CN105349959B - A kind of PVD boards and its touch panel - Google Patents
A kind of PVD boards and its touch panel Download PDFInfo
- Publication number
- CN105349959B CN105349959B CN201510634029.XA CN201510634029A CN105349959B CN 105349959 B CN105349959 B CN 105349959B CN 201510634029 A CN201510634029 A CN 201510634029A CN 105349959 B CN105349959 B CN 105349959B
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- CN
- China
- Prior art keywords
- touch panel
- horizontal bar
- extension
- fixed part
- folder portion
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Abstract
The invention discloses a kind of PVD boards and its touch panels.The touch panel is used for PVD boards, PVD boards include the end to end horizontal bar of at least four, an at least touch panel is arranged on a horizontal bar of PVD boards, and horizontal bar by touch panel surround and clamp the marginal portion of the glass substrate of plating metal film, and touch panel includes：Fixed part, for being relatively fixed with horizontal bar；Folder portion is grabbed, is integrally formed with fixed part, one side extension of self-fixed department grabs folder portion for pressed glass substrate, and the surface for grabbing folder portion is equipped with texturing.In the above manner, the present invention can prevent metal film from coming off, product is avoided to be contaminated, improve product yield.
Description
Technical field
The present invention relates to technical field of physical vapor deposition, more particularly to a kind of PVD boards and its touch panel.
Background technology
In PVD (Physical Vapor Deposition, physical vapour deposition (PVD)) field, as target utilization carries
Rise, metal fine aluminium process 1 reach the standard grade and the improvement of special-shaped target, not only operation cost is greatly reduced, but also maintenance period is big
Extend to width, indirectly the lifting means rate of transferring and output.
At present, the part life in process chamber or reative cell has not been able to match so long maintenance period.For example, fine aluminium
Two Al targets can be finished and just maintain by the process chamber reached the standard grade, therefore the touch panel (Touch Plate) on pallet is necessary
Bear the bombardment that two Al targets have 10000kw/hr altogether.The touch panel of the prior art can not bear banging for more than 10000kw/hr
It hits, plated film is caused to come off, product is caused to be contaminated, seriously affect product yield.
Invention content
An embodiment of the present invention provides a kind of PVD boards and its touch panel, to solve the above problems.
The present invention provides a kind of touch panel, and touch panel is used for PVD boards, and PVD boards join end to end including at least four
Horizontal bar, an at least touch panel is arranged on a horizontal bar of PVD boards, and horizontal bar is surround by touch panel and clamped to be plated
The marginal portion of the glass substrate of metal film, touch panel include：
Fixed part, for being relatively fixed with horizontal bar；
Folder portion to be grabbed, is integrally formed with fixed part, one side extension of self-fixed department grabs folder portion for pressed glass substrate, and
The surface for grabbing folder portion is equipped with texturing.
Wherein, the material of touch panel is plastics, and the material of horizontal bar is metal.
Wherein, fixed part includes at least two screw holes and touch panel is fixed on by corresponding screw, screw by screw hole
On corresponding horizontal bar.
Wherein, fixed part is in hierarchic structure, and including the first screw hole and the second screw hole, the first screw hole is set to the first ladder
On face, the second screw hole is set on the second cascaded surface.
Wherein, it grabs folder portion and includes outwardly extending first extension in one side of self-fixed department and from the first extension to extension
The second extension stretched, the outer surface of the second extension are both provided with texturing, and the outer surface part of the first extension is provided with quarter
Flower.
The present invention also provides a kind of PVD boards, including touch panel and the end to end horizontal bar of at least four, at least one
Touch panel is arranged on a horizontal bar of PVD boards, and horizontal bar is surround by touch panel and clamps the glass of plating metal film
The marginal portion of substrate, touch panel include：
Fixed part, for being relatively fixed with horizontal bar；
Folder portion to be grabbed, is integrally formed with fixed part, one side extension of self-fixed department grabs folder portion for pressed glass substrate, and
The surface for grabbing folder portion is equipped with texturing.
Wherein, the material of touch panel is plastics, and the material of horizontal bar is metal.
Wherein, fixed part includes at least two screw holes and touch panel is fixed on by corresponding screw, screw by screw hole
On corresponding horizontal bar.
Wherein, fixed part is in hierarchic structure, and including the first screw hole and the second screw hole, the first screw hole is set to the first ladder
On face, the second screw hole is set on the second cascaded surface.
Wherein, it grabs folder portion and includes outwardly extending first extension in one side of self-fixed department and from the first extension to extension
The second extension stretched, the outer surface of the second extension are both provided with texturing, and the outer surface part of the first extension is provided with quarter
Flower.
