CN105486652A - Photonic-crystal-based controllable non-dispersive infrared gas sensor - Google Patents
Photonic-crystal-based controllable non-dispersive infrared gas sensor Download PDFInfo
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- CN105486652A CN105486652A CN201510690073.2A CN201510690073A CN105486652A CN 105486652 A CN105486652 A CN 105486652A CN 201510690073 A CN201510690073 A CN 201510690073A CN 105486652 A CN105486652 A CN 105486652A
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- 239000004038 photonic crystal Substances 0.000 title claims abstract description 73
- 238000010521 absorption reaction Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 238000001514 detection method Methods 0.000 abstract description 14
- 238000001228 spectrum Methods 0.000 abstract description 14
- 238000002329 infrared spectrum Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 abstract 8
- 239000010410 layer Substances 0.000 description 49
- 239000000758 substrate Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000008859 change Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 208000030208 low-grade fever Diseases 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000862 absorption spectrum Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a photonic-crystal-based controllable non-dispersive infrared gas sensor, and the sensor is suitable in the field of gas detection, and comprises an infrared light source, a controllable infrared detector based on photonic crystal, a light-channel gas absorption chamber and two optical filters. The two optical filters are respectively at two ends of the light-channel gas absorption chamber, the infrared light source and the controllable infrared detector based on photonic crystal are respectively fixedly disposed at two ends in the gas sensor, and the two optical filters, the self-selected-frequency infrared light source emission surface and the infrared detector reception surface are mutually parallel, and are perpendicular to the central axis of the light-channel gas absorption chamber. By adjusting the loading voltage of electrodes of two layers of the photonic crystal, the length of Fabry-Perot interference chamber composed by the two layers of photonic crystal is changed, so that permeated infrared light center wave length is corresponding to the infrared spectrum absorption center wave lengths of different gases, an optical signal is changed into an electric signal by the wide-spectrum infrared absorption layer, and controllable detection on different gases is realized.
Description
Technical field
The present invention designs field of gas detection, is a kind of non-dispersive infrared gas sensor that can carry out controlled detection to gas with various.
Background technology
Non-dispersive infrared gas sensor is a kind of infrared spectrum selectivity characteristic based on gas with various molecule, utilizes gas concentration and absorption intensity relation differentiate gas componant and determine the gas sensing device of its concentration.As one gas analysis technology fast and accurately, it with other classification gas sensors as compared with electric chemical formula, catalytic combustion type, semiconductor-type, have be widely used, long service life, highly sensitive, good stability, be applicable to that gas is many, cost performance is high, maintenance cost is low, can the series of advantages such as on-line analysis.It is widely used in the field such as petrochemical complex, metallurgical industry, industrial and mineral exploitation, atmospheric pollution detection, agricultural, health care, for gas concentration high-acruracy survey, as gas and inflammable gas detection, vehicle emission component detection, gas composition analysis, medical monitoring device, pollutant monitoring etc.
General non-dispersive infrared gas sensor is that the continuous spectrum launched from light source is all by the gas blanket containing tested gas and vapor permeation component of fixed thickness, because the concentration of tested gas is different, absorb fixing ultrared energy just different, the energy of thus loss is just different.Calculate the energy of infrared light after finite concentration gas, after filtration after mating plate, the infra-red heat electric explorer of special construction converts the energy into as voltage signal, and then measures energy parameter and temperature parameter to complete the quantitative test to gas.
Infrared light, as electromagnetic one, also has the character such as reflection, refraction, interference, scattering and absorption.When transmitting in media as well, infrared light is due to the scattering of medium and absorption, and its energy is decayed.The light of usual characteristic frequency nonmonochromatic light, but there is the light composition of certain frequency bandwidth, the light in bandwidth range is also different by degree of absorption, calculates infrared light through absorbed energy during gas, demand fulfillment Lambert-Beer theorem,
A＝lg(P
0/P)＝e
-γbc
In formula, A is absorbance, P
0for incident light energy, P is transmitted light energy, and γ is tested gas absorption constant, and b is measured object thickness, and c is measured object concentration.
In recent years, small or the minimum MEMS (micro electro mechanical system) (MicroElectro-MechanicalSystems for feature of operational size with geomery, MEMS), become the new and high technology that people understand and change the objective world at microscopic fields, the material made with it, microelectronics, Micromechanical Optics device, power electronic devices, vacuum microelectronic device all have broad application prospects in Aeronautics and Astronautics, automobile, biomedicine, environmental monitoring, military affairs and nearly all field.Utilize MEMS technology to prepare high performance infrared eye device size and preparation cost are reduced all greatly.
The present invention adopts unique controlled infrared gas detector based on photonic crystal, the chamber being changed the Fabry-Perot interference chamber be made up of two-layer photonic crystal by MEMS technology is long, thus the infrared light centre wavelength controlled through Fabry-Perot interferometer, make it corresponding with tested gas infrared absorption spectrum centre wavelength, reach the controlled detection to gas with various.
Summary of the invention
The infrared detection module that the present invention adopts is the controlled infrared gas detector based on photonic crystal, the chamber in the Fabry-Perot interference chamber formed by regulating the two-layer photonic crystal controlled by MEMS is long, realize the filter action to the infrared light of specific centre wavelength, reach the object of the controlled detection to gas with various.
For achieving the above object, the invention provides following technical scheme:
Controlled non-dispersive infrared gas sensor based on photonic crystal of the present invention, comprises a controlled infrared eye based on photonic crystal, an infrared light supply, two panels anti-dazzling screen and shell.
Controlled infrared eye based on photonic crystal of the present invention, comprises substrate, separation layer, two-layer layer of photonic crystals, N-shaped doped silicon, p-type doped silicon, electrode, and wide spectrum infrared absorption layer forms.
Further, the substrate of the controlled infrared eye based on photonic crystal of the present invention, in order to make infrared light to be measured pass through, is hollowed out in the middle part of substrate; The two-layer layer of photonic crystals of the controlled infrared eye based on photonic crystal of the present invention, is parallel to each other, and mechanics Fabry-Perot interference chamber, allows the light by specific wavelength; The wide spectrum infrared absorption layer of the controlled infrared eye based on photonic crystal of the present invention, to infrared Absorption, converts electric signal to and exports, obtain required detection data by light signal; The electrode of the controlled infrared eye based on photonic crystal of the present invention, for control and the sense data of infrared eye.
Infrared light supply of the present invention, comprises substrate, 2 electrodes, thermal source coil, cavitys.Electrode and thermal source coil are attached on substrate, by two electrode on-load voltages, thermal source coil temperature is raised, sends wide spectrum infrared light.Cavity on thermal source coil lower substrates layer is used for dispelling the heat to thermal source coil, prevents infrared light supply temperature too high.
Shell of the present invention is a tube structure, is made up of a kind of metal material, comprises an optical channel air absorbing cavity and two pedestals.Have employed metal polish process inside shell, reduce the roughness of inner surface.
Two pedestals of the present invention, size and shape is the same, is positioned at sensor two ends of the present invention, is used for fixing the controlled infrared eye based on photonic crystal and infrared light supply respectively.
Optical channel air absorbing cavity of the present invention, upper and lower two ends respectively have an air hole symmetrically, respectively as gas access and gas vent.
Anti-dazzling screen of the present invention, is positioned at optical channel air absorbing cavity rear and front end, its objective is visible light, only allows infrared light to pass through, makes to only have infrared light to transmit in optical channel air absorbing cavity.
Carry out bonding by the O-ring seal of elastomeric material between anti-dazzling screen of the present invention and pedestal to fix.
The light-emitting area of infrared light supply of the present invention and the receiving plane of infrared eye oppose mutually, and with the central axis upright of optical channel air absorbing cavity.
Accompanying drawing explanation
Fig. 1 is the cross-sectional view of the controlled non-dispersive infrared gas sensor based on photonic crystal
Fig. 2 is infrared light supply structural representation
Fig. 3 is the base infrastructure schematic diagram of the controlled infrared eye based on photonic crystal
Fig. 4 is the interlayer structure schematic diagram of the controlled infrared eye based on photonic crystal
Fig. 5 is the top level structure schematic diagram of the controlled infrared eye based on photonic crystal
Embodiment
The invention provides a kind of controlled non-dispersive infrared gas sensor based on photonic crystal, adopt the controlled infrared eye based on photonic crystal, the chamber being changed the Fabry-Perot interference chamber be made up of two-layer photonic crystal by MEMS technology is long, thus the infrared light centre wavelength controlled through Fabry-Perot interferometer, make it corresponding with tested gas infrared absorption spectrum centre wavelength, reach the controlled detection to gas with various.
Based on a controlled non-dispersive infrared gas sensor for photonic crystal, the shell having a kind of metal material to make, comprises pedestal 1, pedestal 2, optical channel gas absorption chamber enclosure 5; Anti-dazzling screen 6, anti-dazzling screen 7, lay respectively at the two ends of air absorbing cavity 5; O-ring seal 4, O-ring seal 8 be used for respectively bonding pedestal 1, anti-dazzling screen 6 and pedestal 2, anti-dazzling screen 8; Optical channel gas absorption chamber enclosure about 5 two ends have gas access 9 and gas vent 10 respectively, to ensure in air absorbing cavity 3 all the time containing gas to be measured; Infrared light supply 11 is fixed on pedestal 1, controlled infrared eye 12 based on photonic crystal is fixing on the base 2, and the surface of emission of infrared light supply 11 and have a central vertical line based on the receiving plane of the controlled infrared eye 12 of photonic crystal, as shown in Figure 1.
Infrared light supply of the present invention, as shown in Figure 2, comprises substrate 15, electrode 13, electrode 14, low-grade fever coil 16, cavity 17.Low-grade fever coil 16 two ends are connected with electrode 14 with electrode 13 respectively.To electrode 13 and electrode 14 on-load voltage, low-grade fever coil 16 temperature is raised, produce wide spectrum infrared light.Cavity 17 is the cavitys in substrate 15, makes low-grade fever coil unsettled with in substrate 15, avoids that substrate 15 is subject to the impact of low-grade fever coil 16 and temperature raises.
Controlled infrared eye based on photonic crystal of the present invention, forms by three layers, comprises basalis, middle layer, top layer, respectively as shown in Fig. 3, Fig. 4, Fig. 5.
Further, the basalis of the controlled infrared eye based on photonic crystal of the present invention, as shown in Figure 3, comprises substrate 18, separation layer 19, square hole 20.
Further, the middle layer of the controlled infrared eye based on photonic crystal of the present invention, as shown in Figure 4, comprise layer of photonic crystals 21, metal electrode 22,23,24,25,26,27,28,29,30,31,32,33,34,35,36,37,38,39,40,41,42, N-shaped doped silicon 43.Wherein electrode 23,27,30,33 is connected with layer of photonic crystals 21 by the N-shaped doped silicon identical with 43; Electrode 22,24,26,28,29,31,32,34 is connected with electrode 41,42,35,36,37,39,38,40 respectively by the N-shaped doped silicon identical with 43; Electrode 25, as input electrode, is connected by metal medium with electrode 23,27,30,33.
Further, the top layer of the controlled infrared eye based on photonic crystal of the present invention, as shown in Figure 5, comprise layer of photonic crystals 44, wide spectrum infrared absorption layer 45, electrode 46,47,48,49,50,51,52,53,54,55,56,57,59,60,61,62, p-type doped silicon 58.Wherein electrode 47,50,53,56 is connected with layer of photonic crystals 44 by the p-type doped silicon identical with 58; 8 electrodes identical with electrode 59 contact with wide spectrum infrared absorption layer 45, and these 8 electrodes are connected with electrode 46,48,49,51,52,54,55,57 respectively by the p-type doped silicon identical with 58; Electrode 61, as reading electrode, is connected with electrode 49; Electrode 62, as input electrode, is connected with electrode 57,50,53,56 by metal medium.
Further, the middle layer of the controlled infrared eye based on photonic crystal shown in Fig. 4 is placed on the separation layer 19 of the basalis of the controlled infrared eye based on photonic crystal shown in Fig. 3.
Further, the top layer of the controlled infrared eye based on photonic crystal shown in Fig. 5 is placed in above the middle layer of the controlled infrared eye based on photonic crystal shown in Fig. 4.Wherein electrode 35,36,37,38,39,40,41,42 contacts with wide spectrum infrared absorption layer 45 of the present invention, and identical with electrode 59 8 Electrode connection; Electrode 26,24,22,34,32,31 is connected by metal medium with electrode 48,46,57,55,54,52 respectively; Electrode 60, as reading electrode, is connected with 29.
Controlled infrared eye based on photonic crystal of the present invention, its working method is as follows:
To electrode 25 on-load voltage, the free electron as majority carrier in the N-shaped doped silicon be connected with electrode 23,27,30,33 is transported in layer of photonic crystals 21, makes layer of photonic crystals 21 be covered with free electron with negative charge; Meanwhile, to electrode 62 on-load voltage, using in the p-type doped silicon be connected with electrode 47,50,53,56 as the cavity conveying of majority carrier in layer of photonic crystals 44, make layer of photonic crystals 44 be covered with hole with positive charge.By changing the voltage swing loaded electrode 25 and electrode 62, control the free electron amount of layer of photonic crystals 21 and the hole amount of layer of photonic crystals 44.Because layer of photonic crystals 21 and layer of photonic crystals 44 are respectively with negative charge and positive charge, therefore two-layer layer of photonic crystals forms an electric capacity, change positive and negative charge amount, just can change the size of two-layer photonic crystal interlayer Coulomb force, thus change the distance between two-layer layer of photonic crystals.The Fabry-Perot interference chamber that two-layer layer of photonic crystals is formed, its chamber length can regulate for above-mentioned reasons, therefore can control the infrared light centre wavelength of transmission.
Further, the Fabry-Perot interference chamber that wide spectrum infrared light is consisted of two-layer layer of photonic crystals of the present invention, obtain the infrared light of specific centre wavelength, absorb by wide spectrum infrared absorption layer 45, change light signal into electric signal, by the electrode contacted with wide spectrum infrared absorption layer 45, transmit signals to reading electrode 60,61, carry out data acquisition for external unit, realize the detection to gas componant and concentration.
Controlled non-dispersive infrared gas sensor based on photonic crystal of the present invention, gas from gas entrance 9 to be measured to enter in optical channel air absorbing cavity in 3, and the wide spectrum infrared light that infrared light supply 11 sends, after filtration after mating plate 6, filters visible ray noise section.In optical channel air absorbing cavity 3, the light of gas to be measured to a certain specific centre wavelength of spectrum infrared light absorbs, absorbed infrared light by after optical filter 7 receive by the controlled infrared eye 12 based on photonic crystal, long by regulating the on-load voltage of electrode 25 and electrode 62 to control the chamber in the Fabry-Perot interference chamber that two-layer layer of photonic crystals is formed, make the infrared absorption spectrum centre wavelength of the corresponding gas to be measured of centre wavelength through light, realize the controlled detection to gas with various.
Although be described the illustrative embodiment of the present invention above; so that those skilled in the art understand the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various change to limit and in the spirit and scope of the present invention determined, these changes are apparent, and all innovation and creation utilizing the present invention to conceive are all at the row of protection in appended claim.
Claims (6)
1. based on a controlled non-dispersive infrared gas sensor for photonic crystal, it is characterized in that: comprise ruddiness external source, controlled infrared eye, anti-dazzling screen and shell based on photonic crystal.
2. as claimed in claim 1 based on the controlled non-dispersive infrared gas sensor of photonic crystal, it is characterized in that: described shell comprises optical channel gas absorption chamber enclosure and two pedestals, and wherein the two ends up and down of optical channel air absorbing cavity have gas access and gas vent respectively.
3., as claimed in claim 1 based on the controlled non-dispersive infrared gas sensor of photonic crystal, it is characterized in that: described anti-dazzling screen is positioned at optical channel air absorbing cavity two ends, for visible light noise section.
4., as claimed in claim 1 based on the controlled non-dispersive infrared gas sensor of photonic crystal, it is characterized in that: the described controlled infrared eye based on photonic crystal is fixed on a described pedestal, comprises basalis, middle layer and top layer.
5. the controlled non-dispersive infrared gas sensor based on photonic crystal as described in claim 1 or 4, it is characterized in that: the layer of photonic crystals in described middle layer and the layer of photonic crystals mechanics Fabry-Perot interference chamber of top layer, its chamber length is changed by the Coulomb force between two-layer photonic crystal.
6. the controlled non-dispersive infrared gas sensor based on photonic crystal as described in claim 1 or 4, it is characterized in that: the layer of photonic crystals in described middle layer and the layer of photonic crystals mechanics Fabry-Perot interference chamber of top layer, for changing the centre wavelength through infrared light.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370617A (en) * | 2016-10-18 | 2017-02-01 | 成都市亿泰科技有限公司 | Controllable non-dispersion infrared drug detector based on photon crystals |
| CN106404708A (en) * | 2016-10-28 | 2017-02-15 | 成都市亿泰科技有限公司 | Drug abuse microsensor based on infrared spectroscopy |
| CN107621459A (en) * | 2016-07-13 | 2018-01-23 | 富士电机株式会社 | Gas analyzing apparatus |
| CN109682770A (en) * | 2018-12-29 | 2019-04-26 | 中国船舶重工集团公司第七一八研究所 | A kind of multicomponent Freon gas infrared detecting device |
| CN117664901A (en) * | 2023-12-14 | 2024-03-08 | 深圳市诺安智能股份有限公司 | Multi-gas sensor based on tunable filter and gas detection method |
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| CN117664901A (en) * | 2023-12-14 | 2024-03-08 | 深圳市诺安智能股份有限公司 | Multi-gas sensor based on tunable filter and gas detection method |
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Application publication date: 20160413 |