CN105543809B - Wet process reaction equipment and wet process reaction tank thereof - Google Patents

Wet process reaction equipment and wet process reaction tank thereof Download PDF

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Publication number
CN105543809B
CN105543809B CN201510686873.7A CN201510686873A CN105543809B CN 105543809 B CN105543809 B CN 105543809B CN 201510686873 A CN201510686873 A CN 201510686873A CN 105543809 B CN105543809 B CN 105543809B
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CN
China
Prior art keywords
decoction
dipper
deflector
wet process
reactive tank
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CN201510686873.7A
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CN105543809A (en
Inventor
陈传宜
陈家达
游柏清
陈立凯
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Nice Solar Energy GmbH
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Menzies Cigs Technology LLC
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Package Specialized In Special Use (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention discloses wet process reaction equipment and a wet process reaction tank thereof, which comprise a liquid medicine tank, at least one guide plate and a limiting plate, wherein the liquid medicine tank is used for containing liquid medicine, the liquid medicine tank is provided with an opening, a liquid medicine inlet and a liquid medicine outlet, the liquid medicine flows towards the liquid medicine outlet, the guide plate is convexly arranged in the liquid medicine tank and intersects with a liquid medicine flowing path, and the height difference of the guide plate protruding out of the bottom surface of the liquid medicine tank generates disturbance on the liquid medicine flowing through the guide plate. The limiting plate is arranged in the liquid medicine groove and close to the liquid medicine outlet so as to block and retain part of liquid medicine flowing through the liquid medicine groove in the liquid medicine groove.

Description

Wet process consersion unit and its wet process reactive tank
Technical field
The present invention is related to wet process consersion unit, espespecially a kind of wet process consersion unit with deflector and its wet system Journey reactive tank.
Background technology
In existing solar energy film processing procedure, mostly can use chemical thought (Chemical Bath Deposition, CBD) mode forms one layer of cadmium sulfide (CdS) on base material.CBD processing procedures are that base material leaching is placed in chemical liquid so that chemistry Decoction is chemically reacted with substrate surface and forms the sedimentary of cadmium sulfide.Medicine liquid ingredient be present in existing CBD processing procedures to mix Close it is uneven and the shortcomings that cause to deposit inequality.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of wet process consersion unit and its wet process with deflector Reactive tank.
In order to solve the above-mentioned technical problem, the invention provides a kind of wet process reactive tank, with for a decoction and a base Material carries out chemical process, and the wet process reactive tank includes:
One dipper, the dipper are used to house the decoction, and the dipper has an opening, a decoction entrance and one Medicine liquid outlet, the opening insert the dipper for the base material, and the decoction enters decoction described in confession and flows into the dipper, the decoction The decoction in groove flows towards the medicine liquid outlet, and the medicine liquid outlet flows out the dipper for the decoction;
An at least deflector, is convexly equipped in the dipper and the intersection decoction flows through path, and the deflector protrudes the medicine The height fall of liquid bath bottom surface produces disturbance for flowing through the decoction of the deflector;And
One restriction plate, it is arranged in the dipper at the neighbouring medicine liquid outlet, the restriction plate is used to that the dipper will to be flowed through The part decoction block and reside in the dipper, and the medicine in the apical margin position limitation of the restriction plate dipper The liquid level position of liquid.
Further, wherein being provided with a nozzle adjacent to the decoction porch, the nozzle is used for should by decoction injection Dipper.
Further, a spout hole is wherein offered in the dipper, the spout hole is configured at the neighbouring decoction porch, And the position of the spout hole compares the bottom surface of the dipper and is higher by an entrance height, when the liquid level of the decoction in the dipper During beyond the position of the spout hole, the spout hole supply and discharge removes the decoction beyond the spout hole height.
Further, a tapered entrance runner is wherein provided with the dipper, the tapered entrance runner is located at the decoction Porch, the tapered entrance runner are used to conflux the decoction into the dipper.
Further, wherein deflector is a plurality of, and the deflector includes at least one first deflector and at least one Second deflector, the height that first deflector protrudes the decoction groove bottom protrude the decoction groove bottom more than second deflector Height, protrusion height drop between first deflector and second deflector is for flowing through the decoction of the deflector Produce disturbance.
Further, wherein through an at least perforate is offered, the perforate passes through for the decoction for the bottom of the deflector The bottom of the deflector.
Further, the wherein deflector has one domatic, and this is domatic to be used to guiding the decoction and climb across the water conservancy diversion Plate.
Further, the wherein deflector is shaped as circular arc, trapezoidal or triangle.
Further, a pair of buckle structures of corresponding buckle are further included, a pair of buckle structures are respectively arranged at the medicine Liquid bath bottom and the deflector bottom, are fixed on the dipper by the deflector.
Further, wherein the buckle structure includes and is opened in a slot in the dipper, the slot confession this lead Flowing plate is fixed.
Further, wherein the buckle structure includes the holding section for being arranged at the deflector bottom, and the holding section is used for Engage the slot.
The present invention also provides a kind of wet process consersion unit, carries out chemical process with for a decoction and a base material, this is wet Processing procedure consersion unit includes:
One dipper, the dipper are used to house the decoction, and the dipper has an opening, a decoction entrance and one Medicine liquid outlet, the opening contact the decoction in the dipper for the base material, and the decoction entrance supplies the medicine with the medicine liquid outlet Liquid is flowed into and flowed out in the decoction;
An at least deflector, is convexly equipped in the dipper and the intersection decoction flows through path;
One restriction plate, it is arranged in the dipper at the neighbouring medicine liquid outlet;And
One unwinding unit and a rolling unit, the unwinding unit convey the base material with the rolling unit to scrolling.
Further, wherein being provided with a nozzle adjacent to the decoction porch, the nozzle is used for should by decoction injection Dipper.
Further, a wiper mechanism is further included, is arranged between the rolling unit and the medicine liquid outlet, the wiper mechanism For washing the decoction being built-up on the base material.
Further, a drying mechanism is further included, is arranged between the wiper mechanism and the rolling unit, the drying mechanism For removing the liquid of residual on the substrate.
The wet process consersion unit and its wet process reactive tank of the present invention can be disturbed in dipper by deflector to be flowed Decoction and be well mixed decoction, and make it that the reaction result of wet process is more stable.
Brief description of the drawings
Fig. 1 is the schematic perspective view of the wet process reactive tank of first embodiment of the invention;
Fig. 2 is the perspective exploded view of the wet process reactive tank of first embodiment of the invention;
Fig. 3 is the sectional view of the wet process reactive tank of first embodiment of the invention;
Fig. 4 is the enlarged diagram of deflector in Fig. 3;
Fig. 5 is another pattern schematic diagram of the deflector of wet process reactive tank in first embodiment of the invention;
Fig. 6 is another pattern schematic diagram again of the deflector of wet process reactive tank in first embodiment of the invention;
Fig. 7 is the enlarged diagram of the first deflector in Fig. 4;
Fig. 8 is the enlarged diagram of the second deflector in Fig. 4;
Fig. 9 is the schematic diagram of the buckle structure of wet process reactive tank in first embodiment of the invention;
Figure 10 is the schematic diagram of the wet process consersion unit of second embodiment of the invention.
In figure, 10 decoctions;
20 base materials;
100 dippers;
101 openings;
102 decoction entrances;
103 medicine liquid outlets;
104 spout holes;
110 nozzles;
120 tapered entrance runners;
200 deflectors;
201 is domatic;
202 perforates;
210 first deflectors;
220 second deflectors;
300 restriction plates;
400 buckle structures;
410 slots;
420 holding sections;
500 unwinding units;
510 unreel roller;
600 rolling units;
610 winding rollers;
700 wiper mechanisms;
800 drying mechanisms.
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, so that those skilled in the art can be with It is better understood from the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
Refering to Fig. 1 to Fig. 3, the first embodiment of the present invention provides a kind of wet process reactive tank.This wet process reactive tank supplies One decoction 10 and a base material 20 carry out wet process chemical process, but the present invention does not limit the species of wet process example.In the present embodiment In, wet process reactive tank of the invention includes a dipper 100, at least a deflector 200 and a restriction plate 300.
Dipper 100 is used to house decoction 10, and in the present embodiment, dipper 100 is in preferably strip.Dipper 100 top surface is formed with an opening 101, and two ends of dipper 100 are then formed with a decoction entrance 102 and a medicine liquid outlet 103.Opening 101 inserts dipper 100 for base material 20, and decoction entrance 102 is used to flow into dipper 100 for decoction 10, and decoction goes out Mouth 103 is then used to flow out dipper 100 for decoction 10.Dipper 100 keeps flat configuration and the bottom surface of dipper 100 preferably can be with Slightly inclined, the upright position of decoction entrance 102 are higher than the upright position of medicine liquid outlet 103, driven with this in dipper 100 Decoction 10 flows from decoction entrance 102 towards medicine liquid outlet 103.
Top at neighbouring decoction entrance 102 can be additionally provided with a nozzle 110, and nozzle 110 can preferably connect Decoction 10 is injected into decoction entrance 102 to a medical fluid supplies, and by nozzle 110.One can be offered in dipper 100 Spout hole 104, and spout hole 104 is configured at neighbouring decoction entrance 102.In the present embodiment, position that spout hole 104 is configured Put and be higher by an entrance height compared to the bottom surface of dipper 100 at decoction entrance 102.The liquid of decoction 10 at decoction entrance 102 Face exceed spout hole 104 position when, spout hole 104 can supply and discharge remove beyond the height of spout hole 104 decoction 10.Dipper In 100 a tapered entrance runner 120, the cone end of tapered entrance runner 120 can be additionally provided with neighbouring decoction entrance 102 Configured towards the inside of dipper 100, and the other end of tapered entrance runner 120 then connects the entrance of dipper 100.Entered by taper Mouth runner 120 can conflux the decoction 10 for being injected into decoction entrance 102 in dipper 100.
In the present embodiment, deflector 200 is preferably a plurality of, and each deflector 200 is all strip plate body.Each deflector 200 keep flat be convexly equipped in dipper 100 respectively, and the configuration direction of each deflector 200 mutually intersects with the path that decoction 10 flows through, The height fall that deflector 200 protrudes the bottom surface of dipper 100 produces disturbance for flowing through the decoction 10 of deflector 200.Refering to Fig. 4 To Fig. 6, the cross sectional shape of deflector 200 can be circular arc, trapezoidal or triangle, with this along the flow direction of decoction 10 in each water conservancy diversion Two sides of plate 200 form one domatic 201 respectively, and domatic 201 climb across deflector 200 for guiding decoction 10.
Refering to Fig. 2 to Fig. 4, Fig. 7 and Fig. 8, at least one first deflector can be included among a plurality of deflectors 200 210 and at least one second deflector 220.In the present embodiment, deflector 200 is in spaced arranged side by side, the row of deflector 200 It is listed between tapered entrance runner 120 and medicine liquid outlet 103, and the first deflector 210 and the interspersed row of the second deflector 220 Row.Furthermore the height of the first deflector 210 protrusion dipper 100 bottom surface is more than the second deflector 220 protrusion dipper 100 bottom The height in face, the protrusion height drop between the first deflector 210 and the second deflector 220 also can be for flowing through deflector 200 decoction 10 produces disturbance.
Refering to Fig. 9, the bottom of each deflector 200, which can extend through, offers an at least perforate 202, in the present embodiment In, each deflector 200 preferably offers a row perforate 202 respectively.When needing to empty the decoction 10 in dipper 100, open The decoction 10 that hole 202 can supply to accumulate in the bottom of deflector 200 is by the way that decoction 10 is excluded.
In the present embodiment, the bottom of dipper 100 and the bottom of deflector 200 can be respectively equipped with the card of corresponding buckle Buckle structure 400, deflector 200 can be fixed on dipper 100 by engaging this to buckle structure 400.Pass through buckle knot Structure 400 and be conveniently replaceable deflector 200, or adjustment deflector 200 quantity or arrangement.Buckle structure 400 is included and opened up In the inner bottom part of dipper 100 a slot 410 and from the bottom of deflector 200 extension protrusion a holding section 420.Engaging The shape of groove 410 is corresponding with the profile of holding section 420, and holding section 420 is caught in into slot 410 enough consolidates deflector 200 Bottom within dipper 100.
Refering to Fig. 1 and Fig. 2, restriction plate 300, which is kept flat, to be arranged in dipper 100 and is adjacent at medicine liquid outlet 103.Limitation Plate 300 is used to block the part decoction 10 for flowing through dipper 100, resides in dipper 100 decoction 10 with this and supplies base material 20 immerse to be chemically reacted.The liquid level position of decoction 10 at the apical margin position limitation medicine liquid outlet 103 of restriction plate 300. The retention amount of decoction 10 in dipper 100 can be limited by restriction plate 300 and spout hole 104.
Refering to Figure 10, the second embodiment of the present invention provides a kind of wet process consersion unit, and this wet process consersion unit supplies One decoction 10 and a base material 20 carry out chemical process, but the present invention does not limit the species of wet process example.In the present embodiment, this hair Bright wet process consersion unit includes a dipper 100, at least a deflector 200, a restriction plate 300, a unwinding unit 500 And a rolling unit 600, and can add and a wiper mechanism 700 and a drying mechanism 800 are set.Dipper 100, lead The construction and function of flowing plate 200 and restriction plate 300 repeat no more as described in first embodiment in this.Also, in this implementation Base material 20 in strip and is winding configuration in example.Unwinding unit 500 conveys base material 20 with rolling unit 600 to scrolling.
Unwinding unit 500 is positioned adjacent at decoction entrance 102.In the present embodiment, unwinding unit 500 includes one and put Scroll cylinder 510.One end that roller 510 is unreeled for base material 20 is wound.Rolling unit 600 is positioned adjacent at medicine liquid outlet 103, in In the present embodiment, rolling unit 600 includes a winding roller 610.The other end that roller 610 is wound for base material 20 is wound.Put The part thereof 20 hung between scroll cylinder 510 and winding roller 610 contacts dipper by the opening 101 of dipper 100 Decoction 10 in 100.
It can be active rotation to unreel roller 510, unreel on roller 510 winding without the base material 20 that chemically reacts, when unreeling Roller 510 can export the unreacted scrolling of base material 20 to dipper 100 when rotating.Wind roller 610 preferably based on Dynamic rotation, the base material 20 that reaction has been completed in dipper 100 can be furled when winding roller 610 and rotating.
Wiper mechanism 700 is arranged between rolling unit 600 and medicine liquid outlet 103, and wiper mechanism 700 can wash The residual liquor 10 being built-up on base material 20.Wiper mechanism 700 also provides lotion to wash base material 20, but the invention is not restricted to This.
Drying mechanism 800 is arranged between wiper mechanism 700 and rolling unit 600.Base material 20 by drying mechanism 800 simultaneously And be oven-dried mechanism 800 and toast, to remove the liquid (such as water or lotion) remained on base material 20.
The wet process consersion unit and its wet process reactive tank of the present invention includes dipper 100 and is arranged on decoction The deflector 200 of the bottom of groove 100.Deflector 200 can disturb the decoction 10 of flowing in dipper 100 and decoction 10 is mixed It is even, with this so that the reaction result of wet process is more stable.
Embodiment described above is only to absolutely prove preferred embodiment that is of the invention and being lifted, protection model of the invention Enclose not limited to this.The equivalent substitute or conversion that those skilled in the art are made on the basis of the present invention, in the present invention Protection domain within.Protection scope of the present invention is defined by claims.

Claims (15)

1. a kind of wet process reactive tank, carry out chemical process with for a decoction and a base material, it is characterised in that the wet process is anti- Groove is answered to include:
One dipper, the dipper are used to house the decoction, and the dipper has an opening, a decoction entrance and a decoction Outlet, the opening insert the dipper for the base material, and the decoction enters decoction described in confession and flows into the dipper, in the dipper The decoction flowed towards the medicine liquid outlet, the medicine liquid outlet flows out the dipper for the decoction;
An at least deflector, is convexly equipped in the dipper and the intersection decoction flows through path, and the deflector protrudes the dipper The height fall of bottom surface produces disturbance for flowing through the decoction of the deflector;And
One restriction plate, it is arranged in the dipper at the neighbouring medicine liquid outlet, the restriction plate is used to that the portion of the dipper will to be flowed through Point decoction, which blocks, to be resided in the dipper, and the decoction in the apical margin position limitation of the restriction plate dipper Liquid level position.
2. wet process reactive tank as claimed in claim 1, it is characterised in that the decoction porch is wherein provided with a spray Mouth, the nozzle are used to the decoction injecting the dipper.
3. wet process reactive tank as claimed in claim 1, it is characterised in that a spout hole is wherein offered in the dipper, The spout hole is configured at the neighbouring decoction porch, and the position of the spout hole compares the bottom surface of the dipper and is higher by entrance height Degree, when the liquid level of the decoction in the dipper exceeds the position of the spout hole, the spout hole supply and discharge, which is removed, exceeds the overflow The decoction of hole height.
4. wet process reactive tank as claimed in claim 1 a, it is characterised in that tapered entrance is wherein provided with the dipper Runner, the tapered entrance runner are located at the decoction porch, and the tapered entrance runner is used to conflux the decoction into the decoction Groove.
5. wet process reactive tank as claimed in claim 1, it is characterised in that wherein deflector is a plurality of, and the deflector It is big comprising at least one first deflector and at least one second deflector, the height that first deflector protrudes the decoction groove bottom The height of the decoction groove bottom is protruded in second deflector, the protrusion height between first deflector and second deflector Drop produces disturbance for flowing through the decoction of the deflector.
6. wet process reactive tank as claimed in claim 1, it is characterised in that wherein the bottom of the deflector through offer to A few perforate, the perforate supply bottom of the decoction by the deflector.
7. wet process reactive tank as claimed in claim 1, it is characterised in that wherein the deflector is domatic with one, and this is domatic Climbed for guiding the decoction across the deflector.
8. wet process reactive tank as claimed in claim 7, it is characterised in that the wherein deflector is shaped as circular arc, trapezoidal Or triangle.
9. wet process reactive tank as claimed in claim 1, it is characterised in that further include a pair of buckle knots of corresponding buckle Structure, a pair of buckle structures are respectively arranged at the decoction trench bottom and the deflector bottom, the deflector are fixed on into this Dipper.
10. wet process reactive tank as claimed in claim 9, it is characterised in that wherein the buckle structure includes and is opened in the medicine A slot in liquid bath, the slot are fixed for the deflector.
11. wet process reactive tank as claimed in claim 10, it is characterised in that wherein the buckle structure includes and is arranged at this and leads One holding section of flowing plate bottom, the holding section are used to engage the slot.
12. a kind of wet process consersion unit, carry out chemical process with for a decoction and a base material, it is characterised in that the wet system Journey consersion unit includes:
One dipper, the dipper are used to house the decoction, and the dipper has an opening, a decoction entrance and a decoction Outlet, the opening contact the decoction in the dipper for the base material, and the decoction entrance exists with the medicine liquid outlet for the decoction The decoction flows into and outflow;
An at least deflector, is convexly equipped in the dipper and the intersection decoction flows through path;
One restriction plate, it is arranged in the dipper at the neighbouring medicine liquid outlet;And
One unwinding unit and a rolling unit, the unwinding unit convey the base material with the rolling unit to scrolling.
13. wet process consersion unit as claimed in claim 12, it is characterised in that be wherein provided with adjacent to the decoction porch One nozzle, the nozzle are used to the decoction injecting the dipper.
14. wet process consersion unit as claimed in claim 12, it is characterised in that further include a wiper mechanism, be arranged at this Between rolling unit and the medicine liquid outlet, the wiper mechanism is used to wash the decoction being built-up on the base material.
15. wet process consersion unit as claimed in claim 14, it is characterised in that further include a drying mechanism, be arranged at this Between wiper mechanism and the rolling unit, the drying mechanism is used to remove the liquid of residual on the substrate.
CN201510686873.7A 2014-10-27 2015-10-22 Wet process reaction equipment and wet process reaction tank thereof Active CN105543809B (en)

Applications Claiming Priority (2)

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TW103137044 2014-10-27
TW103137044A TWI593131B (en) 2014-10-27 2014-10-27 Wet process reaction apparatus and wet process reaction vessel thereof

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CN105543809B true CN105543809B (en) 2018-03-02

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113814230A (en) * 2021-09-24 2021-12-21 Tcl华星光电技术有限公司 Reaction tank and wet processing equipment

Citations (4)

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Publication number Priority date Publication date Assignee Title
CN1864241A (en) * 2003-10-06 2006-11-15 应用材料公司 Apparatus to improve wafer temperature uniformity for face-up wet processing
CN103026506A (en) * 2010-05-25 2013-04-03 瑞而索乐公司 Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells
CN103184439A (en) * 2011-12-30 2013-07-03 纯化科技股份有限公司 Chemical bath deposition apparatus and method for manufacturing thin film solar cells
CN103305885A (en) * 2013-06-01 2013-09-18 北京工业大学 Diversion type auxiliary plating device and plating method aiming at plating inner surface of hollow plated part

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Publication number Priority date Publication date Assignee Title
US8497152B2 (en) * 2009-05-12 2013-07-30 Solopower, Inc. Roll-to-roll processing method and tools for electroless deposition of thin layers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1864241A (en) * 2003-10-06 2006-11-15 应用材料公司 Apparatus to improve wafer temperature uniformity for face-up wet processing
CN103026506A (en) * 2010-05-25 2013-04-03 瑞而索乐公司 Apparatus and methods for fast chemical electrodeposition for fabrication of solar cells
CN103184439A (en) * 2011-12-30 2013-07-03 纯化科技股份有限公司 Chemical bath deposition apparatus and method for manufacturing thin film solar cells
CN103305885A (en) * 2013-06-01 2013-09-18 北京工业大学 Diversion type auxiliary plating device and plating method aiming at plating inner surface of hollow plated part

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TWI593131B (en) 2017-07-21
CN105543809A (en) 2016-05-04

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