CN105427570A - Passive and wireless telemetering interface chip for general reactance-type sensing element - Google Patents
Passive and wireless telemetering interface chip for general reactance-type sensing element Download PDFInfo
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K17/00—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations
- G06K17/0022—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations arrangements or provisious for transferring data to distant stations, e.g. from a sensing device
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C23/00—Non-electrical signal transmission systems, e.g. optical systems
- G08C23/02—Non-electrical signal transmission systems, e.g. optical systems using infrasonic, sonic or ultrasonic waves
Abstract
The invention relates to a passive and wireless telemetering interface chip for a general reactance-type sensing element. The substrate is a piezoelectric substrate. One or more acoustic surface wave resonators with different resonant frequencies and inductors and capacitors matching the acoustic surface wave resonators are integrated on the chip. Each acoustic surface wave resonator and the matched inductor and capacitor form a low-mismatched network. The above chip is a wireless telemetering interface of a general reactance-type sensing element, an antenna is matched, and an acoustic surface wave resonator interface wireless sensing responder is formed. Simulation sensing signals outputted from the general reactance-type sensing element are converted into radio frequency echo frequency signals, and general reactance-type sensing element wireless sensing function is achieved. The situation that the general reactance-type sensing element achieves the wireless sensing function is simplified and ensured, the sensing information is quasi-digital signal, and applications are simplified. Especially, a passive general reactance-type sensing element can form a passive and wireless sensing responder, which is suitable for long-term and severe environment application.
Description
Technical field
The present invention relates to a kind of sensing element wireless telemetering interface, particularly adopt the one of surface acoustic wave techniques general reactance type sensing element passive and wireless telemetry interface chip
Background technology
The rise of Internet of Things has promoted the development of sensor, and novel wireless sensor becomes Research Emphasis.Wireless sensing realizes heat transfer agent acquisition process by wireless channel.Passive type wireless sensing system, is made up of (Fig. 1) transponder, read write line and processor.Transponder is that an energy runs and has the individual components producing and return environment parameter heat transfer agent in environment to be measured, primarily of sensing element, wireless telemetering interface and antenna composition, wherein wireless telemetering interface is the parts realizing heat transfer agent wireless radiofrequency electrification.Read write line is the equipment of excitation transponder work and received RF transducing signal.
International standard recommends wireless sensing system to use 860MHz ~ 960MHz ultra-high frequency band, and North America is 902 ~ 928MHz, and Europe is 865 ~ 868MHz, and China intends employing 840 ~ 845MHz and 920 ~ 925MHz, two frequency ranges.
General sensing element ripe now will realize wireless sensing function, and its transponder nearly all must the wireless telemetering interface of connecting circuit complexity, and the wireless telemetering interface generally adopted, complex structure and need to provide direct supply.Simplifying the wireless telemetering interface of transponder, reduce the external energy requirements of transponder as far as possible, is the target that all transponders are pursued.
At present, wide valued surface acoustic wave wireless sensor-based system, its transponder is a kind of passive balise adopting surface acoustic wave techniques to make, be characterized in that sensing element and wireless telemetering interface function roll into one by it: electromagnetic wave transmission-receiving function can be realized based on the interdigital transducer (IDT) on piezoelectric chip in SAW (Surface Acoustic Wave) device after direct-connected radio-frequency antenna, and utilize mechanical property or the susceptibility of adsorption film mass effect environmental parameter to external world on it of piezoelectric substrate, the radio-frequency (RF) excited detection of echoes mode of passive type wireless sensing system is adopted to realize the wireless telemetering of environment sensitive parameter.What be widely applied in electric system temperature online detects in real time at present is SAW (Surface Acoustic Wave) resonator type passive wireless sensor system, and its principle signal such as Fig. 2 shows.
Recently, SAW (Surface Acoustic Wave) device is combined with general electric sensor, electrical characteristics can be surveyed with the sensitive electrical characteristic modulated acoustic surface wave device of general sensing element and be paid attention to the transponder research work realizing wireless sensing function.What relate to herein is SAW (Surface Acoustic Wave) resonator interface type transponder (being called for short interface type transponder), wherein uses SAW (Surface Acoustic Wave) resonator as wireless telemetering interface kernel element.It utilizes the responsive reactance change of general reactance type sensing element to carry out modulated acoustic surface resonator matching network frequency to realize its wireless sensing function.Fig. 3 is the structural representation of SAW (Surface Acoustic Wave) resonator interface type transponder.
General reactance type sensing element as referred to herein, refers to mature at present, take reactance change as the sensing element of sensitive information.
Visible, SAW (Surface Acoustic Wave) resonator interface type transponder is identical with the transponder application principle of aforementioned SAW (Surface Acoustic Wave) resonator type passive wireless sensor system, is also to adopt the radio-frequency (RF) excited detection of echoes Frequency Patterns of passive type wireless sensing system to realize the wireless sensing of environment sensitive parameter.Reader and the processor of SAW (Surface Acoustic Wave) resonator type passive wireless sensor system more ripe at present are also suitable for this type of interface type transponder completely.
For general active general reactance type sensing element, as interface type transponder carries minicell, belong to active balise type; As interface type transponder has radio-frequency electrical energy conversion equipment, and adopt radio frequency powered by reader, then belong to half passive balise type.If reactance type sensing element is passive, so, interface type transponder is also passive.
So SAW (Surface Acoustic Wave) resonator interface type transponder is simple and easy to use, has larger application prospect, this patent is exactly the improvement to this kind of transponder.
Summary of the invention
SAW (Surface Acoustic Wave) resonator interface type transponder has following feature:
1. adopt SAW (Surface Acoustic Wave) resonator as the core parts of its wireless telemetering interface;
2. adopt the radio-frequency (RF) excited detection of echoes Frequency Patterns of surface acoustic wave wireless sensor-based system to obtain heat transfer agent;
3. its function equivalence is in the conventional transponder of surface acoustic wave wireless sensor-based system, realizes the wireless sensing function of environment sensitive parameter;
4. wireless telemetering interface used is passive, greatly reduces the power requirement of transponder.If general reactance type sensing element is also passive, then whole transponder is also passive, just can form passive wireless sensor system.
SAW (Surface Acoustic Wave) resonator interface type transponder is made up of (Fig. 3) three parts: general reactance type sensing element, and employing SAW (Surface Acoustic Wave) resonator is the wireless telemetering interface of core parts, miniature antenna.
Because SAW (Surface Acoustic Wave) resonator has transmitting-receiving pulse electromagnetic wave energy, adopt the frequency characteristic of the reactance transducing signal modulated acoustic surface resonator of general reactance type sensing element that it just can be made to complete wireless telemetering interface function.
The principle of work of SAW (Surface Acoustic Wave) resonator interface type transponder is: the reader of passive type wireless sensing system, sends driving pulse electromagnetic wave signal to interface type transponder, and interface type transponder receives with the resonance of pulse electromagnetic wave generation frequently, obtains energy; After driving pulse stops, utilizing the energy stored that the analog sensed signal that general reactance type sensing element produces is transformed to rf frequency signal, and beam back reader reception process; Reader and processor extraction environment parameter changing value, realize the wireless sensing function of environment parameter.
For half passive interface type transponder, the reader of wireless sensing system used should also provide radio frequency powered.
For showing heat transfer agent, the external characteristics of interface must have best impedance matching and the effect of frequency pulling:
Frequency pulling: the resonance frequency making the assembly of interface and conventional sensing element, within the scope of the mismatch that it allows, changes with sensor reactance change.
Impedance matching: make the assembly of interface and customary components and antenna realize maximum power transfer, reduces loss.
Wireless telemetering interface in interface type transponder is SAW (Surface Acoustic Wave) resonator type passive and wireless telemetry interface, is called for short wireless telemetering interface, it is formed an interface module separately, then has following features:
1. simplify the method that general reactance type sensing element realizes wireless sensing function;
2. heat transfer agent is accurate digitized, adapts to digitizing working application;
3. if general reactance type sensing element is passive, then the interface type wireless sensing transponder formed also is passive, is specially adapted to long-term and harsh and unforgiving environments application.
Years of researches, have proved that interface module only need be made up of SAW (Surface Acoustic Wave) resonator and capacitance-resistance matching network, have obtained effective network topology, and found, network element value and SAW (Surface Acoustic Wave) resonator parameter closely related.
At present, make the unit of transponder, not SAW (Surface Acoustic Wave) resonator factory, shortcoming is understood to the performance of SAW (Surface Acoustic Wave) resonator, cause net mate difficulty large, be difficult to obtain optimum efficiency.
Particularly, when using PCB version to make lattice network, due to the ghost effect of PCB version and quality inconsistent, the matched element value of design has larger departing from actual, make the labor costs making interface module large, and consistance is difficult to guarantee.
For this reason, the invention discloses a kind of new solution: adopt microelectric technique by PCB version circuit conventional now, be integrated into a kind of chip, be called general reactance type sensing element passive and wireless telemetry interface chip, it is characterized in that:
Chip substrate is piezoelectric substrate;
Chip is manufactured with one or more SAW (Surface Acoustic Wave) resonator, its resonance frequency is different;
Chip is manufactured with the inductance and electric capacity that match separately with described SAW (Surface Acoustic Wave) resonator;
On chip, the inductance capacitance of each SAW (Surface Acoustic Wave) resonator and its pairing forms low mismatch network;
Interface chip substrate, adopts the piezoelectric quartz substrate that temperature coefficient is extremely low;
Standard micro technology is adopted electric capacity and inductance to be integrated on piezoelectric substrate.
Passive and wireless telemetry interface chip of the present invention, body is little easy-to-use, enormously simplify the method that general reactance type sensor realizes wireless sensing function.As long as a chip of the present invention, then mix miniature antenna, general reactance type sensing element just becomes the wireless sensing transponder with wireless sensing function, is applied in passive type wireless sensing system.
Adopt the chip of multi-resmator, multiple general reactance type sensing element can be connected, form multifunction wireless sensing transponder.
Chip of the present invention is the foolproof chip namely connect namely, when general reactance type sensing element connects chip of the present invention, without any need for hardware and software adjustment and additional supply, just adds wireless sensing function.
Chip of the present invention, adopts high stable SAW (Surface Acoustic Wave) resonator, simulation optimization matching network, its Interface Matching element of careful design, and adopts microelectronic technique to produce in batches, and product cost is high, and consistency of performance is good.
