CN105318948A - Waterproof weighing device - Google Patents

Waterproof weighing device Download PDF

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Publication number
CN105318948A
CN105318948A CN201410366217.4A CN201410366217A CN105318948A CN 105318948 A CN105318948 A CN 105318948A CN 201410366217 A CN201410366217 A CN 201410366217A CN 105318948 A CN105318948 A CN 105318948A
Authority
CN
China
Prior art keywords
load cells
over cap
water
weight device
waterproof
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410366217.4A
Other languages
Chinese (zh)
Inventor
吴均
程成
金一诺
王坚
王晖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACM (SHANGHAI) Inc
ACM Research Shanghai Inc
Original Assignee
ACM (SHANGHAI) Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACM (SHANGHAI) Inc filed Critical ACM (SHANGHAI) Inc
Priority to CN201410366217.4A priority Critical patent/CN105318948A/en
Publication of CN105318948A publication Critical patent/CN105318948A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a waterproof weighing device. The device comprises a pedestal, a weighing sensor and a protective cap. The weighing sensor is installed on the pedestal. The protective cap is installed on the weighing sensor and shields the weighing sensor. The protective cap is made of a waterproof material. By using the waterproof weighing device of the invention, a top of the weighing sensor is provided with the waterproof protective cap; when an object to be weighed is placed on the waterproof protective cap, contact of a liquid and the weighing sensor can be effectively prevented so that a waterproof purpose is reached.

Description

Water-proof weight device
Technical field
The present invention relates to semi-conductor device technology field, more particularly, relate to the weighing device with water-proof function.
Background technology
In semiconductor processing, pressure is a very important parameter.Because semiconductor workpiece can be formed various structure to realize different devices, and surface of the work is very high for the requirement of flatness.Therefore, in semiconductor processes, the downforce of the instrument that such as polishing disk, brush etc. directly contact with surface of semiconductor workpiece controls to be strict.
The downforce numerical value of these instruments generally can be detected by LOAD CELLS.Owing to can use various liquid in semiconductor processes, partially liq wherein also has corrosivity, if these liquid directly touch LOAD CELLS, may cause adverse influence, even cause sensor fault to LOAD CELLS.So, just need a kind of weighing device possessing water-proof function.
Summary of the invention
The present invention is intended to propose a kind of weighing device possessing water-proof function.
According to one embodiment of the invention, propose a kind of water-proof weight device, comprising: base, LOAD CELLS and over cap.LOAD CELLS is arranged on base.Over cap to be arranged in LOAD CELLS and to cover LOAD CELLS, and over cap is that waterproof material makes.
In one embodiment, over cap is hollow cylindrical, bottom opening, has a boss inside the roof of over cap.
In one embodiment, the top of LOAD CELLS has screw, and the boss of over cap is provided with stud, and stud coordinates with screw and by fastening nuts, over cap is installed in LOAD CELLS.
In one embodiment, the sidewall of over cap extends downward the position of base.
In one embodiment, the sidewall of over cap covers the top of LOAD CELLS to downward-extension.
In one embodiment, LOAD CELLS is arranged on base by bolt.
Water-proof weight device of the present invention adds a waterproofing protection lid at the top of LOAD CELLS, and object to be weighed is placed on waterproofing protection and covers, and can effectively prevent liquid from contacting with LOAD CELLS, reach the object of waterproof.
Accompanying drawing explanation
The above and other feature of the present invention, character and advantage are by more obvious by what become below in conjunction with the description of drawings and Examples, and Reference numeral identical in the accompanying drawings represents identical feature all the time, wherein:
Fig. 1 discloses the three-dimensional structure diagram of the water-proof weight device according to one embodiment of the invention.
Fig. 2 discloses the sectional structure chart of the water-proof weight device according to one embodiment of the invention.
Embodiment
Shown in figure 1 and Fig. 2, disclose the water-proof weight device according to one embodiment of the invention, wherein Fig. 1 discloses the three-dimensional structure diagram of water-proof weight device, and Fig. 2 discloses the sectional structure chart of water-proof weight device.
As shown in the figure, this water-proof weight device comprises: base 102, LOAD CELLS 104 and over cap 106.LOAD CELLS 104 is arranged on base 102.Over cap 106 to be arranged in LOAD CELLS 104 and to cover LOAD CELLS 104, and over cap 106 is that waterproof material makes.Over cap 106 is in hollow cylindrical, and bottom opening, has a boss 108 inside the roof of over cap 106.LOAD CELLS 104 is arranged on base 102 by bolt 103.The top of LOAD CELLS 104 has screw 105, and the boss 108 of over cap is provided with stud 107, and stud 107 coordinates with screw 105 and fastening by nut 109, and over cap 106 is installed in LOAD CELLS 104.In the illustrated embodiment in which, the sidewall of over cap 106 covers the top of LOAD CELLS 104 to downward-extension.In other examples, according to the requirement of shelter of actual user demand and LOAD CELLS 104, the sidewall of over cap 106 can be different to the length of downward-extension, but the top of as a rule covering LOAD CELLS 104 is necessary.In the application that some requirement of shelter are higher, the sidewall of over cap 106 extends downward the position of base 102.
Water-proof weight device of the present invention adds a waterproofing protection lid at the top of LOAD CELLS, and object to be weighed is placed on waterproofing protection and covers, and can effectively prevent liquid from contacting with LOAD CELLS, reach the object of waterproof.
Above-described embodiment is available to be familiar with person in the art to realize or to use of the present invention; those skilled in the art can be without departing from the present invention in the case of the inventive idea; various modifications or change are made to above-described embodiment; thus protection scope of the present invention not limit by above-described embodiment, and should be the maximum magnitude meeting the inventive features that claims are mentioned.

Claims (6)

1. a water-proof weight device, is characterized in that, comprising:
Base;
LOAD CELLS, described LOAD CELLS is arranged on base;
Over cap, over cap to be arranged in LOAD CELLS and to cover LOAD CELLS, and described over cap is that waterproof material makes.
2. water-proof weight device as claimed in claim 1, it is characterized in that, described over cap is hollow cylindrical, bottom opening, has a boss inside the roof of described over cap.
3. water-proof weight device as claimed in claim 2; it is characterized in that, the top of described LOAD CELLS has screw, and the boss of described over cap is provided with stud; described stud coordinates with screw and by fastening nuts, over cap is installed in LOAD CELLS.
4. water-proof weight device as claimed in claim 2, it is characterized in that, the sidewall of described over cap extends downward the position of base.
5. water-proof weight device as claimed in claim 2, is characterized in that, the sidewall of described over cap is to downward-extension and cover the top of LOAD CELLS.
6. water-proof weight device as claimed in claim 1, it is characterized in that, described LOAD CELLS is arranged on base by bolt.
CN201410366217.4A 2014-07-29 2014-07-29 Waterproof weighing device Pending CN105318948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410366217.4A CN105318948A (en) 2014-07-29 2014-07-29 Waterproof weighing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410366217.4A CN105318948A (en) 2014-07-29 2014-07-29 Waterproof weighing device

Publications (1)

Publication Number Publication Date
CN105318948A true CN105318948A (en) 2016-02-10

Family

ID=55246834

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410366217.4A Pending CN105318948A (en) 2014-07-29 2014-07-29 Waterproof weighing device

Country Status (1)

Country Link
CN (1) CN105318948A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19600728A1 (en) * 1995-01-23 1996-07-25 Kurt Loeschel Trough shaped measurement standard weight e.g. from 500 Kg to 5 tonne
CN202204587U (en) * 2011-09-01 2012-04-25 卢明海 Enclosure of waterproof weighting meter
CN102466513A (en) * 2010-11-15 2012-05-23 常熟市佳衡天平仪器有限公司 Waterproof electronic scale
CN202614355U (en) * 2012-04-23 2012-12-19 德尔迈自动化科技大丰有限公司 Protective structure of weighing sensor
CN203396475U (en) * 2013-08-23 2014-01-15 深圳市吉阳自动化科技有限公司 A micro electronic scale equipped with a protection device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19600728A1 (en) * 1995-01-23 1996-07-25 Kurt Loeschel Trough shaped measurement standard weight e.g. from 500 Kg to 5 tonne
CN102466513A (en) * 2010-11-15 2012-05-23 常熟市佳衡天平仪器有限公司 Waterproof electronic scale
CN202204587U (en) * 2011-09-01 2012-04-25 卢明海 Enclosure of waterproof weighting meter
CN202614355U (en) * 2012-04-23 2012-12-19 德尔迈自动化科技大丰有限公司 Protective structure of weighing sensor
CN203396475U (en) * 2013-08-23 2014-01-15 深圳市吉阳自动化科技有限公司 A micro electronic scale equipped with a protection device

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Application publication date: 20160210