CN105363308A - Recovery system for coarse liquid of silicon chip cutting fluid - Google Patents

Recovery system for coarse liquid of silicon chip cutting fluid Download PDF

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Publication number
CN105363308A
CN105363308A CN201510791627.8A CN201510791627A CN105363308A CN 105363308 A CN105363308 A CN 105363308A CN 201510791627 A CN201510791627 A CN 201510791627A CN 105363308 A CN105363308 A CN 105363308A
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CN
China
Prior art keywords
cutting fluid
overflow
tank
cell body
silicon chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510791627.8A
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Chinese (zh)
Inventor
朱琳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yangzhou Zhigao Building Waterproof Materials Co Ltd
Original Assignee
Yangzhou Zhigao Building Waterproof Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yangzhou Zhigao Building Waterproof Materials Co Ltd filed Critical Yangzhou Zhigao Building Waterproof Materials Co Ltd
Priority to CN201510791627.8A priority Critical patent/CN105363308A/en
Publication of CN105363308A publication Critical patent/CN105363308A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a recovery system for a coarse liquid of a silicon chip cutting fluid. The system includes a cutting fluid collecting groove, a cutting fluid initial separation mechanism and an overflow recovery tank; the cutting fluid initial separation mechanism is arranged on the inlet of the overflow recovery tank, and is communicated with the cutting fluid collecting groove; the overflow recovery tank comprises a tank body, the tank body is provided inside with overflow separator plates for partitioning the tank into a settling tank and an overflow tank; the upper part of the side wall of the settling tank is provided with a cutting fluid inlet; the settling tank is provided inside with a net rack, and the net rack is paved with a microporous membrane; the bottom of the overflow tank is provided with a cutting fluid outlet; the overflow separator plates include two vertically arranged separator plates; the bottom and two sides of the separator plate near the settling tank is in sealing connection with the tank body, and the height of the separator plate is lower than the height of the tank body. The system can simultaneously filter, sieve and maintain the cutting fluid, prolong the service life of the cutting fluid; and the system conducts initial separation on the nearly scrap cutting fluid, and is conducive to the subsequent recovery of polyethylene glycol.

Description

The thick liquid recovery system of a kind of silicon chip cutting fluid
Technical field
The present invention relates generally to silicon chip cutting fluid recycle device.
Background technology
In silicon chip cutting production process, as the responsible consumptive material of metal wire cutting, silicon chip cutting fluid is also indispensable, and price is more expensive, and use amount is large.Therefore for the recycling of cutting liquid and the improvement of working service, the production cost of silicon chip processing can effectively be reduced.
Summary of the invention
Goal of the invention: for above-mentioned existing Problems existing and deficiency, the object of this invention is to provide the thick liquid recovery system of a kind of silicon chip cutting fluid.
Technical scheme: for achieving the above object, the present invention is by the following technical solutions: the thick liquid recovery system of a kind of silicon chip cutting fluid, comprise cutting liquid feeder, cutting liquid primary election mechanism and overflow accumulator tank, described cutting liquid primary election mechanism is located at the import department of overflow accumulator tank, is communicated with cutting liquid feeder simultaneously; Described overflow accumulator tank comprises cell body, is provided with weir divider cell body is divided into subsider and overflow launder in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises two pieces of dividing plates vertically arranged, and bottom the dividing plate of close subsider and both sides and cell body are tightly connected, and its height is lower than cell body height; And be tightly connected near the dividing plate both sides of overflow launder and cell body, leave space between bottom and overflow launder.
As preferably, the strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft.
As preferably, described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.
As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
Beneficial effect: compared with prior art, the present invention can carry out filtering screening maintenance to cutting liquid while cutting, extends the service life of cutting liquid; And primary dcreening operation can be carried out to close to the cutting liquid scrapped, have reason the recovery of follow-up polyethylene glycol.
Accompanying drawing explanation
Fig. 1 is the structural representation of the thick liquid recovery system of silicon chip cutting fluid of the present invention;
Fig. 2 is the structural representation of just screening device of the present invention;
Fig. 3 is the cross section structure schematic diagram of just screening device of the present invention.
Wherein, cutting liquid feeder 1, cell body 2, subsider 3, overflow launder 4, weir divider 5, cutting liquid outlet 6, upper shell 7, lower house 8, rotating shaft 9, thick liquid outlet 10, rubber roll 11, impurity particle outlet 12, tongue 13, miillpore filter 14, rack 15, cutting liquid feeder 16.
Detailed description of the invention
Below in conjunction with specific embodiment, illustrate the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after having read the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention has all fallen within the application's claims limited range.
The thick liquid recovery system of a kind of silicon chip cutting fluid, comprise cutting liquid feeder, cutting liquid primary election mechanism and overflow accumulator tank, described cutting liquid primary election mechanism is located at the import department of overflow accumulator tank, is communicated with cutting liquid feeder simultaneously; Described overflow accumulator tank comprises cell body, is provided with weir divider cell body is divided into subsider and overflow launder in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises two pieces of dividing plates vertically arranged, and bottom the dividing plate of close subsider and both sides and cell body are tightly connected, and its height is lower than cell body height; And be tightly connected near the dividing plate both sides of overflow launder and cell body, leave space between bottom and overflow launder.
As preferably, the strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft.As preferably, described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.As preferably, described miillpore filter is hollow-fibre membrane or ceramic membrane, and aperture is 0.2 ~ 2.0um.
Cutting liquid enters first screening device after catch tray is collected from cutting liquid import, under the drive of rotating shaft, slurries containing particle suspensions export discharge through the tongue of overlap joint from impurity particle by the top of rotating shaft, the comparatively clean cutting liquid then direct thick liquid outlet from bottom flows into subsider, and the suspension settlement particle in sedimentation cutting liquid, then along with liquid level rise stay from the top of the first weir divider after enter gap between two pieces of dividing plates, and enter overflow launder from the bottom of the second weir divider, successively again through the 3rd weir divider and from its top inflow overflow launder, cascade filtration is carried out through miillpore filter subsequently under negative pressure state, finally deliver in subsequent treatment groove carry out material supplement and reclaim.

Claims (4)

1. the thick liquid recovery system of silicon chip cutting fluid, it is characterized in that: comprise cutting liquid feeder, cutting liquid primary election mechanism and overflow accumulator tank, described cutting liquid primary election mechanism is located at the import department of overflow accumulator tank, is communicated with cutting liquid feeder simultaneously; Described overflow accumulator tank comprises cell body, is provided with weir divider cell body is divided into subsider and overflow launder in described cell body, and the top of the sidewall of described subsider is provided with cutting liquid import; That goes back level in described subsider is provided with rack, and this rack is equipped with miillpore filter, and the bottom of described overflow launder is provided with cutting liquid outlet; Described weir divider comprises two pieces of dividing plates vertically arranged, and bottom the dividing plate of close subsider and both sides and cell body are tightly connected, and its height is lower than cell body height; And be tightly connected near the dividing plate both sides of overflow launder and cell body, leave space between bottom and overflow launder.
2. the thick liquid recovery system of silicon chip cutting fluid according to claim 1, it is characterized in that: the strip of described just screening device to be cross section be rectangle, comprise lower house, upper shell and be located at the rotating shaft in the middle of middle upper-lower casing, the bottom of described lower house is provided with the outlet of thick liquid, described upper shell is provided with the plastic roller tangent with shaft parallel, upper shell is also provided with cutting liquid import and impurity particle outlet, and the front end of this impurity particle outlet is provided with the tongue overlapped with rotating shaft.
3. the thick liquid recovery system of silicon chip cutting fluid according to claim 1, is characterized in that: described overflow launder is also provided with cascade filtration mechanism, and described cascade filtration mechanism comprises rack and is located at miillpore filter on this rack.
4. the thick liquid recovery system of silicon chip cutting fluid according to claim 3, it is characterized in that: described miillpore filter is hollow-fibre membrane or ceramic membrane, aperture is 0.2 ~ 2.0um.
CN201510791627.8A 2015-11-17 2015-11-17 Recovery system for coarse liquid of silicon chip cutting fluid Pending CN105363308A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510791627.8A CN105363308A (en) 2015-11-17 2015-11-17 Recovery system for coarse liquid of silicon chip cutting fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510791627.8A CN105363308A (en) 2015-11-17 2015-11-17 Recovery system for coarse liquid of silicon chip cutting fluid

Publications (1)

Publication Number Publication Date
CN105363308A true CN105363308A (en) 2016-03-02

Family

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Application Number Title Priority Date Filing Date
CN201510791627.8A Pending CN105363308A (en) 2015-11-17 2015-11-17 Recovery system for coarse liquid of silicon chip cutting fluid

Country Status (1)

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CN (1) CN105363308A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108793554A (en) * 2018-06-12 2018-11-13 山东大海新能源发展有限公司 A kind of silicon chip cutting fluid circulatory system and method using diamond wire
CN108972920A (en) * 2018-07-20 2018-12-11 江苏吉星新材料有限公司 A kind of central liquid supply system and its technique of intelligence sapphire slices system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108793554A (en) * 2018-06-12 2018-11-13 山东大海新能源发展有限公司 A kind of silicon chip cutting fluid circulatory system and method using diamond wire
CN108972920A (en) * 2018-07-20 2018-12-11 江苏吉星新材料有限公司 A kind of central liquid supply system and its technique of intelligence sapphire slices system

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Application publication date: 20160302