CN105413306A - Two-stage series screening recycling tank for silicon wafer cutting liquid - Google Patents
Two-stage series screening recycling tank for silicon wafer cutting liquid Download PDFInfo
- Publication number
- CN105413306A CN105413306A CN201510791327.XA CN201510791327A CN105413306A CN 105413306 A CN105413306 A CN 105413306A CN 201510791327 A CN201510791327 A CN 201510791327A CN 105413306 A CN105413306 A CN 105413306A
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- CN
- China
- Prior art keywords
- cutting liquid
- tank
- upper shell
- stage series
- screening device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
- B01D36/04—Combinations of filters with settling tanks
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M175/00—Working-up used lubricants to recover useful products ; Cleaning
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Filtration Of Liquid (AREA)
Abstract
The invention discloses a two-stage series screening recycling tank for silicon wafer cutting liquid. The two-stage series screening recycling tank comprises a tank body and a preliminary screening device. The preliminary screening device is arranged on an inlet of the tank body. The interior of the tank body is divided into a settling tank and an overflow tank through an overflow separation plate. A secondary filter device is arranged in the overflow tank. A cutting liquid outlet is formed in the bottom of the overflow tank. The preliminary screening device is in the shape of a long strip with a rectangular section and comprises a lower shell, an upper shell and a rotary shaft arranged between the upper shell and the lower shell. A crude liquid outlet is formed in the bottom of the lower shell. A rubber rolling wheel parallel and tangent to the rotary shaft is arranged on the upper shell. The upper shell is further provided with a cutting liquid inlet and an impurity particle outlet. A tongue in lap joint with the rotary shaft is arranged at the front end of the impurity particle outlet. The overflow tank is further provided with a secondary filter mechanism. The secondary filter mechanism comprises a net rack and a millipore filter film arranged on the net rack. According to the two-stage series screening recycling tank, real-time online maintenance can be effectively carried out on the cutting liquid, and polyethylene glycol recycling can be carried out on the cutting liquid about to scrap.
Description
Technical field
The present invention relates generally to silicon chip cutting fluid recycle device.
Background technology
In silicon chip cutting production process, as the responsible consumptive material of metal wire cutting, silicon chip cutting fluid is also indispensable, and price is more expensive, and use amount is large.Therefore for the recycling of cutting liquid and the improvement of working service, the production cost of silicon chip processing can effectively be reduced.
Summary of the invention
Goal of the invention: for above-mentioned existing Problems existing and deficiency, the object of this invention is to provide a kind of silicon chip cutting fluid two-stage series connection screening accumulator tank, effectively can carry out real-time online maintenance to cutting liquid, and scrap to close the recycling that cutting liquid carries out polyethylene glycol.
Technical scheme: for achieving the above object, the present invention is by the following technical solutions: a kind of silicon chip cutting fluid two-stage series connection screening accumulator tank, comprise cell body and first screening device, described just screening device is located at the porch of cell body, subsider and overflow launder is divided into by weir divider in described cell body, and being provided with two-stage filter in overflow launder, the bottom of overflow launder is provided with cutting liquid outlet; The strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft; Described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.
As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
Beneficial effect: compared with prior art, structure of the present invention is simple, can screen for the first time cutting liquid, filters larger particles, for the recovery of follow-up cutting liquid provides support, achieves the online real-time servicing of cutting liquid.
Accompanying drawing explanation
Fig. 1 is the structural representation of accumulator tank of the present invention;
Fig. 2 is the structural representation of just screening device of the present invention;
Fig. 3 is the cross section structure schematic diagram of just screening device of the present invention.
Wherein, wherein, cell body 1, subsider 2, overflow launder 3, cutting liquid import 4, weir divider 5, cutting liquid outlet 6, upper shell 7, lower house 8, rotating shaft 9, thick liquid outlet 10, rubber roll 11, impurity particle outlet 12, tongue 13, miillpore filter 14, rack 15.
Detailed description of the invention
Below in conjunction with specific embodiment, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
As shown in Figures 1 to 3, a kind of silicon chip cutting fluid two-stage series connection screening accumulator tank, comprise cell body and first screening device, described just screening device is located at the porch of cell body, subsider and overflow launder is divided into by weir divider in described cell body, and being provided with two-stage filter in overflow launder, the bottom of overflow launder is provided with cutting liquid outlet; The strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft; Described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.
As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
Cutting liquid enters first screening device after catch tray is collected from cutting liquid import, under the drive of rotating shaft, slurries containing particle suspensions export discharge through the tongue of overlap joint from impurity particle by the top of rotating shaft, the comparatively clean cutting liquid then direct thick liquid outlet from bottom flows into subsider, and the suspension settlement particle in sedimentation cutting liquid, then along with liquid level rise stay from the top of the first weir divider after enter gap between two pieces of dividing plates, and enter overflow launder from the bottom of the second weir divider, successively again through the 3rd weir divider and from its top inflow overflow launder, cascade filtration is carried out through miillpore filter subsequently under negative pressure state, finally deliver in subsequent treatment groove carry out material supplement and reclaim.
Claims (2)
1. a silicon chip cutting fluid two-stage series connection screening accumulator tank, it is characterized in that: comprise cell body and first screening device, described just screening device is located at the porch of cell body, subsider and overflow launder is divided into by weir divider in described cell body, and being provided with two-stage filter in overflow launder, the bottom of overflow launder is provided with cutting liquid outlet; The strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft; Described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.
2. silicon chip cutting fluid two-stage series connection screens accumulator tank according to claim 1, and it is characterized in that: described miillpore filter is hollow-fibre membrane or ceramic membrane, aperture is 0.2 ~ 2.0um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510791327.XA CN105413306A (en) | 2015-11-17 | 2015-11-17 | Two-stage series screening recycling tank for silicon wafer cutting liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510791327.XA CN105413306A (en) | 2015-11-17 | 2015-11-17 | Two-stage series screening recycling tank for silicon wafer cutting liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105413306A true CN105413306A (en) | 2016-03-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510791327.XA Pending CN105413306A (en) | 2015-11-17 | 2015-11-17 | Two-stage series screening recycling tank for silicon wafer cutting liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105413306A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109045790A (en) * | 2018-10-28 | 2018-12-21 | 山西北化关铝化工有限公司 | Separate the device of free-flowing dynamite in distillating liquid |
-
2015
- 2015-11-17 CN CN201510791327.XA patent/CN105413306A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109045790A (en) * | 2018-10-28 | 2018-12-21 | 山西北化关铝化工有限公司 | Separate the device of free-flowing dynamite in distillating liquid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160323 |