CN105366646B - Ultra-pure sulfuric acid volume production system - Google Patents
Ultra-pure sulfuric acid volume production system Download PDFInfo
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- CN105366646B CN105366646B CN201410438207.7A CN201410438207A CN105366646B CN 105366646 B CN105366646 B CN 105366646B CN 201410438207 A CN201410438207 A CN 201410438207A CN 105366646 B CN105366646 B CN 105366646B
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Abstract
The object of the present invention is to provide a kind of ultra-pure sulfuric acid volume production systems.The technical scheme is that：A kind of ultra-pure sulfuric acid volume production system, by absorption tower, acid cooler, SO2De- analysis tank, surge tank, dioxygen water storage tank, circulating tank, ultra-pure water draft machine and ultrapure acid storage tank composition, the upper end on absorption tower passes through pipeline and acid cooler and SO respectively2De- analysis tank connection, the bottom end on absorption tower are connected to by pipeline with circulating tank, and the bottom end of acid cooler is connected to by pipeline with circulating tank, and circulating tank passes through pipeline connection, SO with dioxygen water storage tank and ultra-pure water draft machine respectively2The upper end of de- analysis tank is connected to by pipeline with surge tank, SO2The bottom end of de- analysis tank is connected to by pipeline with ultrapure acid storage tank, and ultrapure acid storage tank is equipped with delivery outlet.The beneficial effects of the present invention are：The ultra-pure sulfuric acid volume production system is safe and reliable, and non-environmental-pollution is created economic benefit for enterprise, can be promoted the use of in sulfuric acid industry, it can be achieved that large-scale production.
Description
Technical field
The present invention relates to chemical technology field more particularly to a kind of ultra-pure sulfuric acid volume production systems.
Background technology
With the development of electronics industry, the development and production of ultra-pure sulfuric acid are also fast-developing.Ultra-pure sulfuric acid is mainly used for silicon
Cleaning, photoetching, the corrosion of printed circuit board and the cleaning of chip.Ultra-pure sulfuric acid generally uses distillation technique to produce, this technique is not
It can realize large-scale production, environmental pollution is greatly and production danger level is high.Another method is：The direct absorption technique of sulfur trioxide,
The current China of the technique there is no precedent.To solve the above problems, spy develops a kind of ultra-pure sulfuric acid volume production system.
Invention content
The object of the present invention is to provide a kind of ultra-pure sulfuric acid volume production systems.
The technical scheme is that：A kind of ultra-pure sulfuric acid volume production system, by absorption tower, acid cooler, SO2De- analysis tank delays
Tank, dioxygen water storage tank, circulating tank, ultra-pure water draft machine and ultrapure acid storage tank composition are rushed, the upper end on the absorption tower passes through respectively
Pipeline and acid cooler and SO2De- analysis tank connection, the bottom end on the absorption tower is connected to by pipeline with circulating tank, on the absorption tower
Equipped with going fan inlet and sulfur trioxide import, the top for going fan inlet to be located at absorption tower, the sulfur trioxide import
The bottom end of bottom end positioned at absorption tower, the acid cooler is connected to by pipeline with circulating tank, between the acid cooler and circulating tank
Pipeline pumped equipped with first circulation, the circulating tank respectively with dioxygen water storage tank and ultra-pure water draft machine by pipeline connection,
Pipeline between the circulating tank and dioxygen water storage tank is equipped with hydrogen peroxide metering pump, the SO2The upper end of de- analysis tank passes through pipe
Road is connected to surge tank, the SO2The bottom end of de- analysis tank is connected to by pipeline with ultrapure acid storage tank, the SO2De- analysis tank with it is ultrapure
Pipeline between acid storage tank is pumped equipped with second circulation, the SO2The top of de- analysis tank is equipped with de- analysis tank exhaust outlet, described ultrapure
The top of acid storage tank is equipped with pure acid storage tank exhaust outlet, and one end of the surge tank is equipped with vacuum pump, the surge tank and vacuum pump
By pipeline connection, the ultrapure acid storage tank is equipped with delivery outlet.
Further, the absorption tower, acid cooler, SO2De- analysis tank, surge tank, circulating tank and ultrapure acid storage tank internal layer are all provided with
There is fluoroplymer layer.
Further, the absorption tower is filtered using candle formula multistage filter.
Further, the acid cooler is tab (s) formula acid cooler, and the acid cooler is equipped with several circulating water lines.
Further, the de- analysis tank exhaust outlet is equipped with the first air filter.
Further, the pure acid storage tank exhaust outlet is equipped with the second air filter.
The beneficial effects of the present invention are：The ultra-pure sulfuric acid volume production system is safe and reliable, and non-environmental-pollution is, it can be achieved that big rule
Mould produces, and creates economic benefit for enterprise, can be promoted the use of in sulfuric acid industry.
Description of the drawings
Fig. 1 is schematic diagram of the present invention.
Wherein：1, absorption tower 2, acid cooler 3, SO2De- analysis tank
4, the first air filter 5, surge tank 6, vacuum pump
7, dioxygen water storage tank 8, hydrogen peroxide metering pump 9, circulating tank
10, first circulation pump 11, ultra-pure water draft machine 12, second circulation pump
13, ultrapure acid storage tank 14, the second air filter 15, remove fan inlet
16, sulfur trioxide import 17, circulating water line 18, de- analysis tank exhaust outlet
19, delivery outlet 20, pure acid storage tank exhaust outlet
Specific implementation mode
Brief description is made to the specific implementation mode of the present invention below in conjunction with the accompanying drawings.
A kind of ultra-pure sulfuric acid volume production system as shown in Figure 1, by absorption tower 1, acid cooler 2, SO2It is de- analysis tank 3, surge tank 5, double
Oxygen water storage tank 7, circulating tank 9, ultra-pure water draft machine 11 and ultrapure acid storage tank 13 form, and the upper end on the absorption tower 1 passes through respectively
Pipeline and acid cooler 2 and SO2De- analysis tank 3 is connected to, and the bottom end on the absorption tower 1 is connected to by pipeline with circulating tank 9, the absorption
Tower 1, which is equipped with, goes fan inlet 15 and sulfur trioxide import 16, the top for going fan inlet 15 to be located at absorption tower 1 described
Sulfur trioxide import 16 is located at the bottom end on absorption tower 1, and the bottom end of the acid cooler 2 is connected to by pipeline with circulating tank 9, the acid
Pipeline between cooler 2 and circulating tank 9 is equipped with first circulation and pumps 10, the circulating tank 9 respectively with dioxygen water storage tank 7 and ultrapure
For water draft machine 11 by pipeline connection, the pipeline between the circulating tank 9 and dioxygen water storage tank 7 is equipped with hydrogen peroxide metering pump 8,
The SO2The upper end of de- analysis tank 3 is connected to by pipeline with surge tank 5, the SO2The bottom end of de- analysis tank 3 passes through pipeline and ultrapure acid
Storage tank 13 is connected to, the SO2Pipeline between de- analysis tank 3 and ultrapure acid storage tank 13 is equipped with second circulation and pumps 12, the SO2It is de-
The top for analysing tank 3 is equipped with de- analysis tank exhaust outlet 18, and the top of the ultrapure acid storage tank 13 is equipped with pure acid storage tank exhaust outlet 20, described
One end of surge tank 5 is equipped with vacuum pump 6, and the surge tank 5 and vacuum pump 6 are by pipeline connection, in the ultrapure acid storage tank 13
Equipped with delivery outlet 19.
The absorption tower 1, acid cooler 2, SO2De- analysis tank 3, surge tank 5, circulating tank 9 and 13 internal layer of ultrapure acid storage tank are all provided with
There is fluoroplymer layer.
It is filtered using candle formula multistage filter on the absorption tower 1.
The acid cooler 2 is tab (s) formula acid cooler, and the acid cooler 2 is equipped with several circulating water lines 17.Effectively carry
High cooling effect.
The de- analysis tank exhaust outlet 18 is equipped with the first air filter 4.Exhaust gas is filtered, environmental pollution is reduced.
The pure acid storage tank exhaust outlet 20 is equipped with the second air filter 14.Exhaust gas is filtered, it is dirty to reduce environment
Dye.
Working method：This ultra-pure sulfuric acid volume production system is by steaming pure SO with sulfan3Gas passes through suction
It receives tower 1 and filters (0.01 μm of filter sizes) through formula multistage filter of lighting up, then with ultra-pure water draft machine 11 to prepare ultra-pure water direct
It absorbs and generates.Equipment, pipeline, valve, pump and storage tank used in production process are both needed to make lining with special fluoropolymer.Production and
Storage, filling and each link of transport are fully sealed.
One embodiment of the present invention has been described in detail above, but the content be only the present invention preferable implementation
Example should not be construed as limiting the practical range of the present invention.It is all according to all the changes and improvements made by the present patent application range
Deng should all still fall within the scope of the patent of the present invention.
Claims (2)
1. a kind of ultra-pure sulfuric acid volume production system, it is characterised in that：By absorption tower, acid cooler, SO2De- analysis tank, surge tank, hydrogen peroxide
Storage tank, circulating tank, ultra-pure water draft machine and ultrapure acid storage tank composition, the upper end on the absorption tower passes through pipeline and acid cooler respectively
And SO2De- analysis tank connection, the bottom end on the absorption tower are connected to by pipeline with circulating tank, the absorption tower equipped with go wind turbine into
Mouth and sulfur trioxide import, the top for going fan inlet to be located at absorption tower, the sulfur trioxide import are located at absorption tower
The bottom end of bottom end, the acid cooler is connected to by pipeline with circulating tank, and the pipeline between the acid cooler and circulating tank is equipped with
First circulation pumps, the circulating tank respectively with dioxygen water storage tank and ultra-pure water draft machine by pipeline connection, the circulating tank with
Pipeline between dioxygen water storage tank is equipped with hydrogen peroxide metering pump, the SO2The upper end of de- analysis tank is connected by pipeline and surge tank
It is logical, the SO2The bottom end of de- analysis tank is connected to by pipeline with ultrapure acid storage tank, the SO2Between de- analysis tank and ultrapure acid storage tank
Pipeline is pumped equipped with second circulation, the SO2The top of de- analysis tank is equipped with de- analysis tank exhaust outlet, the top of the ultrapure acid storage tank
Equipped with pure acid storage tank exhaust outlet, one end of the surge tank is equipped with vacuum pump, the surge tank and vacuum pump by pipeline connection,
The ultrapure acid storage tank is equipped with delivery outlet；It is filtered using candle formula multistage filter on the absorption tower；The acid cooler is tab (s)
Formula acid cooler, the acid cooler are equipped with several circulating water lines；The de- analysis tank exhaust outlet is equipped with the first air filtration
Device；The pure acid storage tank exhaust outlet is equipped with the second air filter.
2. ultra-pure sulfuric acid volume production system according to claim 1, it is characterised in that：The absorption tower, acid cooler, SO2De- analysis
Tank, surge tank, circulating tank and ultrapure acid storage tank internal layer are equipped with fluoroplymer layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410438207.7A CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410438207.7A CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105366646A CN105366646A (en) | 2016-03-02 |
| CN105366646B true CN105366646B (en) | 2018-09-11 |
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ID=55369363
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410438207.7A Active CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1689968A (en) * | 2004-04-19 | 2005-11-02 | 上海京藤化工有限公司 | Production method of refined sulfuric acid and production equipment thereof |
| CN103787280A (en) * | 2012-11-01 | 2014-05-14 | 天津渤大硫酸工业有限公司 | Refined sulfuric acid production system |
| CN204162419U (en) * | 2014-08-31 | 2015-02-18 | 天津渤大硫酸工业有限公司 | Ultra-pure sulfuric acid volume production system |
-
2014
- 2014-08-31 CN CN201410438207.7A patent/CN105366646B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1689968A (en) * | 2004-04-19 | 2005-11-02 | 上海京藤化工有限公司 | Production method of refined sulfuric acid and production equipment thereof |
| CN103787280A (en) * | 2012-11-01 | 2014-05-14 | 天津渤大硫酸工业有限公司 | Refined sulfuric acid production system |
| CN204162419U (en) * | 2014-08-31 | 2015-02-18 | 天津渤大硫酸工业有限公司 | Ultra-pure sulfuric acid volume production system |
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| Publication number | Publication date |
|---|---|
| CN105366646A (en) | 2016-03-02 |
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Address after: 300270 Dagang Petrochemical Industrial Park, Binhai New Area, Tianjin Patentee after: Tianjin Huanbo New Material Co., Ltd Address before: 300270 Dagang Petrochemical Industrial Park, Binhai New Area, Tianjin Patentee before: Tianjin Boda sulfuric acid industry Co., Ltd |
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| CP01 | Change in the name or title of a patent holder |