CN105571476A - Flat panel detection device - Google Patents
Flat panel detection device Download PDFInfo
- Publication number
- CN105571476A CN105571476A CN201510990464.6A CN201510990464A CN105571476A CN 105571476 A CN105571476 A CN 105571476A CN 201510990464 A CN201510990464 A CN 201510990464A CN 105571476 A CN105571476 A CN 105571476A
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- Prior art keywords
- guide rail
- detecting unit
- testing apparatus
- flat plate
- movable block
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a flat panel detection device, and belongs to the technical field of flat panel detection. The flat panel detection device comprises a base used for supporting a to-be-detected flat panel, two opposite sides of the base are respectively provided with a first guide rail arranged along the first direction, a support is arranged above the two first guide rails, the support is provided with a second guide rail arranged along the second direction, the second guide rail is provided with a movable block used for supporting a flat panel detection unit, the first direction is vertical to the second direction, and the flat panel detection device also comprises a first position detection unit used for detecting the position of the support in the first direction, a second position detection unit used for detecting the position of the movable block in the second direction, a first micro-motion detection unit used for detecting the deviation of the support in the second direction, and a second micro-motion detection unit used for detecting the deviation of the movable block in the first direction. According to the flat panel detection device, ultra-high-precision detection can be realized, and the precision can reach 20-50 nm.
Description
Technical field
The invention belongs to dull and stereotyped detection technique field, be specifically related to a kind of flat plate testing apparatus.
Background technology
Along with the development of display technique, the size of display device (liquid crystal indicator, OLED display etc.) is increasing, display base plate (array base palte, color membrane substrates, the base plate for packaging) size wherein used is also increasing, and prepares the mask plate size also corresponding increase of display base plate.
For ensureing the quality of mask plate, display base plate etc., need to detect structure wherein.And will detect, then first dull and stereotyped detecting unit (as microscope) must accurately be navigated to position (as Mark position) to be detected.Because the size of mask plate, display base plate etc. is very large, structure very tiny (at micron order even nanoscale) wherein simultaneously, therefore dull and stereotyped detecting unit must be located very accurately.
In existing flat plate testing apparatus, the general position of employing grating scale to dull and stereotyped detecting unit is detected, but the accuracy of detection of grating scale is lower, naturally also just can not realize the accurate location to dull and stereotyped detecting unit, the detection especially for large scale flat board is all the more so.
Summary of the invention
The present invention is directed to problem lower to the position detection accuracy of dull and stereotyped detecting unit in existing flat plate testing apparatus, a kind of flat plate testing apparatus carrying out high precision position detection is provided.
The technical scheme that solution the technology of the present invention problem adopts is a kind of flat plate testing apparatus, it comprises for carrying the base station treating master plate, base station two opposite sides are respectively equipped with first guide rail arranged along first direction, two the first guide rails are provided with support, support is provided with the second guide rail arranged along second direction, second guide rail is provided with the movable block for loading plate detecting unit, and described first direction is vertical with second direction, and described flat plate testing apparatus also comprises:
For the primary importance detecting unit of Bracket for Inspection position in a first direction;
For detecting the second place detecting unit of movable block position in a second direction;
For the first fine motion detecting unit that Bracket for Inspection offsets in a second direction;
For detecting the second fine motion detecting unit that movable block offsets in a first direction.
Preferably, described primary importance detecting unit has two, is respectively used to position in a first direction, Bracket for Inspection two ends.
Preferably, described primary importance detecting unit is the first laser interference distance-measuring equipment; Described second place detecting unit is the second laser interference distance-measuring equipment.
Preferably, described first fine motion detecting unit is the first electric capacity range sensor; Described second fine motion detecting unit is the second electric capacity range sensor.
Further preferably, described first electric capacity range sensor comprise along the first guide rail arranged outside the first detection reference face and be located at the first detecting electrode with the first detection reference face relative position on support; Described second electric capacity range sensor comprise along the second guide rail arranged outside the second detection reference face and be located at the second detecting electrode with the second detection reference face relative position on movable block.
Preferably, described first guide rail and the second guide rail are air-float guide rail.
Preferably, described flat plate testing apparatus also comprises: for driving described support along the first driving mechanism of the first guide rail movement; For driving described movable block along the second driving mechanism of the second guide rail movement.
