CN105404128B - Multiframe phase-shifted digital holographic method and device - Google Patents

Multiframe phase-shifted digital holographic method and device Download PDF

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CN105404128B
CN105404128B CN201610006913.3A CN201610006913A CN105404128B CN 105404128 B CN105404128 B CN 105404128B CN 201610006913 A CN201610006913 A CN 201610006913A CN 105404128 B CN105404128 B CN 105404128B
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CN105404128A (en
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张文喜
吕笑宇
相里斌
伍洲
李杨
孔新新
刘志刚
郭晓丽
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Academy of Opto Electronics of CAS
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/10Processes or apparatus for producing holograms using modulated reference beam
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/22Processes or apparatus for obtaining an optical image from holograms
    • G03H1/2202Reconstruction geometries or arrangements
    • G03H1/2205Reconstruction geometries or arrangements using downstream optical component
    • G03H2001/2207Spatial filter, e.g. for suppressing higher diffraction orders

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Abstract

本发明公开了一种多帧相移数字全息方法及装置,相关方法包括:采用两个声光调制器AOM分别对应的调制物光和参考光产生低频外差,并利用高帧频面阵探测器进行探测,获得多帧相移全息图;分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。通过采用本发明提供的方案,不但可以消除孪生像的影响,更可以有效减轻随机噪声的干扰,提高成像精度和环境适应性。

The invention discloses a multi-frame phase-shift digital holography method and device. The related method includes: using two acousto-optic modulators (AOMs) to generate low-frequency heterodyne by using two acousto-optic modulators (AOMs) respectively corresponding to modulating object light and reference light, and using a high-frame-frequency area array to detect detector to obtain a multi-frame phase-shift hologram; respectively perform time-domain spectral transformation on the signal of each pixel in the multi-frame phase-shift hologram, and extract the amplitude and phase of the spectral value at the heterodyne frequency; from The target amplitude and target phase are extracted from the amplitude and phase of the spectrum value at the heterodyne frequency, thereby realizing holographic reconstruction. By adopting the solution provided by the present invention, not only the influence of twin images can be eliminated, but also the interference of random noise can be effectively reduced, and the imaging precision and environmental adaptability can be improved.

Description

多帧相移数字全息方法及装置Multi-frame phase shift digital holography method and device

技术领域technical field

本发明涉及数字全息技术领域,尤其涉及一种多帧相移数字全息方法及装置。The invention relates to the technical field of digital holography, in particular to a multi-frame phase-shifting digital holography method and device.

背景技术Background technique

全息技术利用干涉记录和衍射重建来获得目标的振幅和相位信息,从而实现对目标的三维成像。数字全息技术利用数字设备实现全息记录和重建。相比其他三维成像技术,数字全息技术具有非接触、非扫描、非染色、定量等优势,可以应用于生物和微机电系统领域的成像和测量。数字全息技术中存在两个主要问题:一个是孪生像问题,一个是随机噪声问题(机械振动、气流扰动等)。这些问题影响了数字全息技术的成像精度,并限制了应用范围。相移数字全息技术通过在物光和参考光间引入相移,可以获得具有一定相移量的几帧全息图(通常为4帧),数字处理后可以消除孪生像干扰,并在一定程度上减轻随机噪声的影响。Holographic technology uses interference recording and diffraction reconstruction to obtain the amplitude and phase information of the target, so as to realize the three-dimensional imaging of the target. Digital holography technology utilizes digital equipment to realize holographic recording and reconstruction. Compared with other 3D imaging technologies, digital holography has the advantages of non-contact, non-scanning, non-staining, and quantitative, and can be applied to imaging and measurement in the fields of biology and microelectromechanical systems. There are two main problems in digital holography: one is the twin image problem, and the other is the random noise problem (mechanical vibration, airflow disturbance, etc.). These problems affect the imaging accuracy of digital holography and limit the application range. Phase-shift digital holography technology can obtain several frames of holograms (usually 4 frames) with a certain amount of phase shift by introducing a phase shift between the object light and the reference light. After digital processing, the twin image interference can be eliminated, and to a certain extent Mitigates the effects of random noise.

目前,存在几种相移全息装置和相应的处理算法,但由于其分别具有相移非线性、探测帧数有限、处理算法抗噪性有限等问题,使得这些系统都具有抗噪性不强的缺点,影响了成像精度并限制了可应用的领域。At present, there are several phase-shift holographic devices and corresponding processing algorithms, but due to their respective problems such as phase-shift nonlinearity, limited number of detection frames, and limited noise resistance of processing algorithms, these systems have weak noise immunity. Disadvantages, which affect the imaging accuracy and limit the field of application.

发明内容Contents of the invention

本发明的目的是提供一种多帧相移数字全息方法及装置,不但可以消除孪生像的影响,更可以有效减轻随机噪声的干扰,提高成像精度和环境适应性。The purpose of the present invention is to provide a multi-frame phase-shift digital holography method and device, which can not only eliminate the influence of twin images, but also effectively reduce the interference of random noise, and improve imaging accuracy and environmental adaptability.

本发明的目的是通过以下技术方案实现的:The purpose of the present invention is achieved through the following technical solutions:

一种多帧相移数字全息方法,包括:A multi-frame phase-shifting digital holography method, comprising:

采用两个声光调制器AOM分别对应的调制物光和参考光产生低频外差,并利用高帧频面阵探测器进行探测,获得多帧相移全息图;Two acousto-optic modulators (AOM) are used to generate low-frequency heterodyne corresponding to the modulated object light and reference light, and are detected by a high-frame-frequency area array detector to obtain a multi-frame phase-shift hologram;

分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;Carry out time-domain spectral transformation to the signal of each pixel point in the multi-frame phase-shifted hologram respectively, and extract the amplitude and phase of the spectral value at the heterodyne frequency;

从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。The target amplitude and target phase are extracted from the amplitude and phase of the spectral value at the heterodyne frequency, thereby realizing holographic reconstruction.

进一步的,所述获得多帧相移全息图包括:Further, said obtaining multi-frame phase shift hologram includes:

获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector:

式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively;

物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as:

式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is:

ωH=ωOR=2πfHω H = ω O - ω R = 2πf H ;

包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is:

从而获得多帧相移全息图stotal(t(n)),其中的n为每一帧序号,t(n)为第n帧序号对应的采样时间,n=1,2,...,Ntotal,Ntotal为获得的全息图总帧数。In this way, a multi-frame phase shift hologram s total (t(n)) is obtained, where n is the serial number of each frame, and t(n) is the sampling time corresponding to the nth frame serial number, n=1,2,..., N total , where N total is the total number of frames of the obtained hologram.

进一步的,所述分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位包括:Further, the step of performing time-domain spectral transformation on the signal of each pixel in the multi-frame phase-shifted hologram, and extracting the amplitude and phase of the spectral value at the heterodyne frequency includes:

利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):The signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform FFT to obtain the time-domain spectrum S(ω):

式中,ω表示外差角频率,stotal为多帧相移全息图总信号,n为每一帧序号,t(n)为第n帧序号对应的采样时间,Ntotal为获得的全息图总帧数;In the formula, ω represents the heterodyne angular frequency, s total is the total signal of the multi-frame phase-shifted hologram, n is the serial number of each frame, t(n) is the sampling time corresponding to the nth frame serial number, and N total is the obtained hologram Total number of frames;

提取时域频谱S(ω)在外差角频率ωH处数值S(ωH):Extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency ω H :

式中,σ为标准差;In the formula, σ is the standard deviation;

从而获得时域频谱S(ω)在外差频率处频谱值的振幅和相位 Thus, the amplitude of the spectral value of the time-domain spectrum S(ω) at the heterodyne frequency is obtained and phase

进一步的,从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建,获得目标完整信息,其包括:Further, the target amplitude and target phase are extracted from the amplitude and phase of the spectral value at the heterodyne frequency, so as to realize holographic reconstruction and obtain complete target information, which includes:

振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained:

式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values;

设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:Set the position of the reference optical path lens and the objective optical path lens to be symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as:

并且,根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:And, according to the obtained target amplitude and target phase, the complete target information O result is obtained, which is expressed as:

一种多帧相移数字全息装置,包括:预设光路、高帧频面阵探测器及数据处理器;其中:A multi-frame phase shift digital holographic device, including: a preset optical path, a high frame rate area array detector and a data processor; wherein:

所述预设光路中包含两个声光调制器AOM,用于分别对应的调制物光和参考光产生低频外差;The preset optical path includes two acousto-optic modulators AOM, which are used to generate low-frequency heterodyne for the corresponding modulation object light and reference light;

所述高帧频面阵探测器对预设光路的成像镜中的光进行探测,获得多帧相移全息图,并传输至数据处理器;The high frame rate area array detector detects the light in the imaging mirror of the preset optical path, obtains a multi-frame phase shift hologram, and transmits it to the data processor;

所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;再从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。The data processor performs time-domain spectral transformation on the signal of each pixel point in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency; then from the heterodyne frequency The target amplitude and target phase are extracted from the amplitude and phase of the spectral value, thereby realizing holographic reconstruction.

进一步的,所述预设光路包括:Further, the preset optical path includes:

一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、两个1/4波片、两个显微物镜、一个参考反射镜与一个成像镜;其中:One laser, one half-wave plate, three polarization beamsplitters, two mirrors, two acousto-optic modulators (AOM), two apertures, one spatial filter, two 1/4 wave plates, two microscope objectives , a reference mirror and an imaging mirror; where:

所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片1、显微物镜1后照射到目标上;携带目标信息的反射光依次经过显微物镜1、1/4波片1后变为s方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the polarization beam splitter 3, 1/4 wave plate 1, and the microscope objective lens 1, and then irradiates the target; the reflected light carrying target information passes through the microscope objective lens 1, 1/4 wave plate 1, and becomes polarized in the s direction The light is injected into the imaging mirror after passing through the polarization beam splitter 3 and the polarizer placed at an angle of 45 degrees;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片2、显微物镜2后照射到参考反射镜上;反射光依次经过显微物镜2、1/4波片2后变为p方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the Polarizing beam splitter 3, 1/4 wave plate 2, and microscopic objective lens 2 are irradiated onto the reference mirror; the reflected light turns into p-direction polarized light after passing through microscopic objective lens 2, 1/4 wave plate 2, and then polarized The dichroic prism 3 and the polarizing plate placed at an angle of 45 degrees are injected into the imaging mirror.

进一步的,所述预设光路包括:Further, the preset optical path includes:

一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、一个分光棱镜、两个1/4波片、一个显微物镜、一个参考反射镜与一个成像镜;其中:One laser, one half-wave plate, three polarization beamsplitters, two mirrors, two acousto-optic modulators (AOMs), two apertures, one spatial filter, one beamsplitter, two 1/4 wave plates, one Microscope objective lens, a reference mirror and an imaging mirror; wherein:

所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片1后照射到目标上;携带目标信息的反射光经过1/4波片1后变为s方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the beam splitter prism, microscope objective lens, polarization beam splitter 3 and 1/4 wave plate 1, and then irradiates the target; the reflected light carrying target information becomes polarized light in the s direction after passing through the 1/4 wave plate 1, and then sequentially After passing through the polarizing beam-splitting prism 3, the microscopic objective lens, the beam-splitting prism and the polarizer placed at an angle of 45 degrees, it enters the imaging mirror;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片2后照射到参考反射镜上;反射光经过1/4波片2后变为p方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the The beam-splitting prism, microscope objective lens, polarization beam-splitter prism 3 and 1/4 wave plate 2 are then irradiated onto the reference mirror; the reflected light becomes polarized light in the p direction after passing through the 1/4 wave plate 2, and then passes through the polarization beam-splitter prism 3 in turn , a microscope objective lens, a dichroic prism and a polarizer placed at an angle of 45 degrees are injected into the imaging mirror.

进一步的,所述预设光路包括:Further, the preset optical path includes:

一个激光器、两个半波片、一个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、两个空间滤波器、一个合束棱镜与一个成像镜;其中:One laser, two half-wave plates, one polarizing beam splitter prism, two mirrors, two acousto-optic modulators AOM, two apertures, two spatial filters, one beam combining prism and one imaging mirror; where:

所述激光器出射激光经半波片1和偏振分光棱镜,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through the half-wave plate 1 and the polarization beam splitter prism, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光依次经过半波片2与反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光进入空间滤波器1,滤波后光束依次经过合束棱镜与显微物镜后照射到目标上;携带目标信息的反射光依次经过显微物镜与合束棱镜后射入成像镜;The object light passes through the half-wave plate 2 and the mirror 1 in sequence, and after entering the acousto-optic modulator AOM 1, the emitted -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter 1, After filtering, the light beam passes through the beam combining prism and the microscopic objective lens in turn and then irradiates the target; the reflected light carrying target information passes through the microscopic objective lens and the beam combining prism in turn and then enters the imaging mirror;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2后进入空间滤波器2,滤波后光束经过合束棱镜后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter 2 after passing through the mirror 2, and the filtered beam passes through the beam combining prism and then shoots into the imaging mirror.

进一步的,所述获得多帧相移全息图包括:Further, said obtaining multi-frame phase shift hologram includes:

获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector:

式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively;

物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as:

式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is:

ωH=ωOR=2πfHω H = ω O - ω R = 2πf H ;

包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is:

从而获得多帧相移全息图stotal(t(n)),其中的n为每一帧序号,t(n)为第n帧序号对应的采样时间,n=1,2,...,Ntotal,Ntotal为获得的全息图总帧数;In this way, a multi-frame phase shift hologram s total (t(n)) is obtained, where n is the serial number of each frame, and t(n) is the sampling time corresponding to the nth frame serial number, n=1,2,..., N total , N total is the total number of frames of the obtained hologram;

所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位包括:The data processor performs time-domain spectral transformation on the signal of each pixel point in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency, including:

利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):The signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform FFT to obtain the time-domain spectrum S(ω):

式中,ω表示外差角频率,stotal(t(n))为多帧相移全息图,n为每一帧序号,t(n)为第n帧序号对应的采样时间,Ntotal为获得的全息图总帧数;In the formula, ω represents the heterodyne angular frequency, s total (t(n)) is a multi-frame phase shift hologram, n is the serial number of each frame, t(n) is the sampling time corresponding to the nth frame serial number, and N total is The total number of hologram frames obtained;

提取时域频谱S(ω)在外差角频率ωH处数值S(ωH):Extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency ω H :

式中,σ为标准差;In the formula, σ is the standard deviation;

从而获得时域频谱S(ω)在外差频率处频谱值的振幅和相位 Thus, the amplitude of the spectral value of the time-domain spectrum S(ω) at the heterodyne frequency is obtained and phase

进一步的,从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建,获得目标完整信息,其包括:Further, the target amplitude and target phase are extracted from the amplitude and phase of the spectral value at the heterodyne frequency, so as to realize holographic reconstruction and obtain complete target information, which includes:

振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained:

式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values;

设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:Set the position of the reference optical path lens and the objective optical path lens to be symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as:

根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:Obtain the complete information O result of the target according to the obtained target amplitude and target phase, which is expressed as:

由上述本发明提供的技术方案可以看出,采用两个声光调制器(acousto-opticmodulator,AOM)调制物光和参考光产生低频外差,并利用高帧频面阵探测器进行探测,从而在短时间内获取数百甚至数千帧的准确线性相移的全息图。并且,不同于传统的4步全息算法,采用多帧相移全息算法来提取目标振幅和相位信息,可以有效去除孪生像和随机噪声的干扰,获得目标清晰准确的三维重建图像。It can be seen from the above-mentioned technical solution provided by the present invention that two acousto-optic modulators (acousto-optic modulator, AOM) are used to modulate object light and reference light to generate low-frequency heterodyne, and a high frame rate area array detector is used for detection, thereby Acquire hundreds or even thousands of frames of accurate linear phase-shifted holograms in a short time. Moreover, unlike the traditional 4-step holographic algorithm, the multi-frame phase-shift holographic algorithm is used to extract the target amplitude and phase information, which can effectively remove the interference of twin images and random noise, and obtain a clear and accurate 3D reconstruction image of the target.

附图说明Description of drawings

为了更清楚地说明本发明实施例的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域的普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings on the premise of not paying creative work.

图1为本发明实施例提供的一种多帧相移数字全息方法的流程图;FIG. 1 is a flowchart of a multi-frame phase-shift digital holography method provided by an embodiment of the present invention;

图2a为本发明实施例提供的多帧相移全息图构成的三维矩阵示意图;Fig. 2a is a schematic diagram of a three-dimensional matrix composed of multi-frame phase shift holograms provided by an embodiment of the present invention;

图2b为本发明实施例提供的某一点的时域采样信号示意图;FIG. 2b is a schematic diagram of a time-domain sampling signal at a certain point provided by an embodiment of the present invention;

图3a为本发明实施例提供的一种多帧相移数字全息装置结构示意图;Fig. 3a is a schematic structural diagram of a multi-frame phase-shift digital holographic device provided by an embodiment of the present invention;

图3b为本发明实施例提供的又一种多帧相移数字全息装置结构示意图;Fig. 3b is a schematic structural diagram of another multi-frame phase-shift digital holographic device provided by an embodiment of the present invention;

图3c为本发明实施例提供的另一种多帧相移数字全息装置结构示意图;Fig. 3c is a schematic structural diagram of another multi-frame phase-shift digital holographic device provided by an embodiment of the present invention;

图4为本发明实施例提供的利用FFT处理该信号获得时域频谱示意图;FIG. 4 is a schematic diagram of time-domain spectrum obtained by processing the signal with FFT according to an embodiment of the present invention;

图5为本发明实施例提供的三维图像示意图。Fig. 5 is a schematic diagram of a three-dimensional image provided by an embodiment of the present invention.

具体实施方式Detailed ways

下面结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明的保护范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

图1为本发明实施例提供的一种多帧相移数字全息方法的流程图。如图1所示,其主要包括如下步骤:FIG. 1 is a flowchart of a multi-frame phase-shift digital holography method provided by an embodiment of the present invention. As shown in Figure 1, it mainly includes the following steps:

步骤11、采用两个声光调制器AOM分别对应的调制物光和参考光产生低频外差,并利用高帧频面阵探测器进行探测,获得多帧相移全息图。Step 11: Using two acousto-optic modulators AOMs to generate low-frequency heterodyne for the modulating object light and reference light respectively, and using a high-frame-frequency area array detector for detection to obtain a multi-frame phase-shift hologram.

本发明实施例两种,所述获得多帧相移全息图包括:There are two embodiments of the present invention. The obtaining of multi-frame phase shift holograms includes:

获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector:

式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively;

的关系为: and The relationship is:

其中,为不含目标时物光波的相位,为放置目标后物光波相位变化。in, is the phase of the object light wave without the target, is the phase change of the object light wave after placing the target.

物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as:

式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is:

ωH=ωOR=2πfH; (5)ω H =ω O −ω R =2πf H ; (5)

包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is:

从上述中可以看到,目标的振幅和相位信息被调制记录在第三项中,调制角频率为ωH,孪生像被记录在第二项中,有着不同的调制角频率-ωHIt can be seen from the above that the amplitude and phase information of the target is modulated and recorded in the third item, and the modulation angular frequency is ω H , and the twin image is recorded in the second item, with a different modulation angular frequency - ω H .

本发明实施例中,外差频率fH,探测器帧频fD,每一帧序号n,每一帧对应采样时间t(n),记录总时间ttotal,则获得的全息图总帧数Ntotal,相移周期数Nperiod,每周期内相移步数Nstep的关系为:In the embodiment of the present invention, the heterodyne frequency f H , the detector frame frequency f D , each frame number n, each frame corresponds to the sampling time t(n), and the total recording time t total , then the total number of hologram frames obtained N total , the number of phase shift cycles N period , and the relationship between the number of phase shift steps N step in each cycle are:

Nperiod=fHttotal (7)N period = f H t total (7)

Ntotal=fDttotal=NperiodNstep (9)N total = f D t total = N period N step (9)

例如,如果采用10Hz外差频率和200Hz探测帧频,就可以在3秒内获得200*3=600帧全息图,包括10*3=30个周期,且每周期有200/10=20步相移,各帧采样时间间隔为1/200=0.005s。For example, if a 10Hz heterodyne frequency and a 200Hz detection frame frequency are used, 200*3=600 frames of holograms can be obtained within 3 seconds, including 10*3=30 cycles, and each cycle has 200/10=20 phase steps shift, the sampling time interval of each frame is 1/200=0.005s.

从而获得了多帧相移全息图stotal(t(n)),n=1,2,...,NtotalThus, a multi-frame phase shift hologram s total (t(n)) is obtained, n=1, 2, . . . , N total .

步骤12、分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位。Step 12. Perform time-domain spectral transformation on the signal of each pixel in the multi-frame phase-shifted hologram, and extract the amplitude and phase of the spectral value at the heterodyne frequency.

获得的多帧相移全息图stotal(t(n))在计算机中构成一个数据矩阵M[r,c,Ntotal]。该矩阵包括两维空间和一维时间。r为探测器行像素数,c为探测器列像素数,Ntotal为全息图总帧数。因此,对于探测器的任一像素点(x,y),可以获得该点的探测信号M[x,y,1:Ntotal],采样数等于总帧数Ntotal。如图2所示,图2a为多帧相移全息图构成的三维矩阵,图2b为某一点的时域采样信号。The obtained multi-frame phase-shifted hologram s total (t(n)) constitutes a data matrix M[r,c,N total ] in the computer. This matrix includes two dimensions of space and one dimension of time. r is the number of pixels in the detector row, c is the number of pixels in the detector column, and N total is the total number of frames of the hologram. Therefore, for any pixel point (x,y) of the detector, the detection signal M[x,y,1:N total ] of the point can be obtained, and the number of samples is equal to the total number of frames N total . As shown in Figure 2, Figure 2a is a three-dimensional matrix composed of multiple frames of phase-shifted holograms, and Figure 2b is a time-domain sampling signal at a certain point.

