CN105452829B - Pressure sensor for power detection - Google Patents
Pressure sensor for power detection Download PDFInfo
- Publication number
- CN105452829B CN105452829B CN201480046218.9A CN201480046218A CN105452829B CN 105452829 B CN105452829 B CN 105452829B CN 201480046218 A CN201480046218 A CN 201480046218A CN 105452829 B CN105452829 B CN 105452829B
- Authority
- CN
- China
- Prior art keywords
- pressure sensor
- measurement
- capacitor
- polarized
- load signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000001514 detection method Methods 0.000 title description 3
- 238000005259 measurement Methods 0.000 claims abstract description 42
- 239000003990 capacitor Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 15
- 230000005621 ferroelectricity Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 2
- 230000001225 therapeutic effect Effects 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
Abstract
The present invention relates to it is a kind of for using pressure sensor made of the material by piezoelectricity come the method, apparatus and purposes of measuring force.In order to enable not needing charge amplifier for measurement and minimizing measuring system generally, it is proposed that using the variation of the capacitor of pressure sensor to be used for power measurement.
Description
Technical field
The present invention relates to it is a kind of for using pressure sensor made of the material by piezoelectricity come the method, apparatus of measuring force
And purposes.
Background technique
The prior art is to determine power by the charge incuded, as this is for example in Quartz Force meter and piezoelectric sensing
It is such situation in device.To this, charge amplifier is necessary for the assessment in measuring technique.
Summary of the invention
Task of the invention lies in such improvement is using pressure sensor made of the material by piezoelectricity come the side of measuring force
Method, i.e., so that not needing charge amplifier for measurement and minimizing measuring system generally.
The task solves by the following method according to the present invention: using the variation of the capacitor of the pressure sensor to be used for power
Measurement, wherein the measurement of power is simultaneously using polarized pressure sensor and using the progress of non-polarised pressure sensor and by two
The capacitor of a pressure sensor is conveyed to the connection on the electrotechnics in assessment unit.
By using the variation of the capacitor of pressure sensor to be measured for power, so that not needing charge for measurement
Amplifier and thus minimize measuring system generally.
For exclusive PCR amount, advantageously according to locking means (Lock-In-Verfahren) in some measurement frequency
Carry out the measurement of capacitor.Preferably measurement frequency is between 800Hz and 1.2kHz, particularly preferably place is at 1kHz.
Pressure sensor according to the present invention for executing the method just described is outstanding in the following manner, i.e., preferably
The material of ground piezoelectricity be it is hard, that is, have 200 to 2000, particularly preferably the high mechanical product in 400 to 1200 range
Matter (sometimes referred to as quality factor) and have at room temperature > 1.5kV/mm preferably > the high coercive field strength of 2kV/mm.
Pressure sensor can be polarized or non-polarised.Polarized pressure sensor provides the advantage that, passes through arteries and veins
Starting is brought to measure and therefore save on energy.Polarized pressure sensor has the more precipitous rising of capacitor.It is non-polarised
Pressure sensor has obvious linear process from some starting load (referring to Fig. 5).Therefore polarized pressure sensing utensil
There are the advantage of simpler power detection and the advantage that non-polarised pressure sensor is determining with more accurate power.For capacitor
For the power measurement of formula it is contemplated that on the electrotechnics for passing through the pressure sensors of two types connecting piece (Verkn ü pfung,
Sometimes become arithmetic unit) combine two effects.
Therefore it is carried out simultaneously when the measurement of power while using polarized pressure sensor and using non-polarised pressure sensor
And the capacitor of two pressure sensors is advantageous when being supplied to the connecting piece on electrotechnics.
Preferably pressure sensor be the edge with chamfering circular platelet.
Preferably measuring signal is transmitted wirelessly at assessment unit.
Pressure sensor used according to the invention is for for application measurement load signal medically or for being
Industrial application measurement load signal or for for consumer's application measurement load signal or for for automobile
Application measurement load signal.
Therefore pressure sensor of the measuring principle based on measurement made of the material of piezoelectricity by pressure by load
Capacitor.The compression of the pressure sensor of piezoelectricity is caused in the case where pressure load and thus causes changing for capacitor
Become.In this regard it can determine that the power applied in the case where load more precisely says pressure according to the capacitor of measurement (referring to Fig. 1).
Capacitance variations are composed of the share of ferroelectricity and the share of geometry, and wherein share, that is, dielectric constant variation of ferroelectricity accounts for mainly
Part and determining signal strength.
Charge amplifier is unwanted in the case where direct capacitive power measurement, thus can realize measuring system
Apparent miniaturization.
Due to the conducting power (referring to fig. 2) of material and due to hysteresis effect when with piezoelectric effect (referring to Fig. 3)
And it loses.The measurement of capacitor is according to locking means preferably between 800Hz and 1.2kHz, particularly preferably
It is carried out in the case where some measurement frequency at 1kHz, thereby eliminates other interference volumes.
The soft material of ferroelectricity can not only be used for sensor and is able to use the hard material of ferroelectricity.
The test of execution can confirm out for the material for hard piezoelectricity application pressure and measurement capacitor it
Between better linear characteristic.
The material of hard piezoelectricity is understood as that with the high machine in 200 to 2000, preferably 400 to 1200 range
The material of tool quality, these materials have in the case where room temperature > 1.5kV/mm preferably > coercive field strength of 2kV/mm.
Furthermore sensitivity is significantly larger (referring to fig. 4) in the case where hard piezoelectric ceramics.It thereby is achieved simpler
The advantages of single ground measuring technique Shangdi determines load.
Polarized pressure sensor is used for purposes, because passing through that simultaneously provides such feasibility
Pulse come start measure and therefore save on energy.It however still can also be using non-polarised pressure sensor to be used for
Pure capacitance measurement.Polarized pressure sensor has the more precipitous rising of capacitor, and for non-polarised pressure sensor
For obvious linear process is obtained from some starting load (referring to Fig. 5).Therefore polarized pressure sensor has more
The advantage that there is the advantage and non-polarised pressure sensor that simple power detects more accurate power to determine.For capacitive
It is contemplated that combining two effects by the connecting piece on the electrotechnics of the pressure sensor of two types for power measurement.
The design of pressure sensor can be carried out for example with the shape of circular platelet.Use the pressure at the edge with chamfering
Force snesor has the intensity of raising in the case where pressure load.By selecting hard piezoelectric ceramics that can realize in load
Linear relationship between the capacitor of measurement.
The invention particularly relates to:
Pressure sensor for measuring force, which is characterized in that in order to which power measurement carrys out the variation using dielectric constant.
Pressure sensor for measuring force, which is characterized in that the material used is piezoelectricity/ferroelectricity and power becomes
Change and promotes polarization to change and thus can measure the variation of dielectric constant.
Pressure sensor for measuring force, which is characterized in that using the material of polarized ferroelectricity, to realize charge
It generates.
For the pressure sensor of measuring force, which generates to start by means of the charge in loading
Circuit (" trigger signal ") for measurement.Circuit is placed in stop phase to save energy before loading.
For the pressure sensor of measuring force, it is made of non-polarised piezoelectric ceramics for preferably measurement load letter
Number.
Being combined with polarized ferroelectric made of same or different material and non-polarised ferroelectric, with
Just measurement is decoupled with " trigger signal ".
System, the system is characterized in that, it is influenced to eliminate temperature and other environment, same or different class
The component holding of the other ferroelectricity of the one or more of type is not loaded.Capacitor by measuring the component not loaded can disappear
Except for example temperature influences.
For the system for application measurement load signal medically.
For the system for industrial application measurement load signal.
For the system for consumer's application measurement load signal.
System for the application measurement load signal for automobile.
System, the system is characterized in that, the necessary energy for measurement is generated by means of polarized ferroelectric
(energy harvesting).
System, the system is characterized in that, measuring signal is transmitted wirelessly at assessment unit.
The present invention is further described below as example.
Example:
Load cell medically
The application is the measuring system medically for recording (such as foot) load of limbs.Pressure sensor position
Under foot and detects the power occurred when to foot loading and send storage Jie by being wirelessly connected for the power
At matter.By the cognition of static and dynamic capacitive power measurement and exclusive PCR amount (such as such as temperature) the case where
It is lower that monitoring therapeutic advance can be achieved.It is also possible that carrying out therapeutic intervention process according to measurement data.(referring to Fig. 6).
Claims (10)
1. it is a kind of for using pressure sensor made of the material by piezoelectricity come the method for measuring force, which is characterized in that use
The variation of the capacitor of the pressure sensor to be measured for power, wherein the measurement of power simultaneously using polarized pressure sensor and
It is carried out using non-polarised pressure sensor and the capacitor of two pressure sensors is conveyed to the electrician in assessment unit
Technical connecting piece.
2. the method according to claim 1, wherein the measurement of the capacitor is according to locking means in some measurement
It is carried out in the case where frequency.
3. according to the method described in claim 2, it is characterized in that, the measurement frequency is between 800Hz and 1.2kHz.
4. a kind of pressure sensor for measuring force for executing according to the method in any one of claims 1 to 3,
It is characterized in that, the material of piezoelectricity be it is hard, that is, have high mechanical quality factor in 200 to 2000 range and
There is > the coercive field strength of 1.5kV/mm in the case where room temperature.
5. pressure sensor according to claim 4, which is characterized in that the pressure sensor is polarized or non-polarized
's.
6. pressure sensor according to claim 4 or 5, which is characterized in that the pressure sensor is with chamfering
The circular platelet at edge.
7. pressure sensor according to claim 4 or 5, which is characterized in that it is single that measuring signal is transmitted wirelessly to assessment
At member.
8. pressure sensor according to claim 4, which is characterized in that the high mechanical quality factor 400 to
In 1200 range.
9. pressure sensor according to claim 4, which is characterized in that the coercive field strength > 2kV/mm.
10. a kind of purposes of the pressure sensor according to any one of claim 4 to 9, in order to medically
Using measurement load signal, or for for industrial application measurement load signal or for being surveyed for consumer's application
Measure load signal or for the application measurement load signal for automobile.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013216402 | 2013-08-19 | ||
| DE102013216402.5 | 2013-08-19 | ||
| PCT/EP2014/067576 WO2015024906A1 (en) | 2013-08-19 | 2014-08-18 | Pressure sensor for detecting force |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105452829A CN105452829A (en) | 2016-03-30 |
| CN105452829B true CN105452829B (en) | 2019-06-18 |
Family
ID=51357949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480046218.9A Active CN105452829B (en) | 2013-08-19 | 2014-08-18 | Pressure sensor for power detection |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10031034B2 (en) |
| EP (1) | EP3036514B1 (en) |
| JP (1) | JP6530398B2 (en) |
| CN (1) | CN105452829B (en) |
| DE (1) | DE102014216359A1 (en) |
| DK (1) | DK3036514T3 (en) |
| WO (1) | WO2015024906A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4216403A (en) * | 1977-07-27 | 1980-08-05 | Hans List | Monoaxially oriented piezoelectric polymer transducer for measurement of mechanical values on bodies |
| DE102008002925A1 (en) * | 2007-11-12 | 2009-05-28 | W. Zimmermann Gmbh & Co. Kg | Sensor system for determining pressure/expansion acting on a flat material has a surface structure arranged in connection with a flat material |
| CN101512311A (en) * | 2006-08-31 | 2009-08-19 | 韩国标准科学研究院 | Tactile sensor for curved surfaces and manufacturing method thereof |
| CN102636297A (en) * | 2012-04-20 | 2012-08-15 | 合肥工业大学 | Three-dimensional force sensor |
| CN102840937A (en) * | 2011-06-24 | 2012-12-26 | 日本电波工业株式会社 | External force detection apparatus and external force detection sensor |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5347870A (en) * | 1992-01-29 | 1994-09-20 | State University Of New York | Dual function system having a piezoelectric element |
| US5268611A (en) * | 1992-03-16 | 1993-12-07 | Rockwell International Corporation | Anisotropic transducer |
| JP3525400B2 (en) * | 1995-10-17 | 2004-05-10 | Ｎｅｃトーキン株式会社 | Force detector |
| JPH11163668A (en) * | 1997-11-28 | 1999-06-18 | Matsushita Electric Ind Co Ltd | Laminated piezo-electric single crystal substrate and piezo-electric device using it |
| JP3032761B1 (en) * | 1998-09-04 | 2000-04-17 | ティーディーケイ株式会社 | Piezoelectric ceramics |
| JP4141061B2 (en) * | 1999-07-16 | 2008-08-27 | Ｎｅｃトーキン株式会社 | Load transducer |
| JP3879591B2 (en) * | 2001-06-11 | 2007-02-14 | 株式会社デンソー | Piezoelectric actuator and driving method thereof |
| DE10225704A1 (en) | 2001-06-11 | 2003-01-23 | Denso Corp | Piezoelectric actuator and method for driving it |
| JP3729781B2 (en) * | 2001-12-27 | 2005-12-21 | 株式会社鈴木 | Actuator control method |
| JP3641470B2 (en) * | 2002-07-12 | 2005-04-20 | 株式会社鈴木 | Actuator load detection method |
| JP2004226294A (en) * | 2003-01-24 | 2004-08-12 | Matsushita Electric Ind Co Ltd | Static and dynamic pressure detection sensor |
| DE102007005222A1 (en) * | 2006-02-03 | 2007-08-09 | Ceramtec Ag Innovative Ceramic Engineering | Use of piezoceramic transducers to control the machining of workpieces |
| US20070188053A1 (en) * | 2006-02-14 | 2007-08-16 | Robert Bosch Gmbh | Injection molded energy harvesting device |
| EP2099082B1 (en) * | 2008-03-05 | 2014-05-07 | NGK Spark Plug Co., Ltd. | Piezoceramic material, piezoelectric element and non-resonance knock sensor |
| US7938074B2 (en) * | 2009-01-22 | 2011-05-10 | Deere & Company | Pressure sensing system for a planter |
-
2014
- 2014-08-18 DK DK14752630.5T patent/DK3036514T3/en active
- 2014-08-18 WO PCT/EP2014/067576 patent/WO2015024906A1/en active Application Filing
- 2014-08-18 CN CN201480046218.9A patent/CN105452829B/en active Active
- 2014-08-18 EP EP14752630.5A patent/EP3036514B1/en active Active
- 2014-08-18 DE DE102014216359.5A patent/DE102014216359A1/en not_active Withdrawn
- 2014-08-18 JP JP2016535449A patent/JP6530398B2/en active Active
- 2014-08-18 US US14/912,793 patent/US10031034B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4216403A (en) * | 1977-07-27 | 1980-08-05 | Hans List | Monoaxially oriented piezoelectric polymer transducer for measurement of mechanical values on bodies |
| CN101512311A (en) * | 2006-08-31 | 2009-08-19 | 韩国标准科学研究院 | Tactile sensor for curved surfaces and manufacturing method thereof |
| DE102008002925A1 (en) * | 2007-11-12 | 2009-05-28 | W. Zimmermann Gmbh & Co. Kg | Sensor system for determining pressure/expansion acting on a flat material has a surface structure arranged in connection with a flat material |
| CN102840937A (en) * | 2011-06-24 | 2012-12-26 | 日本电波工业株式会社 | External force detection apparatus and external force detection sensor |
| CN102636297A (en) * | 2012-04-20 | 2012-08-15 | 合肥工业大学 | Three-dimensional force sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016528511A (en) | 2016-09-15 |
| EP3036514A1 (en) | 2016-06-29 |
| US10031034B2 (en) | 2018-07-24 |
| WO2015024906A1 (en) | 2015-02-26 |
| US20160195439A1 (en) | 2016-07-07 |
| DK3036514T3 (en) | 2018-07-23 |
| EP3036514B1 (en) | 2018-04-11 |
| CN105452829A (en) | 2016-03-30 |
| DE102014216359A1 (en) | 2015-02-19 |
| JP6530398B2 (en) | 2019-06-12 |
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