CN105573357A - Air discharging pressure stabilizer and air discharging pressure stabilizing method - Google Patents
Air discharging pressure stabilizer and air discharging pressure stabilizing method Download PDFInfo
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- CN105573357A CN105573357A CN201410539827.XA CN201410539827A CN105573357A CN 105573357 A CN105573357 A CN 105573357A CN 201410539827 A CN201410539827 A CN 201410539827A CN 105573357 A CN105573357 A CN 105573357A
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- pressure
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- fan
- air draft
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Abstract
The invention relates to an air discharging pressure stabilizer and an air discharging pressure stabilizing method. The main pipe of the air discharging pressure stabilizer is serially connected between a factory end and an equipment end. The main pipe is provided with a valve plate mounting block. One end, which is next to the factory end, of the main pipe is internally provided with a fan, and the other end which is next to the equipment end is provided with a measuring hole joint. A pressure sensor is mounted above the measurement hole joint. A stepping motor is mounted on the valve plate mounting block. The output end of the stepping motor is connected with a valve plate in the valve plate mounting block. The valve plate rotates through driving of the stepping motor. A control circuit board is mounted on the valve plate mounting block. The stepping motor, the fan and the pressure sensor are electrically connected with the control circuit board. The method is characterized in that when the pressure at the factory end is in an under-pressure state, the fan operates so that the air discharging interface pressure at the equipment end reaches a preset value; and when the pressure at the factory end is in an overpressure state, the opening angle of the valve plate is adjusted and the air discharging interface pressure at the equipment end is adjusted to a preset value. The air discharging pressure stabilizer and the air discharging pressure stabilizing method have advantages of simple structure and convenient operation.
Description
Technical field
The present invention relates to a kind of air draft voltage stabilizer and air draft method for stabilizing voltage thereof, be applicable to air draft demand and the occasion had higher requirements to air draft pressure plateau, most typical application is in field of semiconductor devices, as even glue developing board.
Background technology
The exhaust system of even glue developing board is the very important ingredient of equipment, and its major function gets rid of waste gas in technique implementation procedure and waste heat, wherein has the greatest impact to the technological effect of even glue.The process consistency of even glue developing board is its important performance index, and therefore the stability of exhaust system duty just becomes particularly important as plant-size equipment!
Relative to other parts of equipment, the impact that exhaust system is subject to factory's business supply is comparatively large, and the most directly performance is exactly the instability of factory's business air draft pressure.If factory's business is under-voltage, in equipment, waste heat row does not go out; If the excessive rising of factory's business pressure, then can cause glued membrane in even glue process partially thick; All consequences are numerous! Therefore be necessary to increase a device between equipment and factory are engaged in, no matter can both ensure that when factory's under-voltage or overvoltage of business equipment air draft pressure is in a stable state, this device is exactly air draft voltage stabilizer.
Summary of the invention
In order to solve the impact that factory's under-voltage or overvoltage two kinds of situations of business cause, the object of the present invention is to provide a kind of air draft voltage stabilizer and air draft method for stabilizing voltage thereof.
The object of the invention is to be achieved through the following technical solutions:
Air draft voltage stabilizer of the present invention comprises main pipeline, stepper motor, valve plate, valve plate mounting blocks, control circuit board, fan and pressure transducer, wherein main pipeline is connected between factory's business end and the equipment end needing air draft, and described main pipeline is provided with valve plate mounting blocks; Described main pipeline is provided with fan in one end of factory's business end, and the other end near equipment end is provided with measured hole joint, and described pressure transducer is arranged on the top of this measured hole joint; Described valve plate mounting blocks is provided with stepper motor, and the output terminal of this stepper motor is connected with the valve plate being positioned at described valve plate mounting blocks, and described valve plate is rotated by the driving of stepper motor; Described control circuit board is arranged on valve plate mounting blocks, and described stepper motor, fan and pressure transducer are electrically connected with this control circuit board respectively.
Wherein: described main pipeline is divided into upstream line and downstream line, one end of this upstream line and downstream line is connected with described valve plate mounting blocks respectively, and the other end is equipped with the flange for connecting; Described stepper motor is fixed on valve plate mounting blocks by motor mounting rack, and the output terminal of this stepper motor is connected with the valve shaft on valve plate by shaft coupling;
The air draft method for stabilizing voltage of air draft voltage stabilizer of the present invention is: by the pressure of the equipment end of described pressure sensor monitoring measured hole joint, the measurement pressure recorded compares with set pressure, when measure pressure be greater than set pressure, namely factory business end be in under-voltage condition time, described control circuit board controls described fan work, makes the pressure of equipment end reach set pressure; When measure pressure be less than set pressure, namely factory business end be in superpressure state time, described control circuit board controls described stepper motor work, drives described valve plate to rotate, and adjust the folding angle of this valve plate, the pressure of conditioning equipment end reaches set pressure; The initial speed of described fan is 0rpm, and described valve plate folding is to maximum angle; Concrete steps are:
Step one, startup self-detection: the rotating speed of fan is set to 0rpm, stepper motor driven valve plate is to folding maximum angle;
Step 2, setup parameter: target setting air draft pressure, adopts acquiescence force value or last setting value if do not arranged;
Step 3, factory's business thermodynamic state verification: the measured value reading pressure transducer, compare set pressure and measure pressure, comparing result is divided into following two kinds of situations:
Situation A: set pressure is lower than measuring pressure: the folding angle of adjustment valve plate, if valve plate folding is to time maximum, remains situation A, then start fan turns; Improve rotation speed of the fan, until set pressure conforms to measurement pressure; If fan goes to maximum (top) speed, remain situation A, then send warning, quit work;
Situation B: set pressure is higher than measurement pressure: reduce rotation speed of the fan, if rotation speed of the fan is 0rpm, remain situation B, then reduce the folding angle of valve plate, until set pressure conforms to measurement pressure;
Step 4, interrupts: after step 3 completes, wait for 5 seconds, skip to step 2 afterwards, repetitive cycling.
Advantage of the present invention and good effect are:
1. air draft stabilizator structure of the present invention is simple, adaptability good, by the folding angle of stepper motor adjustment valve plate, and by the rotating speed of adjustment fan, when factory's under-voltage or superpressure state of business, all can conditioning equipment end air draft interface pressure to setting value.
2. air draft method for stabilizing voltage of the present invention is easy and simple to handle, fast.
Accompanying drawing explanation
Fig. 1 is structure principle chart of the present invention;
Fig. 2 is structural front view of the present invention;
Fig. 3 is C-C cut-open view of Fig. 2;
Fig. 4 is perspective view of the present invention;
Fig. 5 is control flow chart of the present invention;
Wherein: 1 is main pipeline, 101 is upstream line, and 102 is downstream line, and 2 is stepper motor, and 3 is motor mounting rack, 4 is shaft coupling, and 5 is valve shaft, and 6 is valve plate, and 7 is valve plate mounting blocks, 8 is control circuit board, and 9 is fan, and 10 is measured hole joint, and 11 is pressure transducer.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in figures 1-4, air draft voltage stabilizer of the present invention comprises main pipeline 1, stepper motor 2, motor mounting rack 3, shaft coupling 4, valve shaft 5, valve plate 6, valve plate mounting blocks 7, control circuit board 8, fan 9, measured hole joint 10 and pressure transducer 11, wherein main pipeline 1 is connected between factory business end A and the equipment end B needing air draft, and main pipeline 1 is communicated with valve plate mounting blocks 7; The main pipeline 1 of the present embodiment is divided into upstream line 101 and downstream line 102, and one end of this upstream line 101 and downstream line 102 is connected with valve plate mounting blocks 7 respectively, and the other end is equipped with the flange for connecting.Downstream line 102 is provided with fan 9 in the other end of factory business end A, and this fan 9 has the function of feedback rotating speed; Upstream line 101 is provided with measured hole joint 10 near the other end of equipment end B, and pressure transducer 11 is positioned at directly over this measured hole joint 10, is fixed on and needs on the device Host frame of air draft.
Stepper motor 2 is fixed on valve plate mounting blocks 7 by motor mounting rack 3, and the output terminal of this stepper motor 2 is connected with the valve shaft 5 on the valve plate 6 being positioned at valve plate mounting blocks 7 by shaft coupling 4, and valve plate 6 is rotatable by the driving of stepper motor 2.
Control circuit board 8 is arranged on valve plate mounting blocks 7, and stepper motor 2, fan 9 and pressure transducer 11 are electrically connected with this control circuit board 8 respectively.
