CN105312171A - Spraying device - Google Patents
Spraying device Download PDFInfo
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- CN105312171A CN105312171A CN201410372750.1A CN201410372750A CN105312171A CN 105312171 A CN105312171 A CN 105312171A CN 201410372750 A CN201410372750 A CN 201410372750A CN 105312171 A CN105312171 A CN 105312171A
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Abstract
The invention provides a spraying device. The spraying device comprises a base, a storage container, an automatic quantifying and continuous charging device, a stirring mechanism, a uniform spraying element and a pressure compensator, wherein the storage container is fixed on the base through a connecting seat; the automatic quantifying and continuous charging device is connected with the storage container through a charging pipeline so as to adds an accommodated spraying material to the storage container; the stirring mechanism is used for stirring the spraying material in the storage container; the uniform spraying element is connected with the storage container through a feeding pipeline and used for outputting the spraying material in the storage container; the pressure compensator is connected to a pressurizing channel and applies compensation pressure to the spraying material in the storage container so as to adjust the liquid level pressure of the spraying material, so that the spraying amount of the uniform spraying element is compensated.
Description
Technical field
The invention relates to a kind of spray equipment, particularly about one in manufacture of semiconductor for carrying out spraying processing procedure, and there is the spray equipment of pressure compensation mechanism.
Background technology
Spray equipment is the device often used in manufacture of semiconductor, and its major function is the wafer for being sprayed to by a sprayed on material in semiconductor, to carry out the spraying processing procedure in manufacture of semiconductor.Existing spray equipment mainly comprise for the magazine of accommodating sprayed on material, the stirring rod be arranged in magazine, for driving stirring rod to stir the stirring motor of the sprayed on material in magazine, and for sprayed on material being ejected to the even application element on wafer.But the existing spray equipment be made up of said structure has following shortcoming in use.
Existing spray equipment, when sprayed on material uses, needs magazine to disassemble and again supplements sprayed on material, not only can bring inconvenience in use, the cost that more can add in manufacture owing to causing processing procedure to stop.In addition, the number of times used along with even application element increases, the sprayed on material sent via even application element has the situation remained in even application element, except the waste causing sprayed on material, the pressure that more even application element can be made to spray weakens, the amount of the sprayed on material causing even application element to spray reduces, and then the effect of impact spraying processing procedure.
Summary of the invention
For the foregoing reasons, the object of the present invention is to provide a kind of spray equipment with compensation mechanism, its be by pressure compensator to adjust the liquid level pressure of sprayed on material in magazine, compensate the quantity for spray of spray equipment by this.
Another object of the present invention is to provide a kind of spray equipment, it comprises a recovering mechanism, the sprayed on material remained in this even application element can be returned to recycling in magazine.
Another object of the present invention is to provide a kind of spray equipment; it comprises the automatic ration continuous feeding be connected with magazine; handled easily person can add sprayed on material when not needing dismounting magazine, and reduce the downtime of spray equipment.
Another object of the present invention is to provide a kind of spray equipment, and it comprises a laser alignment device, can position display one laser anchor point directly below even application element, reduces the deviation of naked eyes contraposition by this, increases the degree of accuracy of spray equipment.
For reaching aforementioned object, the invention provides a kind of spray equipment, it comprises: a pedestal, a magazine, an automatic ration continuous feeding, an even application element and a pressure compensator.Described magazine has an output and a stiff end, and its stiff end is fixed on pedestal via a connecting seat.Described automatic ration continuous feeding is arranged at the side of Connection Block and is connected with magazine via a Feed lines, is added in magazine by a sprayed on material accommodating in it by this.Described even application element is fixed on this pedestal, and is connected with the output of this magazine via a feeding pipe, in order to be exported by the sprayed on material in this magazine.Described pressure compensator is connected to a pressurization passageway.Described pressurization passageway to be arranged in Connection Block and to be communicated with magazine.Described pressure compensator applies to compensate pressure to the sprayed on material in magazine according to the compensation information preset, and the compensation pressure applied increases progressively along with the spraying number of times of spray equipment and increases.
According to one embodiment of the invention, described spray equipment comprises a recovering mechanism further, and it comprises: a return line, and its two ends are connected to even application element and magazine; And a feeding device, is connected with return line, in order to the sprayed on material remained in even application element is returned to magazine from even application element via return line.
According to one embodiment of the invention, described spray equipment comprises a laser alignment device further.Laser alignment device is arranged on pedestal through a fixed mount, and the eject position in order to aim at even application element penetrates a laser loci.
According to one embodiment of the invention, described spray equipment comprises a rabbling mechanism further.Rabbling mechanism comprises: a stirring motor, is arranged on this Connection Block; And a stirring rod, be arranged in this magazine.Wherein, this stirring motor is connected with this stirring rod via a connection bearing in this Connection Block, rotates and stir the sprayed on material in this magazine to drive this stirring rod.
According to one embodiment of the invention, described Connection Block includes one first Connection Block and one second Connection Block.Described first Connection Block is arranged on pedestal.Above-mentioned stirring motor is arranged on the first Connection Block, and automatic ration continuous feeding is arranged at the side of the first Connection Block.Described second Connection Block is arranged at below the first Connection Block.Above-mentioned magazine is arranged at below the second Connection Block.One opening of pressurization passageway is arranged on the side of the second Connection Block, and pressurization passageway is communicated with magazine in the second Connection Block.Wherein, stirring rod through the second Connection Block, and is connected with stirring motor through described connection bearing in the first Connection Block.
According to one embodiment of the invention, described stirring rod is arranged in the second Connection Block through at least two linear bearings.In addition, one end that described second Connection Block is connected with magazine is provided with a sealed bearing.
According to one embodiment of the invention, stirring rod is provided with multiple blade, this blade is arranged symmetrically along its circumferencial direction on the outer peripheral face of stirring rod.
According to one embodiment of the invention, described even application element comprises further: an atomization lid, has the accommodation space, a spout and the inlet channel that communicate with each other; One nozzle body, is placed in the accommodation space of this atomization lid, and is connected with feeding pipe; One syringe needle, is integrally formed with nozzle body, and syringe needle is arranged in spout; And an air inlet pipe, be arranged in inlet channel, in order to pressurize to spout.Wherein, sprayed on material is transported to nozzle body via feeding pipe, is atomized ejection after flowing through syringe needle by spout.
According to one embodiment of the invention, described even application element comprises further: an atomization lid, has the accommodation space, a spout and the inlet channel that communicate with each other; One nozzle body, is connected with feeding pipe; One stacker, to be placed in accommodation space and to accept nozzle body; One syringe needle, is arranged in stacker and spout, and is communicated with nozzle body; And an air inlet pipe, be arranged in inlet channel, in order to pressurize to spout.Wherein, sprayed on material is transported to nozzle body via feeding pipe, is atomized ejection again after flowing through syringe needle by spout.
According to one embodiment of the invention, described spray equipment comprises a spray element cleaning device further, and it comprises: a ultrasonic vibrator; And one cleans syringe needle, is arranged on ultrasonic vibrator, in order to insert in a spout of even application element.Wherein, the clean syringe needle of spout is inserted in ultrasonic vibrator vibration, uses and removes sprayed on material residual in even application element.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the spray equipment of display present pre-ferred embodiments;
Fig. 2 is the part sectioned view of display according to the spray equipment of present pre-ferred embodiments;
Fig. 3 (A) is the schematic perspective view of display stirring rod provided by the present invention;
Fig. 3 (B) to Fig. 3 (D) is respectively the side view of three kinds of different examples of display stirring rod;
Fig. 4 is the use schematic diagram of display one spray element cleaning device;
Fig. 5 (A) is the sectional axonometric drawing of display according to the even application element of the first example;
Fig. 5 (B) is the sectional axonometric drawing of display according to the even application element of the second example;
Fig. 5 (C) is the sectional axonometric drawing of display according to the even application element of the 3rd example;
Fig. 6 is the side view showing spray equipment provided by the present invention;
Fig. 7 (A) is the quantity for spray of display even application element and the graph of a relation of spraying number of times; And
The graph of a relation of the quantity for spray that Fig. 7 (B) is the display compensation pressure that provides of pressure compensator and even application element.
Wherein, description of reference numerals is as follows:
10 pedestals
20 magazines
201 outputs
202 stiff ends
203 stirring rod
2031 blades
204 feeding pipes
21 automatic ration continuous feedings
Space in 210
211 Feed lines
22 stirring motors
23 even application elements
23a, 23b, 23c even application element
231a, 231b, 231c are atomized lid
2311a, 2311b, 2311c accommodation space
2312a, 2312b, 2312c spout
2313a, 2313b, 2313c inlet channel
232a, 232b, 232c nozzle body
2321a, 2321b syringe needle
233a, 233b, 233c air inlet pipe
234c stacker
235c syringe needle
30 Connection Blocks
31 first Connection Blocks
311 connection bearings
32 second Connection Blocks
321 linear bearings
322 sealed bearings
323 pressurization passageway
401 return lines
402 feeding devices
50 pressure compensators
60 travel mechanisms
70 laser alignment devices
71 fixed mounts
80 spray element cleaning devices
801 ultrasonic vibrator
802 clean syringe needles
θ
1, θ
2, θ
3slanted angle
Detailed description of the invention
Below coordinate graphic and component symbol to do more detailed description to embodiments of the present invention, can implement according to this after studying this description carefully to make those of ordinary skill in the art.
Fig. 1 is the schematic diagram of display according to the spray equipment of present pre-ferred embodiments, and Fig. 2 is the partial sectional view of display according to the spray equipment of present pre-ferred embodiments.As shown in Figure 1 to Figure 2, spray equipment provided by the present invention comprises: pedestal 10, magazine 20, automatic ration continuous feeding 21, rabbling mechanism, even application element 23, recovering mechanism and a pressure compensator 50.
As shown in Figure 1, described magazine 20 has output 201 and a stiff end 202.The stiff end 202 of magazine 20 is fixed on pedestal 10 via a connecting seat 30.In the preferred embodiment, described Connection Block 30 comprises one first Connection Block 31 and one second Connection Block 32, the stiff end 201 of described magazine is arranged on the below of the second Connection Block 32, second Connection Block 32 is arranged at the below of the first Connection Block 31, and the first Connection Block 31 is then fix on the substrate 10.
Described automatic ration continuous feeding 21 has space 210 in, for an accommodating sprayed on material.Sprayed on material can be fluorescent material or a viscous liquid.Automatic ration continuous feeding 21 is arranged at the side of the first Connection Block 31 and is connected with magazine 20 via a Feed lines 211, is added in magazine 20 by sprayed on material by this.By arranging automatic ration continuous feeding 21, existing spray equipment needs magazine or other element to disassemble trouble when adding sprayed on material can be removed from, the sprayed on material of spray equipment is supplied can not interrupt, increase the convenience on using.
Described rabbling mechanism comprises stirring motor 22 and a stirring rod 203.As shown in Figure 1 and Figure 2, stirring rod 203 is arranged in magazine 20, and stirring motor 22 is arranged at above the first Connection Block 31, and is connected with stirring rod 203 via a connection bearing 311 in Connection Block 30.In more detail, stirring rod 203 through the second Connection Block 32, and is connected with stirring motor 22 through connection bearing 311 in the first Connection Block 31.Thus, stirring motor 22 just can drive stirring rod 203 to rotate, to stir the sprayed on material be added in magazine 20.In addition, in order to make the rotation that stirring rod 203 can be stable, in the preferred embodiment, stirring rod 203 is arranged in the second Connection Block 32 through two linear bearings 321.In addition, one end that the second Connection Block 32 is connected with magazine 20 is provided with a sealed bearing 322, prevents sprayed on material overflow in magazine 20 in Connection Block 30 by this.
In the preferred embodiment, stirring rod 203 is provided with multiple blade 2031.As shown in Fig. 3 (A), blade 2031 is arranged symmetrically along its circumferencial direction on the outer peripheral face of stirring rod 203, and from one end of stirring rod 203 along its axial directional distribution to the other end of stirring rod 203.In Fig. 3 (A), the quantity of the blade 2031 in same level is configured to four, but quantity and the distribution mode of blade 2031 are not limited to this.Blade 2031 can also be arranged in asymmetric mode.Preferably, the quantity of the blade 2031 in same level is 2 ~ 6.In addition, between blade 2031 and a Virtual water plane of its position, there is a slanted angle.Fig. 3 (B) to Fig. 3 (D) is the side view of the stirring rod 203 of display three kinds of different examples provided by the present invention.In Fig. 3 (B), the slanted angle θ between blade 2031 and horizontal plane
1it is 15 °; In Fig. 3 (C), the slanted angle θ between blade 2031 and horizontal plane
2it is 30 °; In Fig. 3 (D), the slanted angle θ between blade 2031 and horizontal plane
3it is 45 °.Preferably, the angle between the Virtual water plane of blade 2031 and its position is between 10 ° ~ 60 °.Through above-mentioned configuration, stirring rod 203 can coordinate blade 2031 toward the sprayed on material stirred clockwise or counterclockwise in magazine 20.
As shown in Figures 1 and 3, described even application element 23 is fixed on pedestal 10, and the output 201 of magazine 20 is connected with even application element 23 via feeding pipe 204.Sprayed on material in magazine 20 is sent to even application element 23 via feeding pipe 204, then is exported by even application element 23, carries out spraying processing procedure.
Conveniently spray the carrying out of processing procedure, its substrate 10 can be arranged in a travel mechanism 60 by spray equipment as above, is moved by spray equipment, as shown in Figure 1 by travel mechanism 60 in an X-axis, a Y-axis and a Z-direction.
Remain in even application element 23 owing to often having unnecessary sprayed on material in spraying processing procedure; cause the waste of material and affect the spraying performance of even application element; therefore; in order to the sprayed on material remained in even application element 23 being reclaimed, be provided with recovering mechanism according in the spray equipment of present pre-ferred embodiments.Recovering mechanism comprises return line 401 and a feeding device 402.As shown in Figure 1, the two ends of return line 401 are connected to even application element 23 and automatic ration continuous feeding 21, and the position that return line 401 is connected to even application element 23 is connected to the position of even application element 23 in vertical direction lower than feeding pipe 204.Feeding device 402 is connected with return line 401, to be returned to automatic ration continuous feeding 21 from even application element via return line 401 by the sprayed on material remained in even application element 23.Wherein, feeding device 402 can be that feed motor, inchworm motor etc. carry the feedway of sprayed on material with motor or reciprocating manner.
Except above-mentioned recovering mechanism, spray equipment of the present invention also provides a spray element cleaning device 80 in addition, in order to sprayed on material residual in clean even application element 23.The use schematic diagram for using spray element cleaning device 80 shown by Fig. 4.As shown in Figure 4, spray element cleaning device 80 comprises a ultrasonic vibrator 801 and is arranged on the clean syringe needle 802 of one on ultrasonic vibrator 801.When using spray element cleaning device 80 to clean even application element 23, first, the spout (not being shown in Fig. 4) first clean syringe needle 802 being aimed at even application element 23 inserts.The mode inserted can for insert in actionless even application element 23 by clean syringe needle 802, also can for decline even application element 23 to insert the spray element cleaning device 80 being positioned over a plane.Recycling ultrasonic vibrator 801 vibrates the clean syringe needle 802 inserting spout, removes sprayed on material residual in even application element 23 by this.In addition, also by the spray of even application element 23 sky, the sprayed on material remained in even application element 23 can be ejected in an external container (not be shown in figure) by this.
Fig. 5 (A) to Fig. 5 (C) is respectively the sectional axonometric drawing of the first to the 3rd example of display even application element 23 provided by the present invention.Be described for the structure of even application element 23 hereinafter with reference to Fig. 5 (A) to Fig. 5 (C).As shown in Fig. 5 (A), comprise an atomization lid 231a, an a nozzle body 232a and air inlet pipe 233a according to the even application element 23a of the first example.Atomization lid 231a has the accommodation space 2311a, a spout 2312a and the inlet channel 2313a that communicate with each other.Nozzle body 232a is placed in the accommodation space 2311a of atomization lid 231a, and is connected with feeding pipe 204 (position of connection is not shown in figure).One end of nozzle body 232a has a syringe needle 2321a, and itself and nozzle body 232a are integrally formed, and are arranged in spout 2312a.Described air inlet pipe 233a is arranged in inlet channel 2313a, in order to pressurize to spout 2312a.Through said structure, sprayed on material is transported to nozzle body 232a via feeding pipe 204 from magazine 20, pressurizes, be finally atomized ejection by spout 2312a after flowing through syringe needle 2321a through air inlet pipe 233a.The parameter such as shape, angle of the sprayed on material that even application element 23a sprays, can adjust by the size of adjustment spout 2312a and shape.
Shown by Fig. 5 (B) is the structure of the even application element 23b of the second example.The structure of even application element 23b is roughly identical with the structure of the even application element 23a of the first example, therefore, is only described for difference between the two at this.As shown in Fig. 5 (B), in the second example, the width of the accommodation space 2311b of atomization lid 231b is less than what come in the first example, and it is only for the part of the syringe needle 2321b of accommodating nozzle body 232b.Nozzle body 232b is then the top being positioned at atomization lid 231b.
Shown by Fig. 5 (C) is the structure of the even application element 23c of the 3rd example.As shown in Fig. 5 (C), even application element 23c comprises: an atomization lid 231c, a nozzle body 232c, an air inlet pipe 233c, an a stacker 234c and syringe needle 235c.Atomization lid 231c has the accommodation space 2311c, a spout 2312c and the inlet channel 2313c that communicate with each other.Described nozzle body 232c is connected with feeding pipe 204 (not being shown in figure).Stacker 234c to be placed in accommodation space 2311c and to accept nozzle body 232c.Different from first, second example, syringe needle 235c is an independent component, and it is arranged in stacker 234c and spout 2312c, and is communicated with nozzle body 231c.Air inlet pipe 233c is arranged in inlet channel 2313c, in order to pressurize to spout 2312c.Through said structure, sprayed on material is transported to nozzle body 232c via feeding pipe 204 from magazine 20, pressurizes, be finally atomized ejection by spout 2312c after flowing through syringe needle 235c through air inlet pipe 233c.The parameter such as shape, angle of the sprayed on material that even application element 23c sprays, can adjust by the size of adjustment spout 2312a and shape.In addition, because the syringe needle 235c of the even application element 23c of the 3rd example is the element separated with nozzle body 232c, therefore, syringe needle 235 directly can be replaced when fault produces, not only be convenient to the carrying out of keeping in repair, more reduce the difficulty of processing of even application element 23c entirety, reduce manufacturing cost, and promote the deposition accuracies of even application element 23c.
Shown by Fig. 6 is the side view of spray equipment provided by the present invention.As shown in Figure 6, described spray equipment comprises a laser alignment device 70 further.Laser alignment device 70 is arranged on pedestal 10 through a fixed mount 71, and the eject position in order to aim at even application element 23 penetrates a laser loci.By the laser loci emitted by laser alignment device 70, when operator is when setting the spray range of spray equipment, the deviation of naked eyes contraposition can be reduced, the degree of accuracy of the convenience that increase spray equipment uses and spraying.
In spray equipment, along with the increase of its spraying number of times, the quantity for spray that its even application element can spray also can reduce thereupon.In order to improve this situation, the present invention is through pressure compensator 50 to adjust the liquid level pressure of sprayed on material in magazine 20, compensates the amount of the sprayed on material that even application element sprays by this.As shown in Figure 1, pressure compensator 50 is connected to a pressurization passageway 323.Described pressurization passageway 323 to be arranged in the second Connection Block 32 and to be communicated with magazine 20.One opening of pressurization passageway 323 is arranged on the side of the second Connection Block.Through above-mentioned configuration, pressure compensator 50 can apply to compensate pressure to the sprayed on material in magazine 20 according to the compensation information preset.
Shown by Fig. 7 (A) is in one example, the quantity for spray of even application element and the graph of a relation of spraying number of times; And Fig. 7 (B) is for showing in this example, corresponding to the characteristic of the even application element shown in Fig. 7 (A), the graph of a relation of the compensation pressure that pressure compensator provides and the quantity for spray of even application element.Because the characteristic of each even application element is neither identical, the quantity for spray that each even application element reduces along with spraying number of times also can not be identical.Therefore, before carrying out pressure compensation through pressure compensator 50, first must test, obtain the even application element characteristic as shown in Fig. 7 (A), then the compensation pressure corresponding according to the property settings of each even application element.As shown in Fig. 7 (A) and Fig. 7 (B), the quantity for spray sprayed due to even application element reduces gradually along with spraying number of times, therefore, the compensation pressure that pressure compensator 50 provides just is set as increasing progressively along with the spraying number of times of spray equipment and increasing, compensate the quantity for spray of even application element by this, and promote the uniformity of spraying.
The foregoing is only embodiments of the invention and exemplary applications thereof, when unavailable to limit the enforceable scope of the present invention, and those of ordinary skill in the art's various improvement that can complete according to present disclosure and change, all should be considered as not departing from flesh and blood of the present invention and being covered by claims hereafter.Everyly utilize present disclosure and institute's accompanying drawings and the equivalent structure reached, no matter be directly or indirectly be applied to this technology or other correlative technology field, all should be considered as being within the scope of the present invention.
Claims (11)
1. a spray equipment, is characterized in that, comprising:
One pedestal;
One magazine, has an output and a stiff end, and this stiff end is fixed on this pedestal via a connecting seat;
One automatic ration continuous feeding, is arranged at the side of this Connection Block and is connected with this magazine via a Feed lines, is added in this magazine by this by a sprayed on material accommodating in it;
One even application element, is fixed on this pedestal, and is connected with the output of this magazine via a feeding pipe, in order to be exported by the sprayed on material in this magazine; And
One pressure compensator, is connected to a pressurization passageway, and this pressurization passageway to be arranged in this Connection Block and to be communicated with this magazine;
Wherein, this pressure compensator applies one according to the compensation information preset to the sprayed on material in this magazine and compensates pressure, and this compensation pressure increases progressively along with the spraying number of times of this spray equipment and increases.
2. spray equipment as claimed in claim 1, it is characterized in that, comprise a recovering mechanism further, this recovering mechanism comprises:
One return line, its two ends are connected to this even application element and this automatic ration continuous feeding; And
One feeding device, is connected with this return line, in order to be returned to this magazine from this even application element via this return line by this sprayed on material remained in this even application element.
3. spray equipment as claimed in claim 1, is characterized in that, comprise a laser alignment device further, and this laser alignment device is arranged on the base through a fixed mount, and the eject position in order to aim at this even application element penetrates a laser loci.
4. spray equipment as claimed in claim 1, it is characterized in that, comprise a rabbling mechanism further, this rabbling mechanism comprises:
One stirring motor, is arranged on this Connection Block; And
One stirring rod, is arranged in this magazine;
Wherein, this stirring motor is connected with this stirring rod via a connection bearing in this Connection Block, rotates and stir this sprayed on material in this magazine to drive this stirring rod.
5. spray equipment as claimed in claim 4, it is characterized in that, this Connection Block comprises:
One first Connection Block, is arranged on this pedestal, and this stirring motor is arranged on this first Connection Block, and this automatic ration continuous feeding is arranged at the side of this first Connection Block; And
One second Connection Block, be arranged at the below of this first Connection Block, this magazine is arranged at the below of this second Connection Block, one connector of this pressurization passageway and this pressure compensator is arranged on the side of this second Connection Block, and this pressurization passageway is communicated with this magazine in this second Connection Block;
Wherein, this stirring rod through this second Connection Block, and is connected with this stirring motor through this connection bearing in this first Connection Block.
6. spray equipment as claimed in claim 5, is characterized in that, this stirring rod is arranged in this second Connection Block through at least two linear bearings.
7. the spray equipment as described in claim 5 or 6, is characterized in that, one end that this second Connection Block is connected with this magazine is provided with a sealed bearing.
8. spray equipment as claimed in claim 4, it is characterized in that, this stirring rod is provided with multiple blade, this blade arranges along its circumferencial direction on the outer peripheral face of this stirring rod.
9. spray equipment as claimed in claim 1, it is characterized in that, this even application element comprises further:
One atomization lid, has the accommodation space, a spout and the inlet channel that communicate with each other;
One nozzle body, this nozzle body is placed in the accommodation space of this atomization lid, and is connected with this feeding pipe, and wherein, a syringe needle and this nozzle body are integrally formed, and this syringe needle is arranged in this spout; And
One air inlet pipe, is arranged in this inlet channel, in order to pressurize to this spout;
Wherein, this sprayed on material is transported to this nozzle body via this feeding pipe, is atomized ejection after flowing through this syringe needle by this spout.
10. spray equipment as claimed in claim 1, it is characterized in that, this even application element comprises further:
One atomization lid, has the accommodation space, a spout and the inlet channel that communicate with each other;
One nozzle body, is connected with this feeding pipe;
One stacker, to be placed in this accommodation space and to accept this nozzle body;
One syringe needle, this syringe needle is arranged in this stacker and this spout, and is communicated with this nozzle body; And
One air inlet pipe, is arranged in this inlet channel, in order to pressurize to this spout;
Wherein, this sprayed on material is transported to this nozzle body via this feeding pipe, is atomized ejection again after flowing through this syringe needle by this spout.
11. spray equipments as claimed in claim 1, is characterized in that, comprise a spray element cleaning device further, this spray element cleaning device comprises:
One ultrasonic vibrator; And
One clean syringe needle, it is arranged on this ultrasonic vibrator, in order to insert in a spout of this even application element;
Wherein, this clean syringe needle of this spout is inserted in the vibration of this ultrasonic vibrator, uses and removes sprayed on material residual in this even application element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410372750.1A CN105312171B (en) | 2014-07-31 | 2014-07-31 | Spray equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410372750.1A CN105312171B (en) | 2014-07-31 | 2014-07-31 | Spray equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105312171A true CN105312171A (en) | 2016-02-10 |
| CN105312171B CN105312171B (en) | 2017-10-03 |
Family
ID=55241074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410372750.1A Expired - Fee Related CN105312171B (en) | 2014-07-31 | 2014-07-31 | Spray equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105312171B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108176544A (en) * | 2018-03-19 | 2018-06-19 | 华南智能机器人创新研究院 | A kind of plane line tracking robot |
| CN108421668A (en) * | 2018-03-19 | 2018-08-21 | 华南智能机器人创新研究院 | A kind of adjustable robotic arm apparatus in working region |
| CN108421667A (en) * | 2018-03-19 | 2018-08-21 | 华南智能机器人创新研究院 | A kind of paint sprayer with pressurize spraying function |
| CN111111983A (en) * | 2020-03-04 | 2020-05-08 | 华能山东发电有限公司 | Ultrasonic vibration prevents stifled nozzle and atomizer |
| CN112170121A (en) * | 2020-09-01 | 2021-01-05 | 东莞维科电池有限公司 | Extrusion coating machine reflux pressure calculation method and device and storage medium |
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