Accompanying drawing explanation
Fig. 1 passive type wireless sensing system structural representation;
Fig. 2 SAW (Surface Acoustic Wave) resonator type passive wireless sensor system structural representation;
Fig. 3 SAW (Surface Acoustic Wave) resonator interface type transponder structural representation;
Interdigital transducer structural representation in Fig. 4 SAW (Surface Acoustic Wave) device;
Fig. 5 one-port saw resonator structural representation;
Fig. 6 one-port saw resonator standing wave figure harmony surface wave energy distributed architecture schematic diagram;
The electromagnetic echoes structural representation of Fig. 7 SAW (Surface Acoustic Wave) resonator type transponder;
The conventional SAW (Surface Acoustic Wave) resonator type transponder structural representation of Fig. 8 practicality;
Fig. 9 tandem SAW (Surface Acoustic Wave) resonator interface type transponder structural representation;
Figure 10 parallel SAW (Surface Acoustic Wave) resonator interface type transponder structural representation;
Figure 11 SAW (Surface Acoustic Wave) resonator equivalent circuit structure schematic diagram;
Figure 12-1 and 12-2 tandem Interface Matching: the effect schematic diagram of series connection C2;
Figure 13-1 and 13-2 tandem Interface Matching: the effect schematic diagram of L2 in parallel;
The sensing response schematic diagram of Figure 14-1 and 14-2 capacitor type sensing tandem interface type transponder;
The sensing response schematic diagram of Figure 15-1 and 15-2 capacitive displacement sensing tandem interface transponder;
The sensing response schematic diagram of Figure 16-1 and 16-2 inductive type sensing tandem interface transponder;
Figure 17-1 and 17-2 parallel Interface Matching characteristic schematic diagram;
The sensing response schematic diagram of Figure 18-1 and the parallel interface transponder of 18-2 capacitor type sensing;
The sensing response schematic diagram of Figure 19-1 and the parallel interface transponder of 19-2 inductive type sensing;
Figure 20 SAW (Surface Acoustic Wave) resonator static capacity affects schematic diagram to sensing capabilities;
Figure 21 SAW (Surface Acoustic Wave) resonator Q value affects schematic diagram to sensing characteristics;
Figure 22 Interface Matching capacitance variation affects schematic diagram to inductive type Sensing interface type transponder sensing characteristics;
Figure 23 surface acoustic wave quartz chip fabrication technique schematic diagram;
Figure 24 planar electrode structure interdigital capacitor schematic diagram;
Figure 25 sandwich structure electric capacity schematic diagram;
Figure 26 integrated planar inductance schematic diagram;
Figure 27 tandem interface chip embodiment schematic diagram;
Figure 28 parallel interface chip embodiment schematic diagram;
Figure 29 adopts the parallel interface chip embodiment schematic diagram of sandwich structure electric capacity;
Figure 30 adopts the parallel interface chip embodiment schematic diagram of sandwich structure electric capacity and spiral inductance;
Figure 31 tandem double resonator interface chip embodiment schematic diagram;
Figure 32 parallel double resonator interface chip embodiment schematic diagram;
Figure 33 parallel interface equivalent network schematic diagram;
The transponder circuit schematic diagram that the mono-interface chip of Figure 34 (device) is formed;
Figure 35 adopts the practical transponder schematic diagram of two parallel interface chips;
Figure 36 adopts Ba Lun to connect the practical transponder schematic diagram of two parallel interface chips;
Figure 37 tandem interface schematic equivalent circuit;
The transponder circuit schematic diagram that the mono-interface chip of Figure 38 (device) is formed;
The practical transponder schematic diagram of Figure 39 double tandem interface chip;
Figure 40 adopts the practical transponder schematic diagram of the two-in-parallel formula interface chip of Ba Lun;
The compound transponder circuit schematic diagram that the multiple interface chip of Figure 41 is formed.
Embodiment
1. SAW (Surface Acoustic Wave) device
SAW (Surface Acoustic Wave) device is the passive miniature electronic part made on piezoelectric chip, it utilizes the metal electrode structure such as the interdigital transducer (IDT) on wafer, realizing electromagnetic wave--the energy of surface acoustic wave changes harmony surface wave transmission Characteristics Control mutually, has carried out the functions such as frequency stabilization, filtering, delay, relevant and sensing.
In SAW (Surface Acoustic Wave) device, conversion process of energy does not relate to electron hole process, there is no energy threshold, dynamic range is large, also additional energy is not needed, electromagnetic radiation can not have an impact to it, can apply in harsh electromagnetic radiation environment, be used widely in fields such as radar, communication, audio frequency and video, remote control, sensings.
The basic characteristics of SAW (Surface Acoustic Wave) device are:
Radioresistance, high-low temperature resistant, adaptive capacity to environment is strong, can in harsh and unforgiving environments reliably working;
Device volume is little, lightweight, and adopt microelectric technique batch production, consistance is good, and reliability is high;
Surface acoustic wave is propagated in wafer surface, easily controls its transmission performance, realizes signal transacting and sensing function.
Surface acoustic wave transduction mechanism does not have charge carrier to participate in, and also just not needing external energy resource supply, is pure passive device.
2. the radiofrequency signal transmission-receiving function of SAW (Surface Acoustic Wave) device
In a SAW (Surface Acoustic Wave) device, at least make use of an interdigital transducer and realize electroacoustic energy conversion.Interdigital transducer (Fig. 4) be one that make on piezoelectric substrate, have two opposed polarities conflux outer electrode, by certain regular cross arrangement shape as pointed the cycle metal electrode bar battle array of cross-like, there is the ability of frequency selectivity and direct-connected antenna transmitting/receiving wireless electric wave.
The He Ne laser function of interdigital transducer comes from the periodicity of its metal electrode.Interdigital transducer, by after excitation of electromagnetic wave, due to inverse piezoelectric effect, will produce with frequency surface acoustic wave at substrate surface, and transmit to both sides.Only when the cycle of interdigital transducer is synchronous with electromagnetic wavelength, the surface acoustic wave generated is the strongest, and namely interdigital transducer has the electromagnetic frequency selectivity of reception.
Equally, interdigital transducer also can only be selected to receive surface acoustic wave synchronous with it on substrate, by piezoelectric effect, is converted to same frequency electromagnetic waves, and namely interdigital transducer has the electromagnetic frequency selectivity of output.
After high frequency interdigital transducer directly connects antenna, due to the frequency selectivity of interdigital transducer, just can receive resonance excitation electromagnetic wave, be converted into surface acoustic wave.The surface acoustic wave generated reverts to electromagnetic wave, then beams back through antenna be subject to the process (reflection, sampling etc.) of artificial design in substrate surface transport process after after being received by interdigital transducer.Such interdigital transducer just has the transmission-receiving function of same frequency electromagnetic waves, but the electromagnetic wave received and dispatched, and its feature changes to some extent: fractional frequency change, amplitude and phase difference obvious.
3. SAW (Surface Acoustic Wave) resonator
SAW (Surface Acoustic Wave) resonator is a kind of SAW (Surface Acoustic Wave) device utilizing surface acoustic wave multiple reflections acquisition wave frequency resonance characteristic on piezoelectric substrate.SAW (Surface Acoustic Wave) resonator is made up of the interdigital transducer and grating reflector being placed in piezoelectric substrate surface, and grating reflector is also make of metal (as aluminium, gold) film mostly, sometimes also can form with surface period groove.Chip bonding agent adheres in air-tight casing, and with bonding wire, interdigital transducer is electrically linked outer exit.Have two class SAW (Surface Acoustic Wave) resonator structures: one is the one-port saw resonator only having pair of terminal, another has the both-end of input and output port to SAW (Surface Acoustic Wave) resonator.One-port resonator only has an interdigital transducer (Fig. 5) between two reverberators, and both-end has two interdigital transducers to resonator between two reverberators.Resonator herein specially refers to one-port resonator.
