CN105374926B - A kind of flexible multi-functional sensor and preparation method and application - Google Patents
A kind of flexible multi-functional sensor and preparation method and application Download PDFInfo
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Abstract
The invention discloses a kind of flexible multi-functional sensor and preparation method and application.The flexible multi-functional sensor, including electrode layer and flexible composite layer；Wherein, the electrode layer is two layers, positioned at the both sides of the flexible composite layer and covers the flexible composite layer respectively.The present invention utilizes the physical property of thermoelectric material, thermo-electric generation can be achieved, and realize TEMP；Meanwhile the composite of flexible network structure can realize that resistive pressure senses；Based on voltage and current signal, the real-time monitoring to pressure and temperature can be realized simultaneously.When thermoelectric material compound system is acted on by thermal field, pressure field simultaneously, voltage and current signal can be produced simultaneously, if caused voltage is sufficiently large, you can as self-powered Multifunction Sensor.By patterning integrated matrix, voltage storage and the two-way choice of multifunctional sensing can be achieved.
Description
Technical field
The invention belongs to sensor field, is related to a kind of Multifunction Sensor, more particularly to a kind of flexible multi-functional sensing
Device and preparation method and application.
Background technology
Sensor is the device that outer signals can be converted into usable output signal, industrial production, environmental monitoring and
The every field such as daily life all have important application.In recent years, with the development of organic electronic device, flexible sensor is
Through showing huge application value in fields such as artificial skin, health monitorings, turn into taking in the lump for current popular research field
Obtained fast development ((1) Hammock, M.L.；Chortos,A.；Tee,B.C.；Tok,J.B.；Bao,
Z.Adv.Mater.2013,25,5997-6038.(2)Gong,S.；Schwalb,W.；Wang,Y.；Chen,Y.；Tang,Y.；
Si,J.；Shirinzadeh,B.；Cheng,W.Nat.Commun.2014,DOI:10.1038/ncomms4132.).
Pressure sensor is one of most physical parameter sensor reported recently, can be ground by strain parameter change
Study carefully pressure or tensile deformation response, be widely used in electronic skin and motion monitoring equipment research.Meanwhile high-precision temperature
Degree sensor can realize the accurate measurement of temperature, very important effect be played in terms of industrial or agricultural safe production, and passing
Occupy larger ratio in sensor market.And the sensor towards artificial intelligence, wearable device generally requires to realize to temperature
With being detected while pressure.Relative to single signal sensor, the report of Multifunction Sensor is also relatively fewer.Report at present
Multi signal sensing equipment needs to integrate polytype sensor, requires high to integration, is unfavorable for large area production.In addition,
The senser element power consumption reported is big, turns into and restricts the bottleneck problem that sensor moves towards practical application.Therefore, exploitation structure is new
The Multifunction Sensor of low-power consumption is the exclusive requirement of development.
Thermoelectric material can be achieved on the functional material that heat energy and electric energy are directly mutually changed, in thermal generator and spirit
Quick warm-natured degree sensor field obtains extensive concern ((1) Kim, S.J.；We,J.H.；Cho,B.J.Energy
Environ.Sci.2014,7,1959-1965.(2)Sun,Y.M.；Sheng,P.；Di,C.A.；Jiao,F.；Xu,W.；Qiu,
D.；Zhu,D.B.Adv.Mater.2012,24,932-937.).But the pressure sensor based on thermoelectric material is not reported also
Road.Therefore thermoelectric material is combined, prepares self-powered Multifunction Sensor, can meet that multi signal monitoring is prepared with low energy-consumption electronic device
Demand, promote the development of artificial skin, health monitoring equipment and intelligent wearable electronic product.
The content of the invention
It is an object of the invention to provide a kind of flexible multi-functional sensor and preparation method and application.
Flexible multi-functional sensor provided by the invention, including electrode layer and flexible composite layer；
Wherein, the electrode layer is two layers, positioned at the both sides of the flexible composite layer and covers the flexibility respectively
Composite layer.
Above-mentioned flexible multi-functional sensor only can be also made up of the electrode layer and flexible composite layer.
The structural representation of the sensor is as shown in Figure 1.
Wherein, the material for forming the electrode layer is selected from metal, alloy, metal oxide, heavily-doped semiconductor and conduction
Any one in polymer；
Wherein, the metal is gold, silver, aluminium, titanium, copper, tin or aluminium；
The alloy material is magnesium silver alloy, platinum alloy or nickel zinc alloy；
The metal oxide is tin indium oxide, manganese dioxide or brown lead oxide；
The heavily-doped semiconductor is the silicon of phosphorus doping, the silicon of boron doped silicon or arsenic doping；Wherein, the phosphorus, boron or
The doping mass percentage concentration of arsenic is 0.1%-3%；
The conducting polymer is polyaniline, polypyrrole or polythiophene；Wherein, the number-average molecular weight of the polyaniline is
450-106, specially 20000；The number-average molecular weight of the polypyrrole is 300-106, specially 20000；Point of the polythiophene
Minor [C4SR1R2]n, wherein R1And R2It is C, O, N or H, the number-average molecular weight of the polythiophene is 400-106, it is specially
20000；
The material for forming the flexible composite layer is to be combined by flexible material and thermoelectric material；
Wherein, the flexible material is selected from rubber, sponge, fiber, silk, textile, foam, dimethyl silicone polymer
And at least one of engineering plastics (PDMS)；Wherein, the number-average molecular weight of the dimethyl silicone polymer is 800-106, tool
Body is 20000-60000；The engineering plastics are specially polyamide or makrolon；The number-average molecular weight of the polyamide is
600-106, specially 651；The number-average molecular weight of makrolon is 1000-106, specially 104；
The thermoelectric material is selected from the thermoelectricity of doping or undoped inorganic material, organic material and inorganic-organic hybridization
Any one in material；
Wherein, the doping or undoped inorganic material are selected from II-VI group-semi-conducting material, alloy material, oxide
With any one in nanocrystal；Wherein, the alloy is selected from bismuth telluride and its alloy, lead telluride and its alloy, SiGe and closed
Gold；The oxide is selected from least one of Na-Co-O series, Ga-Co-O series and ZnO Series oxides；The nanometer
Crystal is selected from Si/SiGe superlattice nano lines, InAs/InP superlattice nano lines, Bi2Te3/ Sb nanometers linear array and Bi2Te3Nanometer
At least one of linear array；
Any one of the organic material in conducting polymer, graphene and CNT；Wherein, the conduction
Polymer is selected from polypyrrole, polyaniline, kayexalate (PSS), Polyglycolic acid fibre (PEDOT), PBTTT, P3HT
At least one of with PDPP3T；The molecular weight of the Polyglycolic acid fibre is 800-106, specially 50000；Structural formula is such as
Shown in Fig. 2；
The organic material is 1 preferably by mass ratio：Material PEDOT-PSS, the doping Fe of 2.5 PEDOT and PSS composition
(TFSI)3PDPP3T, doping Fe (TFSI)3P3HT or doping NOPF6PBTTT；
In actual applications, to improve the electric conductivity of material, the PEDOT-PSS can be configured in advance to adulterate 5% volume
The PEDOT-PSS solution of fraction ethylene glycol；
The element of doping is selected from least one of K, Na, transition elements, halogen and II-VI group-semiconductor element；
The thermoelectric material of the inorganic-organic hybridization is selected from and uses conducting polymer as organic constituent element and adulterate inorganic constituent element
Composite, using CNT as skeleton through original flavor polymerize prepare polyaniline composite material and with conducting polymer coat nothing
Any one in the hybrid material that machine nano material is prepared；Wherein, the inorganic nano material is specially that DIC is received
Rice material；
Above-mentioned flexible composite layer can be prepared according to various conventional methods, such as can be by the following method in one to three
Any one be prepared：
First, flexible material is soaked with the solution of thermoelectric material or thermoelectric material, dries and obtain；
2nd, thermoelectric material is mixed with flexible material, curing molding；
3rd, the methods of being adulterated by high-temperature thermoplastic, high pressure, flexible base material is mixed into by thermoelectric material.
The thickness of the electrode layer is 30nm-1mm, specially 60nm；
The thickness of the flexible composite layer is 1mm-50cm, specially 5mm.
The method provided by the invention for preparing the flexible multi-functional sensor, comprises the following steps：
One layer of electrode layer is prepared respectively at the both ends of the flexible composite layer, is obtained the flexible multi-functional and is passed
Sensor.
In the above method, the method for preparing the electrode layer is various conventional methods, can be such as vaccum gas phase sedimentation method, beat
Print method, print process, magnetron sputtering method paste sheet metal method.
The present invention utilizes the physical property of thermoelectric material, thermo-electric generation can be achieved, and realize TEMP；Meanwhile have
The composite of elastic network structure can realize that resistive pressure senses；Based on voltage and current signal, can realize simultaneously pair
The real-time monitoring of pressure and temperature.When thermoelectric material compound system is acted on by thermal field, pressure field simultaneously, electricity can be produced simultaneously
Pressure and current signal, if caused voltage is sufficiently large, you can as self-powered Multifunction Sensor.It is integrated by patterning
Matrix, voltage storage and the two-way choice of multifunctional sensing can be achieved.
Thus, above-mentioned flexible multi-functional sensor provided by the invention is any in generating, detection temperature and detection pressure
A kind of application and the flexible multi-functional sensor in generator, temperature detector and pressure detector is prepared any one
Using and prepare application in Multifunction Sensor integrated circuit, protection scope of the present invention is belonged to, wherein, it is described more
The function of function sensor be selected from can store and can sense two-way choice at least one of.
The invention has the characteristics that and advantage：
1st, such Multifunction Sensor has universality, to inorganic thermoelectric material, Organic thermoelectric material and organic and inorganic
The species of hybrid material does not have particular requirement with type；Polytype flexibility, elastomeric material and wearable material all may be used simultaneously
Preparation for such sensor.
2nd, based on patterning processing and integrated technology, the multifunctional sensing matrix of array can be prepared, realizes multigroup heat
Electrical part power generation cascade and pressure, temperature detection.
3rd, based on above-mentioned versatility, the cheap material of screening cost, large area production flexibility/elastic element, for that can deposit
Storage, the multifunction device that can sense two-way choice integrate.
4th, the performance study based on above-mentioned device, achievable flexible thermal reply by cable zoarium tie up to electronic skin, motion tracking with
Application in wearable electronic.
Brief description of the drawings
Fig. 1 is the multi-functional pressure sensor construction schematic diagram of electrode-composite-electrode interlayer structure；
Fig. 2 is the material molecule structural formula of application of the embodiment of the present invention；
Fig. 3 is response curve of electric current of the device of the present invention in the case where repeatedly being rapped with pen with the time；
Fig. 4 be device of the present invention different pressures effect under electric current with the time response curve；
The Multifunction Sensor that Fig. 5 is the present invention detects voltage when finger is close to device Top electrode and bottom electrode with the time
Response curve；
Fig. 6 is variation relation curve of the device output voltage of the present invention with the temperature difference；
Fig. 7 is the change of device current-vs-time during continuous voltage device again when finger contacts device upper surface of the present invention
Curve；
Fig. 8 is the device of the present invention in original state, application pressure, application thermal field while applies thermal field and electricity during pressure
Stream-voltage curve；
The device that Fig. 9 a are the present invention is attached to the current signal figure for obtaining in the wrist of tester and monitoring in real time, and Fig. 9 b are text
Offer report pulse characteristics peak figure；
Figure 10 a are to sense battle array test pressure pictorial diagram, figure based on the integrated matrixing multi-functional pressure prepared of single group device
10b is transducing signal matrixing display figure；
Figure 11 be can be generated electricity based on the integrated matrixing prepared of single group device, can the pressure of multifunctional sensing two-way choice pass
Feel array structure schematic diagram.1 is the elastic composite system in relaxed state, and 2 be device electrode a, and 3 be electrode b, and 4 be electrode
C, 5 be the elastic composite system of compressive state.
Embodiment
With reference to specific embodiment, the present invention is further elaborated, but the present invention is not limited to following examples.Institute
It is conventional method unless otherwise instructed to state method.The raw material can obtain from open commercial sources unless otherwise instructed.
Embodiment 1 (preparations of individual devices)
1) from the sponge that thickness is 5mm, by the sponge for cutting out fixed dimension (3.5mm × 3.5mm × 5mm)；
2) prepare doping 5% volume fraction ethylene glycol PEDOT-PSS solution (PEDOT-PSS model PH1000,
PEDOT is 1 with PSS mass ratioes：2.5, PEDOT number-average molecular weight obtains adulterating thermoelectricity for 50000), sponge is soaked wherein
Sponge-PEDOT compound system the materials of material, as the flexible composite layer of sensor, thickness 5mm；
3) by thickness be 1.2mm sheet glass through secondary water, ethanol, acetone ultrasound, rinse, nitrogen drying after, in vacuum
Spend for 7 × 10-4Under conditions of Pa withSpeed gold evaporation on the glass sheet, thickness 60nm, obtain lower electrode layer；
4) sponge obtained by step 2) is fixed on the lower electrode layer obtained by step 3), on sponge upper strata according to step 3)
Method deposit thickness be 0.5mm upper electrode layer, obtain metal-sponge/PEDOT-PSS- metal flexibles provided by the invention
Multifunction Sensor.
The structure of the sensor is as shown in Figure 1.
The device is made up of electrode layer and flexible composite layer；
Wherein, two layers of electrode layer, positioned at the both sides of flexible composite layer and flexible composite layer is covered respectively.
The material for forming electrode layer is gold, and the thickness of lower electrode layer is 60nm, and the thickness of upper electrode layer is 0.5mm；
The material for forming flexible composite layer is to be combined by flexible material sponge and thermoelectric material PEDOT-PSS；
The thickness of the flexible composite layer is 5mm.
Utilize the device architecture of gained, it is possible to achieve the detection of pressure, temperature signal, and realized certainly using thermo-electric generation
Multifunctional sensing under power supply.
1) pressure is detected：
Sponge-PEDOT sensors obtained by the embodiment are placed in 0.2V operating at voltages, sponge is continuously gently tapped with pen
Body surface face, can produce continuous current changing signal, and electric current and the response curve of time are as shown in Figure 3.When sponge-PEDOT is multiple
When zoarium system surface applies pressure, device conducts change, continuous current changing signal is shown；Stop pressurization, electric current is rapid
Recover.
It can be seen that based on the sensor, it is possible to achieve to the effective detection of pressure.Apply the pressure of varying strength, test
Curent change, response curve are as shown in Figure 4.Based on above-mentioned device, it is possible to achieve inspection of the device in 9Pa-30kPa pressure limits
Survey.
2) detection temperature：
Sponge-PEDOT sensors obtained by the embodiment are placed under no-voltage, the system in the case of the presence of the temperature difference,
The change of voltage can be produced, finger is individually placed to device upper/lower electrode side, test signal versus time curve such as Fig. 5 institutes
Show.Voltage signal shows that when applying thermal field to device, device generates electricity, and can detect the change of voltage；When thermal field is in opposite direction
When, caused sense is opposite.Based on the device, change upper and lower surface temperature, test device output voltage rings with temperature difference
Answer curve as shown in Figure 6.
Or sponge-PEDOT sensors obtained by the embodiment are placed under certain voltage (10mV) and worked, by the hand of warm
The heart, ice cube or the electric iron of heating are suspended from above device respectively, can produce the change of current signal (or voltage signal).
Based on the above results, multifunctional sensing device provided by the invention can realize the detection to temperature, and electric signal is anti-
The temperature difference of upper and lower surface is answered, the detection range of temperature difference can be in 0.1K-200K.
3) pressure detecting under electricity condition is confessed：
By sponge-PEDOT sensors obtained by the embodiment when not applying extra voltage, finger is attached to device surface,
Existing small temperature difference between human body temperature and environment temperature is available for device to produce small voltage, device can be driven to transport in itself
OK, then gently device is tapped, current changing signal can be read, as shown in Figure 7.
The current-voltage signal curve of above-mentioned obtained device is tested, as shown in Figure 8.In the case where applying 4 kpa pressures, device
Electric conductivity increase；Under 9K thermal field, device can produce the potential of about 150 microvolts；Apply the 9K temperature difference and 4 kPas of pressures at the same time
During power, now apply pressure, device conducts increase to sponge, while 300 microvolt voltages can be produced.
It can be seen that based on above-mentioned Multifunction Sensor, it is possible to achieve pressure, TEMP under confession power mode.
4) pulse signal detects：
Sponge-PEDOT sensors obtained by the embodiment are placed under 2V voltages, device is attached at pulse, arteries and veins can be tested
Fight jitter, Fig. 9 a are detection human pulse signal.Current signal has obvious three peaks, with document report
(Schwartz,G.；Tee,B.C.；Mei,J.；Appleton,A.L.；Kim do,H.；Wang,H.；Bao,
Z.Nat.Commun.2013,10.1038/ncomms2832 pulse pressure shape facility peak (9b)) matches.
Embodiment 2
According to the method for embodiment 1, the PEDOT-PSS that ethylene glycol in step 2) adulterates only is replaced with into doping NOPF6's
PBTTT (molal weight 34000g/mol), first by sponge soaking concentration be 10mg/mL PBTTT solution, after drying
NOPF6Concentration be 0.01mol/L acetonitrile solution in soak 1~10 minute, after drying again acquisition doping level it is different
Sponge-PBTTT composites, obtain Multifunction Sensor provided by the invention.
The structure of the device is identical with the obtained device structure of embodiment 1, and difference is only the heat used in composite system
Electric material is replaced by doping NOPF6PBTTT.
Using the device pressure and temperature is detected and self-powered under multifunctional sensing test, acquired results with
Embodiment 1 repeats no more without substantive difference.
Embodiment 3
According to the method for embodiment 1, the PEDOT-PSS solution that ethylene glycol in step 2) adulterates only is replaced with into doping Fe
(TFSI)3P3HT (molal weight 18000g/mol), first by sponge soaking concentration be 10mg/mL P3HT solution, dry
After be immersed in Fe (TFSI)35~20 minutes in the acetonitrile solution that concentration is 0.1mol/L, doping level is obtained not after drying again
Same sponge-P3HT composites, obtain Multifunction Sensor provided by the invention.
The structure of the device is identical with the obtained device structure of embodiment 1, and difference is only the heat used in composite system
Electric material is replaced by doping Fe (TFSI)3P3HT.
Using the device pressure and temperature is detected and self-powered under multifunctional sensing test, acquired results with
Embodiment 1 repeats no more without substantive difference.
Embodiment 4
According to the method for embodiment 1, the PEDOT-PSS solution that ethylene glycol in step 2) adulterates only is replaced with into doping Fe
(TFSI)3PDPP3T (molal weight of material is 103000g/mol), first by sponge soaking concentration be 10mg/mL P3HT
Solution, Fe (TFSI) is immersed in after drying35~30 minutes in the acetonitrile solution that concentration is 0.1mol/L, obtained after drying again
Different sponge-P3HT the composites of doping level, obtain Multifunction Sensor provided by the invention.
The structure of the device is identical with the obtained device structure of embodiment 1, and difference is only the heat used in composite system
Electric material is replaced by doping Fe (TFSI)3PDPP3T.
Using the device pressure and temperature is detected and self-powered under multifunctional sensing test, acquired results with
Embodiment 1 repeats no more without substantive difference.
Embodiment 5
According to the method for embodiment 1, sponge in step 1) is only replaced by knitting wool yarn fabric, obtained provided by the invention more
Function sensor.
The structure of the device is identical with the obtained device structure of embodiment 1, is used in difference only composite system soft
Property substrate is replaced by knitting wool yarn fabric.
Using the device pressure and temperature is detected and self-powered under multifunctional sensing test, acquired results with
Embodiment 1 repeats no more without substantive difference.
Embodiment 6
According to the method for embodiment 1, sponge in step 1) is only replaced by silk cloth, obtained provided by the invention multi-functional
Sensor.
The structure of the device is identical with the obtained device structure of embodiment 1, is used in difference only composite system soft
Property substrate is replaced by silk cloth.
Using the device pressure and temperature is detected and self-powered under multifunctional sensing test, acquired results with
Embodiment 1 repeats no more without substantive difference.
Embodiment 7, integrated using the multifunctional sensing device progress array of the gained of embodiment 1 and realize the matrix of pressure
Change detection
1) it is 1mm scrubbed dose of sheet glass, secondary water by thickness, ethanol, acetone ultrasound, rinses, after nitrogen drying, very
Reciprocal of duty cycle is 7 × 10-4Under conditions of Pa withSpeed gold evaporation on the glass sheet, thickness 60nm, obtain patterning
Lower electrode layer；
2) 3.5mm × 3.5mm × 5mm sponge is prepared；
3) prepare doping 5% volume fraction ethylene glycol PEDOT-PSS solution (PEDOT-PSS model PH1000,
PEDOT is 1 with PSS mass ratioes：2.5, PEDOT number-average molecular weight obtains adulterating thermoelectricity for 50000), sponge is soaked wherein
Sponge-PEDOT compound system the materials of material, as the flexible composite layer of sensor, thickness 5mm；
4) sponge-PEDOT compound system materials of doped thermoelectric material obtained by step 3) are fixed on step 1) acquisition
On the lower electrode layer of patterning；
5) one layer of aluminium-foil paper is being fixed above array sponge obtained by step 4), is obtaining unified upper electrode layer, thus may be used
Prepare large area, the multifunctional sensing array of patterning.
6) experiment is put into above-mentioned integrated device surface with sample bottle, detect all devices placed in sample bottle it is front and rear
Current value, pressure matrixing can must be obtained by the percentage of curent change and initial current and show signal, as a result as shown in Figure 10.
As seen from the figure, when article is placed above integrated device, the pressure-plotting that pixel is shown can be obtained.
Embodiment 8 realizes the more work(of matrixing simultaneously using the multi-functional pressure force sensing device of the matrixing of the gained of embodiment 7
Can sensing
1) the multi-functional pressure force snesor of the matrixing of the gained of embodiment 7 is placed in the situation without application external electric field, in real time
Monitoring current and voltage signal.
2) using commercialization Peltier devices, add 2V voltages, the temperature difference is created in upper and lower surface.By hot junction down, from matrix
Change and move closer to device upper surface in step 1) above device.When Peltier devices are in diverse location above device, examine respectively
Survey the electric current and voltage signal of array integrated device.
Temperature is detected respectively with pressure using the integrated array, individual devices acquired results are with embodiment 1 without reality
Matter gender gap, is repeated no more.Based on above-mentioned integrated device, it can simultaneously realize and the matrixing of temperature and pressure is detected.
Embodiment 9 can be stored using the integrated preparation of multifunctional sensing device of the gained of embodiment 1, can sense two-way choice
Multifunction Sensor integrated circuit
1) by thickness be 1mm scrubbed dose of sheet glass, secondary water, ethanol, acetone ultrasound, rinse, after nitrogen drying it is true
Empty heat deposition 60nm gold electrodes, the gold electrode of patterning being obtained, the gold electrode of wherein 3.5mm × 3.5mm square frames is used as electrode a,
The gold electrode of 1mm × 1mm square frames is used as electrode b.Electric silica gel is applied on the gold electrode of 3.5mm × 3.5mm square frames, fixation has
The alloying metal piece of bending shape makees Top electrode c；
2) it is prepared as 3.5mm × 3.5mm × 4mm sponge；
3) prepare doping 5% volume fraction ethylene glycol PEDOT-PSS solution (PEDOT-PSS model PH1000,
PEDOT is 1 with PSS mass ratioes：2.5, PEDOT number-average molecular weight obtains adulterating thermoelectricity for 50000), sponge is soaked wherein
Sponge-PEDOT compound system the materials of material, as the flexible composite layer of sensor, thickness 5mm；
4) sponge-PEDOT composite devices obtained by step 3) are placed on the electrode a of patterning of step 1) acquisition；
5) the alloying metal piece with bending shape is fixed in the array sponge upper end obtained by step 4), is used as device electricity
Pole c.
The structure of obtained device is as shown in figure 11, can store for the flexibility of array, can sense the multi-functional of two-way choice
Sensor IC.
6) when sponge is in relaxed state, adjacent two device electrode a are connected with electrode c, form series circuit.Its
Middle single group device is a small-sized thermal generator, and output voltage is smaller；Multigroup devices in series can increase output voltage, be used as hair
Motor；Or connect in circuit with battery, realize that voltage stores；
7) when extruding sponge, two neighboring device a is disconnected with c electrodes, and electrode c is connected with electrode b, that is, disconnects series electrical
Road, single group device detection, you can be used as independent Multifunction Sensor.
Temperature and pressure are detected using the integrated array, individual devices acquired results are with embodiment 1 without substance
Difference, repeat no more.Meanwhile use the integrated array, it is possible to achieve thermo-electric generation and multifunctional sensing test.
Claims (9)
1. a kind of flexible multi-functional sensor, including electrode layer and flexible composite layer；
Wherein, the electrode layer is two layers, positioned at the both sides of the flexible composite layer and covers the flexible compound respectively
Material layer；
The material for forming the flexible composite layer is to be combined by flexible material and thermoelectric material；
The material of the electrode layer is formed in metal, alloy, metal oxide, heavily-doped semiconductor and conducting polymer
Any one；
Wherein, the metal is gold, silver, aluminium, titanium, copper, tin or aluminium；
The alloy material is magnesium silver alloy, platinum alloy or nickel zinc alloy；
The metal oxide is tin indium oxide, manganese dioxide or brown lead oxide；
The heavily-doped semiconductor is the silicon of phosphorus doping, the silicon of boron doped silicon or arsenic doping；Wherein, the phosphorus, boron or arsenic
It is 0.1%-3% to adulterate mass percentage concentration；
The conducting polymer is polyaniline, polypyrrole or polythiophene；Wherein, the number-average molecular weight of the polyaniline is 450-
106；The number-average molecular weight of the polypyrrole is 300-106；The number-average molecular weight of the polythiophene is 400-106；
The flexible material is selected from rubber, sponge, fiber, silk, textile, foam, dimethyl silicone polymer and engineering plastics
At least one of；Wherein, the number-average molecular weight of the dimethyl silicone polymer is 800-106；The engineering plastics are polyamides
Amine or makrolon；The number-average molecular weight of the polyamide is 600-106；The number-average molecular weight of makrolon is 1000-106；
The thermoelectric material is selected from the thermoelectric material of doping or undoped inorganic material, organic material and inorganic-organic hybridization
In any one；
Wherein, the doping or undoped inorganic material are selected from II-VI group-semi-conducting material, alloy material, oxide and received
Any one in meter Jing Ti；Wherein, the alloy is selected from bismuth telluride and its alloy, lead telluride and its alloy, sige alloy；Institute
State oxide and be selected from least one of Na-Co-O series, Ga-Co-O series and ZnO Series oxides；The nanocrystal choosing
From Si/SiGe superlattice nano lines, InAs/InP superlattice nano lines, Bi2Te3/ Sb nanometers linear array and Bi2Te3In nanometer linear array
At least one；
Any one of the organic material in conducting polymer, graphene and CNT；Wherein, the conducting polymer
Thing is selected from least one of polypyrrole, polyaniline, PSS, PEDOT, PBTTT, P3HT and PDPP3T；The poly- enedioxy thiophene
The number-average molecular weight of fen is 800-106；
The element of doping is selected from least one of K, Na, transition elements, halogen and II-VI group-semiconductor element；
The thermoelectric material of the inorganic-organic hybridization is selected from and uses conducting polymer as organic constituent element and adulterate answering for inorganic constituent element
Condensation material, the polyaniline composite material prepared using CNT as skeleton through in-situ polymerization and received with conducting polymer coated inorganic
Any one in the hybrid material that is prepared of rice material；
The thickness of the electrode layer is 30nm-1mm；
The thickness of the flexible composite layer is 1mm-50cm.
2. sensor according to claim 1, it is characterised in that：The flexible multi-functional sensor by the electrode layer and
Flexible composite layer forms.
3. sensor according to claim 1, it is characterised in that：The inorganic nano material is inorganic carbon nanomaterial；
The thickness of the electrode layer is 60nm；
The thickness of the flexible composite layer is 5mm.
4. a kind of method for preparing any flexible multi-functional sensors of claim 1-3, comprises the following steps：
One layer of electrode layer is prepared respectively at the both ends of the flexible composite layer, and makes the electrode layer covering described soft
Property composite layer, obtains the flexible multi-functional sensor.
5. according to the method for claim 4, it is characterised in that：The method for preparing the electrode layer is vacuum vapor deposition
Method, impact system, print process, magnetron sputtering method paste sheet metal method.
6. any flexible multi-functional sensors of claim 1-3 generate electricity, detection temperature and detection pressure in any one
Application.
7. any flexible multi-functional sensors of claim 1-3 are preparing generator, temperature detector and pressure detector
In the application of any one.
8. application of any flexible multi-functional sensors of claim 1-3 in Multifunction Sensor integrated circuit is prepared.
9. application according to claim 8, it is characterised in that：The function of the Multifunction Sensor is selected from and can stored and can
Sense at least one of two-way choice.
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