CN105428272B - The method and device of semiconductor equipment alert process - Google Patents
The method and device of semiconductor equipment alert process Download PDFInfo
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- CN105428272B CN105428272B CN201410373642.6A CN201410373642A CN105428272B CN 105428272 B CN105428272 B CN 105428272B CN 201410373642 A CN201410373642 A CN 201410373642A CN 105428272 B CN105428272 B CN 105428272B
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Abstract
The invention discloses a kind of method and devices of semiconductor equipment alert process.Wherein method includes the following steps: the feedback signal of receiver station equipment；Judge whether the feedback signal is unit exception signal；If so, issuing the alarm serial number comprising alarm department piece number and type of alarm number.The method and device of semiconductor equipment alert process of the invention is in equipment when dishing out fault alarm, it dishes out specifically with significant alarm serial number, technique processing staff can be directly targeted to the mechanical part of the equipment to break down according to alarm serial number, and quickly remove barriers, improve the efficiency of technique processing.
Description
Technical field
The present invention relates to technical field of semiconductors more particularly to a kind of method and devices of semiconductor equipment alert process.
Background technique
In field of semiconductor processing, when certain unusual conditions have occurred in board equipment and user intervention or notice is needed to use
When family, it can dish out one and alert to user.This alarm is known as Alarm.When an alarm is dished out, user be can see
The serial number (number) of Alarm, under normal circumstances, this number are all exactly a random number without actual meaning,
Each Alarm and number is only required to correspond.If it is that user distinguishes in which will be clear that for what abnormal conditions, announcement need to be checked
Alert description (message, discription).Sometimes user still can not will seek help where orientation problem to developer,
It cannot clearly describe to be which alarm is dished out actually since user's level is irregular, when user exchanges with developer, it is right
Certain difficulty is brought in developer's orientation problem.
In conclusion how by semiconductor equipment issue alarm fast and accurately distinguish abnormal conditions be one urgently
It solves the problems, such as.
Summary of the invention
Based on this, it is necessary to provide a kind of alarm accurate judgement that technique processing staff can be made to dish out by board equipment
The method and device of the semiconductor equipment alert process for the abnormal conditions that equipment occurs.
The method for the semiconductor equipment alert process that purpose provides to realize the present invention, comprising the following steps:
The feedback signal of receiver station equipment；
Judge whether the feedback signal is unit exception signal；
If so, issuing alarm serial number；
The alarm serial number includes alarm department piece number and type of alarm number.
The embodiment of a kind of method as semiconductor equipment alert process, the sending is by alarm department piece number and report
The alarm serial number that alert style number is constituted, comprising the following steps:
Read the corresponding preset alarm serial number of the unit exception signal；
The preset alarm serial number is formed into a complete alarm together with other alarm parameters, and is issued；
The other parameters include alarm name, one of are briefly described and are described in detail or two or more.
The embodiment of a kind of method as semiconductor equipment alert process, the method also includes following steps:
By the warning piece and alarm department piece number one-to-one correspondence in the semiconductor equipment, and stores and arrive database
In；
The meaning of the type of alarm number and type of alarm number is corresponded, and is stored into database.
The embodiment of a kind of method as semiconductor equipment alert process, the alarm department piece number be three or
Three or more numbers；
The number that the type of alarm number is three or three or more.
The embodiment of a kind of method as semiconductor equipment alert process, it is described will be in the semiconductor equipment
Warning piece and the alarm department piece number correspond, and store into database, comprising the following steps:
By warning piece in the semiconductor equipment according to realizing that function division is multiple modules, different modules is corresponding not
Same warning piece number section；
Alarm department piece number is determined according to the corresponding warning piece number section of module belonging to the warning piece；
By the alarm department piece number and the storage of corresponding alarm department piece number into database.
The embodiment of a kind of method as semiconductor equipment alert process, further comprising the steps of:
The corresponding warning piece of alarm serial number and alarm class that the semiconductor equipment issues are searched from the database
Type.
A kind of device of semiconductor equipment alert process based on the same inventive concept, including signal receiving module, it is abnormal
Judgment module and alarm module, in which:
The signal receiving module, the feedback signal for receiver station equipment；
The exception judgment module, for judging whether the feedback signal is unit exception signal；
The alarm module, for issuing alarm serial number according to the unit exception signal；
The alarm serial number includes alarm department piece number and type of alarm number.