Surface acoustic wave vibrational energy is limited in grating reflector and realizes by SAW (Surface Acoustic Wave) resonator resonance phenomena.The surface acoustic wave encouraged by alternating electric field between interdigital transducers electrodes finger, is reflected by grating reflector after propagating out interdigital transducer, and grating reflector applies interference to surface acoustic wave, is the uncontinuity due to electricity or mechanical impedance.After surface acoustic wave incides these grating reflectors, incident wave is slowly converted to reflection wave, although the perturbation quantity of every single reflector element can be very little, these unit homophase reflected sound surface waves a large amount of of periodic arrangement, form very big coherent reflection.These grating structures can form effective reflector space, between reverberator, generate standing wave, produce the resonance of a pole high q-factor.Fig. 6 shows the Displacements Distribution of standing wave in one-port resonator, as can be seen from FIG., reaches maximal value, and slowly reduce towards the both sides of grating reflector at interdigital transducer immediate vicinity acoustic surface wave energy.Resonance frequency fr is approximately:
fr＝vs/(2d)
Wherein, vs is acoustic surface wave propagation speed, and d is electrode centers spacing.
SAW (Surface Acoustic Wave) resonator has been widely used in the fields such as VCR radio-frequency modulator, CATV local oscillator, testing apparatus and remote control (such as automobile door lock) as frequency stabilization element, and also has many practical products as sensor.
4. SAW (Surface Acoustic Wave) resonator type transponder
A general SAW (Surface Acoustic Wave) resonator as frequency stabilization element, after connecting antenna and encapsulation, is exactly the transponder of a passive and wireless frequency sonding.When closely with frequency electromagnetic waves pulse excitation, the SAW (Surface Acoustic Wave) resonator forced oscillation of transponder, except the electromagnetic echoes beamed back immediately with driving pulse with frequency, accumulates acoustic energy simultaneously in SAW (Surface Acoustic Wave) resonator chip acoustic resonant cavity.After driving pulse stops, the acoustic energy of accumulation slowly can be converted to attenuates electromagnetic waves transmitting and go back, and now echo frequency is the natural frequency of SAW (Surface Acoustic Wave) resonator transponder, slightly difference general with Excitation Electromagnetic Wave.
Fig. 7 is the echo of SAW (Surface Acoustic Wave) resonator type transponder, after constant amplitude forced oscillation ripple, is then the frequency stabilization signal of a breadth index decay.When field wave frequency differs larger with transponder natural frequency, difference frequency modulation fluctuating waveform can be shown as.
Due to the surface acoustic wave of piezoelectric substrate surface delivery, its physical characteristics (such as speed) can to environment parameter sensitive residing for it, and make the natural frequency of resonator (i.e. echo frequency) be the sensitivity function of environment parameter, detection of echoes frequency, just achieves the telemetry function of environment parameter residing for resonator.
(for promoting its a specific sensing function) specially designed SAW (Surface Acoustic Wave) resonator, after connecting antenna, is exactly the aggregate of a sensing element and wireless telemetering interface.Notice that SAW (Surface Acoustic Wave) resonator is a kind of passive device, so it just becomes a SAW (Surface Acoustic Wave) resonator type passive balise, be called for short conventional transponder, to be different from interface type transponder of the present invention.5. the coupling inductance in the conventional transponder of practicality
For making exciting power effectively utilize, between SAW (Surface Acoustic Wave) resonator and antenna, needing matched element, generally offsetting the impact of interdigital transducer static capacity in resonator with inductance.Adding of matched element, the resonance frequency of resonator network can be changed a little.The conventional transponder of practical application, just as shown in Figure 8: (for promoting its a specific sensing function) specially designed SAW (Surface Acoustic Wave) resonator, double coupling inductance and a miniature antenna doing electrostatic prevention.Obviously, this conventional transponder has all features of SAW (Surface Acoustic Wave) device, is specially adapted to apply in long-term and rugged surroundings.
6. reactance type sensing element is as matching network element
By above-mentioned, the network be made up of SAW (Surface Acoustic Wave) resonator, antenna and matched element, its frequency characteristic can change with the change of matched element value.Can estimate thus, when after employing high stable SAW (Surface Acoustic Wave) resonator, utilize general reactance type sensing element as matched element, network characteristic can be made only relevant to the sensing responsive reactance characteristic of general reactance type sensing element, by network characteristic wireless telemetering, general reactance type sensing element just can be made to obtain wireless sensing function.
For greatly showing the sensing effect of sensor, mating between resonator with antenna should be the low mismatch network be made up of multiple reactance component, and now general reactance type sensing element is as one of matching network element.
After, the matching network matched element except general reactance type sensing element referred to as Interface Matching element.
7. the passive telemetry interface of general reactance type sensing element SAW (Surface Acoustic Wave) resonator type
The part that SAW (Surface Acoustic Wave) resonator and Interface Matching element are formed is independent, obvious it there is the function of wireless telemetering interface in wireless sensing system transponder: realize heat transfer agent wireless radiofrequency electrification.This independent sector is called general reactance type sensing element SAW (Surface Acoustic Wave) resonator type passive and wireless telemetry interface later, is called for short SAW (Surface Acoustic Wave) resonator type telemetry interface, or wireless telemetering interface.
By above-mentioned, the frequency characteristic of this wireless telemetering interface should be stable, or echo frequency Changing Pattern is known in Application in Sensing environment.Certainly in actual applications, as long as all elements in this wireless telemetering interface: SAW (Surface Acoustic Wave) resonator, auxiliary inductor electric capacity, its reactance change in Application in Sensing environment is more much smaller than the reactance change of the general reactance type sensing element connected, and so can think that the frequency characteristic of this wireless telemetering interface is stable.
At present, the SAW (Surface Acoustic Wave) resonator that the quartz crystal adopting zero-temperature coefficient tangential makes, is used widely, can be considered as high stable SAW (Surface Acoustic Wave) resonator, be applied in the present invention in high precision frequency stabilization circuit.
Due to same on quartz wafer integrated inductor and electric capacity, its stability is also high.
