CN105366646A - Ultrapure sulfuric acid mass production system - Google Patents
Ultrapure sulfuric acid mass production system Download PDFInfo
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- CN105366646A CN105366646A CN201410438207.7A CN201410438207A CN105366646A CN 105366646 A CN105366646 A CN 105366646A CN 201410438207 A CN201410438207 A CN 201410438207A CN 105366646 A CN105366646 A CN 105366646A
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- absorption tower
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Abstract
The invention provides an ultrapure sulfuric acid mass production system. According to the technical scheme, the ultrapure sulfuric acid mass production system is composed of an absorption tower, an acid cooler, an SO2 desorption tank, a buffer tank, a hydrogen peroxide storage tank, a circulation tank, an ultrapure water preparation machine and an ultrapure acid storage tank. The upper end of the absorption tower is communicated with the acid cooler and the SO2 desorption tank through pipelines. The bottom end of the absorption tower is communicated with the circulation tank through a pipeline. The bottom end of the acid cooler is communicated with the circulation tank through a pipeline. The circulation tank is communicated with the hydrogen peroxide storage tank and the ultrapure water preparation machine through pipelines. The upper end of the SO2 desorption tank is communicated with the buffer tank through a pipeline. The bottom end of the SO2 desorption tank is communicated with the ultrapure acid storage tank through a pipeline. An output port is arranged on the ultrapure acid storage tank. The ultrapure sulfuric acid mass production system has the advantages of being safe, reliable, free of environmental pollution, and capable of achieving mass production, creating economic benefits for an enterprise and being used and popularized in the sulfuric acid industry.
Description
Technical field
The present invention relates to chemical technology field, particularly relate to a kind of ultra-pure sulfuric acid volume production system.
Background technology
Along with the development of electronic industry, the research and production of ultra-pure sulfuric acid is also fast-developing.Ultra-pure sulfuric acid is mainly used in the cleaning of silicon wafer, photoetching, the corrosion of printed circuit board (PCB) and cleaning.Ultra-pure sulfuric acid generally adopts distil process to produce, and this technique can not realize scale operation, and environmental pollution is large and production risk level is high.Another kind method is: the direct absorption technique of sulphur trioxide, and the current China of this technique there is no precedent.For solving the problem, spy develops a kind of ultra-pure sulfuric acid volume production system.
Summary of the invention
The object of this invention is to provide a kind of ultra-pure sulfuric acid volume production system.
Technical scheme of the present invention is: a kind of ultra-pure sulfuric acid volume production system, by absorption tower, acid cooler, SO
2de-analyse tank, surge tank, hydrogen peroxide storage tank, circulation tank, ultrapure water draft machine and ultrapure sour storage tank composition, the upper end on described absorption tower is respectively by pipeline and acid cooler and SO
2de-tank of analysing is communicated with, the bottom on described absorption tower is communicated with circulation tank by pipeline, described absorption tower is provided with fan inlet and sulphur trioxide import, the described top going fan inlet to be positioned at absorption tower, described sulphur trioxide import is positioned at the bottom on absorption tower, the bottom of described acid cooler is communicated with circulation tank by pipeline, pipeline between described acid cooler and circulation tank is provided with the first recycle pump, described circulation tank passes through pipeline connection with hydrogen peroxide storage tank and ultrapure water draft machine respectively, pipeline between described circulation tank and hydrogen peroxide storage tank is provided with hydrogen peroxide volume pump, described SO
2de-upper end of analysing tank is communicated with surge tank by pipeline, described SO
2de-bottom of analysing tank is communicated with ultrapure sour storage tank by pipeline, described SO
2de-pipeline of analysing between tank and ultrapure sour storage tank is provided with the second recycle pump, described SO
2de-top of analysing tank is provided with to take off analyses tank venting port, and the top of described ultrapure sour storage tank is provided with pure sour storage tank venting port, and one end of described surge tank is provided with vacuum pump, and described surge tank and vacuum pump are by pipeline connection, and described ultrapure sour storage tank is provided with delivery port.
Further, described absorption tower, acid cooler, SO
2de-analyse tank, surge tank, circulation tank and ultrapure sour storage tank internal layer and be equipped with fluoroplymer layer.
Further, described absorption tower adopts candle formula multistage filter to filter.
Further, described acid cooler is tab (s) formula acid cooler, and described acid cooler is provided with some circulating water lines.
