CN105498373B - The monitoring method and its device of gas purifier service life - Google Patents
The monitoring method and its device of gas purifier service life Download PDFInfo
- Publication number
- CN105498373B CN105498373B CN201510829300.5A CN201510829300A CN105498373B CN 105498373 B CN105498373 B CN 105498373B CN 201510829300 A CN201510829300 A CN 201510829300A CN 105498373 B CN105498373 B CN 105498373B
- Authority
- CN
- China
- Prior art keywords
- purifier
- gas
- retort
- foil gauge
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
Abstract
The present invention is more particularly directed to a kind of monitoring method of gas purifier service life and its device.After gas obtains gas flow F through flow measurement, into purifier retort, gas after purification is flowed out by gas outlet, foil gauge measures tank body strain stress, temperature sensor measures purifier retort outer surface or internal temperature T, and pressure sensor measures outlet pressure P, gas flow F, tank body strain stress, temperature T and the incoming control units of pressure P, according to real time temperature T and pressure P to actual measurement tank body strain stress amendment, logarithmic strain ε is obtainedR, according to flow F and logarithmic strain εR, the life-span is monitored by control unit, and to life indicator output indication signal.The present invention can realize that purifier service life is monitored in real time with relatively low cost, not by or it is controllable influenceed by using conditions of work such as pressure and flows, and He, Ne, Ar, Kr, Xe, N can be generally applicable to2、H2Service life Deng gas purifier is monitored.
Description
Technical field
The invention belongs to gas purifier service life monitoring technical field, more particularly to a kind of gas purifier uses the longevity
The monitoring method and its device of life.
Background technology
High-purity gas is widely used in electronics industry, such as large scale integrated circuit, liquid crystal display, solar-electricity
In the manufacture of the production processes such as pond, LED, optical fiber, it is required for largely using high-purity gas.Under some application scenarios, to gas
Purity has in extremely harsh requirement, such as the MOCVD epitaxy growth course of LED, it is necessary to largely use H2And N2, and generally
The gas purity into before equipment is asked to reach more than 8N (99.999999%), i.e., impurity content is less than 10ppb (1ppb=10 in gas-9).In order to reach above-mentioned gas purity requirement, it usually needs use gas purifier.
Common gas purifier includes catalytic adsorption type gas purifier, alloy formulation gas purifier and the purifying of palladium film
Device.Wherein catalytic adsorption type purifier can not remove CH4, palladium film purifier is only used for H2Purifying, and use condition is harsh, into
This is high.Therefore in the state of the art, it is general using alloy-type purifying in order to obtain the ultra-pure gases that purity reaches 8N
Device.In international monopoly WO 99/19048, WO 99/19050 describes several alloy-type purifiers in WO 01/03812.Alloy
Type purifier is the characteristic only reacted using Ti, Zr isoreactivity metal and its alloy with foreign gas, in certain temperature and pressure bar
Under part, by unstripped gas by alloy bed body, the purpose of purification for gas is reached.Alloy-type purifier can be used for inert gas, such as He,
Ne, Ar, Kr and Xe purifying, it can also be used to N2And H2Purifying.
With the use of purifier, the reactivity of active metal or alloy bed body can be irreversible in alloy-type purifier
Reduction, when reactivity is reduced to below a certain critical value, i.e., purifier is reached after service life, and impurity contains in gas after purification
Amount will be raised significantly, so that the problems such as causing product defects.Therefore, it is necessary to monitor the use of purifier using corresponding technology
Life-span.A kind of method is to carry out online purity monitoring to gas after purification, typically using gas-chromatography or mass spectrum to pure
Impurity content after change in gas is monitored in real time, when gas purity impurity is higher than critical value, shows that purifier has failed, so
And this method needs and its equipment of costliness, and need the equipment operator with professional skill.United States Patent (USP) US
5150604 describe a kind of monitoring method of gas purifier service life, and the gas pressure difference at the purified device two ends of convection current is entered
Row detection, when pressure differential is higher than a certain critical value, shows that purifier has failed.But under active usage conditions, there are many limits
System.Firstly, since pressure differential has very big relation, particularly gas pressure and flow with use condition, both changes can be straight
Connecing causes the change of purifier pressure at two ends difference, so as to have influence on the accuracy judged purifier service life, therefore, uses
During this method, typically all emphasize that purifier must be extremely restricted in rated for service, use condition.Secondly, full
Under the conditions of the drop requirements (under 0.6MPa, operating pressure conditions, pressure drop is generally below 0.05MPa) of foot in actual use,
Caused pressure differential is changed very little when gas purifier fails, generally within 0.001MPa, in the state of the art, it is difficult to
Accurate measurement.The monitoring method of another purifier service life is described in United States Patent (USP) US 5172066, in alloy bed body
A piece lead of middle embedment, by measuring the resistance between alloy bed body and purifier retort shell, when resistance faces higher than a certain
During dividing value, show that purifier has failed.This method is capable of the service life of Efficient Characterization purifier, but can be only applied to indifferent gas
The life-span monitoring of body purifier, applies in hydrogen purifier and there is fatal potential safety hazard, and superelevation pure hydrogen is electronics industry
In commonly use ultra-pure gases.
In view of the foregoing, it is desirable to provide a kind of monitoring method of effective alloy-type purifier service life, can
To be generally applicable to He, Ne, Ar, Kr, Xe, N2、H2Deng the monitoring of gas purifier service life.
The content of the invention
In view of the shortcomings of the prior art, the invention provides a kind of monitoring method of gas purifier service life, also providing
The device of this monitoring method of implementation.
A kind of monitoring device of gas purifier service life：Purifier retort 2 is provided with foreign gas import and pure
Change at the flowmeter 1 for being provided with gas vent, foreign gas import and being used for measuring gas flow F, purified gas outlet provided with use
In measurement pressure P pressure sensor 5, purifier retort 2, which is provided with, to be used to measure the outer surface of purifier retort 2 or inside
Temperature T temperature sensor 4 and the foil gauge 3 for measuring tank body strain stress；Flowmeter 1, pressure sensor 5, temperature sensor
4 and foil gauge 3 be connected to control unit 6, control unit 6 is collected and handles flow F, tank body strain stress, temperature T, pressure P signal,
Finally by service life signal output to life indicator 7；The inside of purifier retort 2 is equipped with alloy packing 2-2, and purifier is anti-
Answer and heater 8 is additionally provided with tank 2.
It is preferred that, alloy packing 2-2 bottoms are provided with lower filter 2-1, and top is provided with upper filter 2-3, lower filter 2-1
Alloy packing 2-2 is compressed with upper filter 2-3；Lower filter 2-1 and upper filter 2-3 are fixed in purifier retort 2.
On the premise of stop alloy powder is met, lower filter 2-1 and upper filter 2-3 filtering accuracy should be as low as possible, i.e.,
Aperture value height is filtered, optimal filtering accuracy is 0.5~10 μm.
It is preferred that, foil gauge 3 is fixed on the outside of tank skin, the region between alloy packing 2-2 upper and lower ends.
It is further preferred that foil gauge 3 is fixed on the outside of tank skin, and positioned at more than alloy packing 2-2 lower ends 0~2.5cm
Region.
The foil gauge 3 uses resistance strain plate or optical strain gauge strips, and in the case where being normally applied occasion, preferred resistance-type should
Become piece, in strong electromagnetic, may occur blast or compared with high vibration loading condition, preferably optical strain gauge strips.
The life indicator 7 include but is not limited to it is following some：Indicate purifier effectively/failure, indicate purifier remain
Remaining service life Lr, or indicate the remaining use time t of purifierr。
Purify H2, He, Ne, Ar, Kr, Xe when, alloy packing 2-2 used be Zr-V-Fe or Ti-Zr-Mn-Cr-Ni, purifying
N2Shi Suoyong alloy packings 2-2 is Zr-Fe or Zr-Al.
The method that gas purifier service life is monitored using said apparatus, by monitoring tank body strain stress, and according to temperature
T and pressure P amendments obtain logarithmic strain εR, foreign gas critical adsorption capacity CcCorrespondence critical strain εc, the basis of control unit 6
εR- C curve, by logarithmic strain εRWith critical strain εcContrasted, judge whether purifier reaches the service life upper limit, and to
Life indicator 7 exports corresponding signal.
Or obtain logarithmic strain ε by monitoring tank body strain stress, and according to temperature T and pressure P amendmentsR, control unit 6
According to εR- C curve, reads εRCorresponding foreign gas adsorption capacity C, determines purifier remaining life Lr=(1-C/Cc)*
100%, and export corresponding signal to life indicator 7.
