CN105352514B - A kind of the alignment deviation correcting device and method of the demarcation of space navigation seeker ground - Google Patents

A kind of the alignment deviation correcting device and method of the demarcation of space navigation seeker ground Download PDF

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CN105352514B
CN105352514B CN201510757854.9A CN201510757854A CN105352514B CN 105352514 B CN105352514 B CN 105352514B CN 201510757854 A CN201510757854 A CN 201510757854A CN 105352514 B CN105352514 B CN 105352514B
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ccd camera
imaging
measurement
reflection
optical measurement
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CN105352514A (en
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孙书坤
邵飞
史钰峰
胡慧君
纪春恒
连剑
宋娟
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CHINA GREAT WALL INDUSTRY Corp.
513 Research Institute of 5th Academy of CASC
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/24Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 specially adapted for cosmonautical navigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass

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  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Astronomy & Astrophysics (AREA)
  • Automation & Control Theory (AREA)
  • Measurement Of Radiation (AREA)

Abstract

The invention discloses the alignment deviation correcting device and method of a kind of space navigation seeker ground demarcation.The accurate alignment between x-ray source and detector can be realized using the present invention, realizes that parallel alignment error is less than 1mm less than 0.02 °, center alignment error.The present invention includes front truck optical measurement platform and rear car optical measurement platform, detector is fixedly mounted on front truck optical measurement platform, x-ray source is fixedly mounted on rear car optical measurement platform, before, before rear car optical measurement platform is located at vacuum bunch passage respectively, both ends afterwards, depth of parallelism alignment is carried out first, pass through the posture of car optical measurement platform before or after regulation, so that imaging center of the imaging of laser facula positioned at measurement of paralleism CCD camera, then height is carried out, horizontal displacement is aligned, pass through the posture of car optical measurement platform before or after regulation, so that imaging center of the imaging of laser facula positioned at displacement measurement CCD camera, the final alignment for realizing x-ray source and detector.

Description

A kind of the alignment deviation correcting device and method of the demarcation of space navigation seeker ground
Technical field
The present invention relates to space probe technical field, and in particular to a kind of alignment of space navigation seeker ground demarcation Deviation correcting device and method.
Background technology
Space navigation detector is typically necessary first to be completed to demarcate on ground, but the country is also visited without for space navigation at present Survey device and do the specialized agency demarcated and experimental rig, still in the exploratory stage.
513 rely on the generation of general assembly two navigation key special subjects problem " pulsar navigation ground test system ", and development completes Largest domestic, function are most complete, posture adjustment precision highest large-scale vacuum testing equipment --- vacuum bunch passage.Vacuum bunch leads to Road external diameter is up to 2.1 meters, 17 meters of total length, to realize that alignment correction provides vacuum working environment in high precision on the ground of detector.
Current detector and laser alignment method or apparatus calibration accuracy are relatively low, are not suitable for space navigation detector Calibration correction.
The content of the invention
In view of this, the invention provides a kind of alignment deviation correcting device of space navigation seeker ground demarcation, Neng Goushi Existing accurate alignment between x-ray source and detector, realize that parallel alignment error is less than less than 0.02 °, center alignment error 1mm, the demarcation particularly suitable for field range is small, alignment precision is high space navigation detector.
The alignment deviation correcting device of the space navigation seeker ground demarcation of the present invention, including:Front truck optical measurement platform and Rear car optical measurement platform, ancillary equipment are x-ray source, detector and vacuum bunch passage;
Wherein, forward and backward car optical measurement platform is located at the forward and backward both ends of vacuum bunch passage respectively, and detector fixes peace On front truck optical measurement platform, x-ray source is fixedly mounted on rear car optical measurement platform;Forward and backward car optical measurement is put down Servo control mechanism is mounted on platform;
Wherein, following measuring instrument is also installed with front truck optical measurement platform:Displacement measurement CCD camera, first Half-reflection and half-transmission level crossing and the first imaging screen frosted glass plate;Wherein, the imaging plane of displacement measurement CCD camera and detector Imaging plane is generally aligned in the same plane, and central point is equal relative to the height of measuring table;First imaging screen frosted glass plate position In on the focal plane of displacement measurement CCD camera;First half-reflection and half-transmission level crossing is located at the first one-tenth respectively with displacement measurement CCD camera As the both sides of screen frosted glass plate;First half-reflection and half-transmission level crossing minute surface is parallel with the first imaging screen frosted glass plate minute surface;
Following measuring instrument is also installed with rear car optical measurement platform:Laser, the second half-reflection and half-transmission level crossing, Second imaging screen frosted glass plate and measurement of paralleism CCD camera;Wherein, the exit facet of the exit facet of laser and x-ray source It is generally aligned in the same plane, and central point is equal relative to the height of measuring table;The distance between laser and x-ray source and displacement It is equal with the distance between detector to measure CCD camera;Second half-reflection and half-transmission level crossing is located in the light path of laser, and with swashing The light path angle at 45 ° of light device;Measurement of paralleism CCD camera be located at laser be radiated at it is once anti-on the second half-reflection and half-transmission level crossing Penetrate on the reverse extending line of light;Second imaging screen frosted glass plate is located on the focal plane of measurement of paralleism CCD camera.
Further, the first auxiliary lamp is also installed with front truck optical measurement platform, the first auxiliary lamp is located at displacement Measure between CCD camera and the first imaging screen frosted glass plate, avoid the imaging optical path of displacement measurement CCD camera, be radiated at the On one imaging screen frosted glass plate;The second auxiliary lamp is also installed with rear car optical measurement platform, the second auxiliary lamp is located at Between measurement of paralleism CCD camera and the second imaging screen frosted glass plate, the imaging optical path of measurement of paralleism CCD camera is avoided, It is radiated on the second imaging screen frosted glass plate.
The alignment method for correcting error of the space navigation seeker ground demarcation of the present invention, comprises the following steps:
Step 1, the hatch door of vacuum bunch passage is opened, opens laser, measurement of paralleism CCD camera and displacement measurement CCD camera;The laser beam of laser transmitting reaches the first half-reflection and half-transmission level crossing through the second half-reflection and half-transmission level crossing, wherein, swash The intersection point of light beam and the second half-reflection and half-transmission level crossing is defined as B points, the intersection point definition of laser beam and the first half-reflection and half-transmission level crossing For C points, on a part of light transmission to the first imaging screen frosted glass plate of C points, taken pictures imaging by displacement measurement CCD camera, separately A part is reflexed on the second half-reflection and half-transmission level crossing, and reflexes to the second imaging screen hair glass through the second half-reflection and half-transmission level crossing On glass piece, taken pictures imaging by measurement of paralleism CCD camera;Wherein, by the friendship of laser reflection light and the second half-reflection and half-transmission level crossing Point is defined as D points, and the intersection point of laser reflection light and the second imaging screen frosted glass plate is defined as into E points;
Step 2, coarse adjustment:
Step 2.1, displacement and the appearance of front truck optical measurement platform or rear car optical measurement platform are adjusted by servo control mechanism State so that the luminous point D on the second half-reflection and half-transmission level crossing overlaps with luminous point B range estimations;
Step 2.2, depth of parallelism correction is carried out:Imaging of the E points in measurement of paralleism CCD camera is observed whether positioned at parallel The imaging center of degree measurement CCD camera, if it is, the depth of parallelism is aligned, is transferred to step 2.3, otherwise, is adjusted by servo control mechanism Front truck or rear car optical measurement platform so that imaging of the E points in measurement of paralleism CCD camera is located at measurement of paralleism CCD phases The imaging center of machine, complete the depth of parallelism and correct, be transferred to step 2.3;
Step 2.3, carry out height and horizontal displacement is corrected:Hot spot on the imaging screen frosted glass plate of observation first is in displacement The imaging center whether imaging in CCD camera is located at displacement measurement CCD camera is measured, if it is, height and horizontal displacement Alignment, is transferred to step 3, otherwise, front truck or rear car optical measurement platform is adjusted by servo control mechanism so that the first imaging screen hair Imaging of the hot spot in displacement measurement CCD camera on sheet glass completes height positioned at the imaging center of displacement measurement CCD camera It is aligned with horizontal displacement, is transferred to step 3;
Step 3, the hatch door of vacuum bunch passage is closed, is vacuumized, when the vacuum of vacuum bunch passage reaches true After reciprocal of duty cycle requirement, depth of parallelism correction is carried out first so that the laser facula of measurement of paralleism CCD camera shooting is located in its imaging The heart;Then carry out height and horizontal displacement is corrected so that the laser facula of displacement measurement CCD camera shooting is located in its imaging The heart, complete the alignment between detector and x-ray source.
Beneficial effect:
(1) device can realize the accurate alignment of detector and x-ray source, and depth of parallelism alignment error is less than 0.02 °, height Degree alignment error is less than 1mm, meets that space navigation detector demarcates demand;
(2) device operation is flexible, and even detector and x-ray source occur deviation because of change in location, also can be certainly Dynamic or manual correction is returned;
(3) device can also be provided for the demarcation of focus type detector, astronomical observation Satellite Payloads and accurately regarded Field alignment function.
Brief description of the drawings
Fig. 1 is the optical schematic diagram of present invention alignment deviation correcting device.
Fig. 2 is depth of parallelism alignment correction schematic diagram.
Fig. 3 is height and horizontal displacement alignment correction schematic diagram.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The invention provides a kind of alignment deviation correcting device of space navigation seeker ground demarcation, as shown in figure 1, including before Car optical measurement platform and rear car optical measurement platform, wherein, detector is fixedly mounted on front truck optical measurement platform, and X is penetrated Line source is fixedly mounted on rear car optical measurement platform, forward and backward car optical measurement platform respectively be located at vacuum bunch passage before, Both ends afterwards, equipped with displacement, posture servo control mechanism on measuring table, horizontal translation, the lift in height of measuring table can be realized, and It can realize rotatable along its 3-dimensional reference axis.Forward and backward car optical measurement platform is built in respective rigid base respectively, this Two rigid bases form rigidity and connected again with the benchmark flat board (i.e. the installation flat board of detector and x-ray source) of forward and backward car respectively Connect.Therefore, the relative position change of forward and backward car benchmark flat board, it becomes possible to warp and their rigidly connected forward and backward car optical measurement Observe and on platform, and then reflect the alignment case of detector and x-ray source.
Wherein, following measuring instrument is fixedly mounted on front truck optical measurement platform:It is displacement measurement CCD camera, the first half anti- Semitransparent mirror 60mm × 60mm × 2mm, first imaging screen frosted glass plate 60mm × 60mm × 2mm and the first auxiliary lamp.Its In, at grade, and central point is relative to front truck for the imaging plane of displacement measurement CCD camera and the imaging plane of detector The height of optical measurement platform is equal.The imaging that first imaging screen frosted glass plate is centrally located at displacement measurement CCD camera is burnt On point, minute surface and the central axis of displacement measurement CCD camera are perpendicular.First half-reflection and half-transmission level crossing and displacement measurement CCD phases Machine is respectively positioned at the both sides of the first imaging screen frosted glass plate;First half-reflection and half-transmission level crossing minute surface and the first imaging screen hair glass Glass piece minute surface is parallel, and two minute surface centre-heights are equal;First half-reflection and half-transmission level crossing can be attached to the first imaging screen hair glass On glass piece, the brightness uniformity of laser facula can be caused using frosted glass plate, the measurement error for avoiding spot intensity inequality from bringing. First auxiliary lamp is located between displacement measurement CCD camera and the first imaging screen frosted glass plate, avoids displacement measurement CCD camera Imaging optical path, it is radiated on the first imaging screen frosted glass plate, for providing fill-in light, avoids light excessively secretly according into displacement measurement CCD camera image blur.
Following measuring instrument is fixedly mounted on rear car optical measurement platform:High precision laser (emergent light diameter 20mm), Second half-reflection and half-transmission level crossing 100mm × 100mm × 2mm, second imaging screen frosted glass plate 110mm × 100mm × 2mm, put down Row degree measures CCD camera and the second auxiliary lamp.Wherein, the exit facet of high precision laser and the exit facet of x-ray source are same In plane, and central point is equal relative to the height of rear car optical measurement platform, also, high precision laser and x-ray source it Between distance it is equal with the distance between detector with displacement measurement CCD camera, therefore, pair between x-ray source and detector Condition of agreeing to do a favour is equal to the alignment case between high precision laser and displacement measurement CCD camera, can be swashed by adjusting high accuracy Alignment between light device and displacement measurement CCD camera, realize the alignment of x-ray source and detector.
Wherein, it can realize that laser facula is small as far as possible from high precision laser, reduce because hot spot diffusion zone comes Systematic error.
