CN105376919B - A kind of induced with laser droplet target electric discharge produces the device of plasma - Google Patents
A kind of induced with laser droplet target electric discharge produces the device of plasma Download PDFInfo
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- CN105376919B CN105376919B CN201510751138.XA CN201510751138A CN105376919B CN 105376919 B CN105376919 B CN 105376919B CN 201510751138 A CN201510751138 A CN 201510751138A CN 105376919 B CN105376919 B CN 105376919B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
Abstract
The present invention proposes that a kind of induced with laser drop tin target electric discharge produces the device of plasma extreme ultraviolet light source, including Chu Xichi, rotating circular disk, tin liquor, temperature controller, obstruction screen, rotation disc screen, electrode pair and laser etc..The device is by the way that rotating circular disk part is immersed in liquid tin, it make use of high speed circumference centrifugal action to produce the liquid tin escaped, stop stop and the gate action of screen and rotation disc screen, produce periodic borne tin droplets, by electrode pair, extreme ultraviolet is produced in the presence of laser.The present apparatus by allow laser action borne tin droplets rather than act on the liquid tin film on electrode, solve the problem of working frequency is not high, electrode life is short in traditional rotating electric-discharging disk electrode liquid tin target feeding mechanism, simplify the design accuracy of device, the supplement of target is facilitated, life-span and stability that device continuously works is improved.
Description
Technical field
The invention belongs to EUV light source (EUV source) field, more particularly, to a kind of extreme ultra violet lithography light
Induced with laser drop tin target discharge plasma generation device in source.The present invention realizes liquid using the centrifugal action of rotating circular disk
Tin target is without interruption under high repetition frequency, and the service life of the method raising electrode using rotation electrode.
Background technology
The EUV light source for the 13.5nm wave bands of photoetching has electronic synchronizer radiating light source (ECR), laser etc. at this stage
Ion light source (LPP) and discharge plasma light source (DPP).Wherein DPP uses xenon (Xe) gas to high-temperature high-density not long ago
The method of electric discharge, later research finds that the EUV conversion efficiencies of tin (Sn) are higher than Xe, but tin is solid, institute under normal temperature state
To be discharged again after producing Sn steams using laser bombardment solid Sn targets surface, i.e., earliest induced with laser tin target discharge plasma
(LDP)。
There are many drawbacks in the LDP of early stage, such as solid tin target conversion efficiency is low and can not without interruption, laser long-time work
The EUV being collected into causing solid tin target areal deformation to make it possible on one point declines, sparking electrode is as prolonged height is pressed
Electricity and damage etc..In order to overcome these shortcomings, " patent WO2005/025280 " proposes that rotating disk electrode (r.d.e) supplies liquid first
Rotated against in the working method of tin, two integrated disc portions immersion Molten Tins, and it is close at certain point, utilize disk circumference
The frictional force of side, the viscosity of liquid tin and surface tension infiltrate the LIQUID Sn film of layer in the above, and laser action exists
The upper generation Sn steams of the side tin film at two closest places of disk, disk makes Sn steams further as sparking electrode simultaneously
Ionize the plasma that constriction produces high-temperature high-density.The method of this rotary discharge electrode (RDE) improves the renewal of target
Speed and the application point holding change discharged, so as to improve the life-span of discharge frequency and electrode.
But with the raising of disc rotary speed, tin film can not maintain rotation electrode table again under the action of the centrifugal force
Face, limits the frequency of electric discharge, and the tin liquor of effusion can pollute the generation of region of discharge influence plasma and extreme ultraviolet, and laser is made
Can have an impact with electrode to the working life of electrode edge, and the collection angle of extreme ultraviolet is not easy to greatly very much collect.
In order to change these problems, Xtreme Technologies Gmbh companies and Koninkijke Philips N.V mechanisms change
The material and shape on disk electrode surface increase Sn wellability, introduce tin film thickness control device, supply tin using crawler type
Structure etc., but these are all not enough to inherently to change rotating circular disk for unstability of the tin under high speed conditions and swash
Influence of the light to electrode working life.In addition, tin film is relatively low compared to the conversion efficiency of borne tin droplets extreme ultraviolet.The present invention exactly base
A different solution is proposed in these problems.
The content of the invention
The problem of existing for prior art, the present invention proposes that a kind of induced with laser drop tin target electric discharge produces plasma
Device, solves rotating circular disk rotating speed in traditional rotating electric-discharging disk electrode liquid tin target feeding mechanism and is restricted the electric discharge brought
The limitation of frequency, effusion tin liquor have pollution, laser action to have an impact electrode working life on electrode etc. to ask to region of discharge
Topic.Concrete technical scheme of the present invention is as follows：
A kind of induced with laser droplet target electric discharge produces the device of plasma, it is characterised in that including storage tin pond 1, rotation
Disk 2, temperature controller 4, obstruction screen 5, rotation disc screen 7, first electrode 9, second electrode 10, insulation round bar 11, electric discharge are electric
Hold 12, motor 13, laser 15 and condenser lens 16；
Tin liquor 3 is filled in the storage tin pond 1, and controls tin liquor to be in liquid by temperature controller 4；
The rotating circular disk 2 is arranged in one end of the horizontal direction of storage tin pond 1, part immersion tin liquor 3；Rotating circular disk 2
Pointed under the liquid level of storage tin pond 1 and stop 5 directions of screen in direction of rotation；The circular shaft of rotating circular disk 2 is centrally through insulation round bar 11 and electricity
The rotating shaft of machine 13 is fixedly connected；
Described to stop the other end that screen 5 is arranged on the horizontal direction of storage tin pond 1, its surface is provided with the first circular hole 6, stops screen 5
Effect is tin drop is flowed back to Xi Chizhong again, and only the borne tin droplets of a tangential direction can pass through the first circular hole 6 wherein；Rotation
Disc screen 7 is arranged on the outside of storage tin pond 1, itself and the concentric of rotating circular disk 2, and its surface is provided with the second circular hole 8；The rotation disc
Screen 7 is under the drive of motor 13, with rotating circular disk constant angular velocity synchronous rotary so that the tin drop of the first circular hole 6 effusion is periodically
Ground is escaped by the second circular hole 8, forms tin liquor drip；
The first electrode 9 and second electrode 10 be bamboo hat-shaped, the electrode tip of the bamboo hat-shaped of two electrodes outwardly, with revolve
Turn the specular of disk 2 to fix, be close to be fixed on the outside of rotation disc screen 7；The top inner side of first electrode 9 and second electrode 10
It is fixedly connected with the two ends of insulation round bar 11 respectively；It is fixedly connected on the outside of the top of second electrode 10 with the rotating shaft of motor 13；First
There is a gap between electrode 9 and the edge of second electrode 10, constitute region of discharge；The two poles of the earth of the discharge capacity 12 are respectively with first
Electrode 9 is connected with second electrode 10, and discharge voltage is provided for electrode；
During work, the laser beam that the laser 15 is produced is gathered in electrode discharge area, is used for by condenser lens 16
Bombardment rotation disc screen 7 flies the borne tin droplets of effusion.
Further, in the device for producing plasma, the screen 5 that stops is vertical with the place plane of rotating circular disk 2,
Do not contacted with rotating circular disk 2；It is described stop screen 5 surfaces on the place plane of rotating circular disk 2 just to position on offer first
Circular hole 6；Several second circular holes of size identical 8 equidistantly distributed are offered on the surface axis of rotation disc screen 7,
The plane and the disk of rotating circular disk 2 of the center of circle composition of all second circular holes 8 are essentially coincided, and stop the first circular hole on screen 5
The center of circle be located at the second circular hole 8 the center of circle constitute plane on.
Further, it is described produce plasma device in, the rotating circular disk 2 include stainless steel, aluminium alloy or its
It does not invade tin profit material and constituted, and the thickness of the marginal portion of the contact of tin liquor 3 is uniform, and thickness is 1mm to 5mm and thickness is equal
It is even.
Further, in the device for producing plasma, the laser 15 is arranged on the outside of rotation disc screen 7,
The plane same plane of its laser beam produced and the center of circle of the second circular hole 8 composition, it is vertical with storage 1 baseplane of tin pond；Laser beam leads to
Over-focusing lens 16, region of discharge is constituted through first electrode 9 and second electrode 10, and its beam focus is being located at the region of discharge just
In, fly the borne tin droplets of effusion for bombarding rotation disc screen 7.
Further, in the device for producing plasma, the first electrode 9 and second electrode 10 are by resistivity
The big heat proof material of small, thermal conductivity is constituted.Electric discharge produces substantial amounts of heat by insulating round bar 11 and rotating circular disk 2 is passed to storage tin
In pond 2, heat load is reduced.
Further, in the device for producing plasma, the tin liquor 3 in the storage tin pond 1 is simple substance tin liquor or tin
Aluminium alloy, tin liquor temperature can keep constant by temperature controller 3.
Further, in the device for producing plasma, it is described stop screen 5 and rotation disc screen 7 by ceramics or
Glass is made；The described electric insulation of insulation round bar 11, with good thermal conductivity.
Further, in the device for producing plasma, a diameter of 5mm to 7mm of first circular hole 6, second
A diameter of 1mm to 2mm of circular hole 8.
Further, in the device for producing plasma, by changing the rotating speed of motor 6, so as to change generation tin
The size of drop.
Further, in the device for producing plasma, whole device is in vacuum chamber 17, prevents liquid tin oxygen
Change.
In this programme, throw away on the moving line for the borne tin droplets come provided with screen 5 is stopped, stopped on screen 5 in centrifugal action
It is provided with the first circular hole 6 so that the borne tin droplets of specific direction effusion are chosen；Rotate the second 8 groups of circle of disc screen 7 so that pass through
Borne tin droplets there is certain cycle；By the effect of 8 groups of the first circular hole 6 and the second circular hole, the directions of borne tin droplets, size and
Repetition period is determined, reduces the beat of drop, improves the spatial stability of drop；By stopping screen 5 and rotational circle
Face screen 7, reduces pollution of the tin to region of discharge of unnecessary effusion.
In this programme, after drop tin target is obtained, Laser Focusing droplet surface makes its expansion, gasification realize initial ionization；
By the effect of electrode, the plasma of initial ionization spreads between electrode, when plasma diffusion is to electrode surface, electrode
Puncture and produce larger discharge current so that drop tin target is further ionized.Two electrodes and rotating circular disk 2 be coaxial and the phase that insulate
Even, the rotation disc screen 7 of insulation is connected with two electrodes, so first electrode 9, second electrode 10, rotating circular disk 2, rotational circle
Face screen 7 in the same direction, same speed rotation, the point of each disruptive discharge is different, reduces loss of the electric discharge to electrode.
Brief description of the drawings
Fig. 1 is rotating circular disk dropproducing devices side view；
Fig. 2 is induced with laser drop tin target plasma discharging body device top view；
Fig. 3 is induced with laser drop tin target plasma discharging body device rearview；
Fig. 4 is the left view and elevation cross-sectional view of second electrode.
In all of the figs, identical reference is used for representing identical element or structure, wherein：1- stores up Xi Chi, 2-
Rotating circular disk, 3- tin liquors, 4- temperature controllers, 5- stops screen, the circular holes of 6- first, 7- rotation disc screens, the circular holes of 8- second, 9- the
One electrode, 10- second electrodes, 11- insulation round bars, 12- discharge capacities, 13- motors, 14- machine shafts, 15- lasers, 16-
Condenser lens, 17- vacuum chambers, 18- electrode edges, 19- electrode tips.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Not constituting conflict each other can just be mutually combined.
In the present embodiment, as shown in figure 1, filling tin liquor 3 in storage tin pond 1, and tin liquor 3 is ensured by temperature controller 4
Temperature is 300 DEG C or so, and whole device is in vacuum environment, prevents liquid tin from aoxidizing；
The diameter that poor to tin wellability and resistant to elevated temperatures material such as stainless steel or aluminium alloy make can be that 50mm is arrived
1mm to 2mm in 200mm rotating circular disk 2, part immersion tin liquor 3, edge and the thickness of the contact portion of tin liquor 3 are uniform, and thickness can
Think 1mm to 5mm.The stainless steel of rotating circular disk 2 is constituted in the present embodiment, radius 100mm, edge thickness 1mm, immersion tin liquor 1mm.
As shown in Figures 2 and 3, rotate it by machine shaft 14 using motor 13, the tin liquor 3 in storage tin pond 1 is being rubbed
Wipe and the circumferential surface of rotating circular disk 2 be attached in the presence of power and tension force, the control of the rotating speed of rotating circular disk 2 10 revolutions per seconds to 20 turns/
Second.In the present embodiment, the rotating speed of rotating circular disk 2 is 10 revolutions per seconds.Under the centrifugal action of high speed rotation, the liquid of most of attachment
The direction that state tin can rotate with rotating circular disk 2 is escaped in the same direction, along the tangent line of rotating circular disk 2；
As depicted in figs. 1 and 2, with a certain distance from from rotating circular disk 2 fixed in storage tin pond 1 with the plane perpendicular of storage tin pond 1
One poor to tin wellability, middle obstruction screen 5 for being provided with the first circular hole 6, the screen width can with 5mm to 10mm, thickness
With 1mm to 2mm, highly can be with 250mm to 300mm, can be by insulation, high temperature resistant and to tin wellability poor ceramics or glass
Glass is constituted so that all tin liquors escaped from rotating circular disk 2 are all blocked screen 5 and blocked, and is flowed back to again in storage tin pond 1.Only edge
The tin liquor of a certain tangential direction can pass through the first circular hole 6, a diameter of 5mm to the 7mm of the first circular hole 6, i.e., after the first circular hole 6
Produce the tin stream flown in a certain direction with certain speed.In the present embodiment, screen 5 width 5mm, thickness 1mm, height are stopped
250mm, is made up of ceramics, the diameter 5mm of the first circular hole 6；
As depicted in figs. 1 and 2, a rotation disc screen 7 is set on the path that borne tin droplets pass through, rotation disc screen 7 with
Rotating circular disk 2 is coaxial, and the radius of rotation disc screen 7 can be 200mm to 300mm, and thickness can be 1mm to 2mm, and width can be
5mm to 10mm, can be constituted by insulation, high temperature resistant and to the poor ceramics of tin wellability or glass, and first electrode 9,
Second electrode 10 is connected, so that the rotary speed as having with first electrode 9, second electrode 10.As shown in figure 3, rotation disc
Shield the second circular hole 8 that 7 surfaces have formed objects every identical distance, the diameter of the first circular hole 6 can be 1mm to 2mm, own
The plane of second circular hole 8 composition is overlapped with the card of rotating circular disk 2, and rotation disc screen 7, which rotates, causes tin fluid periodically to lead to
Rotation disc screen 7 is crossed, i.e., forms periodic borne tin droplets after 8 groups of the second circular hole by rotation.In the present embodiment, disc is rotated
Shield 7 width 5mm, thickness 1mm, radius 250mm, be made up of ceramics, the second 8 groups of circular hole diameter 1mm；；
As shown in figure 4, first electrode 9 and second electrode 10 are bamboo hat-shaped, electrode can be by conductive and resistant to elevated temperatures copper, nickel
Or the copper of covering molybdenum is constituted, its radius can be more than radius 20mm to the 30mm of rotation disc screen 7.In the present embodiment, first
Electrode 9 and the radius 270mm of second electrode 10, are made up of copper；
As shown in Figures 2 and 3, the electrode tip 19 of first electrode 9 and second electrode 10 is towards on the contrary, the He of first electrode 9
Second electrode 10 is with the specular of rotating circular disk 2；First electrode 9 and second electrode 10 are close to be fixed on the outside of rotation disc screen 7,
The electrode tip 19 of first electrode 9 be fixedly connected insulation round bar 10, insulation round bar 10 be secured across rotating circular disk 2 the center of circle, with
Second electrode 10 is fixedly connected, and is then fixed with machine shaft 14.As shown in Fig. 2 two electrodes are in outside storage tin pond 1, the
There is a gap between one electrode 9, the electrode edge 18 of second electrode 10, constitute discharge range；
As shown in Figures 2 and 3, the laser 15 is arranged on the outside of rotation disc screen 7, and laser beam and rotating circular disk 2 are same
One plane, it is vertical with storage 2 baseplanes of tin pond, by condenser lens 16, electric discharge is constituted through first electrode 9 and second electrode 10
Area, its beam focus are hit exactly positioned at the region of discharge, for bombarding the borne tin droplets from 7 groups of winged effusions of small sircle hole；
As shown in Figures 2 and 3, high voltage is added by discharge capacity 11 between first electrode 9, second electrode 10, works as electricity
It is insulation between clearance between poles during vacuum, between electrode；When tin steam is by two electrode edges 18 after connecting, electrode edge 18
This point occur punch-through and have high intensity breakdown current produce.Breakdown current brings Z constriction phenomenons so that preliminary electricity
From plasma further compress ionization, the plasma of high-temperature high-density is produced, so as to reach the Production conditions of extreme ultraviolet.
After constriction terminates, the plasma of generation dissipates, and recovers insulation between electrode.Because first electrode 9, second electrode 10 rotate,
The point of each disruptive discharge is different, reduces loss of the electric discharge to electrode.Electric discharge produces substantial amounts of heat and passes through the He of round bar 11 of insulating
Rotating circular disk 2 is passed in the storage tin pond 2 of temperature controller 3, reduces heat load.
Described above is presently preferred embodiments of the present invention, but the present invention is not limited to embodiment and interior disclosed in accompanying drawing
Hold.It is every not depart from the lower equivalent or modification completed of spirit disclosed in this invention, both fall within the scope of protection of the invention.
Claims (10)
1. a kind of induced with laser droplet target electric discharge produces the device of plasma, it is characterised in that including Chu Xichi (1), rotation
Disk (2), temperature controller (4), obstruction screen (5), rotation disc screen (7), first electrode (9), second electrode (10), insulation circle
Bar (11), discharge capacity (12), motor (13), laser (15) and condenser lens (16)；
Tin liquor (3) is filled in the storage Xi Chi (1), and controls tin liquor to be in liquid by temperature controller (4)；
The rotating circular disk (2) is arranged in one end of Chu Xichi (1) horizontal direction, part immersion tin liquor (3)；Rotating circular disk
(2) obstruction screen (5) direction is pointed under Chu Xichi (1) liquid level in direction of rotation；Rotating circular disk (2) circular shaft is centrally through insulation
The rotating shaft of round bar (11) and motor (13) is fixedly connected；
Described to stop the other end that screen (5) is arranged on Chu Xichi (1) horizontal direction, its surface is provided with the first circular hole (6), stops screen
(5) effect is tin drop is flowed back to Xi Chizhong again, and only the borne tin droplets of a tangential direction can pass through the first circular hole wherein
(6)；Rotate disc screen (7) to be arranged on the outside of Chu Xichi (1), itself and rotating circular disk (2) concentric, its surface are provided with the second circular hole
(8)；The rotation disc screen (7) is under the drive of motor (13), with rotating circular disk constant angular velocity synchronous rotary so that the first circle
The tin drop of hole (6) effusion is escaped periodically by the second circular hole (8), forms tin liquor drip；Described rotation disc screen (7) surface
Several circular holes of size identical second (8) equidistantly distributed, the center of circle group of all second circular holes (8) are offered on axis
Into plane and the disk of rotating circular disk (2) essentially coincide, stop screen (5) on the first circular hole the center of circle be located at the second circular hole
(8) in the plane of center of circle composition；
The first electrode (9) and second electrode (10) are bamboo hat-shaped, the electrode tip of the bamboo hat-shaped of two electrodes outwardly, to revolve
Turn disk (2) specular to fix, be close to be fixed on the outside of rotation disc screen (7)；First electrode (9) and second electrode (10)
Top inner side is fixedly connected with the two ends of insulation round bar (11) respectively；With the rotating shaft of motor (13) on the outside of second electrode (10) top
It is fixedly connected；There is a gap between first electrode (9) and second electrode (10) edge, constitute region of discharge；The discharge capacity
(12) the two poles of the earth are connected with first electrode (9) and second electrode (10) respectively, and discharge voltage is provided for electrode；
During work, the laser beam that the laser (15) produces is gathered in electrode discharge area, is used for by condenser lens (16)
Bombardment rotation disc screen (7) flies the borne tin droplets of effusion.
2. device according to claim 1, it is characterised in that the obstruction screen (5) is hung down with plane where rotating circular disk (2)
Directly, do not contacted with rotating circular disk (2)；It is described stop screen (5) surface on rotating circular disk (2) where plane just to position on open
Provided with the first circular hole (6).
3. device according to claim 1 or 2, it is characterised in that rotating circular disk (2) include stainless steel, aluminium alloy or its
It does not invade tin profit material and constituted, and the thickness of the marginal portion of tin liquor (3) contact is uniform, and thickness is 1mm to 5mm and thickness is equal
It is even.
4. device according to claim 1 or 2, it is characterised in that the laser (15) is arranged on rotation disc screen (7)
The plane same plane of outside, its laser beam produced and the second circular hole (8) center of circle composition, it is vertical with Chu Xichi (1) baseplane；
Laser beam constitutes region of discharge, its beam focus is located at by condenser lens (16) through first electrode (9) and second electrode (10)
The region of discharge center, flies the borne tin droplets of effusion for bombarding rotation disc screen (7).
5. device according to claim 1 or 2, it is characterised in that the first electrode (9) and second electrode (10) are by electricity
The heat proof material that resistance rate is small, thermal conductivity is big is constituted.
6. device according to claim 1 or 2, it is characterised in that tin liquor (3) in Chu Xichi (1) for simple substance tin liquor or
Tin alloy liquid, tin liquor temperature can keep constant by temperature controller (3).
7. device according to claim 1 or 2, it is characterised in that the obstruction screen (5) and rotation disc screen (7) are by making pottery
Porcelain or glass are made；Described insulation round bar (11) electric insulation, with good thermal conductivity.
8. device according to claim 1 or 2, it is characterised in that a diameter of 5mm to 7mm of the first circular hole, the second circular hole
A diameter of 1mm to 2mm.
9. device according to claim 1 or 2, it is characterised in that by changing the rotating speed of motor (6), so as to change production
The size of raw tin drop.
10. device according to claim 1 or 2, it is characterised in that whole device is in vacuum chamber (17), prevents liquid
State tin is aoxidized.
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| CN201510751138.XA CN105376919B (en) | 2015-11-06 | 2015-11-06 | A kind of induced with laser droplet target electric discharge produces the device of plasma |
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| CN201510751138.XA CN105376919B (en) | 2015-11-06 | 2015-11-06 | A kind of induced with laser droplet target electric discharge produces the device of plasma |
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| CN105739249A (en) * | 2016-04-28 | 2016-07-06 | 哈尔滨工业大学 | Electron temperature measuring method for pre-ionized plasma formed by laser-assisted discharge extreme ultraviolet light source |
| CN106211531A (en) * | 2016-07-06 | 2016-12-07 | 哈尔滨工业大学 | Laser assisted stannum medium LDP drags the discharging vacuum chamber of electrode by magnetic force |
| CN106370645A (en) * | 2016-08-17 | 2017-02-01 | 华中科技大学 | Plasma apparatus for laser-induced discharge of liquid tin target |
| CN112684676B (en) * | 2020-12-30 | 2022-04-26 | 广东省智能机器人研究院 | Extreme ultraviolet light generating method and device |
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| US6122050A (en) * | 1998-02-26 | 2000-09-19 | Cornell Research Foundation, Inc. | Optical interface for a radially viewed inductively coupled argon plasma-Optical emission spectrometer |
| DE10342239B4 (en) * | 2003-09-11 | 2018-06-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and apparatus for generating extreme ultraviolet or soft x-ray radiation |
| EP2020165B1 (en) * | 2006-05-16 | 2010-11-24 | Philips Intellectual Property & Standards GmbH | A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus |
| NL1036272A1 (en) * | 2007-12-19 | 2009-06-22 | Asml Netherlands Bv | Radiation source, lithographic apparatus and device manufacturing method. |
| CN103105740B (en) * | 2013-01-16 | 2015-03-18 | 华中科技大学 | Solid-liquid combined target-based extreme ultraviolet source generator and light source system |
| CN103235487B (en) * | 2013-03-28 | 2015-10-28 | 华中科技大学 | A kind of droplet target production method of laser plasma extreme ultraviolet light source and device thereof |
| CN103281855B (en) * | 2013-05-16 | 2015-10-14 | 中国科学院光电研究院 | A kind of liquid metal target generation device for LASER Light Source |
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