Through the above scheme, the beneficial effects of the invention are as follows：The present invention's grabs folder portion for pressed glass substrate, and grab
The surface of folder portion is equipped with texturing, and increase grabs folder portion and the adhesive ability of the metal film of glass substrate is substantially improved, and can prevent gold
Belong to film to come off, product is avoided to be contaminated, improve product yield.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for
For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.Wherein：
Fig. 1 is the positive structure diagram of touch panel of first embodiment of the invention；
Fig. 2 is the structure diagram of touch panel shown in Fig. 1 and horizontal bar；
Fig. 3 is the structure diagram of the touch panel back side shown in Fig. 1；
Fig. 4 is the structure diagram of the PVD boards of first embodiment of the invention.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment rather than whole embodiments of the present invention.Based on this
Embodiment in invention, those of ordinary skill in the art are obtained every other under the premise of performing creative labour is not made
Embodiment shall fall within the protection scope of the present invention.
Fig. 1 is referred to, Fig. 1 is the positive structure diagram of touch panel of first embodiment of the invention.The present embodiment institute
The touch panel 10 of announcement is applied on PVD boards, as shown in Figure 1, the touch panel 10 includes：Fixed part 11 and grab folder portion
12.Preferably, folder portion 12 is grabbed to be integrally formed with fixed part 11.
In the present embodiment, one side extension of 12 self-fixed department 11 of folder portion is grabbed, is prolonged as grabbed folder portion 12 in Fig. 1 along D directions
It stretches.Glass substrate 20 of the folder portion 12 for pressed plating metal film is grabbed, as shown in Fig. 2, touch panel 10 surround and clamps glass
The marginal portion of substrate 20, i.e. touch panel 10 are surround by grabbing folder portion 12 and clamp the marginal portion of glass substrate 20.
Optionally, PVD boards are additionally provided with clamping part 31, grab folder portion 12 and clamp plating metal film jointly with clamping part 31
The marginal portion of glass substrate 20.
Wherein, the surface for grabbing folder portion 12 is equipped with texturing 13, and texturing 13 are preferably strip, in other embodiments, ability
Texturing 13 can also be set as other shapes by the technical staff in domain.
As shown in Fig. 2, fixed part 11 is used to be relatively fixed with horizontal bar 30 (innermask).With reference to shown in Fig. 1, wherein solid
Determine portion 11 and include at least two screw holes 111,112 and corresponding screw 113,114, screw 113 is by screw hole 111 by contact surface
Plate 10 is fixed on corresponding horizontal bar 30, and touch panel 10 is fixed on corresponding horizontal bar 30 by screw 114 by screw hole 112.
Preferably, the material of touch panel 10 is plastics, and the material of horizontal bar 30 is metal.Wherein, the material of horizontal bar 30 is
Aluminium alloy.Since the material of 4 horizontal bars 30 is metal, 4 horizontal bars 30 do not allow to be in direct contact 20,4 horizontal strokes of glass substrate
Stick 30 contacts glass substrate 20 by touch panel 10, to clamp glass substrate 20.
Preferably, fixed part 11 is in hierarchic structure, including the first cascaded surface 115 and the second cascaded surface 116；Fixed part 11
Further comprise the first screw hole and the second screw hole, i.e. the first screw hole is screw hole 111, and the second screw hole is screw hole 112, the first screw hole
111 are set on the first cascaded surface 115, and the second screw hole 112 is set on the second cascaded surface 116, and screw 113 passes through first
Touch panel 10 is fixed on corresponding horizontal bar 30 by screw hole 111, and screw 114 is consolidated touch panel 10 by the second screw hole 112
Due on corresponding horizontal bar 30.
Preferably, folder portion 12 is grabbed to include outwardly extending first extension 121 in one side of self-fixed department 11 and from first prolong
121 outwardly extending second extension 122 of extending portion, i.e. the first extension 121 extend for one side of self-fixed department 1 toward D directions, the
Two extensions 122 extend for the first extension 121 toward D directions.The outer surface of second extension 122 is both provided with texturing 13, the
The outer surface part of one extension 121 is provided with texturing 13, as shown in figures 1 and 3.
Wherein, folder portion 12 is grabbed for pressed glass substrate 20, that is, grabs the 122 pressed glass substrate of the second extension of folder portion 12
20, since the outer surface of the second extension 122 is both provided with texturing 13, metal-coated membrane is carried out in glass substrate 20 (figure does not regard)
When, the adhesive ability of metal film is substantially improved in the second extension 122 for grabbing folder portion 12, compared with the touch panel of the prior art
Compared with the second extension 122 for grabbing folder portion 12 increases one times or more to the adhesive ability of metal film, can bear 10000kw/hr
Bombardment, prevent the metal film for grabbing folder portion 12 from coming off, product avoided to be contaminated, improve product yield.
The present invention also provides a kind of PVD boards, as shown in figure 4, the revealed PVD boards of the present embodiment include touch panel
10 and the end to end horizontal bar 30 of at least four, the revealed touch panel 10 of the present embodiment and horizontal bar 30 are above-described embodiment
Described touch panel 10 and horizontal bar 30.The PVD boards on glass substrate 20 for plating layer of metal film, in metal-coated membrane
When glass substrate 20 be fixed on PVD boards.Wherein, the sectional view of the B area in Fig. 4 is shown in above-mentioned Fig. 2.
PVD boards preferably include 4 horizontal bars, 30,4 horizontal bars 30 and join end to end to form one for clamping glass substrate 20
Region A, glass substrate 20 is fixed in the A of region.Preferably, the material of touch panel 10 is plastics, and the material of horizontal bar 30 is
Metal.Since the material of 4 horizontal bars 30 is metal, 4 horizontal bars 30 do not allow to be in direct contact 20,4 horizontal bars of glass substrate
30 contact glass substrate 20 by touch panel 10, to clamp glass substrate 20.Wherein, the material of horizontal bar 30 is aluminium alloy.
Wherein, 4 horizontal bars 30 by touch panel 10 surround and clamp the edge part of the glass substrate 20 of plating metal film
Point.Preferably, touch panel 10 is arranged on horizontal bar 30 on the side of glass substrate 20, the plane where touch panel 10 with
Plane where glass substrate 20 is parallel.
As shown in Figure 1, the touch panel 10 includes：Fixed part 11 and grab folder portion 12.Preferably, folder portion 12 and fixed part are grabbed
11 are integrally formed.When glass substrate 20 carries out metal-coated membrane, the folder portion 12 of grabbing of touch panel 10 also can adhesion metal film.
In the present embodiment, one side extension of 12 self-fixed department 11 of folder portion is grabbed, is prolonged as grabbed folder portion 12 in Fig. 1 along D directions
It stretches.Folder portion 12 is grabbed for pressed glass substrate 20, as shown in Fig. 2, touch panel 10 surround by grabbing folder portion 12 and clamps glass
The marginal portion of substrate 20.
Optionally, PVD boards are additionally provided with clamping part 31, grab folder portion 12 and clamp plating metal film jointly with clamping part 31
The marginal portion of glass substrate 20.
Wherein, the surface for grabbing folder portion 12 is equipped with texturing 13, and texturing 13 are preferably strip, in other embodiments, ability
Texturing 13 can also be set as other shapes by the technical staff in domain.
As shown in Fig. 2, fixed part 11 is used to be relatively fixed with horizontal bar 30.With reference to shown in Fig. 1, wherein fixed part 11 is included extremely
Touch panel 10 is fixed on pair by few two screw holes 111,112 and corresponding screw 113,114, screw 113 by screw hole 111
On the horizontal bar 30 answered, touch panel 10 is fixed on corresponding horizontal bar 30 by screw 114 by screw hole 112.
Preferably, fixed part 11 is in hierarchic structure, including the first cascaded surface 115 and the second cascaded surface 116；Fixed part 11
Further comprise the first screw hole and the second screw hole, i.e. the first screw hole is screw hole 111, and the second screw hole is screw hole 112, the first screw hole
111 are set on the first cascaded surface 115, and the second screw hole 112 is set on the second cascaded surface 116, and screw 113 passes through first
Touch panel 10 is fixed on corresponding horizontal bar 30 by screw hole 111, and screw 114 is consolidated touch panel 10 by the second screw hole 112
Due on corresponding horizontal bar 30.
Preferably, folder portion 12 is grabbed to include outwardly extending first extension 121 in one side of self-fixed department 11 and from first prolong
121 outwardly extending second extension 122 of extending portion, i.e. the first extension 121 extend for one side of self-fixed department 1 toward D directions, the
Two extensions 122 extend for the first extension 121 toward D directions.The outer surface of second extension 122 is both provided with texturing 13, the
The outer surface part of one extension 121 is provided with texturing 13, as shown in figures 1 and 3.
Wherein, folder portion 12 is grabbed for pressed glass substrate 20, that is, grabs the 122 pressed glass substrate of the second extension of folder portion 12
20.Since the outer surface of the second extension 122 is both provided with texturing 13, when glass substrate 20 carries out metal-coated membrane, folder portion is grabbed
The adhesive ability of metal film is substantially improved in 12 the second extension 122, compared with the touch panel of the prior art, grabs folder portion
12 the second extension 122 increases one times or more to the adhesive ability of metal film, can bear the bombardment of 10000kw/hr, prevents
It is only attached to and grabs the metal film of folder portion 12 and come off, product is avoided to be contaminated, improves product yield.
In conclusion the present invention's grabs folder portion for pressed glass substrate, and the surface for grabbing folder portion is equipped with texturing, increases
It grabs folder portion the adhesive ability of the metal film of glass substrate is substantially improved, can prevent from being attached to the metal film for grabbing folder portion and come off,
Product is avoided to be contaminated, improves product yield.
The foregoing is merely the embodiment of the present invention, are not intended to limit the scope of the invention, every to utilize this hair
The equivalent structure or equivalent flow shift that bright specification and accompanying drawing content are made directly or indirectly is used in other relevant skills
Art field, is included within the scope of the present invention.
Claims (6)
1. a kind of touch panel, which is characterized in that the touch panel is used for PVD boards, and the PVD boards include at least four
End to end horizontal bar, at least one touch panel are arranged on a horizontal bar of the PVD boards, and the horizontal bar passes through institute
The marginal portion that touch panel surround and clamped the glass substrate of plating metal film is stated, the touch panel includes：
Fixed part, for being relatively fixed with the horizontal bar；
Folder portion is grabbed, is integrally formed with the fixed part, is extended from one side of the fixed part, the folder portion of grabbing is for pressed described
Glass substrate, and the surface for grabbing folder portion is equipped with texturing；
Wherein, the folder portion of grabbing includes extending from outwardly extending first extension in one side of the fixed part and from described first
Outwardly extending second extension in portion, the outer surface of second extension are both provided with the texturing, first extension
Outer surface part be provided with the texturing；
The material of the touch panel is plastics, and the material of the horizontal bar is metal.
2. touch panel according to claim 1, which is characterized in that the fixed part includes at least two screw holes and right
Screw is answered, the touch panel is fixed on corresponding horizontal bar by the screw by the screw hole.
3. touch panel according to claim 2, which is characterized in that the fixed part is in hierarchic structure, and including first
Screw hole and the second screw hole, first screw hole are set on the first cascaded surface, and second screw hole is set on the second cascaded surface.
4. a kind of PVD boards, which is characterized in that including touch panel and the end to end horizontal bar of at least four, at least connect described in one
Contacting surface plate is arranged on a horizontal bar of the PVD boards, the horizontal bar surround by the touch panel and clamp treat it is gold-plated
Belong to the marginal portion of the glass substrate of film, the touch panel includes：
Fixed part, for being relatively fixed with the horizontal bar；
Folder portion is grabbed, is integrally formed with the fixed part, is extended from one side of the fixed part, the folder portion of grabbing is for pressed described
Glass substrate, and the surface for grabbing folder portion is equipped with texturing；
It is described grab folder portion include from outwardly extending first extension in one side of the fixed part and from first extension to
Second extension of outer extension, the outer surface of second extension are both provided with the texturing, first extension it is outer
Surface portion is provided with the texturing；
The material of the touch panel is plastics, and the material of the horizontal bar is metal.
5. PVD boards according to claim 4, which is characterized in that the fixed part includes at least two screw holes and right
Screw is answered, the touch panel is fixed on corresponding horizontal bar by the screw by the screw hole.
6. PVD boards according to claim 5, which is characterized in that the fixed part is in hierarchic structure, and including the first spiral shell
Hole and the second screw hole, first screw hole are set on the first cascaded surface, and second screw hole is set on the second cascaded surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510634029.XA CN105349959B (en) | 2015-09-29 | 2015-09-29 | A kind of PVD boards and its touch panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510634029.XA CN105349959B (en) | 2015-09-29 | 2015-09-29 | A kind of PVD boards and its touch panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105349959A CN105349959A (en) | 2016-02-24 |
| CN105349959B true CN105349959B (en) | 2018-06-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510634029.XA Active CN105349959B (en) | 2015-09-29 | 2015-09-29 | A kind of PVD boards and its touch panel |
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| CN (1) | CN105349959B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4414072B2 (en) * | 2000-07-27 | 2010-02-10 | キヤノンアネルバ株式会社 | Tray for vacuum processing apparatus and vacuum processing apparatus |
| KR100636482B1 (en) * | 2005-07-18 | 2006-10-18 | 삼성에스디아이 주식회사 | Holder for fabricating organic light emitting display |
| CN201024212Y (en) * | 2007-03-06 | 2008-02-20 | 中芯国际集成电路制造(上海)有限公司 | Wafer support |
| CN201520718U (en) * | 2009-01-19 | 2010-07-07 | 深超光电（深圳）有限公司 | Substrate holding device |
| CN203683656U (en) * | 2013-10-18 | 2014-07-02 | 上海和辉光电有限公司 | Clamp of vacuum coating equipment and sputtering coating bearing platform |
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- 2015-09-29 CN CN201510634029.XA patent/CN105349959B/en active Active
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| Publication number | Publication date |
|---|---|
| CN105349959A (en) | 2016-02-24 |
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