Or obtain logarithmic strain ε by monitoring tank body strain stress, and according to temperature T and pressure P amendmentsR, control unit 6
According to εR- C curve, reads εRCorresponding foreign gas adsorption capacity C, according to εR- C curve and εR- t curves determine crash time tc,
Control unit 6 calculates the remaining use time t of purifierr=tc- C/k, and export corresponding signal, wherein k to life indicator 7
For reaction coefficient, equal to the slope of C/t under gas flow F.
Beneficial effects of the present invention are：The invention provides a kind of monitoring method of gas purifier service life and its dress
Put, can realize that purifier service life is monitored in real time with relatively low cost, not by or it is controllable by using pressure and flow etc.
The influence of condition of work, and He, Ne, Ar, Kr, Xe, N can be generally applicable to2、H2Service life Deng gas purifier is monitored；
Monitoring process is simple, safety.
Brief description of the drawings
Fig. 1 is a kind of gas purifier service life monitoring device schematic diagram of the invention；
Fig. 2 is purifier retort structural representation in a kind of gas purifier service life monitoring device of the invention；
Fig. 3 is the exemplary impurity gas absorption amount obtained using Fig. 1 shown devices with tank body strain variation curve；
Fig. 4 is bent with reaction time change using foreign gas content in the typical purified gases of Fig. 1 shown devices acquisition
Line；
Fig. 5 is the typical tank body strain obtained using Fig. 1 shown devices with reaction time change curve；
Fig. 6 be embodiment 1 described under the conditions of actual measurement tank body strain with reaction time change curve；
Fig. 7 be embodiment 1 described under the conditions of actual measurement purified gases in foreign gas content with reaction time change curve.
Label declaration：Filtered on filter under 1- flowmeters, 2- purifier retort, 2-1-, 2-2- alloy packings, 2-3-
Plate, 3- foil gauges, 4- temperature sensors, 5- pressure sensors, 6- control units, 7- life indicators, 8- heaters.
Embodiment
The present invention will be further described with reference to the accompanying drawings and detailed description, but should not be taken to limit the present invention.
As shown in Fig. 2 lower filter 2-1 is fixed in purifier retort 2 first, alloy packing 2-2 is then charged into,
Alloy packing 2-2 is compressed plus upper filter 2-3, and is fixed in purifier retort 2.Upper filter 2-3 and lower filtering
The materials such as plate 2-1 sheet material can use but be not limited to stainless steel, copper, nickel, recommend to use and tank skin identical material；Fixed form
Can be using welding or other modes.It should be noted that alloy packing 2-2 is pressed by upper filter 2-3 and lower filter 2-1
It is tight it is not necessary to step, but alloy packing 2-2 is compressed to the accuracy for being favorably improved strain testing.Foil gauge 3 is closely pasted
On the outside of tank skin, foil gauge 3 is preferably affixed on to the region for having filler between upper filter 2-3 and lower filter 2-1, optimal position
Put is in 0~2.5cm of lower more than filter 2-1 region.
As shown in figure 1, gas is after air inlet enters, measured via flowmeter 1 after gas flow F, it is anti-into purifier
Tank 2 is answered, gas after purification is flowed out by gas outlet, foil gauge 3 measures tank body strain stress, temperature sensor 4 measures purifier reaction
The outer surface of tank 2 or internal temperature T, pressure sensor 5 measure the outlet pressure P of purifier retort 2.Gas flow F, tank body strain
ε, temperature T and the incoming control unit 6 of pressure P signal, according to real time temperature T and pressure P, to actual measurement tank body strain stress amendment, are obtained
Logarithmic strain εR.According to flow F and logarithmic strain εR, service life signal is provided by control unit 6, it is defeated to life indicator 7
Go out.Life-span signal can for specific numerical signal, analog signal or indicate purifier effectively/failure switching signal.
