CN105445883A - Optical mirror frame device - Google Patents

Optical mirror frame device Download PDF

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Publication number
CN105445883A
CN105445883A CN201510306928.7A CN201510306928A CN105445883A CN 105445883 A CN105445883 A CN 105445883A CN 201510306928 A CN201510306928 A CN 201510306928A CN 105445883 A CN105445883 A CN 105445883A
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China
Prior art keywords
vibration absorber
stand
optical lens
dynamic vibration
cooling
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CN201510306928.7A
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CN105445883B (en
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高宏伟
许昌
韩琳
彭钦军
王耀华
薄勇
徐一汀
徐健
许家林
许祖彦
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Tongfang Zhongke chaoguang Technology Co.,Ltd.
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Technical Institute of Physics and Chemistry of CAS
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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The invention relates to the technical field of optical machines and provides an optical mirror frame device. The device comprises a mirror frame body, a cooling unit and a vibration absorption unit. The cooling unit comprises a cooling channel arranged in the mirror frame body. The vibration absorption unit is a power vibration absorber arranged in the cooling channel. The damping medium of the power vibration absorber is a cooling medium injected into the cooling channel. According to the invention, the power vibration absorber controls vibration, the initial amplitude of a main vibration system is small, and the interference of a vibration source is small. On the basis, the power vibration absorber is internally arranged in the cooling channel of the cooling unit, and the cooling medium in the cooling channel is used for heat dissipation of the mirror frame body and optical elements arranged on the mirror frame body, is also used as the damping medium of the power vibration absorber and is capable of cooling the power vibration absorber, so that the vibration absorption function and the cooling function are integrated on the basis that the complexity of the optical mirror frame structure is not enhanced, and the integration degree of the optical mirror frame is improved.

Description

A kind of stand for optical lens device
Technical field
The present invention relates to ray machine technical field, particularly relate to a kind of stand for optical lens device, is more specifically a kind of stand for optical lens device integrating absorbing and refrigerating function.
Background technology
Stand for optical lens is ingredient important in ray machine product, mainly solves clamping and the adjustment problem of optical element.In practical application, stand for optical lens, because being subject to the impact vibrated and heat is disturbed, can cause the position of clamped optical element to change, and heat interference simultaneously also can affect the related optical performance of optical element, as reflectivity and wavefront distortion etc.And the position of optical element and the change of optical property directly can have influence on the important parameters such as the beam-pointing of whole system, luminous power and beam quality in optical-mechanical system, change and seriously system even can be caused to run well.Therefore, how reducing stand for optical lens impact that is vibrated and hot interference is the important research topic of ray machine technical field.
The impact of stand for optical lens vibration mainly comes from ambient vibration, as water cooling unit pumping source, constructions work or underground traffic train etc.At present, in optical-mechanical system, mainly vibration isolation way is adopted for vibration control, such as vibration-proof rubber, hydraulic damping and air spring etc.Because vibration isolation way mainly adopts flexible member, though therefore the Oscillation Amplitude that causes of vibration source is by reducing gradually greatly, the amplitude at vibration initial stage is larger.On the other hand, stand for optical lens be heated that interference is mainly absorbed by the parasitic light in high power laser system, optical element absorbs, and temperature is high or change violent working environment etc. and cause.Therefore, temperature-controlled cooling device must be adopted to carry out temperature control cooling to stand for optical lens.For the high power optical-mechanical system operated in vibration environment, or the existing vibration of working environment, there is again temperature high or change the optical-mechanical system of violent feature, need to carry out vibrationproof and temperature control design respectively to system, thus make optical-mechanical system complex structure.
Dynamic vibration absorber is also known as tuned mass damper, its ultimate principle is: by above adding a minor structure (i.e. dynamic vibration absorber) in intended vibratory system (namely master shakes and is), the version of suitable selection dynamic vibration absorber, kinetic parameter and with the main coupled relation being that shakes, change the main vibrational state being that shakes, thus in the frequency range of expection, reduce the main forced vibration response being of shaking.Because main shaking is and inelastic component between vibration source, therefore under identical vibration source effect, main shaking is that the amplitude at vibration initial stage is little compared with vibration isolation way.Because its structure is simple, easy to implement, can the effective less vibration equipment of blanketing frequency change, be therefore widely used in, in the various plant equipment of communications and transportation, industrial machinery, all trades and professions such as to build a bridge, having become one of important means implementing vibration control.
Summary of the invention
(1) technical matters that will solve
The technical problem to be solved in the present invention is just to provide a kind of vibration control and temperature controls integration and the simple stand for optical lens device of structure.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of stand for optical lens, comprise mirror holder body, cooling unit and absorbing unit; Described cooling unit comprises the cooling duct be arranged in described mirror holder body; Described absorbing unit is dynamic vibration absorber, is arranged in described cooling duct; The resisting medium of described dynamic vibration absorber is the heat eliminating medium injected in described cooling duct.
Preferably, described cooling duct comprises the interconnection that heat eliminating medium transversely flows, and the vertical passage that medium longitudinally flows; Described dynamic vibration absorber comprises lateral dynamics bump leveller and Longitudinal bump leveller; The resisting medium of described lateral dynamics bump leveller is the described heat eliminating medium of cross flow in described interconnection, and the resisting medium of described Longitudinal bump leveller is the described heat eliminating medium of longitudinal flow in described vertical passage.
Preferably, described mirror holder body comprises picture frame, mirror bar and microscope base; Described picture frame is used for holding optical components, and described picture frame is connected with described microscope base by described mirror bar.
Preferably, described optical element is catoptron, lens, wave plate, prism or aperture.
Preferably, described cooling duct and dynamic vibration absorber are all arranged in described picture frame.
Preferably, described cooling duct is arranged in described picture frame, mirror bar and microscope base, and described dynamic vibration absorber is arranged in described mirror bar/microscope base.
Preferably, the spring element of described dynamic vibration absorber is wind spring, semi-girder, parallel leaf spring, torsionspring or lamination rubber.
Preferably, the described heat eliminating medium passed in described cooling duct is water, alcohol, fluorine, air, nitrogen or helium.
(3) beneficial effect
Technical scheme of the present invention has the following advantages: stand for optical lens of the present invention, controls vibration by dynamic vibration absorber, its have main shake be initial amplitude little, disturb little advantage by vibration source.On this basis, dynamic vibration absorber is built in the cooling duct of cooling unit, make the heat eliminating medium in cooling duct not only for mirror holder body and the heat radiation being arranged on the optical element on mirror holder body, doublely can do the resisting medium of dynamic vibration absorber simultaneously, and can cool dynamic vibration absorber, thus on the basis of not improving stand for optical lens complex structure degree, be integrated with absorbing and refrigerating function, improve the integrated degree of stand for optical lens.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1: dynamic vibration absorber vibration attenuation mechanism schematic diagram;
Fig. 2: structural representation dynamic vibration absorber being arranged on the stand for optical lens in picture frame of embodiment one;
Fig. 3: the master of embodiment one shakes the family curve that the extensional vibration amplitude that is changes with excitation frequency;
Fig. 4: structural representation dynamic vibration absorber being arranged on the stand for optical lens in mirror bar of embodiment two;
Fig. 5: the master of embodiment two shakes the family curve that the extensional vibration amplitude that is changes with excitation frequency;
Fig. 6: structural representation dynamic vibration absorber being arranged on the stand for optical lens in microscope base of embodiment three;
Embodiment
Below in conjunction with drawings and Examples, embodiments of the present invention are described in further detail.Following examples for illustration of the present invention, but can not be used for limiting the scope of the invention.
In describing the invention, it should be noted that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.In addition, term " first ", " second ", " the 3rd " only for describing object, and can not be interpreted as instruction or hint relative importance.
This application provides a kind of stand for optical lens, comprise mirror holder body, cooling unit and absorbing unit.Described cooling unit comprises the cooling duct be arranged in described mirror holder body.Described absorbing unit is dynamic vibration absorber, thus have main shake be initial amplitude little, disturb little advantage by vibration source.This dynamic vibration absorber is arranged in described cooling duct, make the heat eliminating medium in cooling duct not only for mirror holder body and the heat radiation being arranged on the optical element on mirror holder body, doublely can do the resisting medium of dynamic vibration absorber simultaneously, and can cool dynamic vibration absorber, thus on the basis of not improving stand for optical lens complex structure degree, be integrated with absorbing and refrigerating function, improve the integrated degree of stand for optical lens.
Refer to Fig. 1, dynamic vibration absorber is generally made up of quality, spring element and damping elements.Wherein, spring element have wind spring, semi-girder, parallel leaf spring, torsionspring and lamination rubber etc.Damping elements has hydraulic damping, magnetically damped, viscoelastic material, frictional damping etc.In Fig. 1,1-1 is the equivalent mass of dynamic vibration absorber, and 1-2 is the equivalent stiffness of dynamic vibration absorber, and 1-3 is the equivalent damping of dynamic vibration absorber.1-4 is the main equivalent mass being of shaking, and 1-5 is the main equivalent stiffness being of shaking, and 1-6 is ground or carrying platform.
The vibration control principle of dynamic vibration absorber be damping object also namely master shake be beyond form an additional dynamical system, the resonator system that its quality and spring are formed in addition amplification after the absorption of vibrations of damping object is come, and consume in its damping elements, realize vibrational energy to be converted to heat energy.
For realizing the effective conversion of vibrational energy to heat energy, demand fulfillment two conditions:, the natural vibration frequency of damping object meets optimum people having the same aspiration and interest condition with the ratio of the natural frequency of dynamic vibration absorber, is also
γ = ω n Ω n = 1 1 + μ - - - ( 1 )
Two, the damping demand fulfillment optimal damper condition of dynamic vibration absorber, is also
ζ opt = 3 μ 8 ( 1 + μ ) 3 - - - ( 2 )
Wherein, for the natural angular frequency of dynamic vibration absorber, for the natural angular frequency of principal oscillation system, μ=m/M is the equivalent mass m of dynamic vibration absorber and the ratio of the main equivalent mass M being that shakes.
When main shake be meet optimum people having the same aspiration and interest condition and optimal damper condition with dynamic vibration absorber simultaneously after, the maximum amplitude ratio of system is:
( X 1 X st ) max = 2 + μ μ - - - ( 3 )
When the vibration of environment cause main shake be 1-4 there is micro-displacement time, and main shaking is that 1-4 and dynamic vibration absorber 1-1 meets above optimum people having the same aspiration and interest condition and optimal damper condition simultaneously, then dynamic vibration absorber 1-1 can extraordinary by main shake be 4 absorption of vibrations come, at this moment, main shaking is stop vibration very soon, dynamic vibration absorber self is subjected to displacement change, and consumes in its damping elements 1-3, and main shaking is that 1-4 obtains vibration damping.Here the vibrational energy of dynamic vibration absorber 1-1 changes in order to heat in damped motion.
Principle of work in conjunction with above-mentioned dynamic vibration absorber is known, and arranged in the cooling channel by dynamic vibration absorber, according to the difference of the flow direction of heat eliminating medium in cooling duct, the setting of dynamic vibration absorber is also different, thus can control the vibration of different directions.When needing to control stand for optical lens vibration planar, only need to control respectively to realize to the vibration of two direction vectors mutually perpendicular in this plane.
In the application, interconnection and vertical passage are preferably set, thus in interconnection, pass into the heat eliminating medium transversely flowed, in vertical passage, pass into the heat eliminating medium longitudinally flowed.Dynamic vibration absorber is specifically arranged, thus obtains the lateral dynamics bump leveller that can reduce transverse vibration, and the Longitudinal bump leveller of extensional vibration can be reduced.Wherein, lateral dynamics bump leveller refers to heat eliminating medium that employing transversely the flows dynamic vibration absorber as resisting medium; Longitudinal bump leveller refers to heat eliminating medium that employing longitudinally the flows dynamic vibration absorber as resisting medium.
In addition, the resisting medium of dynamic vibration absorber, by the restriction of heat eliminating medium, can select water, alcohol, fluorine, air, nitrogen or helium etc.
The stand for optical lens of the application may be used for the optical elements such as clamping catoptron, lens, wave plate, prism or aperture, and can adjust the position of optical element.
Be described below by three the different schemes of embodiment to the application.
Embodiment one
Refer to Fig. 2, the stand for optical lens of the present embodiment one, its mirror holder body comprises picture frame, mirror bar and microscope base; Described picture frame is used for holding optical components, and described picture frame is connected with described microscope base by described mirror bar.Dynamic vibration absorber is arranged in picture frame, and heat eliminating medium is deionized water.In figure, 2-1 is picture frame, 2-2 is eyeglass, and 2-3 is heat sink around eyeglass, and 2-4 is the cooling duct of picture frame inside, 2-5 is the Longitudinal bump leveller with longitudinal damping medium be distributed on picture frame inwall, 2-6 is the lateral dynamics bump leveller with horizontal resisting medium be distributed on picture frame inwall, and 2-7 is cooling liquid inlet, and 2-8 is cooling liquid outlet, 2-9 is mirror bar, and 2-10 is microscope base.
Whole mirror holder body is fixed on optical table together with the cooling unit be arranged on described mirror holder body and absorbing unit.Enter from cooling liquid inlet 2-7 from the deionized water of the temperature constant flow speed stability of water cooling unit outflow, through cooling duct 2-4, flow out from cooling liquid outlet 2-8.The side of eyeglass 2-2 is tied with indium foil, ensures fully to contact well with the heat sink 2-3 of surrounding, improves heat conduction efficiency.When system real-world operation, the heat that eyeglass 2-2 absorption portion incident light produces constantly is transmitted to heat sink 2-3, the heat sink 2-3 absorbing heat by with the deionized water generation heat interchange in the 2-4 of cooling duct, finally take away the heat on eyeglass 2-2, eyeglass 2-2 cooled.
Dynamic vibration absorber effectiveness in vibration suppression is calculated: mirror holder body material is for stainless steel, and overall equivalent mass is 1kg, and equivalent stiffness is 2N/m for the Longitudinal bump leveller 2-5 with longitudinal damping medium be distributed on picture frame inwall; Picture frame 2-1 inwall is provided with Longitudinal bump leveller 2-5; This Longitudinal bump leveller 2-5 adopts cantilever beam structure, and its equivalent mass is 0.1kg, and namely mass ratio is 0.1, and longitudinal equivalent stiffness is 0.2N/m, and equivalent damping is 0.5Ns/m.If the external excitation frequency that external environment causes changes to 1.4Hz from 0.6Hz, at this moment master shake be Oscillation Amplitude with its characteristic of external excitation frequency change as heavy line in Fig. 3, the wherein corresponding external excitation frequency values of the horizontal ordinate of Fig. 3, the corresponding amplitude ratio of ordinate.
Can see, outside in excitation frequency variation range, main shaking is have resonance peak, and maximum amplitude ratio is 28.94.Increase this Longitudinal bump leveller 2-5 in picture frame 2-1 after, its resonance peak amplitude can obviously reduce, and system obtains vibration damping, and when equivalent damping is less, system has second order natural frequency, i.e. double resonance peak; Damping ratio and the fixed frequency ratio of this Longitudinal bump leveller 2-5 is optimized further by formula (1) and formula (2), Optimal damping ratio is 0.1679, optimum fixed frequency ratio is 0.9091, and obtaining main shaking is that Oscillation Amplitude changes its family curve as shown in Fig. 3 fine line with excitation frequency.Master shakes as seen from the figure, and to be that resonance peak Amplitude maxima drops to minimum, and maximum amplitude ratio is that 4.588, two resonance peak range values are equal, and now system optimal, damping property is best.
In like manner, transversely, picture frame 2-1 inwall is provided with the lateral dynamics bump leveller 2-6 with horizontal resisting medium, this lateral dynamics bump leveller 2-6 adopts cantilever beam structure, when this lateral dynamics bump leveller 2-6 quality is determined, through type (1) and formula (2) obtain best vibration damping equally.
Embodiment two
Refer to Fig. 4, the stand for optical lens of the present embodiment two, and embodiment one difference is, cooling duct 2-4 is positioned at whole mirror holder body interior, and heat eliminating medium is alcohol.Further, Longitudinal bump leveller 2-5 is distributed on mirror bar 2-9 inwall, and lateral dynamics bump leveller 2-6 is distributed on microscope base 2-10 inwall.In addition, cooling liquid inlet 2-7 and cooling liquid outlet 2-8 is separately positioned on the two ends of microscope base 2-10.
Longitudinal bump leveller 2-5 in the present embodiment two and lateral dynamics bump leveller 2-6 meets optimum with being in harmonious proportion optimal damper two conditions.
Dynamic vibration absorber effectiveness in vibration suppression is calculated: mirror holder body material is for duralumin, and overall equivalent mass is 0.4kg, and equivalent stiffness is 1N/m for the Longitudinal bump leveller 2-5 with longitudinal damping medium be distributed on mirror bar 2-9 inwall; Mirror bar 2-9 inwall is provided with this Longitudinal bump leveller 2-5, and this Longitudinal bump leveller 2-5 adopts cantilever beam structure, and its equivalent mass is 0.04kg, and namely mass ratio is 0.1, and longitudinal equivalent stiffness is 0.1N/m, and equivalent damping is 0.5Ns/m.When the external excitation frequency that external environment causes changes from 0.7Hz to 1.3Hz, at this moment master shake be Oscillation Amplitude with its characteristic of external excitation frequency change as heavy line in Fig. 5, the wherein corresponding external excitation frequency values of the horizontal ordinate of Fig. 5, the corresponding amplitude ratio of ordinate.
Can see, outside in excitation frequency variation range, main shaking is have resonance peak, and maximum amplitude ratio is 112.9.Increase this Longitudinal bump leveller 2-5 in mirror bar after, its resonance peak amplitude can obviously reduce, and system obtains vibration damping, and when equivalent damping is less, system has second order natural frequency, i.e. double resonance peak; Damping ratio and the fixed frequency ratio of this Longitudinal bump leveller 2-5 is optimized further by formula (1) and formula (2), Optimal damping ratio is 0.1273, optimum fixed frequency ratio is 0.9524, and obtaining main shaking is that Oscillation Amplitude changes its family curve as shown in fine line in Fig. 5 with excitation frequency.Master shakes as seen from the figure, and to be that resonance peak Amplitude maxima drops to minimum, and maximum amplitude ratio is that 6.407, two resonance peak range values are equal, and now system optimal, damping property is best.
When the mirror holder body that eyeglass is housed is subject to environmental impact vibration, can micro-displacement be there is in mirror holder body horizontal and vertical, at this moment mirror holder body can extraordinaryly be come in horizontal and vertical absorption of vibrations by Longitudinal bump leveller 2-5 and lateral dynamics bump leveller 2-6, allow and self be subjected to displacement, and consumption is also in the heat eliminating medium in the 2-4 of cooling duct at its damping elements, farthest reduce the change in optic path direction, mirror holder body obtains vibration damping.Here the vibrational energy of dynamic vibration absorber has been converted into heat in damped motion, and heat here carries out heat interchange with the alcohol in the 2-4 of cooling duct again, and dynamic vibration absorber have also been obtained cooling.
Embodiment three
Refer to Fig. 6, the stand for optical lens of the present embodiment three, and embodiment one difference is, cooling duct 2-4 is positioned at whole mirror holder body interior, and heat eliminating medium is liquid nitrogen.Further, Longitudinal bump leveller 2-5 and lateral dynamics bump leveller 2-6 is distributed on microscope base 2-10 inwall.In addition, cooling liquid inlet 2-7 and cooling liquid outlet 2-8 is separately positioned on the both sides of mirror bar 2-9.
Longitudinal bump leveller 2-5 in the present embodiment three and lateral dynamics bump leveller 2-6 meets optimum with being in harmonious proportion optimal damper two conditions.
Dynamic vibration absorber effectiveness in vibration suppression is calculated: mirror holder body material is for stainless steel, and overall equivalent mass is 2kg, and equivalent stiffness is 2N/m for the Longitudinal bump leveller 2-5 with longitudinal damping medium be distributed on microscope base 2-10 inwall; Microscope base 2-10 inwall is provided with lateral dynamics bump leveller 2-6, and this lateral dynamics bump leveller 2-6 adopts cantilever beam structure, and its equivalent mass is 0.15kg, and namely mass ratio is 0.075, and horizontal equivalent stiffness is 0.1N/m, and equivalent damping is 0.5Ns/m.If the external excitation frequency that external environment causes changes to 1.25Hz from 0.65Hz, at this moment master shakes be resonance peak maximum amplitude ratio is 49.77.Increase this lateral dynamics bump leveller 2-6 in microscope base 2-10 after, its resonance peak amplitude can obviously reduce, system obtains vibration damping, and optimized damping ratio and the fixed frequency ratio of this lateral dynamics bump leveller 2-6 further by formula (1) and formula (2), Optimal damping ratio is 0.1505, optimum fixed frequency ratio is 0.9302, obtain main shaking that to be that Oscillation Amplitude maximal value drops to minimum, maximum amplitude ratio is that 5.265, two resonance peak range values are equal, now system optimal, damping property is best.
The dynamic vibration absorber of above-described embodiment is built in the cooling duct of stand for optical lens, can realize the turbulent heat transfer of dynamic vibration absorber, thus improves its heat exchange efficiency.In addition, due to the form adopting dynamic vibration absorber built-in, thus affect without light path to external world.
The stand for optical lens structure of above-described embodiment is simple, and without the need to minute adjustment, and be strict with nothings such as optical-mechanical systems, therefore usable range is wide.
Above embodiment is only for illustration of the present invention, but not limitation of the present invention.Although with reference to embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, various combination, amendment or equivalent replacement are carried out to technical scheme of the present invention, do not depart from the spirit and scope of technical solution of the present invention, all should be encompassed in the middle of right of the present invention.

Claims (8)

1. a stand for optical lens, is characterized in that, comprises mirror holder body, cooling unit and absorbing unit; Described cooling unit comprises the cooling duct be arranged in described mirror holder body; Described absorbing unit is dynamic vibration absorber, is arranged in described cooling duct; The resisting medium of described dynamic vibration absorber is the heat eliminating medium injected in described cooling duct.
2. stand for optical lens according to claim 1, is characterized in that, described cooling duct comprises the interconnection that heat eliminating medium transversely flows, and the vertical passage that medium longitudinally flows; Described dynamic vibration absorber comprises lateral dynamics bump leveller and Longitudinal bump leveller; The resisting medium of described lateral dynamics bump leveller is the described heat eliminating medium of cross flow in described interconnection, and the resisting medium of described Longitudinal bump leveller is the described heat eliminating medium of longitudinal flow in described vertical passage.
3. stand for optical lens according to claim 1, is characterized in that, described mirror holder body comprises picture frame, mirror bar and microscope base; Described picture frame is used for holding optical components, and described picture frame is connected with described microscope base by described mirror bar.
4. stand for optical lens according to claim 3, is characterized in that, described optical element is catoptron, lens, wave plate, prism or aperture.
5. stand for optical lens according to claim 3, is characterized in that, described cooling duct and dynamic vibration absorber are all arranged in described picture frame.
6. stand for optical lens according to claim 3, is characterized in that, described cooling duct is arranged in described picture frame, mirror bar and microscope base, and described dynamic vibration absorber is arranged in described mirror bar/microscope base.
7. stand for optical lens as claimed in any of claims 1 to 6, is characterized in that, the spring element of described dynamic vibration absorber is wind spring, semi-girder, parallel leaf spring, torsionspring or lamination rubber.
8. stand for optical lens as claimed in any of claims 1 to 6, is characterized in that, the described heat eliminating medium passed in described cooling duct is water, alcohol, fluorine, air, nitrogen or helium.
CN201510306928.7A 2015-06-05 2015-06-05 A kind of stand for optical lens device Active CN105445883B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646804A (en) * 2016-12-21 2017-05-10 中国工程物理研究院激光聚变研究中心 Clamping device and optical instrument

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2586177Y (en) * 2002-12-27 2003-11-12 天津市激光技术研究所 Polarizing axis large power laser optical reflector mount
JP2005152972A (en) * 2003-11-27 2005-06-16 Mitsubishi Electric Corp Laser beam machining apparatus
CN101470236A (en) * 2007-12-26 2009-07-01 沈阳大陆激光柔性制造技术有限公司 Optical regulation lens frame suitable for mobile process full-solid state high power laser

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2586177Y (en) * 2002-12-27 2003-11-12 天津市激光技术研究所 Polarizing axis large power laser optical reflector mount
JP2005152972A (en) * 2003-11-27 2005-06-16 Mitsubishi Electric Corp Laser beam machining apparatus
CN101470236A (en) * 2007-12-26 2009-07-01 沈阳大陆激光柔性制造技术有限公司 Optical regulation lens frame suitable for mobile process full-solid state high power laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646804A (en) * 2016-12-21 2017-05-10 中国工程物理研究院激光聚变研究中心 Clamping device and optical instrument
CN106646804B (en) * 2016-12-21 2023-09-19 中国工程物理研究院激光聚变研究中心 Clamping device and optical instrument

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