CN105568215B - A kind of solid lubrication multilayer complex films and preparation method thereof - Google Patents

A kind of solid lubrication multilayer complex films and preparation method thereof Download PDF

Info

Publication number
CN105568215B
CN105568215B CN201510989894.6A CN201510989894A CN105568215B CN 105568215 B CN105568215 B CN 105568215B CN 201510989894 A CN201510989894 A CN 201510989894A CN 105568215 B CN105568215 B CN 105568215B
Authority
CN
China
Prior art keywords
layers
mos
metal
cuniin
targets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510989894.6A
Other languages
Chinese (zh)
Other versions
CN105568215A (en
Inventor
韦春贝
代明江
侯惠君
林松盛
李琪
石倩
胡芳
赵利
曾威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of New Materials of Guangdong Academy of Sciences
Original Assignee
Guangdong Institute of New Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Institute of New Materials filed Critical Guangdong Institute of New Materials
Priority to CN201510989894.6A priority Critical patent/CN105568215B/en
Publication of CN105568215A publication Critical patent/CN105568215A/en
Application granted granted Critical
Publication of CN105568215B publication Critical patent/CN105568215B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a kind of solid lubrication multilayer complex films and preparation method thereof.Solid lubrication multilayer complex films are successively by matrix（1）, metal back layer Me（2）, CuNiIn layers（3）, intermediate metal Me（4）And MoS2- Me layers（5）It constitutes.Preparation method：Using magnetically controlled sputter method, first in matrix（1）Upper deposited metal bottom（2）, then it is sequentially depositing CuNiIn layers（3）, intermediate metal Me（4）And MoS2- Me layers（5）, alternating deposit formation multilayered structure, outermost layer MoS2- Me layers（5）.The solid lubrication composite membrane of the multilayered structure of the present invention has the performance characteristics that bond strength is high, friction coefficient is low, friction coefficient is down to 0.06, with excellent self-lubricating, anti-seizing property and friction durability, can be applicable on the components such as bearing, gear, blade, tool and mould.

Description

A kind of solid lubrication multilayer complex films and preparation method thereof
Technical field
The invention belongs to field of surface engineering technique, and a kind of Me/CuNiIn/ is deposited especially with magnetron sputtering technique Me/MoS2The method of-Me multilayer complex films, present invention can apply to the wear-resistant places of various metals workpiece surface self-lubricating bite-resistant Reason.
Background technology
MoS2It is known as the king of solid lubrication, there is excellent self-lubricating property, be widely applied in bearing, gear, knife In the moving components such as tool and processing tool and mould.But MoS2It is prone to aoxidize and make it in moist atmosphere or oxidation environment Greasy property is degenerated, and friction durability substantially reduces.Existing literature shows：Method using doping or composite membrane is to effectively improve MoS2The method of lubrication and wear resistance property.Such as adulterate the MoS of Ti, Cr metallic element2-Ti、MoS2- Cr films, membrane structure more cause Close, wear-resisting property has large increase.However the MoS of single layer2-Ti、MoS2The binding force of-Cr films and matrix is insufficient, the wear-resisting longevity Life still needs to be further improved.
CN201110081977.1 discloses a kind of TiN+MoS2/ Zr combines coated cutting tool and its preparation process.The technique In tool surface elder generation depositing TiN layer, then redeposition MoS2- Zr layers, duplex coating tool surface has higher hardness, simultaneously There is lower friction coefficient again.
CN201310026859.5 discloses a kind of MoS of matrix surface high rigidity low abrasion2The preparation side of laminated film Method.This method is sequentially depositing Ti prime coats, TiN transition zones, last depositing Ti-MoS in matrix surface2Laminated film, this mistake Multilayered structure composite membrane tool is crossed to be well bonded and wear-resisting property.
Although these composite coatings are greatly improved to performance, one layer of MoS is only existed in film2, the lubricity of film Can be still the MoS of single layer2In action, hard layer often only improves its mechanical performance to film, therefore greasy property is still It is to be improved.MoS simultaneously2The binding force of film and other materials is insufficient, and friction durability is poor.
CuNiIn solid lubricant coatings are applied primarily in blade tenon, gear etc., have good anti-fretting wear, Anti stickness is engaged performance, still has preferable greasy property at 500 DEG C of high temperature.
CN201420268461.2 discloses one kind and coating CuNiIn coatings on titanium alloy end tooth gear joggleword face, TC11 and GH4169 alloys can be effectively prevent to stick together.But C. Mary wait [High temperature fretting wear of A Ti alloy/CuNiIn contact,《Surface and Coatings Technology》, 2008,203:691- 698] research shows that：The friction coefficient of CuNiIn coatings is very high, and generally 0.5 ~ 0.8 or so, wear rate is high, and friction durability needs It improves.
Invention content
The purpose of the present invention is the problems for above-mentioned composite lubricating film greasy property deficiency, provide a kind of solid lubrication multilayer Composite membrane, the multilayer film have higher bond strength, low friction coefficient and wear rate.
It is a further object to provide a kind of solid lubrication multilayer complex films preparation method, this method The requirement for meeting the preparation of low temperature large area has many advantages, such as that production efficiency is high, at low cost.
The present invention is achieved by the following technical solutions：Solid lubrication multilayer complex films are successively by matrix（1）, metal bottom Layer Me（2）, CuNiIn layers（3）, intermediate metal Me（4）And MoS2- Me layers（5）Constitute, wherein successively by（4）,（3）,（4） With（5）Layer alternately constitutes multilayered structure, outermost layer MoS2- Me layers（5）.
The metal Me is Ti, Cr or W.
The preparation method of the solid lubrication multilayer complex films, specifically comprises the steps of：
1. the workpiece through degreasing and rust removal is put into vacuum chamber, vacuum degree≤5 × 10-3Pa, Ion Cleaning workpiece；
2. in 0.1 ~ 0.8Pa of Ar Pressure, 5 ~ 12W/cm of metal Me target power outputs2, 100 ~ 300V of bias, 0.5 ~ 2kW of ion source Under, deposited metal bottom Me（2）, thickness is 100 ~ 300nm；
3. closing metal Me targets, CuNiIn targets are opened, in 0.3 ~ 2.0Pa of Ar Pressure, 5 ~ 12W/cm of power2, bias 30 ~ Under 200V, 0.3 ~ 1kW of ion source, CuNiIn layers are deposited（3）, thickness 100nm ~ 1 μm；
4. closing CuNiIn targets, opening metal Me targets, in 0.3 ~ 2.0Pa of Ar Pressure, 5 ~ 12W/cm of power2, bias 100 ~ 500V, 0.3 ~ 1kW of ion source, deposited metal transition zone Me（4）, thickness is 50 ~ 200nm；
5. opening MoS simultaneously2Target and metal Me targets, in 0.3 ~ 2.0Pa of Ar Pressure, 3 ~ 5W/cm of metal Me target power outputs2, MoS2 5 ~ 12W/cm of target power output2, 30 ~ 200V of bias, 0.3 ~ 1kW of ion source deposit MoS2- Me layers（5）, thickness is 100nm ~ 1 μm；
6. pressing step 4., 3., 4. and 5. alternating deposit intermediate metal Me successively（4）, CuNiIn layers（3）, metal transfer Layer Me（4）And MoS2- Me layers（5）, multilayered structure, outermost layer MoS are formed after depositing 5 ~ 50 times2- Me layers（5）, overall thickness be 2 ~ 50μm。
The present invention uses multilayered structure, interlayer CuNiIn layers and MoS to may be implemented for Me layers by intermediate metal2- Me layers Good transition, Me layers of intermediate metal with CuNiIn layer with good binding force, while and MoS2- Me layers can on ingredient With continuous transition, solves MoS2The problem of force difference is combined between CuNiIn, to which the combination for realizing high between layers is strong Degree.
The present invention uses multilayered structure can be with effective protection MoS2It is not oxidized, and multilayered structure can be with blocking thin film column Shape crystals growth, membrane structure is finer and close, and antioxygenic property and friction durability further increase.Multilayer complex films both had The high-temperature oxidation resistance of CuNiIn films, while there is MoS again2The excellent greasy property of film, CuNiIn and MoS2Multilayer film The single CuNiIn films or MoS of performance ratio2Film has more excellent wear-resisting property, thus the lubricated sliding wear of multilayer complex films Performance is increased substantially.
The solid lubrication multilayer complex films that the present invention is deposited are more than HF3 grades with basal body binding force, and hardness is more than HV430, Friction coefficient reduces by 100 times or more between 0.06 ~ 0.1, than single layer CuNiIn coating abrasion rates, than single layer MoS2- Me films Wear rate reduce by 5 times or more.The multilayer complex films that are deposited of the present invention have excellent greasy property and wear-resisting property, can be with It is used on the moving components such as bearing, blade, gear, cutter and processing tool and mould.
Description of the drawings
Fig. 1 is solid lubrication MULTILAYER COMPOSITE membrane structure diagram.
Specific implementation mode
Embodiment 1
1. using stainless steel base, matrix surface sand paper is polished, after polishing, is dried after ultrasonic oil removal, derusting cleaning It is dry, it is put into vacuum chamber, background vacuum≤5 × 10-3Pa carries out icon bombardment cleaning processing to matrix；
2. Ti layers of deposited metal bottom：Ar Pressure is 0.2Pa, and metal Ti target power outputs are 12W/cm2, bias 300V, from Component power is 0.5kW, time 10min, thickness 97nm；
3. closing Ti targets, CuNiIn targets are opened, deposit CuNiIn layers：Ar Pressure is 0.5Pa, and CuNiIn target power outputs are 5W/ cm2, bias 40V, ion source 0.8kW, time 8min, thickness is 0.12 μm；
4. closing CuNiIn targets, Ti targets, Ti layers of deposited metal transition zone are opened：Ar Pressure is 0.5Pa, and Ti target power outputs are 5W/cm2, bias 500V, ion source 0.8kW, time 10min, thickness 57nm；
5. opening MoS simultaneously2Target and Ti targets deposit MoS2- Ti layers：Ar Pressure is 0.5Pa, MoS2Target power output is 5W/cm2, Ti target power outputs are 3W/cm2, bias 30V, ion source 0.8kW, time 20min, thickness is 0.11 μm；
6. pressing step 4., 3., 4. and 5. alternating deposit intermediate metal Ti（4）, CuNiIn layers（3）, intermediate metal Ti （4）And MoS2- Ti layers（5）, deposit 10 times, outermost layer MoS2- Ti layers（5）, overall thickness is 3.47 μm.
The MULTILAYER COMPOSITE film hardness that deposition obtains is HV532, and friction coefficient 0.09, binding force is HF1 grades.
Embodiment 2
1. using titanium alloy substrate, matrix surface sand paper is polished, after polishing, is dried after ultrasonic oil removal, derusting cleaning It is dry, it is put into vacuum chamber, background vacuum≤5 × 10-3Pa carries out icon bombardment cleaning processing to matrix；
2. Cr layers of deposited metal prime coat：Ar Pressure is 0.5 Pa, and metal Cr target power outputs are 9W/cm2, bias 200V, Ion source 1.0kW, time 20min, thickness 187nm；
3. closing Cr targets, CuNiIn targets are opened, deposit CuNiIn layers：Ar Pressure is 1.0Pa, and CuNiIn target power outputs are 9W/ cm2, bias 100V, ion source 0.6kW, time 25min, thickness is 0.44 μm；
4. closing CuNiIn targets, Cr targets are opened, deposit Cr layers of intermetallic metal transition zone：Ar Pressure is 1.0Pa, Cr target power outputs For 9W/cm2, bias 300V, ion source 0.6kW, time 15min, thickness 110nm；
5. opening MoS simultaneously2Target and Cr targets deposit MoS2- Cr layers：Ar Pressure is 1.0Pa, MoS2Target power output is 9W/cm2, Cr target power outputs are 4W/cm2, bias 100V, ion source 0.6kW, time 50min, thickness is 0.67 μm；
6. pressing step 4., 3., 4. and 5. alternating deposit intermediate metal Ti（4）, CuNiIn layers（3）, intermediate metal Ti （4）And MoS2- Ti layers（5）, deposit 15 times, outermost layer MoS2- Cr layers（5）, overall thickness is 20.82 μm.
The MULTILAYER COMPOSITE film hardness that deposition obtains is HV448, and friction coefficient 0.08, binding force is HF2 grades.
Embodiment 3
1. using high speed steel substrate, matrix surface sand paper is polished, after polishing, is dried after ultrasonic oil removal, derusting cleaning It is dry, it is put into vacuum chamber, background vacuum≤5 × 10-3Pa carries out icon bombardment cleaning processing to matrix；
2. W layers of deposited metal prime coat：Ar Pressure is 0.8Pa, and metal W target power output is 5W/cm2, bias 100V, ion Source 1.5kW, time 30min, thickness are 0.27 μm；
3. closing W targets, CuNiIn targets are opened, deposit CuNiIn layers：Ar Pressure is 2.0Pa, and CuNiIn target power outputs are 12W/ cm2, bias 180V, ion source 0.4kW, time 50min, thickness is 0.69 μm；
4. closing CuNiIn targets, W targets are opened, deposit W layers of intermetallic metal transition zone：Ar Pressure is 2.0Pa, and W target power outputs are 12W/cm2, bias 100V, ion source 0.4kW, time 10min, thickness is 0.18 μm；
5. opening MoS simultaneously2Target and W targets deposit MoS2- W layers：Ar Pressure is 2.0Pa, MoS2Target power output is 12W/cm2, W Target power output is 5W/cm2, bias 150V, ion source 0.4kW, time 60min, thickness is 0.87 μm；
6. pressing step 4., 3., 4. and 5. alternating deposit intermediate metal Ti（4）, CuNiIn layers（3）, intermediate metal Ti （4）And MoS2- Ti layers（5）, deposit 20 times, outermost layer MoS2- W layers（5）, overall thickness is 40.6 μm.
The MULTILAYER COMPOSITE film hardness that deposition obtains is HV469, and friction coefficient 0.06, binding force is HF3 grades.

