CN105547497A - Double-stage wave length analyzer - Google Patents
Double-stage wave length analyzer Download PDFInfo
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- CN105547497A CN105547497A CN201610073650.8A CN201610073650A CN105547497A CN 105547497 A CN105547497 A CN 105547497A CN 201610073650 A CN201610073650 A CN 201610073650A CN 105547497 A CN105547497 A CN 105547497A
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- 230000003287 optical effect Effects 0.000 claims abstract description 49
- 230000003595 spectral effect Effects 0.000 claims abstract description 20
- 238000001914 filtration Methods 0.000 claims abstract description 16
- 238000001228 spectrum Methods 0.000 claims description 26
- 238000004458 analytical method Methods 0.000 claims description 11
- 241001605873 Sclerotia substriata Species 0.000 claims description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 238000010923 batch production Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 238000000034 method Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035800 maturation Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000276 deep-ultraviolet lithography Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0246—Measuring optical wavelength
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/028—Types
- G01J2009/0288—Machzehnder
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a double-stage wave length analyzer. The connection of an optical waveguide and a branch 1*2 power divider is divided into two paths which are connected to a rough analyzing part and a fine analyzing par; the terminals of the rough analyzing part and the fine analyzing part are connected to a PD detector; the spectral lines outputted by the rough analyzing part and the fine analyzing part are X-shaped spectral lines; the rough analyzing part comprises a plurality of MZI optical waveguides which are arranged in parallel and a middle power divider; and the fine analyzing part comprises a plurality of micro-rings, micro-ring connection waveguides and micro-ring output optical waveguides which are arranged along the line at intervals. The invention utilizes the filtering spectral lines having relative wide MZI and the filtering spectral lines having the steep micro-ring to solve the limitation in the analyzing range and resolution of the on-sheet wavelength analyzer, realizes the high accuracy wavelength detection in a relatively wide range, has low cost, good compatibility, simple structure and easy production, realizes on-sheet integration and has huge potential for batch production.
Description
Technical field
The present invention relates to wavelength processor part, particularly relate to a kind of two-stage wavelength resolver.
Background technology
The wavelength of light is an important physical amount in physical detection technology, and many Systems for optical inspections are all utilize the variable quantity of optical wavelength to realize measuring, and are exactly typically fiber grating sensing system.Wavelength analytic technique is exactly first by measuring other physical quantitys having certain corresponding relation with wavelength, and then is provided a kind of analytic method of wavelength or wavelength variable quantity by funtcional relationship.People utilize various diverse ways, have been developed into multi-wavelength's resolver.Mainly contain spectrometer analysis method, interferometric method, filter method, the Wavelength matched method of tunable optical source etc., these method great majority will use large-scale equipment, or take the mode of resonance matching to form the wavelength selection system of a more complicated, and detection speed is usually slow, use inconvenience.Along with the development particularly fast development of detection system on sheet of integrated optics, the research direction of Techniques of wavelength detection will be compact conformation, resolution speed is fast, resolution is high and low in energy consumption.Research and development integrated-type wavelength resolver has great significance for the development of integrated-type optical sensing and detection system.
In recent years, various tunable optical filter is adopted to mate with by light-metering based on edge filter type optical wavelength detection method, utilize the transmission spectrum characteristic of optical filter to be the physical quantity more easily quantitatively detected by optical wavelength convert information, thus reach wavelength detecting object.Silicon-based micro ring is as one of the basic device of integrated optics, and it has typical Lorentz filtering spectral line, can be used for the wavelength realized on sheet and resolves.But the high-resolution requirement of wavelength resolver, will inevitably cause the wavelength detection range of single boundary filter itself very little.
Summary of the invention
In order to solve the contradiction between wavelength resolver resolution and analytical range, the object of the present invention is to provide a kind of two-stage wavelength resolver, having adopted hierarchical approaches, high-resolution wavelength parsing in integrated molded breadth wavelength coverage on sheet can have been realized.
The technical solution used in the present invention is as follows:
The present invention includes input waveguide to connect shunt 1 × 2 power splitter, slightly resolve part, essence parsing part and PD detector; Input waveguide connects 1 × 2 power splitter along separate routes and is divided into two-way, one tunnel connects the thick parsing part being used for low resolution wavelength detecting in wide wavelength coverage, another road connects the essence parsing part being used for high resolution wavelength in narrow wavelength coverage and detecting, thick parsing part is all connected PD detector with the end of smart parsing part, and the thick filtering spectral line of partly resolving part output with essence of resolving is " X " shape frequency spectrum.
Described thick analysis unit divides the MZI optical waveguide and middle power splitter that comprise the arrangement of multiple parallel connection, and 1 × 2 power splitter is connected with each MZI optical waveguide input end through middle power splitter along separate routes, and each MZI optical waveguide output terminal connects respective PD detector and exports.
MZI optical waveguide brachium described in each is not etc., by adjusting the arm length difference of two-arm in each MZI optical waveguide, make thick filtering relative line strengths " X " the shape frequency spectrum of resolving part and exporting, the working range that thick analysis unit divides wavelength to resolve is the wavelength coverage of described " X " shape frequency spectrum.
Described smart analysis unit is divided and is comprised multiple linearly spaced micro-ring, micro-ring connects waveguide and micro-ring output optical waveguide, 1 × 2 power splitter is connected to micro-ring side through same micro-ring connection waveguide-coupled along separate routes, each micro-ring opposite side is coupled with respective micro-ring output optical waveguide, and micro-ring output optical waveguide exports and is connected to PD detector.
The radius of micro-ring described in each not etc., filtering relative line strengths " X " the shape frequency spectrum making essence resolve part to export by the radius adjusting micro-ring.
Described essence resolves " X " shape spectra wavelength range of part within described thick parsing part " X " shape spectra wavelength range.
Described MZI optical waveguide is primarily of 1 × 2MMI, 2 × 1MMI and be connected to two long Luciola substriata formations of unequal arm between 1 × 2MMI and 2 × 1MMI.
Described PD detector adopts germanium silicon (Ge-Si) photodetector of CMOS technology compatibility, and the light signal that micro-ring and MZI export directly is converted to electric signal so that follow-up circuit signal process.
Described shunt 1 × 2 power splitter and middle power splitter all adopt MMI.
Described micro-ring is identical with the coupling gap of the straight wave guide of both sides.
The adjustment of MZI interference periods of the present invention can be realized by the optical path difference changing MZI two-arm, namely can be realized by the length difference of two arms changing MZI.Resolve to realize wavelength in broad spectral range, MZI interference periods needs comparatively large, and namely the phase differential of the two-arm of MZI is less.Micro-ring resonator has precipitous filtering spectral line due to it, by filtering relative line strengths " X " shape of two micro-rings, just can realize high-resolution wavelength detecting in less wavelength coverage.
The beneficial effect that the present invention has is:
Wavelength resolution system of the present invention is divided into thick parsing and essence parsing two parts.The silica-based MZI adopting multiple unequal arm long resolves as thick the detection realizing low resolution in wide wavelength coverage, and the different silicon-based micro ring of multiple radius resolves the detection realizing high-resolution narrow wavelength coverage as essence.And in conjunction with the PD detector of silica-based upper maturation, obtain that compact conformation, resolution speed are fast, integrated-type two-stage wavelength resolver on the wavelength resolver, particularly sheet of the high and low power consumption of resolution, the development for integrated optics technique is significant.
The Lorentz filtering spectral line that the present invention proposes the micro-ring utilizing the interference spectrum of different interference periods MZI different with radius forms " X " type frequency spectrum separately to high-precision wavelength analytical capabilities in the wavelength coverage realizing integrated molded breadth on sheet.
The present invention can solve the contradiction between wavelength detecting resolution and wavelength coverage simultaneously, realizes high-resolution wavelength detecting in wide wavelength coverage, can reach the wavelength detecting of about 1.5pm in 60nm wavelength coverage through implementing test.
Device of the present invention can make by Planar integration optical waveguide technique, and cost is low, and performance is high, and loss is little, and perfect compatible with traditional CMOS technology, structure is simple, makes easily, has the potentiality of large-scale production.
Accompanying drawing explanation
Fig. 1 is the filtering spectral line principle schematic that the embodiment of the present invention exports.
Fig. 2 is the structural principle schematic diagram of resolver of the present invention.
Fig. 3 is the structural plan figure that resolver of the present invention is placed on SOI.
Fig. 4 is the cross section structure schematic diagram that resolver of the present invention is placed on SOI.
In figure: 1, first MZI transmits spectral line, 2, second MZI transmits spectral line, 3, first micro-ring transmission spectral line, 4, second micro-ring transmission spectral line, 5, slightly " X " shape frequency spectrum formed is resolved, 6, essence resolves " X " shape frequency spectrum formed, 7, input waveguide, 8, shunt 1 × 2 power splitter, 9, MZI optical waveguide, 10, micro-ring connects waveguide, 11, micro-ring, 12, middle 1 × 2 power splitter, 13, micro-ring output optical waveguide, 15, PD detector, 16, top layer silicon, 17, silicon dioxide substrates, 18, bottom silicon.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
As shown in Figure 2, the present invention includes input waveguide 7 to connect shunt 1 × 2 power splitter 8, slightly resolve part, essence parsing part and PD detector 15; Input waveguide 7 connects 1 × 2 power splitter 8 along separate routes and is divided into two-way, two-way connects thick parsing partly and smart parsing part respectively, thick parsing part is all connected PD detector 15 with the end of smart parsing part, and the thick filtering spectral line of partly resolving part output with essence of resolving is " X " shape frequency spectrum.Two-stage wavelength resolver is divided into thick parsing and essence parsing two parts, and thick parsing part realizes the wavelength detecting of low resolution in wide wavelength coverage, and smart parsing part realizes high-resolution wavelength detecting in narrow wavelength coverage.Light signal to be detected inputs from optical waveguide 7, resolves respectively through thick and be connected on PD detector 15 after smart resolver.
As shown in Figure 1, the present invention is divided into two-stage wavelength to resolve, first order wavelength is resolved and is made up of first MZI transmission spectral line 1 and second MZI transmission spectral line 2, and form thick " X " shape frequency spectrum 5 of resolving, it can realize the wavelength detecting of low resolution in very wide wavelength coverage; Second level wavelength is resolved and is made up of first micro-ring transmission spectral line 3 and second micro-ring transmission spectral line 4, and form " X " shape frequency spectrum 6 that essence is resolved, it can realize very high-resolution wavelength detecting in narrower wavelength coverage.Both combine and just can realize high-resolution wavelength detecting in wide wavelength coverage.
Thick analysis unit divides the MZI optical waveguide 9 and middle power splitter 12 that comprise the arrangement of multiple parallel connection, and 1 × 2 power splitter 8 is connected with each MZI optical waveguide 9 input end through middle power splitter 12 along separate routes, and each MZI optical waveguide 9 output terminal connects respective PD detector 15 and exports.Middle power splitter 12 can adopt 1 × 2 power splitter, 1 × 3 power splitter, 1 × 4 power splitter or above-mentioned various combination, and its quantity is determined according to the quantity demand of MZI optical waveguide 9.Each MZI optical waveguide 9 brachium is not etc., by adjusting the arm length difference of two-arm in each MZI optical waveguide 9, make thick filtering relative line strengths " X " the shape frequency spectrum of resolving part and exporting, the working range that thick analysis unit divides wavelength to resolve is the wavelength coverage of described " X " shape frequency spectrum.
Essence analysis unit is divided and is comprised multiple linearly spaced micro-ring 11, micro-ring connects waveguide 10 and micro-ring output optical waveguide 13,1 × 2 power splitter 8 is coupling-connected to micro-ring 11 side through same micro-ring connection waveguide 10 along separate routes, each micro-ring 11 opposite side is coupled with respective micro-ring output optical waveguide 13, and micro-ring output optical waveguide 13 exports and is connected to PD detector 15.Micro-ring connects waveguide 10 lays respectively at micro-ring 11 together with micro-ring output optical waveguide 13 both sides as micro-ring input waveguide, and is coupled with micro-ring 11.The radius of each micro-ring 11 not etc., filtering relative line strengths " X " the shape frequency spectrum making essence resolve part to export by the radius adjusting micro-ring 11.
" X " shape spectra wavelength range that essence resolves part is less than thick parsing part " X " shape spectra wavelength range, and essence resolves " X " shape spectra wavelength range of part within described thick parsing part " X " shape spectra wavelength range.
MZI optical waveguide 9 is primarily of 1 × 2MMI, 2 × 1MMI and be connected to two long Luciola substriata formations of unequal arm between 1 × 2MMI and 2 × 1MMI.
As shown in Figure 3 and Figure 4, it is be produced on on the soi chip of CMOS technology compatibility that two-stage wavelength of the present invention resolves device, and wherein SOI material forms primarily of bottom silicon 18, silicon dioxide substrates 17 and top layer silicon 16.
Embodiment of the present invention device architecture makes and can implement through but not limited to under type:
1 × 2 power splitter adopts Mach-Zahnder interference device (Mach-ZehnderInterferometer along separate routes, MMI), middle power splitter adopts multiple-mode interfence (MultimodeInterferometer, MMI), it is slightly resolved and smart making of resolving the silica-based two-stage wavelength resolver of part: the size choosing device is as follows respectively, the size of all single mode waveguides is all wide 450nm, dark 220nm, all MMI are of a size of length 9 μm, width 75.25 μm, two output terminal spacing 2.25 μm, connect two are linearly gradient to 450nm tapered transmission line by 1.2 μm of wide waveguides, the length of this linear gradient zone of transition is 40 μm, input end is also identical tapered transmission line.The radius of first micro-ring elects 10 μm as, the radius of second micro-ring is 10.01 μm, the input waveguide of all micro-rings, the coupling gap of micro-ring output optical waveguide and micro-ring is 200nm, and the radius of the curved waveguide be connected with micro-ring output optical waveguide 13 elects 30 μm and 8 μm respectively as.Two arm length difference of first MZI optical waveguide are 5.15 μm, and two arm length difference of second MZI optical waveguide are 5.46 μm.
Concrete fabrication processing be employing standard insulation course on silicon (SOI) material, its top layer silicon thickness is 220nm, and insulation course silicon dioxide layer is 2 μm.After completing the cleaning of crystal column surface, the technique of wherein photoetching part adopts plasma reinforced chemical vapour deposition method PECVD cvd silicon oxide as mask, utilizes deep UV lithography to form required waveguide pattern.The etching of top layer silicon 16 adopts ion beam-assisted free radical etching ICP dry etching.The manufacture craft of Ge-Si detector PD carries out light dope and heavy doping twice technique forms P district substrate in top layer silicon, then the Ge of selective epitaxial growth 500nm thickness is passed through in doped top layer silicon region, N-type heavy doping is carried out to Ge layer simultaneously, so just, make Ge-Si detector, finally draw with aluminum conductor.
Thus, the making of two-stage wavelength resolver is completed.The made two-stage wavelength resolver first order slightly resolves the wavelength detecting that can realize 0.1nm resolution in 60nm wavelength coverage, and second level essence resolves the wavelength detecting that can realize 1.5pm resolution in 0.7nm wavelength coverage.
Wavelength resolution system of the present invention is divided into thick parsing and essence parsing two parts.The silica-based MZI adopting multiple unequal arm long resolves as thick the detection realizing low resolution in wide wavelength coverage, and the different silicon-based micro ring of multiple radius resolves the detection realizing high-resolution narrow wavelength coverage as essence.And in conjunction with the PD detector of silica-based upper maturation, obtain that compact conformation, resolution speed are fast, integrated-type two-stage wavelength resolver on the wavelength resolver, particularly sheet of the high and low power consumption of resolution, the development for integrated optics technique is significant.
Visible, the technology of the present invention Be very effective is given prominence to, and can solve the contradiction between wavelength detecting resolution and wavelength coverage, and realize high-resolution wavelength detecting in wide wavelength coverage and resolve, cost is low, and performance is high, and loss is little, can be mass-produced.
Claims (9)
1. a two-stage wavelength resolver, is characterized in that: comprise input waveguide (7) and connect shunt 1 × 2 power splitter (8), slightly resolve part, essence parsing part and PD detector (15); Input waveguide (7) connects 1 × 2 power splitter (8) along separate routes and is divided into two-way, one tunnel connects the thick parsing part being used for low resolution wavelength detecting in wide wavelength coverage, another road connects the essence parsing part being used for high resolution wavelength in narrow wavelength coverage and detecting, thick parsing part is all connected PD detector (15) with the end of smart parsing part, and the thick filtering spectral line of partly resolving part output with essence of resolving is " X " shape frequency spectrum.
2. a kind of two-stage wavelength resolver according to claim 1, it is characterized in that: described thick analysis unit divides the MZI optical waveguide (9) and middle power splitter (12) that comprise the arrangement of multiple parallel connection, 1 × 2 power splitter (8) is connected with each MZI optical waveguide (9) input end through middle power splitter (12) along separate routes, and each MZI optical waveguide (9) output terminal connects respective PD detector (15) and exports.
3. a kind of two-stage wavelength resolver according to claim 1, it is characterized in that: MZI optical waveguide (9) brachium described in each is not etc., by adjusting the arm length difference of two-arm in each MZI optical waveguide (9), make thick filtering relative line strengths " X " the shape frequency spectrum of resolving part and exporting, the working range that thick analysis unit divides wavelength to resolve is the wavelength coverage of described " X " shape frequency spectrum.
4. a kind of two-stage wavelength resolver according to claim 1, it is characterized in that: described smart analysis unit is divided and comprised multiple linearly spaced micro-ring (11), micro-ring connects waveguide (10) and micro-ring output optical waveguide (13), 1 × 2 power splitter (8) is coupling-connected to micro-ring (11) side through same micro-ring connection waveguide (10) along separate routes, each micro-ring (11) opposite side is coupled with respective micro-ring output optical waveguide (13), and the output of micro-ring output optical waveguide (13) is connected to PD detector (15).
5. a kind of two-stage wavelength resolver according to claim 4, it is characterized in that: the radius of micro-ring (11) described in each not etc., filtering relative line strengths " X " the shape frequency spectrum making essence resolve part to export by the radius adjusting micro-ring (11).
6. a kind of two-stage wavelength resolver according to claim 1, is characterized in that: described essence resolves " X " shape spectra wavelength range of part within described thick parsings partly " X " shape spectra wavelength range.
7. a kind of two-stage wavelength resolver according to claim 1, is characterized in that: described MZI optical waveguide (9) is formed primarily of 1 × 2MMI, 2 × 1MMI and two Luciola substriata that are connected to unequal arm between 1 × 2MMI and 2 × 1MMI long.
8. a kind of two-stage wavelength resolver according to claim 1, is characterized in that: described PD detector (15) adopts germanium silicon (Ge-Si) photodetector.
9. a kind of two-stage wavelength resolver according to claim 1, is characterized in that: described shunt 1 × 2 power splitter (8) and middle power splitter (12) all adopt MMI.
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| CN201610073650.8A CN105547497A (en) | 2016-02-02 | 2016-02-02 | Double-stage wave length analyzer |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256510A (en) * | 2006-03-22 | 2007-10-04 | Furukawa Electric Co Ltd:The | Waveguide type polarization separator/multiplexer |
| WO2014125535A1 (en) * | 2013-02-18 | 2014-08-21 | 日本電気株式会社 | Polarization beam splitter and optical device |
| KR101556399B1 (en) * | 2014-06-25 | 2015-10-13 | 한국광기술원 | Mach-zehnder type Fourier transform spectrometer based on planar lightwave circuit and measurement apparatus using the same |
-
2016
- 2016-02-02 CN CN201610073650.8A patent/CN105547497A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256510A (en) * | 2006-03-22 | 2007-10-04 | Furukawa Electric Co Ltd:The | Waveguide type polarization separator/multiplexer |
| WO2014125535A1 (en) * | 2013-02-18 | 2014-08-21 | 日本電気株式会社 | Polarization beam splitter and optical device |
| KR101556399B1 (en) * | 2014-06-25 | 2015-10-13 | 한국광기술원 | Mach-zehnder type Fourier transform spectrometer based on planar lightwave circuit and measurement apparatus using the same |
Non-Patent Citations (1)
| Title |
|---|
| 杨冰: "基于集成光波导的波长解析器件的研究", 《中国博士学位论文全文数据库信息科技辑》 * |
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Application publication date: 20160504 |