CN105477780B - Implantable nerve stimulates the optoelectronic pole and its manufacturing method with record - Google Patents
Implantable nerve stimulates the optoelectronic pole and its manufacturing method with record Download PDFInfo
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- CN105477780B CN105477780B CN201510861594.XA CN201510861594A CN105477780B CN 105477780 B CN105477780 B CN 105477780B CN 201510861594 A CN201510861594 A CN 201510861594A CN 105477780 B CN105477780 B CN 105477780B
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/18—Applying electric currents by contact electrodes
- A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
- A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
- A61N1/3605—Implantable neurostimulators for stimulating central or peripheral nerve system
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
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Abstract
The present invention discloses a kind of optoelectronic pole of implantable nerve stimulation and record, including：Support member comprising insertion end, the insertion end are equipped with the record contact for generating electro photoluminescence and recording the nerve signal that the electro photoluminescence generates；And luminous component, it is located at the insertion end, for generating light stimulus；Wherein, the record contact is additionally operable to record the nerve signal that the light stimulus generates.The present invention by the insertion end setting of optoelectronic pole generate electro photoluminescence and record the record contact for the nerve signal that the electro photoluminescence generates and generate the luminous component of light stimulus, record contact is additionally operable to record the nerve signal of light stimulus generation, to formed optical electrical stimulate and carry multichannel record contact in one optoelectronic pole, the record of the nerve signal of optical electrical stimulation and optical electrical stimulation is respectively completed by an optoelectronic pole, simplify equipment, save material, it is applicable in multiple location potential measurement, is widely used.
Description
Technical field
The present invention relates to biomedical engineering technology fields, it is more particularly related to which a kind of implantable nerve pierces
Swash the optoelectronic pole and its manufacturing method with record.
Background technology
Light science of heredity, also referred to as light stimulus genetic engineering, it is that one kind is realized by using optical technology and genetic technique
The method for controlling cell behavior.Light genetics technology overcomes traditional only using, and electro photoluminescence means control cell or organism is movable
Many disadvantages, for Neuscience provide it is a kind of change property research means.The polished bard that the technical method passes through specific wavelength
Swash to control the granting or inhibition that express photaesthesia albuminous cell.Currently, the most popular research method of light science of heredity is by swashing
Light device or LED (Light Emitting Diode, light emitting diode) light source send out the light of certain wavelength, are transferred to by optical fiber
The brain of experimental animal, usually mouse or rat.Light genetics technology makes animal nerve unit generate nerve as a tool
Excitement, while needing that animal nerve unit electric discharge, Behavioral change and physiology are observed and recorded with the use of other instruments and electrode
Variation etc..
Currently, similar neuromodulation strategy is mostly to carry out electro photoluminescence by wire or shone by being used as by laser
Source is carried out light stimulus or is directly shone by LED to couple optical fiber output by optical fiber.Wherein electrical stimulation technology is more mature,
Through being successfully applied in the treatment of the central nervous system diseases such as Parkinson, electric stimulation electrode generally uses metal foil silk as electrode
It realizes；Light stimulus can more accurately stimulate specific neuron, and being likely to become in future more has than electro photoluminescence
The treatment means of effect, but the stimulation based on optical fiber has that light-emitting area is limited, and light source is limited to extraneous laser generator type, valence
The shortcomings of lattice are expensive cannot realize that the application scenarios such as the stimulation of neural circuitry multiple spot and the stimulation of core group require well；Although simultaneously
Also occur a small number of optrodes based on light emitting diode at present, but its manufacture craft is complex and at high price；In addition, polished bard
Swash and does not have electro photoluminescence and nerve signal writing function, the nerve signal generated if necessary to record stimulation, it is necessary in addition configure
Other recording electrodes and hardware system use, and the electrode product price is very expensive.
Invention content
Shortcoming present in view of the above technology, the present invention provide a kind of photoelectricity of implantable nerve stimulation and record
Pole and its manufacturing method are believed by generating electro photoluminescence in the insertion end setting of optoelectronic pole and recording the nerve that the electro photoluminescence generates
Number record contact and generate light stimulus luminous component, record contact be additionally operable to record light stimulus generate nerve signal,
To formed optical electrical stimulate and carry multichannel record contact in one optoelectronic pole, optical electrical is respectively completed by an optoelectronic pole
The record of the nerve signal of stimulation and optical electrical stimulation, simplifies equipment, saves material, multiple location potential measurement is applicable in, using wide
It is general.
In order to realize these purposes and other advantages according to the present invention, the invention is realized by the following technical scheme：
The optoelectronic pole of implantable nerve stimulation and record of the present invention, including：
Support member comprising insertion end, the insertion end, which is equipped with, to be generated electro photoluminescence and record what the electro photoluminescence generated
The record contact of nerve signal；And
Luminous component is located at the insertion end, for generating light stimulus；
Wherein, the record contact is additionally operable to record the nerve signal that the light stimulus generates.
Preferably, the insertion side of the insertion end is along the trapezoidal shape of direction of insertion.
Preferably, the support member includes upper substrate layer, lower substrate layer and is connected to the upper substrate layer and institute
State the shielded layer between lower substrate layer；The support member further includes connecting the connecting pin of external connector；
Wherein, the upper substrate layer includes the signal acquisition line for acquiring nerve signal, the record contact and difference position
The first pad and the second pad in the connecting pin；The lower substrate layer includes power cord；The record contact passes through described
Signal acquisition line is connected to first pad, and the luminous component is connected to second pad by the power cord.
Preferably, the connecting pin is equipped with first through hole, and the insertion end is equipped with the second through-hole；Second pad is logical
It crosses the first through hole and is connected to described power cord one end, the power cord other end is connected to described by second through-hole
Luminous component.
Preferably, the insertion side of the insertion end is along the trapezoidal shape of direction of insertion.
Preferably, at least one record contact and at least one luminous component are arranged in order along direction of insertion
In the insertion side of the insertion end；Wherein, at least one record contact along be perpendicularly to the insertion direction be sequentially arranged in it is described
The insertion side of insertion end；At least one luminous component is sequentially arranged in the insertion side of the insertion end along direction of insertion.
Preferably, a record contact is sequentially arranged in described insert with a luminous component along direction of insertion
Enter the insertion side at end；Wherein, a record contact generate electro photoluminescence, record nerve signal that the electro photoluminescence generates and
The nerve signal that the luminous component light stimulus of record one generates.
Preferably, several described record contacts are sequentially arranged in at least one luminous component along direction of insertion
The insertion side of the insertion end；Wherein, several described record contacts generate electro photoluminescence, record the nerve that the electro photoluminescence generates
Signal and the nerve signal for recording at least one luminous component light stimulus generation.
Preferably, several described record contacts are sequentially arranged in at least one luminous component along direction of insertion
The insertion side of the insertion end；Wherein, several described record contacts include generating electro photoluminescence and recording the electro photoluminescence to generate
Nerve signal the first record contact and record the second record of the nerve signal that at least one light stimulus generates and touch
Point.
A kind of production method of implantable nerve stimulation and the optoelectronic pole of record, includes the following steps：
S1 is coated with one layer of epoxide-resin glue above the lower substrate made of polyimides, is bonded above epoxide-resin glue
The copper foil of one layer of photoresist is posted on surface, forms shielded layer；
S2 carries out ultraviolet exposure using mask, and exposure area is the shape of optoelectronic pole shielded layer, with development after exposure
Liquid removes unexposed area；
Exposed copper foil is removed using etching liquid, strong base solution is recycled to remove photoresist by S3, allows shielded layer
Top is completely exposed；
S4 on the shielding layer after square epoxy resin coating glue, is bonded upper base made of polyimides above epoxy natural gum
Plate layer, to form the bearing part of optoelectronic pole；
S5 is bonded copper foil in the bearing part upper and lower surface of optoelectronic pole；
S7 carries out drilling processing to the bearing part of optoelectronic pole, forms first through hole and the second through-hole；
S6 plates one layer of copper on the hole wall of first through hole and the second through-hole respectively with electroplating technology；
S7 carries out pattern transfer, in the upper table of optoelectronic pole bearing part according to the method for step S1, step S2, step S3
Face and lower surface form designed signal acquisition line, power cord, the first pad and the second pad；
S8 surrounds signal acquisition line, power cord, the first pad and the second pad by upper substrate using laser cutting technique
Layer and lower substrate layer cut into the shape of optoelectronic pole bearing part jointly, and luminous component is welded on the of bearing part insertion end
Two through-holes；Form the optoelectronic pole of implantable nerve stimulation and record.
The present invention includes at least following advantageous effect：
1) by generating electro photoluminescence in the insertion end setting of optoelectronic pole and recording the nerve signal that the electro photoluminescence generates
The luminous component of record contact and generation light stimulus, record contact are additionally operable to the nerve signal that record light stimulus generates, to
Forming optical electrical stimulates and carries multichannel record contact in the optoelectronic pole of one, and optical electrical stimulation is respectively completed by an optoelectronic pole
And the record of the nerve signal of optical electrical stimulation, simplify equipment, saves material；
2) insertion side of insertion end is equivalent to triangle and goes to tip along the trapezoidal shape of direction of insertion, the trapezoidal shape of insertion side,
Similar cambered design reduces the injury to nerve fiber when insertion end is inserted into；
3) it records contact and luminous component is sequentially arranged in insertion end along direction of insertion；At least one record contact is along vertical
It is arranged in the insertion end in direction of insertion, the god that at least one electro photoluminescence or at least one record light stimulus generate can be provided
Through signal；At least one luminous component is sequentially arranged in insertion end along direction of insertion, can provide at least one or at least one
The light stimulus of wavelength.
Part is illustrated to embody by further advantage, target and the feature of the present invention by following, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Description of the drawings
Fig. 1 is the structural schematic diagram for the optoelectronic pole that implantable nerve of the present invention is stimulated and recorded；
Fig. 2 is the vertical view for the optoelectronic pole that implantable nerve of the present invention is stimulated and recorded；
Fig. 3 is the right view for the optoelectronic pole that implantable nerve of the present invention is stimulated and recorded.
In figure：
10- support members；11- insertion ends；111- records contact；11A- insertion sides；The connecting pins 12-；13- signal acquisitions
Line；The first pads of 14-；The second pads of 15-；16- power cords；17- first through hole；The second through-holes of 18-；
20- luminous components.
Specific implementation mode
Present invention will be described in further detail below with reference to the accompanying drawings, to enable those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein are not precluded one or more
The presence or addition of a other elements or combinations thereof.
Embodiment 1
Neuromodulation function can be embodied by two ways, and one can generate the electric arteries and veins of Parameter adjustable by electrode contacts
Spurt swashs, secondly polished bard can be carried out to the specificity nerve fiber for expressing photosensitive protein by the miniature optrode of specific wavelength
Swash.As shown in Figure 1, Figure 2 and Figure 3, the present invention provides a kind of optoelectronic pole of implantable nerve stimulation and record, including：Support portion
Part 10 comprising insertion end 11, the record that insertion end 11 is equipped with the nerve signal for generating electro photoluminescence and recording electro photoluminescence generation touch
Point 111；And luminous component 20, it is located at insertion end 11, for generating light stimulus；Wherein, record contact 111 is additionally operable to remember
Record the nerve signal that light stimulus generates.
Production is arranged by the insertion end 11 in optoelectronic pole in the optoelectronic pole of implantable nerve stimulation and record provided by the invention
The luminous component 20 for recording contact 111 and generating light stimulus for the nerve signal that raw electro photoluminescence and record electro photoluminescence generate, note
Record contact 111 also record the nerve signal of light stimulus generation, stimulate and carries to forming optical electrical and records contact in integrated light
Electrode is respectively completed the record of the nerve signal of optical electrical stimulation and optical electrical stimulation by an optoelectronic pole, both has light
The specific neuron of stimulation precisely stimulates, and the nerve further through the record contact 111 record light stimulus in time for generating electro photoluminescence is believed
Number, simplify equipment, save material, improves the measurement precision and convenience of optoelectronic pole.
Wherein, record contact 111 had not only generated electro photoluminescence and had recorded the nerve signal that electro photoluminescence generates, but also record light stimulus production
Raw nerve signal improves the utilization rate of record contact 111.The light source of luminous component 20 can arbitrarily send out light wave to nerve
Tissue carries out the laser generator of light stimulus, and present embodiment considers the size ruler of implantable nerve stimulation and the optoelectronic pole of record
Very little and application scenario can preferably generate the light of specific wavelength and then control the micro-led of photosensitive protein expression, micro-
Type light emitting diode active area is smaller, and scattering light-emitting area is big, is applicable to animal body multiple location potential measurement, opens up wide implantation
The application range of the optoelectronic pole of formula nerve stimulation and record.
As another embodiment of the invention, support member 10 includes upper substrate layer, lower substrate layer and is connected to
Shielded layer between upper substrate layer and lower substrate layer；Support member 10 further includes connecting the connecting pin 12 of aerial lug；Wherein,
Upper substrate layer includes the signal acquisition line 13 for acquiring nerve signal, record contact 111 and is located at the first of connecting pin 12
Pad 14 and the second pad 15；Lower substrate layer includes power cord 16；Record contact 111 is connected to first by signal acquisition line 13
Pad 14, luminous component 20 are connected to the second pad 15 by power cord 16.First pad 14, the second pad 15, signal acquisition
Line 13 and power cord 16 are gold-plated copper products；Shielded layer uses copper foil.The upper substrate layer and lower substrate layer of support member 10
The shielded layer that centre is equipped with reduces interference of the power cord 16 of driving luminous component 20 to signal acquisition line 13.
As another embodiment of the invention, connecting pin 12 is equipped with first through hole 17, and it is logical that insertion end 11 is equipped with second
Hole 18；Second pad 15 is connected to 16 one end of power cord by first through hole 17, and 16 other end of power cord passes through the second through-hole 18
It is connected to luminous component 20.First through hole 17 and the luminous component 20 that the second through-hole 18 is power drives optoelectronic pole provide cabling
It is convenient, promote the wiring of signal acquisition line 13 and power cord 16 reasonable.Wherein, power cord 16 by first through hole 17 and connects
Connect the second pad 15 welding at end 12；Luminous component 20 is welded by the second through-hole 18 with insertion end 11；Connecting pin 12 and outside
Connector is connected in a manner of grafting or welding.
As another embodiment of the invention, the insertion side 11A of insertion end 11 is along the trapezoidal shape of direction of insertion.It is logical
Often, the insertion side of optoelectronic pole insertion end 11 improves the convenience that optoelectronic pole is inserted into organism using having cuspidated triangle, this
The optoelectronic pole insertion end 11 of invention embodiment along the length of direction of insertion is 7mm, is perpendicular to the width in direction of insertion
500um, insertion side 11A are 300um with the thickness of luminous component 20 together, by the insertion side 11A of insertion end 11 along direction of insertion
Trapezoidal shape, the design at this removal tip, similar arc are ensureing that optoelectronic pole insertion is convenient, are not influencing 20 and of luminous component
In the case of recording contact work, reduce injury of the optoelectronic pole insertion to nerve fiber.
As another embodiment of the invention, 20 edge of at least one record contact 111 and at least one luminous component
Direction of insertion is sequentially arranged in the insertion side 11A of insertion end 11, convenient for record contact 111, luminous component 20, signal acquisition line 13
And while 16 rational deployment of power cord, reduce the size of the insertion end of optoelectronic pole, facility is provided for optoelectronic pole insertion.For into
One step improves the convenience of the reasonability and insertion of layout, and present embodiment is preferably：At least one record contact 111 is along vertical
It is sequentially arranged in the insertion side 11A of insertion end 11 in direction of insertion：As shown in Fig. 2, three record contacts 111 are along perpendicular to insertion
Direction is sequentially arranged in the insertion side 11A of insertion end 11；At least one luminous component 20 is sequentially arranged in insertion along direction of insertion
The insertion side 11A at end 11.
As another embodiment of the invention, a record contact 111 and a luminous component 20 are along direction of insertion
It is sequentially arranged in the insertion side 11A of insertion end 11；Wherein, a record contact 111 generates electro photoluminescence, record electro photoluminescence generates
The nerve signal that one 20 light stimulus of luminous component of nerve signal and record generates.Present embodiment is a record contact
111 correspond to the one-to-one pattern of a luminous component 20, while meeting optoelectronic pole electro photoluminescence/light stimulus record, utmostly
Ground saves material, and integrated level is high, improves the convenience that optoelectronic pole uses.
As another embodiment of the invention, several record contacts 111 are at least one luminous component 20 along slotting
Enter the insertion side 11A that direction is sequentially arranged in insertion end 11；Wherein, several record contacts 111 generate electro photoluminescence, record electricity thorn
Swash the nerve signal generated and records the nerve signal of 20 light stimulus of at least one luminous component generation.If present embodiment is
The dry many-one pattern for recording one luminous component 20 of correspondence of contact 111 or several record contacts 111 correspond to several hairs
The multipair multi-mode of light component 20：Under the many-to-one pattern of present embodiment, several record contacts 111 record the same hair
20 light stimulus of light component generate nerve signal, in particular to, several record contacts 111 from different channels record one shine
The nerve signal that the light stimulus of component 20 generates so that optoelectronic pole have multichannel nerve electric signal differential record and electro photoluminescence and
The bimodulus neuromodulation function of light stimulus, the record of multichannel also improve the accurate of the Neural Signal Collecting of light stimulus generation
Property；, in particular to, several record contacts 111 send out electro photoluminescence, record electricity respectively under the pattern of the multi-to-multi of present embodiment
While stimulating the nerve signal generated, the nerve signal of several 20 light stimulus of luminous component generation is also recorded, it is more to record
The nerve signal that kind different wave length light stimulus generates provides a kind of mode, further improves the accuracy of light stimulus record.
As another embodiment of the invention, several record contacts 111 are at least one luminous component 20 along slotting
Enter the insertion side 11A that direction is sequentially arranged in insertion end 11；Wherein, several record contacts 111 include generating electro photoluminescence and note
First record contact of the nerve signal that record electro photoluminescence generates and record the of the nerve signal that at least one light stimulus generates
Two record contacts.It will only be used in and generate electro photoluminescence and record the first record contact of the nerve signal that electro photoluminescence generates and be only used for
The the second record contact for recording the nerve signal that at least one light stimulus generates demarcates, and improves light stimulus/electro photoluminescence note
The accuracy of record.
Embodiment 2
On the basis of embodiment 1, the present embodiment provides the light of implantable nerve stimulation and record described in a kind of embodiment 1
The production method of electrode, which is characterized in that include the following steps：
S1 is coated with one layer of epoxide-resin glue above the lower substrate made of polyimides, is bonded above epoxide-resin glue
The copper foil of one layer of photoresist is posted on surface, forms shielded layer；
S2 carries out ultraviolet exposure using mask, and exposure area is the shape of optoelectronic pole shielded layer, with development after exposure
Liquid removes unexposed area；
Exposed copper foil is removed using etching liquid, strong base solution is recycled to remove photoresist by S3, allows shielded layer
Top is completely exposed；
S4 on the shielding layer after square epoxy resin coating glue, is bonded upper base made of polyimides above epoxy natural gum
Plate layer, to form the bearing part of optoelectronic pole；
S5 is bonded copper foil in the bearing part upper and lower surface of optoelectronic pole；
S7 carries out drilling processing to the bearing part of optoelectronic pole, forms first through hole and the second through-hole；
S6 plates one layer of copper on the hole wall of first through hole and the second through-hole respectively with electroplating technology；
S7 carries out pattern transfer, in the upper table of optoelectronic pole bearing part according to the method for step S1, step S2, step S3
Face and lower surface form designed signal acquisition line, power cord, the first pad and the second pad；
S8 surrounds signal acquisition line, power cord, the first pad and the second pad by upper substrate using laser cutting technique
Layer and lower substrate layer cut into the shape of optoelectronic pole bearing part jointly, and luminous component is welded on the of bearing part insertion end
Two through-holes；Form the optoelectronic pole of implantable nerve stimulation and record.
Wherein, the main component of developer solution is sodium carbonate.The main component of etching liquid is hydrogen peroxide and hydrochloric acid.Strong base solution
Main component be sodium hydroxide.First pad 14, the second pad 15, signal acquisition line 13 and power cord 16 use gold plated copper
One layer of copper is plated on the hole wall of material, first through hole 17 and the second through-hole 18, to realize 10 upper substrate layer of support member, lower base
Being electrically connected of record contact 111 between plate layer and shielded layer and the first pad 14, luminous component 20 and the second pad 15 it
Between be electrically connected.Luminous component 20 is welded on to the second through-hole 18 of 10 insertion end 11 of bearing part by lead-free low-temperature tin cream.
Embodiment of the present invention provides a kind of production method of implantable nerve stimulation and the optoelectronic pole of record, this method
The photoelectricity extremely flexible optoelectronic pole of manufactured implantable nerve stimulation and record, it is bent, it is not only suitable for epidermis, is also applied for depth
Portion organizes, and optoelectronic pole can be placed freely in nerve fiber, improve the flexibility that optoelectronic pole uses, open up extensively optoelectronic pole
Use scope.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With.It can be applied to various suitable the field of the invention completely.It for those skilled in the art can be easily
Realize other modification.Therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (5)
1. a kind of optoelectronic pole of implantable nerve stimulation and record, which is characterized in that including：
Support member comprising insertion end, the insertion end are equipped with the nerve for generating electro photoluminescence and recording the electro photoluminescence generation
The record contact of signal；And
Luminous component is located at the insertion end, for generating light stimulus；
Wherein, the record contact is additionally operable to record the nerve signal that the light stimulus generates；
The insertion side of the insertion end is along the trapezoidal shape of direction of insertion；
At least one record contact and at least one luminous component are sequentially arranged in the insertion end along direction of insertion
Insertion side；
Wherein, at least one record contact edge is perpendicularly to the insertion direction the insertion side for being sequentially arranged in the insertion end；Extremely
A few luminous component is sequentially arranged in the insertion side of the insertion end along direction of insertion；
The support member includes upper substrate layer, lower substrate layer and is connected between the upper substrate layer and the lower substrate layer
Shielded layer；The support member further includes connecting the connecting pin of external connector；
Wherein, the upper substrate layer includes the signal acquisition line for acquiring nerve signal, the record contact and is located at institute
State the first pad and the second pad of connecting pin；The lower substrate layer includes power cord；The record contact passes through the signal
Gathering line is connected to first pad, and the luminous component is connected to second pad by the power cord.
2. the optoelectronic pole of implantable nerve stimulation and record as described in claim 1, which is characterized in that
The connecting pin is equipped with first through hole, and the insertion end is equipped with the second through-hole；Second pad is logical by described first
Hole is connected to described power cord one end, and the power cord other end is connected to the luminous component by second through-hole.
3. the optoelectronic pole of implantable nerve stimulation and record as described in claim 1, which is characterized in that
Several described record contacts are sequentially arranged in the insertion end at least one luminous component along direction of insertion
Insertion side；
Wherein, several described record contacts generate electro photoluminescence, record nerve signal and record extremely that the electro photoluminescence generates
The nerve signal that a few luminous component light stimulus generates.
4. the optoelectronic pole of implantable nerve stimulation and record as claimed in claim 3, which is characterized in that
Several described record contacts are sequentially arranged in the insertion end at least one luminous component along direction of insertion
Insertion side；
Wherein, several described record contacts include being only used for generating electro photoluminescence and recording the nerve signal that the electro photoluminescence generates
The first record contact and being only used for record the second record contact of the nerve signal that at least one light stimulus generates.
5. a kind of production method of implantable nerve stimulation and the optoelectronic pole of record as described in any one of claim 1-4,
It is characterized by comprising the following steps：
S1 is coated with one layer of epoxide-resin glue, the coating surface above epoxide-resin glue above the lower substrate made of polyimides
The copper foil of one layer of photoresist is posted, shielded layer is formed；
S2 carries out ultraviolet exposure using mask, and exposure area is the shape of optoelectronic pole shielded layer, will with developer solution after exposure
Unexposed area removes；
Exposed copper foil is removed using etching liquid, strong base solution is recycled to remove photoresist by S3, is allowed above shielded layer
It is completely exposed；
S4 is bonded upper substrate layer made of polyimides on the shielding layer after square epoxy resin coating glue above epoxy natural gum,
To form the bearing part of optoelectronic pole；
S5 is bonded copper foil in the bearing part upper and lower surface of optoelectronic pole；
S7 carries out drilling processing to the bearing part of optoelectronic pole, forms first through hole and the second through-hole；
S6 plates one layer of copper on the hole wall of first through hole and the second through-hole respectively with electroplating technology；
S7 carries out pattern transfer according to the method for step S1, step S2, step S3, in the upper surface of optoelectronic pole bearing part and
Lower surface forms designed signal acquisition line, power cord, the first pad and the second pad；
S8, using laser cutting technique around signal acquisition line, power cord, the first pad and the second pad by upper substrate layer and
Lower substrate layer cuts into the shape of optoelectronic pole bearing part jointly, and second that luminous component is welded on bearing part insertion end is led to
Hole；Form the optoelectronic pole of implantable nerve stimulation and record.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510861594.XA CN105477780B (en) | 2015-12-01 | 2015-12-01 | Implantable nerve stimulates the optoelectronic pole and its manufacturing method with record |
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| CN201510861594.XA CN105477780B (en) | 2015-12-01 | 2015-12-01 | Implantable nerve stimulates the optoelectronic pole and its manufacturing method with record |
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| CN105477780B true CN105477780B (en) | 2018-11-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106178271B (en) * | 2016-07-05 | 2019-05-24 | 上海交通大学 | The flexible nerve electrode device and preparation method thereof that LED light stimulation and electrographic recording integrate |
| CN109954225A (en) * | 2017-12-25 | 2019-07-02 | 复旦大学 | Deformable light heredity multiple spot stimulation device |
| CN109545884B (en) * | 2018-11-09 | 2020-05-01 | 中山大学 | Preparation method of integrated injectable biological photoelectric electrode microprobe |
| CN111613700B (en) * | 2020-05-27 | 2021-10-08 | 杭州电子科技大学温州研究院有限公司 | Photoelectrode for optogenetic stimulation and electrophysiological recording and preparation method thereof |
| CN114209330A (en) * | 2021-12-31 | 2022-03-22 | 武汉衷华脑机融合科技发展有限公司 | Baffle and neural interface system |
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| CN103462600A (en) * | 2013-09-04 | 2013-12-25 | 中国科学院深圳先进技术研究院 | Photoelectrode component and in-vivo photoelectrode imaging system |
| CN205268831U (en) * | 2015-12-01 | 2016-06-01 | 中国科学院苏州生物医学工程技术研究所 | Photoelectricity utmost point of implanted nerve stimulation and record |
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