Further preferably, described first driving mechanism is the first linear electric motors; Described second driving mechanism is the second linear electric motors.
Preferably, described base station and/or support are made up of marble.
Preferably, described base station is supported on vibration isolation air bag.
Flat plate testing apparatus of the present invention comprises primary importance detecting unit and second place detecting unit, thus can detect support and the movable block overall positions in respective track (macroscopic view detects); Meanwhile, in flat plate testing apparatus, also comprise the first fine motion detecting unit and the second fine motion detecting unit, therefore it can detect (microcosmic detection) with the minor shifts in respective track vertical direction to support and movable block; By the mode that macroscopic view detects and microcosmic detection combines, this flat plate testing apparatus can carry out the superhigh precision detection of nanoscale (20 ~ 50nm) to dull and stereotyped detecting unit, and realizes thus locating very accurately.
Flat plate testing apparatus of the present invention is applicable to detect the flat board such as mask plate, display base plate, is particularly useful for detecting large scale flat board.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of flat plate testing apparatus of embodiments of the invention;
Fig. 2 is the structural representation of a kind of flat plate testing apparatus on other direction of embodiments of the invention;
Wherein, Reference numeral is: 1, base station; 19, vibration isolation air bag; 2, support; 3, movable block; 39, dull and stereotyped detecting unit; 41, the first guide rail; 411, the first linear electric motors; 42, the second guide rail; 421, the second linear electric motors; 51, the first laser interferometer; 52, the first catoptron; 61, the second laser interferometer; 62, the second catoptron; 71, the first detection reference face; 72, the first detecting electrode; 81, the second detection reference face; 82, the second detecting electrode.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Embodiment 1:
As shown in Figure 1 and Figure 2, the present embodiment provides a kind of flat plate testing apparatus, and it can be used for detecting flat object, as mask plate, display base plate etc., is particularly useful for detecting large scale flat board.
This flat plate testing apparatus comprises for carrying the base station 1 treating master plate, base station 1 two opposite sides are respectively provided with first guide rail 41 arranged along first direction respectively, two the first guide rails 41 are provided with support 2, support 2 is provided with the second guide rail 42 arranged along second direction, second guide rail 42 is provided with the movable block 3 for loading plate detecting unit 39, and first direction is vertical with second direction.
Wherein, as shown in Figure 1 and Figure 2, flat board to be detected is located on base station 1, and the both sides of base station 1 are respectively provided with first guide rail 41 arranged along first direction respectively, a support 2 (portal frame) is erected on these two the first guide rails 41, and can along the first guide rail 41 (first direction) motion.Support 2 is also provided with the second guide rail 42, second guide rail 42 to arrange along the second direction vertical with first direction, movable block 3 is located at also can along the second guide rail 42 (second direction) motion on the second guide rail 42.Movable block 3 is provided with the dull and stereotyped detecting unit 39 for detecting flat board, and as microscope or other optics, electrical detectors etc., it specifically can be determined according to detected object and test item.
By above structure, support 2 and movable block 3 can drive dull and stereotyped detecting unit 39 to move in two mutually orthogonal directions respectively, thus dull and stereotyped detecting unit 39 can be moved to dull and stereotyped any position.
Preferably, the first guide rail 41 and the second guide rail 42 are air-float guide rail.
That is, above each guide rail preferably adopts the form of air-float guide rail, thus ensures the stable movement of structure on it.
Certainly, be not limited to air-float guide rail with upper rail, it also can be other form known such as mechanical guide.
Preferably, flat plate testing apparatus also comprises: the first driving mechanism moved along the first guide rail 41 for driving arm 2; For the second driving mechanism driving movable block 3 to move along the second guide rail 42.Preferred, the first driving mechanism is the first linear electric motors 411; Second driving mechanism is the second linear electric motors 421.
That is, as shown in Figure 1 and Figure 2, driving mechanism Direct driver support 2 also can be set and movable block 3 moves, for ensure motion accurately and stable, therefore driving mechanism preferably adopts the form of linear electric motors.Certainly, if driving mechanism is other forms such as cylinder, or there is no driving mechanism at all and by Manual-pushing support 2 and movable block 3, be all feasible yet.
Preferably, base station 1 and/or support 2 are made up of marble.
That is, preferably adopt marble to manufacture base station 1, support 2 etc., thus reduce the natural frequency of vibration of system.
Preferably, base station 1 is supported on vibration isolation air bag 19.
That is, for reducing the transmission of vibration, preferably base station 1 can be supported with multiple vibration isolation air bag 19.
Further, this flat plate testing apparatus also comprises:
For the primary importance detecting unit of Bracket for Inspection 2 position in a first direction;
For detecting the second place detecting unit of movable block 3 position in a second direction;
For the first fine motion detecting unit that Bracket for Inspection 2 offsets in a second direction;
For detecting the second fine motion detecting unit that movable block 3 offsets in a first direction.
That is, as shown in Figure 1 and Figure 2, in the flat plate testing apparatus of the present embodiment, primary importance detecting unit and second place detecting unit is provided with, thus difference Bracket for Inspection 2 and the position of movable block 3 in respective track.
Obviously, in order to realize motion, therefore support 2 and can not fitting tightly completely between movable block 3 and respective track, certainly exist certain interval, therefore the motion of support 2 and movable block 3 has certain " nonlinearity ", namely, when support 2 and movable block 3 move in respective track, also can there is small displacement in it on the direction vertical with guide rail.Although this displacement is very small, because flat plate testing apparatus (the especially massive plate pick-up unit) requirement to accuracy of detection is very high, therefore this small displacement also can lead to grave consequences.Therefore, be also provided with the first fine motion detecting unit and the second fine motion detecting unit in the flat plate testing apparatus of the present embodiment, be respectively used to Bracket for Inspection 2 and the displacement of movable block 3 on the direction perpendicular to the guide rail corresponding with it (non linear displacement).
The flat plate testing apparatus of the present embodiment comprises primary importance detecting unit and second place detecting unit, thus can detect support 2 and the overall positions of movable block 3 in respective track (macroscopic view detects); Meanwhile, in flat plate testing apparatus, also comprise the first fine motion detecting unit and the second fine motion detecting unit, therefore it can detect (microcosmic detection) with the minor shifts in respective track vertical direction to support 2 and movable block 3; By the mode that macroscopic view detects and microcosmic detection combines, this flat plate testing apparatus can carry out the superhigh precision detection of nanoscale (20 ~ 50nm) to dull and stereotyped detecting unit 39, and realizes thus locating very accurately.
Preferably, primary importance detecting unit has two, is respectively used to position in a first direction, Bracket for Inspection 2 two ends.
Obviously, support 2 is provided at the larger structure on two the first guide rails 41, and its motion on two guide rails is difficult to ensure Complete Synchronization, thus Bracket for Inspection 2 not always with the first guide rail 41 exact vertical, but can exist small " deflection ", this causes movable block 3 when moving along the second guide rail 42, and can also produce certain skew in a first direction, this skew also can affect accuracy of detection.Obviously, if only its deflection situation be can not determine in the position of Bracket for Inspection 2 certain a bit, and to the position with point multiple on a position detection unit Bracket for Inspection 2, technically also very difficult.Therefore, as shown in Figure 1 and Figure 2, two primary importance detecting units can be set in flat plate testing apparatus, be respectively used to detect position in a first direction, Bracket for Inspection 2 two ends, thus the deflection situation of support 2 can be obtained, and by further calculating the accurate location determining movable block 3 on support 2.
Preferably, primary importance detecting unit is the first laser interference distance-measuring equipment, and second place detecting unit is the second laser interference distance-measuring equipment.
That is, laser interference distance-measuring equipment can be adopted as above macroscopical distance-measuring equipment.Laser interference distance-measuring equipment utilizes the interference of laser to carry out the device of finding range, and it has higher accuracy of detection, can reach 20nm.Concrete, laser interference distance-measuring equipment can comprise the laser interferometer for Emission Lasers and the catoptron for reflects laser, and laser interferometer is found range by the laser receiving reflection.Wherein, in figure, the first laser interferometer 51 of the first laser interference distance-measuring equipment and the second laser interference distance-measuring equipment and the second laser interferometer 61 can be located on base station 1 and support 2 respectively, and corresponding first catoptron 52 and the second catoptron 62 are located on support 2 and movable block 3 respectively; If but should be appreciated that the location swap of laser interferometer and catoptron, be also feasible.