The air draft method for stabilizing voltage of air draft voltage stabilizer of the present invention is:
The initial speed of fan 9 is 0rpm, and valve plate 6 folding is to maximum angle.The pressure of the equipment end B at measured hole joint 10 place is monitored by pressure transducer 11, the measurement pressure recorded compares with set pressure, when measure pressure be greater than set pressure, namely factory business end A be in under-voltage condition time, control circuit board 8 controls fan 9 and works, and makes the pressure of equipment end B reach set pressure; When measure pressure be less than set pressure, namely factory business end A be in superpressure state time, control circuit board 8 control step motor 2 works, and drive valve plate 6 is rotated, and adjusts the folding angle of this valve plate 6, and the pressure of conditioning equipment end B reaches set pressure.Concrete steps are:
Step one, startup self-detection: the rotating speed of fan 9 is set to 0rpm, stepper motor 2 drive valve plate 6 to folding maximum angle;
Step 2, setup parameter: target setting air draft pressure, adopts acquiescence force value or last setting value if do not arranged;
Step 3, factory's business thermodynamic state verification: the measured value reading pressure transducer 11, compare set pressure and measure pressure, comparing result is divided into following two kinds of situations:
Situation A: set pressure is lower than measurement pressure: first detect valve plate 6 whether folding angle to maximum, if valve plate 6 folding is to time maximum, remain situation A, then start fan 9 and rotate; Improve fan 9 rotating speed to maximum (top) speed, until set pressure conforms to measurement pressure; If fan 9 goes to maximum (top) speed, remain situation A, then send warning, quit work; If detect that valve plate 6 folding angle does not reach maximum, then stepper motor 2 continues drive valve plate 6 and rotates, and increases valve plate 6 folding angle, until set pressure conforms to measurement pressure;
Situation B: set pressure is higher than measuring pressure: whether the rotating speed first detecting fan 9 is 0rpm, if fan 9 rotating speed is 0rpm, is then reduced the folding angle of valve plate 6 by stepper motor 2, until set pressure conforms to measurement pressure; If fan 9 rotating speed does not reach 0rpm, reduce fan 9 rotating speed, until set pressure conforms to measurement pressure;
Step 4, interrupts: after step 3 completes, wait for 5 seconds, skip to step 2 afterwards, repetitive cycling.
The static pressure measured near factory business end A applied by pressure transducer 11 of the present invention.Fan 9 of the present invention is commercial products, purchases the 3214J/2H3PR-204 model aerofoil fan in German EBM-PAPST company.
Claims (6)
1. an air draft voltage stabilizer, it is characterized in that: comprise main pipeline (1), stepper motor (2), valve plate (6), valve plate mounting blocks (7), control circuit board (8), fan (9) and pressure transducer (11), wherein main pipeline (1) is connected between factory's business end (A) and the equipment end (B) needing air draft, and described main pipeline (1) is provided with valve plate mounting blocks (7); Described main pipeline (1) is provided with fan (9) in one end of factory's business end (A), the other end near equipment end (B) is provided with measured hole joint (10), and described pressure transducer (11) is arranged on the top of this measured hole joint (10); Described valve plate mounting blocks (7) is provided with stepper motor (2), the output terminal of this stepper motor (2) is connected with the valve plate (6) being positioned at described valve plate mounting blocks (7), and described valve plate (6) is rotated by the driving of stepper motor (2); Described control circuit board (8) is arranged on valve plate mounting blocks (7), and described stepper motor (2), fan (9) and pressure transducer (11) are electrically connected with this control circuit board (8) respectively.
2. by air draft voltage stabilizer according to claim 1, it is characterized in that: described main pipeline (1) is divided into upstream line (101) and downstream line (102), one end of this upstream line (101) and downstream line (102) is connected with described valve plate mounting blocks (7) respectively, and the other end is equipped with the flange for connecting.
3. by the air draft voltage stabilizer described in claim 1 or 2, it is characterized in that: described stepper motor (2) is fixed on valve plate mounting blocks (7) by motor mounting rack (3), the output terminal of this stepper motor (2) is connected with the valve shaft (5) on valve plate (6) by shaft coupling (4).
4. the air draft method for stabilizing voltage by air draft voltage stabilizer described in claim 1, it is characterized in that: by the pressure of the equipment end (B) at described pressure transducer (11) monitoring measured hole joint (10) place, the measurement pressure recorded compares with set pressure, when measure pressure be greater than set pressure, namely factory business end (A) be in under-voltage condition time, described control circuit board (8) controls described fan (9) work, makes the pressure of equipment end (B) reach set pressure; When measure pressure be less than set pressure, namely factory business end (A) be in superpressure state time, described control circuit board (8) controls described stepper motor (2) work, described valve plate (6) is driven to rotate, adjust the folding angle of this valve plate (6), the pressure of conditioning equipment end (B) reaches set pressure.
