CN105389314A - Log file query system and query method - Google Patents
Log file query system and query method Download PDFInfo
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- CN105389314A CN105389314A CN201410449082.8A CN201410449082A CN105389314A CN 105389314 A CN105389314 A CN 105389314A CN 201410449082 A CN201410449082 A CN 201410449082A CN 105389314 A CN105389314 A CN 105389314A
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Abstract
The invention discloses a log file query system and query method, pertaining to the technical field of management and control of semiconductor manufacturing technology. The log file query system comprises a communication unit, an input unit, a first query unit, a second query unit and an output unit. The interaction communication between the communication unit and a semiconductor production device is achieved. The input unit is used for obtaining inputted keyword information. The first query unit is used for locking the approximate scope for log files needed to be queried via first keyword information. The second query unit is used for matching log files within the query scope via second keyword information, extracting associated log files according to the matching result and displaying the log files to a user. By adoption of the above technical scheme, the log file query system and query method have following beneficial effects: query time for log files is greatly shortened and manpower resources is saved; query accuracy is improved; waiting time for the semiconductor production device is shortened; and production efficiency of semiconductor manufacturing technology is improved.
Description
Technical field
The present invention relates to production process of semiconductor management and control technical field, particularly relate to a kind of journal file inquiry system and querying method.
Background technology
In the production process of semiconductor in modern times, auto-processes has become an indispensable part, how to improve the most important thing that auto-processes is also production process of semiconductor Future Development, and the development & application focusing on equipment automatization system (EquipmentAutomationProgram, EAP) of auto-processes.EAP system goes for the semiconductor production equipment in control work, also may be used for the production information produced in collection semiconductor production technology.The production information produced in production process of semiconductor often reflects the problem produced in some production technologies, and these problems can be kept in corresponding semiconductor production equipment with the form of journal file.EAP system by checking that the form of journal file finds the problem in production technology, and can solve.In prior art, because the problem produced in production process of semiconductor often has provisional and feature that is emergency, and traditional journal file being checked production equipment by EAP system, and in the process developed according to journal file and safeguard, the failture evacuation mechanism (troubleshooting) of EAP system account for the proportion of 30% nearly.Namely existing method of dealing with problems is the journal file being checked corresponding semiconductor production equipment by EAP slip-stick artist, and by the reason that journal file problem of tracing occurs, thus draft corresponding solution.But the journal file in EAP system is applicable to the production information of the wafer recorded in real time on semiconductor production equipment, therefore in most of journal file, all there is the phenomenon that production information is intersected.This is screened the production information comprised in a large amount of journal files by the key message of some necessity with regard to needing EAP slip-stick artist, to find useful production information, filter out other production informations simultaneously, which forms a kind of continuous jump and check the process (namely only checking part production information useful in journal file) of journal file.Simultaneously, according to the difference of the event type recorded in journal file, the journal file preserved in EAP system can be divided into multiple format, such as pointing out the EAP interface daily record (GUILog) of producing and showing production run on a display screen, for recording the EAP trace log (TRACELog) of the interactive information in EAP system and the EAP communication log (SECSLog) etc. for recording the communication information between EAP and semiconductor production equipment, EAP slip-stick artist needs to filter the production information that the journal file of different Log Types comprises when inquiry production information simultaneously, these processes of checking journal file and filtering dissimilar journal file simultaneously of jumping not are very close in the step relation of real proposition solution, but a large amount of human resources and query time is wasted, simultaneously due to during inquiring about, the semiconductor production equipment of generation problem quits work, therefore the free time of semiconductor production equipment is too increased, reduce the efficiency of production process of semiconductor.
Summary of the invention
According to problems of the prior art, comprising:
1) when checking the journal file in EAP system, need the incoherent production information first filtered out in journal file, and need to filter polytype journal file simultaneously, thus cause the query time before proposition solution long;
2) owing to needing the journal file quantity of filtration more, thus too much human resources are wasted;
3) free time of the long semiconductor production equipment gone wrong caused of query time is long, and then causes the production efficiency of whole production process of semiconductor lower.
The technical scheme of a kind of journal file inquiry system and journal file querying method is now provided, specifically comprises:
A kind of journal file inquiry system, is applicable in the equipment automatization system in production process of semiconductor; Wherein, connect outside multiple semiconductor production equipments, described semiconductor production equipment is for preserving the journal file of the production event recording wafer, and each described journal file comprises corresponding header file information;
Described journal file inquiry system comprises:
Communication unit, described journal file inquiry system carries out interactive communication by described communication unit and multiple described semiconductor production equipment;
Input block, inputs keyword message for user;
First query unit, connects described input block and described communication unit respectively, for locking the described journal file be stored in described semiconductor production equipment according to described keyword message;
Second query unit, connect described first query unit, described input block and described communication unit respectively, in order to the header file information of described keyword message with locked described journal file is mated, and inquire about and extract the journal file that all described header file information be stored in described semiconductor production equipment comprises the described keyword message that the match is successful;
Output unit, connects described second query unit, for exporting the described journal file that described second query unit is extracted.
Preferably, this journal file inquiry system, wherein, described keyword message comprises the first keyword message and the second keyword message;
The information type of described first keyword message comprises semiconductor production equipment information, log query temporal information and Log Types information;
The information type of described second keyword message comprises daily record rise time information, log category information, daily record related information, equipment index information, daily record said units information and daily record directional information.
Preferably, this journal file inquiry system, wherein, described journal file inquiry system also comprises a data separation unit, be connected between described input block and described first query unit, and between described input block and described second query unit, for reading the described keyword message that described input block sends, and described first keyword message comprised by described keyword message sends into described first query unit, described second keyword message comprised by described keyword message sends into described second query unit.
Preferably, this journal file inquiry system, wherein, described second query unit also comprises:
Judge module, for judging whether the content that described input block inputs comprises described second keyword message;
Parsing module, for resolving by the described header file information of the described journal file of described first query unit locking;
Matching module, connect described parsing module, for described second keyword message and the described header file information that parsed by described parsing module are mated, to obtain being matched with the corresponding field information in the described header file information of described second keyword message;
Enquiry module, connect described matching module, for the described field information obtained according to described matching module process, inquire about and extract the described journal file that all described header file information be stored in described semiconductor production equipment comprises described field information, and the described journal file extracted is sent to described output unit.
Preferably, this journal file inquiry system, wherein, also comprises a journal displaying unit, connects described output unit, for showing the described journal file that described output unit exports.
Preferably, this journal file inquiry system, wherein, also comprises:
Log access unit, connects described output unit and described journal displaying unit respectively, and connects described semiconductor production equipment by described communication unit; Described log access unit accesses by described communication unit described semiconductor production equipment corresponding to described journal file that described output unit exports, and will access result and shown by described journal displaying unit.
A kind of journal file querying method, is applicable in the equipment automatization system in production process of semiconductor; Wherein, comprise a journal file inquiry system, described journal file inquiry system connects described semiconductor production equipment, and described semiconductor production equipment is for preserving the journal file of the production run describing wafer, and each described journal file comprises corresponding header file information;
Described journal file querying method specifically comprises:
Step 1, obtains keyword message;
Step 2, described journal file inquiry system locks the described journal file be stored on described semiconductor production equipment according to described keyword message;
Step 3, the header file information of described keyword message with locked described journal file is mated by described journal file inquiry system, obtains being matched with the corresponding field information in the described header file information of described keyword message to process;
Step 4, described journal file inquiry system is inquired about and is extracted the described journal file that all described header file information be stored in described semiconductor production equipment comprises described field information;
Step 5, described journal file inquiry system shows the described journal file be extracted.
Preferably, this journal file querying method, wherein, described keyword message comprises the first keyword message and the second keyword message;
The information type of the first keyword message comprises semiconductor production equipment information, daily record rise time information and Log Types information;
The information type of the second keyword message comprises daily record rise time information, log category information, daily record related information, equipment index information, daily record said units information and daily record directional information;
In described step 2, described journal file inquiry system locks according to described first keyword message the described journal file be stored on described semiconductor production equipment;
In described step 3, the header file information of described second keyword message with locked described journal file is mated by described journal file inquiry system, obtains being matched with the field information in the described header file information of described keyword message to process.