Certainly, if adopt other known distance-measuring equipments such as grating scale as above position detection unit, be also feasible.
Preferably, the first fine motion detecting unit is the first electric capacity range sensor, and the second fine motion detecting unit is the second electric capacity range sensor.
As previously mentioned, the effect of fine motion detecting unit be Bracket for Inspection 2 and movable block 3 with the micro-displacement in respective track vertical direction, this just requires that the accuracy of detection of fine motion detecting unit is very high, then less demanding to the scope of the distance that it can detect.Electric capacity range sensor just in time meets above requirement, although because it is not suitable for longer-distance detection (because capacitance is too little), closely time, accuracy of detection is very high, can reach 10nm.
Preferred, the first electric capacity range sensor comprises the first detection reference face 71 along the first guide rail 41 arranged outside and the first detecting electrode 72 of being located at the first detection reference face 71 relative position on support 2; Second electric capacity range sensor comprises the second detection reference face 81 along the second guide rail 42 arranged outside and the second detecting electrode 82 of being located at the second detection reference face 81 relative position on movable block 3.
Obviously, support 2 and movable block 3 can move along guide rail, no matter and where they are positioned at guide rail, electric capacity range sensor is all wanted to detect it.Therefore, as shown in Figure 1, detection reference face (namely as the electrode of benchmark) in electric capacity range sensor should be the strip of the arranged outside along guide rail, support 2 and movable block 3 then arrange another electrode (detecting electrode), thus when support 2 is subjected to displacement along the direction vertical with its guide rail with movable block 3, distance between corresponding detection reference face and detecting electrode can change and cause capacitance variation, thus this displacement can be detected.
Certainly, if do not adopt electric capacity range sensor, and the known distance-measuring equipment adopting other detected slight distance to change is as above fine motion detecting unit, is also feasible.
Should be appreciated that because support 2 entirety is rigidity, therefore its non linear displacement in two the first guide rails 41 is inevitable equal.Therefore, above the first fine motion detecting unit (the first electric capacity range sensor) is as long as be located at first guide rail 41 place wherein.
Should be appreciated that because dull and stereotyped detecting unit 39 is located on movable block 3, if therefore the second above catoptron 62 and the second detecting electrode 82 are directly attached on dull and stereotyped detecting unit 39 (as shown in FIG.), be connected on movable block 3 between also should being considered as.
Be understandable that, the illustrative embodiments that above embodiment is only used to principle of the present invention is described and adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a flat plate testing apparatus, comprise for carrying the base station treating master plate, base station two opposite sides are respectively equipped with first guide rail arranged along first direction, two the first guide rails are provided with support, support is provided with the second guide rail arranged along second direction, and the second guide rail is provided with the movable block for loading plate detecting unit, and described first direction is vertical with second direction, it is characterized in that, described flat plate testing apparatus also comprises:
For the primary importance detecting unit of Bracket for Inspection position in a first direction;
For detecting the second place detecting unit of movable block position in a second direction;
For the first fine motion detecting unit that Bracket for Inspection offsets in a second direction;
For detecting the second fine motion detecting unit that movable block offsets in a first direction.
2. flat plate testing apparatus according to claim 1, is characterized in that,
Described primary importance detecting unit has two, is respectively used to position in a first direction, Bracket for Inspection two ends.
3. flat plate testing apparatus according to claim 1, is characterized in that,
Described primary importance detecting unit is the first laser interference distance-measuring equipment;
Described second place detecting unit is the second laser interference distance-measuring equipment.
4. flat plate testing apparatus according to claim 1, is characterized in that,
Described first fine motion detecting unit is the first electric capacity range sensor;
Described second fine motion detecting unit is the second electric capacity range sensor.
5. flat plate testing apparatus according to claim 4, is characterized in that,
Described first electric capacity range sensor comprise along the first guide rail arranged outside the first detection reference face and be located at the first detecting electrode with the first detection reference face relative position on support;
Described second electric capacity range sensor comprise along the second guide rail arranged outside the second detection reference face and be located at the second detecting electrode with the second detection reference face relative position on movable block.
6. flat plate testing apparatus according to claim 1, is characterized in that,
Described first guide rail and the second guide rail are air-float guide rail.
7. flat plate testing apparatus according to claim 1, is characterized in that, also comprises:
For driving described support along the first driving mechanism of the first guide rail movement;
For driving described movable block along the second driving mechanism of the second guide rail movement.
8. flat plate testing apparatus according to claim 7, is characterized in that,
Described first driving mechanism is the first linear electric motors;
Described second driving mechanism is the second linear electric motors.
9. flat plate testing apparatus according to claim 1, is characterized in that,
Described base station and/or support are made up of marble.
10. flat plate testing apparatus according to claim 1, is characterized in that,
Described base station is supported on vibration isolation air bag.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510990464.6A CN105571476B (en) | 2015-12-24 | 2015-12-24 | Flat plate testing apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510990464.6A CN105571476B (en) | 2015-12-24 | 2015-12-24 | Flat plate testing apparatus |
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| CN105571476A true CN105571476A (en) | 2016-05-11 |
| CN105571476B CN105571476B (en) | 2018-07-20 |
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| CN201510990464.6A Active CN105571476B (en) | 2015-12-24 | 2015-12-24 | Flat plate testing apparatus |
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Cited By (11)
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| CN106767419A (en) * | 2017-01-19 | 2017-05-31 | 佛山职业技术学院 | A kind of significantly furring tile method for quick based on optical detection |
| CN106895773A (en) * | 2017-03-22 | 2017-06-27 | 广东工业大学 | A kind of ultra precise measurement platform |
| CN107063319A (en) * | 2016-08-08 | 2017-08-18 | 哈尔滨工业大学 | Static pressure air-bearing horizontal rectilinear motion standard apparatus based on friction-driven |
| CN108057636A (en) * | 2017-12-14 | 2018-05-22 | 北京铂阳顶荣光伏科技有限公司 | Full-automatic detection substrate size equipment, substrate detection line and its detection method |
| CN108267093A (en) * | 2018-01-18 | 2018-07-10 | 江苏泊朗智能科技有限公司 | A kind of vehicle tyre pattern depth measuring device for carwash computer room |
| CN108375608A (en) * | 2018-03-12 | 2018-08-07 | 昆山国显光电有限公司 | Substrate detection apparatus |
| CN108480632A (en) * | 2018-04-10 | 2018-09-04 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment quickly positioned |
| CN108481746A (en) * | 2018-04-10 | 2018-09-04 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment based on air supporting principle |
| CN108515696A (en) * | 2018-04-10 | 2018-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment and its high-precision locating method |
| CN112319055A (en) * | 2020-09-10 | 2021-02-05 | 季华实验室 | Conveying device, control method thereof and ink-jet printing equipment |
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| CN108057636A (en) * | 2017-12-14 | 2018-05-22 | 北京铂阳顶荣光伏科技有限公司 | Full-automatic detection substrate size equipment, substrate detection line and its detection method |
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| CN108267093A (en) * | 2018-01-18 | 2018-07-10 | 江苏泊朗智能科技有限公司 | A kind of vehicle tyre pattern depth measuring device for carwash computer room |
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| CN108515696A (en) * | 2018-04-10 | 2018-09-11 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment and its high-precision locating method |
| CN108481746A (en) * | 2018-04-10 | 2018-09-04 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment based on air supporting principle |
| CN108480632A (en) * | 2018-04-10 | 2018-09-04 | 中国航空工业集团公司北京航空精密机械研究所 | A kind of increasing material manufacturing equipment quickly positioned |
| CN108480632B (en) * | 2018-04-10 | 2020-09-08 | 中国航空工业集团公司北京航空精密机械研究所 | Vibration material disk equipment of quick location |
| CN112319055A (en) * | 2020-09-10 | 2021-02-05 | 季华实验室 | Conveying device, control method thereof and ink-jet printing equipment |
| CN114667056A (en) * | 2020-12-23 | 2022-06-24 | 合肥欣奕华智能机器股份有限公司 | Substrate operation platform and assembling method thereof |
| CN114667056B (en) * | 2020-12-23 | 2023-11-14 | 合肥欣奕华智能机器股份有限公司 | Substrate operation platform and assembly method thereof |
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