Certainly, also have and adopt other high stable SAW (Surface Acoustic Wave) resonator manufacturing technologies, can be applied in the present invention.
8. SAW (Surface Acoustic Wave) resonator interface type transponder
General reactance type sensing element, wireless telemetering interface and antenna constitute with the transponder of conventional transponder said function jointly (see Fig. 9, Figure 10), the analog sensed signal that general reactance type sensing element exports is transformed to radio-frequency echo wave frequency signal, achieves the wireless sensing function of general reactance type sensing element.
For distinguishing with aforesaid conventional transponder, the described herein transponder that have employed SAW (Surface Acoustic Wave) resonator type telemetry interface, is called SAW (Surface Acoustic Wave) resonator interface type transponder, is called for short interface type transponder.
If general reactance type sensing element is also passive, the interface type transponder so formed also is passive, is specially adapted to long-term work and harsh and unforgiving environments.
Table 1 is the key distinction of conventional transponder and interface type transponder.
Table 1 interface type transponder compares with conventional transponder
9. adopt the wireless telemetering interface of alliteration surface resonator
Because wireless channel has impact to wireless sensing transponder characteristic, it is necessary for adopting two SAW (Surface Acoustic Wave) resonator to form difference frequency structures, so the wireless telemetering interface of practicality is formed by the different SAW (Surface Acoustic Wave) resonator of two resonance frequencies and supporting Interface Matching element thereof.One of them interface connection universal reactance type sensing element, reader will mainly detect two resonator resonance frequency differences to know heat transfer agent.
10. adopt the combined type wireless telemetering interface of multiple SAW (Surface Acoustic Wave) resonator
In the same way, SAW (Surface Acoustic Wave) resonator that multiple resonance frequency is different and the wireless telemetering interface that supporting Interface Matching element is formed thereof is adopted, can the multiple general reactance type sensing element of coupling, form Combined type interface and compound transponder.
The equivalent electrical circuit of 11. SAW (Surface Acoustic Wave) resonator
For determining match network topologies and the matched element value of wireless telemetering interface, we are design from the equivalent electrical circuit of SAW (Surface Acoustic Wave) resonator near resonance frequency.
The equivalent electrical circuit of SAW (Surface Acoustic Wave) resonator usually with dynamic (series connection) branch road again a static capacity C0 in parallel represent, series arm is then made up of dynamic inductance L1, dynamic capacity C1 and dynamic resistance R1 successively.Consider that device has parasitic series resistance R0, then equivalent electrical circuit such as Figure 11 of SAW (Surface Acoustic Wave) resonator shows.
The NDR series SAW (Surface Acoustic Wave) resonator that our company produces, its substrate is for adopting quartz crystal materials, and the equivalent circuit parameter measured value of NDR434 is as table 2.
Table 2NDR434 SAW (Surface Acoustic Wave) resonator equivalent circuit parameter
The sensing response analytical approach of 12. interface type transponders
Interface type transponder circuit is divided into two parts herein: antenna and matching network, matching network is made up of interface circuit and general reactance type sensing element, and antenna is equivalent to standard 50 Europe load.Thus, for target, carry out design interface matched element value with the low mismatch of (with antenna matching) matching network under 50 ohmages, calculate the relation of matching network characteristic frequency and sensing parameter, the sensing response of analysis interface type transponder.
Adopt the S11 Parametric Representation network characteristic of network:
S11＝(Zn-Zs)/(Zn+Zs)
Wherein Zn is the impedance of matching network, and Zs is loaded impedance (50 Europe).
S11 extreme point frequency is exactly the characteristic frequency of network, characterizes interface type transponder sensing echo frequency by the characteristic frequency of matching network.
The mismatch of network and antenna is characterized by standing-wave ratio (SWR) SWR:
SWR＝(1+abs(S11))/(1-abs(S11))
For simplifying, reactance type sensing element adopts net resistance simulated behavior, and namely capacitor type sensing element is a variable capacitance Cs, and inductive type sensors element is a variable inductance Ls.
The capacitance formula of capacitor type sensing element is:
Cs＝εS/d
Thus, actual capacitance type sensing element, the mode of its capacitance variations has three kinds: the first changes capacitor dielectric material, and the second is change capacitance electrode area S, and the third changes capacitance electrode spacing d (being also called capacitive displacement sensor).
13. match network topologies
Early from 2000, just propose the method for designing of multiple low mismatch Interface Matching network successively, to make network, there is best impedance matching and the effect of frequency pulling simultaneously:
Frequency pulling: the resonance frequency of matching network is changed with sensor reactance change within the scope of its mismatch allowed.
Impedance matching: make matching network and antenna realize maximum power transfer, reduces loss.
Interface Matching element is fewer, and engineering design is more effective with making, because LC components consume power is very little, has frequency-selecting effect simultaneously, therefore selects LC matching network.The simplest LC mates topological classification L-type, T-shaped and three kinds, ∏ type.Although the structure of L-type circuit is comparatively simple, only have two elements to choose, therefore when meeting impedance matching relation, the Q value in loop just determines; When impedance transformation ratio is little, the Q value in loop is lower, is unfavorable for the subsequent treatment of signal, still select match network topologies to be T-shaped and ∏ type.
Interface type transponder, by the connected mode of antenna, sensing element and telemetry interface, from application point, can be divided into tandem and parallel two large classes, as Fig. 9, Figure 10 illustrate it respectively.Used interface is called tandem interface and parallel interface.The Interface Matching element of two class interfaces has all only used electric capacity and inductance each (being designated as C2 and L2), and is all connect inductance after first connecting electric capacity, and just also order is contrary for string.
14. tandem SAW (Surface Acoustic Wave) resonator interface type transponders
Fig. 9 is the circuit signal of tandem interface type transponder, and the matching network between SAW (Surface Acoustic Wave) resonator and antenna is T-shaped, and wherein reactance type sensing element, as an arm of T-shaped network, is connected in series with antenna and telemetry interface.
It is as follows that process chosen by Interface Matching element: resonator two ends series capacitance C2, makes series network its maximum conductance be 0.02S; Shunt inductance L2 again, makes this parallel network susceptance symmetrical to zero line.