Preferably, this journal file querying method, wherein, described step 2 specifically comprises:
Step 21, the described semiconductor production equipment of the corresponding described semiconductor production equipment information of described journal file inquiry system locking;
Step 22, the described journal file of the corresponding described journal file query time of described journal file inquiry system locking;
Step 23, the described journal file that the corresponding described Log Types information of described journal file inquiry system locking is determined.
Preferably, this journal file querying method, wherein, described step 3 specifically comprises:
Step 31, described journal file inquiry system judges whether to obtain described second keyword message;
If obtained described second keyword message, then go to step 32;
If do not obtain described second keyword message, then go to step 33;
Step 32, described journal file inquiry system judges whether the described header file information of locked described journal file comprises the field information being matched with described second keyword message;
If described header file information comprises the described field information being matched with described second keyword message, then go to described step 4;
If described header file information does not comprise the described field information being matched with described second keyword message, then go to step 33;
Step 33, returns the message that it fails to match, with backed off after random;
Step 34, all described field information that the described header file information of locked described journal file comprises by described journal file inquiry system, as the described field information that the match is successful, goes to described step 4 subsequently.
Preferably, this journal file querying method, wherein, in described step 5, the described semiconductor production equipment of the described journal file be extracted is preserved in described journal file inquiry system access, and display access result.
The beneficial effect of technique scheme is: by quick lock in and the journal file needing the production information of searching to be associated:
1) significantly shorten the time of inquiry log, become automation process with the irrelevant inquiry that repeats of dealing with problems, save human resources;
2) by the coupling of multiple keyword message, the accuracy of inquiry is improved;
3) to problem very first time response that is provisional, emergency, solution is provided in time;
4) shorten the production stand-by period of the semiconductor production equipment gone wrong, promote the production efficiency of production process of semiconductor;
Accompanying drawing explanation
Fig. 1 is in preferred embodiment of the present invention, a kind of structural representation of journal file inquiry system;
Fig. 2 is in preferred embodiment of the present invention, the structural representation of the header file information of journal file;
Fig. 3 is in preferred embodiment of the present invention, a kind of overview flow chart of journal file querying method;
Fig. 4 is in preferred embodiment of the present invention, the schematic flow sheet of locking journal file;
Fig. 5 is in preferred embodiment of the present invention, further illustrates in Fig. 4 the process flow diagram locking journal file;
Fig. 6 is in preferred embodiment of the present invention, on the basis of Fig. 4, inquiry the schematic flow sheet of relevant journal file.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as limiting to the invention.
As shown in Figure 1, in preferred embodiment of the present invention, relate to a kind of journal file inquiry system 1, comprise communication unit 11, be applicable in equipment automatization system (EAP).In preferred embodiment of the present invention, this journal file inquiry system 1 carries out interactive communication by communication unit 11 and multiple semiconductor production equipment 2.In preferred embodiment of the present invention, above-mentioned semiconductor production equipment 2 for the production of wafer, and for preserve record wafer production process in the journal file of event.
In preferred embodiment of the present invention, above-mentioned journal file inquiry system 1 also comprises:
Input block 12, inputs keyword message for user;
First query unit 13, connects input block 12 and communication unit 11 respectively, locks for the keyword message inputted according to input block 12 journal file be stored in semiconductor production equipment 2;
Further, in preferred embodiment of the present invention, the keyword message that above-mentioned first query unit 13 inputs according to input block 12 forms a corresponding querying condition, at least one journal file be stored in a semiconductor production equipment 2 is locked subsequently according to querying condition, namely the effect of the first query unit 13 is the scope reducing the journal file that can for search, to alleviate follow-up inquiry burden.
Second query unit 14, connects the first query unit 13, input block 12 and communication unit 11 respectively; The header file information of keyword message with locked journal file is mated by the second query unit 14, inquires about subsequently and extracts the journal file that all header file information be stored in semiconductor production equipment 2 comprise the keyword message that the match is successful;
Further, in preferred embodiment of the present invention, in the query context of the journal file that the second query unit 14 locks in the first query unit 13, extracted the field information be included in header file information matched by keyword message, the field information extracted according to these subsequently forms new querying condition; Second query unit 14 is inquired about according to the new querying condition formed and extracts all journal files be associated be stored in semiconductor production equipment 2, namely extracts the journal file that all header file information comprises the field information being matched with keyword message.
Output unit 15, connects the second query unit 14, for exporting the journal file that the second query unit 14 is extracted.
In preferred embodiment of the present invention, the above-mentioned keyword message forming querying condition for query unit, can comprise the first keyword message and the second keyword message.
In preferred embodiment of the present invention, the information type of the first keyword message can comprise semiconductor production equipment information, log query temporal information and Log Types information.
In preferred embodiment of the present invention, semiconductor production equipment information is for determining the semiconductor production equipment 2 preserving journal file, namely user inputs a default semiconductor production equipment information by input block 12, just can determine a corresponding semiconductor production equipment 2, and enter the log folder of this semiconductor production equipment 2.
In preferred embodiment of the present invention, log query temporal information is for determining the journal file within default continuous print time interval, such as user inputs a date determined by input block, locks the multiple journal files produced in this date determined subsequently.In preferred embodiment of the present invention, log query temporal information is not the exact time that journal file generates, but a continuous print time period, for determining the scope of the journal file be queried.
In preferred embodiment of the present invention, Log Types information is for determining the Type Range of the journal file be queried.Journal file can be divided into such as EAP communication log, EAP trace log and the daily record of EAP interface.Above-mentionedly be categorized as existing daily record classification in prior art.In preferred embodiment of the present invention, user inputs by input block the Log Types that needs inquiry, is determined the scope of the journal file be queried by this Log Types.
In preferred embodiment of the present invention, through determining semiconductor production equipment information, determine the type (Log Types information) of the approximate time (log query temporal information) that daily record generates and journal file, the journal file be queried can be determined in a less scope.
In preferred embodiment of the present invention, the information type of above-mentioned second keyword message can comprise daily record rise time information, log category information, daily record related information, equipment index information, daily record said units information and daily record directional information.
Further, in preferred embodiment of the present invention, the information type of above-mentioned second keyword message is corresponding with the formatting of the header file information of journal file.Be illustrated in figure 2 the form schematic diagram of the header file information of journal file.Include in the header file information of a journal file:
Daily record rise time information, for representing the rise time of a journal file.In preferred embodiment of the present invention, daily record rise time information is different from above-mentioned log query temporal information, for representing the rise time of a point-device journal file.
Log category information, for representing the classification of the event described in a journal file.In preferred embodiment of the present invention, the classification of so-called event, the i.e. urgency level of event, the classification of the event therefore represented by log category information can be followed successively by according to urgency level: common message, notice, mistake and gross error.
Daily record related information, is used to indicate the production batch of the wafer that this journal file is associated.Further, in preferred embodiment of the present invention, daily record related information comprises the sequence number of the production batch of corresponding wafer, and this production batch starts the time of production.In preferred embodiment of the present invention, be associated with the journal file of the production batch of same wafer, comprising same daily record related information.
Equipment index information, for distinguishing two semiconductor production equipments 2 carrying out work simultaneously.In preferred embodiment of the present invention, in production process of semiconductor, equipment automatization system can control a part of production equipment and work simultaneously, and the now effect of equipment index information is just that differentiation made by the production equipment to working simultaneously.
Daily record said module information, is used to indicate the generation source of journal file.Further, in preferred embodiment of the present invention, the generation source of journal file in equipment automatization system corresponding to daily record said module message identification, such as this journal file results from the internal processing modules in equipment automatization system, or production equipment interactive module, or (advanced process controls APC, Advancedprocesscontrol) module etc., EAP slip-stick artist finds the generation source of this journal file by daily record said module information, just can directly filter out corresponding production information.
Daily record directional information, be used to indicate described in journal file transmission source and/or reception source.Further, in preferred embodiment of the present invention, the transmission source of instruction journal file and/or the object in the source of reception are the flow direction indicating data in journal file, namely described in this journal file is the instruction that equipment automatization system sends to semiconductor production equipment, or semiconductor production equipment is initiatively to the order of equipment automatization System Reports.That makes data in journal file clear flows to problem, the mistake that flows to of explicit data cannot play vital effect for some of encountering in production technology.
Still as shown in Figure 1, for the classification of above-mentioned first keyword message and the second keyword message, in preferred embodiment of the present invention, one data separation unit 16 is set, be connected between input block 12 and the first query unit 13, and between input block 12 and the second query unit 14, for the classification according to above-mentioned keyword message, the first keyword message inputted by input block 12 is sent in the first query unit 13, and the second keyword message inputted by input block 12 is sent in the second query unit 14.Therefore, in preferred embodiment of the present invention, the first query unit 13, by the first keyword message locking journal file, namely locks the query context of a journal file; Second query unit 14 determines all journal files be associated by the second keyword message, and extracts all journal files inquired.
In preferred embodiment of the present invention, in above-mentioned log query system, also comprise a journal displaying unit 17, connect output unit 15, for the journal file that display translation unit 15 exports.
In preferred embodiment of the present invention, as shown in Figure 1, also comprise in the second query unit 14:
In preferred embodiment of the present invention, the second query unit 14 receives the second keyword message that input block 12 is sent by data separation unit 16, and the locked journal file that the first query unit 13 sends.
In preferred embodiment of the present invention, the second query unit 14 exports to journal displaying unit 17 and inquires about and all journal files extracted, and shows for journal displaying unit 17.
Judge module 141, for judging whether load module obtains the second keyword message;
Parsing module 142, for resolving the header file information of the journal file locked by the first query unit 13;
In preferred embodiment of the present invention, may be comprised multiple by the journal file that the first query unit 13 locks, parsing module 142 is resolved multiple locked journal file, and obtains the header file information of these journal files respectively.
Matching module 143, connects parsing module 142, for mating, the second keyword message and the header file information that parsed by parsing module to obtain the corresponding field information be matched with in the header file information of the second keyword message;
In preferred embodiment of the present invention, matching module 143 receives the second keyword message, and the header file information parsed by parsing module 142.Matching module 143 searches in header file information the field information whether comprising and matching with the second keyword message; If exist, then matching module 143 exports the field information found; If do not exist, then matching module 143 output matching failure, this time searches unsuccessfully to represent, with backed off after random querying flow.
In preferred embodiment of the present invention, when above-mentioned judge module 141 judges not obtain the second keyword message, all field informations in the header file information that resolved module 142 parses by matching module 143 are as the field information needing to export.
Enquiry module 144, matching connection module 143, for processing the field information obtained according to matching module 143, inquires about and extracts the journal file that all header file information be stored in semiconductor production equipment 2 comprise field information; Journal file is sent to output unit by output unit 15 by enquiry module 144.
In preferred embodiment of the present invention, enquiry module 144 receives the field information through overmatching that matching module 143 sends, and a corresponding querying condition is formed based on these field informations, to inquire about in semiconductor production equipment 2 all meets the journal file of this querying condition (further by communication unit 11 for enquiry module 144 subsequently, namely header file information comprises the journal file of the field information in querying condition), and extract all journal files meeting querying condition.These journal files output in journal displaying unit 17 and show by enquiry module 144.
In preferred embodiment of the present invention, still as shown in Figure 1, in above-mentioned journal file inquiry system 1, also comprise a log access unit 18, connect output unit 15 and journal displaying unit 17 respectively, and connect semiconductor production equipment 2 by communication unit 11.Because user is when checking journal file, direct access destination semiconductor production equipment can be wanted to deposit the file of journal file, therefore adopt this log access unit 18 to realize above-mentioned functions, namely access by communication unit 11 semiconductor production equipment 2 corresponding to journal file that output unit 15 exports, and access result is shown by journal displaying unit 17.
A kind of log inquiring method, adopt some Implement of Function Modules in above-mentioned log query system, method as shown in Figure 3, specifically comprises:
S1: step 1, obtains keyword message;
In preferred embodiment of the present invention, journal file inquiry system obtains the keyword message of user's input by above-mentioned input block.
S2: step 2, journal file inquiry system locks the journal file be stored on semiconductor production equipment according to keyword message;
In preferred embodiment of the present invention, adopt the multiple journal file meeting keyword message of above-mentioned first query unit locking, namely lock the query context of a journal file.
S3: step 3, the header file information of keyword message with locked journal file is mated, to process the corresponding field information obtaining being matched with in the header file information of keyword message by journal file inquiry system;
In preferred embodiment of the present invention, adopt the header file information of above-mentioned second query unit to locked journal file to mate, and find the field information being matched with keyword message, to form a corresponding querying condition.
S4: step 4, journal file inquiry system is inquired about and is extracted the journal file that all header file information be stored in semiconductor production equipment comprise field information;
In preferred embodiment of the present invention, according to the querying condition of above-mentioned formation, the second query unit transfers all journal files be associated from semiconductor production equipment.
In preferred embodiment of the present invention, in above-mentioned steps 2, form corresponding querying condition equally according to keyword message, the first query unit is by this querying condition locking journal file.
S5: step 5, journal file inquiry system shows the journal file be extracted.
In preferred embodiment of the present invention, keyword message comprises the first keyword message and the second keyword message, and the information type of the first keyword message and the second keyword message is as noted before respectively.Therefore, in above-mentioned steps 2, the first query unit forms corresponding querying condition by the first keyword message, to lock journal file, in above-mentioned steps 3, the second query unit forms corresponding querying condition by the second keyword message, to extract all journal files be associated.
As shown in Figure 4, in preferred embodiment of the present invention, above-mentioned steps 2 specifically comprises:
S21: step 21, journal file inquiry system locks the semiconductor production equipment of corresponding semiconductor production equipment information;
In preferred embodiment of the present invention, by the semiconductor production equipment that the semiconductor production equipment information locking in the first keyword message is corresponding, and enter the file depositing journal file in this semiconductor production equipment;
S22: step 22, journal file inquiry system locks the journal file of corresponding journal file query time;
In preferred embodiment of the present invention, on the basis of above-mentioned steps 21, lock the journal file (the multiple journal files produced in the such as specific date) of corresponding journal file query time in this file;
S23: step 23, journal file inquiry system locks the journal file that corresponding Log Types information is determined.
In preferred embodiment of the present invention, on the basis of above-mentioned steps 22, according to Log Types information, lock multiple journal files of same Log Types.
Therefore, in preferred embodiment of the present invention, journal file inquiry system be may be summarized to be the process that journal file carries out the first inquiry (namely determining the query context of a journal file) by the first query unit:
First determine a semiconductor production equipment according to semiconductor production equipment information, and enter in the log folder of this equipment;
The journal file that the approximate time (log query temporal information) generated according to daily record subsequently to be determined in this file in this time range (namely within default continuous print time interval) produces;
Last according to Log Types information, determine the journal file being classified as corresponding Log Types produced in above-mentioned time range in file, thus finally determine the query context of a journal file.
As shown in Figure 5, in preferred embodiment of the present invention, above-mentioned steps 3 specifically comprises:
S31: step 31, journal file inquiry system judges whether acquisition second keyword message;
If obtained the second keyword message, then go to step 32;
If do not obtain the second keyword message, then go to step 34;
S32: step 32, journal file inquiry system judges whether the header file information of locked journal file comprises the field information being matched with the second keyword message;
If header file information comprises the field information being matched with the second keyword message, then go to step 4;
If header file information does not comprise the field information being matched with the second keyword message, then go to step 33;
S33: step 33, returns the message that it fails to match, with backed off after random;
S34: step 34, all field informations that the header file information of locked journal file comprises by journal file inquiry system, as the field information that the match is successful, go to step 4 subsequently.
In preferred embodiment of the present invention, in journal file inquiry system, by the second query unit, locked journal file is inquired about further.
Before inquiring about further, first judge whether user inputs the second keyword message associated with the query.The judge module arranging a connection load module in the second query unit judges whether the input of the second keyword message:
If do not have, then illustrate that user may expect only with the journal file that the first keyword message inquires, the now journal file that locks according to the first query unit of the second query unit, using all field informations in header file information wherein all as can for the field information of inquiry
If have, then illustrate that user have input the second keyword message determined, then the second query unit is according to normal flow query log files.
In preferred embodiment of the present invention, when have input the second keyword message, if be not matched with the corresponding field information of the second keyword message in the header file information of locked journal file, then think and this time inquire about failure, the second query unit returns inquiry failure to user.In preferred embodiment of the present invention, inquiry failure can be sent on journal displaying unit by output unit equally and show, and checks for user.
In preferred embodiment of the present invention, on the basis of technique scheme, the action of above-mentioned coupling first keyword message or the second keyword message, can realize in the following manner:
First in relevant module, the information type of the first keyword message or the second keyword message is preset: the information type such as presetting the first keyword message in the first query unit, comprises semiconductor production equipment information, log query temporal information and Log Types information etc.; In the second query unit, also preset the information type of the second keyword message, comprise daily record rise time information, log category information, daily record related information, daily record said module information, equipment index information and daily record directional information etc.
Subsequently according to the keyword message that load module sends, mate with the information type preset, determine wherein whether comprise the first keyword message or the second keyword message according to matching result.
In preferred embodiment of the present invention, above-mentioned query script as shown in Figure 6:
In EAP system, first determine a semiconductor production equipment according to semiconductor production equipment information, and enter in the log folder of this equipment;
The journal file that the approximate time (log query temporal information) generated according to daily record subsequently to be determined in this file in this time range (namely within default continuous print time interval) produces;
Last according to Log Types information, determine the journal file being classified as corresponding Log Types produced in above-mentioned time range in file, thus finally determine the query context of a journal file.
In the query context of locked journal file, by the second keyword message, and mate relation mechanism (being mated with the field information in header file information by the second keyword message) accordingly, finally inquire the journal file needed for user.
In preferred embodiment of the present invention, in above-mentioned steps 5, journal file inquiry system, when showing Query Result, is supplied to the multiple operation interface of user usually, to support different operating functions, such as:
Check interface, support that user checks the journal file of extraction;
In preferred embodiment of the present invention, check that interface supports that user checks unfiltered journal file equally.So-called unfiltered journal file, namely refers to the journal file merely through first time query unit locking query context.In preferred embodiment of the present invention, situation about making a mistake when above-mentioned functions support is for preventing the second query unit from inquiring about, can be supplied to the chance that user inquires about again.
Copy interface, supports that user copies the journal file of extraction;
Redirect interface, supports the log folder of the corresponding semiconductor production equipment of the journal file that the direct remote access of user is extracted.In preferred embodiment of the present invention, namely above-mentioned functions support is a kind of access interface of Remote Folder, arranges a log access unit, access semiconductor production equipment by communication unit in journal file inquiry system.Log access unit, according to the Query Result of journal file inquiry system, is accessed the log folder of corresponding semiconductor production equipment, and access be the results are shown on journal displaying unit.
The foregoing is only preferred embodiment of the present invention; not thereby embodiments of the present invention and protection domain is limited; to those skilled in the art; should recognize and all should be included in the scheme that equivalent replacement done by all utilizations instructions of the present invention and diagramatic content and apparent change obtain in protection scope of the present invention.
Claims (11)
1. a journal file inquiry system, is applicable in the equipment automatization system in production process of semiconductor; It is characterized in that, connect outside multiple semiconductor production equipments, described semiconductor production equipment is for preserving the journal file of the production event recording wafer, and each described journal file comprises corresponding header file information;
Described journal file inquiry system comprises:
Communication unit, described journal file inquiry system carries out interactive communication by described communication unit and multiple described semiconductor production equipment;
Input block, inputs keyword message for user;
First query unit, connects described input block and described communication unit respectively, for locking the described journal file be stored in described semiconductor production equipment according to described keyword message;
Second query unit, connect described first query unit, described input block and described communication unit respectively, in order to the header file information of described keyword message with locked described journal file is mated, and inquire about and extract the journal file that all described header file information be stored in described semiconductor production equipment comprises the described keyword message that the match is successful;
Output unit, connects described second query unit, for exporting the described journal file that described second query unit is extracted.
2. journal file inquiry system as claimed in claim 1, it is characterized in that, described keyword message comprises the first keyword message and the second keyword message;
The information type of described first keyword message comprises semiconductor production equipment information, log query temporal information and Log Types information;
The information type of described second keyword message comprises daily record rise time information, log category information, daily record related information, equipment index information, daily record said units information and daily record directional information.
3. journal file inquiry system as claimed in claim 2, it is characterized in that, described journal file inquiry system also comprises a data separation unit, be connected between described input block and described first query unit, and between described input block and described second query unit, for reading the described keyword message that described input block sends, and described first keyword message comprised by described keyword message sends into described first query unit, described second keyword message comprised by described keyword message sends into described second query unit.
4. journal file inquiry system as claimed in claim 2, it is characterized in that, described second query unit also comprises:
Judge module, for judging whether the content that described input block inputs comprises described second keyword message;
Parsing module, for resolving by the described header file information of the described journal file of described first query unit locking;
Matching module, connect described parsing module, for described second keyword message and the described header file information that parsed by described parsing module are mated, to obtain being matched with the corresponding field information in the described header file information of described second keyword message;
Enquiry module, connect described matching module, for the described field information obtained according to described matching module process, inquire about and extract the described journal file that all described header file information be stored in described semiconductor production equipment comprises described field information, and the described journal file extracted is sent to described output unit.
5. journal file inquiry system as claimed in claim 1, is characterized in that, also comprise a journal displaying unit, connect described output unit, for showing the described journal file that described output unit exports.
6. journal file inquiry system as claimed in claim 5, is characterized in that, also comprise:
Log access unit, connects described output unit and described journal displaying unit respectively, and connects described semiconductor production equipment by described communication unit; Described log access unit accesses by described communication unit described semiconductor production equipment corresponding to described journal file that described output unit exports, and will access result and shown by described journal displaying unit.
7. a journal file querying method, is applicable in the equipment automatization system in production process of semiconductor; It is characterized in that, comprise a journal file inquiry system, described journal file inquiry system connects described semiconductor production equipment, and described semiconductor production equipment is for preserving the journal file of the production run describing wafer, and each described journal file comprises corresponding header file information;
Described journal file querying method specifically comprises:
Step 1, obtains keyword message;
Step 2, described journal file inquiry system locks the described journal file be stored on described semiconductor production equipment according to described keyword message;
Step 3, the header file information of described keyword message with locked described journal file is mated by described journal file inquiry system, obtains being matched with the corresponding field information in the described header file information of described keyword message to process;
Step 4, described journal file inquiry system is inquired about and is extracted the described journal file that all described header file information be stored in described semiconductor production equipment comprises described field information;
Step 5, described journal file inquiry system shows the described journal file be extracted.
8. journal file querying method as claimed in claim 7, it is characterized in that, described keyword message comprises the first keyword message and the second keyword message;
The information type of the first keyword message comprises semiconductor production equipment information, daily record rise time information and Log Types information;
The information type of the second keyword message comprises daily record rise time information, log category information, daily record related information, equipment index information, daily record said units information and daily record directional information;
In described step 2, described journal file inquiry system locks according to described first keyword message the described journal file be stored on described semiconductor production equipment;
In described step 3, the header file information of described second keyword message with locked described journal file is mated by described journal file inquiry system, obtains being matched with the field information in the described header file information of described keyword message to process.
9. journal file querying method as claimed in claim 8, it is characterized in that, described step 2 specifically comprises:
Step 21, the described semiconductor production equipment of the corresponding described semiconductor production equipment information of described journal file inquiry system locking;
Step 22, the described journal file of the corresponding described journal file query time of described journal file inquiry system locking;
Step 23, the described journal file that the corresponding described Log Types information of described journal file inquiry system locking is determined.
10. journal file querying method as claimed in claim 8, it is characterized in that, described step 3 specifically comprises:
Step 31, described journal file inquiry system judges whether to obtain described second keyword message;
If obtained described second keyword message, then go to step 32;
If do not obtain described second keyword message, then go to step 33;
Step 32, described journal file inquiry system judges whether the described header file information of locked described journal file comprises the field information being matched with described second keyword message;
If described header file information comprises the described field information being matched with described second keyword message, then go to described step 4;
If described header file information does not comprise the described field information being matched with described second keyword message, then go to step 33;
Step 33, returns the message that it fails to match, with backed off after random;
Step 34, all described field information that the described header file information of locked described journal file comprises by described journal file inquiry system, as the described field information that the match is successful, goes to described step 4 subsequently.
11. journal file querying methods as claimed in claim 7, is characterized in that, in described step 5, the described semiconductor production equipment of the described journal file be extracted is preserved in described journal file inquiry system access, and display access result.
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