CN105366627A - Micro-electromechanical system (MEMS) device protection mechanism adapting to high overload environment - Google Patents
Micro-electromechanical system (MEMS) device protection mechanism adapting to high overload environment Download PDFInfo
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- CN105366627A CN105366627A CN201510824511.XA CN201510824511A CN105366627A CN 105366627 A CN105366627 A CN 105366627A CN 201510824511 A CN201510824511 A CN 201510824511A CN 105366627 A CN105366627 A CN 105366627A
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Abstract
The invention relates to an overload protection technology for a micro-electromechanical system (MEMS) device, in particular to an MEMS device protection mechanism adapting to a high overload environment, and aims to solve the problem that the MEMS device is liable to be damaged due to lowering of the testing accuracy of the MEMS device in an existing overload protection method for the MEMS device. The MEMS device protection mechanism adapting to the high overload environment comprises a mass block, a buffer lug part, a connection crossbeam part, an anchor block part, a buffer cushion part and a spring part, wherein the buffer lug part comprises two front buffer lugs, two back buffer lugs, a left buffer lug and a right buffer lug; the connection crossbeam part comprises a front connection crossbeam and a back connection crossbeam; the anchor block part comprises two front anchor blocks, two back anchor blocks, a left anchor block and a right anchor block; and the buffer cushion part comprises two front buffer cushions, two back buffer cushions, a left buffer cushion and a right buffer cushion. The MEMS device protection mechanism is suitable for overload protection of the MEMS device.
Description
Technical field
The present invention relates to the overload protection technology of MEMS, specifically a kind of MEMS protection mechanism adapting to high overload environment.
Background technology
MEMS(MEMS) device with advantages such as its volume is little, lightweight, cost is low, good reliability, low in energy consumption, measurement category is large, be widely used in the fields such as automotive electronics, radio communication, consumer electronics, biomedicine, Aero-Space, industry, agricultural.Along with the development in above-mentioned field, the demand of MEMS is increasing, and is applied to more extreme environment (such as the adverse circumstances such as high overload, HI high impact) gradually, proposes high requirement thus to the overload protection of MEMS.At present, the overload protection of MEMS is mainly realized by the following two kinds method: first method carries out overload protection by the stability of the mass of reinforcement MEMS.But this kind of method can sacrifice the effective sensitivity of MEMS, thus reduces the measuring accuracy of MEMS.Second method is by block controlled motion gap or the move distance limiting the mass of MEMS by making crashproof projection, realizes the object of overload protection thus.But this kind of method is owing to have employed hard collision and inelastic collision, easily causes the mass of MEMS to rupture when hard collision, easily causes MEMS to be damaged thus.Based on this, be necessary the overload protecting mechanism inventing a kind of brand-new MEMS, the problems referred to above existed with the overload protection method solving existing MEMS.
Summary of the invention
The measuring accuracy that the present invention reduces MEMS in order to the overload protection method solving existing MEMS, the problem easily causing MEMS to be damaged, provide a kind of MEMS protection mechanism adapting to high overload environment.
The present invention adopts following technical scheme to realize: a kind of MEMS protection mechanism adapting to high overload environment, comprises mass, buffering convex portion, connecting cross beam part, anchor block part, bumper portion, spring section;
Cushion projection before described buffering convex portion comprises two, cushion projection, left buffering projection, right buffering projection after two;
Front surface left end and front surface right-hand member that projection is individually fixed in mass is cushioned before two; Two are cushioned rear surface left end and the rear surface right-hand member that projection is individually fixed in mass afterwards; Left buffering projection is fixed in the middle part of the left surface of mass; Right buffering projection is fixed on the right surface middle part of mass;
Described connecting cross beam part comprises front connecting cross beam, rear connecting cross beam;
Front connecting cross beam is set in parallel in the dead ahead of mass; Rear connecting cross beam is set in parallel in the dead astern of mass;
Described anchor block part comprises two front anchor blocks, anchor block, left anchor block, right anchor block after two;
Cushion the dead ahead of projection before two front anchor blocks are arranged at two respectively, and two front anchor blocks are arranged at left and the right of front connecting cross beam respectively; After two, anchor block is arranged at the dead astern that two are cushioned projection afterwards respectively, and after two, anchor block is arranged at left and the right of rear connecting cross beam respectively; Left anchor block is arranged at the front-left of left buffering projection; Right anchor block is arranged at the front-right of right buffering projection;
Described bumper portion comprises two front cushion pads, cushion pad, left cushion pad, right cushion pad after two;
Two front cushion pads are individually fixed in the rear surface of two front anchor blocks, and cushion between projection before two front cushion pads and two and leave gap; After two, cushion pad is individually fixed in the front surface of anchor block after two, and after two, cushion pad and two cushion afterwards between projection and leave gap; Left cushion pad is fixed on the right surface of left anchor block, and leaves gap between left cushion pad and left buffering projection; Right cushion pad is fixed on the left surface of right anchor block, and leaves gap between right cushion pad and right buffering projection;
Described spring section comprises four front spring, four rear spring;
The head end of four front spring respectively with rear surface left part, rear surface right part, the left surface of front connecting cross beam, right surface is vertical fixes; The tail end of four front spring respectively with the front surface right part of the front surface left part of mass, mass, before one of them, the left surface of the right surface of anchor block, another front anchor block is vertical fixes; The head end of four rear spring respectively with front surface left part, front surface right part, the left surface of rear connecting cross beam, right surface is vertical fixes; The tail end of four rear spring respectively with the rear surface right part of the rear surface left part of mass, mass, after one of them anchor block right surface, after another, the left surface of anchor block is vertical fixes.
Specific works process is as follows:
One, under original state, two front cushion pads and the gap width cushioned before two between projection, cushion pad cushions the gap width between projection afterwards with two after two, the gap width between left cushion pad with left buffering projection, gap width between right cushion pad with right buffering projection are all equal.Now, buffering convex portion does not contact with between bumper portion, can not impact thus to the normal work of mass;
Two, when mass is subject to forward the high-strength impact of (backward), there is (backward) excess in displacement forward in mass, and before driving two, cushion projection (cushioning projection afterwards) (backward) movement forward, projection (cushioning projection afterwards) (backward) collision two front cushion pads (rear cushion pad) are forward cushioned before making two, there is elastic deformation thus in two front cushion pads (rear cushion pad), thus absorb (backward) forward impulsive force that mass is subject to, and limit (backward) forward excess in displacement of mass.Simultaneously, mass is by wherein two the front connecting cross beam of front spring drive (backward) movements forward, there is dilatation thus in these two front spring, front connecting cross beam drives two other front spring to occur bending and deformation thus, thus absorb (backward) forward impulsive force that mass is subject to, and limit (backward) forward excess in displacement of mass.Simultaneously, mass is by wherein two rear spring drive connecting cross beam (backward) movements forward afterwards, there is dilatation thus in these two rear spring, rear connecting cross beam drives two other rear spring to occur bending and deformation thus, thus absorb (backward) forward impulsive force that mass is subject to, and limit (backward) forward excess in displacement of mass.After treating the high-strength impact of (backward) forward, four front spring and four rear spring restore to the original state all automatically, mass, cushion projection (cushioning projection afterwards) before two, front connecting cross beam, rear connecting cross beam all automatically reset;
Three, when mass is subject to left the high-strength impact of (to the right), there is (to the right) excess in displacement left in mass, and drive left buffering projection (right buffering projection) (to the right) movement left, make left buffering projection (right buffering projection) left (to the right) collide left cushion pad (right cushion pad), there is elastic deformation thus in left cushion pad (right cushion pad), thus absorb (to the right) left impulsive force that mass is subject to, and limit (to the right) left excess in displacement of mass.Simultaneously, mass is by wherein two the front connecting cross beam of front spring drive (to the right) movements left, these two front spring occur bending and deformation thus, front connecting cross beam drives two other front spring generation dilatation thus, thus absorb (to the right) left impulsive force that mass is subject to, and limit (to the right) left excess in displacement of mass.Simultaneously, mass is by wherein two rear spring drive connecting cross beam (to the right) movements left afterwards, these two rear spring occur bending and deformation thus, rear connecting cross beam drives two other rear spring generation dilatation thus, thus absorb (to the right) left impulsive force that mass is subject to, and limit (to the right) left excess in displacement of mass.After treating the high-strength impact of (to the right) left, four front spring and four rear spring restore to the original state all automatically, and mass, left buffering projection (right buffering projection), front connecting cross beam, rear connecting cross beam all automatically reset, as shown in figs 2-4.
Based on said process, compared with the overload protection method of existing MEMS, a kind of MEMS protection mechanism adapting to high overload environment of the present invention passes through to adopt brand new, achieve Y direction that mass is subject to (forward, backward) and X-direction (forward, impulsive force backward) absorbs, thus achieve the comprehensive overload protection to MEMS, thus possessed following advantage: one, compared with first method, a kind of MEMS protection mechanism adapting to high overload environment of the present invention can not sacrifice the effective sensitivity of MEMS, effectively ensure that the measuring accuracy of MEMS thus.Its two, compared with second method, a kind of MEMS protection mechanism adapting to high overload environment of the present invention is owing to have employed elastic collision, and the mass avoiding MEMS ruptures, and effectively prevent MEMS thus and is damaged.
The present invention is rational in infrastructure, it is ingenious to design, and the problem that the overload protection method efficiently solving existing MEMS reduces the measuring accuracy of MEMS, easily causes MEMS to be damaged, is applicable to the overload protection of MEMS.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the working state schematic representation of the present invention before mass is subject to high-strength impact left.
Fig. 3 is that the present invention is subject to the working state schematic representation in high-strength impact left at mass.
Fig. 4 is the working state schematic representation of the present invention after mass is subject to high-strength impact left.
In figure: 1-mass, before 21-, buffering projection, cushions projection after 22-, the left buffering projection of 23-, the right buffering projection of 24-, connecting cross beam before 31-, connecting cross beam after 32-, anchor block before 41-, anchor block after 42-, the left anchor block of 43-, the right anchor block of 44-, cushion pad before 51-, cushion pad after 52-, the left cushion pad of 53-, the right cushion pad of 54-, 61-front spring, 62-rear spring.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, illustrate mechanism of the present invention further, these embodiments should be understood only be not used in for illustration of the present invention and limit the scope of the invention, after reading the present invention, the amendment of those skilled in the art to the various equivalent form of value of the present invention all falls within the application's claims limited range.Such as, cushion pad of the present invention is not limited to " mouth " type structure in Fig. 1 and Fig. 2, and its protection domain should comprise the structure that other has pooling feature, and cushion pad quantity is also not limited to the number of the present embodiment; Beam form between syndeton of the present invention and anchor point is not confined to certain concrete form yet, and should comprise the version with beam function, and the quantity of beam also should adjust according to demand to some extent, should not be limited to the quantity that the present embodiment proposes; The shape of buffering projection and quantity are also not limited to the scheme that the present embodiment provides.
Adapt to a MEMS protection mechanism for high overload environment, comprise mass 1, buffering convex portion, connecting cross beam part, anchor block part, bumper portion, spring section;
Cushion projection 21, two before described buffering convex portion comprises two and cushion projection 22, left buffering projection 23, right buffering projection 24 afterwards;
Front surface left end and front surface right-hand member that projection 21 is individually fixed in mass 1 is cushioned before two; Two are cushioned rear surface left end and the rear surface right-hand member that projection 22 is individually fixed in mass 1 afterwards; Left buffering projection 23 is fixed in the middle part of the left surface of mass 1; Right buffering projection 24 is fixed on the right surface middle part of mass 1;
Described connecting cross beam part comprises front connecting cross beam 31, rear connecting cross beam 32;
Front connecting cross beam 31 is set in parallel in the dead ahead of mass 1; Rear connecting cross beam 32 is set in parallel in the dead astern of mass 1;
Described anchor block part comprises anchor block 42, left anchor block 43, right anchor block 44 after two front anchor blocks 41, two;
Cushion the dead ahead of projection 21 before two front anchor blocks 41 are arranged at two respectively, and two front anchor blocks 41 are arranged at left and the right of front connecting cross beam 31 respectively; After two, anchor block 42 is arranged at the dead astern that two are cushioned projection 22 afterwards respectively, and after two, anchor block 42 is arranged at left and the right of rear connecting cross beam 32 respectively; Left anchor block 43 is arranged at the front-left of left buffering projection 23; Right anchor block 44 is arranged at the front-right of right buffering projection 24;
Described bumper portion comprises cushion pad 52, left cushion pad 53, right cushion pad 54 after two front cushion pads 51, two;
Two front cushion pads 51 are individually fixed in the rear surface of two front anchor blocks 41, and cushion between projection 21 before two front cushion pads 51 and two and leave gap; After two, cushion pad 52 is individually fixed in the front surface of anchor block 42 after two, and after two, cushion pad 52 and two cushion afterwards between projection 22 and leave gap; Left cushion pad 53 is fixed on the right surface of left anchor block 43, and leaves gap between left cushion pad 53 and left buffering projection 23; Right cushion pad 54 is fixed on the left surface of right anchor block 44, and leaves gap between right cushion pad 54 and right buffering projection 24;
Described spring section comprises four front spring, 61, four rear spring 62;
The head end of four front spring 61 respectively with rear surface left part, rear surface right part, the left surface of front connecting cross beam 31, right surface is vertical fixes; The tail end of four front spring 61 respectively with the front surface right part of the front surface left part of mass 1, mass 1, before one of them, the left surface of the right surface of anchor block 41, another front anchor block 41 is vertical fixes; The head end of four rear spring 62 respectively with front surface left part, front surface right part, the left surface of rear connecting cross beam 32, right surface is vertical fixes; The tail end of four rear spring 62 respectively with the rear surface right part of the rear surface left part of mass 1, mass 1, after one of them anchor block 42 right surface, after another, the left surface of anchor block 42 is vertical fixes.
