CN105506572A - Metal plating layer thickness automatic control assembly - Google Patents
Metal plating layer thickness automatic control assembly Download PDFInfo
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- CN105506572A CN105506572A CN201410496647.8A CN201410496647A CN105506572A CN 105506572 A CN105506572 A CN 105506572A CN 201410496647 A CN201410496647 A CN 201410496647A CN 105506572 A CN105506572 A CN 105506572A
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- thickness
- coating
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- evaporation
- evaporation boat
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Abstract
The invention discloses a metal plating layer thickness automatic control assembly which includes an aluminum evaporating trough, a vacuum sealing end surface which is installed on and connected to one end of the aluminum evaporating trough and is matched with the end surface of the aluminum evaporating trough to form vacuum status, a fixed electrode which is fixedly disposed on an inner side of the vacuum sealing end surface and is arranged inside the aluminum evaporating trough, an evaporating boat arranged on the fixed electrode, and a movable electrode connected to the evaporating boat. The evaporating boat is provided with a plating layer thickness automatic controller which detects the thickness of a thin film plating layer on line and regulates the power of the evaporating boat. The metal plating layer thickness automatic control assembly can automatically set the plating layer thickness according to the demand of the plating film layer and carry out detection. When the thickness of the plating layer is disqualified, the power of the evaporating boat can be automatically adjusted, so that the thickness of the plating layer can be regulated to be uniform and then the thickness of the plating film layer is detected again until the thickness satisfies the demand. The assembly can ensure the thickness of the plating layer to be uniform.
Description
Technical field
The present invention relates to the technical field using vacuum coating technology in aluminum evaporation device, particularly relate to and a kind ofly automatically can detect thin film coating and regulable control evaporation boat power keeps the consistent metal layer thickness automatic control device of thickness of coating in aluminum evaporation device.
Background technology
At present, the aluminum evaporation device used in prior art comprises matrix, evaporation boat and two fixed electordes etc., wherein one end of evaporation boat is connected in matrix with a fixed electorde, and the other end is connected in matrix with another fixed electorde, and the two ends of evaporation boat are clamped by two fixed electordes.This kind of structure is in continuous use procedure, and due to the consumption of fixed electorde, the connection between evaporation boat two ends and fixed electorde can loosen gradually, causes the loose contact of evaporation boat and electrode, affects the normal use of aluminum evaporation device.For above-mentioned situation, prior art can solve the technological deficiency of above-mentioned aluminum evaporation device.But can the technology of on-line checkingi thin film coating thickness also not occur in aluminum evaporation device, more can not ensure the consistency of thickness of coating, therefore, the coating of the film of prior art is produced and be there will be the inconsistent situation of thickness of coating, reduce production efficiency and yield rate, and add production cost.
Summary of the invention
The object of the invention is the shortcoming in order to overcome above-mentioned prior art, a kind of metal layer thickness automatic control device is provided, this metal layer thickness automatic control device can automatically set thickness of coating according to the requirement of plated film coating and detect, when detecting thickness of coating and occurring defective, automatically the power of evaporation boat can be regulated to make its thickness of coating reach consistent and again detect till meeting the requirements, ensure the consistent of thickness of coating.
The technical solution adopted for the present invention to solve the technical problems is: a kind of metal layer thickness automatic control device, comprise aluminum evaporation groove, with aluminum evaporation groove one end install be connected and with its end face coordinate form vacuum state vacuum-sealing end face, to be fixed at inside vacuum-sealing end face and be placed in the fixed electorde in aluminum evaporation groove, mobile electrode that the evaporation boat be located on fixed electorde, evaporation boat are connected, described evaporation boat is provided with on-line checkingi thin film coating thickness and the thickness of coating two-position controller of adjustable evaporation boat power, described thickness of coating two-position controller is by start unit, be connected with start unit and set the thickness of coating setup unit of thin film coating thickness, be connected with thickness of coating setup unit and the online detection unit of on-line checkingi thickness of coating, be connected with on-line monitoring unit and receive the cycle operation actuator unit that online monitoring means detects qualifying signal, cycle operation actuator unit be connected to terminate stop element and thickness of coating setup unit and feedback signal to the cycle operation of thickness of coating setup unit, described online detection unit is also connected with reception online detection unit and sends defective signal and the evaporation boat power adjustment unit of adjustable evaporation boat power, and the circulation of evaporation boat power adjustment unit connects online detection unit and also passes on again detection signal to online detection unit.This evaporation boat and fixed electorde and mobile electrode are in clamped condition always, can ensure the good contact between evaporation boat and each electrode.And thickness of coating two-position controller can according to the thickness automatically setting metal plating, and this thickness of coating is detected whether meet the requirements, as met the requirements, qualified product can be formed, as undesirable, then adjustable evaporation boat power adjustment unit regulates the power of evaporation boat automatically, makes it be set as also again detecting unanimously to thickness of coating, till forming qualified product until meeting the requirements.
Further, on fixed electorde, horizontal array is provided with eight evaporation boats, and each evaporation boat connects a mobile electrode all separately.
In sum, metal layer thickness automatic control device of the present invention can automatically set thickness of coating according to the requirement of plated film coating and detect, when detecting thickness of coating and occurring defective, automatically the power of evaporation boat can be regulated to make its thickness of coating reach consistent and again detect till meeting the requirements, ensure the consistent of thickness of coating.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of metal layer thickness automatic control device of the present invention;
Fig. 2 is the structured flowchart of thickness of coating two-position controller of the present invention.
Embodiment
Embodiment 1
A kind of metal layer thickness automatic control device described by the present embodiment 1, as depicted in figs. 1 and 2, comprise aluminum evaporation groove 1, with aluminum evaporation groove one end install be connected and with its end face coordinate form vacuum state vacuum-sealing end face 5, to be fixed at inside vacuum-sealing end face and be placed in the fixed electorde 3 in aluminum evaporation groove, mobile electrode 4 that the evaporation boat 2 be located on fixed electorde, evaporation boat are connected, described evaporation boat is provided with on-line checkingi thin film coating thickness and the thickness of coating two-position controller of adjustable evaporation boat power, described thickness of coating two-position controller is by start unit 6, be connected with start unit and set the thickness of coating setup unit 7 of thin film coating thickness, be connected with thickness of coating setup unit and the online detection unit 8 of on-line checkingi thickness of coating, be connected with on-line monitoring unit and receive the cycle operation actuator unit 9 that online monitoring means detects qualifying signal, cycle operation actuator unit be connected to terminate stop element 10 and thickness of coating setup unit and feedback signal to the cycle operation of thickness of coating setup unit, described online detection unit is also connected with reception online detection unit and sends defective signal and the evaporation boat power adjustment unit 11 of adjustable evaporation boat power, and the circulation of evaporation boat power adjustment unit connects online detection unit and also passes on again detection signal to online detection unit.This evaporation boat and fixed electorde and mobile electrode are in clamped condition always, can ensure the good contact between evaporation boat and each electrode.And thickness of coating two-position controller can according to the thickness automatically setting metal plating, and this thickness of coating is detected whether meet the requirements, as met the requirements, qualified product can be formed, as undesirable, then adjustable evaporation boat power adjustment unit regulates the power of evaporation boat automatically, makes it be set as also again detecting unanimously to thickness of coating, till forming qualified product until meeting the requirements.
On fixed electorde, horizontal array is provided with eight evaporation boats, and each evaporation boat connects a mobile electrode all separately.
The above is only preferred embodiment of the present invention, not does any pro forma restriction to structure of the present invention.Every above embodiment is done according to technical spirit of the present invention any simple modification, equivalent variations and modification, all still belong in the scope of technical scheme of the present invention.
Claims (2)
1. a metal layer thickness automatic control device, it is characterized in that, comprise aluminum evaporation groove, with aluminum evaporation groove one end install be connected and with its end face coordinate form vacuum state vacuum-sealing end face, to be fixed at inside vacuum-sealing end face and be placed in the fixed electorde in aluminum evaporation groove, mobile electrode that the evaporation boat be located on fixed electorde, evaporation boat are connected, described evaporation boat is provided with on-line checkingi thin film coating thickness and the thickness of coating two-position controller of adjustable evaporation boat power, described thickness of coating two-position controller is by start unit, be connected with start unit and set the thickness of coating setup unit of thin film coating thickness, be connected with thickness of coating setup unit and the online detection unit of on-line checkingi thickness of coating, be connected with on-line monitoring unit and receive the cycle operation actuator unit that online monitoring means detects qualifying signal, cycle operation actuator unit be connected to terminate stop element and thickness of coating setup unit and feedback signal to the cycle operation of thickness of coating setup unit, described online detection unit is also connected with reception online detection unit and sends defective signal and the evaporation boat power adjustment unit of adjustable evaporation boat power, and the circulation of evaporation boat power adjustment unit connects online detection unit and also passes on again detection signal to online detection unit.
2. a kind of metal layer thickness automatic control device according to claim 1, is characterized in that, on fixed electorde, horizontal array is provided with eight evaporation boats, and each evaporation boat connects a mobile electrode all separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410496647.8A CN105506572A (en) | 2014-09-25 | 2014-09-25 | Metal plating layer thickness automatic control assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410496647.8A CN105506572A (en) | 2014-09-25 | 2014-09-25 | Metal plating layer thickness automatic control assembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105506572A true CN105506572A (en) | 2016-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410496647.8A Pending CN105506572A (en) | 2014-09-25 | 2014-09-25 | Metal plating layer thickness automatic control assembly |
Country Status (1)
| Country | Link |
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| CN (1) | CN105506572A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105908129A (en) * | 2016-06-27 | 2016-08-31 | 京东方科技集团股份有限公司 | Organic material evaporation equipment and method |
-
2014
- 2014-09-25 CN CN201410496647.8A patent/CN105506572A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105908129A (en) * | 2016-06-27 | 2016-08-31 | 京东方科技集团股份有限公司 | Organic material evaporation equipment and method |
| CN105908129B (en) * | 2016-06-27 | 2019-08-27 | 京东方科技集团股份有限公司 | A kind of organic material evaporated device and method |
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| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160420 |
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| WD01 | Invention patent application deemed withdrawn after publication |