CN105355776A - Electro-mechanical material and preparation method thereof and actuator employing electro-mechanical material - Google Patents

Electro-mechanical material and preparation method thereof and actuator employing electro-mechanical material Download PDF

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Publication number
CN105355776A
CN105355776A CN201510701094.XA CN201510701094A CN105355776A CN 105355776 A CN105355776 A CN 105355776A CN 201510701094 A CN201510701094 A CN 201510701094A CN 105355776 A CN105355776 A CN 105355776A
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material layer
electro
layer
carbon nanotube
active material
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CN201510701094.XA
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CN105355776B (en
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陈鲁倬
张薇
翁明岑
周培迪
黄志高
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Fujian Normal University
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Fujian Normal University
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/092Forming composite materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/852Composite materials, e.g. having 1-3 or 2-2 type connectivity

Abstract

The invention discloses an electro-mechanical material, which comprises a first material layer, a second material layer and a binder layer, wherein the binder layer is located between the first material layer and the second material layer; the first material layer, the binder layer and the second material layer are stacked; the first material layer and the second material layer are different in thermal expansion coefficient; the first material layer is a carbon nanotube paper; and the second material layer is a polymer thin film. An electro-mechanical material-based curly type electric actuator has the characteristics of simplicity in preparation flow, flexibility and the like, can achieve short-time large-scale preparation, is fast in response and large in deformation amplitude, can achieve curly deformation of which the bending angle exceeds 360 DEG C, and is superior to the same type of actuator reported at present.

Description

Electro-active material and preparation method thereof and the actuator adopting this electro-active material
Technical field
The present invention relates to electro-active material field, particularly relate to electro-active material and preparation method thereof and the actuator adopting this electro-active material.
Background technology
The operation principle of actuator is for being mechanical energy by other power conversion, and realizing the approach that this conversion often adopts has three kinds: be converted into electrostatic force by electrostatic field, namely electrostatic drives; Magnetic force is converted into, i.e. Magnetic driving by electromagnetic field; The thermal expansion of material or other thermal characteristics is utilized to realize the conversion of energy, i.e. thermal drivers.
The electric actuation elements that quiet electrically driven (operated) actuator generally comprises two electrodes and arranges between two electrodes, its course of work is difference iunjected charge on two electrodes, utilize attracting each other and repelling between electric charge, carried out the relative motion of electric actuation elements between control electrode by control amount of charge and electronegativity.But due to electrostatic force be inversely proportional to the spacing of capacitor board square, therefore general only when electrode spacing is very little electrostatic force just relatively significantly, the requirement of this distance makes the structural design of this actuator comparatively complicated.
The electric actuation elements that the actuator of Magnetic driving generally comprises two magnetic poles and is arranged between two magnetic poles, its work be by magnetic field attract each other and repulsive interaction makes the electric actuation elements between two magnetic poles produce relative motion, but the shortcoming of Magnetic driving drives identical with electrostatic, namely because magnetic fields is limited in scope, cause two surfaces up and down of electric actuation elements must keep less distance, the designing requirement of this structure is strict and also limit the range of application of this actuator.
And utilize the actuator of thermal drivers to overcome the shortcoming of the driving of above-mentioned electrostatic and magnetic driven actuator, as long as this actuator structure can ensure that obtaining certain heat energy just can produce corresponding deformation, in addition, relative to electrostatic force and magnetic field force, thermal drivers power is larger.Prior art discloses a kind of electrothermal actuator, refers to " the micro-electrothermal actuator progress based on thermal expansion effects ", rectifies one peaceful etc., electronic device, vol22, p162 (1999).This electrothermal actuator adopts the different corrupt split of two panels thermal coefficient of expansion to become double-decker as electrostriction element, and when passing into electric current and being heated, the thermal expansion amount due to piece of metal is greater than another sheet, and a side little to thermal expansion amount bends by bimetal leaf.But because above-mentioned electro-active material adopts metal structure, its flexibility is poor, causes whole electrothermal actuator thermal response speed slower.
Carbon-based material is the material received much attention in recent years, especially carbon nano-tube.Carbon nano-tube has the performance of many excellences, can be applicable to numerous areas.Carbon nano-tube is the seamless hollow body be rolled into by graphite flake, and due to the quantum confinement effect of electronics in carbon nano-tube, electronics can only along the axial motion of carbon nano-tube in graphite flake, and therefore carbon nano-tube shows unique electric property and thermal property.Research test result shows, the average conductivity of carbon nano-tube can reach 100 ~ 2000S/m(Siemens/rice).In addition, carbon nano-tube also has excellent mechanical property, e.g., and higher strength and modulus.
Carbon nanotube paper, as the term suggests, be macroscopic material carbon nano-tube being prepared as film, sheet by some steps.At present, the preparation method of carbon nanotube paper mainly comprises the basic step such as selection, the dispersion of solution system, suction filtration and drying forming of carbon nano-tube.Due to needs first by carbon nanotube dispersed in the solution, in carbon nanotube paper obtained by this preparation method, the orientation of carbon nano-tube cannot be determined, in carbon nanotube paper, the density of carbon nano-tube is lower, thus greatly have impact on the performance of carbon nanotube paper, and is unfavorable for large-scale production.The preparation method of existing a kind of novel carbon nanotube paper can pull out carbon nano-tube film by dry method from carbon nano pipe array, is then stacked up by film layer, is namely formed and has the carbon nanotube paper be arranged of preferred orient.
Still there is following shortcoming in the existing electric actuator based on carbon nano-tube:
1, required driving voltage is higher, still needs the voltage of tens volts to drive;
2, the response time is longer, needs large tens seconds or even the number of minutes magnitude;
3, usually adopt the mode of in-situ polymerization to prepare or need solution to assist, required time is longer, is unfavorable for suitability for industrialized production;
4, the deformation quantity of actuator still needs to be improved further.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of electro-active material and fast preparation method of flexibility is provided, and a kind of low voltage drive, thermal response speed are exceedingly fast, the electric actuator of large deformation.
The technical solution used in the present invention is:
A kind of electro-active material, comprise the first material layer, the second material layer and the adhesive layer between the first material layer and the second material layer, described first material layer, adhesive layer and the second material layer are arranged, and the first material layer is different from the thermal coefficient of expansion of the second material layer, described first material layer is carbon nanotube paper, and described second material layer is thin polymer film.
Described first material layer and the second material layer adopt the stacked setting of mode of bonding, pressing by adhesive layer.
The thickness of described first material layer is 0.1 μm ~ 1mm, and the thickness of described second material layer is 1 μm ~ 5mm, and the thickness of described adhesive layer 14 is 1 μm ~ 0.5mm.
Described carbon nanotube paper comprises the carbon nano-tube film of at least one deck.Described carbon nano-tube film comprises multiple carbon nano-tube, and described multiple carbon nano-tube is joined end to end by Van der Waals force, being axially arranged of preferred orient substantially in the same direction of described multiple carbon nano-tube.
The binding agent of described adhesive layer adopts one or more the combination in optic-solidified adhesive, heat-curable glue, non-conductive solidification glue.
The binding agent of described adhesive layer is the combination of one or more in polyvinyl alcohol, ECA, acrylic glue, optic-solidified adhesive and heat-curable glue.
Described second material layer is Biaxially oriented polypropylene, polypropylene, polyethylene, the combination of one or more in silicon rubber, fluorosioloxane rubber, polymethyl methacrylate, PETG, polyurethane, epoxy resin, polyethyl acrylate, butyl polyacrylate, polystyrene, polybutadiene and polyacrylonitrile.
The thermal coefficient of expansion of described carbon nanotube paper is less than the thermal coefficient of expansion of described thin polymer film
The present invention discloses a kind of preparation method of electro-active material, and it comprises the following steps:
Step one: form one and form the first material layer by carbon nanotube paper;
Step 2: form second material layer be made up of the thin polymer film be polymerized;
Step 3: using as on the second material layer that the binding agent uniform fold of adhesive layer is formed at thin polymer film;
Step 4: combined by the second material layer that adhesive layer adopts bonding, carbon nanotube paper to be formed the first material layer by the mode of pressing and thin polymer film is formed.
The method forming described thin polymer film comprises polycondensation reaction, poly-ly adds reaction, Raolical polymerizable, anionic polymerisation and cationic polymerization, chooses corresponding method form described thin polymer film according to the difference of the second material layer polymer monomer kind.
The method be evenly distributed on by adhesive layer on the second material layer comprises spin-coating method, czochralski method and semar technique.
The present invention also discloses a kind of curled electric actuator, it comprises the electro-active material described in an employing, at least one first electrode and at least one second electrode, described at least one first electrode and at least one second electrode gap are arranged on described electro-active material, and are electrically connected with described electro-active material;
When described first electrode and the second electrifying electrodes, described curled electric actuator bends to the surface direction of carbon nanotube paper.
Described curled electric actuator realizes the coiled-type deformation that angle of bend is greater than 360 °.
The present invention adopts above technical scheme, and the beneficial effect of the application is: compared with prior art, and described electro-active material has the following advantages: one, and preparation flow is simple, and the production time is short, can prepare on a large scale the short time; Its two, adopt flexible polymer and carbon nanotube paper as main material, make described electric actuator have flexibility, and have the good electricity of carbon nano-tube and mechanical property concurrently; Its three, rapidly, deformation amplitude is large, can realize the curling and deformation that angle of bend is greater than 360 ° for the response of described electric actuator, and performance is much better than the actuator of the same type reported at present.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further details;
Fig. 1 is the structural representation of electro-active material of the present invention;
Fig. 2 is the structural representation of curled electric actuator of the present invention;
Fig. 3 is the actuation effect schematic diagram after the energising of curled electric actuator of the present invention.
Embodiment
Embodiment 1:
As shown in one of Fig. 1 to Fig. 3, the invention provides a kind of electro-active material 10, described electro-active material 10 comprises the first material layer 13, adhesive layer 14 and the second material layer 15.First material layer 13, adhesive layer 14, second material layer 15 have identical length and width, and their stacked settings, the first material layer is different from the thermal coefficient of expansion of the second material layer.
Described first material layer 13 is carbon nanotube paper.This carbon nanotube paper comprises at least one deck carbon nano-tube film, when affiliated carbon nanotube paper 13 comprises multilayer carbon nanotube films, the number of plies of described carbon nano-tube film is not limit, the plurality of carbon nano-tube film can be arranged side by side or stacked setting, and film comprises multiple carbon nano-tube, the plurality of carbon nano-tube is substantially parallel to each other and be parallel to the surface of carbon nanotube paper.Particularly, the multiple carbon nano-tube in this carbon nanotube paper are joined end to end by Van der Waals force, and the axial of described multiple carbon nano-tube is arranged of preferred orient substantially in the same direction.
In the present embodiment, the thickness of described first material layer 13 can be 0.1 μm ~ 1mm.
Preferably, the thickness of described carbon nanotube paper is 7 μm, and comprising the carbon nano-tube film number of plies is 400 layers.
The binding agent of described adhesive layer 14 can be polyvinyl alcohol, ECA, acrylic glue, optic-solidified adhesive, heat-curable glue, the combination of one or more in non-conductive solidification glue etc., but is not limited to these materials.
In the present embodiment, the thickness of described adhesive layer 14 can be 1 μm ~ 0.5mm.
Preferably, binding agent is acrylic glue, and thickness is 5 μm.
Described second material layer 15 is polymer, it can be Biaxially oriented polypropylene, polypropylene, polyethylene, the combination of one or more in silicon rubber, fluorosioloxane rubber, polymethyl methacrylate, PETG, polyurethane, epoxy resin, polyethyl acrylate, butyl polyacrylate, polystyrene, polybutadiene, polyacrylonitrile etc., but be not limited to these materials.
In the present embodiment, the thickness of described second material layer can be 1 μm ~ 5mm.
Preferably, polymer is Biaxially oriented polypropylene, and thickness is 35 μm.
The Thickness Ratio of the first material layer 13 carbon nanotube paper and the second material layer 15 thin polymer film can be 1:2 ~ 1:200, and preferably, this Thickness Ratio is 1:5 ~ 1:10.
The preparation method of electro-active material 10 of the present invention, comprises the following steps:
Step one: form one and form the first material layer by carbon nanotube paper;
Carbon nanotube paper as described in step one, the method preparing described carbon nanotube paper uses chemical vapour deposition technique carbon nano tube array grows, then use the method for direct membrane, from carbon nano pipe array, extract carbon nano-tube film out, finally carbon nano-tube film stacked in multi-layers is got up to obtain carbon nanotube paper.
Step 2: form second material layer be made up of the thin polymer film be polymerized;
Thin polymer film as described in step 2, the method forming described thin polymer film is divided into according to the difference of the second material layer polymer monomer kind and comprises polycondensation reaction, poly-ly adds reaction, Raolical polymerizable, anionic polymerisation or cationic polymerization.In the present embodiment, utilize polycondensation reaction to form polypropylene film, then biaxial tension is carried out to polypropylene film, form bidirectional stretching polypropylene film.
Step 3: using as on the second material layer that the binding agent uniform fold of adhesive layer is formed at thin polymer film;
Adhesive layer as described in step 3, the method be evenly distributed on by adhesive layer on the second material layer comprises spin-coating method, czochralski method, semar technique etc., but is not only confined to said method.In the present embodiment, adopt czochralski method by acrylic glue uniform fold on bidirectional stretching polypropylene film, formation adhesive layer.
Step 4: combined by the second material layer that adhesive layer adopts bonding, carbon nanotube paper to be formed the first material layer by the mode of pressing and thin polymer film is formed.
The invention provides a kind of curled electric actuator 100, it comprises the first electrode 11, second electrode 12 and described electro-active material 10.
Described first electrode 11 and the second electrode 12 interval arrange and are fixed on the surface of the first material layer 13.In the present embodiment, the first electrode 11 is electrically connected with the first material layer 13 with the second electrode 12, for being inputed to by foreign current in the first material layer 13.
In the present embodiment, described first electrode 11, second electrode 12 can be bar-shaped, strip, bulk or other two-dimentional and 3D shapes, and the shape in its cross section can be circular, square, trapezoidal, triangle, polygon or other is irregularly shaped.The material of this first electrode 11 and the second electrode 12 may be selected to be gold, silver, copper, copper alloy, platinum, platinum alloy, tellurium, steel, iron, zinc, tungsten, molybdenum, aluminium oxide, tin indium oxide, zinc oxide, electric conductive polymer, graphite or other conductive carbon materials, other can be used for the electric conducting material etc. of solid.
Preferably, shape is strip, and material is copper.
In the present embodiment, the material of described first electrode 11, second electrode 12 is copper, and shape is strip, and width is 1mm, and length is 18mm, and spacing is 70mm; Described first material layer 13 is carbon nanotube paper, and length is 70mm, and width is 18mm, and thickness is 7 μm; Described adhesive layer 14 is acrylic glue, and length is 70mm, and width is 18mm, and thickness is 5 μm; The polymer of described second material layer 15 is Biaxially oriented polypropylene, and length is 70mm, and width is 18mm, and thickness is 35 μm.
Described curled electric actuator 100 is when applying, and voltage is put on the two ends of the first material layer 13 of this curled electric actuator 100 by the first electrode 11 and the second electrode 12, electric current transmits by above-mentioned first material layer 13.Because the first material layer 13 thermal conductivity is high, and joule heating effect thus the temperature of the second material layer 15 is raised fast, heat spreads to whole electric actuator rapidly from the surrounding of described first material layer 13, because the thermal coefficient of expansion between the first material layer 13 from the second material layer 15 is different, thus the length making materials at two layers extend is inconsistent, and the first material layer 13 and the second material layer 15 are closely linked by adhesive layer, so can not relative sliding be produced by during thermal stretching, thermal coefficient of expansion again because of the first material layer 13 is little, and then cause this curled electric actuator 100 to bend to the first material layer 13 side.
In addition, supply voltage is put on this curled electric actuator 100 two ends by wire by the present embodiment, and measures the deformation degree of described curled electric actuator 100.
In the present embodiment, when not being energized, the initial bending angle of this curled electric actuator 100 is 21 °, and (radius of curvature is 0.06cm -1); As shown in Figure 3, apply 5V direct voltage to it, the time is after 10s, and its angle of bend is 389 °, and (radius of curvature is 1.03cm -1); Before and after energising, angle of bend difference is greater than 360 °, achieves curling and deformation.Compared to current electric actuator of the same type, its deformation nature is excellent especially, fast response time, and has flexibility, frivolous, and the short time such as to prepare on a large scale at the advantage.
The preparation method of curled electric actuator 100 of the present invention, comprises the following steps:
Step one: form one and form the first material layer by carbon nanotube paper;
Carbon nanotube paper as described in step one, the method preparing described carbon nanotube paper uses chemical vapour deposition technique carbon nano tube array grows, then use the method for direct membrane, from carbon nano pipe array, extract carbon nano-tube film out, finally carbon nano-tube film stacked in multi-layers is got up to obtain carbon nanotube paper.
Step 2: form second material layer be made up of the thin polymer film be polymerized;
Thin polymer film as described in step 2, the method forming described thin polymer film is divided into according to the difference of the second material layer polymer monomer kind and comprises polycondensation reaction, poly-ly adds reaction, Raolical polymerizable, anionic polymerisation or cationic polymerization.In the present embodiment, utilize polycondensation reaction to form polypropylene film, then biaxial tension is carried out to polypropylene film, form bidirectional stretching polypropylene film.
Step 3: using as on the second material layer that the binding agent uniform fold of adhesive layer is formed at thin polymer film;
Adhesive layer as described in step 3, the method be evenly distributed on by adhesive layer on the second material layer comprises spin-coating method, czochralski method, semar technique etc., but is not only confined to said method.In the present embodiment, adopt czochralski method by acrylic glue uniform fold on bidirectional stretching polypropylene film, formation adhesive layer.
Step 4: combined by the second material layer that adhesive layer adopts bonding, carbon nanotube paper to be formed the first material layer by the mode of pressing and thin polymer film is formed.
Step 5: with conducting resinl two electrodes are combined with carbon nanotube paper respectively and form curled electric actuator.
In addition, those skilled in the art also can do other change in spirit of the present invention, and certainly, these changes done according to the present invention's spirit, all should be included within the present invention's scope required for protection.

Claims (10)

1. an electro-active material, it is characterized in that: it comprises the first material layer, the second material layer and the adhesive layer between the first material layer and the second material layer, described first material layer, adhesive layer and the second material layer are arranged, and the first material layer is different from the thermal coefficient of expansion of the second material layer, described first material layer is carbon nanotube paper, and described second material layer is thin polymer film.
2. electro-active material according to claim 1, is characterized in that: described first material layer and the second material layer adopt the stacked setting of mode of bonding, pressing by adhesive layer; The thickness of described first material layer is 0.1 μm ~ 1mm, and the thickness of described second material layer is 1 μm ~ 5mm, and the thickness of described adhesive layer 14 is 1 μm ~ 0.5mm.
3. electro-active material according to claim 1, it is characterized in that: described carbon nanotube paper comprises the carbon nano-tube film of at least one deck, described carbon nano-tube film comprises multiple carbon nano-tube, described multiple carbon nano-tube is joined end to end by Van der Waals force, being axially arranged of preferred orient substantially in the same direction of described multiple carbon nano-tube; The binding agent of described adhesive layer adopts one or more the combination in optic-solidified adhesive, heat-curable glue, non-conductive solidification glue; Described second material layer is Biaxially oriented polypropylene, polypropylene, polyethylene, the combination of one or more in silicon rubber, fluorosioloxane rubber, polymethyl methacrylate, PETG, polyurethane, epoxy resin, polyethyl acrylate, butyl polyacrylate, polystyrene, polybutadiene and polyacrylonitrile.
4. electro-active material according to claim 1, is characterized in that: the thermal coefficient of expansion of described carbon nanotube paper is less than the thermal coefficient of expansion of described thin polymer film.
5. a preparation method for electro-active material, it comprises the following steps:
Step one: form one and form the first material layer by carbon nanotube paper;
Step 2: form second material layer be made up of the thin polymer film be polymerized;
Step 3: using as on the second material layer that the binding agent uniform fold of adhesive layer is formed at thin polymer film;
Step 4: combined by the second material layer that adhesive layer adopts bonding, carbon nanotube paper to be formed the first material layer by the mode of pressing and thin polymer film is formed.
6. the preparation method of a kind of electro-active material according to claim 5, it is characterized in that: the method forming described thin polymer film comprises polycondensation reaction, poly-ly adds reaction, Raolical polymerizable, anionic polymerisation and cationic polymerization, chooses corresponding method form described thin polymer film according to the difference of the second material layer polymer monomer kind.
7. the preparation method of a kind of electro-active material according to claim 5, is characterized in that: the method be evenly distributed on by adhesive layer on the second material layer comprises spin-coating method, czochralski method and semar technique.
8. a curled electric actuator, it is characterized in that: it comprises an employing claim 1 to 7 arbitrary described electro-active material, at least one first electrode and at least one second electrode, described at least one first electrode and at least one second electrode gap are arranged on described electro-active material, and are electrically connected with described electro-active material.
9. a kind of curled electric actuator according to claim 8, is characterized in that: when described first electrode and the second electrifying electrodes, and described curled electric actuator bends to the surface direction of carbon nanotube paper.
10. a kind of curled electric actuator according to claim 8, is characterized in that: described curled electric actuator realizes the coiled-type deformation that angle of bend is greater than 360 °.
CN201510701094.XA 2015-10-26 2015-10-26 Electro-active material and preparation method thereof and the actuator using the electro-active material Active CN105355776B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105803403A (en) * 2016-03-15 2016-07-27 东华大学 Electric actuating oxidized graphene/metal double-layer thin film and preparation method thereof
CN108493161A (en) * 2018-04-16 2018-09-04 上海集成电路研发中心有限公司 Semiconductor structure and forming method thereof
CN109088563A (en) * 2018-09-30 2018-12-25 中国地质大学(武汉) Carbon nano-tube fibre compound structure type electromagnetic actuators
CN110183704A (en) * 2019-04-11 2019-08-30 苏州斯坦得新材料有限公司 A kind of electrothermal drive film and the frequency switching based on the film

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CN101814577A (en) * 2009-02-24 2010-08-25 清华大学 Electrostrictive material and preparation method thereof as well as electrothermal type actuator
CN101840991A (en) * 2010-04-30 2010-09-22 清华大学 Electrical actuating structure and electrical actuating element
CN102201532A (en) * 2010-03-26 2011-09-28 清华大学 Electric actuating material and electric actuating element

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US20100033788A1 (en) * 2008-08-01 2010-02-11 University Of Florida Research Foundation, Inc. Micromirror and fabrication method for producing micromirror
CN101814577A (en) * 2009-02-24 2010-08-25 清华大学 Electrostrictive material and preparation method thereof as well as electrothermal type actuator
CN102201532A (en) * 2010-03-26 2011-09-28 清华大学 Electric actuating material and electric actuating element
CN101840991A (en) * 2010-04-30 2010-09-22 清华大学 Electrical actuating structure and electrical actuating element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105803403A (en) * 2016-03-15 2016-07-27 东华大学 Electric actuating oxidized graphene/metal double-layer thin film and preparation method thereof
CN105803403B (en) * 2016-03-15 2018-05-15 东华大学 A kind of electric actuation graphene oxide/metal bi film and preparation method thereof
CN108493161A (en) * 2018-04-16 2018-09-04 上海集成电路研发中心有限公司 Semiconductor structure and forming method thereof
WO2019200809A1 (en) * 2018-04-16 2019-10-24 上海集成电路研发中心有限公司 Semiconductor structure and method for forming same
CN109088563A (en) * 2018-09-30 2018-12-25 中国地质大学(武汉) Carbon nano-tube fibre compound structure type electromagnetic actuators
CN110183704A (en) * 2019-04-11 2019-08-30 苏州斯坦得新材料有限公司 A kind of electrothermal drive film and the frequency switching based on the film

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