Wherein, the second half-reflection and half-transmission level crossing is located in the light path of high precision laser, and with the light of high precision laser Road angle at 45 °;Measurement of paralleism CCD camera is located at one that high precision laser laser is radiated on the second half-reflection and half-transmission level crossing On the reverse extending line of secondary reflection light;Second imaging screen frosted glass plate is located at the second half-reflection and half-transmission level crossing and surveyed with the depth of parallelism Between measuring CCD camera, and the second imaging screen frosted glass plate is centrally located in the focus of measurement of paralleism CCD camera, minute surface It is perpendicular with the central axis of measurement of paralleism CCD camera.Second auxiliary lamp is located at measurement of paralleism CCD camera and the second imaging Between screen frosted glass plate, the imaging optical path of measurement of paralleism CCD camera is avoided, is radiated at the second imaging screen frosted glass plate On, for providing fill-in light, avoid light excessively secretly according into measurement of paralleism CCD camera image blur.
Optical measurement principle is as follows:If x-ray source is in alignment, the alignment correction dress of the present invention with detector As shown in figure 1, high precision laser launches laser beam from the injection of A points, the B points through the second half-reflection and half-transmission level crossing arrive the light path put Up to the C points of the first half-reflection and half-transmission level crossing, on a part of light transmission to the first imaging screen frosted glass plate of C points, surveyed by displacement Amount CCD camera is taken pictures imaging, and another part reflexes to the D points (now, B points and the coincidence of D points) of the second half-reflection and half-transmission level crossing, and The E points of the second imaging screen frosted glass plate are reflexed to through the second half-reflection and half-transmission level crossing, are taken pictures into by measurement of paralleism CCD camera Picture.Now, the height between high precision laser and displacement measurement CCD camera, horizontal displacement alignment case (i.e. x-ray source with Height, horizontal displacement alignment case between detector) shot by displacement measurement CCD camera, the first imaging screen frosted glass plate On hot spot be located at the imaging center of displacement measurement CCD camera;It is parallel between high precision laser and displacement measurement CCD camera Degree alignment case (depth of parallelism alignment case i.e. between x-ray source and detector) is shot, second by measurement of paralleism CCD camera Hot spot E points on imaging screen frosted glass plate are located at the imaging center of measurement of paralleism CCD camera.What two CCD cameras were shot Hot spot, handled through spot center real time implementation processing and Image binarizing algorithm, imaging is on the computer screen.
If deviation between x-ray source and detector be present, alignment correction is carried out to it, process is as follows:
1) depth of parallelism alignment correction process:
If as shown in Fig. 2 only existing parallel misalignment between x-ray source and detector, high precision laser is sent Laser beam after A points, B points reach C points, the D points of the second half-reflection and half-transmission level crossing are reflexed to through the first half-reflection and half-transmission level crossing Locate (now, D points and B points are misaligned), then the E of the second imaging screen frosted glass plate is reflexed to through the second half-reflection and half-transmission level crossing Point, taken pictures and be sent on computer by measurement of paralleism CCD camera.Due to the depth of parallelism between x-ray source and detector be present Deviation, E points are imaged the imaging center that can deviate measurement of paralleism CCD camera, as shown in the figure (d) in Fig. 2, the measurement of paralleism The hot spot that CCD camera collects can deviate it and be imaged cross hairs center.Now, one of them in forward and backward car optical measurement platform Remain stationary as, adjust another posture so that E points are located at the cross hairs center of measurement of paralleism CCD camera imaging.Consider Detector volume, weight are larger, can remain stationary as front truck optical measurement platform, adjust rear car optical measurement platform, make its edge Until the imaging of E points returns to the cross hairs center of measurement of paralleism CCD camera imaging, completion depth of parallelism alignment is entangled for vertical axis rotation Partially.