Ti, Zr isoreactivity metal and its alloy generate corresponding oxide, nitride, carbonization after being reacted with foreign gas
Thing, hydride etc., can cause alloy packing 2-2 volume to occur notable expansion, when alloy packing 2-2 is in closed container
When, the expansion of its volume can cause compression to chamber wall, so as to cause strain.On the one hand, with reaction time t increase,
Alloy packing 2-2 cubical expansivities are higher, and tank body strain stress is bigger.On the other hand, with reaction time t increase, alloy packing
2-2 foreign gas adsorption capacities C increases, reactivity reduction, service life is reduced.Tank body strain stress changes and alloy packing 2-2
Foreign gas adsorption capacity C has significant regularity, and this rule is influenceed very by the flow F changes under use condition
It is small, between alloy packing 2-2 foreign gas adsorption capacity C and tank body strain stress relation only with alloying component, granularity, uniformity with
And the inherent characteristic such as tank body material is related.Typical tank body strain stress-foreign gas adsorption capacity C curve is as shown in Figure 3.
Impurity content is as shown in Figure 4 with reaction time t change curve in typical purified gases.T is less than between when reacted
Critical value tcWhen, foreign gas content is consistently lower than the test limit of equipment in purified gas, but when reacted between t reach critical value tc
Afterwards, foreign gas content is raised rapidly in purified gas, is unsatisfactory for condition of work, purifier failure.Typical tank body strain stress is with anti-
T change curves are as shown in Figure 5 between seasonable.In section of whole reaction time, tank body strain stress is exponentially increased with reaction time t.When
Reaction time t reaches critical value tcWhen, foreign gas content is raised rapidly in purified gas, and now corresponding tank body strain stress is faces
Boundary's strain stressc。
By Fig. 3-5, the relation between tank body strain stress and service life can be obtained.Remember foreign gas adsorption capacity C with
Relation between tank body strain stress is C=f (ε).When purifier fails, crash time tcCorresponding tank body strain stress and impurity gas
Body adsorption capacity C is respectively critical strain εcWith critical adsorption capacity Cc, wherein Cc=f (εc).Purifier remaining life Lr
It can be represented with adsorbance percentage：Lr=1-C/Cc=1-f (ε)/f (εc), when tank body strain stress exceedes critical strain εcWhen, Lr<0,
Represent purifier failure.Under fixed working flow F, purifier service life also can carry out table directly perceived with remaining use time
Show.T between when reacted<tcWhen, foreign gas adsorption capacity C is reaction time t linear function, is denoted as C=kt, and wherein k is
Reaction coefficient, then t=C/k, remaining use time tr=tc- C/k=tc-f(ε)/k。
Embodiment 1
The present embodiment is used for the monitoring method and its device for illustrating gas purifier service life of the present invention.Purifier
Retort 2 diameter 1.5mm, length 10cm, the purifying alloy packing 2-2 of loading use institute in Chinese patent CN 103898389A
Ti17Zr16Mn40Cr13.5Ni13.5 purified materials are stated, powder granularity is -100 mesh, and useful load is 50g.Gas purifier makes
With the structure of the monitoring device in life-span and its purifier retort 2 as shown in Figure 1-2, strain measurement uses resistance strain plate.
The operating pressure of purifier retort 2 is 0.5MPa, and operating temperature is 200 DEG C, gas flow 300sccm.Using containing
5000ppm O2Hydrogen as unstripped gas, gas purity analysis is carried out using the type DID gas-chromatographies of GOW-MAC companies 592, it is miscellaneous
The detection of matter gas is limited to 10ppb.The critical strain ε of purifier retort 2cFor 119.2 × 10-6。
Fig. 6 is the tank body logarithmic strain ε that purifier retort 2 described in embodiment 1 is surveyed under operating modeR- reaction time t is bent
Line.It can be seen that between when reacted during t ＜ 2.2h, tank body logarithmic strain εR＜ 119.2 × 10-6, control unit 6 is by signal
Transmit to life indicator 7, life indicator 7 indicates that purifier is effective；Between when reacted during t ＞ 2.2h, tank body logarithmic strain
εR＞ 119.2 × 10-6, control unit 6 transmits a signal to life indicator 7, and life indicator 7 indicates that purifier is invalid.Fig. 7
It is purified gas foreign gas content-reaction time t curve that purifier retort 2 described in embodiment 1 is surveyed under operating mode.From figure
In understand, as t ＜ tcDuring=2.4h, the purified gas foreign gas content of purifier retort 2 ＜ 10ppb all the time；Work as t=tc=
During 2.4h, purified gas impurity content ＞ 10ppb, now corresponding critical strain εc=125.7 × 10-6。
Claims (21)
1. a kind of monitoring method of gas purifier service life, purifier retort (2) is provided with foreign gas import and pure
Change and be provided with the flowmeter (1) for being provided with gas vent, foreign gas import and being used for measuring gas flow F, purified gas outlet
Pressure sensor (5) for measuring pressure P, purifier retort (2), which is provided with, to be used to measure purifier retort (2) appearance
Face or internal temperature T temperature sensor (4) and the foil gauge (3) for measuring tank body strain stress；Flowmeter (1), pressure sensing
Device (5), temperature sensor (4) and foil gauge (3) are connected to control unit (6), and control unit (6) is collected and processing gas flow
F, tank body strain stress, temperature T, pressure P signal, finally by service life signal output to life indicator (7)；Purifier reacts
It is equipped with inside tank (2) in alloy packing (2-2), purifier retort (2) and is additionally provided with heater (8)；Characterized in that, passing through
Tank body strain stress is monitored, and logarithmic strain ε is obtained according to temperature T and pressure P amendmentsR, foreign gas critical adsorption capacity CcCorrespondence
Critical strain εc, control unit (6) is according to εR- C curve, by logarithmic strain εRWith critical strain εcContrasted, judge purifier
The service life upper limit whether is reached, and corresponding signal is exported to life indicator (7).
2. according to the method described in claim 1, it is characterised in that alloy packing (2-2) bottom is provided with lower filter (2-1),
Top is provided with upper filter (2-3), and lower filter (2-1) and upper filter (2-3) compress alloy packing (2-2)；Lower filtering
Plate (2-1) and upper filter (2-3) are fixed in purifier retort (2).
3. according to the method described in claim 1, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and positioned at conjunction
Region between golden filler (2-2) upper and lower ends.
4. method according to claim 3, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and positioned at conjunction
More than golden filler (2-2) lower end 0~2.5cm region.
5. according to the method described in claim 1, it is characterised in that the foil gauge (3) uses resistance strain plate or optics
Foil gauge.
6. according to the method described in claim 1, it is characterised in that the life indicator (7) can indicate purifier effectively/
Failure, indicates purifier remaining life Lr, or indicate the remaining use time t of purifierr。
7. according to the method described in claim 1, it is characterised in that purifying H2, He, Ne, Ar, Kr, Xe when, alloy packing used
(2-2) is Zr-V-Fe or Ti-Zr-Mn-Cr-Ni, purifies N2Shi Suoyong alloy packings (2-2) are Zr-Fe or Zr-Al.
8. a kind of monitoring method of gas purifier service life, purifier retort (2) is provided with foreign gas import and pure
Change and be provided with the flowmeter (1) for being provided with gas vent, foreign gas import and being used for measuring gas flow F, purified gas outlet
Pressure sensor (5) for measuring pressure P, purifier retort (2), which is provided with, to be used to measure purifier retort (2) appearance
Face or internal temperature T temperature sensor (4) and the foil gauge (3) for measuring tank body strain stress；Flowmeter (1), pressure sensing
Device (5), temperature sensor (4) and foil gauge (3) are connected to control unit (6), and control unit (6) is collected and processing gas flow
F, tank body strain stress, temperature T, pressure P signal, finally by service life signal output to life indicator (7)；Purifier reacts
It is equipped with inside tank (2) in alloy packing (2-2), purifier retort (2) and is additionally provided with heater (8)；Characterized in that, passing through
Tank body strain stress is monitored, and logarithmic strain ε is obtained according to temperature T and pressure P amendmentsR, control unit (6) is according to εR- C curve, reads
Go out εRCorresponding foreign gas adsorption capacity C, determines purifier remaining life Lr=(1-C/Cc) * 100%, and to the life-span
Indicator (7) exports corresponding signal, wherein, Cc=f (εc), CcFor critical adsorption capacity, i.e., the crash time when purifier fails
tcCorresponding foreign gas adsorption capacity C, εcFor critical strain, i.e., when purifier fails, crash time tcCorresponding tank body should
Become ε.
9. method according to claim 8, it is characterised in that alloy packing (2-2) bottom is provided with lower filter (2-1),
Top is provided with upper filter (2-3), and lower filter (2-1) and upper filter (2-3) compress alloy packing (2-2)；Lower filtering
Plate (2-1) and upper filter (2-3) are fixed in purifier retort (2).
