CN105428269A - 一种基于封装基板的线路图形检测方法 - Google Patents
一种基于封装基板的线路图形检测方法 Download PDFInfo
- Publication number
- CN105428269A CN105428269A CN201510750949.8A CN201510750949A CN105428269A CN 105428269 A CN105428269 A CN 105428269A CN 201510750949 A CN201510750949 A CN 201510750949A CN 105428269 A CN105428269 A CN 105428269A
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- Prior art keywords
- measured
- wire
- coupongs
- line pattern
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 62
- 238000001514 detection method Methods 0.000 title claims abstract description 28
- 238000010586 diagram Methods 0.000 title abstract description 4
- 239000000758 substrate Substances 0.000 title abstract 5
- 238000005070 sampling Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000000084 colloidal system Substances 0.000 claims description 36
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510750949.8A CN105428269B (zh) | 2015-11-05 | 2015-11-05 | 一种基于封装基板的线路图形检测方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510750949.8A CN105428269B (zh) | 2015-11-05 | 2015-11-05 | 一种基于封装基板的线路图形检测方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105428269A true CN105428269A (zh) | 2016-03-23 |
CN105428269B CN105428269B (zh) | 2018-01-30 |
Family
ID=55506380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510750949.8A Active CN105428269B (zh) | 2015-11-05 | 2015-11-05 | 一种基于封装基板的线路图形检测方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105428269B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109737878A (zh) * | 2018-12-29 | 2019-05-10 | 广州兴森快捷电路科技有限公司 | 层间偏移量的测量方法及测量系统 |
CN116313940A (zh) * | 2023-05-18 | 2023-06-23 | 上海聚跃检测技术有限公司 | 一种引线键合结构的切割方法及切割辅助装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060288325A1 (en) * | 2005-06-15 | 2006-12-21 | Atsushi Miyamoto | Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer |
JP2009079915A (ja) * | 2007-09-25 | 2009-04-16 | Hitachi Kokusai Electric Inc | 微小寸法測定方法および測定装置 |
CN102569114A (zh) * | 2010-12-17 | 2012-07-11 | 无锡华润上华半导体有限公司 | 一种金属导线尺寸监测方法 |
US20130173204A1 (en) * | 2011-12-29 | 2013-07-04 | Hon Hai Precision Industry Co., Ltd. | System and method for measuring trace width of pcb |
-
2015
- 2015-11-05 CN CN201510750949.8A patent/CN105428269B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060288325A1 (en) * | 2005-06-15 | 2006-12-21 | Atsushi Miyamoto | Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer |
JP2009079915A (ja) * | 2007-09-25 | 2009-04-16 | Hitachi Kokusai Electric Inc | 微小寸法測定方法および測定装置 |
CN102569114A (zh) * | 2010-12-17 | 2012-07-11 | 无锡华润上华半导体有限公司 | 一种金属导线尺寸监测方法 |
US20130173204A1 (en) * | 2011-12-29 | 2013-07-04 | Hon Hai Precision Industry Co., Ltd. | System and method for measuring trace width of pcb |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109737878A (zh) * | 2018-12-29 | 2019-05-10 | 广州兴森快捷电路科技有限公司 | 层间偏移量的测量方法及测量系统 |
CN116313940A (zh) * | 2023-05-18 | 2023-06-23 | 上海聚跃检测技术有限公司 | 一种引线键合结构的切割方法及切割辅助装置 |
CN116313940B (zh) * | 2023-05-18 | 2023-08-11 | 上海聚跃检测技术有限公司 | 一种引线键合结构的切割方法及切割辅助装置 |
Also Published As
Publication number | Publication date |
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CN105428269B (zh) | 2018-01-30 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20160323 Assignee: Guangzhou Kaide Finance Leasing Co.,Ltd. Assignor: SHENZHEN FASTPRINT CIRCUIT TECH Co.,Ltd.|GUANGZHOU FASTPRINT CIRCUIT TECH Co.,Ltd.|YIXING SILICON VALLEY ELECTRONICS TECH Co.,Ltd.|GUANGZHOU XINGSEN ELECTRONIC Co.,Ltd. Contract record no.: 2019990000235 Denomination of invention: Circuit diagram detection method based on packaging substrate Granted publication date: 20180130 License type: Exclusive License Record date: 20190716 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Circuit diagram detection method based on packaging substrate Effective date of registration: 20190807 Granted publication date: 20180130 Pledgee: Guangzhou Kaide Finance Leasing Co.,Ltd. Pledgor: GUANGZHOU FASTPRINT CIRCUIT TECH Co.,Ltd.|SHENZHEN FASTPRINT CIRCUIT TECH Co.,Ltd.|YIXING SILICON VALLEY ELECTRONICS TECH Co.,Ltd. Registration number: Y2019990000032 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Guangzhou Kaide Finance Leasing Co.,Ltd. Assignor: GUANGZHOU FASTPRINT CIRCUIT TECH Co.,Ltd.|SHENZHEN FASTPRINT CIRCUIT TECH Co.,Ltd.|YIXING SILICON VALLEY ELECTRONICS TECH Co.,Ltd.|GUANGZHOU XINGSEN ELECTRONIC Co.,Ltd. Contract record no.: 2019990000235 Date of cancellation: 20220922 |
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EC01 | Cancellation of recordation of patent licensing contract | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220922 Granted publication date: 20180130 Pledgee: Guangzhou Kaide Finance Leasing Co.,Ltd. Pledgor: GUANGZHOU FASTPRINT CIRCUIT TECH Co.,Ltd.|SHENZHEN FASTPRINT CIRCUIT TECH Co.,Ltd.|YIXING SILICON VALLEY ELECTRONICS TECH Co.,Ltd. Registration number: Y2019990000032 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |