CN105548093A - High-sensitivity oscillating field optical waveguide sensor - Google Patents
High-sensitivity oscillating field optical waveguide sensor Download PDFInfo
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- CN105548093A CN105548093A CN201610044726.4A CN201610044726A CN105548093A CN 105548093 A CN105548093 A CN 105548093A CN 201610044726 A CN201610044726 A CN 201610044726A CN 105548093 A CN105548093 A CN 105548093A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract
The invention discloses a high-sensitivity oscillating field optical waveguide sensor. The sensor comprises an incident layer, a substrate layer and a waveguide layer arranged between the incident layer and the substrate layer. The incident layer comprises a precious metal thin film attached to incident glass, and the substrate layer comprises a precious metal thin film attached to substrate glass. The waveguide layer comprises a cavity, and the cavity comprises a rigid enclosure between the incident layer and the substrate layer or between the precious metal thin films of the incident layer and the substrate layer. The high-sensitivity oscillating field optical waveguide sensor is simple, scientific and reasonable in structure, parallelism adjustment is not needed, detection operation is very easy and convenient, a detection high order mode can be selected, detection sensitivity is high, precision is high, stability is high, the detection range is wide, and adaptability is high.
Description
Technical field
What the present invention relates to is a kind of detecting instrument.Particularly relate to a kind of high sensitivity oscillating field optical waveguide sensor of the detecting instrument detected for gas or fluid sample.
Background technology
The cavity of the ducting layer of usual oscillating field oscillating Wave Sensors of Optical Waveguide is all by two optical glass being up and down provided with corresponding metallic diaphragm, with the body be all around located between two optical glass is formed, its containment body forming the cavity of ducting layer of existing oscillating Wave Sensors of Optical Waveguide without exception be all that the common rubber of use one block or plastic base plate are formed, due to in the detection technique of light wave induced oscillation field, namely the degree of being parallel to each other of its two metallic film regulates the depth of parallelism of ducting layer in sensor to the sensitivity detected, reliability, simple and convenience has extremely critical impact, sample cavity (i.e. ducting layer) is formed by arranging a cushion block between its two parts of metal films of existing oscillating Wave Sensors of Optical Waveguide, this sample cavity structure must arrange a special parallelism adjusting device by manually regulating, this leveling degree work is an extremely difficult thing in practice, its depth of parallelism is difficult to meet testing requirement.Its concrete adjustment process is: first, the good waist of 650nm visible red from couple prism after TE polaroid of collimation is used to incide prism bases, when the depth of parallelism of two metallic films is poor, incident light can't form guided mode, and be through multiple reflections formation flare, be referred to as the hot spot that trails.At this moment, need to move three dull and stereotyped adjusting knobs by carefully regulating multidimensional to finely tune optical bracket, first the adjustment of the center of circle of this optical crosstalk spot in the same horizontal line, the plane of incidence of this meaning sensor has kept vertical state, and namely the plane of incidence of sensor is vertical with glancing incidence laser.But this is long-standing adjustment processes repeatedly by carefully regulating multidimensional fine setting optical bracket to move three dull and stereotyped adjusting knobs, needs cost long time and energy.Such as the publication number of Shanghai Communications University's application is respectively CN1645040A, name is called the patented claim of the planar light waveguide measuring apparatus of micrometric displacement, and notification number is CN100401041C, name is called light waveguide absorption type gas sensor and measuring system, it just must arrange and include support, back-moving spring, many parts such as multiple screw-thread micrometers are formed, be specifically designed to the tune depth of parallelism device of the depth of parallelism regulating prism bases and optical glass sheet, it not only just brings structural complicacy to sensor and pick-up unit, the more important thing is that its depth of parallelism regulates to be difficult to meet the demands, need to spend a large amount of energy and times.
