CN105437390A - Method and equipment for cutting and scratching sic board - Google Patents
Method and equipment for cutting and scratching sic board Download PDFInfo
- Publication number
- CN105437390A CN105437390A CN201510788981.5A CN201510788981A CN105437390A CN 105437390 A CN105437390 A CN 105437390A CN 201510788981 A CN201510788981 A CN 201510788981A CN 105437390 A CN105437390 A CN 105437390A
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- China
- Prior art keywords
- indenture
- cutting wheel
- carborundum plate
- delineation
- starting point
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Disclosed is cutting and scratching equipment. The cutting and scratching equipment comprises a horizontal workbench (3), a feed thread (5), a Y-axis control motor (6), a guide rail device body (7), a support (8), another feed thread, an X-axis control motor (9) and a cutting and scratching head (10). A sic board (2) is fixed to the horizontal workbench (3) under the vacuum pumping suction action. The corresponding feed thread (5) and the Y-axis control motor (6) are used for making the horizontal workbench (3) move along a pair of guide rails (4,4) under the cutting-scratching digital control. The guide rail device body (7) is installed on the horizontal workbench (3) in the X-axis direction. The support (8) is installed on the guide rail device body (7) to move in the X-axis direction conveniently while being guided. The corresponding feed thread and the X-axis control motor (9) are used for make the support (8) move in the X-axis direction under the digital control. The scratching head (10) is installed on the support (8).
Description
The application is international application no is PCT/JP2011/000061, international filing date is on January 7th, 2011, enter the divisional application that National Phase in China application number is 201180064329.9, name is called the application for a patent for invention of " for delineating the method and apparatus of carborundum plate ".
Technical field
The present invention relates to a kind of method for delineating carborundum plate and equipment, wherein, by applying pressure by cutting wheel to carborundum plate and making this cutting wheel roll on carborundum plate, always depict score line on carborundum plate.
Background technology
In passing, carborundum plate (SiC plate) etc. due to case hardness high, thus when carrying out delineating (depicting score line), cutting wheel is very easy to skid, and more difficult depicting can obtain the score line of effective vertical fracture from delineation starting point.If carborundum plates etc. are owing to applying bending stress and fractureing along score line, then delineation starting point and near from the discrete portions of vertical fracture, easily produce fragment etc.
Prior art document
Patent document
Patent document 1: JP 2009-248267
Summary of the invention
The problem that the present invention need solve
Therefore, the object of this invention is to provide a kind of method and apparatus for delineating carborundum plate, the method and equipment allow to produce effective vertical fracture constantly from delineation starting point.
The means of dealing with problems
According to the present invention, provide a kind of rose method of carborundum plate, first the method comprises the steps:, depicts indenture, and delineate from this indenture when delineating and starting in delineation starting point.
According to the present invention, also provide a kind of rose method of carborundum plate, first the method comprises the steps:, when delineating beginning, cutting wheel is caused to rotate at cutting wheel subtly or swing, to depict indenture in starting point thus under the state that crimps with carborundum plate of delineation starting point; Delineate from this indenture subsequently.
In addition, according to the present invention, provide a kind of rose method of carborundum plate, the method comprises the steps:, when delineating beginning, to cause the diamond scribe pin arranged separately with cutting wheel stretch out in starting point and crimp with carborundum plate, to depict indenture thus; Cutting wheel is made to drop in indenture subsequently; And delineate from this indenture.
In addition, according to the present invention, provide a kind of scoring apparatus, this scoring apparatus comprises: delineation head, and this delineation head has cutting wheel and is adapted to pass through and rolls under the state crimped with carborundum plate and depict score line; And diamond scriber unit, this diamond scriber unit has diamond scribe pin, and causes diamond scribe pin to crimp with carborundum plate, to depict indenture thus.
It is noted that the size of aforementioned indenture (diameter) is preferably equal to or less than the size of score line, but also can be greater than the size of this score line.
Carborundum plate in the present invention is such as used as the substrate of the substrate (wafer) of semiconductor devices and the device of electronic equipment and so on.
Invention effect
When delineating beginning, first forming indenture by carrying out delineation in starting point, causing cutting wheel to be delineated from this indenture, thus produce effective vertical fracture constantly from this starting point.For this reason, the whole score line comprising starting point obtains the excellent effect that fractures.
In addition, because cutting wheel is from indenture, thus the center of indenture and score line aligned with each other.
Accompanying drawing explanation
Fig. 1 is the schematic elevational view of scoring apparatus in an example, performs an example of rose method of the present invention in this scoring apparatus;
Fig. 2 is the explanatory view utilizing scoring apparatus shown in Fig. 1 to perform rose method of the present invention;
Fig. 3 is the schematic plan of an example of score line in rose method of the present invention;
Fig. 4 is the schematic cross sectional views of main delineation part in rose method of the present invention;
Fig. 5 is the schematic elevational view of scoring apparatus in another example, performs another example of rose method of the present invention in this scoring apparatus;
Fig. 6 is the delineation head of scoring apparatus and the front view of diamond scriber unit that perform rose method of the present invention shown in Fig. 5;
Fig. 7 is the schematic elevational view of scoring apparatus in another example, performs the another example of rose method of the present invention in this scoring apparatus;
Fig. 8 is the schematic diagram of carborundum plate cutting equipment, performs the another example of rose method of the present invention in this carborundum plate cutting equipment; And
Fig. 9 is the front view of the delineation head performing rose method of the present invention shown in Fig. 8.
Detailed description of the invention
The description of the embodiment of the present invention of reference accompanying drawing will be provided below.Certainly, owing to utilizing delineation head and scoring apparatus to perform according to rose method of the present invention, thus the embodiment by scoring apparatus is described according to rose method of the present invention.
First embodiment
In Fig. 1 to 4, scoring apparatus 1 has: horizontal table 3, and carborundum plate 2 to be placed on this horizontal table 3 and fixing under vacuum draw effect; Paired directed parallel track 4, this paired directed parallel track 4 moves horizontally along Y direction for guiding also support horizontal workbench 3; Feeding screw thread 5 and Y-axis control motor 6, and this feeding screw thread 5 and Y-axis control motor 6 and move along guide rail 4 under delineation is digital control for making horizontal table 3; Guide rail device body 7, this guide rail device body 7 is arranged on above horizontal table 3 along X-direction; Support 8, this support 8 is arranged on guide rail device body 7 to move along X-direction while directed; Feeding screw thread 5 and X-axis control motor 9, and this feeding screw thread and X-axis control motor 9 and to move along X-direction down digital control for making support 8; And delineation head 10, this delineation head 10 is arranged on the front surface of support 8.
Delineation head 10 comprises: splined shaft 12, and this splined shaft 12 has cutting wheel keeper 11 at its lower end; Rotate spline unit 13, this rotation spline unit 13, for this splined shaft 12 is remained on center, can vertically to move to make this splined shaft 12 and also rotatable; And piston-cylinder unit 15, this piston-cylinder unit 15 is connected in the upper end of splined shaft 12 by free swivel 14.
Certainly, the main body of piston-cylinder unit 15 is arranged on support 8, and piston rod 16 is connected in splined shaft 12 by free swivel 14.
Cutting wheel 17 is arranged in cutting wheel keeper 11.Certainly, cutting wheel 17 axis relative to splined shaft 12 eccentric axis (relative to direction of advance backward) arrange.
Remain on the splined shaft 12 rotated in spline unit 13 vertically to be moved along Z-direction (surface perpendicular to carborundum plate 2) in rotation spline unit 13 by piston-cylinder unit 15.In addition, in scoring process, along applying air pressure with the direction of the surface normal of carborundum plate 2 for cutting wheel 17.
Splined shaft 12 drives rotation by rotation spline unit 13.
Angle ambiguity motor 19 is laterally disposed relative to rotation spline unit 13.
Rotation spline unit 13 has the driven wheel 20 for making splined shaft 12 rotate.Connect because this driven wheel 20 engages with the gear 21 be arranged on Angle ambiguity motor 19, thus splined shaft 12 and thus cutting wheel 17 rotated under Angle ambiguity by this Angle ambiguity motor 19.That is, the blade face of cutting wheel 17 stand Angle ambiguity with towards delineation direction.
Hereafter, the description of the first embodiment will provided about the rose method of the present invention performed by this scoring apparatus 1.
Each just while applying air pressure to cutting wheel 17, cutting wheel 17 rolled and before depicting score line, first make cutting wheel 17 drop to delineation starting point A, and utilization is such as from 0.1kg/cm beginning through
2to 2kg/cm
2cutter edge load crimp with carborundum plate 2, wherein this cutting wheel 17 is taken turns by sintered diamond and is formed and preferably have from the cutting-tool angle of 90 ° to 140 ° and the radius (cutting wheel diameter) from 2mm to 3.5mm.Under this kind of crimped status, cutting wheel 17 rotates subtly or swings, to form indenture B at this starting point A place thus.As shown in Figures 1 to 4, from this indenture B, cause cutting wheel 17 under crimped status, start delineation, depict the continuous score line C from indenture B thus.
The method is a kind of following method: during each formation score line C, by forming indenture B in the delineation of starting point A place and delineate from this indenture B.
It is noted that the size of indenture B (diameter) is equal to or less than the size of score line C.In figure 3, this indenture is shown enlargedly in order to make an explanation.
Therefore, owing to performing delineation in the indenture B formed by carrying out delineating at starting point A, thus can produce continuous print vertical fracture from indenture (starting point A), and cutting wheel can not skid from starting point A, can obtain the excellent effect that fractures thus.
In addition, because cutting wheel 17 is from indenture B, thus the center of indenture B and score line C aligned with each other.
Second embodiment
In figs. 5 and 6, scoring apparatus 22 has diamond scriber unit 25, and this diamond scriber unit 25 is arranged to and same delineation head 23 juxtaposition be arranged on this support front surface on the front surface of support 24.
Diamond scriber unit 25 is exclusively used in delineates formation indenture B when delineating and starting on carborundum plate 2.Scoring apparatus 22 in this embodiment has: workbench 26, and carborundum plate 2 to be placed on this workbench 26 and fixing under vacuum draw effect, and this driving water level land is rotated; Paired directed parallel track 27, this paired directed parallel track 27 moves horizontally along Y direction for guiding also supporting table 26; Feeding screw thread 28 and Y-axis control motor 29, and this feeding screw thread 28 and Y-axis control motor 29 and move along guide rail 27 under delineation is digital control for making workbench 26; Guide rail device body 30, this guide rail device body 30 is arranged on above workbench 26 along X-direction; Support 24, this support 24 is arranged on guide rail device body 30 to move along X-direction while directed; Feeding screw thread and X-axis control motor 31, and this feeding screw thread and X-axis control motor 31 and to move along X-direction down digital control for making support 24; Delineation head 23, this delineation head is arranged on the front surface of support 24; And diamond scriber unit 25, on the front surface that this diamond scriber unit 25 is arranged on support 24 similarly and with delineation head 23 juxtaposition.In this scoring apparatus 22, delineation head 23 has cutting wheel 32 at its lower end, and this cutting wheel is taken turns by sintered diamond and formed and preferably have from the cutting-tool angle of 90 ° to 140 ° and the radius (cutting wheel diameter) from 2mm to 3.5mm.But this scoring apparatus 22 is not provided with angle control unit, this angle control unit rotates around the axis perpendicular to carborundum plate 2 in order to make cutting wheel 32.This scoring apparatus 22 performs the delineation along X-axis line direction along guide rail device body 30.
This delineation head 23 also causes cutting wheel 32 utilizing such as from 0.1kg/cm by air pressure
2to 2.0kg/cm
2the state that crimps with carborundum plate 2 of cutter edge load under roll, to depict score line thus.That is, delineation head 23 comprises sliding sleeve body 33, vertical mobile body 34, cutting wheel keeper 35 and piston-cylinder unit 36, this sliding sleeve body is arranged on the front surface of support 24, this vertical mobile body is kept by sliding sleeve body 33 thus can vertically movement, this cutting wheel keeper is arranged on the lower end of vertical mobile body 34, and this piston-cylinder unit 36 is connected in the upper end of vertical mobile body 34.
Cutting wheel keeper 35 is provided with cutting wheel 32.The upper end of vertical mobile body 34 is connected in the piston rod 37 of piston-cylinder unit 36.
Vertical mobile body 34 is vertically moved by piston-cylinder unit 36, and in scoring process, cutting wheel 32 is by accepting the pressure from piston-cylinder unit 36 by vertical mobile body 34 and utilizing such as from 0.1kg/cm
2to 2.0kg/cm
2cutter edge load crimp with carborundum plate 2, and roll to perform delineation in conjunction with the motion of support 24 thus.
Meanwhile, diamond scriber unit 25 has: DD motor 38, and this DD motor 38 has the quill shaft on the front surface being arranged on support 24; Splined shaft 39, this splined shaft remains in quill shaft slidably to accept rotating drive; Diamond scribe pin 40, this diamond scribe pin is arranged on the lower end of splined shaft 39; And piston-cylinder unit 42, this piston-cylinder unit is connected to the upper end of splined shaft 39 by free swivel 41, and the piston rod 43 of piston-cylinder unit 42 is connected in splined shaft 39.
In operation diamond scriber unit 25, along with splined shaft 39 is extended towards carborundum plate 2 by piston-cylinder unit 42, the diamond scribe pin 40 of far-end crimps with carborundum plate 2.Meanwhile, by driving DD motor 28 to make the diamond scribe pin 40 of far-end rotate subtly, indenture B is formed thus.
As being carried out substituting of vertical movement by piston-cylinder unit 42, diamond scribe pin 40 or whole diamond scriber unit 25 vertically move by linear motor or servomotor.
Hereafter be described to the rose method performed by this scoring apparatus 22.
When depicting score line on carborundum plate 2, when delineating beginning at every turn, first diamond scriber unit 25 being positioned at delineation starting point A place, and operating diamond scriber unit 25.Extend by making splined shaft 39 and make the diamond scribe pin 40 of far-end in the crimping of starting point A place, and diamond scribe pin 40 rotates subtly or swings, and forms indenture B thus at this starting point A place.
While formation indenture B, draw back diamond scribe pin 40.Then cutting wheel 32 is moved and is positioned at position (starting point A) place forming indenture B then.Then, cutting wheel 32 stretches out and utilizes such as from 0.1kg/cm in indenture B
2to 2.0kg/cm
2cutter edge load crimp with carborundum plate 2.In this condition, delineate from indenture B, and depict score line C continuously from indenture B.
It is noted that the size of indenture B (diameter) is generally equal to or is less than the size of score line C, but also can be greater than the size of this score line.
3rd embodiment
In the figure 7, according in the scoring apparatus 45 of this embodiment, delineation head 47 and diamond scriber unit 48 manufacture and independently of one another respectively according on independent support 49 and 50, this delineation head is taken turns by sintered diamond and is formed and preferably have from the cutting-tool angle of 90 ° to 140 ° and the radius (cutting wheel diameter) from 2mm to 3.5mm, and is adapted to pass through in utilization from 0.1kg/cm
2to 2.0kg/cm
2the state that crimps with carborundum plate 2 of cutter edge load under roll and depict score line C, on the other hand, this diamond scriber unit is exclusively used in delineate at carborundum plate 2 and forms indenture B.
Corresponding support 49 and 50 to be arranged on independently on guide rail body 52 and to be suitable for moving independently of one another, and this guide rail body 52 is arranged on above workbench 51.That is, delineation head 47 and diamond scriber unit 48 move independently of one another.
In addition, delineate head 47 and diamond scriber unit 48 corresponding construction and operate can with the structure of the delineation head 23 of the scoring apparatus 22 shown in aforementioned second embodiment and diamond scriber unit 25 with operate identical.
Same identical with the second embodiment, scoring apparatus 45 has: workbench 51, and carborundum plate 2 to be placed on this workbench 51 and fixing under vacuum draw effect, and the rotation of this driving water level land; Paired directed parallel track 53, this paired directed parallel track 53 moves horizontally along Y direction for guiding also supporting table 51; Feeding screw thread 58 and Y-axis control motor 54, and this feeding screw thread 58 and Y-axis control motor 53 and move along guide rail 53 under digital control for making workbench 51; Guide rail device body 52, this guide rail device body 52 is arranged on above workbench 51 along X-direction; Two supports 49 and 50, this support 49 and 50 is arranged on guide rail device body 52 to move along X-direction while directed; Feeding screw thread and X-axis control motor 55, and this feeding screw thread and X-axis control motor 55 and to move along X-direction down digital control for making a support 49; Feeding screw thread and another X-axis control motor 56, and this feeding screw thread and X-axis control motor 56 and to move along X-direction down digital control similarly for making another support 50; Aforementioned delineation head 47, this delineation head is arranged on the front surface of a support 49; And aforementioned diamond scriber unit 48, this diamond scriber unit 48 is arranged on the front surface of another support 50.
Identical with the diamond scriber unit 25 in the second embodiment, diamond scriber unit 48 in its back-end place has diamond scribe pin 57, and this diamond scribe pin 57 is suitable for stretching out towards carborundum plate 2 crimping with this carborundum plate and rotating subtly or swing, to depict indenture B thus.
Hereafter be described to the rose method performed by this scoring apparatus 45.
When depicting score line on carborundum plate 2 at every turn, when delineating beginning, first make diamond scriber unit 48 move and be positioned at delineation starting point A place, and operating diamond scriber unit 48 to form indenture B by carrying out delineating at starting point A place thus at once.After formation indenture B, diamond scriber unit 48 is back to its home position at once.Then delineation head 47 is moved and is positioned at position (starting point A) place forming indenture B then.Then, cutting wheel 46 stretches out and utilizes such as from 0.1kg/cm in indenture B
2to 2.0kg/cm
2cutter edge load crimp with carborundum plate 2.In this condition, delineate from indenture B, and depict score line C continuously from indenture B.
Certainly, the size (diameter) of indenture B is equal to or less than the size of score line C, but also can be greater than the size of this score line.
4th embodiment
In figs. 8 and 9, adopt this carborundum plate cutting equipment 60, the support 62 being provided with cutting wheel 61 moves in plane coordinate system by standing NC to control, in this scoring apparatus 9, this cutting wheel is taken turns by sintered diamond and is formed and preferably have from the cutting-tool angle of 90 ° to 140 ° and the radius (cutting wheel diameter) from 2mm to 3.5mm.Therefore, cutting wheel 61 moves in orthogonal coordinate system by standing NC to control.
As shown in Figure 8, paired guide rail 64 is arranged on base portion 63 along Y-axis, and motion base portion 65 is moved along Y direction by guide rail 64.In addition, be arranged on along the paired guide rail 66 of X-axis and move on base portion 65.Support 63 can be moved along X-direction by these guide rails 66.Motion base portion 65 controls motor 67 and pinion rack device or feeding screw thread by Y-axis and to move along Y direction down digital control.
Support 62 on motion base portion 65 controls motor 68 and pinion rack device or feeding screw thread by X-axis and to move along X-direction down digital control.
Therefore, support 62 is controlled along the location in X-direction and Y-axis line direction, and the cutting wheel 61 be arranged on support 62 moves along with pre-programmed movement locus.Hereinafter, as shown in Figure 9, cutter head 69, equally be also delineation head be arranged on the front surface of support 62.
Cutter head 69 comprises: splined shaft 71, and this splined shaft 71 has cutting wheel keeper 70 at its lower end; Rotate spline unit 72, this rotation spline unit 72 is for remaining on center to make this splined shaft 71 vertically to move and also rotatable by this splined shaft 71; And piston-cylinder unit, this piston-cylinder unit is connected in the upper end of splined shaft 71 by free swivel 73.The main body of piston-cylinder unit 74 is arranged on support 62, and piston rod 75 is connected in splined shaft 71 by free swivel 73.
Cutting wheel 61 is arranged in cutting wheel keeper 70.The axis of cutting wheel 61 relative to splined shaft 71 eccentric axis (relative to direction of advance backward) arrange.
Remain on the splined shaft 71 rotated in spline unit 72 vertically to be moved along Z-direction (surface perpendicular to carborundum plate 2) in rotation spline unit 72 by piston-cylinder unit 74.
In scoring process, along applying air pressure with the direction of the surface normal of carborundum plate 2 for cutting wheel 61.In addition, splined shaft 71 drives rotation by rotation spline unit 72.Angle ambiguity motor 76 is laterally arranged relative to rotation spline unit 72.
Rotation spline unit 72 has the driven wheel 77 for making splined shaft 71 rotate.Connect because this driven wheel 77 engages with the gear 78 be arranged on Angle ambiguity motor 76, thus splined shaft 71 and thus cutting wheel 61 rotated under Angle ambiguity by this Angle ambiguity motor 76.
That is, the blade face of cutting wheel 61 stand Angle ambiguity with towards delineation direction.Carborundum plate 2 is placed on the workbench 79 that is arranged on base portion 63, and holds and fix as required.
Hereafter, the description about the rose method of the present invention performed by this scoring apparatus 1 will be provided.
Each just while applying air pressure to cutting wheel 61, cutting wheel 61 is rolled and before depicting score line beginning through, first make cutting wheel 61 drop to delineation starting point A and utilization such as from 0.1kg/cm
2to 2kg/cm
2cutter edge load crimp with carborundum plate 2.Under this kind of crimped status, cutting wheel 61 rotates or swings to form indenture B at this starting point A place thus subtly.Then, from this indenture B, cause cutting wheel 61 under crimped status, start delineation, depict the continuous score line C from indenture B thus.
The method is a kind of following method: during each formation score line C, by forming indenture B in the delineation of starting point A place and delineate from this indenture B.
Therefore, owing to performing delineation in the indenture B formed by carrying out delineating at starting point A, thus can produce continuous print vertical fracture from indenture (starting point A), and cutting wheel can not skid from starting point A, can obtain the excellent effect that fractures thus.
In addition, because cutting wheel 61 is from indenture B, thus the center of indenture B and score line C aligned with each other.
Claims (4)
1. a carborundum plate rose method, described method comprises the steps: first to depict indenture when delineating and starting in delineation starting point; And delineate from described indenture.
2. a carborundum plate rose method, described method comprises the steps: when delineating beginning, first cause cutting wheel to rotate at described cutting wheel or swing under the state that crimps with carborundum plate of delineation starting point, depict indenture in described starting point thus; Delineate from described indenture subsequently.
3. a carborundum plate rose method, described method comprises the steps: when delineating beginning, first cause the diamond scribe pin that arranges separately with cutting wheel to rotate at described diamond scribe pin or swing under delineating the state that starting point crimps with carborundum plate, depict indenture thus; Described cutting wheel is caused to crimp with described carborundum plate at formed indenture place subsequently; Delineate from described indenture.
4. a scoring apparatus, comprising: delineation head, and described delineation head has cutting wheel, and is adapted to pass through and makes described cutting wheel roll to delineate place's score line under the state crimped with carborundum plate; And diamond scriber unit, described diamond scriber unit has diamond scribe pin, and causes described diamond scribe pin to crimp with described carborundum plate, to depict indenture thus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510788981.5A CN105437390A (en) | 2011-01-07 | 2011-01-07 | Method and equipment for cutting and scratching sic board |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510788981.5A CN105437390A (en) | 2011-01-07 | 2011-01-07 | Method and equipment for cutting and scratching sic board |
| CN201180064329.9A CN103282158B (en) | 2011-01-07 | For the method and apparatus delineating carborundum plate |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180064329.9A Division CN103282158B (en) | 2011-01-07 | 2011-01-07 | For the method and apparatus delineating carborundum plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105437390A true CN105437390A (en) | 2016-03-30 |
Family
ID=55588708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510788981.5A Pending CN105437390A (en) | 2011-01-07 | 2011-01-07 | Method and equipment for cutting and scratching sic board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105437390A (en) |
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| JP2002134437A (en) * | 2000-10-20 | 2002-05-10 | Beldex Corp | Scribing cutter and scriber using the same |
| JP2002252185A (en) * | 2001-02-23 | 2002-09-06 | Matsushita Electric Ind Co Ltd | Method of manufacturing nitride semiconductor chip |
| JP2003292323A (en) * | 2002-04-01 | 2003-10-15 | Nippon Electric Glass Co Ltd | Glass-fusing furnace and glass-fusing method |
| CN1856452A (en) * | 2003-11-06 | 2006-11-01 | 彼得·利泽克 | Device for cutting glass and removing coatings therefrom |
| JP2007320069A (en) * | 2006-05-30 | 2007-12-13 | Nagase Integrex Co Ltd | Scribe method and its apparatus |
| JP2008168304A (en) * | 2007-01-09 | 2008-07-24 | Murata Mfg Co Ltd | Laser cutting method |
| WO2010116421A1 (en) * | 2009-04-10 | 2010-10-14 | 坂東機工株式会社 | Glass plate scribing method and scribing device |
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2011
- 2011-01-07 CN CN201510788981.5A patent/CN105437390A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134437A (en) * | 2000-10-20 | 2002-05-10 | Beldex Corp | Scribing cutter and scriber using the same |
| JP2002252185A (en) * | 2001-02-23 | 2002-09-06 | Matsushita Electric Ind Co Ltd | Method of manufacturing nitride semiconductor chip |
| JP2003292323A (en) * | 2002-04-01 | 2003-10-15 | Nippon Electric Glass Co Ltd | Glass-fusing furnace and glass-fusing method |
| CN1856452A (en) * | 2003-11-06 | 2006-11-01 | 彼得·利泽克 | Device for cutting glass and removing coatings therefrom |
| JP2007320069A (en) * | 2006-05-30 | 2007-12-13 | Nagase Integrex Co Ltd | Scribe method and its apparatus |
| JP2008168304A (en) * | 2007-01-09 | 2008-07-24 | Murata Mfg Co Ltd | Laser cutting method |
| WO2010116421A1 (en) * | 2009-04-10 | 2010-10-14 | 坂東機工株式会社 | Glass plate scribing method and scribing device |
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Application publication date: 20160330 |
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