The effect of series connection C2 during Figure 12-1 and Figure 12-2 expression tandem Interface Matching.(transverse axis is frequency (MHz) to Figure 12-1, the longitudinal axis is S11 amplitude (dB)) be the forward and backward S11 characteristic of SAW (Surface Acoustic Wave) resonator serial capacitance C2, the change of S11 characteristic, show that coupling is improved many, this is because network its maximum conductance drops to the cause of 0.02S (see Figure 12-2 (transverse axis is frequency (MHz), and the longitudinal axis is network electric conductivity value (S)).But because C2 adds, network is moved.
Before and after L2 in parallel, network characteristic change is as shown in Figure 13-1 and Figure 13-2.Figure 13-1 is S11 characteristic, and the transverse axis of figure is frequency (MHz), and the longitudinal axis is S11 amplitude (dB).From S11 characteristic, network moves down very little, and changes in amplitude is also little.Figure 13-2 is network susceptance characteristics, and transverse axis is frequency (MHz), and the longitudinal axis is susceptance value (S).Due to adding of inductance, network susceptance moves down, and Symmetrical (curve see being positioned in Figure 13-2 below).
Thus, the termination admittance characteristic of tandem interface is: conductance is 0.02S, and positive and negative susceptance is symmetrical.
After tandem interface access capacitor type sensing element, form T-shaped matching network.The sensing response of capacitor type sensing tandem interface type transponder is as shown in Figure 14-1 and Figure 14-2, and Figure 14-1 is S11 characteristic, and transverse axis is frequency (MHz), and the longitudinal axis is S11 amplitude (dB).In 10 ~ 100pF sensing scope, its S11 changes in amplitude is little, but sensing response (transponder echo frequency, the i.e. characteristic frequency of matching network, with the relation curve of capacitor type sensing element capacitance) non-linear obviously (see Figure 14-2 figure, transverse axis is sensing element capacitance (pF), and the longitudinal axis is transponder echo frequency (MHz)).
When adopting capacitive displacement sensing element as reactance type sensing element, the sensing response of its transponder is shown in Figure 15-1 and Figure 15-2.(transverse axis is frequency (MHz) to Figure 15-1, the longitudinal axis is S11 amplitude (dB)) shown in S11 amplitude basically identical, (transverse axis is sensing element displacement to Figure 15-2, the longitudinal axis is transponder echo frequency (MHz)) be the displacement sensing characteristic of transponder, transponder sensing response is linear, to NDR434 resonator, sensitivity is 1.5kHz/ displacement unit.In Figure 15-2, displacement unit is linearly to indicate (10 displacement units are equivalent to 100pF capacitance, and 100 displacement units are equivalent to 10pF capacitance), and each displacement unit physical size is relevant with sensor individuals.
The sensing response of the tandem interface type transponder after access inductive type sensing element is as shown in Figure 16-1 and Figure 16-2.Figure 16-1 is S11 characteristic, and transverse axis is frequency (MHz), and the longitudinal axis is S11 amplitude (dB), and in 0 ~ 500nH sensing scope, its changes in amplitude is little.The sensing response of inductance sensing transponder is linear (Figure 16-2, transverse axis is sensing element inductance value (nH), and the longitudinal axis is transponder echo frequency (MHz)), to NDR434 resonator, and sensitivity 1.1kHz/nH.
15. parallel SAW (Surface Acoustic Wave) resonator interface type transponders
Figure 10 is the signal of parallel interface type transponder circuit, and the matching network between SAW (Surface Acoustic Wave) resonator and antenna is ∏ type, and wherein reactance type sensing element is as one of ∏ type network.During application, commonly use reactance type sensing element and antenna and interface and connect.
It is as follows that process chosen by Interface Matching element: resonator two ends shunt capacitance C2, makes parallel network resistance be 50 Europe; Series inductance L2 again, makes series network reactance symmetrical to zero line.
Figure 17-1 and Figure 17-2 is parallel connection type net mate effect, and Figure 17-1 is that SAW (Surface Acoustic Wave) resonator accesses the forward and backward S11 characteristic of matching capacitance inductance, and transverse axis is frequency (MHz), and the longitudinal axis is S11 amplitude (dB).After access matching capacitance inductance, network is moved, and coupling is improved many, because after shunt capacitance, network resistor has been reduced to 50 Europe (see the curve be positioned in Figure 17-2 below, transverse axis is frequency (MHz), and the longitudinal axis is network resistor value (Europe)).In Figure 17-1, the curve being positioned at top is the characteristic of resonator itself, and intermediate curve is that intermediate match crosses angle value.
The characteristic of parallel interface and the contrary of tandem interface.After connecting capacitor type sensing element, the transponder sensing characteristics linearity is fine, as shown in Figure 18-1 and Figure 18-2.Figure 18-1 is network S11 characteristic, and transverse axis is frequency (MHz), and the longitudinal axis is S11 amplitude (dB).Figure 18-2 is the response curve of the parallel interface transponder of capacitor type sensing, and transverse axis is sensing element capacitance (pF), and the longitudinal axis is transponder echo frequency (MHz).To NDR434 resonator, sensitivity is 2.7kHz/pF.
Figure 19-1 and Figure 19-2 is the sensing response of the parallel interface transponder of inductive type sensing, obviously non-linear.Figure 19-1 is network S11 characteristic, and transverse axis is frequency (MHz), and the longitudinal axis is S11 amplitude (dB).Figure 19-2 is the response curve of the parallel interface transponder of inductive type sensing, and transverse axis is sensing element inductance value (nH), and the longitudinal axis is transponder echo frequency (MHz).
16. SAW (Surface Acoustic Wave) resonator parameter optimizations
Simulation shows, the electrostatic capacitance correspondence of SAW (Surface Acoustic Wave) resonator answers the impact of device sensing sensitivity not quite, and just echo frequency has mobile (see Figure 20, for capacitive displacement sensing element, transverse axis is sensing element displacement, and the longitudinal axis is transponder echo frequency (MHz)).