A kind of embodiment of device as semiconductor equipment alert process, the alarm module include that serial number is read
Submodule and group alarm submodule, in which:
The serial number reading submodule, for reading the corresponding preset alarm serial number of the unit exception signal；
The group alarm submodule, for by the preset alarm serial number formed together with other alarm parameters one it is complete
Whole alarm, and issue；
The other parameters include alarm name, one of are briefly described and are described in detail or two or more.
A kind of embodiment of device as semiconductor equipment alert process, described device further include that warning piece is deposited
Store up module and type of alarm memory module, in which:
The warning piece memory module, for by the semiconductor equipment warning piece and the alarm department piece number
It corresponds, and stores into database；
The type of alarm memory module, for the meaning of the type of alarm number and type of alarm number to be corresponded,
And it stores into database.
A kind of embodiment of device as semiconductor equipment alert process, the warning piece memory module include
Module divides submodule, alarm department piece number determines submodule and sub-module stored, in which:
The module divides submodule, is used to warning piece in the semiconductor equipment be more according to realization function division
A module, different modules correspond to different warning piece number sections；
The alarm department piece number determines submodule, for the corresponding warning piece of the module according to belonging to the warning piece
Number section determines alarm department piece number；
The sub-module stored, for storing the alarm department piece number and corresponding alarm department piece number into database.
A kind of embodiment of device as semiconductor equipment alert process, further includes searching module, is used for from institute
State the corresponding warning piece of alarm serial number and type of alarm for searching that the semiconductor equipment issues in database.
The beneficial effect comprise that
A kind of method and device of semiconductor equipment alert process provided by the invention, it is corresponding by defining each alarm
The number of component and the corresponding type of alarm number of different types of alarm, make equipment when dishing out fault alarm, dish out specific
With significant alarm serial number.Technique processing staff can be directly targeted to the machinery of the equipment to break down according to alarm serial number
Component, cooler in this way, temperature controller either dry pump there is a problem.Eliminate the detailed description that alarm is checked in traditional technology
The step of.It more avoids due to the communication problem between technique processing staff and control software developer.Technique is set to process people
Member can quickly position and solve unit exception situation, improve the efficiency of technique processing.
Detailed description of the invention
Fig. 1 is a kind of flow chart of a specific embodiment of the method for semiconductor equipment alert process of the present invention；
Fig. 2 is a kind of system structure signal of a specific embodiment of the device of semiconductor equipment alert process of the present invention
Figure；
Fig. 3 is that a kind of warning piece of a specific embodiment of the device of semiconductor equipment alert process of the present invention stores mould
Block constitutes schematic diagram.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to of the invention
The specific embodiment of the method for semiconductor equipment alert process is illustrated.It should be appreciated that specific implementation described herein
Example is only used to explain the present invention, is not intended to limit the present invention.
The method of the semiconductor equipment alert process of the embodiment of the present invention, as shown in Figure 1, comprising the following steps:
S100, the feedback signal of receiver station equipment.
S200 judges whether feedback signal is unit exception signal.Cooler does not react when such as communicating to cooler, then
It can conclude that failure occurs in process equipment.At this point, the feedback signal of the unresponsive empty feedback signal of cooler or disconnecting
It is then unit exception signal.Control program should issue fault alarm.
S300 then issues the alarm serial number including alarm department piece number and type of alarm number when receiving unit exception signal.
Certainly, when semiconductor equipment technique process is without equipment fault, equipment is without alarm of dishing out, according to blas
Technique processing is executed, until technique completes the process.
The embodiment of the present invention is by the way of alarm department piece number+type of alarm number come group alarm.It can be according to actual
Situation chooses several bit digitals and represents alarm department piece number, chooses several bit digitals according to the actual situation and represents type of alarm number.
Wherein, alarm department piece number, using unique ID (Identification, authentication) numbers corresponding unique software
Part number.The part number of software is different from the Machinery Ministry piece number of equipment, by software definition and maintenance, only records the alarm department that can dish out
Part.Such as a dry pump, when breaking down, software can dish out warning note, this dry pump is identified as the component of a software；
Such as a screw, although there is this component, the alarm that software will not dish out about this screw, so nonrecognition is one
The component of software.
Determining alarm department piece number and type of alarm number are programmed into program code, in technique process, work as board
When equipment (technique processing hardware device) feedback signal exception, control program is dished out specific alarm serial number when dishing out and alarming.
The method of the semiconductor equipment alert process of the embodiment of the present invention, by the volume for defining the corresponding component of each alarm
Number and different types of alarm corresponding type of alarm number, make equipment when dishing out fault alarm, dish out specific with containing
The alarm serial number of justice.Technique processing staff can be directly targeted to the mechanical part of the equipment to break down according to alarm serial number, such as
It is cooler, temperature controller either dry pump there is a problem.The step of eliminating the detailed description that alarm is checked in traditional technology.
It more avoids due to the communication problem between technique processing staff and control software developer.Keep technique processing staff quick
It positions and removes barriers, improve the efficiency of technique processing.
In the wherein embodiment of the method for a semiconductor equipment alert process, the alarm for serial number current alerts of alarming
Part number is in preceding, number combination of the type of alarm number in rear composition.Such as, when alarm department piece number is indicated using three bit digitals, then may be used
The component to break down is determined according to the front three in alarm serial number, and latter several of serial number of alarming then indicate type of alarm.
In the wherein embodiment of the method for a semiconductor equipment alert process, step S300, when receiving unit exception
When signal, then the alarm serial number including alarm department piece number and type of alarm number is issued, comprising the following steps:
Step A reads the corresponding preset alarm serial number of unit exception signal.As previously mentioned, by alarm department piece number and alarm
The alarm serial number that style number is constituted is programmed into program code in advance, and alarm when program goes to corresponding position corresponds to fixed
Alarm serial number.Read fixed alarm serial number, i.e. preset alarm serial number, use when to issue alarm.It needs to illustrate herein
Be can also be used preset configuration file mode be arranged correspondingly alarm and its serial number of alarming accordingly.Receiving equipment
After abnormal signal, corresponding alarm serial number is read from configuration file.
Preset alarm serial number and other alarm parameters, such as alarm name are briefly described step B, detailed description, seriously
Rank etc. forms a complete alarm together, and issues.
Similar with traditional technology, in the embodiment of the present invention when semiconductor equipment breaks down, issuing includes alarm name
Word, alarm number (alarm serial number), (message) is briefly described and is described in detail including information such as (description).Letter
Single description is the explanation to a summary of alarm, such as communication failure；And being described in detail is that alarm is described in more detail,
Such as, host computer issues signal, and slave computer does not respond to or slave computer temperature value is not in setting range etc..Relative to traditional skill
The meaningless number of art, the serial number in alarm that the embodiment of the present invention issues are uniquely determined, can be navigated to according to it specifically
Out of order component and the type that breaks down.In conjunction with alarm other parameters together, be determined more accurately equipment therefore
Hinder reason, so that it is determined that solution, quickly solves board equipment fault, resume production.Reduce equipment fault loss.
It is further comprising the steps of in the wherein embodiment of the method for a semiconductor equipment alert process:
S010 by the warning piece and alarm department piece number one-to-one correspondence in semiconductor equipment, and is stored into database.
Type of alarm number and the meaning of type of alarm number are corresponded, and stored into database by S020.
Preferably, as an embodiment, type of alarm number can be established and the meaning of type of alarm number corresponds
The type of alarm table of comparisons, and by the type of alarm table of comparisons storage into database.
In the embodiment of the present invention, by alarm department piece number and type of alarm number storage into database, so that technique processes people
Member, according to the serial number of alarm to the corresponding meaning of database lookup, determines the component and failure of failure when equipment dishes out and alarms
Concrete meaning, and do not have to reduce waste of time by specifically seeking advice from developer, improve the whole efficiency of production.Even if
When needing to seek advice from developer, developer can also judge rapidly alarm condition by serial number of alarming, and accelerate at alarm failure
Manage speed.
Preferably, storing warning piece with part number contrast relationship and type of alarm number and corresponding meaning to database
In, typing alarm serial number it is corresponding that alarm serial number can also be searched in the database by computer to computer after issuing alarm
Warning piece and the corresponding meaning of type of alarm number, and technique processing staff is informed in a manner of playing frame or printing.
Wherein step S010 and step S020 not stringent tandem, and the implementation of this two step can write journey
It is completed before sequence code, the code construction in program can also be executed according to the technique write after completing technique and executing program
The corresponding part number table of comparisons and the type of alarm table of comparisons.
In the wherein embodiment of the method for a semiconductor equipment alert process, alarm department piece number is three or three
Above number；The number that type of alarm number is three or three or more.
In order to enable number is explicitly neat uniform, alarm department piece number is set, needs to follow a rule.Such as alarm department
Piece number indicates that digital scope is needed from 100 to 999 using three bit digitals, without the number using 0 to 99, type of alarm number
Using the representation of three bit digitals, No. number to alarm in this way can be unified to be indicated with six bit digitals, without four
Digit, five-digit number etc..