Summary of the invention
The object of the invention is the deficiency existed for above-mentioned prior art, a kind of high sensitivity oscillating field optical waveguide sensor is provided.This high sensitivity oscillating field optical waveguide sensor structure is simple, science, rationally, without the need to carrying out the adjustment of the depth of parallelism, detect operation very simple, convenient, can select to detect high-order mode, detection sensitivity is high, precision is high, and stability is high, sensing range is wide, and applicability is strong.
The ducting layer that the technical scheme of high sensitivity oscillating field optical waveguide sensor of the present invention comprises incident layer, substrate layer and is located between described incident layer and substrate layer, described incident layer and substrate layer comprise the noble metal film be attached on corresponding incident glass and substrate glass respectively, described ducting layer comprises a cavity, and described cavity comprises the rigidity containment body be located between described incident layer and substrate layer or its noble metal film.
The opposite end end face of described rigidity containment body is parallel to each other.
Described rigidity containment body is the glass plate that its wooden partition is provided with corresponding cavity, the respective side walls of the cavity of this glass plate offers the import and export of cavity.
Described rigidity containment body cuts into two halves by glass plate that is provided with cavity in the middle of it and forms, and is provided with the import and export that the spaced space of the two halves of the glass plate of cavity forms cavity by this centre.
Described substrate glass is optical glass sheet, and described incident glass is prism or optical glass sheet.
Described noble metal film is gold or Ag films.
High sensitivity oscillating field optical waveguide sensor of the present invention leaves standstill or movable member without any adjustment depth of parallelism device or other, and structure is simple especially, and its accuracy of detection is high, more than at least high than traditional spr sensor 2 orders of magnitude of its sensitivity.This sensor has outside the plurality of advantages such as highly sensitive, cavity easily rinses, repeatedly use, and also can realize on-line checkingi simply and easily, stable performance and the advantage such as cheap.Particularly it is developed to a kind of miniaturization, portable low price detection analyser than being easier to.At present, the vast rural area of China generally uses well water and underground water, and this instrument can play an important role in township, village's measuring station, even farmers' family's water, has wide market outlook.Believe that the exploitation of this new instrument not only plays a significant role to the detection of our province potable water, and the field such as environmental protection and food security in China is produced extremely important impact.
Accompanying drawing explanation
Fig. 1 is high sensitivity oscillating field optical waveguide sensor one embodiment theory structure schematic diagram of the present invention; Fig. 2 is the high sensitivity oscillating field optical waveguide sensor perspective view of Fig. 1 embodiment; Fig. 3 is another embodiment of the present invention structural representation.
Embodiment
Now by embodiment, also the invention will be further described by reference to the accompanying drawings.The rigidity containment body that the cavity 4 of its ducting layer of high sensitivity oscillating field optical waveguide sensor of the present invention makes of rigid material (i.e. relatively incompressible or material that hardness is relatively large) and being formed, and, the end face of opposite end up and down of this rigidity containment body is parallel to each other, namely the cavity of its ducting layer uses that rigid material makes, that its opposite end end face is parallel to each other rigidity containment body to form, and incident layer and substrate layer (or the noble metal film layer be attached to respectively on its corresponding wall) are parallel to each other with the opposite end end face of this rigidity containment body.Further, the precious metal film layer of incident layer and substrate layer is deposited (attachment) respectively on the surperficial wall of the outside of the cavity inner chamber by ducting layer.This rigidity containment body can by optical flat, also or the simple glass plate having very high flatness and/or relative two wooden partition faces to be parallel to each other by its relative two wooden partition masks form.
Its concrete structure as shown in Figure 1, the present embodiment high sensitivity oscillating field optical waveguide sensor incident layer, substrate layer and the ducting layer be located between incident layer and substrate layer, incident layer and substrate layer comprise respectively and are attached to gold on upper strata beam incident optical glass sheet 1a and underlying substrate optical glass sheet 1b or Ag films 2, its ducting layer comprises a cavity 4, and cavity 4 is made up of a rigidity containment body be connected between incident layer and substrate layer (i.e. beam incident optical glass sheet 1a and substrate optical glass sheet 1b).Its rigidity containment body is made up of the glass plate 3 being drilled with corresponding through hole in the middle of its plate face, the cavity 4 of ducting layer is made up of this through hole, the relative both sides sidewall of the cavity of glass plate 3 is drilled with two pod apertures 5, form the detected gas of cavity 4 or the import and export of fluid sample by this two pod apertures, upper face wall 3a and the lower face wall 3b of this glass plate 3 are parallel to each other.
Described noble metal film of the present invention is arranged at the external table wall by cavity of its incident glass and substrate glass respectively.In this example, the gold of its incident layer or Ag films are arranged at the upper wall surface of (being attached to) beam incident optical glass sheet 1a, and gold or the Ag films of substrate layer are arranged at the lower wall surface of (being attached to) substrate optical glass sheet 1b.It can effectively avoid measured matter that gold or Ag films are produced to erosion action and have a strong impact on its detection sensitivity and precision.
Glass plate 3 is connected with the upper wall surface of the lower wall surface of the beam incident optical glass sheet 1a of incident layer and the substrate optical glass sheet 1b of substrate layer with lower face wall 3b correspondence respectively by its upper face wall 3a.Namely glass plate 3 is formed after being connected with beam incident optical glass sheet 1a and substrate optical glass sheet 1b and is parallel to each other.
During work, tested gas or liquid substance is passed into from a pod apertures of glass plate, the illumination that the excitation light source device of corresponding detecting instrument sends is penetrated the gold in beam incident optical glass sheet or Ag films, this high sensitivity oscillating field optical waveguide sensor is acted on by excitation source, the reflected light of gold or Ag films that the optical signal detection recycling detecting instrument receives the beam incident optical glass sheet of this high sensitivity oscillating field optical waveguide sensor to treating apparatus carries out corresponding process, can obtain content or the concentration of a certain corresponding component in sample.As the concentration of the Cr (VI) in potable water.
In another embodiment of the present invention, its rigidity containment body cuts into two halves by a middle glass plate being drilled with through hole and forms, the spaced spacing of its two halves arranges and is connected between incidence and substrate optical flat, is made up of the import and export of the cavity of ducting layer the space formed that the two halves of this glass plate is spaced.All the other corresponding constructions of this example or set-up mode method can with above-described embodiment roughly the same.
In one more embodiment of the present invention, the beam incident optical glass of its incident layer can be prism.Its corresponding gold or Ag films are attached on the corresponding diapire face of prism.The stainless-steel tube formation that its section of rigidity containment body can use opposite end surface to be parallel to each other.All the other corresponding constructions of this example or set-up mode method can with above-mentioned any embodiment roughly the same.
Claims (6)
1. a high sensitivity oscillating field optical waveguide sensor, the ducting layer comprising incident layer, substrate layer and be located between described incident layer and substrate layer, described incident layer and substrate layer comprise the noble metal film be attached on corresponding incident glass and substrate glass respectively, it is characterized in that described ducting layer comprises a cavity, described cavity comprises the rigidity containment body be located between described incident layer and substrate layer or its noble metal film.
2. high sensitivity oscillating field optical waveguide sensor according to claim 1, is characterized in that the opposite end end face of described rigidity containment body is parallel to each other.
3. high sensitivity oscillating field optical waveguide sensor according to claim 1 or 2, is characterized in that described rigidity containment body is the glass plate that its wooden partition is provided with corresponding cavity, the respective side walls of the cavity of this glass plate offers the import and export of cavity.
4. high sensitivity oscillating field optical waveguide sensor according to claim 1 or 2, it is characterized in that described rigidity containment body cuts into two halves by glass plate that is provided with cavity in the middle of it and forms, be provided with the import and export that the spaced space of the two halves of the glass plate of cavity forms cavity by this centre.