Simulation also shows, the sensing sensitivity of transponder and the Q value negative correlation of SAW (Surface Acoustic Wave) resonator, lowers resonator q and can improve sensing sensitivity.For capacitive displacement sensing element, as shown in figure 21, transverse axis is sensing element displacement, and the longitudinal axis is transponder echo frequency (MHz).In figure 21, red line represents displacement sensing characteristic during resonator Q=10170, and displacement sensing characteristic when blue line represents resonator Q=7520.
But the Q value of resonator lowers, and can affect the monitoring reliability of sensor wireless remote measurement, so need to design SAW (Surface Acoustic Wave) resonator parameter according to actual application environment.Thus, can be optimal selection according to use customization SAW (Surface Acoustic Wave) resonator.
17. Interface Matching element apolegamy requirement
Because actual match component value is inconsistent with design, the sensing characteristics of interface type transponder can be affected.Multi-form interface type, the impact of Interface Matching element is also different.
Simulation is learnt, capacity ratio inductive impact is large, and when Figure 22 illustrates Interface Matching capacitance variation +/-5%, the sensing characteristics change of inductive type Sensing interface type transponder, transverse axis is sensing element displacement, and the longitudinal axis is transponder echo frequency (MHz).So the apolegamy of electric capacity C2 more will be noted.
Simulation is learnt, to capacitive displacement type Sensing interface type transponder, the coupling inductance of slightly little (-1% ~-3%) can make sensing dynamic range strengthen, and sensing responsive degree is constant, and the linearity is a bit weaker.And to inductive type Sensing interface type transponder, coupling inductance is slightly better larger
18. passive and wireless telemetry interface chip technology schemes
Due to choosing of Interface Matching element, main relevant with the characteristic of SAW (Surface Acoustic Wave) resonator, so passive and wireless telemetry interface pcb board circuit is integrated into an independent chip, not only ensure that the consistency of performance of interface, and facilitate application more greatly.
By simulating, for the SAW (Surface Acoustic Wave) resonator of standard design, the scope of Interface Matching component value is as table 3.
Table 3 Interface Matching component value
| Electric capacity (pF) | Inductance (nH) | |
| Parallel interface | 5～15 | 5～15nH |
| Tandem interface | 1～10 | ～100nH |
Due to capacitance accurately and stable be ensure that Interface Matching characteristic is crucial, when actual chips designs and produces, should by preceding method optimized interface matched element value.Below for vector network analyzer and microwave probe, optimization method is described.
In tandem type interface, use admittance circle diagram.First adjust electric capacity C2, make to be on standard conductance circle in the S11 value of resonant frequency point; L2 is regulated to make whole S11 curve symmetrical to circle diagram horizontal ordinate.
In tandem type interface, use impedance circle diagram.First adjust electric capacity C2, make to be on measuring resistance circle in the S11 value of resonant frequency point; L2 is regulated to make whole S11 curve symmetrical to circle diagram horizontal ordinate.
19. SAW (Surface Acoustic Wave) device technological processes
SAW (Surface Acoustic Wave) device makes based on common microelectronic technology platform now, and most widely used is standard disk, a photoetching and wet etching planar technology, as Figure 23 shows.
Operation 1: cleaning single-sided polishing piezoelectric quartz disk
Because this interface needs high stable SAW (Surface Acoustic Wave) resonator, therefore the general specific tangential piezoelectric quartz substrate all adopting temperature coefficient extremely low (only having the temperature coefficient of second order and more high-order).Many employings 3 ~ 6 inch circles at present, thickness is about 0.2 ~ 0.6mm, to adapt to modern microelectronic processing platform.
Operation 2: deposit aluminium film
Due to satisfactory electrical conductivity and basic unit's tack of aluminium, acoustic current surface wave device mostly adopts aluminium as electrode metal.Aluminium film on piezoelectric substrate, the common metal film deposition methods such as thermal evaporation, electron beam evaporation and sputtering can be adopted to generate, and thickness is about 0.1 ~ 5um, is inversely proportional to device operating frequencies.
For ensureing SAW (Surface Acoustic Wave) resonator frequency invariance, require that metal film thickness precision is very high, at least will below 1%.
Operation 3: photoetching making electrode pattern
Adopt microelectronics standard photolithography process, make the photoresist mask pattern of surface acoustic wave device electrode, Figure 23 is depicted as positive photoresist mask.The SAW (Surface Acoustic Wave) device electrode overwhelming majority is periodic structure, and its photoetching resolution strengthens with the frequency of operation raising of SAW (Surface Acoustic Wave) device, and such as, 1GHz device, electrode is 2um periodic structure.
Particularly, the dutycycle of SAW (Surface Acoustic Wave) resonator periodic electrode obviously can affect its resonance frequency, so the accuracy of SAW (Surface Acoustic Wave) device electrode pattern also requires very high.
Operation 4: wet etching makes electrode
General employing buffered alkaline reagent corrosion aluminium, the electrode can producing SAW (Surface Acoustic Wave) device comes.Accurate control wet corrosion technique parameter guarantees that SAW (Surface Acoustic Wave) resonator frequency is crucial accurately.
Components and parts integrated technology on 20. piezoelectric substrates
For improving the temperature stability of interface module, consistance and reliability, we have proposed piezoelectric substrate components and parts integrated technical solution: SAW (Surface Acoustic Wave) resonator and coupling inductance capacitance are produced on quartz substrate simultaneously.
The design of SAW (Surface Acoustic Wave) resonator is known, does not tire out state at this.
The reliable method of piezoelectric substrate integrated capacitance adopts interdigital capacitor, as shown in figure 24.The metallic aluminium adopting SAW (Surface Acoustic Wave) resonator electrode same is as interdigital capacitor electrode metal, and processing compatibility is high.
Under first approximation, N to the interdigital right capacitance that aperture is W (cm) is: by formula
C＝N*W*Cp
Wherein Cp is unit length interdigital capacitor, and unit pF/cm, quartz is about 4.5pF/cm.
The structure of another kind of integrated capacitance is sandwich structure electric capacity, and as Figure 25 shows, be made up of clipping skim high dielectric constant film upper and lower metal electrode, the capacitance of sandwich structure electric capacity is:
C＝εS/d
In formula, ε and d is specific inductive capacity and the thickness of deielectric-coating respectively, and S is sandwich structure useful area.
Used medium material and growing method are all that the personage being engaged in microelectric technique technique knows, as silicon dioxide, silicon nitride and oxides of nitrogen etc.
The structure of the most convenient of integrated inductor as shown in figure 26, is the planar inductor that metal strip electrode complications are formed.Its inductance value is easy to find from correlation technique handbook.
21. wireless and passive telemetry interface chips
By the interface circuit topology of Fig. 8, Fig. 9, being easy to design interface chip, is several typical chip layouts below.
22. single resonance device interface chip embodiments
Figure 27 be an employing SAW (Surface Acoustic Wave) resonator tandem interface chip on integrated components' placement, the external general reactance type sensing element hot junction of chip exit two:, another external antenna hot junction.
Figure 28 be an employing SAW (Surface Acoustic Wave) resonator parallel interface chip on integrated components' placement, chip exit is also two: external general reactance type sensing element hot junction and antenna hot junction incoming end I/O in parallel, and earth terminal.
Figure 29 and Figure 30, illustrates and needs the parallel interface chip that in additional chips, tinsel connects.Figure 29 is the parallel interface adopting sandwich structure electric capacity, and wherein the top electrode of sandwich structure electric capacity need be connected with SAW (Surface Acoustic Wave) resonator by a tinsel connecting line.Figure 30 is the parallel interface adopting sandwich structure electric capacity and spiral inductance, and wherein the top electrode of sandwich structure electric capacity and the central electrode of spiral inductance all need to be connected with SAW (Surface Acoustic Wave) resonator with additional tinsel connecting line.Adopt this reason compared with labyrinth element to be that their reactance value is comparatively large, and simple interdigital capacitor and broken line inductance do not reach.
23. double resonator interface chip embodiments
Because wireless channel has impact to wireless sensing transponder characteristic, it is necessary for adopting two SAW (Surface Acoustic Wave) resonator to form difference frequency structures, so the wireless telemetering interface of practicality is formed by the different SAW (Surface Acoustic Wave) resonator of two resonance frequencies and supporting Interface Matching element thereof.One of them interface connection universal reactance type sensing element, reader will mainly detect two resonator resonance frequency differences to know heat transfer agent.
Figure 31 is tandem double resonator interface, is integrated on a piezoelectric substrate together by two above-mentioned tandem single resonance device interfaces, and the resonance frequency of two SAW (Surface Acoustic Wave) resonator is different.Two original sensing element links, one of them connects a general reactance type sensing element, and another ground connection.
Figure 32 is parallel double resonator interface, is integrated on a piezoelectric substrate together by two above-mentioned parallel single resonance device interfaces, and the resonance frequency of two SAW (Surface Acoustic Wave) resonator is different.Two I/O links, connect a symmetrical antenna; A general reactance type sensing element only connects one of them I/O and holds.
24. interface chips form interface type transponder
According to user's requirement, naked interface chip and reactance type sensing element can be adopted to encapsulate altogether, after also interface chip can being packaged into interface device, provide user.Because (encapsulating) chip is passive and wireless interface, with reactance type sensing element together with antenna packages, just form a wireless sensing transponder, enormously simplify the difficulty that reactance type sensing element increases wireless sensing function.Examination is exemplified below.
25. parallel connection type interface type transponders
Parallel connection type interface is equivalent to a series resonant network, as Figure 33 shows, and port conductance 0.02S.
Figure 34 is the interface type transponder circuit that single interface chip (device) is formed.
Figure 35 is the interface type transponder circuit that the single-chip (device) of employing two different resonance frequencies is formed, and wherein two interface chips combine and are equal to aforementioned parallel double resonator interface chip.
In some cases, Ba Lun can be adopted to connect two interface chips (device) and to form interface type transponder, as Figure 36 shows.
26. tandem type interface type transponders
Tandem interface is equivalent to a series resonant network, and during resonance, port is equivalent to one 50 Europe resistance, as Figure 37 shows.
After the series connection of reactance type sensing element, only change its series resonance frequency.
Figure 38 is the interface transponder circuit that single-chip (device) is formed.
Figure 39 is the interface transponder circuit of the chip (device) of employing two different resonance frequencies, and wherein two chip interfaces combine and are equal to aforementioned tandem double resonator interface chip.
In some cases, Ba Lun can be adopted to connect two interface chips (device) and to form interface type transponder, as Figure 40 shows.
27. Application of composite
By multiple single resonance device interface chip and a double resonator interface chip, a compound transponder can be formed.
Figure 41 represents that one can the transponder of simultaneously wireless telemetering three reactance type sensing element information, have employed two single resonance device chip interface chips and a double resonator interface chip, the resonance frequency of their four SAW (Surface Acoustic Wave) resonator is different, and also should be different from the difference of reference resonator frequency.
Although the present invention is described by embodiment, embodiment is not used for limiting the present invention.Those skilled in the art in the scope of spirit of the present invention, can make various distortion and improvement, but equally all within protection scope of the present invention.What therefore protection scope of the present invention should define with the claims of the application is as the criterion.
Claims (4)
1. a general reactance type sensing element passive and wireless telemetry interface chip, is characterized in that,
Chip substrate is piezoelectric substrate;
Chip is provided with one or more SAW (Surface Acoustic Wave) resonator, its resonance frequency is different;
Chip is provided with the inductance and electric capacity that match separately with described SAW (Surface Acoustic Wave) resonator;
On chip, the inductance capacitance of each SAW (Surface Acoustic Wave) resonator and its pairing forms low mismatch network.
2. according to the general reactance type of the one described in claim 1 sensing element passive and wireless telemetry interface chip, it is characterized in that, described chip substrate is the piezoelectric quartz substrate adopting temperature coefficient extremely low.
3., according to the general reactance type of the one described in claim 1 sensing element passive and wireless telemetry interface chip, it is characterized in that, the electric capacity on described chip is integrated on piezoelectric substrate.
4., according to the general reactance type of the one described in claim 1 sensing element passive and wireless telemetry interface chip, it is characterized in that, described inductance is integrated on piezoelectric substrate.
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