Preferably, as an embodiment, warning piece and alarm department piece number can be established in semiconductor equipment one by one
The corresponding alarm department piece number table of comparisons, and by the storage of the alarm department piece number table of comparisons into database.
In the wherein embodiment of the method for a semiconductor equipment alert process, alarm department piece number is added to according to component
Sequence in the table of comparisons determines that the corresponding alarm department piece number of component, alarm department piece number gradually add up.As shown in table 1.
Table 1 presses the component alarm table of comparisons of addition sequence number
| Component names | Alarm department piece number |
| Cooler | 100 |
| Temperature controller | 101 |
| Dry pump | 102 |
| …… | …… |
| …… | …… |
| Molecular pump | 233 |
| …… | …… |
In the wherein embodiment of the method for a semiconductor equipment alert process, by possible hairs all in semiconductor equipment
For the warning piece alarmed out according to realizing that function division is multiple modules, different modules corresponds to different warning piece number sections.
For example the component of vacuum air-channel module terminates since 100 to 199, temperature control module terminates since 200 to 299, radio-frequency module
Since 300 to 399 terminate etc..As shown in table 2.
The component alarm table of comparisons that table 2 is numbered according to division module
| Component names | Alarm department piece number |
| Dry pump | 100 |
| Molecular pump | 101 |
| …… | …… |
| Temperature controller | 200 |
| …… | …… |
| Upper radio-frequency power supply | 300 |
| Lower radio-frequency power supply | 301 |
| …… | …… |
Herein it should be noted that including a large amount of part of appliance in semiconductor technology process equipment, to all
The warning piece that alarm may be issued is numbered；And in board equipment also include many and unrelated equipment alarm components,
For this section components without number, reduce the subsequent workload according to number query facility, also reduces warning piece control
The size of table.Save human and material resources resource.
Equally, according to the difference of type of alarm, the type of alarm of different major class can be corresponded to different type of alarm number
Segment, as shown in table 3.
3 type of alarm number section of table divides
Herein it should be noted that the type of alarm number of the interlocking alarm for setting value type in upper table is arranged between 0-99,
But the form indicated when writing alarm serial number using three bit digitals guarantees 6 unified bit digitals of the alarm serial number generated.
The type of alarm table of comparisons constructed according to the range that type of alarm number above divides is as shown in table 4.Each report
The alert corresponding specific meaning of style number.
The 4 type of alarm table of comparisons of table
In multiple embodiments above-mentioned, each alarm department piece number uniquely corresponds to a component, and technique is made to process people
Member error-free in the least can determine warning piece by alarm department piece number.
It is further comprising the steps of in the wherein embodiment of the method for a semiconductor equipment alert process:
S400 searches the corresponding warning piece of alarm serial number and type of alarm that semiconductor equipment issues from database.
Such as by taking cooler as an example, if its part number is 100, then the meaning of the relevant alarm serial number of this equipment is as shown in table 5.
5 cooler of table alarm serial number and corresponding meaning
Technique processing staff can be handled manufacturing and processing equipment failure according to the corresponding concrete meaning of alarm serial number, with
Just restore normal technique processing as early as possible, improve production efficiency.
Based on the same inventive concept, the embodiment of the present invention provides a kind of device of semiconductor equipment alert process, due to this
The principle that device solves the problems, such as is similar to a kind of aforementioned method of semiconductor equipment alert process, and therefore, the implementation of the device can
To realize that overlaps will not be repeated according to the specific steps of preceding method.
The device of a kind of semiconductor equipment alert process of the embodiment of the present invention, as shown in Fig. 2, including signal receiving module
100, abnormal judgment module 200 and alarm module 300.Wherein: the signal receiving module 100 is used for receiver station equipment
Feedback signal；The exception judgment module 200, for judging whether the feedback signal is unit exception signal；The report
Alert module 300, for issuing the alarm sequence including alarm department piece number and type of alarm number according to the unit exception signal
Number.
The device of the semiconductor equipment alert process of the embodiment of the present invention, by the volume for defining the corresponding component of each alarm
Number and different types of alarm corresponding type of alarm number, make equipment when dishing out fault alarm, dish out specific with containing
The alarm serial number of justice.Technique processing staff can be directly targeted to the mechanical part of the equipment to break down according to alarm serial number, such as
It is cooler, temperature controller either dry pump there is a problem.The step of eliminating the detailed description that alarm is checked in traditional technology.
It more avoids due to the communication problem between technique processing staff and control software developer.Keep technique processing staff quick
It positions and removes barriers, improve the efficiency of technique processing.
In the wherein embodiment of the device of a semiconductor equipment alert process, alarm module 300 is read including serial number
Submodule 310 and group alarm submodule 320.Wherein: serial number reading submodule 310, it is corresponding for reading unit exception signal
Preset alarm serial number；Group alarm submodule 320, for preset alarm serial number to be formed one together with other alarm parameters
Complete alarm, and issue.Other parameters include alarm name, one of be briefly described and be described in detail or two kinds with
On.
Relative to the meaningless number of traditional technology, the device of the semiconductor equipment alert process of the embodiment of the present invention is issued
Alarm in serial number uniquely determine, the type that specific out of order component can be navigated to according to it and is broken down.
In conjunction with alarm other parameters together, equipment fault reason is determined more accurately, so that it is determined that solution, quickly solves
Board equipment fault, resumes production.Reduce equipment fault loss.
It out include multiple processing modules above-mentioned in the wherein embodiment of the device of a semiconductor equipment alert process
It outside, further include warning piece memory module 010 and type of alarm memory module 020.Wherein: warning piece memory module 010 is used
It corresponds, and stores into database with alarm department piece number in by the warning piece in semiconductor equipment；Type of alarm storage
Module 020 for corresponding type of alarm number and the meaning of type of alarm number, and is stored into database.
In the embodiment of the present invention, the alarm department piece number and type of alarm number of foundation are stored into database, so as to technique
Processing staff, according to the serial number of alarm to the corresponding meaning of database lookup, determines the component of failure when equipment dishes out and alarms
And the concrete meaning of failure, and do not have to reduce waste of time by specifically seeking advice from developer, improve the whole effect of production
Rate.
In the wherein embodiment of the device of a semiconductor equipment alert process, as shown in figure 3, warning piece stores mould
Block 010 includes that module divides submodule 011, alarm department piece number determines submodule 012 and sub-module stored 013. wherein: module is drawn
Molecular modules 011 are used to warning piece in semiconductor equipment be multiple modules, different modules pair according to realization function division
Answer different warning piece number sections；Alarm department piece number determines submodule 012, corresponding for the module according to belonging to warning piece
Warning piece number section determines alarm department piece number；Sub-module stored 013, for depositing alarm department piece number and corresponding alarm department piece number
It stores up in database.
It, can and according to module divided parts number section by warning piece according to realizing that function different demarcation is different module
Making alarm, serial number is more regular follows, and is also convenient for the identification of unit exception situation convenient for data management.
Further include searching module 400 in the wherein embodiment of the device of a semiconductor equipment alert process, for from
The corresponding warning piece of alarm serial number and type of alarm that semiconductor equipment issues are searched in database.
Technique processing staff can be handled manufacturing and processing equipment failure according to the corresponding concrete meaning of alarm serial number, with
Just restore normal technique processing as early as possible, improve production efficiency.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.
Claims (11)
1. a kind of method of semiconductor equipment alert process, which comprises the following steps:
The feedback signal of receiver station equipment；
Judge whether the feedback signal is unit exception signal；
If so, issuing alarm serial number；
The alarm serial number includes alarm department piece number and type of alarm number, according to the alarm department piece number and the type of alarm number
Warning piece and fault type are determined respectively.
2. the method for semiconductor equipment alert process according to claim 1, which is characterized in that the sending alarm sequence
Number, comprising the following steps:
Read the corresponding preset alarm serial number of the unit exception signal；
The preset alarm serial number is formed into a complete alarm together with other alarm parameters, and is issued；
Other described alarm parameters include alarm name, one of are briefly described and are described in detail or two or more.
3. the method for semiconductor equipment alert process according to claim 1, which is characterized in that the method also includes with
Lower step:
By the warning piece and alarm department piece number one-to-one correspondence in the semiconductor equipment, and stores and arrive database
In；
The meaning of the type of alarm number and type of alarm number is corresponded, and is stored into database.
4. the method for semiconductor equipment alert process according to any one of claims 1 to 3, it is characterised in that:
The number that the alarm department piece number is three or three or more；
The number that the type of alarm number is three or three or more.
5. the method for semiconductor equipment alert process according to claim 3, which is characterized in that described by the semiconductor
Warning piece and the alarm department piece number in equipment correspond, and store into database, comprising the following steps:
By warning piece in the semiconductor equipment according to realizing that function division is multiple modules, different modules corresponds to different
Warning piece number section；
Alarm department piece number is configured according to the corresponding warning piece number section of module belonging to the warning piece；
By the alarm department piece number and the storage of corresponding alarm department piece number into database.
6. the method for semiconductor equipment alert process according to claim 3, which is characterized in that further comprising the steps of:
The corresponding warning piece of alarm serial number and type of alarm that the semiconductor equipment issues are searched from the database.
7. a kind of device of semiconductor equipment alert process, which is characterized in that including signal receiving module, abnormal judgment module,
And alarm module, in which:
The signal receiving module, the feedback signal for receiver station equipment；
The exception judgment module, for judging whether the feedback signal is unit exception signal；
The alarm module, for issuing alarm serial number according to the unit exception signal；
The alarm serial number includes alarm department piece number and type of alarm number, according to the alarm department piece number and the type of alarm number
Warning piece and fault type are determined respectively.
8. the device of semiconductor equipment alert process according to claim 7, which is characterized in that the alarm module includes
Serial number reading submodule and group alarm submodule, in which:
The serial number reading submodule, for reading the corresponding preset alarm serial number of the unit exception signal；
The group alarm submodule, for the preset alarm serial number to be formed one completely together with other alarm parameters
Alarm, and issue；
Other described alarm parameters include alarm name, one of are briefly described and are described in detail or two or more.
9. the device of semiconductor equipment alert process according to claim 7 or 8, which is characterized in that described device is also wrapped
Include warning piece memory module and type of alarm memory module, in which:
The warning piece memory module, for by the semiconductor equipment warning piece and the alarm department piece number one by one
It is corresponding, and store into database；
The type of alarm memory module for corresponding the meaning of the type of alarm number and type of alarm number, and is deposited
It stores up in database.
10. the device of semiconductor equipment alert process according to claim 9, which is characterized in that the warning piece is deposited
Storage module includes that module divides submodule, alarm department piece number determines submodule and sub-module stored, in which:
The module divides submodule, is used to warning piece in the semiconductor equipment be multiple moulds according to realization function division
Block, different modules correspond to different warning piece number sections；
The alarm department piece number determines submodule, for the corresponding warning piece number section of the module according to belonging to the warning piece
Determine alarm department piece number；
The sub-module stored, for storing the alarm department piece number and corresponding alarm department piece number into database.
11. the device of semiconductor equipment alert process according to claim 9, which is characterized in that it further include searching module,
For searching the corresponding warning piece of alarm serial number and type of alarm that the semiconductor equipment issues from the database.
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| CN106328569B (en) * | 2016-11-07 | 2021-04-09 | 北京七星华创电子股份有限公司 | Monitoring system and detection method for working state of semiconductor cleaning equipment |
| CN110297577A (en) * | 2019-05-07 | 2019-10-01 | 惠科股份有限公司 | Picture display control method |
| CN110795414B (en) * | 2019-11-01 | 2023-04-14 | 北京北方华创微电子装备有限公司 | Alarm analysis method and device for semiconductor equipment |
| CN113689639A (en) * | 2020-05-18 | 2021-11-23 | 上海众鸿电子科技有限公司 | Wafer machine table alarm method and alarm system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6271756B1 (en) * | 1999-12-27 | 2001-08-07 | Checkpoint Systems, Inc. | Security tag detection and localization system |
| CN101174541A (en) * | 2006-11-01 | 2008-05-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for implementing alarm in transmission module of semiconductor etching equipment |
| CN103809577A (en) * | 2014-03-04 | 2014-05-21 | 北京七星华创电子股份有限公司 | Method for alarm centralized processing for semiconductor processing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101179623B (en) * | 2006-11-08 | 2010-05-12 | 中兴通讯股份有限公司 | Equipment failure process and alarm method in communication system |
-
2014
- 2014-07-31 CN CN201410373642.6A patent/CN105428272B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6271756B1 (en) * | 1999-12-27 | 2001-08-07 | Checkpoint Systems, Inc. | Security tag detection and localization system |
| CN101174541A (en) * | 2006-11-01 | 2008-05-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for implementing alarm in transmission module of semiconductor etching equipment |
| CN103809577A (en) * | 2014-03-04 | 2014-05-21 | 北京七星华创电子股份有限公司 | Method for alarm centralized processing for semiconductor processing device |
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