5. high sensitivity oscillating field optical waveguide sensor according to claim 1 or 5, it is characterized in that described substrate glass is optical glass sheet, described incident glass is prism or optical glass sheet.
6. high sensitivity oscillating field optical waveguide sensor according to claim 1 or 5, is characterized in that described noble metal film is for gold or Ag films.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610044726.4A CN105548093A (en) | 2016-01-23 | 2016-01-23 | High-sensitivity oscillating field optical waveguide sensor |
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| CN201610044726.4A CN105548093A (en) | 2016-01-23 | 2016-01-23 | High-sensitivity oscillating field optical waveguide sensor |
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| CN1203382A (en) * | 1998-07-01 | 1998-12-30 | 吉林大学 | All wavelength surface plasma excimer resonance photochemical sensor |
| CN1595121A (en) * | 2004-06-24 | 2005-03-16 | 上海交通大学 | Optical waveguide biochemical sensor and measurement system based on free space coupling |
| CN1603793A (en) * | 2004-11-30 | 2005-04-06 | 国家海洋环境监测中心 | Surface plasma resonance detection sample cell with repeatable response |
| CN1758049A (en) * | 2005-10-27 | 2006-04-12 | 上海交通大学 | Device for measuring variation of gas liquid temperature, absorption concentration, component and refraction rate |
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| CN103376244A (en) * | 2012-04-18 | 2013-10-30 | 中国科学院电子学研究所 | Surface plasma resonance chip and sensor applying same |
| CN103885003A (en) * | 2014-03-20 | 2014-06-25 | 河海大学常州校区 | Tiny magnetic field sensor based on metal-clad magnetic fluid waveguide, and measuring system |
| CN105044042A (en) * | 2015-05-08 | 2015-11-11 | 铜仁学院 | Concentration detection method of manganese in trace amount in drinking water and waveguide used therein |
| CN105424604A (en) * | 2015-10-02 | 2016-03-23 | 黄辉 | Sensor based on sleeved waveguide tube |
| CN205538679U (en) * | 2016-01-23 | 2016-08-31 | 宜春学院 | High sensitivity oscillating field optical wave conduction sensilla |
-
2016
- 2016-01-23 CN CN201610044726.4A patent/CN105548093A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1203382A (en) * | 1998-07-01 | 1998-12-30 | 吉林大学 | All wavelength surface plasma excimer resonance photochemical sensor |
| CN1595121A (en) * | 2004-06-24 | 2005-03-16 | 上海交通大学 | Optical waveguide biochemical sensor and measurement system based on free space coupling |
| CN1603793A (en) * | 2004-11-30 | 2005-04-06 | 国家海洋环境监测中心 | Surface plasma resonance detection sample cell with repeatable response |
| CN1758049A (en) * | 2005-10-27 | 2006-04-12 | 上海交通大学 | Device for measuring variation of gas liquid temperature, absorption concentration, component and refraction rate |
| CN102692392A (en) * | 2011-03-25 | 2012-09-26 | 上海光刻电子科技有限公司 | Device for measuring gas and liquid refractive indexes |
| CN103376244A (en) * | 2012-04-18 | 2013-10-30 | 中国科学院电子学研究所 | Surface plasma resonance chip and sensor applying same |
| CN103885003A (en) * | 2014-03-20 | 2014-06-25 | 河海大学常州校区 | Tiny magnetic field sensor based on metal-clad magnetic fluid waveguide, and measuring system |
| CN105044042A (en) * | 2015-05-08 | 2015-11-11 | 铜仁学院 | Concentration detection method of manganese in trace amount in drinking water and waveguide used therein |
| CN105424604A (en) * | 2015-10-02 | 2016-03-23 | 黄辉 | Sensor based on sleeved waveguide tube |
| CN205538679U (en) * | 2016-01-23 | 2016-08-31 | 宜春学院 | High sensitivity oscillating field optical wave conduction sensilla |
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