2) height, horizontal displacement alignment correction process:
If as shown in figure 3, only existing height and horizontal displacement deviation between x-ray source and detector, high accuracy swashs The laser beam that light device is sent is transmitted through the first imaging screen hair glass after A points, B points reach C points through the first half-reflection and half-transmission level crossing On glass piece, taken pictures by displacement measurement CCD camera and be sent to computer.When x-ray source and detector height and horizontal displacement not During alignment, the imaging center of the hot spot meeting Departure displacement measurement CCD camera on the first imaging screen frosted glass plate, in Fig. 3 Scheme shown in (e), the hot spot that displacement measurement CCD camera collects can deviate it and be imaged cross hairs center.Now, forward and backward car optics One of them in measuring table remains stationary as, and adjusts another height and horizontal displacement so that the first imaging screen frosted glass Hot spot on piece is located at the imaging center of displacement measurement CCD camera.For example, can remain stationary as rear car optical measurement platform, Front truck optical measurement platform is adjusted, it is moved up and down along vertical axis or level moves left and right until imaging is returned in cross hairs The heart, complete height alignment correction.
3) highly with horizontal displacement, the amendment of depth of parallelism composition error
Generally, parallelism error and height and horizontal displacement error between x-ray source and detector simultaneously be present, Displacement measurement CCD camera can be all caused in view of the relative depth of parallelism between forward and backward car optical measurement platform and relative translation motion The movement of middle hot spot, therefore, parallel misalignment amendment, the injustice between it have modified forward and backward car optical measurement platform is carried out first In the case of row, what the position relative to groove center of hot spot was just directly reflected in the imaging of displacement measurement CCD camera is front and rear The pure height of car optical measurement platform and the deviation of horizontal displacement.Then corrected altitude and horizontal displacement deviation again so that X is penetrated Line source is aligned with detector.
When the specific x-ray source of progress is directed at correction operation with seeker ground, can carry out in accordance with the following steps:
Step 1, the hatch door of vacuum bunch passage is opened, detector, x-ray source and each measuring instrument will be mounted with Front truck optical measurement platform and rear car optical measurement platform are respectively placed in the forward and backward both ends of vacuum bunch passage, adjust front truck Optical measurement platform and rear car optical measurement platform so that reflected light of the laser beam that high precision laser is sent through C points is Luminous point D on two half-reflection and half-transmission level crossings overlaps with luminous point B range estimations, completes the coarse adjustment of the depth of parallelism between detector, x-ray source, Then proceed to adjust front truck or rear car optical measurement platform so that the hot spot E points on the second imaging screen frosted glass plate are positioned at flat Row degree measures the imaging center of CCD camera, then proceedes to adjust front truck or rear car optical measurement platform so that the first imaging screen Hot spot on frosted glass plate is located at the imaging center of displacement measurement CCD camera.
Step 2, the hatch door of vacuum bunch passage is closed, is vacuumized, vacuum bunch passage reaches vacuum level requirements Afterwards, by measurement of paralleism CCD camera and displacement measurement CCD camera observe laser facula that it each shoots whether positioned at its into Inconocenter, if laser facula deviates its imaging center, front truck or rear car optical measurement platform are adjusted, by first carrying out the depth of parallelism Drift correction, the rear mode for carrying out height and horizontal displacement drift correction, complete the alignment of detector, x-ray source.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention. Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's Within protection domain.

Claims (3)

  1. A kind of 1. alignment deviation correcting device of space navigation seeker ground demarcation, it is characterised in that including:Front truck optical measurement is put down Platform and rear car optical measurement platform, ancillary equipment are x-ray source, detector and vacuum bunch passage;
    Wherein, forward and backward car optical measurement platform is located at the forward and backward both ends of vacuum bunch passage respectively, and detector is fixedly mounted on On front truck optical measurement platform, x-ray source is fixedly mounted on rear car optical measurement platform;On forward and backward car optical measurement platform It is mounted on servo control mechanism;
    Wherein, following measuring instrument is also installed with front truck optical measurement platform:It is displacement measurement CCD camera, the first half anti- Semitransparent mirror and the first imaging screen frosted glass plate;Wherein, the imaging of the imaging plane and detector of displacement measurement CCD camera Plane is generally aligned in the same plane, and central point is equal relative to the height of measuring table;First imaging screen frosted glass plate is located at position On the focal plane of shift measurement CCD camera;First half-reflection and half-transmission level crossing is located at the first imaging screen respectively with displacement measurement CCD camera The both sides of curtain frosted glass plate;First half-reflection and half-transmission level crossing minute surface is parallel with the first imaging screen frosted glass plate minute surface;
    Following measuring instrument is also installed with rear car optical measurement platform:Laser, the second half-reflection and half-transmission level crossing, second It is imaged screen frosted glass plate and measurement of paralleism CCD camera;Wherein, the exit facet of laser and the exit facet of x-ray source are located at Same plane, and central point is equal relative to the height of measuring table;The distance between laser and x-ray source and displacement measurement CCD camera is equal with the distance between detector;Second half-reflection and half-transmission level crossing is located in the light path of laser, and and laser Light path angle at 45 °;Measurement of paralleism CCD camera is located at the first reflection that laser is radiated on the second half-reflection and half-transmission level crossing On the reverse extending line of light;Second imaging screen frosted glass plate is located on the focal plane of measurement of paralleism CCD camera.