10. method according to claim 8, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and is located at
Region between alloy packing (2-2) upper and lower ends.
11. method according to claim 10, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and is located at
More than alloy packing (2-2) lower end 0~2.5cm region.
12. method according to claim 8, it is characterised in that the foil gauge (3) uses resistance strain plate or optics
Foil gauge.
13. method according to claim 8, it is characterised in that the life indicator (7) can indicate that purifier has
Effect/failure, indicates purifier remaining life Lr, or indicate the remaining use time t of purifierr。
14. method according to claim 8, it is characterised in that purifying H2, He, Ne, Ar, Kr, Xe when, alloy packing used
(2-2) is Zr-V-Fe or Ti-Zr-Mn-Cr-Ni, purifies N2Shi Suoyong alloy packings (2-2) are Zr-Fe or Zr-Al.
15. a kind of monitoring method of gas purifier service life, purifier retort (2) is provided with foreign gas import and pure
Change and be provided with the flowmeter (1) for being provided with gas vent, foreign gas import and being used for measuring gas flow F, purified gas outlet
Pressure sensor (5) for measuring pressure P, purifier retort (2), which is provided with, to be used to measure purifier retort (2) appearance
Face or internal temperature T temperature sensor (4) and the foil gauge (3) for measuring tank body strain stress；Flowmeter (1), pressure sensing
Device (5), temperature sensor (4) and foil gauge (3) are connected to control unit (6), and control unit (6) is collected and processing gas flow
F, tank body strain stress, temperature T, pressure P signal, finally by service life signal output to life indicator (7)；Purifier reacts
It is equipped with inside tank (2) in alloy packing (2-2), purifier retort (2) and is additionally provided with heater (8)；Characterized in that, passing through
Tank body strain stress is monitored, and logarithmic strain ε is obtained according to temperature T and pressure P amendmentsR, control unit (6) is according to εR- C curve, reads
Go out εRCorresponding foreign gas adsorption capacity C, according to εR- C curve and εR- t curves determine crash time tc, control unit (6) meter
Calculate the remaining use time t of purifierr=tc- C/k, and corresponding signal is exported to life indicator (7), wherein k is reaction system
Number, equal to the slope of C/t under gas flow F.
16. method according to claim 15, it is characterised in that alloy packing (2-2) bottom is provided with lower filter (2-
1), top is provided with upper filter (2-3), and lower filter (2-1) and upper filter (2-3) compress alloy packing (2-2)；Lower mistake
Filter plate (2-1) and upper filter (2-3) are fixed in purifier retort (2).
17. method according to claim 15, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and is located at
Region between alloy packing (2-2) upper and lower ends.
18. method according to claim 17, it is characterised in that the foil gauge (3) is fixed on the outside of tank skin, and is located at
More than alloy packing (2-2) lower end 0~2.5cm region.
19. method according to claim 15, it is characterised in that the foil gauge (3) uses resistance strain plate or light
Learn foil gauge.
20. method according to claim 15, it is characterised in that the life indicator (7) can indicate that purifier has
Effect/failure, indicates purifier remaining life Lr, or indicate the remaining use time t of purifierr。
21. method according to claim 15, it is characterised in that purifying H2, He, Ne, Ar, Kr, Xe when, alloy used is filled out
It is Zr-V-Fe or Ti-Zr-Mn-Cr-Ni to expect (2-2), purifies N2Shi Suoyong alloy packings (2-2) are Zr-Fe or Zr-Al.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510829300.5A CN105498373B (en) | 2015-11-25 | 2015-11-25 | The monitoring method and its device of gas purifier service life |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510829300.5A CN105498373B (en) | 2015-11-25 | 2015-11-25 | The monitoring method and its device of gas purifier service life |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105498373A CN105498373A (en) | 2016-04-20 |
| CN105498373B true CN105498373B (en) | 2017-09-19 |
Family
ID=55706906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510829300.5A Active CN105498373B (en) | 2015-11-25 | 2015-11-25 | The monitoring method and its device of gas purifier service life |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105498373B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108211542A (en) * | 2018-02-11 | 2018-06-29 | 浙江博瑞电子科技有限公司 | A kind of novel separated type gas purifier |
| CN110302630A (en) * | 2019-07-18 | 2019-10-08 | 大连中鼎化学有限公司 | A kind of purification devices and its technique for purified gases preparation hyperpure gas |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1237944B (en) * | 1990-01-05 | 1993-06-19 | Getters Spa | METHOD FOR DETERMINING THE END OF THE USEFUL LIFE OF AN INERT GAS PURIFIER AND RELATED EQUIPMENT |
| IT1239900B (en) * | 1990-03-30 | 1993-11-23 | Getters Spa | METHOD FOR DETERMINING THE END OF THE USEFUL LIFE OF A GAS PURIFIER AND RELATED EQUIPMENT |
| US6068685A (en) * | 1997-10-15 | 2000-05-30 | Saes Pure Gas, Inc. | Semiconductor manufacturing system with getter safety device |
| CN101216164B (en) * | 2007-12-29 | 2010-11-10 | 西安交通大学 | Water-cooled wall on-line safe evaluation method |
| CN101476715A (en) * | 2009-01-20 | 2009-07-08 | 西安交通大学 | Early warning method for failure of water-cooling wall of power boiler |
| ITCO20110032A1 (en) * | 2011-07-28 | 2013-01-29 | Nuovo Pignone Spa | DEVICE AND METHOD OF OPTIMIZATION AND DETERMINATION OF THE LIFE OF A GAS TURBINE |
| CN104457828A (en) * | 2013-09-13 | 2015-03-25 | 刘昊旻 | Sensor-contained system model for state monitoring and fault diagnosis of hydraulic system |
| CN104951663B (en) * | 2015-07-16 | 2018-03-30 | 江苏大唐国际吕四港发电有限责任公司 | A kind of ultra-supercritical boiler high temperature superheater residual life on-line calculation method |
-
2015
- 2015-11-25 CN CN201510829300.5A patent/CN105498373B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105498373A (en) | 2016-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6494343B2 (en) | Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly | |
| CN1242257C (en) | Method and appts. for determining amount of hydrogen in vessel | |
| CN105498373B (en) | The monitoring method and its device of gas purifier service life | |
| CN101762435B (en) | Wide temperature zone hydrogen storage material low temperature hydrogen storage performance testing device | |
| CN102028990A (en) | Transfusion monitoring method | |
| CN103111000B (en) | Infusion alarming device based on cantilever beam force sensor and method thereof | |
| EP0438036A2 (en) | Method for determining the end of useful life of an inert gas purifier and apparatus therefor | |
| Elwell et al. | Molar Volume, Coefficient of Thermal Expansion, and Related Properties of Liquid He 4 under Pressure | |
| Hickman | Diffusion and permeation of deuterium in palladium-silver at high temperature and pressure | |
| CN107478764B (en) | Hydrocarbon steam conversion catalyst activity evaluation device and test method and application thereof | |
| CN102928463A (en) | Concentration measuring system of hydrogen in containment vessel | |
| US3258896A (en) | Determination of impurities in pure gases, preferably hydrogen | |
| CN101793658B (en) | Palladium/carbon catalyst hydrogenation activity evaluating method and device | |
| CN106770396B (en) | Method for measuring hydrogen storage material hydrogen discharge reaction thermodynamic parameter | |
| WO2015112009A1 (en) | Flow measurement system and method for determining at least one property of a medium | |
| CN207275071U (en) | The packaging facilities of refining metallic powder | |
| US20200256756A1 (en) | Method and system for detecting a leak in a fluid system | |
| CN112666042A (en) | Novel experiment device for detecting performance of adsorbent | |
| CN112666041A (en) | Novel experimental method for detecting performance of adsorbent | |
| CN207163629U (en) | A kind of high stainless steel pressure table of security performance | |
| CN216747241U (en) | Gas adsorption performance testing device capable of heating uniformly | |
| Flanagan | Thermodynamics of metal-gas reactions | |
| CN210347386U (en) | Oil-water mixing detection device based on pressure difference | |
| CN208366521U (en) | The measuring device of air pressure in a kind of oil conservater | |
| CN213516136U (en) | Pressure ball with test pressure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190828 Address after: 101407 Beijing city Huairou District Yanqi Economic Development Zone Branch Hing Street No. 11 Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Patentee before: General Research Institute for Nonferrous Metals |
|
| TR01 | Transfer of patent right |