本发明实施例中,利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):In the embodiment of the present invention, the signal of each pixel point in the multi-frame phase-shift hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform (FFT) to obtain the time-domain spectrum S(ω):

其中,ω表示外差角频率。再提取时域频谱S(ω)在外差角频率ωH处数值S(ωH),按照奈奎斯特-香农采样定律,当帧频fD满足外差频率fH的2倍及2倍以上时,目标频谱和孪生像频谱得到分离。在时域频谱外差频率点ωH处提取该像素点对应的stotal(t)表达式(公式6)中第三项上的目标信息,如上述S(ω)表达式所示。由于只提取频谱点ωH的信号,避开孪生像所在频谱点-ωH的信号,所以可以消除孪生像的影响,如下式:where ω represents the heterodyne angular frequency. Then extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency ω H. According to the Nyquist-Shannon sampling law, when the frame frequency f D satisfies twice and twice the heterodyne frequency f H When above, the target spectrum and the twin image spectrum are separated. Extract the target information on the third item in the s total (t) expression (Formula 6) corresponding to the pixel point at the time-domain spectral heterodyne frequency point ω H , as shown in the above S(ω) expression. Since only the signal of the spectral point ω H is extracted and the signal of the spectral point -ω H where the twin image is located is avoided, the influence of the twin image can be eliminated, as shown in the following formula:

当采样帧数Ntotal为正无穷时,上式中累加部分因子是的数学期望,如下式所示:When the number of sampling frames N total is positive infinity, the cumulative factor in the above formula is The mathematical expectation of is as follows:

通常,随机噪声是很复杂的,包括随机振动,气流扰动等。如果噪声的统计分布满足正态(高斯)分布,并且期望值μ=0,则概率密度函数p和特征函数F如公式(14)(15)所示,其中σ为标准差。Usually, random noise is complex, including random vibration, airflow disturbance, etc. If the statistical distribution of the noise satisfies the normal (Gaussian) distribution, and the expected value μ=0, then the probability density function p and the characteristic function F are shown in formulas (14) (15), where σ is the standard deviation.

公式(13)的结果等于公式(15)中k=1时的值,如式(16)所示。The result of formula (13) is equal to the value when k=1 in formula (15), as shown in formula (16).

经上述公式(13),(14),(15),(16)推导,可以得到公式(12)的结果,如公式(17)所示:Through the derivation of the above formulas (13), (14), (15), and (16), the result of the formula (12) can be obtained, as shown in the formula (17):

当采样帧数无穷大时,随机噪声的统计值是一个常数,提取目标信息不受噪声影响。在实际中,提高采样帧数Ntotal,公式(17)越接近等式,从而减轻随机噪声的影响,提高重建精确。When the number of sampling frames is infinite, the statistical value of random noise is a constant, and the extracted target information is not affected by noise. In practice, increasing the number of sampling frames N total , the closer the formula (17) is to the equation, thereby reducing the influence of random noise and improving the reconstruction accuracy.

因此,通过在时间频率域提取目标信息,可以有效去除孪生像的影响。并且,由于通过获得足够多帧的全息图进行计算,可以使随机噪声的统计值趋近于一个常数,从而减轻随机噪声的影响。对于不同量级的噪声,可以设置相应的外差频率和采样帧数,从而获得满足所需全息成像精度。Therefore, by extracting target information in the time-frequency domain, the influence of twin images can be effectively removed. Moreover, by obtaining enough frames of holograms for calculation, the statistical value of random noise can be approached to a constant, thereby alleviating the influence of random noise. For different levels of noise, the corresponding heterodyne frequency and sampling frame number can be set to obtain the required holographic imaging accuracy.

从公式(17)可得,时域频谱S(ω)在外差角频率点ωH处的数值S(ωH)的振幅值为相位值为 From formula (17), it can be obtained that the amplitude of the value S(ω H ) of the time-domain spectrum S( ω ) at the heterodyne angular frequency point ω H is The phase value is

步骤13、从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。Step 13, extracting the target amplitude and target phase from the amplitude and phase of the spectral value at the heterodyne frequency, so as to realize holographic reconstruction.

振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained:

式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values;

本发明实施例中,设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:In the embodiment of the present invention, if the position of the reference optical path lens and the objective optical path lens are symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as:

且由于设置探测器位于透镜像面位置,则等于目标重建相位,不需要再进行衍射重建。And since the detector is located at the image plane of the lens, then It is equal to the reconstruction phase of the target, and there is no need for diffraction reconstruction.

从而获得目标的归一化振幅anorm和相重建相位实现全息重建。Thereby obtaining the normalized amplitude a norm and phase reconstruction phase of the target Realize holographic reconstruction.

另外,根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:In addition, the complete information O result of the target is obtained according to the obtained target amplitude and target phase, which is expressed as:

本发明另一实施例中,还提供一种多帧相移数字全息装置,其主要包括:预设光路、高帧频面阵探测器及数据处理器;其中:In another embodiment of the present invention, a multi-frame phase-shift digital holographic device is also provided, which mainly includes: a preset optical path, a high frame rate area array detector and a data processor; wherein:

所述预设光路中包含两个声光调制器AOM,用于分别对应的调制物光和参考光产生低频外差;The preset optical path includes two acousto-optic modulators AOM, which are used to generate low-frequency heterodyne for the corresponding modulation object light and reference light;

所述高帧频面阵探测器对预设光路的成像镜中的光进行探测,获得多帧相移全息图,并传输至数据处理器;The high frame rate area array detector detects the light in the imaging mirror of the preset optical path, obtains a multi-frame phase shift hologram, and transmits it to the data processor;

所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;再从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。The data processor performs time-domain spectral transformation on the signal of each pixel point in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency; then from the heterodyne frequency The target amplitude and target phase are extracted from the amplitude and phase of the spectral value, thereby realizing holographic reconstruction.

本发明实施例中,所述预设光路有多种结构形式。如图3a-3c所示,示出了三种不同结构形式的光路,同时示出的光路与所述的高帧频面阵探测器及数据处理器共同组成了多帧相移数字全息装置。下面主要针对图3a-3c中除去高帧频面阵探测器及数据处理器的光路进行介绍。In the embodiment of the present invention, the preset optical path has various structural forms. As shown in Figures 3a-3c, three optical paths with different structures are shown, and the optical paths shown at the same time together with the high frame rate area array detector and data processor constitute a multi-frame phase-shift digital holographic device. The following mainly introduces the optical path except the high frame rate area array detector and the data processor in Fig. 3a-3c.

如图3a所示,其主要包括:一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、两个1/4波片、两个显微物镜、一个参考反射镜与一个成像镜;其中:As shown in Figure 3a, it mainly includes: a laser, a half-wave plate, three polarization beam splitters, two mirrors, two acousto-optic modulators AOM, two apertures, a spatial filter, two 1 /4 wave plate, two microscope objective lenses, a reference mirror and an imaging mirror; where:

所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片1、显微物镜1后照射到目标上;携带目标信息的反射光依次经过显微物镜1、1/4波片1后变为s方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the polarization beam splitter 3, 1/4 wave plate 1, and the microscope objective lens 1, and then irradiates the target; the reflected light carrying target information passes through the microscope objective lens 1, 1/4 wave plate 1, and becomes polarized in the s direction The light is injected into the imaging mirror after passing through the polarization beam splitter 3 and the polarizer placed at an angle of 45 degrees;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片2、显微物镜2后照射到参考反射镜上;反射光依次经过显微物镜2、1/4波片2后变为p方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the Polarizing beam splitter 3, 1/4 wave plate 2, and microscopic objective lens 2 are irradiated onto the reference mirror; the reflected light turns into p-direction polarized light after passing through microscopic objective lens 2, 1/4 wave plate 2, and then polarized The dichroic prism 3 and the polarizing plate placed at an angle of 45 degrees are injected into the imaging mirror.

如图3b所示,其主要包括:一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、一个分光棱镜、两个1/4波片、一个显微物镜、一个参考反射镜与一个成像镜;其中:As shown in Figure 3b, it mainly includes: a laser, a half-wave plate, three polarization beam splitters, two mirrors, two acousto-optic modulators AOM, two apertures, a spatial filter, and a beam splitter , two 1/4 wave plates, a microscope objective lens, a reference mirror and an imaging mirror; where:

所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片1后照射到目标上;携带目标信息的反射光经过1/4波片1后变为s方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the beam splitter prism, microscope objective lens, polarization beam splitter 3 and 1/4 wave plate 1, and then irradiates the target; the reflected light carrying target information becomes polarized light in the s direction after passing through the 1/4 wave plate 1, and then sequentially After passing through the polarizing beam-splitting prism 3, the microscopic objective lens, the beam-splitting prism and the polarizer placed at an angle of 45 degrees, it enters the imaging mirror;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片2后照射到参考反射镜上;反射光经过1/4波片2后变为p方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the The beam-splitting prism, microscope objective lens, polarization beam-splitter prism 3 and 1/4 wave plate 2 are then irradiated onto the reference mirror; the reflected light becomes polarized light in the p direction after passing through the 1/4 wave plate 2, and then passes through the polarization beam-splitter prism 3 in turn , a microscope objective lens, a dichroic prism and a polarizer placed at an angle of 45 degrees are injected into the imaging mirror.