Claims (2)

1. a kind of solid lubrication multilayer complex films, it is characterized in that successively by matrix（1）, metal back layer Me（2）, CuNiIn layers（3）, Intermediate metal Me（4）,MoS2- Me layers（5）It is constituted with outer layer, outer layer is successively by intermediate metal Me（4）, CuNiIn layers（3）, Intermediate metal Me（4）And MoS2- Me layers（5）Alternately Multiple depositions constitute multilayered structure, the outermost layer in the multilayered structure to layer For MoS2- Me layers（5）；The Me is Ti, Cr or W.
2. the preparation method of solid lubrication multilayer complex films described in claim 1, it is characterized in that using the method for magnetron sputtering, First in substrate deposit metal back layer Me（2）, then it is sequentially depositing CuNiIn layers（3）, intermediate metal Me（4）And MoS2- Me layers（5）, alternating deposit intermediate metal Me（4）, CuNiIn layers（3）, intermediate metal Me（4）And MoS2- Me layers（5）Layer shape At multilayered structure, multilayer complex films outermost layer is MoS2It-Me layers, comprises the steps of：
1. the workpiece through degreasing and rust removal is put into vacuum chamber, vacuum degree≤5 × 10-3Pa, Ion Cleaning workpiece；
2. in 0.1 ~ 0.8Pa of Ar Pressure, 5 ~ 12W/cm of metal Me target power outputs2, under 100 ~ 300V of bias, 0.5 ~ 2kW of ion source, sink Product metal back layer Me（2）, thickness is 100 ~ 300nm；
3. closing metal Me targets, CuNiIn targets are opened, in 0.3 ~ 2.0Pa of Ar Pressure, 5 ~ 12W/cm of power2, 30 ~ 200V of bias, from Under 0.3 ~ 1kW of component, CuNiIn layers are deposited（3）, thickness 100nm ~ 1 μm；
4. closing CuNiIn targets, opening metal Me targets, in 0.3 ~ 2.0Pa of Ar Pressure, 5 ~ 12W/cm of power2, bias be 100 ~ 500V, 0.3 ~ 1kW of ion source, deposited metal transition zone Me（4）, thickness is 50 ~ 200nm；
5. opening MoS simultaneously2Target and metal Me targets, in 0.3 ~ 2.0Pa of Ar Pressure, 3 ~ 5W/cm of metal Me target power outputs2, MoS2Target work( 5 ~ 12W/cm of rate2, 30 ~ 200V of bias, 0.3 ~ 1kW of ion source deposit MoS2- Me layers（5）, thickness is 100nm ~ 1 μm；
6. pressing step 4., 3., 4. and 5. alternating deposit intermediate metal Me successively（4）, CuNiIn layers（3）, intermediate metal Me （4）And MoS2- Me layers（5）, multilayered structure, outermost layer MoS are formed after depositing 5 ~ 50 times2- Me layers（5）, overall thickness is 2 ~ 50 μ m。
CN201510989894.6A 2015-12-28 2015-12-28 A kind of solid lubrication multilayer complex films and preparation method thereof Active CN105568215B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510989894.6A CN105568215B (en) 2015-12-28 2015-12-28 A kind of solid lubrication multilayer complex films and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510989894.6A CN105568215B (en) 2015-12-28 2015-12-28 A kind of solid lubrication multilayer complex films and preparation method thereof

Publications (2)

Publication Number Publication Date
CN105568215A CN105568215A (en) 2016-05-11
CN105568215B true CN105568215B (en) 2018-11-13

Family

ID=55878826

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510989894.6A Active CN105568215B (en) 2015-12-28 2015-12-28 A kind of solid lubrication multilayer complex films and preparation method thereof