  2. 2. the alignment deviation correcting device of space navigation seeker ground demarcation as claimed in claim 1, it is characterised in that front truck light Learn and be also installed with the first auxiliary lamp on measuring table, the first auxiliary lamp is located at displacement measurement CCD camera and the first imaging screen Between curtain frosted glass plate, the imaging optical path of displacement measurement CCD camera is avoided, is radiated on the first imaging screen frosted glass plate;Afterwards The second auxiliary lamp is also installed with car optical measurement platform, the second auxiliary lamp is located at measurement of paralleism CCD camera and second It is imaged between screen frosted glass plate, avoids the imaging optical path of measurement of paralleism CCD camera, be radiated at the second imaging screen frosted glass On piece.
  3. A kind of 3. alignment of alignment deviation correcting device using space navigation seeker ground as claimed in claim 1 or 2 demarcation Method for correcting error, it is characterised in that comprise the following steps:
    Step 1, the hatch door of vacuum bunch passage is opened, opens laser, measurement of paralleism CCD camera and displacement measurement CCD phases Machine;Laser transmitting laser beam through the second half-reflection and half-transmission level crossing reach the first half-reflection and half-transmission level crossing, wherein, laser beam with The intersection point of second half-reflection and half-transmission level crossing is defined as B points, and the intersection point of laser beam and the first half-reflection and half-transmission level crossing is defined as C points, C On a part of light transmission selected to the first imaging screen frosted glass plate, taken pictures imaging by displacement measurement CCD camera, another part is anti- It is mapped on the second half-reflection and half-transmission level crossing, and is reflexed to through the second half-reflection and half-transmission level crossing on the second imaging screen frosted glass plate, Taken pictures imaging by measurement of paralleism CCD camera;Wherein, the intersection point of laser reflection light and the second half-reflection and half-transmission level crossing is defined as D points, the intersection point of laser reflection light and the second imaging screen frosted glass plate is defined as E points;
    Step 2, coarse adjustment:
    Step 2.1, displacement and the posture of front truck optical measurement platform or rear car optical measurement platform are adjusted by servo control mechanism, is made The luminous point D obtained on the second half-reflection and half-transmission level crossing overlaps with luminous point B range estimations;
    Step 2.2, depth of parallelism correction is carried out:Observe whether imaging of the E points in measurement of paralleism CCD camera surveys positioned at the depth of parallelism The imaging center of CCD camera is measured, if it is, the depth of parallelism is aligned, step 2.3 is transferred to, otherwise, front truck is adjusted by servo control mechanism Or rear car optical measurement platform so that imaging of the E points in measurement of paralleism CCD camera is positioned at measurement of paralleism CCD camera Imaging center, complete the depth of parallelism and correct, be transferred to step 2.3;
    Step 2.3, carry out height and horizontal displacement is corrected:Hot spot on the imaging screen frosted glass plate of observation first is in displacement measurement Whether the imaging in CCD camera is located at the imaging center of displacement measurement CCD camera, if it is, height and horizontal displacement alignment, Step 3 is transferred to, otherwise, front truck or rear car optical measurement platform are adjusted by servo control mechanism so that the first imaging screen frosted glass Imaging of the hot spot in displacement measurement CCD camera on piece completes height and water positioned at the imaging center of displacement measurement CCD camera Prosposition moves alignment, is transferred to step 3;
    Step 3, the hatch door of vacuum bunch passage is closed, is vacuumized, when the vacuum of vacuum bunch passage reaches vacuum After it is required that, depth of parallelism correction is carried out first so that the laser facula of measurement of paralleism CCD camera shooting is located at its imaging center; Then carry out height and horizontal displacement is corrected so that the laser facula of displacement measurement CCD camera shooting is located at its imaging center, complete Into the alignment between detector and x-ray source.
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