CN105388187A - Measuring method of humidity-controllable semiconductor gas sensitive element - Google Patents
Measuring method of humidity-controllable semiconductor gas sensitive element Download PDFInfo
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- CN105388187A CN105388187A CN201510778949.9A CN201510778949A CN105388187A CN 105388187 A CN105388187 A CN 105388187A CN 201510778949 A CN201510778949 A CN 201510778949A CN 105388187 A CN105388187 A CN 105388187A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
- G05D22/02—Control of humidity characterised by the use of electric means
Abstract
The invention discloses a measuring method of a humidity-controllable semiconductor gas sensitive element, belonging to the field of element measurement and solving the problem that the existing measuring method of a formaldehyde gas sensitive element is incomplete and is low in humidity control precision. The technical point is as follows: the measuring method comprises the steps of building and measuring a semiconductor gas sensor measuring system, in which a humidity control system is used and comprises a main controller, a humidity detection sensor, a dehumidifier, an ultrasonic humidifier and a buzzer, wherein the humidity detection sensor, the dehumidifier and the ultrasonic humidifier are mounted in a gas chamber, the main controller is respectively connected with the humidity detection sensor, the dehumidifier, the ultrasonic humidifier and the buzzer. Through use of the measuring method, the measurement of the formaldehyde gas sensitive element is more complete, and the controllability and control precision of the humidity are improved.
Description
Technical field
The invention belongs to element test field, particularly relate to a kind of method of testing of semiconductor gas sensor of controlled humidity.
Background technology
When the development of semiconductor gas sensor technology is like a raging fire, the speed of gas sensor technical development is not caught up with in the development of semiconductor gas sensor measuring technology.The mankind to the understanding of objective world and transformation activity, often based on test job.Engineering Testing Technique is exactly utilize modern means of testing to the various signals in engineering, and particularly time dependent dynamic physical signal carries out detecting, tests, analyzes, and therefrom extracts an emerging technology of useful information.Its result measured and analyze describes the state of research object, change and feature objectively, and for transformation further with control research object and provide reliable foundation.Equally, the progress of sensor technology also be unable to do without the raising of its means of testing.At present; the restriction progress of semiconductor gas sensor and a key factor of large-scale production are that detection means falls behind; test environment complexity, testing efficiency, precision are low; simultaneously owing to lacking perfect testing apparatus; can not get complete parameter and the curve of the various characteristic of gas sensor, also limit the further investigation and application of semiconductor gas sensor, therefore; no matter for production and scientific research, be all badly in need of a set of perfect semiconductor gas sensor performance parameter testing system.
Due to the significance of semiconductor gas sensor in reality and the importance of gas sensor test, scientific research personnel both domestic and external has done a large amount of further investigation work to the test macro of semiconductor gas sensor, they have set up the semiconductor gas sensor test macro of Various Functions in different ways, have played important effect to the development of sensor performance test and calibration technique thereof.Make a general survey of these test macros, substantially be all by computing machine, instrument hardware, several part composition such as sensor test chamber, at present, external L.Harvey, G.s.v, coles, HildegardD.Jander, the scholars such as WolfgangGottler successively research and design have gone out a set of Auto-Test System, it can in pure air, in pure gas, in mixed gas, gas sensor is tested, take into account environment temperature simultaneously, humidity is on the impact of its performance parameter, but many operations all need manual carrying out, make tester cannot away from poisonous test environment, need to improve its automaticity further, the parameter kind simultaneously can tested is also less, also restricted to the shape of tested semiconductor gas sensor, the scholars such as domestic Guan Yuguo, Peng Zhongming, Lin Yongbing also successively have developed a set of Auto-Test System, integrate test chamber, detection system, for new product development provides reliable data, but automaticity is high not enough, the parameter gathered is single, use hardware too much, reliability is not high, various pure gas to be difficult in, low strength range dynamic at height mixing and to be difficult to meet required concentration and accuracy requirement.Also exist simultaneously and realize the inspection of gas sensor and the difficulty of stepping.A lot of manufacturer is based on manual test, testing efficiency is low, precision is low, can not meet the needs of production development far away, and what is more important manual test cannot realize kinetic measurement, thus can accurately not record some parameter of gas sensor, as response time curve, release time curve etc.The deficiency of the complete parameter of the various characteristic of gas sensor can not be obtained, limit the further investigation and application of gas sensor.Produce and the needs of research for meeting enterprise, the test macro that the development of gas sensor needs a whole set of perfect.
In the development process of semiconductor gas sensor, need the gas response characteristic of research sensor under varying environment and condition of work, weigh the quality of sensor, sum up and find out best duty, and this be unable to do without good testing apparatus.
The gas response characteristic of current research semiconductor gas sensor has static and gas two kinds of test modes, sensor is arranged in air chamber, certain gas that oneself knows concentration is injected in air chamber, by the response signal of pick-up transducers, the air-sensitive response characteristic of this sensor to this gas can be obtained.The system of carrying out static test under normal circumstances adopts airtight Large Copacity air chamber, the test gas of certain volume is also uniformly mixed in a reservoir by injecting sample gas, the equipment of this method of testing is comparatively simple, but on device, the desorption time of sample gas is longer in air chamber, be not suitable for carrying out a large amount of gas tests.And adopt the mode of gas to be the air-flow passing into constant flow in compared with low capacity air chamber, in a period of time by certain density sample gas, and gather the sensor response data of this time period.Because air chamber is less in this mode, the cleaning residual gas time is shorter, and sensor component can return to original state very soon, can carry out repeated experiment fast, is especially very favourable when the gas-sensitive property research carrying out sensor array.
Summary of the invention
In order to solve the problems of the technologies described above, and humidity in test process accurately be controlled, the invention provides a kind of method of testing of semiconductor gas sensor of controlled humidity.
The technical solution used in the present invention is: a kind of method of testing of semiconductor gas sensor of controlled humidity, has:
Semiconductor gas sensor test macro sets up the step with test, and the step to semiconductor gas sensor test macro and semiconductor gas sensor performance evaluation; Wherein,
In the step that described gas sensor test system is set up and tested, there is the step controlled the humidity of air chamber, a kind of moisture control system is employed in this step, comprise master controller, moisture detection sensor, dehumidifier, ultrasonic humidifier and hummer, wherein, moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in air chamber, and master controller is connected with moisture detection sensor, dehumidifier, ultrasonic humidifier, hummer respectively.
Further, described semiconductor gas sensor test macro is set up with the step of test, and semiconductor gas sensor test macro is used for carrying out dynamic air-distributing at a given concentration and branched sensor array is listed in when gas passes into carrying out Real-Time Monitoring to the change of gas sensor surface conductivity to gas with various;
Described semiconductor gas sensor test macro comprises: automatically carry out the sampling device of sample gas concentration proportioning, gas sensor heating and temperature measuring equipment, for sampling device coordination, and under different gas sample environment, automatically gather the signal measurement of 4 ~ 6 road gas sensor measuring-signals and data acquisition circuit, the measuring-signal gathered carried out to the data processing circuit of data processing; With the temperature-compensation circuit compensated the temperature variation caused by intake process and room temperature change;
Gas sensor array is arranged in air chamber, and the change of gas concentration measured by gas sensor is the change of gas in air chamber, and air chamber is the round and smooth and organic glass chamber of the drying of squarish of cavity shape;
Described gas sensor heating is heated gas sensor with temperature measuring equipment, and the working temperature of real-time measurement gas sensor; When the working temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit carries out function of temperature compensation control in real time, and the working temperature of sensor is remained unchanged; Described signal measurement and data acquisition circuit are used for sampling to Signal Regulation and AD, Signal Regulation is for changing the response of gas sensor to test gas sample into electric signal, analog-signal transitions is digital signal by data processing circuit by AD sampling by simulating signal, and by 4 ~ 6 tunnel sensor signals that collect through normalized, change the standard signal required for BP neural network into;
Standard Gases sample exports and is divided into two roads or multichannel, each freedom mass flow controller controls, and access proving installation, carrier gas and gas to be measured enter drying chamber respectively and fully mix under the control of mass flow controller, be made into target detection gas sample and enter in the test chamber in proving installation, gas sensor test system carries out distribution to set aimed concn gas under control of the computer, the target gas sample of one or more normal concentrations and the carrier gas of standard are proportionally carried out proportioning, and pass in hybrid channel and fully mix under mass flow controller controls, when mixed test gas sample passes into test chamber, 4 ~ 6 tunnel response signals of gas sensor array in air chamber are gathered, and the response message of the gas sensor array of acquisition to sample gas is sent on computing machine carries out data processing and data analysis, make test gas air inlet, response signal collection and data processing sequence carry out, when temperature monitoring system finds that semiconductor gas sensor working temperature changes, temperature-compensation circuit carries out element manipulation temperature compensation in real time, the heating voltage of regulating resistance silk, and the working temperature of element is remained unchanged,
Moisture detection sensor detects air chamber humidity signal in real time, and by this Signal transmissions to master controller, master controller is based on humidity set point constant in air chamber, or the humidity range of a setting, this moisture signal is compared with the setting value of controller, and controller exports Staged cotrol signal; When the humidity in air chamber is lower than 10%RH, and humidifier has reached maximum, when system can not continue humidification, or the humidity in air chamber is higher than 60%RH, and dehumidifier leaves to time maximum, and master controller will control buzzer rings, and call master controller interruption, stop exporting the signal of dehumidifier and ultrasonic humidifier, and humidity more than 60%RH time, system auto-breaking also stops test.
Further, the software section of described gas sensor test system comprises gas circuit control module, voltage sample module, temperature compensation module, data processing module and Presentation Function module, wherein:
Gas circuit control module is arranged controling parameters, time, duration of ventilation before described parameter comprises ventilation, stop the supple of gas or steam after the time, data sampling time interval, mixed gas kind, various gas concentration and carrier gas control voltage, gas circuit control module realizes distribution to optimum configurations to control multichannel gas sample output quantity, in distribution process, the working temperature of gas flow and element remains unchanged in whole test process;
Voltage sample module starts voltage sample, Sampling interrupt terminates to carry out corresponding control to sampling;
Data processing module carries out data acquisition, data preservation, Image Saving, image printing, historical data extraction process.
Further, data acquisition module completes the data tracking collection in sampling time interval, the experimental data provided automatically is saved as after terminating this experiment to six files of two kinds of forms, be respectively the voltage of 4 ~ No. 6 sensors, resistance, response sensitivity digital quantity and dynamic changing curve, the image preserved immediately printed and temporally extracted historical data simultaneously; In data acquisition, according to different the demand in real time normal voltage of display 4 ~ No. 6 sensors, resistance and response sensitivity dynamic changing curve in time in display module.
5. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 4, it is characterized in that, the described step to gas sensor test system and gas sensor performance evaluation, comprise the various error analyses to gas sensor test system, the sensitivity of measuring resistance, resistance-temperature characteristic, sensitivity-temperature characterisitic, sensitivity-grey density characteristics are analyzed and adulterated on the analysis of element function impact.
Further, 4 ~ 6 road sign calibration signal that sensor adopts are carried out the normalized of data, and process data into the normal data source required for the acquisition of BP neural network, the step of carrying out the gas analysis of BP neural network is as follows:
Quantitative test:
Select single formaldehyde gas to detect sample, quantitatively detect, the mixed gas quantitative judge such as sensor array PARA FORMALDEHYDE PRILLS(91,95) gas, ammonia, benzene are made up of 4 ~ 6 sensors, the input neuron number of neural network is 6, output neuron number is 1, dynamic change hidden layer number also asks for its corresponding training error, to determine best hidden layer neuron number;
Use newff function creation two-tier network, the hidden layer neuron number of network is set as S (i), its scope is 3-13, the training function of network is set to Trainbr, if the weights and threshold of network is the stochastic variable of special distribution, network weight and threshold value is estimated with statistical method, using the input of input vector P as trained neural network, train function is utilized to train network, the formaldehyde gas of 30 groups of variable concentrations is quantitatively detected as input, obtains the Output rusults of quantitatively detection and corresponding experimental error;
Qualitative analysis:
The sensor array PARA FORMALDEHYDE PRILLS(91,95) be made up of 4 ~ 6 sensors, ammonia, benzene three kinds of gas characteristic amounts carry out qualitative recognition, the input neuron number of network is 6, output neuron number is 3, is contrasted determine the best implicit number of plies by error, dynamically changes the implicit number of plies;
Use newff function creation three-layer network, network hidden layer neuron number is set as a dynamic variable S (i), its scope is 3-13, by 10 training, the one group of neuron number obtaining training error minimum is best neuron number, if the weights and threshold of network is the stochastic variable of special distribution, estimate network weight and threshold value with statistical method; Training stopping until experimental error meets the demands; Odd number group is inputted as trained neural network.
Further, described moisture control system, also comprise host computer, host computer has human-computer interaction interface, and for man-machine interactive operation, real-time display humidity set point and humidity measurements, described master controller is PLC, and uses the PID adjustment module of PLC to carry out closed-loop control to the humidity in air chamber.
Further, use STEP7 software to the method for humid control is:
Carry out establishment project and hardware configuration: first, enter STEP7 software interface, then menu is clicked, create new projects, entry name on the left of right button on menu, clicks and inserts S7-300 website, double-clicks the S7-300 website opening insertion afterwards, double-click the hardware of right side window, carry out hardware configuration at the hardware window ejected;
Configuration:
Find frame at right frame, double-click after setting frame, then click slot 2, in right frame, find the CPU of corresponding model, double-click can insert slot 2.Then double-click CPU, in the window ejected, arrange corresponding subnet MPI, Analog input mModule should be inserted in No. 4 slots, operates identical with insertion CPU;
After whole hardware is inserted corresponding slot, namely the shortcut clicking " preserve and compile " of top menu bar completes hardware configuration, gets back to the main interface of STEP7 and carries out next step programming;
There is OB1 tissue block in the main interface after hardware configuration is good, other tissue blocks required for adding in blank space and logical block, click the insertion of top menu bar, in the drop-down menu ejected, click S7 module, selects required module of adding;
Each several part controls the required programmed method used: hand automatically switches, the start and stop of manually dehumidifying, manual humidification start and stop, manually run output, by the folding of auxiliary reclay simulation normally-open normally-close contact, to reach the object of control and self-locking, when humidity is lower than 20%RH with higher than 40%RH alarm, output winding puts 1, hummer is blown a whistle, and interrupts master routine, stop the pulse of the outside solid-state relay of all feedings, i.e. dehumidifier, ultrasonic humidifier dehumidifying or humidification;
Use PID adjustment module to carry out closed loop adjustment to humidity, it is FB58 " TCONT_CP ", for controlling continuous print or having the humidity processing procedure of pulse signal; Call this module meeting generation background data block DB58, double-click the DB58 background data block clicking main interface, click and check parameter, the interface observation data ejected;
The method of FB58 module installation parameter is as follows:
(1) PV_IN is the setting value of controlled variable;
(2) SP_INT is the actual value of controlled variable, needs to input humidity measurements;
(3) QPULSE is for exporting pulse, is connected with outside solid-state relay;
Built-in variable method to set up is:
(1) the module GAIN called that dehumidifies is set to negative, and GAIN is set to-4.0, is just in humidification part GAIN value, and GAIN initial value is 2;
(2) PULSE_ON is that pulse producer is opened, when this value changes TURE into by FALSE, and sensitizing pulse generator;
(3) TI integral action reset time, initial value is 4.0S;
(4) TD differential action reset time, initial value is 1.0S;
(5) TUN_ON self-regulation is opened, and changes initial value FALSE into TURE here;
(6) TUN_ST starts self-regulation, changes initial value FALSE into TURE here.
Beneficial effect:
1. the present invention high-precisionly can realize the distribution of common test gas in conventionally test concentration range; Branched sensor or gas sensor array can be tested simultaneously.
2. the present invention can realize measuring multiple parameters: because this test macro is modular, and can connect multiple measurement module, each measurement module can realize multi-channel measurement again simultaneously, test while therefore easily realizing multiple, multiple types parameter.
3. the present invention prepares and tests the sensitive element of multiple doping techniques, makes the detection of semiconductor gas sensor to volatile organic gas have progress.
4. the present invention is by gas sensor array and artificial neural network technology phase technology, and based on BP algorithm realization the qualitative recognition of multiple gases and the quantitative judge of pure gas.
5. moisture control system of the present invention, humidity environment is felt wet effectively, dehumidifying, humidification, the control such as humidity display and humidity alarm.Make humidity can by effective monitor and forecast, test process carries out smoothly, realizes the humid control under closed environment in 10 ~ 60%RH humidity range, and effect on moisture extraction is remarkable, the requirement to humid control when effectively meeting gas sensor test.And the present invention is when setting air chamber humidity more than 60%RH, system cut-off, object is to ensure that test is carried out in a secure environment, and when humidity is more than 60%RH, test macro is in the hole, is not suitable for test experiments and carries out.
Accompanying drawing explanation
Fig. 1 is the process flow diagram of the method for the embodiment of the present invention 1;
Fig. 2 is the schematic diagram of the semiconductor gas sensor test macro closed loop flow process of the embodiment of the present invention 2;
Fig. 3 is the structured flowchart of the semiconductor gas sensor test macro of the embodiment of the present invention 2; (increasing moisture control system)
Fig. 4 is the software functional block diagram of the embodiment of the present invention 3;
Fig. 5 is the metering circuit of the semiconductor gas sensor test macro in the embodiment of the present invention 5;
Fig. 6 .1 is the schematic diagram of the BP neural network structure of quantitative judge in the embodiment of the present invention 6;
Fig. 6 .2 is the schematic diagram of the training process that the gasometry in the embodiment of the present invention 6 detects;
Fig. 6 .3 is the schematic diagram of the BP neural network structure of qualitative recognition in the embodiment of the present invention 6;
Fig. 6 .4 is the schematic diagram of the qualitative analysis training result in the embodiment of the present invention 6;
Fig. 7 is the structured flowchart schematic diagram of moisture control system of the present invention;
Fig. 8 is the block scheme of the closed-loop control system of moisture control system of the present invention.
Embodiment
embodiment 1:
A method of testing for the semiconductor gas sensor of controlled humidity, has: SnO
2step prepared by gas sensitive, the step that gas sensor makes, semiconductor gas sensor test macro sets up the step with test, and the step to semiconductor gas sensor test macro and semiconductor gas sensor performance evaluation.
In the step that described gas sensor test system is set up and tested, there is the step controlled the humidity of air chamber, a kind of moisture control system is employed in this step, comprise master controller, moisture detection sensor, dehumidifier, ultrasonic humidifier and hummer, wherein, moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in air chamber, and master controller is connected with moisture detection sensor, dehumidifier, ultrasonic humidifier, hummer respectively.
embodiment 2:
There is the technical scheme identical with embodiment 1, more specifically: SnO
2step prepared by gas sensitive is: with SnCl
45H
2o is raw material, is precipitation agent, takes a certain amount of SnCl with weak aqua ammonia
45H
2o raw material, is dissolved in appropriate deionized water, adds a small amount of citric acid, stirs, and makes it to dissolve completely, is then heated to boiling, and makes it to react; By the weak aqua ammonia prepared, be slowly added drop-wise to SnCl
4in aqueous solution, and constantly stir, time, completely to be precipitated, with warm water washing, sediment repeatedly, to remove Cl-wherein, then is dried by eccentric cleaning at 60 ~ 100 DEG C, after grinding in muffle furnace in about 700 DEG C calcination 2 ~ 4h, obtain SnO
2gas sensitive.
embodiment 3:
There is the technical scheme identical with embodiment 1 or 2, more specifically: in the step that gas sensor makes, the tube core of described sensitive element has a capillary ceramic pipe, heater strip penetrates in ceramic pipe, outside pipe, coat the signal electrode of metal electrode as measuring sensor resistance, outside metal electrode, coat gas sensitive SnO
2, and fire and form;
Making step is: ceramic pipe substrate two ends being scribbled metal electrode uses toluene, alcohol and deionized water ultrasonic cleaning successively, after drying under infrared lamp, ground slurry is coated in ceramic pipe surface, dry under infrared lamp, then sinter in tube type resistance furnace, finally the heater strip with appropriate resistance is penetrated in burned tube core, and contact conductor and heater strip lead-in wire are welded on the base of element, be made into gas sensor, use gas sensor to make gas gas sensor.
This structure overcomes the shortcoming of directly-heated type element, and because heater strip does not contact with gas sensitive, avoid the mutual interference between measuring circuit and heating circuit, the consistance of element function improves a lot, and physical strength is also greatly improved.
embodiment 4:
Have and the identical technical scheme of embodiment 1 or 2 or 3, more specifically: described semiconductor gas sensor test macro is set up with the step of test, and semiconductor gas sensor test macro is used for carrying out dynamic air-distributing at a given concentration and branched sensor array is listed in when gas passes into carrying out Real-Time Monitoring to the change of gas sensor surface conductivity to gas with various;
Described semiconductor gas sensor test macro comprises: automatically carry out the sampling device of sample gas concentration proportioning, gas sensor heating and temperature measuring equipment, for sampling device coordination, and under different gas sample environment, automatically gather the signal measurement of 4 ~ 6 road gas sensor measuring-signals and data acquisition circuit, the measuring-signal gathered carried out to the data processing circuit of data processing; With the temperature-compensation circuit compensated the temperature variation caused by intake process and room temperature change; Describedly refer to sampling device coordination, signals collecting is synchronous with sample introduction or corresponding, thus makes sample introduction and gather the coordination that can realize in time sequencing.
Gas sensor array is arranged in air chamber, and the change of gas concentration measured by gas sensor is the change of gas in air chamber, and air chamber is the round and smooth and organic glass chamber of the drying of squarish of cavity shape;
Described gas sensor heating is heated gas sensor with temperature measuring equipment, and the working temperature of real-time measurement gas sensor; When the working temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit carries out function of temperature compensation control in real time, and the working temperature of sensor is remained unchanged; Described signal measurement and data acquisition circuit are used for sampling to Signal Regulation and AD, Signal Regulation is for changing the response of gas sensor to test gas sample into electric signal, analog-signal transitions is digital signal by data processing circuit by AD sampling by simulating signal, and by 4 ~ 6 tunnel sensor signals that collect through normalized, change the standard signal required for BP neural network into;
Moisture detection sensor detects air chamber humidity signal in real time, and by this Signal transmissions to master controller, master controller is based on humidity set point constant in air chamber, or the humidity range of a setting, this moisture signal is compared with the setting value of controller, and controller exports Staged cotrol signal; When the humidity in air chamber is lower than 10%RH, and humidifier has reached maximum, when system can not continue humidification, or the humidity in air chamber is higher than 60%RH, and dehumidifier leaves to time maximum, and master controller will control buzzer rings, and call master controller interruption, stop exporting the signal of dehumidifier and ultrasonic humidifier, and humidity more than 60%RH time, system auto-breaking also stops test.
Described moisture control system, also comprises host computer, and host computer has human-computer interaction interface, and for man-machine interactive operation, real-time display humidity set point and humidity measurements, described master controller is PLC, and uses the PID adjustment module of PLC to carry out closed-loop control to the humidity in air chamber.
Wherein: Programmable Logic Controller (ProgrammableController) is a member in computing machine family, for Industry Control Application and embodiment manufacture, early stage Programmable Logic Controller is called programmable logic controller (PLC) (ProgrammableLogicController), be called for short PLC, it is mainly used to replace relay to realize logic control.Although PLC of today not only can realize the task of logic control already, people out of habit, are still called PLC, only logic are gone out in Chinese, are called Programmable Logic Controller.The S7-300 type PLC that the present embodiment uses Siemens Company to produce, it belongs to Medium PLC, and adopt modular construction, range of application is very extensive.
Humidity-sensitive element is the simplest humidity sensor, and humidity-sensitive element mainly contains resistance-type, the large class of condenser type two, and the present embodiment adopts HM1500 humidity sensor, and it belongs to condenser type, and it is a kind of Linear voltage output formula Integrated Humidity Sensor specifically.
The method of dehumidifying is very abundant, and the most frequently used method ventilates to keeping dry.The more effective way of indoor dehumidification selects different types of dehumidifier, and dehumidifier is divided into freezing type dehumidifier, cycle type dehumidifier and electro-osmosis formula dehumidifier because of the difference of its principle of work.Most of Domestic dehumidifying machine is all freezing type dehumidifier, and the dehumanization method selected by the present embodiment belongs to freezing type dehumidifier category.
The mode of humidification is very abundant, and traditional humidification is sprinkled upon by water on the ground, utilizes moisture spontaneous evaporation to reach the object increasing air humidity.Modern times mainly utilize humidifier to carry out humidification.By different usable range, humidifier can be divided into industrial, commercial and family expenses three kinds.Industrially generally use evaporation type humidifier, commercially generally use ultrasonic humidifier.Household humidifier much all selects purified humidifier.The present embodiment adopts ultrasonic humidifier, and humidification module is formed primarily of power supply unit (same to humidifying unit), ultrasonic transducer, pond and blower fan.
The present embodiment use STEP7 software to the method for humid control is:
Carry out establishment project and hardware configuration: first, enter STEP7 software interface, then menu is clicked, create new projects, entry name on the left of right button on menu, clicks and inserts S7-300 website, double-clicks the S7-300 website opening insertion afterwards, double-click the hardware of right side window, carry out hardware configuration at the hardware window ejected;
Configuration:
Find frame at right frame, double-click after setting frame, then click slot 2, in right frame, find the CPU of corresponding model, double-click can insert slot 2.Then double-click CPU, in the window ejected, arrange corresponding subnet MPI, Analog input mModule should be inserted in No. 4 slots, operates identical with insertion CPU;
After whole hardware is inserted corresponding slot, namely the shortcut clicking " preserve and compile " of top menu bar completes hardware configuration, gets back to the main interface of STEP7 and carries out next step programming;
There is OB1 tissue block in the main interface after hardware configuration is good, other tissue blocks required for adding in blank space and logical block, click the insertion of top menu bar, in the drop-down menu ejected, click S7 module, selects required module of adding;
Each several part controls the required programmed method used: hand automatically switches, the start and stop of manually dehumidifying, manual humidification start and stop, manually run output, by the folding of auxiliary reclay simulation normally-open normally-close contact, to reach the object of control and self-locking, when humidity is lower than 20%RH with higher than 40%RH alarm, output winding puts 1, hummer is blown a whistle, and interrupts master routine, stop the pulse of the outside solid-state relay of all feedings, i.e. dehumidifier, ultrasonic humidifier dehumidifying or humidification;
Use PID adjustment module to carry out closed loop adjustment to humidity, it is FB58 " TCONT_CP ", for controlling continuous print or having the humidity processing procedure of pulse signal; Call this module meeting generation background data block DB58, double-click the DB58 background data block clicking main interface, click and check parameter, the interface observation data ejected;
The method of FB58 module installation parameter is as follows:
(1) PV_IN is the setting value of controlled variable;
(2) SP_INT is the actual value of controlled variable, needs to input humidity measurements;
(3) QPULSE is for exporting pulse, is connected with outside solid-state relay;
Built-in variable method to set up is:
(7) the module GAIN called that dehumidifies is set to negative, and GAIN is set to-4.0, is just in humidification part GAIN value, and GAIN initial value is 2;
(8) PULSE_ON is that pulse producer is opened, when this value changes TURE into by FALSE, and sensitizing pulse generator;
(9) TI integral action reset time, initial value is 4.0S;
(10) TD differential action reset time, initial value is 1.0S;
(11) TUN_ON self-regulation is opened, and changes initial value FALSE into TURE here;
(12) TUN_ST starts self-regulation, changes initial value FALSE into TURE here.
In semiconductor gas sensor test process: Standard Gases sample exports and is divided into two roads or multichannel, each freedom mass flow controller controls, and access proving installation, carrier gas and gas to be measured enter drying chamber respectively and fully mix under the control of mass flow controller, be made into target detection gas sample and enter in the test chamber in proving installation, gas sensor test system carries out distribution to set aimed concn gas under control of the computer, the target gas sample of one or more normal concentrations and the carrier gas of standard are proportionally carried out proportioning, and pass in hybrid channel and fully mix under mass flow controller controls, when mixed test gas sample passes into test chamber, 4 ~ 6 tunnel response signals of gas sensor array in air chamber are gathered, and the response message of the gas sensor array of acquisition to sample gas is sent on computing machine carries out data processing and data analysis, make test gas air inlet, response signal collection and data processing sequence carry out, when temperature monitoring system finds that semiconductor gas sensor working temperature changes, temperature-compensation circuit carries out element manipulation temperature compensation in real time, the heating voltage of regulating resistance silk, and the working temperature of element is remained unchanged.
Wherein: because semiconductor gas sensor operating characteristic is relevant with temperature, so need to heat semiconductor gas sensor, the working temperature of gas sensor directly affects transducer sensitivity, need temperature sensor simultaneously, the working temperature of real-time measurement gas sensor, the test macro thus in the present embodiment has gas sensor heating and, temperature measuring equipment and working temperature compensating circuit.
In test, selection resistive heater is nickel-chrome, and resistance is 30 ohm, adopts DC power control heating voltage, realizes controlling the working temperature of gas sensor.For the temperature on the thermocouple temperature sensor detection ceramic pipe surface of thermometric, but because temperature is all obtained by the surface of thermopair direct detection element, and not only surface area is little on contact element surface, and it is extremely flimsy after surfacing contact, element surface temperature can be made to reduce during thermometric simultaneously, certain deviation is brought to measurement, for this reason, on pretreatment by the demarcation element surface temperature that voltage is rough, in test afterwards, directly represent element surface temperature with heating voltage, following table is the relation of gas sensor surface temperature and heating voltage.
| Heating voltage | 1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | 11 |
| Temperature (DEG C) | 26 | 55 | 89 | 137 | 179 | 225 | 268 | 302 | 343 | 377 | 416 |
Standard Gases sample exports and is divided into two roads or multichannel, each freedom mass flow controller controls, and access proving installation, carrier gas and gas to be measured are (as formaldehyde, ammonia, benzene, carbon monoxide, oxygen etc.) under the control of mass flow controller, enter drying chamber respectively and fully mix, be made into test gas sample and enter in the test chamber in proving installation, gas sensor test system carries out distribution to set aimed concn gas under control of the computer, the target gas sample of one or more normal concentrations and the carrier gas of standard are proportionally carried out proportioning, and pass in hybrid channel and fully mix under mass flow controller controls, when mixed test gas sample passes into air chamber, the response signal of gas sensor array in air chamber is gathered, and the response message of the gas sensor array of acquisition to sample gas is sent on computing machine carries out data analysis, make test gas air inlet, response signal collection and data processing sequence carry out, when temperature monitoring system finds that semiconductor gas sensor working temperature changes, temperature-compensation circuit carries out element manipulation temperature compensation in real time, the heating voltage of regulating resistance silk, and the working temperature of element is remained unchanged.Overcome traditional method of testing and not only will consume too much manpower, and manual operations there are many labile factors, make measurement be attached with relatively large deviation value.
In order to observed responses process intuitively, on computing machine, corresponding application software has graphical interfaces, the response curve of sensor array can be demonstrated in real time, this system includes automated gas divider, data acquisition, control circuit and corresponding computer and controls, applies this few part of process software, each several part is connected with computing machine by data bus, in conjunction with the real-time processing controls of computer software, test gas air inlet, response signal collection and data processing sequence can be made to carry out, form complete test process.
embodiment 5:
Have and the identical technical scheme of embodiment 1 or 2 or 3 or 4, more specifically: the software section of described gas sensor test system comprises gas circuit control module, voltage sample module, temperature compensation module, data processing module and Presentation Function module, wherein:
Gas circuit control module is arranged controling parameters, time, duration of ventilation before described parameter comprises ventilation, stop the supple of gas or steam after the time, data sampling time interval, mixed gas kind, various gas concentration and carrier gas control voltage, gas circuit control module realizes distribution to optimum configurations to control multichannel gas sample output quantity, in distribution process, the working temperature of gas flow and element remains unchanged in whole test process;
Voltage sample module starts voltage sample, Sampling interrupt terminates to carry out corresponding control to sampling;
Data processing module carries out data acquisition, data preservation, Image Saving, image printing, historical data extraction process.
embodiment 6:
Have and the identical technical scheme of embodiment 1 or 2 or 3 or 4 or 5, more specifically: data acquisition module completes the data tracking collection in sampling time interval, the experimental data provided automatically is saved as after terminating this experiment to six files of two kinds of forms, be respectively the voltage of 4 ~ No. 6 sensors, resistance, response sensitivity digital quantity and dynamic changing curve, the image preserved immediately printed and temporally extracted historical data simultaneously; In data acquisition, according to different the demand in real time normal voltage of display 4 ~ No. 6 sensors, resistance and response sensitivity dynamic changing curve in time in display module.
embodiment 7:
Have and the identical technical scheme of embodiment 1 or 2 or 3 or 4 or 5 or 6, more specifically: the described step to gas sensor test system and gas sensor performance evaluation, comprise the various error analyses to gas sensor test system, the sensitivity of measuring resistance, resistance-temperature characteristic, sensitivity-temperature characterisitic, sensitivity-grey density characteristics are analyzed and adulterated on the analysis of element function impact.
embodiment 8:
Have and the identical technical scheme of embodiment 1 or 2 or 3 or 4 or 5 or 6 or 7, more specifically: the normalized of 4 ~ 6 road sign calibration signal that sensor adopts being carried out data, and the normal data source processed data into required for the acquisition of BP neural network, the step of carrying out the gas analysis of BP neural network is as follows:
Quantitative test:
Select single formaldehyde gas to detect sample, quantitatively detect, the mixed gas quantitative judge such as sensor array PARA FORMALDEHYDE PRILLS(91,95) gas, ammonia, benzene are made up of 4 ~ 6 sensors, the input neuron number of neural network is 6, output neuron number is 1, dynamic change hidden layer number also asks for its corresponding training error, to determine best hidden layer neuron number;
Use newff function creation two-tier network, the hidden layer neuron number of network is set as S (i), its scope is 3-13, the training function of network is set to Trainbr, if the weights and threshold of network is the stochastic variable of special distribution, network weight and threshold value is estimated with statistical method, using the input of input vector P as trained neural network, train function is utilized to train network, the formaldehyde gas of 30 groups of variable concentrations is quantitatively detected as input, obtains the Output rusults of quantitatively detection and corresponding experimental error;
Qualitative analysis:
The sensor array PARA FORMALDEHYDE PRILLS(91,95) be made up of 4 ~ 6 sensors, ammonia, benzene three kinds of gas characteristic amounts carry out qualitative recognition, the input neuron number of network is 6, output neuron number is 3, is contrasted determine the best implicit number of plies by error, dynamically changes the implicit number of plies;
Use newff function creation three-layer network, network hidden layer neuron number is set as a dynamic variable S (i), its scope is 3-13, by 10 training, the one group of neuron number obtaining training error minimum is best neuron number, if the weights and threshold of network is the stochastic variable of special distribution, estimate network weight and threshold value with statistical method; Training stopping until experimental error meets the demands; Odd number group is inputted as trained neural network.
The above; be only the present invention's preferably embodiment; but protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; be equal to according to technical scheme of the present invention and inventive concept thereof and replace or change, all should be encompassed within protection scope of the present invention.
Claims (8)
1. a method of testing for the semiconductor gas sensor of controlled humidity, is characterized in that, has:
Semiconductor gas sensor test macro sets up the step with test, and the step to semiconductor gas sensor test macro and semiconductor gas sensor performance evaluation; Wherein,
In the step that described gas sensor test system is set up and tested, there is the step controlled the humidity of air chamber, a kind of moisture control system is employed in this step, comprise master controller, moisture detection sensor, dehumidifier, ultrasonic humidifier and hummer, wherein, moisture detection sensor, dehumidifier and ultrasonic humidifier are installed in air chamber, and master controller is connected with moisture detection sensor, dehumidifier, ultrasonic humidifier, hummer respectively.
2. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 1, it is characterized in that, described semiconductor gas sensor test macro is set up with the step of test, and semiconductor gas sensor test macro is used for carrying out dynamic air-distributing at a given concentration and branched sensor array is listed in when gas passes into carrying out Real-Time Monitoring to the change of gas sensor surface conductivity to gas with various;
Described semiconductor gas sensor test macro comprises: automatically carry out the sampling device of sample gas concentration proportioning, gas sensor heating and temperature measuring equipment, for sampling device coordination, and under different gas sample environment, automatically gather the signal measurement of 4 ~ 6 road gas sensor measuring-signals and data acquisition circuit, the measuring-signal gathered carried out to the data processing circuit of data processing; With the temperature-compensation circuit compensated the temperature variation caused by intake process and room temperature change;
Gas sensor array is arranged in air chamber, and the change of gas concentration measured by gas sensor is the change of gas in air chamber, and air chamber is the round and smooth and organic glass chamber of the drying of squarish of cavity shape;
Described gas sensor heating is heated gas sensor with temperature measuring equipment, and the working temperature of real-time measurement gas sensor; When the working temperature of sensor changes because of environment temperature or airflow influence, temperature-compensation circuit carries out function of temperature compensation control in real time, and the working temperature of sensor is remained unchanged; Described signal measurement and data acquisition circuit are used for sampling to Signal Regulation and AD, Signal Regulation is for changing the response of gas sensor to test gas sample into electric signal, analog-signal transitions is digital signal by data processing circuit by AD sampling by simulating signal, and by 4 ~ 6 tunnel sensor signals that collect through normalized, change the standard signal required for BP neural network into;
Standard Gases sample exports and is divided into two roads or multichannel, each freedom mass flow controller controls, and access proving installation, carrier gas and gas to be measured enter drying chamber respectively and fully mix under the control of mass flow controller, be made into target detection gas sample and enter in the test chamber in proving installation, gas sensor test system carries out distribution to set aimed concn gas under control of the computer, the target gas sample of one or more normal concentrations and the carrier gas of standard are proportionally carried out proportioning, and pass in hybrid channel and fully mix under mass flow controller controls, when mixed test gas sample passes into test chamber, 4 ~ 6 tunnel response signals of gas sensor array in air chamber are gathered, and the response message of the gas sensor array of acquisition to sample gas is sent on computing machine carries out data processing and data analysis, make test gas air inlet, response signal collection and data processing sequence carry out, when temperature monitoring system finds that semiconductor gas sensor working temperature changes, temperature-compensation circuit carries out element manipulation temperature compensation in real time, the heating voltage of regulating resistance silk, and the working temperature of element is remained unchanged,
Moisture detection sensor detects air chamber humidity signal in real time, and by this Signal transmissions to master controller, master controller is based on humidity set point constant in air chamber, or the humidity range of a setting, this moisture signal is compared with the setting value of controller, and controller exports Staged cotrol signal; When the humidity in air chamber is lower than 10%RH, and humidifier has reached maximum, when system can not continue humidification, or the humidity in air chamber is higher than 60%RH, and dehumidifier leaves to time maximum, and master controller will control buzzer rings, and call master controller interruption, stop exporting the signal of dehumidifier and ultrasonic humidifier, and humidity more than 60%RH time, system auto-breaking also stops test.
3. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 1 or 2, it is characterized in that, the software section of described gas sensor test system comprises gas circuit control module, voltage sample module, temperature compensation module, data processing module and Presentation Function module, wherein:
Gas circuit control module is arranged controling parameters, time, duration of ventilation before described parameter comprises ventilation, stop the supple of gas or steam after the time, data sampling time interval, mixed gas kind, various gas concentration and carrier gas control voltage, gas circuit control module realizes distribution to optimum configurations to control multichannel gas sample output quantity, in distribution process, the working temperature of gas flow and element remains unchanged in whole test process;
Voltage sample module starts voltage sample, Sampling interrupt terminates to carry out corresponding control to sampling;
Data processing module carries out data acquisition, data preservation, Image Saving, image printing, historical data extraction process.
4. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 3, it is characterized in that, data acquisition module completes the data tracking collection in sampling time interval, the experimental data provided automatically is saved as after terminating this experiment to six files of two kinds of forms, be respectively the voltage of 4 ~ No. 6 sensors, resistance, response sensitivity digital quantity and dynamic changing curve, the image preserved immediately printed and temporally extracted historical data simultaneously; In data acquisition, according to different the demand in real time normal voltage of display 4 ~ No. 6 sensors, resistance and response sensitivity dynamic changing curve in time in display module.
5. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 4, it is characterized in that, the described step to gas sensor test system and gas sensor performance evaluation, comprise the various error analyses to gas sensor test system, the sensitivity of measuring resistance, resistance-temperature characteristic, sensitivity-temperature characterisitic, sensitivity-grey density characteristics are analyzed and adulterated on the analysis of element function impact.
6. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 2, it is characterized in that, 4 ~ 6 road sign calibration signal that sensor adopts are carried out the normalized of data, and the normal data source processed data into required for the acquisition of BP neural network, the step of carrying out the gas analysis of BP neural network is as follows:
Quantitative test:
Select single formaldehyde gas to detect sample, quantitatively detect, the mixed gas quantitative judge such as sensor array PARA FORMALDEHYDE PRILLS(91,95) gas, ammonia, benzene are made up of 4 ~ 6 sensors, the input neuron number of neural network is 6, output neuron number is 1, dynamic change hidden layer number also asks for its corresponding training error, to determine best hidden layer neuron number;
Use newff function creation two-tier network, the hidden layer neuron number of network is set as S (i), its scope is 3-13, the training function of network is set to Trainbr, if the weights and threshold of network is the stochastic variable of special distribution, network weight and threshold value is estimated with statistical method, using the input of input vector P as trained neural network, train function is utilized to train network, the formaldehyde gas of 30 groups of variable concentrations is quantitatively detected as input, obtains the Output rusults of quantitatively detection and corresponding experimental error;
Qualitative analysis:
The sensor array PARA FORMALDEHYDE PRILLS(91,95) be made up of 4 ~ 6 sensors, ammonia, benzene three kinds of gas characteristic amounts carry out qualitative recognition, the input neuron number of network is 6, output neuron number is 3, is contrasted determine the best implicit number of plies by error, dynamically changes the implicit number of plies;
Use newff function creation three-layer network, network hidden layer neuron number is set as a dynamic variable S (i), its scope is 3-13, by 10 training, the one group of neuron number obtaining training error minimum is best neuron number, if the weights and threshold of network is the stochastic variable of special distribution, estimate network weight and threshold value with statistical method; Training stopping until experimental error meets the demands; Odd number group is inputted as trained neural network.
7. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 2, it is characterized in that, described moisture control system, also comprise host computer, host computer has human-computer interaction interface, and for man-machine interactive operation, display humidity set point and humidity measurements in real time, described master controller is PLC, and uses the PID adjustment module of PLC to carry out closed-loop control to the humidity in air chamber.
8. the method for testing of the semiconductor gas sensor of controlled humidity as claimed in claim 7, is characterized in that, use STEP7 software to the method for humid control is:
Carry out establishment project and hardware configuration: first, enter STEP7 software interface, then menu is clicked, create new projects, entry name on the left of right button on menu, clicks and inserts S7-300 website, double-clicks the S7-300 website opening insertion afterwards, double-click the hardware of right side window, carry out hardware configuration at the hardware window ejected;
Configuration:
Find frame at right frame, double-click after setting frame, then click slot 2, in right frame, find the CPU of corresponding model, double-click can insert slot 2.Then double-click CPU, in the window ejected, arrange corresponding subnet MPI, Analog input mModule should be inserted in No. 4 slots, operates identical with insertion CPU;
After whole hardware is inserted corresponding slot, namely the shortcut clicking " preserve and compile " of top menu bar completes hardware configuration, gets back to the main interface of STEP7 and carries out next step programming;
There is OB1 tissue block in the main interface after hardware configuration is good, other tissue blocks required for adding in blank space and logical block, click the insertion of top menu bar, in the drop-down menu ejected, click S7 module, selects required module of adding;
Each several part controls the required programmed method used: hand automatically switches, the start and stop of manually dehumidifying, manual humidification start and stop, manually run output, by the folding of auxiliary reclay simulation normally-open normally-close contact, to reach the object of control and self-locking, when humidity is lower than 20%RH with higher than 40%RH alarm, output winding puts 1, hummer is blown a whistle, and interrupts master routine, stop the pulse of the outside solid-state relay of all feedings, i.e. dehumidifier, ultrasonic humidifier dehumidifying or humidification;
Use PID adjustment module to carry out closed loop adjustment to humidity, it is FB58 " TCONT_CP ", for controlling continuous print or having the humidity processing procedure of pulse signal; Call this module meeting generation background data block DB58, double-click the DB58 background data block clicking main interface, click and check parameter, the interface observation data ejected;
The method of FB58 module installation parameter is as follows:
(1) PV_IN is the setting value of controlled variable;
(2) SP_INT is the actual value of controlled variable, needs to input humidity measurements;
(3) QPULSE is for exporting pulse, is connected with outside solid-state relay;
Built-in variable method to set up is:
(1) the module GAIN called that dehumidifies is set to negative, and GAIN is set to-4.0, is just in humidification part GAIN value, and GAIN initial value is 2;
(2) PULSE_ON is that pulse producer is opened, when this value changes TURE into by FALSE, and sensitizing pulse generator;
(3) TI integral action reset time, initial value is 4.0S;
(4) TD differential action reset time, initial value is 1.0S;
(5) TUN_ON self-regulation is opened, and changes initial value FALSE into TURE here;
(6) TUN_ST starts self-regulation, changes initial value FALSE into TURE here.
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| CN201510778949.9A CN105388187B (en) | 2015-11-13 | 2015-11-13 | The test method of the semiconductor gas sensor of controlled humidity |
| CN201710890243.0A CN107677709B (en) | 2015-11-13 | 2015-11-13 | Method for testing semiconductor gas sensitive element with gas sensitive material preparation step |
| CN201710890870.4A CN107807154A (en) | 2015-11-13 | 2015-11-13 | The method of testing of the semiconductor gas sensor of controlled humidity with gas sensor making step |
| CN201710890876.1A CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
| CN201710890877.6A CN107817270A (en) | 2015-11-13 | 2015-11-13 | The method of testing of gas sensor preparation method and semiconductor gas sensor |
| CN201710890245.XA CN107807152A (en) | 2015-11-13 | 2015-11-13 | SnO2The method of testing of gas sensitive preparation method and semiconductor gas sensor |
| CN201710890627.2A CN107807153A (en) | 2015-11-13 | 2015-11-13 | Humidity control method in the semiconductor gas sensor test of controlled humidity |
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| CN201710890876.1A Division CN107677710A (en) | 2015-11-13 | 2015-11-13 | The test system of the semiconductor gas sensor of controlled humidity |
| CN201710890243.0A Division CN107677709B (en) | 2015-11-13 | 2015-11-13 | Method for testing semiconductor gas sensitive element with gas sensitive material preparation step |
| CN201710890877.6A Division CN107817270A (en) | 2015-11-13 | 2015-11-13 | The method of testing of gas sensor preparation method and semiconductor gas sensor |
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| CN105954323A (en) * | 2016-06-02 | 2016-09-21 | 中国石油大学(华东) | Intelligent ultralow-concentration monitoring device for gaseous pollutants discharged by thermal power plant |
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| CN110220945A (en) * | 2019-04-23 | 2019-09-10 | 金卡智能集团股份有限公司 | The gamut temperature-compensation method of semiconductor gas sensor |
| CN110220945B (en) * | 2019-04-23 | 2021-12-07 | 金卡智能集团股份有限公司 | Full-range temperature compensation method of semiconductor gas sensor |
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| CN113138210B (en) * | 2021-06-22 | 2021-09-24 | 电子科技大学 | Self-adaptive local Gaussian temperature and humidity compensation method for intelligent gas sensor |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN107677709B (en) | 2020-07-21 |
| CN107817270A (en) | 2018-03-20 |
| CN107677709A (en) | 2018-02-09 |
| CN105388187B (en) | 2018-09-14 |
| CN107807153A (en) | 2018-03-16 |
| CN107807154A (en) | 2018-03-16 |
| CN107807152A (en) | 2018-03-16 |
| CN107677710A (en) | 2018-02-09 |
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