resonance filter plate |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7352932B1 (en) * | 2006-09-29 | 2008-04-01 | National Central University | Guided-mode resonance filter and fabrication method of same |
| CN101360981A (en) * | 2006-01-17 | 2009-02-04 | 惠普开发有限公司 | Raman spectroscopy system and method using a subwavelength resonant grating filter |
| CN103063305A (en) * | 2012-12-24 | 2013-04-24 | 中国科学院西安光学精密机械研究所 | Two-channel Doppler heterodyne interferometer |
| CN103398952A (en) * | 2013-08-13 | 2013-11-20 | 上海理工大学 | Optimization method of reflexivity of guided-mode resonance filter applied to detection of biosensor |
| US20140044393A1 (en) * | 2012-08-08 | 2014-02-13 | The University Of Texas System Board Of Regents | Spectrally dense comb-like filters fashioned with thick-guided-mode resonant gratings |
| CN104634453A (en) * | 2015-02-03 | 2015-05-20 | 上海理工大学 | Method for detecting linear polarization incident light polarization angle |
| CN104655278A (en) * | 2015-02-13 | 2015-05-27 | 上海交通大学 | Wavelength calibration instrument |
-
2016
- 2016-02-17 CN CN201610088442.5A patent/CN105606219B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101360981A (en) * | 2006-01-17 | 2009-02-04 | 惠普开发有限公司 | Raman spectroscopy system and method using a subwavelength resonant grating filter |
| US7352932B1 (en) * | 2006-09-29 | 2008-04-01 | National Central University | Guided-mode resonance filter and fabrication method of same |
| US20140044393A1 (en) * | 2012-08-08 | 2014-02-13 | The University Of Texas System Board Of Regents | Spectrally dense comb-like filters fashioned with thick-guided-mode resonant gratings |
| CN103063305A (en) * | 2012-12-24 | 2013-04-24 | 中国科学院西安光学精密机械研究所 | Two-channel Doppler heterodyne interferometer |
| CN103398952A (en) * | 2013-08-13 | 2013-11-20 | 上海理工大学 | Optimization method of reflexivity of guided-mode resonance filter applied to detection of biosensor |
| CN104634453A (en) * | 2015-02-03 | 2015-05-20 | 上海理工大学 | Method for detecting linear polarization incident light polarization angle |
| CN104655278A (en) * | 2015-02-13 | 2015-05-27 | 上海交通大学 | Wavelength calibration instrument |
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| CN105606219B (en) | 2017-11-28 |
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Effective date of registration: 20191203 Address after: Room 1410-1411, North building, No. 1699, Zuchongzhi South Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Kunshan Shangli Optoelectronic Information Application Technology Research Institute Co., Ltd Address before: 200093 Shanghai military road, Yangpu District, No. 516 Patentee before: University of Shanghai for Science and Technology |
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