Further again, describedly de-ly analyse tank venting port and be provided with the first air filter.
Further again, described pure sour storage tank venting port is provided with the second air filter.
Beneficial effect of the present invention is: this ultra-pure sulfuric acid volume production security of system is reliable, and non-environmental-pollution, can realize scale operation, for enterprise creates economic benefit, can promote the use of at sulfuric acid industry.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present invention.
Wherein: 1, absorption tower 2, acid cooler 3, SO
2take off and analyse tank
4, the first air filter 5, surge tank 6, vacuum pump
7, hydrogen peroxide storage tank 8, hydrogen peroxide volume pump 9, circulation tank
10, the first recycle pump 11, ultrapure water draft machine 12, second recycle pump
13, ultrapure sour storage tank 14, second air filter 15, remove fan inlet
16, sulphur trioxide import 17, circulating water line 18, de-tank venting port is analysed
19, delivery port 20, pure sour storage tank venting port
Embodiment
Below in conjunction with accompanying drawing, brief description is made to the specific embodiment of the present invention.
A ultra-pure sulfuric acid volume production system as shown in Figure 1, by absorption tower 1, acid cooler 2, SO
2de-analyse tank 3, surge tank 5, hydrogen peroxide storage tank 7, circulation tank 9, ultrapure water draft machine 11 and ultrapure sour storage tank 13 and form, the upper end on described absorption tower 1 is respectively by pipeline and acid cooler 2 and SO
2de-analyse tank 3 and be communicated with, the bottom on described absorption tower 1 is communicated with circulation tank 9 by pipeline, described absorption tower 1 is provided with fan inlet 15 and sulphur trioxide import 16, the described top going fan inlet 15 to be positioned at absorption tower 1, described sulphur trioxide import 16 is positioned at the bottom on absorption tower 1, the bottom of described acid cooler 2 is communicated with circulation tank 9 by pipeline, pipeline between described acid cooler 2 and circulation tank 9 is provided with the first recycle pump 10, described circulation tank 9 passes through pipeline connection with hydrogen peroxide storage tank 7 and ultrapure water draft machine 11 respectively, pipeline between described circulation tank 9 and hydrogen peroxide storage tank 7 is provided with hydrogen peroxide volume pump 8, described SO
2de-upper end of analysing tank 3 is communicated with surge tank 5 by pipeline, described SO
2de-bottom of analysing tank 3 is communicated with ultrapure sour storage tank 13 by pipeline, described SO
2de-pipeline of analysing between tank 3 and ultrapure sour storage tank 13 is provided with the second recycle pump 12, described SO
2de-top of analysing tank 3 is provided with to take off analyses tank venting port 18, the top of described ultrapure sour storage tank 13 is provided with pure sour storage tank venting port 20, one end of described surge tank 5 is provided with vacuum pump 6, and described surge tank 5 and vacuum pump 6 are by pipeline connection, and described ultrapure sour storage tank 13 is provided with delivery port 19.
Described absorption tower 1, acid cooler 2, SO
2de-analyse tank 3, surge tank 5, circulation tank 9 and ultrapure sour storage tank 13 internal layer and be equipped with fluoroplymer layer.
Described absorption tower 1 adopts candle formula multistage filter to filter.
Described acid cooler 2 is tab (s) formula acid cooler, and described acid cooler 2 is provided with some circulating water lines 17.Effective raising cooling performance.
Describedly de-analyse tank venting port 18 and be provided with the first air filter 4.Waste gas is filtered, reduces environmental pollution.
Described pure sour storage tank venting port 20 is provided with the second air filter 14.Waste gas is filtered, reduces environmental pollution.
Mode of operation: this ultra-pure sulfuric acid volume production system is by steaming pure SO with sulfan
3gas, filters (filter sizes 0.01 μm) by absorption tower 1 through candle formula multistage filter, then prepares ultrapure water with ultrapure water draft machine 11 and directly absorb generation.Production process equipment, pipeline, valve, pump and storage tank used all needs to make lining with special fluoropolymer.Produce and store, the filling and each link of transport seals all completely.
Above one embodiment of the present of invention have been described in detail, but described content being only preferred embodiment of the present invention, can not being considered to for limiting practical range of the present invention.All equalizations done according to the present patent application scope change and improve, and all should still belong within patent covering scope of the present invention.
Claims (6)
1. a ultra-pure sulfuric acid volume production system, is characterized in that: by absorption tower, acid cooler, SO
2de-analyse tank, surge tank, hydrogen peroxide storage tank, circulation tank, ultrapure water draft machine and ultrapure sour storage tank composition, the upper end on described absorption tower is respectively by pipeline and acid cooler and SO
2de-tank of analysing is communicated with, the bottom on described absorption tower is communicated with circulation tank by pipeline, described absorption tower is provided with fan inlet and sulphur trioxide import, the described top going fan inlet to be positioned at absorption tower, described sulphur trioxide import is positioned at the bottom on absorption tower, the bottom of described acid cooler is communicated with circulation tank by pipeline, pipeline between described acid cooler and circulation tank is provided with the first recycle pump, described circulation tank passes through pipeline connection with hydrogen peroxide storage tank and ultrapure water draft machine respectively, pipeline between described circulation tank and hydrogen peroxide storage tank is provided with hydrogen peroxide volume pump, described SO
2de-upper end of analysing tank is communicated with surge tank by pipeline, described SO
2de-bottom of analysing tank is communicated with ultrapure sour storage tank by pipeline, described SO
2de-pipeline of analysing between tank and ultrapure sour storage tank is provided with the second recycle pump, described SO
2de-top of analysing tank is provided with to take off analyses tank venting port, and the top of described ultrapure sour storage tank is provided with pure sour storage tank venting port, and one end of described surge tank is provided with vacuum pump, and described surge tank and vacuum pump are by pipeline connection, and described ultrapure sour storage tank is provided with delivery port.
2. ultra-pure sulfuric acid volume production system according to claim 1, is characterized in that: described absorption tower, acid cooler, SO
2de-analyse tank, surge tank, circulation tank and ultrapure sour storage tank internal layer and be equipped with fluoroplymer layer.
3. ultra-pure sulfuric acid volume production system according to claim 1, is characterized in that: described absorption tower adopts candle formula multistage filter to filter.
4. ultra-pure sulfuric acid volume production system according to claim 1, is characterized in that: described acid cooler is tab (s) formula acid cooler, and described acid cooler is provided with some circulating water lines.
5. ultra-pure sulfuric acid volume production system according to claim 1-4 any one, is characterized in that: describedly de-analyse tank venting port and be provided with the first air filter.
6. ultra-pure sulfuric acid volume production system according to claim 1-4 any one, is characterized in that: described pure sour storage tank venting port is provided with the second air filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410438207.7A CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410438207.7A CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105366646A true CN105366646A (en) | 2016-03-02 |
| CN105366646B CN105366646B (en) | 2018-09-11 |
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| CN201410438207.7A Active CN105366646B (en) | 2014-08-31 | 2014-08-31 | Ultra-pure sulfuric acid volume production system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1689968A (en) * | 2004-04-19 | 2005-11-02 | 上海京藤化工有限公司 | Production method of refined sulfuric acid and production equipment thereof |
| CN103787280A (en) * | 2012-11-01 | 2014-05-14 | 天津渤大硫酸工业有限公司 | Refined sulfuric acid production system |
| CN204162419U (en) * | 2014-08-31 | 2015-02-18 | 天津渤大硫酸工业有限公司 | Ultra-pure sulfuric acid volume production system |
-
2014
- 2014-08-31 CN CN201410438207.7A patent/CN105366646B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1689968A (en) * | 2004-04-19 | 2005-11-02 | 上海京藤化工有限公司 | Production method of refined sulfuric acid and production equipment thereof |
| CN103787280A (en) * | 2012-11-01 | 2014-05-14 | 天津渤大硫酸工业有限公司 | Refined sulfuric acid production system |
| CN204162419U (en) * | 2014-08-31 | 2015-02-18 | 天津渤大硫酸工业有限公司 | Ultra-pure sulfuric acid volume production system |
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| Publication number | Publication date |
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| CN105366646B (en) | 2018-09-11 |
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Address after: 300270 Dagang Petrochemical Industrial Park, Binhai New Area, Tianjin Patentee after: Tianjin Huanbo New Material Co., Ltd Address before: 300270 Dagang Petrochemical Industrial Park, Binhai New Area, Tianjin Patentee before: Tianjin Boda sulfuric acid industry Co., Ltd |