CN1055337C - Piezo-electric resonance type force sensor - Google Patents
Piezo-electric resonance type force sensor Download PDFInfo
- Publication number
- CN1055337C CN1055337C CN 95104981 CN95104981A CN1055337C CN 1055337 C CN1055337 C CN 1055337C CN 95104981 CN95104981 CN 95104981 CN 95104981 A CN95104981 A CN 95104981A CN 1055337 C CN1055337 C CN 1055337C
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- China
- Prior art keywords
- briquetting
- resonator
- positioning film
- piezo
- force sensor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000002184 metal Substances 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000007423 decrease Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 229920006351 engineering plastic Polymers 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The present invention relates to a piezoelectric resonance type force sensor. The present invention adopts a sheathed and inserted structure for connecting and positioning to make a plurality of components into a whole, which decreases the number of separated components, and therefore, the present invention has the advantages of simple assembly technology, compact structure, small size and high cost performance ratio.
Description
The present invention relates to a kind of force measuring device, particularly a kind of piezo-electric resonance type force sensor.
Piezo-electric resonance type force sensor is to utilize the digital transducer of piezoelectric quartz resonator as sensitive element.When external force acts on resonator, when causing resonator substrate internal strain state to change, will cause the change of the resonance frequency of resonator, the size of the change amount reflection external force of frequency.U.S.Pat, NO.3,891,870 disclose a kind of sensor of this form, and its structure is as shown in Figure 1.Its principle of work is: external force F acts on responsive resonator 11 by briquetting 16, causes the frequency shift of resonator 11, implements whereby to measure.This sensor adopts more separating component, connects and the location with screw, so volume is big, and the assembly technology complexity, the ratio of performance to price is low, adjusts difficulty.United States Patent (USP) U.S.4,020,448 discloses the piezo-electric resonance type force sensor of another form.This patent is placed in the same housing for reducing reference resonator and the responsive resonator that the original signal frequency will use during with this class working sensor, adds built-in signal circuit, forms a complete sensors system.On the supporting construction of last lower lock block to responsive resonator and reference resonator, introduced V-type groove structure, can play guiding function to the location of the resonator in the assembling process.On sensor is formed, still adopted the combination of many discrete parts.Previous relatively patent, the complex structure degree is basic identical.
The purpose of this invention is to provide a kind of simple in structurely, volume is little, and assembly technology is simple, can adapt to production in enormous quantities, is easy to adjust and piezo-electric resonance type force sensor that the ratio of performance to price is high.
The designed piezo-electric resonance type force sensor of the present invention comprises briquetting, positioning film, responsive resonator, cushion block, support, base and housing, responsive resonator is fixed between briquetting and the cushion block, and external force produces diameter pressure by briquetting and cushion block to responsive resonator.Briquetting is fixed on the positioning film, and its first half protrudes from the positioning film, and Lower Half is positioned under the positioning film, and briquetting and responsive resonator contact position have locating slot, and are provided with the V-type guiding groove; It is characterized in that: support is made of with two metal electrode A, B being fixed on the carrier base carrier base, support is inserted in the base locate earlier, then cushion block, responsive resonator, upper holder block, housing and diaphragm is packed into successively.Member and member connecting place all adopt suit to insert the formula structure.
The present invention can also be made of one briquetting, positioning film and housing.
The present invention adopts suit to insert the formula structure, helps accurately location with the V-type guiding groove, reduces separating component quantity, thus assembly technology simply, compact conformation, volume is little and ratio of performance to price height.
Further specify the present invention below in conjunction with embodiment:
Fig. 1. existing piezo-electric resonance type force sensor structural drawing.
Fig. 2. structure diagram of the present invention.
Fig. 3. the another embodiment of the present invention structure diagram.
Fig. 4. the A-A sectional view of Fig. 3.
Fig. 5. the assembling synoptic diagram of sensor shown in Figure 3.
Embodiment 1.