如图3c所示,其主要包括:一个激光器、两个半波片、一个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、两个空间滤波器、一个合束棱镜与一个成像镜;其中:As shown in Figure 3c, it mainly includes: a laser, two half-wave plates, a polarizing beam splitter, two mirrors, two acousto-optic modulators (AOM), two apertures, two spatial filters, a combining beam prism and an imaging mirror; where:

所述激光器出射激光经半波片1和偏振分光棱镜,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through the half-wave plate 1 and the polarization beam splitter prism, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction;

所述物光依次经过半波片2与反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光进入空间滤波器1,滤波后光束依次经过合束棱镜与显微物镜后照射到目标上;携带目标信息的反射光依次经过显微物镜与合束棱镜后射入成像镜;The object light passes through the half-wave plate 2 and the mirror 1 in sequence, and after entering the acousto-optic modulator AOM 1, the emitted -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter 1, After filtering, the light beam passes through the beam combining prism and the microscopic objective lens in turn and then irradiates the target; the reflected light carrying target information passes through the microscopic objective lens and the beam combining prism in turn and then enters the imaging mirror;

所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2后进入空间滤波器2,滤波后光束经过合束棱镜后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter 2 after passing through the mirror 2, and the filtered beam passes through the beam combining prism and then shoots into the imaging mirror.

在上述图3a的光路中,在物光路和参考光路对称放置相同参数显微物镜1和2,以补偿显微物镜1引入的相位变化。图3b的光路装置中,物光和参考光经过同一个长工作距离显微物镜,以补偿物光经过显微物镜引入的相位变化。图3c的光路中,参考光为平行光。需要在数字处理过程中去除显微物镜引入的相位变化。In the optical path of FIG. 3a above, the same parameter microscopic objective lens 1 and 2 are placed symmetrically in the object optical path and the reference optical path, so as to compensate the phase change introduced by the microscopic objective lens 1. In the optical path device in Fig. 3b, the object light and the reference light pass through the same long working distance microscope objective to compensate for the phase change introduced by the object light passing through the microscope objective. In the light path in Fig. 3c, the reference light is parallel light. Phase changes introduced by the microscope objective need to be removed during digital processing.

进一步的,所述获得多帧相移全息图包括:Further, said obtaining multi-frame phase shift hologram includes:

获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector:

式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively;

物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as:

式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is:

ωH=ωOR=2πfHω H = ω O - ω R = 2πf H ;

包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is:

从而获得多帧相移全息图stotal(t(n)),其中的n为每一帧序号,t(n)为第n帧序号对应的采样时间,n=1,2,...,Ntotal,Ntotal为获得的全息图总帧数。In this way, a multi-frame phase shift hologram s total (t(n)) is obtained, where n is the serial number of each frame, and t(n) is the sampling time corresponding to the nth frame serial number, n=1,2,..., N total , where N total is the total number of frames of the obtained hologram.

进一步的,所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位包括:Further, the data processor performs time-domain spectral transformation on the signal of each pixel in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency, including:

利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):The signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform FFT to obtain the time-domain spectrum S(ω):

式中,ω表示外差角频率,stotal(t(n))为多帧相移全息图,n为每一帧序号,t(n)为第n帧序号对应的采样时间,Ntotal为获得的全息图总帧数;In the formula, ω represents the heterodyne angular frequency, s total (t(n)) is a multi-frame phase shift hologram, n is the serial number of each frame, t(n) is the sampling time corresponding to the nth frame serial number, and N total is The total number of hologram frames obtained;

提取时域频谱S(ω)在外差角频率ωH处数值S(ωH):Extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency ω H :

式中,σ为标准差;In the formula, σ is the standard deviation;

从而获得时域频谱S(ω)在外差频率处频谱值的振幅和相位 Thus, the amplitude of the spectral value of the time-domain spectrum S(ω) at the heterodyne frequency is obtained and phase

进一步的,所述从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建包括:Further, the extracting the target amplitude and target phase from the amplitude and phase of the spectral value at the heterodyne frequency, so as to realize holographic reconstruction includes:

振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained:

式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values;

设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:Set the position of the reference optical path lens and the objective optical path lens to be symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as:

进一步的,根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:Further, the complete target information O result is obtained according to the obtained target amplitude and target phase, which is expressed as:

需要说明的是,上述装置中包含的各个功能模块所实现的功能的具体实现方式在前面的各个实施例中已经有详细描述,故在这里不再赘述。It should be noted that the specific implementation manners of the functions implemented by the various functional modules included in the above apparatus have been described in detail in the previous embodiments, so details will not be repeated here.

所属领域的技术人员可以清楚地了解到,为描述的方便和简洁,仅以上述各功能模块的划分进行举例说明,实际应用中,可以根据需要而将上述功能分配由不同的功能模块完成,即将装置的内部结构划分成不同的功能模块,以完成以上描述的全部或者部分功能。Those skilled in the art can clearly understand that for the convenience and brevity of description, only the division of the above-mentioned functional modules is used as an example for illustration. In practical applications, the above-mentioned function allocation can be completed by different functional modules according to needs. The internal structure of the device is divided into different functional modules to complete all or part of the functions described above.

为了便于理解本发明,下面结合上述实施例进行了实验。In order to facilitate the understanding of the present invention, the following experiments were carried out in conjunction with the above-mentioned examples.

在本实验中,使用的主要器件为:532nm单模连续激光器,两个外差量为10Hz的AOM,透镜选择10倍显微物镜(NA=0.25),设置高帧频面阵探测器(1280*1024pixels,500fps max)探测帧频100Hz,选择未染色小鼠细胞作为目标。In this experiment, the main devices used are: a 532nm single-mode continuous laser, two AOMs with a heterodyne value of 10Hz, a 10x microscope objective lens (NA=0.25) for the lens, and a high frame rate area array detector (1280 *1024pixels, 500fps max) detection frame rate 100Hz, unstained mouse cells were selected as the target.

步骤1:step 1:

采用以上装置,在1s内获得100帧相移全息图,包括10个周期且每周期含10步相移。Using the above device, 100 frames of phase-shifted holograms were obtained within 1 s, including 10 periods and each period contained 10 steps of phase shift.

为了清晰显示,可以从全视场1280*1024像素中截取120*120像素尺寸的全息图。For clear display, a hologram with a size of 120*120 pixels can be cut out from a full field of view of 1280*1024 pixels.

利用100帧全息图建立一个120*120*100的三维数据矩阵,第k幅全息图上某一像素点(x,y)对应矩阵上(x,y,k)坐标点数据。因此,对于探测器上某一像素点,我们在该点获得100个采样数据。某一点的采样信号与前文图2b类似,可以看到相移线性且准确。Use 100 frames of holograms to build a 120*120*100 three-dimensional data matrix, and a certain pixel (x, y) on the kth hologram corresponds to the (x, y, k) coordinate point data on the matrix. Therefore, for a certain pixel point on the detector, we obtain 100 sampling data at this point. The sampling signal at a certain point is similar to the previous Figure 2b, and it can be seen that the phase shift is linear and accurate.

步骤2:Step 2:

利用FFT处理该信号获得时域频谱,如图4所示。Use FFT to process the signal to obtain the time-domain spectrum, as shown in Figure 4.

步骤3:Step 3:

在时域频谱中,可以看到孪生像所在频率点与目标频率点清晰分离。在外差角频率ωH对应的外差频率10Hz处提取振幅和相位信息,并对该振幅信息进行归一化处理,得到目标的振幅信息。对每个像素点分别进行上述操作,即可获得二维的目标振幅和相位信息。In the time-domain spectrum, it can be seen that the frequency point where the twin image is located is clearly separated from the target frequency point. The amplitude and phase information are extracted at the heterodyne frequency 10Hz corresponding to the heterodyne angular frequency ω H , and the amplitude information is normalized to obtain the amplitude information of the target. By performing the above operations on each pixel, two-dimensional target amplitude and phase information can be obtained.

步骤4:Step 4:

经以上步骤,得到目标完整信息。三维图像如图5所示,可以看出重建目标清晰。After the above steps, the complete information of the target is obtained. The 3D image is shown in Figure 5, and it can be seen that the reconstruction target is clear.

以上实验证明演示了该方案,并证明了该方案的可行性和优点。The above experimental proof demonstrates the scheme, and proves the feasibility and advantages of the scheme.

本发明上述实施例提供的方案,采用低频外差和高帧频面阵探测,可以获得了数百帧甚至上千帧的相移全息图。然后利用时域频谱分析算法来获得每一点的振幅和相位信息,从而可以得到目标三维图像。相比传统技术,该技术主要的优点在于能够有效减轻随机噪声的影响,因此更准确并具有更好的环境适应性。进一步,在不同强度噪声下,可以灵活设计外差频率和探测帧频,获得具有不同周期不同步数的多帧相移全息图,获得更好的抗噪性。The solutions provided by the above-mentioned embodiments of the present invention can obtain hundreds or even thousands of frames of phase shift holograms by using low-frequency heterodyne and high-frame-frequency area array detection. Then use the time-domain spectrum analysis algorithm to obtain the amplitude and phase information of each point, so that the three-dimensional image of the target can be obtained. Compared with the traditional technology, the main advantage of this technology is that it can effectively reduce the influence of random noise, so it is more accurate and has better environmental adaptability. Furthermore, under different intensity noises, the heterodyne frequency and detection frame frequency can be flexibly designed to obtain multi-frame phase-shifted holograms with different periods and different synchronous numbers to obtain better noise immunity.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明披露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求书的保护范围为准。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person familiar with the technical field can easily conceive of changes or changes within the technical scope disclosed in the present invention. Replacement should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be determined by the protection scope of the claims.

Claims (10)

1.一种多帧相移数字全息方法,其特征在于,包括:1. A multi-frame phase-shifting digital holography method, characterized in that, comprising: 采用两个声光调制器AOM分别对应的调制物光和参考光产生低频外差,并利用高帧频面阵探测器进行探测,获得多帧相移全息图;Two acousto-optic modulators (AOM) are used to generate low-frequency heterodyne corresponding to the modulated object light and reference light, and are detected by a high-frame-frequency area array detector to obtain a multi-frame phase-shift hologram; 分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;Carry out time-domain spectral transformation to the signal of each pixel point in the multi-frame phase-shifted hologram respectively, and extract the amplitude and phase of the spectral value at the heterodyne frequency; 从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。The target amplitude and target phase are extracted from the amplitude and phase of the spectral value at the heterodyne frequency, thereby realizing holographic reconstruction. 2.根据权利要求1所述的方法,其特征在于,所述获得多帧相移全息图包括:2. The method according to claim 1, wherein said obtaining a multi-frame phase shift hologram comprises: 获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector: 式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively; 物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as: 式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is: ωH=ωOR=2πfHω H = ω O - ω R = 2πf H ; 包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is: 从而获得多帧相移全息图stotal(t(n)),其中的n为每一帧序号,t(n)为第n帧序号对应的采样时间,n=1,2,...,Ntotal,Ntotal为获得的全息图总帧数。In this way, a multi-frame phase shift hologram s total (t(n)) is obtained, where n is the serial number of each frame, and t(n) is the sampling time corresponding to the nth frame serial number, n=1,2,..., N total , where N total is the total number of frames of the obtained hologram. 3.根据权利要求1或2所述的方法,其特征在于,所述分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位包括:3. The method according to claim 1 or 2, characterized in that, the signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum conversion, and the spectrum at the heterodyne frequency is extracted The magnitude and phase of the values include: 利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):The signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform FFT to obtain the time-domain spectrum S(ω): <mrow> <mi>S</mi> <mrow> <mo>(</mo> <mi>&amp;omega;</mi> <mo>)</mo> </mrow> <mo>=</mo> <mfrac> <mn>1</mn> <msub> <mi>N</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> </mfrac> <munderover> <mo>&amp;Sigma;</mo> <mrow> <mi>n</mi> <mo>=</mo> <mn>1</mn> </mrow> <msub> <mi>N</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> </munderover> <msub> <mi>S</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> <mi>&amp;omega;</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>(</mo> <mi>n</mi> <mo>)</mo> <mo>)</mo> </mrow> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mi>j</mi> <mrow> <mo>(</mo> <mi>&amp;omega;</mi> <mi>t</mi> <mo>(</mo> <mi>n</mi> <mo>)</mo> <mo>)</mo> </mrow> </mrow> </msup> <mo>;</mo> </mrow> <mrow><mi>S</mi><mrow><mo>(</mo><mi>&amp;omega;</mi><mo>)</mo></mrow><mo>=</mo><mfrac><mn>1</mn><msub><mi>N</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub></mfrac><munderover><mo>&amp;Sigma;</mo><mrow><mi>n</mi><mo>=</mo><mn>1</mn></mrow><msub><mi>N</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub></munderover><msub><mi>S</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub><mi>&amp;omega;</mi><mrow><mo>(</mo><mi>t</mi><mo>(</mo><mi>n</mi><mo>)</mo><mo>)</mo></mrow><msup><mi>e</mi><mrow><mo>-</mo><mi>j</mi><mrow><mo>(</mo><mi>&amp;omega;</mi><mi>t</mi><mo>(</mo><mi>n</mi><mo>)</mo><mo>)</mo></mrow></mrow></msup><mo>;</mo></mrow> 式中,ω表示外差角频率,stotal为多帧相移全息图总信号,n为每一帧序号,t(n)为第n帧序号对应的采样时间,Ntotal为获得的全息图总帧数;In the formula, ω represents the heterodyne angular frequency, s total is the total signal of the multi-frame phase-shifted hologram, n is the serial number of each frame, t(n) is the sampling time corresponding to the nth frame serial number, and N total is the obtained hologram Total number of frames; 提取时域频谱S(ω)在外差角频率点ωH处数值S(ωH):Extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency point ω H : 式中,σ为标准差;In the formula, σ is the standard deviation; 从而获得时域频谱S(ω)在外差频率处频谱值的振幅和相位 Thus, the amplitude of the spectral value of the time-domain spectrum S(ω) at the heterodyne frequency is obtained and phase 4.根据权利要求3所述的方法,其特征在于,从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建,获得目标完整信息,其包括:4. method according to claim 3, is characterized in that, extracts target amplitude and target phase from the amplitude and the phase of spectrum value at described heterodyne frequency place, thereby realizes holographic reconstruction, obtains target complete information, and it comprises: 振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained: <mrow> <msub> <mi>a</mi> <mrow> <mi>n</mi> <mi>o</mi> <mi>r</mi> <mi>m</mi> </mrow> </msub> <mo>=</mo> <mfrac> <mrow> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>-</mo> <mi>min</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> </mrow> <mrow> <mi>max</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> <mo>-</mo> <mi>min</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>;</mo> </mrow> <mrow><msub><mi>a</mi><mrow><mi>n</mi><mi>o</mi><mi>r</mi><mi>m</mi></mrow></msub><mo>=</mo><mfrac><mrow><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>-</mo><mi>min</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow></mrow><mrow><mi>max</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow><mo>-</mo><mi>min</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow></mrow></mfrac><mo>;</mo></mrow> 式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values; 设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:Set the position of the reference optical path lens and the objective optical path lens to be symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as: 并且,根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:And, according to the obtained target amplitude and target phase, the complete target information O result is obtained, which is expressed as: 5.一种多帧相移数字全息装置,其特征在于,包括:预设光路、高帧频面阵探测器及数据处理器;其中:5. A multi-frame phase-shift digital holographic device, characterized in that it includes: a preset optical path, a high frame rate area array detector and a data processor; wherein: 所述预设光路中包含两个声光调制器AOM,用于分别对应的调制物光和参考光产生低频外差;The preset optical path includes two acousto-optic modulators AOM, which are used to generate low-frequency heterodyne for the corresponding modulation object light and reference light; 所述高帧频面阵探测器对预设光路的成像镜中的光进行探测,获得多帧相移全息图,并传输至数据处理器;The high frame rate area array detector detects the light in the imaging mirror of the preset optical path, obtains a multi-frame phase shift hologram, and transmits it to the data processor; 所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位;再从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建。The data processor performs time-domain spectral transformation on the signal of each pixel point in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency; then from the heterodyne frequency The target amplitude and target phase are extracted from the amplitude and phase of the spectral value, thereby realizing holographic reconstruction. 6.根据权利要求5所述的装置,其特征在于,所述预设光路包括:6. The device according to claim 5, wherein the preset optical path comprises: 一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、两个1/4波片、两个显微物镜、一个参考反射镜与一个成像镜;其中:One laser, one half-wave plate, three polarization beamsplitters, two mirrors, two acousto-optic modulators (AOM), two apertures, one spatial filter, two 1/4 wave plates, two microscope objectives , a reference mirror and an imaging mirror; where: 所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction; 所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片1、显微物镜1后照射到目标上;携带目标信息的反射光依次经过显微物镜1、1/4波片1后变为s方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the polarization beam splitter 3, 1/4 wave plate 1, and the microscope objective lens 1, and then irradiates the target; the reflected light carrying target information passes through the microscope objective lens 1, 1/4 wave plate 1, and becomes polarized in the s direction The light is injected into the imaging mirror after passing through the polarization beam splitter 3 and the polarizer placed at an angle of 45 degrees; 所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过偏振分光棱镜3、1/4波片2、显微物镜2后照射到参考反射镜上;反射光依次经过显微物镜2、1/4波片2后变为p方向偏振光,再经过偏振分光棱镜3与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the Polarizing beam splitter 3, 1/4 wave plate 2, and microscopic objective lens 2 are irradiated onto the reference mirror; the reflected light turns into p-direction polarized light after passing through microscopic objective lens 2, 1/4 wave plate 2, and then polarized The dichroic prism 3 and the polarizing plate placed at an angle of 45 degrees are injected into the imaging mirror. 7.根据权利要求5所述的装置,其特征在于,所述预设光路包括:7. The device according to claim 5, wherein the preset optical path comprises: 一个激光器、一个半波片、三个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、一个空间滤波器、一个分光棱镜、两个1/4波片、一个显微物镜、一个参考反射镜与一个成像镜;其中:One laser, one half-wave plate, three polarization beamsplitters, two mirrors, two acousto-optic modulators (AOMs), two apertures, one spatial filter, one beamsplitter, two 1/4 wave plates, one Microscope objective lens, a reference mirror and an imaging mirror; wherein: 所述激光器出射激光经半波片和偏振分光棱镜1,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through a half-wave plate and a polarization beam splitter prism 1, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction; 所述物光经过反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光经过偏振分光棱镜2进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片1后照射到目标上;携带目标信息的反射光经过1/4波片1后变为s方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜;The object light passes through the reflector 1, enters the AOM 1, and the outgoing -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter through the polarization beam splitter prism 2, and after filtering The light beam sequentially passes through the beam splitter prism, microscope objective lens, polarization beam splitter 3 and 1/4 wave plate 1, and then irradiates the target; the reflected light carrying target information becomes polarized light in the s direction after passing through the 1/4 wave plate 1, and then sequentially After passing through the polarizing beam-splitting prism 3, the microscopic objective lens, the beam-splitting prism and the polarizer placed at an angle of 45 degrees, it enters the imaging mirror; 所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2、偏振分光棱镜2后进入空间滤波器,滤波后光束依次经过分光棱镜、显微物镜、偏振分光棱镜3与1/4波片2后照射到参考反射镜上;反射光经过1/4波片2后变为p方向偏振光,再依次经过偏振分光棱镜3、显微物镜、分光棱镜与45度角放置的偏振片后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter after passing through the reflector 2 and the polarization beam splitter prism 2, and the filtered beam passes through the The beam-splitting prism, microscope objective lens, polarization beam-splitter prism 3 and 1/4 wave plate 2 are then irradiated onto the reference mirror; the reflected light becomes polarized light in the p direction after passing through the 1/4 wave plate 2, and then passes through the polarization beam-splitter prism 3 in turn , a microscope objective lens, a dichroic prism and a polarizer placed at an angle of 45 degrees are injected into the imaging mirror. 8.根据权利要求5所述的装置,其特征在于,所述预设光路包括:8. The device according to claim 5, wherein the preset optical path comprises: 一个激光器、两个半波片、一个偏振分光棱镜、两个反射镜、两个声光调制器AOM、两个光阑、两个空间滤波器、一个合束棱镜与一个成像镜;其中:One laser, two half-wave plates, one polarizing beam splitter prism, two mirrors, two acousto-optic modulators AOM, two apertures, two spatial filters, one beam combining prism and one imaging mirror; where: 所述激光器出射激光经半波片1和偏振分光棱镜,分为物光和参考光两束偏振光,物光为p方向偏振光,参考光为s方向偏振光;The laser light emitted by the laser is divided into two beams of polarized light, object light and reference light, through the half-wave plate 1 and the polarization beam splitter prism, the object light is polarized light in the p direction, and the reference light is polarized light in the s direction; 所述物光依次经过半波片2与反射镜1,进入声光调制器AOM 1后出射的-1级和0级光被光阑1遮挡,出射的+1衍射光进入空间滤波器1,滤波后光束依次经过合束棱镜与显微物镜后照射到目标上;携带目标信息的反射光依次经过显微物镜与合束棱镜后射入成像镜;The object light passes through the half-wave plate 2 and the mirror 1 in sequence, and after entering the acousto-optic modulator AOM 1, the emitted -1 order and 0 order lights are blocked by the diaphragm 1, and the outgoing +1 diffracted light enters the spatial filter 1, After filtering, the light beam passes through the beam combining prism and the microscopic objective lens in turn and then irradiates the target; the reflected light carrying target information passes through the microscopic objective lens and the beam combining prism in turn and then enters the imaging mirror; 所述参考光进入AOM 2后出射的-1级和0级光被光阑2遮挡,出射的+1级衍射光经过反射镜2后进入空间滤波器2,滤波后光束经过合束棱镜后射入成像镜。After the reference light enters the AOM 2, the emitted -1st order and 0th order light are blocked by the diaphragm 2, and the outgoing +1st order diffracted light enters the spatial filter 2 after passing through the mirror 2, and the filtered beam passes through the beam combining prism and then shoots into the imaging mirror. 9.根据权利要求5所述的装置,其特征在于,9. The device of claim 5, wherein: 所述获得多帧相移全息图包括:The obtaining of multi-frame phase-shifted holograms includes: 获取到达高帧频面阵探测器的物光UO和参考光URObtain the object light U O and reference light U R reaching the high frame rate area detector: 式中,t为时刻,aOO,分别为物光的振幅、角频率和相位;aRR,分别为参考光的振幅、角频率和相位;In the formula, t is the time, a OO , are the amplitude, angular frequency and phase of the object light respectively; a R , ω R , are the amplitude, angular frequency and phase of the reference light, respectively; 物光和参考光干涉产生的理想的无噪声全息s表示为:The ideal noise-free hologram s produced by the interference of object light and reference light is expressed as: 式中,ωH为外差角频率,fH为两个AOM的外差频率,其关系为:where ω H is the heterodyne angular frequency, f H is the heterodyne frequency of the two AOMs, and their relationship is: ωH=ωOR=2πfHω H = ω O - ω R = 2πf H ; 包含有随机噪声的多帧相移全息图总信号为:Contains random noise The total signal of the multi-frame phase-shifted hologram is: 从而获得多帧相移全息图stotal(t(n)),其中的n为每一帧序号,t(n)为第n帧序号对应的采样时间,n=1,2,...,Ntotal,Ntotal为获得的全息图总帧数;In this way, a multi-frame phase shift hologram s total (t(n)) is obtained, where n is the serial number of each frame, and t(n) is the sampling time corresponding to the nth frame serial number, n=1,2,..., N total , N total is the total number of frames of the obtained hologram; 所述数据处理器分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,并提取出外差频率处频谱值的振幅和相位包括:The data processor performs time-domain spectral transformation on the signal of each pixel point in the multi-frame phase-shifted hologram, and extracts the amplitude and phase of the spectral value at the heterodyne frequency, including: 利用快速傅里叶变换FFT分别对所述多帧相移全息图中的每一像素点的信号进行时域频谱变换,获得时域频谱S(ω):The signal of each pixel point in the multi-frame phase-shifted hologram is respectively subjected to time-domain spectrum transformation by using Fast Fourier Transform FFT to obtain the time-domain spectrum S(ω): <mrow> <mi>S</mi> <mrow> <mo>(</mo> <mi>&amp;omega;</mi> <mo>)</mo> </mrow> <mo>=</mo> <mfrac> <mn>1</mn> <msub> <mi>N</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> </mfrac> <munderover> <mo>&amp;Sigma;</mo> <mrow> <mi>n</mi> <mo>=</mo> <mn>1</mn> </mrow> <msub> <mi>N</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> </munderover> <msub> <mi>S</mi> <mrow> <mi>t</mi> <mi>o</mi> <mi>t</mi> <mi>a</mi> <mi>l</mi> </mrow> </msub> <mi>&amp;omega;</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>(</mo> <mi>n</mi> <mo>)</mo> <mo>)</mo> </mrow> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mi>j</mi> <mrow> <mo>(</mo> <mi>&amp;omega;</mi> <mi>t</mi> <mo>(</mo> <mi>n</mi> <mo>)</mo> <mo>)</mo> </mrow> </mrow> </msup> <mo>;</mo> </mrow> <mrow><mi>S</mi><mrow><mo>(</mo><mi>&amp;omega;</mi><mo>)</mo></mrow><mo>=</mo><mfrac><mn>1</mn><msub><mi>N</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub></mfrac><munderover><mo>&amp;Sigma;</mo><mrow><mi>n</mi><mo>=</mo><mn>1</mn></mrow><msub><mi>N</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub></munderover><msub><mi>S</mi><mrow><mi>t</mi><mi>o</mi><mi>t</mi><mi>a</mi><mi>l</mi></mrow></msub><mi>&amp;omega;</mi><mrow><mo>(</mo><mi>t</mi><mo>(</mo><mi>n</mi><mo>)</mo><mo>)</mo></mrow><msup><mi>e</mi><mrow><mo>-</mo><mi>j</mi><mrow><mo>(</mo><mi>&amp;omega;</mi><mi>t</mi><mo>(</mo><mi>n</mi><mo>)</mo><mo>)</mo></mrow></mrow></msup><mo>;</mo></mrow> 式中,ω表示外差角频率,stotal(t(n))为多帧相移全息图,n为每一帧序号,t(n)为第n帧序号对应的采样时间,Ntotal为获得的全息图总帧数;In the formula, ω represents the heterodyne angular frequency, s total (t(n)) is a multi-frame phase shift hologram, n is the serial number of each frame, t(n) is the sampling time corresponding to the nth frame serial number, and N total is The total number of hologram frames obtained; 提取时域频谱S(ω)在外差角频率点ωH处数值S(ωH):Extract the value S(ω H ) of the time-domain spectrum S(ω) at the heterodyne angular frequency point ω H : 式中,σ为标准差;In the formula, σ is the standard deviation; 从而获得时域频谱S(ω)在外差频率处频谱值的振幅和相位 Thus, the amplitude of the spectral value of the time-domain spectrum S(ω) at the heterodyne frequency is obtained and phase 10.根据权利要求9所述的装置,其特征在于,从所述外差频率处频谱值的振幅和相位中提取目标振幅与目标相位,从而实现全息重建,获得目标完整信息,其包括:10. The device according to claim 9, wherein the target amplitude and target phase are extracted from the amplitude and phase of the spectral value at the heterodyne frequency, so as to realize holographic reconstruction and obtain complete target information, which includes: 振幅为常数,进行归一化处理后,获得目标的归一化振幅anormamplitude middle is a constant, after normalization processing, the normalized amplitude a norm of the target is obtained: <mrow> <msub> <mi>a</mi> <mrow> <mi>n</mi> <mi>o</mi> <mi>r</mi> <mi>m</mi> </mrow> </msub> <mo>=</mo> <mfrac> <mrow> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>-</mo> <mi>min</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> </mrow> <mrow> <mi>max</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> <mo>-</mo> <mi>min</mi> <mrow> <mo>(</mo> <msup> <mi>e</mi> <mrow> <mo>-</mo> <mfrac> <msup> <mi>&amp;sigma;</mi> <mn>2</mn> </msup> <mn>2</mn> </mfrac> </mrow> </msup> <msub> <mi>a</mi> <mi>R</mi> </msub> <msub> <mi>a</mi> <mn>0</mn> </msub> <mo>)</mo> </mrow> </mrow> </mfrac> <mo>;</mo> </mrow> <mrow><msub><mi>a</mi><mrow><mi>n</mi><mi>o</mi><mi>r</mi><mi>m</mi></mrow></msub><mo>=</mo><mfrac><mrow><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>-</mo><mi>min</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow></mrow><mrow><mi>max</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow><mo>-</mo><mi>min</mi><mrow><mo>(</mo><msup><mi>e</mi><mrow><mo>-</mo><mfrac><msup><mi>&amp;sigma;</mi><mn>2</mn></msup><mn>2</mn></mfrac></mrow></msup><msub><mi>a</mi><mi>R</mi></msub><msub><mi>a</mi><mn>0</mn></msub><mo>)</mo></mrow></mrow></mfrac><mo>;</mo></mrow> 式中,max和min分别表示对二维空间分布数据取最大值和最小值;In the formula, max and min respectively represent the two-dimensional spatial distribution data Take the maximum and minimum values; 设置参考光路透镜与物光路透镜位置对称,则不含目标时物光的相位等于目标相位表示为:Set the position of the reference optical path lens and the objective optical path lens to be symmetrical, then the phase of the object light when the target is not included equal target aspect Expressed as: 根据获得的目标振幅与目标相位获得目标完整信息Oresult,其表示为:Obtain the complete information O result of the target according to the obtained target amplitude and target phase, which is expressed as:
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