5., by air draft method for stabilizing voltage according to claim 4, it is characterized in that: the initial speed of described fan (9) is 0rpm, and described valve plate (6) folding is to maximum angle.
6., by the air draft method for stabilizing voltage described in claim 4 or 5, it is characterized in that: concrete steps are:
Step one, startup self-detection: the rotating speed of fan (9) is set to 0rpm, stepper motor (2) drive valve plate (6) is to folding maximum angle;
Step 2, setup parameter: target setting air draft pressure, adopts acquiescence force value or last setting value if do not arranged;
Step 3, factory's business thermodynamic state verification: the measured value reading pressure transducer (11), compare set pressure and measure pressure, comparing result is divided into following two kinds of situations:
Situation A: set pressure is lower than measuring pressure: the folding angle of adjustment valve plate (6), if valve plate (6) folding is to time maximum, remains situation A, then start fan (9) and rotate; Improve fan (9) rotating speed, until set pressure conforms to measurement pressure; If fan (9) goes to maximum (top) speed, remain situation A, then send warning, quit work;
Situation B: set pressure is higher than measurement pressure: reduce fan (9) rotating speed, if fan (9) rotating speed is 0rpm, remain situation B, then reduce the folding angle of valve plate (6), until set pressure conforms to measurement pressure;
Step 4, interrupts: after step 3 completes, wait for 5 seconds, skip to step 2 afterwards, repetitive cycling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410539827.XA CN105573357B (en) | 2014-10-11 | 2014-10-11 | A kind of air draft voltage-stablizer and its air draft method for stabilizing voltage |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410539827.XA CN105573357B (en) | 2014-10-11 | 2014-10-11 | A kind of air draft voltage-stablizer and its air draft method for stabilizing voltage |
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| CN105573357A true CN105573357A (en) | 2016-05-11 |
| CN105573357B CN105573357B (en) | 2018-04-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089411A (en) * | 2018-01-26 | 2018-05-29 | 江西鼎峰电子科技股份有限公司 | Automatic adjustment detection plus the anti-closure plate developing machine of alarm |
| CN113611637A (en) * | 2021-08-31 | 2021-11-05 | 北京北方华创微电子装备有限公司 | Exhaust device and semiconductor heat treatment equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3978883A (en) * | 1974-05-06 | 1976-09-07 | Danfoss A/S | Device for regulating the combustion air of a furnace, especially with oil- or gasburner and blower for heating installations |
| EP0264486A1 (en) * | 1986-10-24 | 1988-04-27 | Wolter GmbH Maschinen- und Apparatebau KG | Blower, particularly a duct blower |
| CN202616010U (en) * | 2012-05-17 | 2012-12-19 | 江西富山惠田实业有限公司 | Non-contact air cooling voltage stabilizer |
| CN203785165U (en) * | 2014-04-26 | 2014-08-20 | 上海世富环保节能科技股份有限公司 | Solar central ventilation system |
-
2014
- 2014-10-11 CN CN201410539827.XA patent/CN105573357B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3978883A (en) * | 1974-05-06 | 1976-09-07 | Danfoss A/S | Device for regulating the combustion air of a furnace, especially with oil- or gasburner and blower for heating installations |
| EP0264486A1 (en) * | 1986-10-24 | 1988-04-27 | Wolter GmbH Maschinen- und Apparatebau KG | Blower, particularly a duct blower |
| CN202616010U (en) * | 2012-05-17 | 2012-12-19 | 江西富山惠田实业有限公司 | Non-contact air cooling voltage stabilizer |
| CN203785165U (en) * | 2014-04-26 | 2014-08-20 | 上海世富环保节能科技股份有限公司 | Solar central ventilation system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108089411A (en) * | 2018-01-26 | 2018-05-29 | 江西鼎峰电子科技股份有限公司 | Automatic adjustment detection plus the anti-closure plate developing machine of alarm |
| CN108089411B (en) * | 2018-01-26 | 2023-08-25 | 江西尼罗电器有限责任公司 | Automatic adjusting, detecting, alarming and anti-blocking plate developing machine |
| CN113611637A (en) * | 2021-08-31 | 2021-11-05 | 北京北方华创微电子装备有限公司 | Exhaust device and semiconductor heat treatment equipment |
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| CN105573357B (en) | 2018-04-24 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |