CN105468026B - Sample adjustment controller with three degree of freedom - Google Patents

Abstract

A kind of sample adjustment controller with three degree of freedom, including control unit, joint portion, sample portion and driving section, the wherein one end in one end connecting joint portion of control unit, the other end connection sample portion of joint portion, and driving section connects control unit, joint portion and sample portion respectively, joint portion is made up of at least one bellows, and operator can pass through the drive link of the control handle drive driving section of manipulation control unit, joint portion is transmitted bar drive, further change the position in sample portion；The sample adjustment dress device of the present invention is the environment for being suitable for any level vacuum.

Description

Sample adjustment controller with three degree of freedom

Technical field

The present invention is to adjust controller on a kind of sample, is particularly used in the sample adjustment controller of vacuum environment.

Background technology

Surface Science is a kind of knowledge for studying body surface micro-structural, including understands the research of the interface of out of phase, We can explain some macroscopical phenomenons by the understanding of docking port characteristic, in manufacture of semiconductor, magnetic material, superconduction Body, fuel cell etc., Surface Science are all considerable.

Photoelectron spectroscopy (photo electron spectroscopy, PES) is a kind of analysis skill of Surface Science It art, can be used to observe the surface-element composition of object, impurity element in the empirical formula of pure material, mixture etc., and then analyze Material surface under specified conditions, because photoelectric effect principle is when determinand is by vacuum ultraviolet (vacuum ultra Violet), or X ray equal excitation light source irradiates, and the electronics in determinand is excited and projects photoelectron, by analysis photoelectricity The kinetic energy of son, ionization energy, the physical quantity such as intensity, just will appreciate that the property of determinand, such measurement must be in the ring of high vacuum Carried out under border.

When carrying out surface measurement, experimenter sometimes needs to adjust the position of determinand, and typically sees in an atmosphere The drive system that instrument uses is surveyed, because the limitation for the problems such as being volatilized containing lubricant, is not appropriate for applying to the ring of high vacuum Border, thus apply photoelectron spectrograph drive component must use ultrahigh vacuum compatibility adjusting apparatus,

Determinand adjusting apparatus used in photoelectron spectrograph known today has heterogeneous gold in some problems, such as vacuum Category material be difficult to solder to, if not or when rotating determinand pivot determinand center, after causing the anglec of rotation, it is necessary to adjust Whole X-axis and Y-axis can just return to sample center；In addition, in the determinand in face of needing to be heated or cooled, determinand adjusting apparatus The closed intensity of each inter-module is bad, is likely to result in inaccurate measurement, seal break-off or even injures whole mechanism；Therefore, send out A person of good sense feels the need to provide a kind of new sample adjustment controller.

The content of the invention

As it was previously stated, inventor solves the problems, such as the determinand adjuster in current photoelectron spectrograph, there is provided A kind of sample adjustment controller including bellows.

The invention provides a kind of sample with three degree of freedom to adjust controller, it is characterised in that：Control unit, thereon It is configured with multiple control handles；Center-pole, its one end connect with the control unit；Flapping articulation portion, it has vertical axis of rotation, One end configuration rotating shaft of the vertical axis of rotation, is connected by the rotating shaft with the other end of the center-pole, and described vertical Rotary axle box is provided with middle shaft gear；Drag articulation portion, its one end are fixedly connected with the other end of the vertical axis of rotation, described to hang down Straight joint portion is formed by the first bellows and the second bellows concatenation, first bellows and second bellows connection Place and travelling gear connect；Sample portion, positioned at the bottom of sample adjustment controller, there is specimen holder and sample stage, institute The other end that specimen holder is stated with the drag articulation portion connects, and the sample stage is located at the outer surface of the specimen holder, and There is preceding bevel gear bar through the specimen holder outer surface, and connect with the microscope carrier；And driving section, there is the first drive link And second drive link, first drive link and second drive link all have one of one end and the control handle phase Connecing, first drive link is arranged with a gear, and the other end of first drive link is configured with bevel gear, and described second The other end of drive link is arranged with worm screw, and the worm screw and the travelling gear connect, the worm screw and the travelling gear Multiple gear tooths engage；Wherein, the rotation of second drive link can drive first bellows and second ripple The deformation of pipe, it is further driven to the sample portion and rotates.

Controller is adjusted according to the sample of the present invention, can be by the design of driving section so that operator is to be measured in rotation During thing, it is that can make determinand and provide the rotary freedom for according to axle centered on X, Y-axis and Z axis, waiting and carrying out different dimensions, increases The convenience for having added surface measurement to test.

Because the sample adjustment controller of the present invention is to need to heat determinand or cooled down, therefore the sample of the present invention Product adjustment controller can be by the selection of sample seat material so that specimen holder has good heat conductivility, without because It is heated or cooled and causes to damage, the tightness and cleanliness factor of whole equipment can be kept.

Brief description of the drawings

The sample that Fig. 1 is the present invention adjusts controller schematic diagram；

Fig. 2A is the driving section schematic diagram of inventive samples adjustment control device；

Fig. 2 B are control unit of the present invention and driving section connection diagram；

Fig. 3 A are the joint portion schematic cross-sectional view of the present invention；

Fig. 3 B are the joint portion deformation schematic diagram of the present invention；

Fig. 4 is diagrammatic cross-section of the joint portion with specimen holder joint of the present invention；

Fig. 5 A are the microscope carrier rotational structure schematic diagram of inventive samples adjustment control device；

Fig. 5 B are the section exploded perspective view in inventive samples portion；

Fig. 6 is that inventive samples adjustment controller applies to photoelectron spectrograph schematic diagram；And

Fig. 7 is that inventive samples adjustment controller applies to sweep electron microscope schematic diagram.

Brief description of the drawings：

Sample adjusts controller 1

Control unit 12

Control handle 121,123,125

Charging port 122

Sample portion 13

Specimen holder 131

Sample stage 132

Preceding bevel gear bar 135

Ceramic jacket 1350

Wheel shaft 1351

Spring 1352

Umbrella tooth gear member 1353

Rotating shaft 136

Drag articulation portion 14

Side driving lever 140

First bellows 141

Second bellows 142

Junction surface 1420

Blade first 1421

Helicitic texture 1422

Driving section 15

First drive link 150

Gear 152

3rd drive link 153

Bevel gear bar 154 afterwards

Second drive link 155

Detachably coupled part 1550

Worm screw 156

Travelling gear 157

Center-pole 16

Flapping articulation portion 17

Middle shaft gear 171

3rd bellows 172

Rotating shaft 173

Fixed frame 18

Photoelectron spectroscopy equipment 2

System microscope carrier 20

X-Y-Z linear stages 22

Vacuum chamber 24

Port 26

Electron energy analytical equipment 28

Photoelectricity subchannel 280

Excitation source 29

Sweep electron microscope 3

Electron source 30

Microscope body 31

Object lens light bar 32

Object lens 34

Vacuum chamber 36

Sample 38.

Specific embodiment

The following description of the present invention and accompanying drawing, the feature of displaying inventive samples adjustment controller merely for convenience, and Enable to implement the present invention with relevant art skill, therefore need not also not drawn according to full-size(d), conjunction is first chatted It is bright.

First, as shown in figure 1, wherein Fig. 1 is the sample adjustment controller schematic diagram of the present invention, and please refer to figure 2A, it is control unit of the present invention and driving section connection diagram.The sample adjustment controller 1 of the present invention is by control unit 12, sample Formed combined by portion 13, drag articulation portion 14, driving section 15 and flapping articulation portion 17.Wherein, the one end in drag articulation portion 14 and Sample portion 13 connects, and the other end and flapping articulation portion 17 connect, and the other end in flapping articulation portion 17 is to pass through the He of center-pole 16 Control unit 12 is connected, and drag articulation portion 14 is concatenated and formed by the first bellows 141 and the second bellows 142, and driving section 15 Connect drag articulation portion 14 and control unit 12 simultaneously.When using sample adjustment controller 1, operator can pass through adjustment control unit 12 control handle 121,123,125 drives driving section 15, is further driven to drag articulation portion 14 and flapping articulation portion 17, makes The kinetic energy of making in drag articulation portion 14 and flapping articulation portion 17 adjusts the position of sample portion 13 and direction, as the detailed configuration of each part And annexation, it is described in detail later.In addition, control handle 121,123,125 but to manually adjust, or driven with motor. In an embodiment of the present invention, drag articulation portion 14 and sample portion 13 are integrally fixed on fixed frame 18, and fixed frame 18 is disposed on The lower section in flapping articulation portion 17, drag articulation portion 14 are with side in the joint of the first bellows 141 and the second bellows 142 Face driving lever 140 and fixed frame 18 connect, and side driving lever 140 also connects with driving section 15, and sample portion 13 is with a rotating shaft 136 and fixed frame 18 connect.

Then, Fig. 1, Fig. 2A and Fig. 2 B are please also refer to, wherein Fig. 2A is that the driving section of inventive samples adjustment control device shows It is intended to.As shown in Figure 2 A and 2 B, driving section 15 of the invention includes the first drive link 150, the second drive link 155 and the 3rd passes Lever 153, and one end of the first drive link 150 is connected with the control handle of control unit 12 121, the one of the second drive link 155 End is connected with the control handle of control unit 12 123, and one end of the 3rd drive link 153 is and the control handle of control unit 12 125 Connection.There is bevel gear 151 one end that first drive link 150 is not connected with control handle 121, while the first drive link 150 is arranged In gear 152, gear 152 can connect when appropriate location with a middle shaft gear 171 in flapping articulation portion 17, and in this Shaft gear 171 is set on the 3rd bellows 172 in flapping articulation portion 17, wherein, one end of the 3rd bellows 172 is fixed End, the other end is rotatably to hold.For example, the 3rd bellows 172 is rotating shaft 173 with the place that center-pole 16 is connected, and the 3rd ripple One end that line pipe 172 is connected with drag articulation portion 14 is not then rotatable, therefore the 3rd bellows 172 can be considered vertical axis of rotation. When the gear 152 and middle shaft gear 171 of the first drive link 150 connect, operator operates the first biography through control handle 121 Lever 150, rotate the first drive link 150, then shaft gear 171 rotates during gear 152 will drive, the rotation of middle shaft gear 171 The change of team makes the 3rd bellows 172 carry out the rotation with rotating shaft 173 for pivot, and such rotational energy drives flapping articulation portion again The drag articulation portion 14 and sample portion 13 of 17 lower sections are rotated.In addition, as in the previous paragraph when drag articulation portion 14 and sample portion 13 are driven when rotate more than some gauge, and the second drive link 155 can be by the place where detachably coupled part 1550 Separation, wherein the lower half of detachably coupled part 1550 and worm screw 156 thereon can follow drag articulation portion 14 and sample portion 13 1 Rise and rotate, and the second drive link 155 of the first half of detachably coupled part 1550 then will not be rotated and then.

In addition, operator can also move up and down the first drive link 150, and then divide gear 152 and middle shaft gear 171 From or engagement, specifically, operator be manipulation the 3rd control handle 125 come make the 3rd drive link 153 drive the first drive link Move up and down, in this embodiment, one end that the 3rd drive link 153 does not connect with control handle 125 is L-shaped structure, And connect with the first drive link 150.When operator adjusts control handle 125, the 3rd drive link 153 of L-shaped structure can band Dynamic first drive link 150 moves up and down, and the related gear 152 made on the first drive link 150 and bevel gear 151 move up and down, Therefore, operator can pass through control handle 125 to control whether gear 152 connects with middle shaft gear 171.Implement in others In mode, operator can also be directed through control handle 121 move up and down the first drive link 150.Then, the second drive link 155 one end not being connected with control handle 123 and fixed mount 18 connect and are arranged with worm screw 156, also, the second drive link 155 Detachably coupled part 1550 is additionally provided with, detachably coupled part 1550 is in the top of worm screw 156.In addition, worm screw 156 and a biography Moving gear 157 is connected, can be relative with the teeth groove on worm screw 156 by the gear tooth 1570 on travelling gear 157.Then, Operator is through control to control handle 123, and when being rotated the second drive link 155, worm screw 156, which can be driven, revolves Turn, and then with nutating gear 157, wherein, the rotation and can of travelling gear 157 drives drag articulation portion 14, as driving cog How the rotation of wheel 157 drives drag articulation portion 14, is described in detail later.

Followed by please again with reference to Fig. 1, Fig. 2A and Fig. 3 A, the drag articulation portion section view that wherein Fig. 3 A are the present invention is shown It is intended to.The drag articulation portion 14 of the present invention includes the first bellows 141 and the second bellows 142, wherein the first bellows 141 One end is connected with flapping articulation portion 17, and the other end and the second bellows 142 are connected, while the other end of the second bellows 142 is It is connected with sample portion 13.In addition, under other implementation states, sample adjustment control device 1 does not simultaneously have flapping articulation portion 17, therefore One end of first bellows 141 is connected with center-pole 16.The side of the joint of first bellows 141 and the second bellows 142 Face driving lever 140 further connects with travelling gear 157.Wherein, the upper end of side driving lever 140 is the center with travelling gear 157 Connection, and lower end is connected with the joint of the first bellows 141 with the second bellows 142.As it was previously stated, the second drive link 155 rotational energy band nutating gear 157, the travelling gear 157 of rotation can pass through the start of side driving lever 140 and drive vertical Joint portion 14.Specifically, in the present invention, when the travelling gear 157 in Fig. 2A turns clockwise, the first bellows 141 and second bellows 142 joint can toward away from driving section 15 direction move, conversely, when the travelling gear in Fig. 2A 157 when making rotate counterclockwise, and the joint of the first bellows 141 and the second bellows 142 can be toward close to the direction of driving section 15 Mobile, by such movement, travelling gear 157 can drive sample portion 13, change the position in sample portion 13.For example, such as Fig. 3 B It is shown, when the joint of the first bellows 141 and the second bellows 142 is away from driving section 15, the first bellows 141 and second Bellows 142 can all produce deformation, wherein the deformation of the first bellows 141 is lower end away from driving section 15, and the position of upper end It is constant, and the deformation of the second bellows 142 be upper end away from driving section 15, and the position of lower end is constant, then the second bellows 142 deformation can make sample portion 13 carry out axle counterclockwise turn using rotating shaft 136 as center, make the upper end in sample portion 13 away from biography Dynamic portion 15, and the lower end in sample portion 13 is close to driving section 15.Conversely, connecting when the first bellows 141 and the second bellows 142 When place is close to driving section 15, it is clockwise that the deformation of the second bellows 142 can be such that sample portion 13 is carried out using rotating shaft 136 as center Axle turns.In addition, sample portion 13 includes specimen holder 131 and sample stage 132, there is accommodation space 130 inside specimen holder 131, work as sample When product portion 13 and drag articulation portion 14 engage, accommodation space 130 can connect with the first bellows 141 and the second bellows 142. In the present invention, specimen holder 131 can be made up of oxygen-free copper.When operating sample adjustment controller 1, operator can be by controlling The charging port 122 in portion 12 adds liquid gas, and liquid gas can flow into via the first bellows 141 and the second bellows 142 to be held Among 130 between being empty, and then the temperature of the sample stage 132 to connect with specimen holder 131 is reduced, wherein, if using liquid nitrogen cold But, the temperature of sample stage 132 can reach subzero 170 degree Celsius.In addition, sample stage 132 can also heat, example Such as：Resistance is connected with electrified regulation, or is heated in the side of sample stage 132 installation filament with heat radiation, or with electron bombardment sample Microscope carrier 132 is with up to heating effect.Meanwhile in order to understand the temperature of sample stage 132, device has measurement temperature on sample stage 132 The thermocouple of degree, wherein, the temperature that sample stage 132 heats can reach more than 800 degree Celsius.Sample stage 132 is dress The exterior lateral sides of specimen holder 131 are placed in, sample stage 132 can also be made up of oxygen-free copper or stainless steel, according to different demands, The replaceable sample stage 132 being made from a different material of operator.In addition, according to different embodiments, the He of sample stage 132 Specimen holder 131 can be integrally formed.Especially it is noted that the capacity of heat transmission of oxygen-free copper is good and do not have magnetic, work as sample When microscope carrier 132 needs to cool down or when heating-up temperature is not high, it is adapted to using oxygen-free copper as its material, because oxygen-free copper is hot swollen Swollen coefficient very little and with the expansion coefficient similar of the material stainless steel of the second bellows 142, therefore in temperature moment or jumbo change When, it will not be ruptured because of violent expansion or shrinkage, also will not significantly change because of volume and be engaged in component and touch generation gap, and And oxygen-free copper does not have magnetic in itself, without interference with the electric signal of measurement, therefore the sample adjustment control device 1 of the present invention is adapted for use with Sample portion.And the higher stainless steel of fusing point, tungsten or molybdenum can be then selected when sample stage 132 requires heat to higher temperatures.

Please again simultaneously refering to Fig. 3 A and Fig. 4, wherein Fig. 4 is that the joint portion of the present invention is illustrated with the section of specimen holder joint Figure.In preferably embodiment of the invention, the second bellows 142 is identical with the external diameter of the top end opening of specimen holder 131, and second There is junction surface 1420 lower section of bellows 142, and the bottom of junction surface 1420 is specimen holder 131 and engagement to connect with specimen holder 131 The joint of portion 1420 can be processed into a kind of edge of a knife (knife-edge) structure.Specifically, the bottom of junction surface 1420 have it is prominent and Blade comprising inclined-plane first 1421, and specimen holder 131, before connecting with junction surface 1420, its top is burnishing surface.Work as specimen holder 131 and junction surface 1420 when connecting, because specimen holder 131 has ductility and hardness is less than junction surface 1420, blade first 1421 The top of specimen holder 131 can be extruded, and forms the blade interface 1311 that be able to house blade first 1421, consequently, it is possible to specimen holder Good adaptation is had between 131 and second bellows 142, junction surface 1420., it is clear that carry out sample using knife edge structure The bellows 142 of product seat 131 and second connects mode, just can effectively solve the problem that prior art is using welding.This Outside, the material at junction surface 1420 can be stainless steel, and in various embodiments, junction surface 1420 can be welded in addition On the second bellows 142.In addition, the inwall of junction surface 1420 has helicitic texture 1422, and the top outer wall of specimen holder 131 also has Helicitic texture 1312 so that be to make helicitic texture 1422 and helicitic texture to rotate when specimen holder 131 and junction surface 1420 combine 1312 is engaged, and the present invention carries out the bellows 142 of specimen holder 131 and second using knife edge structure and connects mode in appropriate torsion Under power, it may be reused, such as:The specimen holder 131 disassembled also can again be connected with the second bellows 142, then connected During blade first 1421 equally can extrude specimen holder 131 and maintain good adaptation.Such assembling mode is quite square Just, the adaptation that can be also maintained between ultra-high vacuum environment lower component, also because being not to engage the second screw thread in a welding manner Pipe 142 and specimen holder 131 so that specimen holder 131 can be replaced in response to different demands, or during the damage of specimen holder 131 It can change easily.In the better embodiment of the present invention, when the second bellows 142 and the external diameter of the top end opening of specimen holder 131 When being 22 millimeters, it can be made between junction surface 1420 and specimen holder 131 without gas leakage with 85kgf/cm torsion.When the second bellows 142 and the external diameter of the top end opening of specimen holder 131 when being 27 millimeters, junction surface 1420 and sample can be made with 105kgf/cm torsion Without gas leakage between product seat 131.Above-mentioned torsion remains not by deadlock between junction surface 1420 and specimen holder 131 and works as sample , can be with bigger torsion combination junction surface 1420 and specimen holder 131, to obtain when the helicitic texture 1312 of product seat 131 has abrasion State without gas leakage, such design further increase the reusability of specimen holder 131.

Samples described above adjustment controller 1 is with control unit 12, center-pole 16, flapping articulation portion 17, vertical pass Section portion 14, sample portion 13 and driving section 15, in other implementations, sample of the invention adjustment controller 1 can only have There are control unit 12, center-pole 16, drag articulation portion 14, sample portion 13 and a driving section 15, wherein drag articulation portion 14 is and center Bar 16 interconnects, that is to say, that in the present embodiment, not flapping articulation portion 17 and to drive flapping articulation portion 17 Gear 152, all do not change as other assemblies and annexation.

Please refer to Fig. 2A, Fig. 5 A and Fig. 5 B, wherein Fig. 5 A are that the sample stage of inventive samples adjustment controller turns Dynamic structural representation, Fig. 5 B are the section exploded perspective views in inventive samples portion.Then, further illustrate that the sample of the present invention carries Platform rotational structure and its operation.One end of first drive link 150 is connected with control handle 121, and the other end is arranged bevel gear 151, And connect with one end of rear bevel gear bar 154, one end of the other end of rear bevel gear bar 154 and another preceding bevel gear bar 135, it is It is connected with the pivot joint of mutual gear, preceding bevel gear bar 135 is disposed on the outer wall of specimen holder 131, from Fig. 5 B, preceding bevel gear Bar 135 includes ceramic jacket 1350, wheel shaft 1351, spring 1352 and umbrella tooth gear member 1353, and ceramic jacket 1350 is placed in specimen holder 131 In, its one end and sample stage 132 is connected, one end of wheel shaft 1351 is penetrated among ceramic jacket 1350, and via negative and positive thread (not shown in the figures) and sample stage 132 combine, and the other end of wheel shaft 1351 puts spring 1352, then with umbrella tooth gear member 1353 With reference to.When operator rotates the first drive link 150 through control handle 121, bevel gear 151 can rotate and with moving gear 152 and preceding bevel gear bar 135, preceding bevel gear bar 135 can be further driven to sample stage 132, rotate sample stage 132.Its In, ceramic jacket 1350, which has, makes preceding bevel gear bar 135 rotate more smoothly efficiency, while the knot of ceramic jacket 1350 and spring 1352 Structure enables sample stage 132 to be smoothly heated or cooled.Specifically, when heated, sample stage 132 be not with specimen holder 131 contacts, and when cooled, sample stage 132 is in contact with specimen holder 131, wherein, manipulator is through umbrella before rotating Rack 135 controls whether spring 1352 pushes away specimen holder 131 by sample stage 132.Specifically, as shown in Figure 5A, when When first drive link 150 touches rear bevel gear bar 154 and continues to move down, because corresponding inclined-plane, rear bevel gear bar 154 understand pushing of being turned right, and can push preceding bevel gear bar 135 inside toward the rear bevel gear bar 154 moved right, then preceding umbrella Sample stage 132 can be pushed away specimen holder 131 by rack 135.In addition, as it was previously stated, operator can pass through manipulation control handle 125 move up and down the first drive link 150, therefore operator also can separate bevel gear 151 and rear bevel gear bar 154.

Embodiment and mode of operation through the above are understood, when the sample adjustment controller 1 of the present invention has with first wave During the drag articulation portion 14 of the bellows 142 of line pipe 141 and second composition, sample portion 13 can be made to carry out the motion in one-dimensional square. Specifically, illustrating with Fig. 1 and Fig. 2A, set coordinate system, make whole sample adjustment controller 1 be it is parallel with Z-direction, The normal of the sample stage 132 in sample portion 13 is parallel with Y direction simultaneously.In fig. 2, passed when operator rotates second During lever 155, travelling gear 157 can be driven and make clockwise or counterclockwise.When travelling gear 157 turns clockwise When, the joint of the first bellows 141 and the second bellows 142 can move toward the direction away from driving section 15, while make sample The inverse time needle shaft that portion 13 carries out centered on rotating shaft 136 turns.Conversely, when the travelling gear 157 in Fig. 2A makees rotate counterclockwise, The joint of first bellows 141 and the second bellows 142 can move toward close to the direction of driving section 15, while make sample portion 13 The up time needle shaft centered on rotating shaft 136 is carried out to turn., it is clear that now sample portion 13 is the one-dimensional of the parallel Y-Z plane of progress Motion, it may also be said to which sample portion 13 is the R3 directions motion in X-axis.Such structure operation get up it is very convenient, and because Simple for mechanism, cost cheaply also allows for repairing.

Then, the first bellows 141 and the second bellows 142 are included when the sample adjustment controller 1 of the present invention has Drag articulation portion 14, and further connection one has the flapping articulation portion 17 of middle shaft gear 171 on center-pole 16, and first passes When having the gear 152 of shaft gear 171 in driving in lever 150, sample portion 13 can be made to carry out the motion on two-dimensional directional；Specifically , shaft gear 171 in being driven when operator's the first drive link 150 of rotation, drag articulation portion 14 and sample portion 13 can be made in Z axis Upper rotation, that is, sample portion 13 is moved along R1 directions, or that change 13 position on an x-y plane of sample portion, together When in the first bellows 141 in particular range and the second bellows 142 sample portion 13 is carried out using X as on axle center as kinetic energy Rotary motion.Then such structure can make sample portion 13 using X, Z to be rotated in the dimension of two, axle center etc..Equally , such structure operation get up it is very convenient, and because mechanism it is simple, cost cheaply also allow for repairing.

Followed by when the sample adjustment controller 1 of the present invention includes having the first bellows 141 and the second bellows 142 Drag articulation portion 14, the flapping articulation portion 17 with middle shaft gear 171, be connected with specimen holder 131 and with specimen holder 131 During the bevel gear group that the sample portion 13 of sample stage 132 and drive sample stage 132 move, this sample stage 132 can carry out three The rotary motion of the individual free degree.Specifically, illustrating with Fig. 1 and Fig. 2A, coordinate system is set, makes whole sample adjustment control Device 1 is parallel with Z-direction, while the normal of the sample stage 132 in sample portion 13 is parallel with Y direction.In fig. 2, When operator rotates the second drive link 155, travelling gear 157 can be driven and make clockwise or counterclockwise, to work as transmission When gear 157 turns clockwise, the joint of the first bellows 141 and the second bellows 142 can be toward remote driving section 15 Direction is moved, while the inverse time needle shaft for making sample portion 13 carry out centered on rotating shaft 136 turns.Conversely, when the driving cog in Fig. 2A When wheel 157 makees rotate counterclockwise, the joint of the first bellows 141 and the second bellows 142 can be toward close to the side of driving section 15 To movement, while the up time needle shaft for making sample portion 13 carry out centered on rotating shaft 136 turns, and can then change sample portion 13 in Y-axis On position, it may also be said to be the position for changing sample portion 13 on Y-Z plane, that is, moved on R3 directions.As Fig. 1, Shown in Fig. 2A and Fig. 5 A, when operator makes the bevel gear 151 of the first drive link 150 be contacted with bevel gear bar 152 and rotates first Drive link 150, bevel gear bar 135 and then drive sample stage 132, make sample stage 132 be rotated in Y-axis before just driving, That is, moved along R2 directions.When operator makes the gear 152 of the first drive link 150 contact and turn with middle shaft gear 171 Dynamic first drive link 150, shaft gear 171 and then drag articulation portion 14 and sample portion 13 is driven to be rotated on Z axis in just driving, Even if also drag articulation portion 14 and sample portion 13 are moved along R1 directions, move on an x-y plane in other words.Therefore, by By inventive samples adjustment controller 1 by drag articulation portion 14, flapping articulation portion 17, driving section 15 and sample portion 13 by above-mentioned After combination and operation so that the sample stage 132 in sample portion 13 can be transported in X-Y plane, Y-Z plane, Z-X planes respectively It is dynamic, therefore the motion of three degree of freedom can be made altogether, and structure very simple proposed by the invention, component is also few, because This sample adjustment controller 1 easily can be operated and safeguarded.

Described in brought forward section, sample of the invention adjusts controller 1 it is further proposed that being used as the material in sample portion 13 using oxygen-free copper Matter.Specifically, the good heat conductivity of oxygen-free copper and do not have magnetic, the material using oxygen-free copper as specimen holder 131 then can be saturating The mode for crossing the filling liquid gas in specimen holder 131 to cool to sample stage 132 and its sample of carrying, without because of sample The capacity of heat transmission of product seat 131 is bad and influences cooling, and the material stainless steel of the thermal coefficient of expansion of oxygen-free copper and the second bellows 142 Expansion coefficient similar, when changing temperature, original paper joint is not easy make the bellows of specimen holder 131 and second because expanding with heat and contract with cold Occurring gap between 142 influences vacuum.In addition, outer except that need to be measured in low temperature environment, when sample stage 132 need heating but When temperature is not high, it also is adapted for being used as its material using oxygen-free copper.Meanwhile bellows structure of the invention is when temperature changes, equally The space of contraction or expansion can be also provided, avoid the engagement between other structures from gap occur.In addition, in the present invention, sample The joint of the bellows 142 of specimen holder 131 and second in portion 13 has used knife edge structure, and the mode to connect can be negative and positive spiral shell The combination of line, it is such to design the adaptation for adding inter-module, and be easy to dismount and reuse.In addition, in the present invention, Specimen holder 131 can separate with sample stage 132, therefore user can select different sample stages according to different demands 132, for example, anaerobic sample stage 132 made of copper is selected when needing good thermal conductivity, when needing sample being heated to high temperature From heat-resisting preferably stainless steel sample stage 132.

In summary, sample adjustment controller 1 of the invention can carry out the motion of three degree of freedom, and as shown in fig. 6, After sample adjustment controller 1 is further combined with X-Y-Z linear stages 22, the motion of six-freedom degree can be carried out, specifically For, X-Y-Z linear stages 22 can be such that the sample adjustment controller 1 of device is wherein carried out respectively on X-axis, Y-axis or Z axis Linear movement, along with sample adjustment controller 1 itself can make sample portion 13 in X-Y plane, Y-Z plane and Z-X planes Motion, can be such that sample portion 13 is moved in six dimensions altogether.

It is that inventive samples adjustment controller applies to photoelectron spectroscopy equipment schematic diagram please continue to refer to Fig. 6.Photoelectron Power spectrum equipment 2 includes system microscope carrier 20 and sample adjustment controller 1, has on system microscope carrier 20 X-Y-Z linearly to move microscope carrier 22, true Cavity 24 and electron energy analytical equipment 28, and X-Y-Z linearly moves being connected with vacuum chamber 24 for microscope carrier 22, electron energy analysis Device 28 is then connected with photoelectricity subchannel 280 with vacuum chamber 24, when in use, sample adjustment controller 1 is carried into sample juxtaposition Enter among X-Y-Z linearly moves microscope carrier 22, now, carrying the sample portion 13 of sample can be located among vacuum chamber 24, vacuum chamber 24 On have multiple ports 26, port 26 be connect in vacuum using various measurement apparatus；Operated in photoelectron spectroscopy equipment 2 When, device for vacuum generation can allow in vacuum chamber 24 state for forming ultrahigh vacuum, and then excitation source 29 is via device interface 26 Squeeze among vacuum chamber 24, when excitation source 29, such as：Vacuum ultraviolet, X ray, play the sample in sample adjustment controller 1 When upper, sample can be made to produce photoelectron, photoelectron can enter electron energy analytical equipment 28, and operator just can be by electron energy Analytical equipment 28 reads the Electronic Structure of sample.Because the photoelectron spectroscopy equipment 2 of the present embodiment is using the present invention Sample adjusts controller 1, so that the position in sample portion 13 can be adjusted, so that the excitation source 29 in vacuum chamber 24 is got to There is suitable incidence angle when on sample, and also can adjust controller 1 via sample and sample is heated or cooled, change the bar of measurement Part；Such photoelectron spectroscopy equipment 2 is all to be rotated by rotating shaft of sample, therefore when changing the position in sample portion 13 The position substantial deviation of sample will not be made because of rotation.

In addition, under other implementation states, sample of the invention adjustment controller 1 may be also used in scanning electron and show On micro mirror.Fig. 7 is refer to, is that inventive samples adjustment controller applies to sweep electron microscope schematic diagram.Such as Fig. 7 institutes Show, sweep electron microscope 3 has electron source 30, microscope body 31, object lens light bar 32, object lens 34, vacuum chamber 36 and sample Product adjust controller 1.Wherein, electron source 30, object lens light bar 32 and object lens 34 are installed on microscope body 31, and electron source 30 face object lens 34, some that microscope body 31 has the one end of object lens 34 enters among vacuum chamber 36, and makes object lens 34 just Controller 1 is adjusted to sample.When in use, sweep electron microscope 3 adjusts controller 1 to carry sample 38 using sample, One end of the carrying sample 38 of sample adjustment controller 1 and sample 38 are equally placed in the vacuum chamber 36 of sweep electron microscope 3 Among, wherein, electron source 30 can send electron beam and get on sample 38, and the electronics of reflection is reflected to object lens light via object lens 34 Column 32, object lens light bar 32 is again by the electronic home of reflection to imaging system, and then operator can be through imaging system observation sample 38 microstructure, and controller 1 is adjusted to change the position of sample 38 through sample, to change the scope of observation.

Described before comprehensive, sample adjustment controller 1 of the invention can operate in the environment of high vacuum, the method used be by Part of the control unit below 12 all inserts vacuum chamber, and operator adjusts sample through the control handle 121 outside vacuum chamber The position in product portion 13；Sample adjustment controller 1 is not limited to use among photoelectron spectrograph and sweep electron microscope, Also the instrument operated in other needs in vacuum environment, such as other kinds of surface analysis apparatus can be applied.

The sample adjustment controller 1 of the present invention is except that can realize that the sample of three degree of freedom adjusts, moreover it is possible to further and X- Y-Z linear stages 22 realize the sample adjustment of six-freedom degree, and when being rotated, all it is to be used as with the central shaft of sample Rotary shaft, therefore be a good equipment when surface analysis is tested.

The sample adjustment controller 1 of the present invention, edge of a knife knot is introduced at the position that specimen holder 131 engages with drag articulation portion 14 Structure, and the material using oxygen-free copper as specimen holder 131, make adaptation and the good capacity of heat transmission that specimen holder 131 has had, entering When row sample needs the measurement being heated or cooled, experimental result will not be influenceed because adaptation is bad.

To sum up, the present invention is encyclopaedized by the above embodiments and change case.However, the technology of this area Personnel are it will be appreciated that embodiment all in the present invention is merely illustrative rather than is restricted herein, that is to say, that not Depart from true spirit and within the scope of, based on it is described above and sample adjustment controller and preparation method thereof it is other Change case and fixed case are that the present invention is covered, and the present invention is defined by appended patent claim.

Claims (8)

1. a kind of sample adjustment controller with three degree of freedom, it is characterised in that including such as lower component：

One control unit (12), multiple control handles (121/123/125) are configured with thereon；

One center-pole (16), its one end and the control unit (12) connection；

One flapping articulation portion (17), it has a vertical axis of rotation (172), one end configuration one of the vertical axis of rotation (172) Rotating shaft (173), connected by the rotating shaft (173) with the other end of the center-pole (16), and the vertical axis of rotation (172) Shaft gear (171) in being arranged with one；

One drag articulation portion (14), its one end are fixedly connected with the other end of the vertical axis of rotation (172), the drag articulation Portion (14) be by one first bellows (141) and one second bellows (142) concatenation form, first bellows (141) and Second bellows (142) junction and a travelling gear (157) connect；

One sample portion (13), positioned at the bottom of sample adjustment controller (1), there is a specimen holder (131) and a sample to carry Platform (132), the specimen holder (131) connect with the other end of the drag articulation portion (14), and the sample stage (132) is located at The outer surface of the specimen holder (131), and before having one bevel gear bar (135) through the specimen holder (131) outer surface, And connect with the sample stage (132)；And

One driving section (15), there is one first drive link (150) and one second drive link (155), first drive link (150) And second drive link (155) all has one of one end and the control handle (121/123/125) to connect, described One drive link (150) is arranged with a gear (152), and the other end of first drive link (150) is configured with a bevel gear (151), the other end of second drive link (155) is arranged with a worm screw (156), the worm screw (156) and the transmission Gear (157) connects, and multiple gear tooths (1571) of the worm screw (156) and the travelling gear (157) engage；

Wherein, the rotation of second drive link (155) can drive first bellows (141) and second bellows (142) deformation, it is further driven to the sample portion (13) and rotates.

2. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that the specimen holder (131) further there is an accommodation space (130) in, and the accommodation space (130) and first bellows (141) and described Second bellows (142) connects.

3. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that second bellows (142) and the specimen holder (131) junction has a prominent edge structure (1421).

4. the sample adjustment controller with three degree of freedom as claimed in claim 3, it is characterised in that the specimen holder (131) and there are blade interface (1311) corresponding to one second bellows (142) joint, when second bellows (142) when and the specimen holder (131) connects, the edge structure (1421) is placed in the blade interface (1311).

5. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that second bellows (142) and the specimen holder (131) is engaged each other with helicitic texture.

6. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that the specimen holder (131) it is integrally formed.

7. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that the sample stage (132) chilling temperature reaches subzero 170 degrees Celsius.

8. the sample adjustment controller with three degree of freedom as claimed in claim 1, it is characterised in that the sample stage (132) heating-up temperature is up to more than 800 degrees Celsius.