Country Status (1)

Country Link
CN (1) CN105568215B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108374140A (en) * 2017-01-06 2018-08-07 中国航空工业集团公司北京航空制造工程研究所 A kind of preparation method of bilayer fine motion protective coating
CN108396293B (en) * 2018-03-15 2023-01-31 北京矿冶科技集团有限公司 Fretting wear resistance and corrosion resistance integrated TiAlN/CuNiIn/Cr multilayer composite film and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009036343A1 (en) * 2009-08-06 2011-02-10 Mtu Aero Engines Gmbh Component with anti-fretting layer for use in e.g. gas- or aviation turbines, is formed by kinetic cold gas spraying of solid lubricant and metallic particles

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009036343A1 (en) * 2009-08-06 2011-02-10 Mtu Aero Engines Gmbh Component with anti-fretting layer for use in e.g. gas- or aviation turbines, is formed by kinetic cold gas spraying of solid lubricant and metallic particles

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
"沉积温度和氩气压力对钛薄膜物相结构和性能的影响";高晓明等;《机械工程材料》;20131031;第37卷(第10期);第44-49页 *
"航空发动机叶片榫头润滑及抗高温微动CuNiIn/MoS2多层涂层的制备及性能";吴贵智等;《第十届全国表面工程大会暨第六届全国青年表面工程论坛论文集》;20150430;第72页 *
"非平衡磁控溅射离子镀MoS2-Ti复合薄膜的结构及性能";侯圣英等;《山东大学学报（工学版）》;20051231;第35卷(第6期);第20-23页 *

Also Published As

Publication number Publication date
CN105568215A (en) 2016-05-11

Similar Documents

Publication Publication Date Title
JP3621943B2 (en) High wear resistance and high hardness coating
CN107523790B (en) A kind of AlCrSiCuN nano laminated coating and preparation method thereof
CN107761063B (en) A kind of high-temperature oxidation resistant self-lubricating laminated coating and preparation method thereof
CN110373639B (en) Composite coating for cutting tool and preparation method thereof
CN107747092B (en) A kind of high temperature resistant hard composite coating and preparation method thereof and coated cutting tool
CN105887024B (en) TiCrN ＆ MoS2/ Cr/Ti laminated coatings cutter and its preparation process
CN106756820B (en) Containing diamond-like composite coating and preparation method thereof
CN104131256A (en) Multilayer nanometer composite cutting tool coating and preparation method thereof
CN103161733B (en) Ti / TiCrN nanometer multilayer coating impeller and preparation method thereof
CN106191794A (en) The coating method of titanium alloy surface superhard anti-friction wear-resistant composite film and titanium alloy material
CN106835014A (en) A kind of multiple elements design hard coat preparation method
CN104694893A (en) Carbon-based antifriction wear resistant coat and production method thereof
CN103215544A (en) Coating applied to thread forming tap
CN105568215B (en) A kind of solid lubrication multilayer complex films and preparation method thereof
CN113025966A (en) Zr-based high-entropy alloy coating for prolonging service life of hot forging die and preparation method thereof
CN107338411A (en) More first gradient composite coating cutters of AlNbCN and preparation method thereof
CN103938157B (en) A kind of ZrNbAlN superlattice coating and preparation method
CN102333907A (en) Coating system and coating method for producing a coating system
CN109576643A (en) A kind of TiSiVN multicomponent complex gradient cutter coat and preparation method thereof
CN110438465A (en) Metal base surface anti scuffing protective coating and the preparation method and application thereof
CN107130221B (en) A kind of preparation method of hard alloy multi-gradient rare earth composite coating
CN203938726U (en) Carbon back anti-friction wear-resistant coating and workpiece
CN105671496B (en) A kind of molybdenum nitride/nitrogen boron titanium nanocomposite laminated coating cutter and preparation method thereof
JP2015200009A (en) Zirconium composite material coating layer, and forming method therefor
CN103057205B (en) Titanium nitride nanometer multilayer coating impeller and preparation method thereof

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20171206

Address after: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No.

Applicant after: NEW MATERIALS RESEARCH INSTITUTE OF GUANGDONG PROVINCE

Address before: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No.

Applicant before: Guangzhou Research Institute of Non-ferrous Metals

GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No.

Patentee after: Institute of new materials, Guangdong Academy of Sciences

Address before: 510651 Changxin Road, Guangzhou, Guangdong, No. 363, No.

Patentee before: GUANGDONG INSTITUTE OF NEW MATERIALS