During concrete enforcement, mass 1 adopts identical materials processing to form with buffering convex portion.The processing technology of the processing technology of mass 1, the processing technology of buffering convex portion, bumper portion is compatible mutually.Such benefit is to effectively reduce processing cost, effectively reduces difficulty of processing, effectively improves uniformity and the reliability of product.Bumper portion does not affect the normal work of mass 1 under the state be not hit.
Claims (4)
1. adapt to a MEMS protection mechanism for high overload environment, it is characterized in that: comprise mass (1), buffering convex portion, connecting cross beam part, anchor block part, bumper portion, spring section;
Cushion projection (21) before described buffering convex portion comprises two, cushion projection (22), left buffering projection (23), right buffering projection (24) after two;
Front surface left end and front surface right-hand member that projection (21) is individually fixed in mass (1) is cushioned before two; Two are cushioned rear surface left end and the rear surface right-hand member that projection (22) is individually fixed in mass (1) afterwards; Left buffering projection (23) is fixed in the middle part of the left surface of mass (1); Right buffering projection (24) is fixed on the right surface middle part of mass (1);
Described connecting cross beam part comprises front connecting cross beam (31), rear connecting cross beam (32);
Front connecting cross beam (31) is set in parallel in the dead ahead of mass (1); Rear connecting cross beam (32) is set in parallel in the dead astern of mass (1);
Described anchor block part comprises two front anchor blocks (41), anchor block (42), left anchor block (43), right anchor block (44) after two;
Cushion the dead ahead of projection (21) before two front anchor blocks (41) are arranged at two respectively, and two front anchor blocks (41) are arranged at left and the right of front connecting cross beam (31) respectively; After two, anchor block (42) is arranged at the dead astern that two are cushioned projection (22) afterwards respectively, and after two, anchor block (42) is arranged at left and the right of rear connecting cross beam (32) respectively; Left anchor block (43) is arranged at the front-left of left buffering projection (23); Right anchor block (44) is arranged at the front-right of right buffering projection (24);
Described bumper portion comprises two front cushion pads (51), cushion pad (52), left cushion pad (53), right cushion pad (54) after two;
Two front cushion pads (51) are individually fixed in the rear surface of two front anchor blocks (41), and cushion between projection (21) before two front cushion pads (51) and two and leave gap; After two, cushion pad (52) is individually fixed in the front surface of anchor block (42) after two, and cushions between projection (22) after cushion pad (52) and two after two and leave gap; Left cushion pad (53) is fixed on the right surface of left anchor block (43), and leaves gap between left cushion pad (53) and left buffering projection (23); Right cushion pad (54) is fixed on the left surface of right anchor block (44), and leaves gap between right cushion pad (54) and right buffering projection (24);
Described spring section comprises four front spring (61), four rear spring (62);
The head end of four front spring (61) respectively with rear surface left part, rear surface right part, the left surface of front connecting cross beam (31), right surface is vertical fixes; The tail end of four front spring (61) respectively with the front surface right part of the front surface left part of mass (1), mass (1), before one of them, the left surface of the right surface of anchor block (41), another front anchor block (41) is vertical fixes; The head end of four rear spring (62) respectively with front surface left part, front surface right part, the left surface of rear connecting cross beam (32), right surface is vertical fixes; The tail end of four rear spring (62) respectively with the rear surface right part of the rear surface left part of mass (1), mass (1), after one of them anchor block (42) right surface, after another, the left surface of anchor block (42) is vertical fixes.
2. a kind of MEMS protection mechanism adapting to high overload environment according to claim 1, is characterized in that: mass (1) adopts identical materials processing to form with buffering convex portion.
3. a kind of MEMS protection mechanism adapting to high overload environment according to claim 1, is characterized in that: the processing technology of the processing technology of mass (1), the processing technology of buffering convex portion, bumper portion is compatible mutually.
4. a kind of MEMS protection mechanism adapting to high overload environment according to claim 1, is characterized in that: bumper portion does not affect the normal work of mass (1) under the state be not hit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510824511.XA CN105366627B (en) | 2015-11-24 | 2015-11-24 | Micro-electromechanical system (MEMS) device protection mechanism adapting to high overload environment |
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| CN201510824511.XA CN105366627B (en) | 2015-11-24 | 2015-11-24 | Micro-electromechanical system (MEMS) device protection mechanism adapting to high overload environment |
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| CN105366627B CN105366627B (en) | 2017-03-22 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
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| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| US11965740B2 (en) | 2020-08-24 | 2024-04-23 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
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