CN105449931B - A kind of planar motor - Google Patents
A kind of planar motor Download PDFInfo
- Publication number
- CN105449931B CN105449931B CN201410429585.9A CN201410429585A CN105449931B CN 105449931 B CN105449931 B CN 105449931B CN 201410429585 A CN201410429585 A CN 201410429585A CN 105449931 B CN105449931 B CN 105449931B
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- pcb
- circuit board
- printed circuit
- coldplate
- planar motor
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Abstract
The present invention discloses a kind of planar motor, and the planar motor includes：Marble base, printed circuit board (PCB) (PCB) coil plate and magnetic steel array mover platform, it is characterised in that：Also include a cooling device, the coldplate is arranged between the printed circuit board (PCB) (PCB) coil plate and the magnetic steel array mover platform, the coldplate is made of by way of covering on pcb board, metal material constructs cooling pipe pattern, and cooling liquid is circulated in the cooling pipe to be radiated to the printed circuit board (PCB) (PCB) coil plate.Planar motor proposed by the present invention with cooling device can be effectively improved the heat dissipation problem of printed circuit board (PCB) (PCB) coil plate, reduce the surface temperature of printed circuit board (PCB) (PCB) coil plate.
Description
Technical field
The present invention relates to a kind of planar motor with cooling device.
Background technology
Levitation planar motor has structure light as a kind of motor that can be directly realized by space multiple degrees of freedom compound motion
Just, control circuit is simple, can be achieved at a high speed, the control of high-precision space tracking the features such as, start to be applied to photo-etching machine work-piece platform
Field.According to the difference of mover, moving winding and moving magnet planar motor can be divided into again；The mover of moving-wire ring type planar motor uses
Coil winding forms, and stator uses magnetic steel array；And the mover of moving magnet planar motor is made up of magnetic steel array, and stator uses
Coil is made.On the basis of traditional coil winding mode, began one's study in recent years using printing board PCB making sheet technology
To make coil, with this PCB forms Coil technique it is progressively ripe, in face of the requirement of motor more high thrust, especially
For moving-magnet planar motor, the area of PCB coil is larger, when passing through high current for a long time, this printed circuit board (PCB)
(PCB) surface temperature of coil plate is higher, it is necessary to consider heat dissipation problem.
It is existing using printed circuit board (PCB) (PCB) coil plate as the moving magnet planar motor structure of stator as shown in figure 1, including print
Printed circuit board (PCB) coil plate 101, magnetic steel array mover platform 102 and marble base 103.Printed circuit board (PCB) (PCB) coil
The electric current that plate 101 typically passes through is smaller, does not account for the heating problem of printed circuit board (PCB) (PCB) coil plate 101.But work as PCB
For the coil of form when long-time leads to larger electric current, coil pcb board surface temperature is higher, influences whether whole litho machine
Environment temperature so that having influence on the subsystems such as the interferometer measurement of litho machine, focusing and leveling and exposure.
The content of the invention
It is an object of the invention to propose it is a kind of with cooling device using printed circuit board (PCB) (PCB) coil plate as stator
Moving magnet planar motor, the heat dissipation problem of printed circuit board (PCB) (PCB) coil plate is effectively improved, reduces printed circuit board (PCB) (PCB) line
The surface temperature of girth sheets.
The present invention discloses a kind of planar motor, and the planar motor includes：Marble base, printed circuit board (PCB) (PCB) line
Girth sheets and magnetic steel array mover platform, it is characterised in that：Also include a cooling device, the coldplate is arranged at the printing
Between circuit board (PCB) coil plate and the magnetic steel array mover platform, the coldplate is by covering metal material on pcb board
The mode that material constructs cooling pipe pattern is made, and cooling liquid circulates with to the printed circuit board (PCB) in the cooling pipe
(PCB) coil plate is radiated.
Further, the coldplate includes upper and lower two layers of PCB substrate, inlet opening and fluid hole, described upper and lower two layers
Cooling pipe is set between PCB substrate.
Further, lower floor's PCB substrate is directly produced on the printed circuit board (PCB) through PCB manufacture crafts
(PCB) in coil plate.
Further, it is added with heat-conducting glue between the coldplate and the printed circuit board (PCB) (PCB) coil plate.
Further, the coldplate inlet opening, fluid hole respectively with feed liquor part and to go out liquid part corresponding, it is described enter
Liquid part and go out liquid part and combined by way of screw is fixed and sealing ring seals with the coldplate.
Further, it is characterised in that：The material of the coldplate is non-magnet_conductible material.
The present invention also proposes a kind of preparation method for the coldplate being applied in above-mentioned planar motor, it is characterised in that including：
First PCB substrate is provided, made in carrying out the first cooling pipe pattern in first PCB substrate；
Second PCB substrate is provided, and the making of the second cooling pipe pattern is carried out in the second PCB substrate；
First PCB substrate is set to weld together with the second PCB substrate so that the first, second cooling pipe pattern
Stacking forms cooling pipe.
Further, first PCB substrate is patterned copper layer, and the patterned copper layer is straight through process for copper is covered
Connect to be formed in the printed circuit board (PCB) (PCB) coil plate.
Planar motor proposed by the present invention with cooling device can be effectively improved printed circuit board (PCB) (PCB) coil plate
Heat dissipation problem, reduce the surface temperature of printed circuit board (PCB) (PCB) coil plate.
Brief description of the drawings
It can be obtained further by following detailed description of the invention and institute's accompanying drawings on the advantages and spirit of the present invention
Solution.
Fig. 1 is the existing moving magnet planar motor structural representation using printed circuit board (PCB) (PCB) coil plate as stator；
Fig. 2 is the planar motor structural representation that the present invention carries cooling device；
Fig. 3 and 4 is cooled plate of the present invention two layers of PCB substrate structural representation up and down；
For the present invention, two layers of PCB substrate synthesizes cooled plate structural representation to Fig. 5 up and down；
Fig. 6 is cooling device structural representation of the present invention；
Fig. 7-12 is water channel arrangement schematic diagram in water cooling plant of the present invention.
Embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
As shown in Fig. 2 planar motor of the present invention with cooling device includes：Marble base 103, printed circuit board (PCB)
(PCB) coil plate 101-1,101-2, magnetic steel array mover platform 102 and cooling device 104, cooling device 104 are arranged at print
Between printed circuit board (PCB) coil plate 101 and magnetic steel array mover platform 102.Printed circuit board (PCB) (PCB) coil plate 101-1 and
101-2 is arranged on above marble base 103, and printed circuit board (PCB) (PCB) coil plate 101-1 and 101-2 can control magnet steel battle array
The 6DOF motion of row mover module, and cooling device 104 is arranged on above printed circuit board (PCB) (PCB) coil plate 101-1, is used
To reduce the temperature of coil plate surface.
Cooling device 104 is cooled plate, and cooled plate includes upper and lower two layers of PCB substrate 201,202, inlet opening 203 and water outlet
Hole 204, water channel is set between upper and lower two layers of PCB substrate, as shown in Figures 3 and 4.Can be in printed circuit board (PCB) (PCB) coil plate
Directly construct water channel and form one layer of PCB substrate 201, with another layer of PCB substrate 202 by forming water channel among welding.Printing
The upper strata of circuit board (PCB) coil plate 101 forms the lower half of cooling water channel using copper 205 is covered, then on the top layer of PCB substrate 202
Cover the top half that copper 206 forms cooling water channel.Copper 205 will be covered and coat tin cream, covering copper 206 with the top layer of PCB substrate 202 is bonded at
Together, PCB substrate 201,202 is welded together by way of Reflow Soldering, the region can for not covering copper so is formed
The cooling water channel loop on coil plate top layer.Two layers of PCB substrate 201,202 can also be directly welded into one piece of cooled plate, then
Installed by way of locally bonding and the fastening of surrounding screw, as shown in Figure 5.And in cooled plate 104 and printed circuit board (PCB) (PCB)
Heat-conducting glue is added between coil plate 101-1.Water inlet member 207 and water outlet part 208 are fixed by screw and sealing ring seals
Mode and cooled plate be combined together to form the top layer water cooling plant of printed circuit board (PCB) (PCB) coil plate, as shown in Figure 6.It is cold
But the material of device 104 is non-magnet_conductible material.
The arrangement mode of water channel can be various in cooled plate, as shown in fig.7-12.
The preferred embodiment of the simply present invention described in this specification, above example is only illustrating the present invention
Technical scheme rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical scheme of experiment, all should be within the scope of the present invention.
Claims (8)
1. a kind of planar motor, the planar motor includes：Marble base, printed circuit board (PCB) (PCB) coil plate and magnet steel
Array mover platform, it is characterised in that：Also include a cooling device, the coldplate is arranged at the printed circuit board (PCB) (PCB)
Between coil plate and the magnetic steel array mover platform, the coldplate is to construct cooling by the metal material that covers on pcb board
The mode of pipeline pattern is made, and cooling liquid is circulated in the cooling pipe with to the printed circuit board (PCB) (PCB) coil plate
Radiated.
2. planar motor as claimed in claim 1, it is characterised in that：The coldplate includes upper and lower two layers of PCB substrate, feed liquor
Hole and fluid hole, it is described that cooling pipe is set between two layers of PCB substrate up and down.
3. planar motor as claimed in claim 2, it is characterised in that lower floor's PCB substrate is direct through PCB manufacture crafts
It is produced in the printed circuit board (PCB) (PCB) coil plate.
4. planar motor as claimed in claim 1, it is characterised in that：The coldplate and the printed circuit board (PCB) (PCB) line
Heat-conducting glue is added between girth sheets.
5. planar motor as claimed in claim 2, it is characterised in that：The coldplate inlet opening, fluid hole respectively with feed liquor
Part is corresponding with liquid part is gone out, the feed liquor part and go out liquid part screw fix and sealing ring seal by way of with it is described
Coldplate combines.
6. planar motor as claimed in claim 1, it is characterised in that：The material of the coldplate is non-magnet_conductible material.
7. a kind of preparation method for the coldplate being applied in the planar motor in claim 1-6 described in any claim, it is special
Sign is to include：
First PCB substrate is provided, made in carrying out the first cooling pipe pattern in first PCB substrate；
Second PCB substrate is provided, and the making of the second cooling pipe pattern is carried out in the second PCB substrate；
First PCB substrate is set to weld together with the second PCB substrate so that the first, second cooling pipe pattern stacks
Form cooling pipe.
8. the preparation method of coldplate as claimed in claim 7, it is characterised in that first PCB substrate is patterned copper layer, institute
Stating patterned copper layer is formed directly into the printed circuit board (PCB) (PCB) coil plate through covering process for copper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429585.9A CN105449931B (en) | 2014-08-28 | 2014-08-28 | A kind of planar motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429585.9A CN105449931B (en) | 2014-08-28 | 2014-08-28 | A kind of planar motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105449931A CN105449931A (en) | 2016-03-30 |
| CN105449931B true CN105449931B (en) | 2017-12-29 |
Family
ID=55559827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410429585.9A Active CN105449931B (en) | 2014-08-28 | 2014-08-28 | A kind of planar motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105449931B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1372784A (en) * | 1999-09-06 | 2002-10-02 | 索尼电脑娱乐公司 | Electronic device with heat generating parts and heat absorbing parts |
| CN1599226A (en) * | 2004-07-27 | 2005-03-23 | 西安交通大学 | Magnetic suspension planar electric machine |
| KR20080044574A (en) * | 2006-11-16 | 2008-05-21 | 두산인프라코어 주식회사 | A cooling device for linear motor |
| CN101707472A (en) * | 2009-11-27 | 2010-05-12 | 清华大学 | Power driving distribution method of moving iron type planar motor coil array |
| CN102781202A (en) * | 2011-04-13 | 2012-11-14 | Tm4股份有限公司 | Cooling device with bypass channel |
| CN202713114U (en) * | 2012-07-20 | 2013-01-30 | 上海微电子装备有限公司 | Magnetic suspension linear motor |
| CN203466756U (en) * | 2013-09-27 | 2014-03-05 | 清华大学 | Moving-coil magnetic-levitation planar motor with vacuum cover |
| CN104009586A (en) * | 2014-06-09 | 2014-08-27 | 清华大学 | Motor cooling heat dissipation structure |
-
2014
- 2014-08-28 CN CN201410429585.9A patent/CN105449931B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1372784A (en) * | 1999-09-06 | 2002-10-02 | 索尼电脑娱乐公司 | Electronic device with heat generating parts and heat absorbing parts |
| CN1599226A (en) * | 2004-07-27 | 2005-03-23 | 西安交通大学 | Magnetic suspension planar electric machine |
| KR20080044574A (en) * | 2006-11-16 | 2008-05-21 | 두산인프라코어 주식회사 | A cooling device for linear motor |
| CN101707472A (en) * | 2009-11-27 | 2010-05-12 | 清华大学 | Power driving distribution method of moving iron type planar motor coil array |
| CN102781202A (en) * | 2011-04-13 | 2012-11-14 | Tm4股份有限公司 | Cooling device with bypass channel |
| CN202713114U (en) * | 2012-07-20 | 2013-01-30 | 上海微电子装备有限公司 | Magnetic suspension linear motor |
| CN203466756U (en) * | 2013-09-27 | 2014-03-05 | 清华大学 | Moving-coil magnetic-levitation planar motor with vacuum cover |
| CN104009586A (en) * | 2014-06-09 | 2014-08-27 | 清华大学 | Motor cooling heat dissipation structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105449931A (en) | 2016-03-30 |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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