CN105515440B - Without impact rectangular slab piezoelectric straight line micro machine - Google Patents
Without impact rectangular slab piezoelectric straight line micro machine Download PDFInfo
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- CN105515440B CN105515440B CN201510945457.4A CN201510945457A CN105515440B CN 105515440 B CN105515440 B CN 105515440B CN 201510945457 A CN201510945457 A CN 201510945457A CN 105515440 B CN105515440 B CN 105515440B
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- 239000000758 substrate Substances 0.000 claims abstract description 46
- 238000005086 pumping Methods 0.000 claims abstract description 40
- 238000005452 bending Methods 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims description 26
- 239000002783 friction material Substances 0.000 claims description 15
- 230000005284 excitation Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 6
- 150000001875 compounds Chemical class 0.000 abstract description 2
- 239000000919 ceramic Substances 0.000 description 48
- 230000007246 mechanism Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
- H02N2/126—Mechanical transmission means, e.g. for gearing for conversion into linear motion
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses one kind without impact rectangular slab piezoelectric straight line micro machine, including stator, rotor and guide rail, wherein stator is the rectangular substrate for having on surface at least two piezoelectric patches, and rectangular substrate has the through hole of surrounding rotor；For driving the pumping signal without impact rectangular slab piezoelectric straight line micro machine to be loaded between the surface that rectangular substrate and piezoelectric patches do not connect with rectangular substrate, the pumping signal makes the complex vibration of single order longitudinal vibration and second order bending vibration caused by stator make to be formed traveling wave on the surface of through hole so that the surface energy of through hole is rotated by frictional force drives rotor, the surface of rotor contacts with the surface of guide rail, drives guide rail to move along a straight line by frictional force when rotor rotates.The present invention motivates second order traveling wave by using vertical, the bending compound modal of substrate in drive surface, is rotated using friction-driven rotor and then drives guide rail to move along a straight line, and so as to eliminate impulsive force, thus, it is possible to smooth working, plays the effect of stabilized driving.
Description
Technical field
The present invention relates to a kind of piezoelectric micro motor, more particularly to one kind is without impact rectangular slab piezoelectric straight line micro machine.
Background technology
Piezoelectric micro motor utilizes the inverse piezoelectric effect of piezoelectric ceramics, converts electrical energy into the vibrational energy of stator, and stator leads to again
Cross the rotation of friction-driven rotor or moving component does straight line or rotary motion.It is also referred to as ultrasonic when it is operated in supersonic range
Motor.
Compared with traditional electromagnetic driver, piezoelectric motor has many features and advantage, such as：
1st, compact-sized, energy density (torque/quality) greatly, is easy to be miniaturized；
2nd, low-speed and large-torque, without gear reduction, it is possible to achieve direct drive；
3rd, motor fast response time, and can realize and cut off self-lock；
4th, position and speed control are good, and displacement resolution is high；
5th, supersonic motor is to carry out energy conversion by vibrating to rub, and magnetic field is not produced in transfer process, also not
Disturbed by external magnetic field, anti-electromagnetic interference capability is strong；
6th, quiet noiseless, supersonic motor are operated in supersonic range, due to not needing the reducing gears such as gear, so can
With quiet muting operation；
7th, flexible design, structure type variation.
Because piezoelectric motor has the characteristics that in light weight, compact-sized, driving voltage is low, equipment is made it particularly appropriate for use in
With the direct drive of mechanism, without reducing gear.
The rectangular slab linear ultrasonic motor driven in face extensively should because precision is high, simple in construction, stable performance
For the various occasions for needing precision actuation.Such linear electric motors also develops the mutation such as biped motor, and application prospect is good
It is good.But the type motor also has the problem of being difficult to overcome, i.e., due to its standing wave drive mode, operationally led to what is driven
Rail has impact, and in some occasions, such as in electron beam, ion beam exposure equipment, being rocked caused by this impact can be to equipment
Steady operation produce considerable influence.The larger impulsive force of this standing wave type motor, often to the work shape of institute's driving part
State interferes.
Therefore, it is a kind of without impact rectangular slab piezoelectric straight line micro machine to be directed to exploitation by those skilled in the art, in elimination
The impulsive force stated.
The content of the invention
In view of the drawbacks described above of prior art, the technical problems to be solved by the invention are to provide a kind of without impact rectangle
Plate piezoelectric straight line micro machine, by exciting travelling wave drive rotor in the drive surface of stator, realize during driving without impact
Effect.
To achieve the above object, the invention provides one kind without impact rectangular slab piezoelectric straight line micro machine, including stator, turn
Son and guide rail, it is characterised in that the stator is the rectangular substrate with least two piezoelectric patches, the rectangular substrate on surface
With the through hole around the rotor, the individual piezoelectric patches is all adjacent to the through hole；
For driving the pumping signal without impact rectangular slab piezoelectric straight line micro machine to be loaded in the rectangular substrate
Between the surface that does not connect with the rectangular substrate of the piezoelectric patches, the pumping signal includes phase by pi/2 to each other
The first pumping signal and the second pumping signal, the pumping signal loaded on adjacent two piezoelectric patches is different；
The pumping signal makes the complex vibration of single order longitudinal vibration and second order bending vibration caused by stator make the surface of the through hole
Upper formation traveling wave, the traveling wave make the surface energy of the through hole be rotated by rotor described in frictional force drives；
The surface of the rotor contacts with the surface of the guide rail, when the rotor rotates by the surface of the rotor with
Frictional force between the surface of the guide rail drives the guide rail to move along a straight line.
Further, including the first piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches, first pressure
Electric piece, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches are distributed on the first surface of the substrate, and arrange successively with
Around the through hole；First piezoelectric patches, the second piezoelectric patches, the polarised direction of the 3rd piezoelectric patches and the 4th piezoelectric patches are all parallel
In the normal of the first surface of the substrate, polarised direction and second piezoelectricity of first piezoelectric patches and the 3rd piezoelectric patches
The polarised direction of piece and the 4th piezoelectric patches is opposite；The substrate is metallic plate, and the through hole is at the center of the rectangular substrate.
Further, it is the surface portion of the through hole circular conical surface, first surface of the circular conical surface along the substrate
First surface from normal to the substrate deploy；The traveling wave enables the circular conical surface to turn by rotor described in frictional force drives
It is dynamic.
Further, in addition to output shaft, the output shaft are connected with the rotor to export rotating torque.
Further, the first surface of first piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches with
The first surface of the rectangular substrate connects, first piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches
There is first electrode, second electrode, the 3rd electrode and the 4th electrode respectively on second surface；The rectangular substrate ground connection is described
First pumping signal is loaded in first electrode and the 3rd electrode, described second is loaded on the second electrode and the 4th electrode
Pumping signal；First pumping signal is sinusoidal excitation signal, and second pumping signal is cosine pumping signal.
Further, the surface of the through hole also includes the second circular conical surface, and second circular conical surface is along the of the substrate
Two normals to a surface deploy to the second surface of the substrate；It is described also to include second without impact rectangular slab piezoelectric straight line micro machine
Rotor, the output shaft are connected with second rotor；The traveling wave enables second circular conical surface to pass through frictional force drives institute
State the rotation of the second rotor.
Further, in addition to the 5th piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches, the described 5th
Piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches are distributed on the second surface of the substrate, and with described
One piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches correspond；5th piezoelectric patches, the 6th piezoelectric patches,
7th piezoelectric patches and the 8th piezoelectric patches have the opposite polarised direction of corresponding piezoelectric patches；5th piezoelectric patches, the 6th
On the second surface of piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches respectively have the 5th electrode, the 6th electrode, the 7th electrode and
8th electrode；First pumping signal, the 6th electrode and the 8th electrode are loaded on 5th electrode and the 7th electrode
Upper loading second pumping signal.
Further, hollow metal annulus is arranged with the through hole, the metal annulus is firmly fastened to
The rectangular substrate；The surface of the metal annulus is included along the normal of the first surface of the substrate to the of the substrate
3rd circular conical surface of one unfolded surface and along the substrate second surface second surface from normal to the substrate deploy
4th circular conical surface, the 3rd circular conical surface contact with the rotor, and the 4th circular conical surface contacts with second rotor.
Further, there is friction material, the 3rd circular conical surface passes through the friction material on the 3rd circular conical surface
Contacted with the rotor；And/or
There is friction material, the 4th circular conical surface passes through the friction material and described second on 4th circular conical surface
Rotor contacts.
Further, there is friction material on rotor and/or the second rotor；There is friction material on the surface of the guide rail
Material.
In the better embodiment of the present invention, there is provided a kind of without impact rectangular slab piezoelectric straight line micro machine, it includes
As the metallic plate of the rectangle of stator, there is through hole at metallic plate center, paste four potteries on two surfaces of metallic plate respectively
Porcelain piezoelectric patches.On a surface of metallic plate, four piezoelectric ceramics pieces are of similar shape, and are arranged in rectangular metal
Four corners of plate and jointly around above-mentioned through hole, four piezoelectric ceramics pieces are not directly contacted with each other, respectively there is an electrode thereon；
The polarised direction of four piezoelectric ceramics pieces all forms one group parallel to the normal to a surface, the diagonal piezoelectric ceramics piece of each two,
Two piezoelectric ceramics pieces with group have an identical polarised direction, and the piezoelectric patches of difference group have an opposite polarised direction, one group
Sinusoidal excitation signal is loaded on the electrode of piezoelectric patches, loads cosine pumping signal on the electrode of another group of piezoelectric patches, metallic plate connects
Ground.Four piezoelectric ceramics pieces on another surface of metallic plate are with four piezoelectric ceramics pieces on this surface on metallic plate
Middle section it is symmetrical.Metal annulus is arranged in the through hole of metallic plate, metal annulus is securely connected with metallic plate, and it has
Two circular conical surfaces, the two circular conical surfaces are respectively along two normals to a surface of metallic plate to the two unfolded surfaces.Two with it is defeated
The rotor that shaft is fixedly connected respectively with the two conical surface contacts, and by two pre-tightening mechanisms tightly oppress the two circle
Also there is friction material to increase frictional force between the two on the conical surface, on rotor and circular conical surface.When in use, it is loaded excitation
The stator of the invention without impact rectangular slab piezoelectric straight line micro machine of signal occurs what is be superimposed by single order longitudinal vibration and second order bending vibration
Complex vibration (wherein single order longitudinal vibration is consistent with second order bending vibration frequency), traveling wave is produced on two circular conical surfaces of its metal annulus,
By the frictional force between rotor and circular conical surface, two rotors are driven and rotated, thus output shaft output rotating torque.
Two rotors have the part for extending to stator exterior, and the part drives guide rail with guide rail contact and by frictional force between the two
Move along a straight line.
As can be seen here, it is of the invention to be driven without impact rectangular slab piezoelectric straight line micro machine using the vertical of plate, bending compound modal
Motivate second order traveling wave on dynamic face, the particle motion trace in drive surface is ellipse, is rotated using friction-driven rotor, rotor can
Export linear drives.Because the particle motion trace in drive surface is ellipse, the same time is at least symmetrical when driving rotor
Two particles contact with rotor, eliminate impulsive force, described motor energy smooth working, play the effect of stabilized driving.This hair
It is bright to eliminate impact, solve the driving stability problem of puzzlement rectangular slab class piezoelectric motor, there is compact-sized, output torque
Greatly, cost is low, precision is high, makes the advantages that simple, integrated beneficial to miniaturization, industrialization and installation.It is biological, medical, micro-
Machinery, automatically control, the first-class field of optical frames has wide application prospects.
Design, concrete structure and the caused technique effect of the present invention are described further below with reference to accompanying drawing, with
It is fully understood from the purpose of the present invention, feature and effect.
Brief description of the drawings
Fig. 1 is the profile of the invention without impact rectangular slab piezoelectric straight line micro machine in a preferred embodiment.
Fig. 2 show Fig. 1 without impact rectangular slab piezoelectric straight line micro machine in stator.
Fig. 3 shows the single order longitudinal vibration mode of the stator in Fig. 2.
Fig. 4 shows the second order bending vibration modes of the stator in Fig. 2.
Fig. 5 shows the vibration shape of the single order longitudinal vibration of the stator in Fig. 2 and the vibration shape of second order bending vibration.
Fig. 6 shows the complex vibration and surface traveling wave of the drive surface of the stator in Fig. 2.
Embodiment
In the better embodiment of the present invention, there is provided it is a kind of without impact rectangular slab piezoelectric straight line micro machine, such as Fig. 1 institutes
Show, it include stator 210, the first rotor 221, the second rotor 222, output shaft 230, fastener 240, the first pre-tightening mechanism 251,
Second pre-tightening mechanism 252 and friction material 260.
Stator 210 includes a substrate with through hole, the drive surface of the surface of through hole as micro machine.The present embodiment
In, substrate is the metallic plate 10 of rectangle, as shown in Figure 2.It has two surfaces (due to four tables extended in its thickness direction
The thickness of the width in face, i.e. metallic plate 10, smaller, four surfaces are not paid attention to herein), one is visible direction in Fig. 2
The first surface of paper, another is the sightless second surface backwards to paper in Fig. 2.Have at the center of metallic plate 10 logical
Hole 30, thickness direction extension of the through hole 30 along metallic plate 10, metallic plate 10 is penetrated until metal from the first surface of metallic plate 10
The second surface of plate 10.
In the present embodiment, hollow metal annulus 40 is arranged with through hole 30.Metal annulus 40 fastens with metallic plate
Ground connects, as shown in Fig. 2 axis bobbin pair of the surface of the axis towards through hole 30 of metal annulus 40 on through hole 30
Claim.The surface is the surface for contacting the rotor 122 of the first rotor 121 and second, and the present invention without impact rectangular slab pressure
The drive surface of electric straight line micro machine, therefore the surface of metal annulus 40 specifically described herein refers to this surface.Metal ring
The surface of part 40 includes two circular conical surfaces, the two circular conical surfaces respectively along metallic plate 10 two normals to a surface to the two
Unfolded surface.Circular conical surface described in this specification refers to along certain normal to a surface direction to the unfolded surface, the circular conical surface
Rotary shaft overlaps with the normal direction, and along the normal direction, the bus of the circular conical surface is gradually deviated from its rotary shaft until the surface
Place.
There is the part protruded to the axis of through hole 30 between the two circular conical surfaces, in metal annulus 40, be used for
Avoid the direct contact of the rotor 122 of the first rotor 121 and second.
All it is pasted with four piezoelectric ceramics pieces on first and second surfaces of metallic plate 10, the first and second of metallic plate 10
Piezoelectric ceramics piece on surface (passes through being put down with its first and second surface for the center of metallic plate on the middle section of metallic plate 10
Capable section) symmetrically, below by taking first surface as an example, these piezoelectric ceramics pieces are described.
As shown in Fig. 2 four piezoelectric ceramics pieces 21,22,23 and 24 are distributed on the first surface of metallic plate 10, they according to
Secondary arrangement is not directly contacted with but separated by gap around through hole 30 and metal annulus 40 each other.In the present embodiment, four
Individual piezoelectric ceramics piece 21,22,23 and 24 is of similar shape, and occupies a corner of the first surface of metallic plate 10 respectively.
These piezoelectric ceramics pieces all have first surface and second surface, first surface phase of their first surface all with metallic plate 10
Connect, in the present embodiment, the first surface of piezoelectric ceramics piece is all pasted onto on the first surface of metallic plate 10.Four piezoelectric ceramics pieces
21st, 22,23 and 24 polarised direction all forms one group parallel to the normal to a surface, the diagonal piezoelectric ceramics piece of each two, together
Two piezoelectric ceramics pieces of group have identical polarised direction, and the piezoelectric patches of difference group has opposite polarised direction.It is i.e. ceramic
Piezoelectric patches 21 and 23 forms one group of piezoelectric ceramics piece, and they have identical polarised direction, such as first all with metallic plate 10
Normal to a surface direction is identical, or conversely；Piezoelectric ceramics piece 22 and 24 forms another group of piezoelectric ceramics piece, and they have identical
Polarised direction, and and piezoelectric ceramics piece 21 and 23 polarised direction on the contrary, normal for example all with the first surface of metallic plate 10
In the opposite direction, it is or identical.In the present embodiment, all there is an electrode, for load driver on the second surface of piezoelectric ceramics piece
The pumping signal without impact rectangular slab piezoelectric straight line micro machine of the present invention, between all having between each electrode and metal annulus 40
Gap is to ensure the insulation between each electrode and metal annulus 40.The pumping signal used in the present embodiment is in particular voltage letter
Number, including the first pumping signal and the second pumping signal, wherein the first pumping signal is carried in the electrode of one group of piezoelectric ceramics piece
On, the second pumping signal is carried on the electrode of another group of piezoelectric ceramics piece.Specifically, the first pumping signal is believed for sinusoidal excitation
Number, by the electrode of the electrode of piezoelectric ceramics piece 21 and piezoelectric ceramics piece 23；Second pumping signal is cosine pumping signal, quilt
On the electrode of piezoelectric ceramics piece 22 and the electrode of piezoelectric ceramics piece 24；It is or on the contrary.
Four piezoelectric ceramics pieces on the second surface of metallic plate 10 are with piezoelectric ceramics piece 21,22,23 and 24 on metal
The middle section of plate 10 is symmetrical, is in particular：Four piezoelectric ceramics pieces on the second surface of metallic plate 10 and piezoelectric ceramics piece 21,
22nd, 23 is identical with 24 shape, and distribution mode is also identical；Four piezoelectric ceramics pieces on the second surface of metallic plate 10 have respectively
There are the polarised direction opposite with that piezoelectric ceramics piece corresponding in piezoelectric ceramics piece 21,22,23 and 24, correspondence herein
Refer to symmetrically, i.e., on that on the middle section of metallic plate 10 and the second surface of the symmetrical metallic plate 10 of piezoelectric ceramics piece 21
The polarised direction of piezoelectric ceramics piece is opposite with piezoelectric ceramics piece 21；Four piezoelectric ceramics pieces on the second surface of metallic plate 10
Electrode and metal annulus 40 between all there is gap to ensure their insulation between metal annulus 40, these electrodes
The pumping signal of upper loading is identical with that piezoelectric ceramics piece corresponding in piezoelectric ceramics piece 21,22,23 and 24 respectively, i.e.,
On that piezoelectric ceramics piece on the middle section of metallic plate 10 and the second surface of the symmetrical metallic plate 10 of piezoelectric ceramics piece 21
Electrode on the pumping signal that loads it is identical with the pumping signal loaded on the electrode of piezoelectric ceramics piece 21.The He of the first rotor 221
Second rotor 222 is respectively received on two circular conical surfaces and metal annulus 40 of metal annulus 40 at least in part
In the space of the common envelope in part of protrusion, and respectively tightly oppressed in the two circular conical surfaces by pre-tightening mechanism 251 and 252
On, in the present embodiment, there is friction material 260 on the rotor 222 of the first rotor 221 and second and/or the two circular conical surfaces, be used for
Increase the frictional force between the rotor 222 of the first rotor 221 and second and the two circular conical surfaces.The rotor of the first rotor 221 and second
222 are fixedly connected with output shaft 230, and realize being fastenedly connected between them by fastener 240, are used in the present embodiment
Fastener 240 is nut, has the tooth coordinated with the nut on output shaft 230.
When using the present invention without impact rectangular slab piezoelectric straight line micro machine, pumping signal is loaded by foregoing mode
Onto eight electrodes of stator 210, thus the complex vibration by single order longitudinal vibration and the superposition of second order bending vibration can occur for stator 210.Fig. 3
Show the single order longitudinal vibration mode of stator 210, it can be seen that through hole 30 is changed into ellipse from original circle (being represented by dotted lines in figure)
Also from original rectangle (being represented by dotted lines in figure) portion retracts and stretching occur for circle, metallic plate 10；Fig. 4 shows stator
210 second order bending vibration modes, it can be seen that through hole 30 is changed into the ellipse of deflection from original circle (being represented by dotted lines in figure),
Metallic plate 10 is also distorted from original rectangle (being represented by dotted lines in figure).The vibration shape and second order of the single order longitudinal vibration of stator 210
The mode curve of bending vibration shows that in Figure 5 wherein curve L1 is the mode curve of single order longitudinal vibration, and curve L2 is shaking for second order bending vibration
Type curve.Thus, can be consistent in acquisition frequency thereon by designing stator 210, such as the structural parameters of design metallic plate 10
Single order longitudinal vibration and second order bending vibration, at this moment occur complex vibration stator 210 metal annulus two circular conical surfaces on will production
Raw traveling wave, as shown in fig. 6, therefore by the frictional force between rotor and circular conical surface, two rotors 221,222 will be by stator 210
Drive and rotate, thus output shaft 230 exports rotating torque.Two rotors 221,222, which have, extends to the outer of stator 210
The part in portion, the part contact with guide rail 270 and drive guide rail 270 to move along a straight line by frictional force between the two.In Fig. 1
In, the direction of the linear motion is perpendicular to the direction of paper.In addition, the surface of guide rail 270 can also coat friction material, with
Increase the frictional force between rotor 221,222 and guide rail 270.
It should be noted that the present invention's must not necessarily use two rotors same without impact rectangular slab piezoelectric straight line micro machine
When work, only can also use a rotor, such as the first rotor 221, and correspondingly be used only in the metallic plate 10 of stator 210
First surface on four piezoelectric ceramics pieces 21,22,23 and 24 (do not arrange piezoelectric ceramics on the first surface of metallic plate 10
Piece).At this moment without impact rectangular slab piezoelectric straight line micro machine be also can be with normal work.
Preferred embodiment of the invention described in detail above.It should be appreciated that one of ordinary skill in the art without
Creative work can is needed to make many modifications and variations according to the design of the present invention.Therefore, the technology of all the art
Personnel are available by logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea
Technical scheme, all should be in the protection domain being defined in the patent claims.
Claims (4)
- It is 1. a kind of without impact rectangular slab piezoelectric straight line micro machine, including stator, rotor and guide rail, it is characterised in that the stator To have the rectangular substrate of at least two piezoelectric patches on surface, the rectangular substrate has the through hole around the rotor, described Piezoelectric patches is all adjacent to the through hole；For driving the pumping signal without impact rectangular slab piezoelectric straight line micro machine to be loaded in the rectangular substrate and institute Between stating the surface that piezoelectric patches does not connect with the rectangular substrate, the pumping signal includes the of phase by pi/2 to each other One pumping signal and the second pumping signal, the pumping signal loaded on adjacent two piezoelectric patches are different；The pumping signal makes the complex vibration of single order longitudinal vibration and second order bending vibration caused by stator make shape on the surface of the through hole Into traveling wave, the traveling wave makes the surface energy of the through hole be rotated by rotor described in frictional force drives；The substrate is metallic plate, including first surface and second surface, first surface of the through hole in the rectangular substrate At the center of second surface, on the first surface of the substrate include the first piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and 4th piezoelectric patches, and arrange successively to surround the through hole；First piezoelectric patches, the second piezoelectric patches, the 3rd piezoelectric patches and The polarised direction of four piezoelectric patches all parallel to the substrate first surface normal, first piezoelectric patches and the 3rd piezoelectric patches Polarised direction it is opposite with the polarised direction of second piezoelectric patches and the 4th piezoelectric patches；First piezoelectric patches, the second piezoelectricity The first surface of piece, the 3rd piezoelectric patches and the 4th piezoelectric patches connects with the first surface of the rectangular substrate, first piezoelectricity Piece, the second piezoelectric patches, the 3rd piezoelectric patches and the 4th piezoelectric patches second surface on there is first electrode, second electrode, the respectively Three electrodes and the 4th electrode；The rectangular substrate is grounded, and the first excitation letter is loaded in the first electrode and the 3rd electrode Number, load second pumping signal on the second electrode and the 4th electrode；First pumping signal is believed for sinusoidal excitation Number, second pumping signal is cosine pumping signal；It is the surface portion of the through hole circular conical surface, the normal of first surface of the circular conical surface along the substrate is to the base The first surface expansion of plate；The traveling wave enables the circular conical surface to be rotated by rotor described in frictional force drives；The surface of the through hole also includes the second circular conical surface, the normal of second surface of second circular conical surface along the substrate to The second surface expansion of the substrate；It is described also to include the second rotor, the output without impact rectangular slab piezoelectric straight line micro machine Axle is connected with second rotor；The traveling wave enables second circular conical surface to turn by the second rotor described in frictional force drives It is dynamic；The second surface of the rectangular substrate includes the 5th piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches, institute State the 5th piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches, and with first piezoelectric patches, the second piezoelectric patches, 3rd piezoelectric patches and the 4th piezoelectric patches correspond；5th piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectricity Piece has the opposite polarised direction of corresponding piezoelectric patches；5th piezoelectric patches, the 6th piezoelectric patches, the 7th piezoelectric patches and the 8th piezoelectric patches second surface on have the 5th respectively Electrode, the 6th electrode, the 7th electrode and the 8th electrode；The first excitation letter is loaded on 5th electrode and the 7th electrode Number, load second pumping signal on the 6th electrode and the 8th electrode；Hollow metal annulus is arranged with the through hole, the metal annulus is firmly fastened to the rectangular substrate； The surface of the metal annulus includes what is deployed along the normal of the first surface of the substrate to the first surface of the substrate 3rd circular conical surface and along the substrate second surface second surface from normal to the substrate deploy the 4th circular conical surface, institute State the 3rd circular conical surface to contact with the rotor, the 4th circular conical surface contacts with second rotor；The surface of the rotor contacts with the surface of the guide rail, when the rotor rotates by the surface of the rotor with it is described Frictional force between the surface of guide rail drives the guide rail to move along a straight line.
- 2. as claimed in claim 1 without impact rectangular slab piezoelectric straight line micro machine, wherein also including output shaft, the output shaft It is connected with the rotor and/or the second rotor to export rotating torque.
- 3. rubbed as claimed in claim 1 without impact rectangular slab piezoelectric straight line micro machine wherein having on the 3rd circular conical surface Material is wiped, the 3rd circular conical surface is contacted by the friction material with the rotor；And/orThere is friction material, the 4th circular conical surface passes through the friction material and second rotor on 4th circular conical surface Contact.
- 4. as claimed in claim 1 without impact rectangular slab piezoelectric straight line micro machine, wherein rotor and/or bitrochanteric surface It is upper that there is friction material；There is friction material on the surface of the guide rail.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510945457.4A CN105515440B (en) | 2015-12-15 | 2015-12-15 | Without impact rectangular slab piezoelectric straight line micro machine |
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| CN201510945457.4A CN105515440B (en) | 2015-12-15 | 2015-12-15 | Without impact rectangular slab piezoelectric straight line micro machine |
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| CN105515440A CN105515440A (en) | 2016-04-20 |
| CN105515440B true CN105515440B (en) | 2017-12-29 |
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|---|---|---|---|---|
| JP2002345270A (en) * | 2001-05-18 | 2002-11-29 | Fujitsu Ltd | Linear stage device |
| CN101707444A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | In-plane traveling wave rotary ultrasonic motor and control method |
| CN102497130B (en) * | 2011-12-20 | 2015-01-07 | 哈尔滨工业大学深圳研究生院 | Linear ultrasonic motor |
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2015
- 2015-12-15 CN CN201510945457.4A patent/CN105515440B/en active Active
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