As shown in Figure 2.Briquetting is a boss type, pass the pilot hole on the positioning film 2, its first half is protruded from the diaphragm 2, be used to bear the effect of external force, avoid force body directly to contact with diaphragm 2, briquetting 1 sticks at or is welded on the diaphragm 2, its Lower Half contacts with responsive resonator 4, as the upper support of resonator 4, the contact position has locating slot and design that V-type guiding groove 9 is arranged, and accurately locatees when being convenient to assemble.Responsive resonator 4 is fixed between briquetting 1 and the cushion block 5, and external force produces diameter pressure by briquetting 1 and 5 pairs of responsive resonators 4 of cushion block.Cushion block 5 bottoms have locating slot, and be fixed on the support 6, support 6 is made of with two metal electrode A, B being fixed on the carrier base carrier base, and electrode A, B can play the responsive resonator 4 of constraint when assembling, the electrode and the external circuit of resonator 4 can be connected after the moulding.
Positioning film 2, shell 3 and base 7 are bonding or weld together, and form an enclosed cavity, and responsive resonator 4 and support component thereof are closed in wherein.8 is insulation sleeve among the figure.Except that responsive resonator 4 and metal electrode A, B, remaining part adopts metal or engineering plastics.
External force acts on downwards on the responsive resonator 4 by briquetting 1, and sensor is connected to metering circuit by lead-in wire A, B, produces the electric signal that changes with amount of force.
As shown in Figure 3, Figure 4.Positioning film 2 and housing 3 are processed into one, and positioning film 2 lower surfaces have a boss, and locating slot and V-type guiding groove 9 are arranged on it, are equivalent to briquetting 1 and are positioned at part below the positioning film 2, as the upper support of responsive resonator 4.Beaer is a spheroid, can be processed into one with positioning film 2, also can be split, particularly can be a steel ball, is positioned on the positioning film 2, is equivalent to briquetting 1 and is positioned at part on the positioning film 2.Other parts are with embodiment 1.
Except that responsive resonator 4 and metal electrode A, B, other parts are made with engineering plastics, and the assembly technology of present embodiment connects order with each member and is sleeved on together, and get final product being bonded together between contacted member and the member as shown in Figure 5.The course of work is with embodiment 1.
Claims (2)
1, a kind of piezo-electric resonance type force sensor, comprise briquetting (1), positioning film (2), responsive resonator (4), cushion block (5), support (6), housing (3) and base (7), responsive resonator (4) is fixed between briquetting (1) and the cushion block (5), external force produces diameter pressure by briquetting (1) and cushion block (5) to responsive resonator (4), briquetting (1) is fixed on the positioning film (2), its first half protrudes from the positioning film (2), Lower Half is positioned under the positioning film (2), have locating slot with responsive resonator (4) contact position, and be provided with V-type guiding groove 9; It is characterized in that: support (6) is made of with two metal electrode A, B being fixed on the carrier base carrier base, earlier support is inserted in the base and locate, then cushion block, responsive resonator, upper holder block, housing and diaphragm are packed into successively, member and member connecting place all adopt suit to insert the formula structure.
2, piezo-electric resonance type force sensor according to claim 1 is characterized in that: briquetting (1), positioning film (2), housing (3) are one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95104981 CN1055337C (en) | 1995-05-19 | 1995-05-19 | Piezo-electric resonance type force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95104981 CN1055337C (en) | 1995-05-19 | 1995-05-19 | Piezo-electric resonance type force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1113006A CN1113006A (en) | 1995-12-06 |
| CN1055337C true CN1055337C (en) | 2000-08-09 |
Family
ID=5075361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 95104981 Expired - Fee Related CN1055337C (en) | 1995-05-19 | 1995-05-19 | Piezo-electric resonance type force sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1055337C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101276729B (en) * | 2007-03-29 | 2010-06-02 | 株式会社Sts | Rectangular gate valve |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7240711B2 (en) * | 2004-01-21 | 2007-07-10 | Asm Assembly Automation Ltd. | Apparatus and method for alignment of a bonding tool |
| CN112505143B (en) * | 2020-11-09 | 2022-06-21 | 南京大学 | Device and method for measuring interaction between macroscopic interfaces |
-
1995
- 1995-05-19 CN CN 95104981 patent/CN1055337C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101276729B (en) * | 2007-03-29 | 2010-06-02 | 株式会社Sts | Rectangular gate valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1113006A (en) | 1995-12-06 |
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |