CN105311933A - Dry removing apparatus and dry removing method for harmful substances in waste gas - Google Patents

Dry removing apparatus and dry removing method for harmful substances in waste gas Download PDF

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CN105311933A
CN105311933A CN201410234926.7A CN201410234926A CN105311933A CN 105311933 A CN105311933 A CN 105311933A CN 201410234926 A CN201410234926 A CN 201410234926A CN 105311933 A CN105311933 A CN 105311933A
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waste gas
treatment operation
salt
carry out
supply unit
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CN105311933B (en
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赵镛末
金敏晧
李承柱
金泰錫
金载勳
吴圣均
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Pu Xiang Aixi Is Science And Technology Ltd Carefully
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Pu Xiang Aixi Is Science And Technology Ltd Carefully
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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Abstract

The present invention relates to a dry removing apparatus and a dry removing method for harmful substances in waste gas. The dry removing apparatus comprises: a reaction part, wherein plasma is used to perform primary treatment process and a pretreatment process, nitrogen oxides and sulfur oxides in waste gas generate ammonium salts in the primary treatment process, and nitrogen dioxide is generated from nitric oxide in the waste gas in the pretreatment process; a salt generation agent supply part, wherein a salt generation agent is supplied for the waste gas discharged from the reaction part so as to perform a secondary treatment process containing a denitrogenation process and a desulfurization process, the denitrogenation process is performed on the nitrogen dioxide formed through the pretreatment process, and the denitrogenation process is performed on the residual sulfur dioxide in the waste gas being subjected to the primary treatment process; and a bag type filter for simultaneously capturing ammonium salts and alkali salts from the waste gas discharged from the reaction part, the ammonium salts are formed through the primary treatment process, and the alkali salts are formed through the secondary treatment process.

Description

The dry type removal device of harmful substance and dry type minimizing technology in waste gas
Technical field
The present invention relates to dry type removal device and the dry type minimizing technology of harmful substance in waste gas, remove the harmful substance such as oxysulfide, nitrogen oxide in the waste gas of discharging from the enterprise such as steel mill, power plant.
Background technology
Usually, the enterprise such as steel mill, power plant produces the waste gas containing harmful substance.Such as, oxysulfide (SO is contained in waste gas x), nitrogen oxide (NO x) etc. harmful substance.These harmful substances cause the environmental problems such as smog (Smog), acid rain (AcidRain), global warming (GlobalWarming), depletion of the ozone layer.
In order to remove the sulfur and nitrogen oxides contained in waste gas, the exhaust treatment system of prior art comprises desulphurization plant and the denitrification equipment of separate setting.
Described desulphurization plant carries out the sulfur removal technology removing oxysulfide from waste gas.Described sulfur removal technology is divided into wet process and dry process.Wet process utilizes water or alkaline solution to remove oxysulfide, although the efficiency of removal oxysulfide is up to 90%, needs a large amount of water, and produces secondary harmful substance.Dry process removes oxysulfide by utilizing absorbent, and relative to wet process, the generation of secondary harmful substance is few, but efficiency is low, and absorbent costly.
Described denitrification equipment carries out the denitrification process removing nitrogen oxide from waste gas.Described denitrification equipment comprises SCR (SCR:SelectiveCatalyticReduction) equipment or SNCR (SNCR:SelectiveNon-CatalyticReduction) equipment.SCR equipment passes through to V 2o 5/ TiO 2series catalysts injects nitrogen oxide and the ammonia as reducing agent, makes conversion of nitrogen oxides be nitrogen and water, to remove nitrogen oxide from waste gas.But, due to SCR equipment use high price catalyst, cause operating cost to rise.And SNCR equipment by directly injecting ammonia to remove nitrogen oxide in high-temp waste gas.Because SNCR equipment does not use catalyst, the operating cost that therefore catalyst is relevant is low, but needs to keep high reaction temperature, and the removal efficiency of nitrogen oxide is lower.
The exhaust treatment system of this prior art, described desulphurization plant and described denitrification equipment separate setting, to remove sulfur and nitrogen oxides from waste gas.Arrange desulphurization plant and denitrification equipment owing to separating, therefore the exhaust treatment system of prior art needs quite large-scale setting area, cause the impact by floor space large, and investment cost is high.
In addition, the exhaust treatment system of prior art, in order to remove the dust contained in waste gas, except described desulphurization plant and described denitrification equipment, also needs to arrange dust-collecting equipment separately.Therefore, cause the scale of the exhaust treatment system setting area of prior art to increase further, thus the further restriction of aggravation floor space and the high problem of investment cost.
The content of invention
The present invention proposes to solve problem as above, and object is the dry type removal device and the dry type minimizing technology that provide harmful substance in a kind of waste gas, can remove sulfur and nitrogen oxides from waste gas simultaneously.
The object of the present invention is to provide dry type removal device and the dry type minimizing technology of harmful substance in a kind of waste gas, sulfur and nitrogen oxides can not only be removed from waste gas, but also can dust be removed.
In order to solve the problem, the present invention includes following structure.
The dry type removal device of harmful substance in waste gas of the present invention, comprise: reacting part, plasma is utilized to carry out single treatment operation and pretreatment procedure, the nitrogen oxide that described single treatment operation contains from waste gas and oxysulfide generate ammonium salt, and the nitric oxide that described pretreatment procedure contains from waste gas generates nitrogen dioxide; Salt generates agent supply unit, agent is generated to the waste gas supply salt of discharging from described reacting part, to carry out the after-treatment operation comprising denitrification process and sulfur removal technology, this denitrification process carries out the nitrogen dioxide formed through described pretreatment procedure, and this sulfur removal technology carries out sulfur dioxide residual in the waste gas of described single treatment operation; And bag filter, be connected with described reacting part, for trapping the ammonium salt formed through described single treatment operation and the alkali salt formed through described after-treatment operation in the waste gas of discharging from described reacting part simultaneously.
The dry type minimizing technology of harmful substance in waste gas of the present invention, comprising:
Carry out plasma reaction to waste gas, the nitrogen oxide contained from waste gas to carry out single treatment operation and oxysulfide generate the step of ammonium salt; Generate agent to the waste gas supply salt through described single treatment operation, to carry out the step of after-treatment operation, this after-treatment operation comprises the denitrification process to nitrogen oxide and the sulfur removal technology to oxysulfide; And from the waste gas through described after-treatment operation, trap the step of the alkali salt formed in the ammonium salt and described after-treatment operation that are formed in described single treatment operation simultaneously.Described step of carrying out plasma reaction to waste gas comprises the steps: to generate the efficiency of the denitrification process of agent to improve the salt that utilizes carried out in described after-treatment operation, is the pretreatment procedure of nitrogen dioxide by the oxidation of nitric oxide contained in waste gas; And in order to carry out described after-treatment operation in dry type mode, plasma reaction is carried out to carry out described single treatment operation to waste gas.Carry out in the step of after-treatment operation described, perform the denitrification process that the nitrogen oxide through described pretreatment procedure is carried out and the sulfur removal technology that oxysulfide residual in the waste gas of described single treatment operation is carried out simultaneously.
The present invention can realize following effect.
The present invention can not only carry out denitrification process and sulfur removal technology simultaneously, and after the pretreatment procedure carrying out the nitrogen dioxide proportion improved in nitrogen oxide, utilizes salt to generate agent and generate alkali salt, thus can improve the efficiency of denitrification process.
Because the present invention can carry out denitrification process and sulfur removal technology simultaneously, therefore, it is possible to by reducing the scale of setting area to alleviate the restriction of floor space, the investment cost of the equipment for removing harmful substance from waste gas can be reduced thus.
The present invention utilizes the equipment carrying out sulfur removal technology and denitrification process, can optionally remove the dust contained in waste gas further, thus scale, investment cost and the operating cost building and possess the setting area needed for harmful substance eliminating equipment of desulphurization plant, denitrification equipment and dust-collecting equipment can be reduced.
Accompanying drawing explanation
Fig. 1 is the structure chart of the dry type removal device of harmful substance in waste gas of the present invention.
Fig. 2 is the summary construction diagram of the dry type removal device being harmful substance in the waste gas that relates to of variant embodiment of the present invention to Fig. 4
Fig. 5 is the block diagram of reacting part of the present invention.
Fig. 6 to Fig. 8 is the outline precedence diagram of the dry type minimizing technology of harmful substance of the present invention.
Reference numeral
2: reacting part
3: salt generates agent supply unit
4: bag filter
5: ammonia supply unit
6: hydrocarbon supply unit
7: test section
Detailed description of the invention
The dry type removal device of harmful substance in waste gas of the present invention is described in detail referring to accompanying drawing.
With reference to Fig. 1, in waste gas of the present invention, the dry type removal device 1 of harmful substance is for removing harmful substance in the waste gas from waste gas generation source 10 discharge.It can be steel mill, power plant etc. that described waste gas produces source 10.Such as, described waste gas produces source 10 can be to iron ore is processed into the agglomerating plant of the block-shape morphology being easy to load blast furnace etc. and the sintering process carried out in steel mill.Produce the waste gas of discharging in source 10 containing oxysulfide (SO from described waste gas x), nitrogen oxide (NO x) etc. harmful substance.In waste gas of the present invention, the dry type removal device 1 of harmful substance is after removing the harmful substance in the waste gas supplied by described waste gas generation source 10, and the waste gas being removed harmful substance, by chimney 20, is disposed in air.
In waste gas of the present invention, the dry type removal device 1 of harmful substance comprises: reacting part 3, carries out single treatment operation and pretreatment procedure to producing the waste gas of discharging in source 10 from described waste gas; Salt generates agent supply unit 3, generates agent, to carry out after-treatment operation to the waste gas supply salt of discharging from described reacting part 2; And bag filter (BagFilter) 4, for trapping ammonium salt, alkali salt etc. in the waste gas from described reacting part 2 discharge simultaneously.
Described reacting part 2 carries out single treatment operation and pretreatment procedure, single treatment operation makes the nitrogen oxide that contains in waste gas and oxysulfide generate ammonium salt, the nitric oxide (NO) of pretreatment procedure by containing in oxidation gaseous effluent, generates nitrogen dioxide (NO 2).Thus, described reacting part 2 can improve the proportion of the nitrogen dioxide contained in waste gas before carrying out after-treatment operation.Described reacting part 2 by carrying out plasma reaction to waste gas, to carry out single treatment operation and pretreatment procedure.
Described salt generates agent supply unit 3 by generating agent to the waste gas supply salt of discharging from described reacting part 2, generates alkali salt with the nitrogen oxide contained from waste gas and oxysulfide.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance performs after-treatment operation, this after-treatment operation comprise denitrification process that the nitrogen oxide through described pretreatment procedure is carried out and through described single treatment operation discarded in residual oxysulfide carry out sulfur removal technology.
Described bag filter 4 traps the ammonium salt formed through described single treatment operation and the alkali salt formed through described after-treatment operation simultaneously, thus finally removes harmful substance from waste gas.
Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can play following effect.
In waste gas of the present invention, the dry type removal device 1 of harmful substance by carrying out described pretreatment procedure before described after-treatment operation, to improve the proportion of the nitrogen dioxide contained in waste gas, thus the efficiency utilizing salt to generate the denitrification process of agent can be improved in described after-treatment operation.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance utilizes salt generation agent can carry out sulfur removal technology efficiently, and, described pretreatment procedure was carried out before carrying out described after-treatment operation, agent is generated to utilize salt in described after-treatment operation, carry out efficient denitrification process simultaneously, thus the treatment effeciency to the harmful substance contained in waste gas can be improved.
In waste gas of the present invention, the dry type removal device 1 of harmful substance is by carrying out plasma reaction to carry out described single treatment operation to waste gas, therefore, without the need to supplying the moisture etc. of steam, heating to waste gas in order to heat exhaust gases, but described after-treatment operation can be carried out in dry type mode.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can omit firing equipment for the moisture etc. of generating steam, heating and heating process, thus the generation of the carbon dioxide that can prevent described firing equipment and the burning of fuel carried out needed for described heating process from causing.Thus, produce harmful substance, i.e. carbon dioxide when the dry type removal device 1 of harmful substance is by preventing from removing nitrogen oxide, oxysulfide etc. in waste gas of the present invention, thus the production facility solving environmental problem can be built.
The dry type removal device 1 of harmful substance in waste gas of the present invention, by described after-treatment operation, denitrification process and sulfur removal technology are carried out to waste gas simultaneously, relative to the prior art individually arranging desulphurization plant and denitrification equipment, the scale of setting area can be reduced, to alleviate the restriction of floor space.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can reduce the investment cost of the equipment for removing harmful substance from waste gas.
Below, describe described reacting part 2 in detail with reference to accompanying drawing, described salt generates agent supply unit 3 and described bag filter 4.
With reference to Fig. 1 and Fig. 2, described reacting part 2 is arranged on described waste gas and produces between source 10 and described bag filter 4.After the waste gas of described waste gas generation source 10 discharge is supplied to described reacting part 2, be supplied to described bag filter 4 through described reacting part 2.Described reacting part 2, by reacting part conduit 30, produces source 10 with described waste gas and is connected.Waste gas is supplied to described reacting part 2 by described reacting part conduit 30 after producing source 10 discharge from described waste gas.Described reacting part conduit 30 can be provided with the first blower fan 100, described first blower fan 100 can produce source 10 combustion gas from described waste gas, and can move to described bag filter 4 by producing the waste gas of discharging in source 10 from described waste gas from described reacting part 2.As shown in Figure 2, described first blower fan 100 also can be arranged between described reacting part 2 and described bag filter 4.
Described reacting part 2 is by producing plasma to waste gas electric discharge.Thus, reacting part 2 carries out pretreatment procedure, and namely by carrying out plasma reaction to waste gas, the nitric oxide contained in oxidation gaseous effluent is to generate nitrogen dioxide.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can utilize the salt supplied by described salt generation agent supply unit 3 to generate agent, improves the efficiency of the denitrification process to waste gas.This is described in detail as follows.
First, the part nitric oxide contained in waste gas is formed as ammonium salt by described single treatment operation and is removed.Such as, according to process conditions, described single treatment operation can realize the nitric oxide removal efficiency of about 40%.So, after described single treatment operation, still residue in nitric oxide in waste gas can generate agent and carry out reacting and be removed by generating with described salt salt that agent supply unit 3 supplies, but, residual nitric oxide in the waste gas of described after-treatment operation.
In order to address this problem, the dry type removal device 1 of harmful substance in waste gas of the present invention, carries out described pretreatment procedure at described reacting part 2.By carrying out described pretreatment procedure at described reacting part 2, the nitric oxide contained in oxidation gaseous effluent and with generated salt that agent supply unit 3 supplies by described salt and generate agent and react, to generate the high nitrogen dioxide of removal efficiency.Thus, the dry type removal device 1 of harmful substance in waste gas of the present invention, described pretreatment procedure was carried out before carrying out described after-treatment operation, to improve the proportion of the nitrogen dioxide contained in waste gas, thus the efficiency utilizing the denitrification process of calcium hydroxide in described after-treatment operation can be improved.
Such as, in waste gas of the present invention, the dry type removal device 1 of harmful substance carries out pretreatment procedure at reacting part 2, the nitrogen dioxide in the nitrogen oxide contained by waste gas is made to reach 40% ~ 100%, afterwards, by described after-treatment operation, the denitrification process utilizing salt to generate agent to carry out nitrogen oxide, thus the efficiency of denitrification process can be increased to more than 70%.
Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can utilize salt generation agent to carry out sulfur removal technology efficiently, and, described pretreatment procedure was carried out before carrying out described after-treatment operation, agent is generated to utilize salt in described after-treatment operation, carry out efficient denitrification process simultaneously, thus the treatment effeciency to the harmful substance contained in waste gas can be improved.Namely, in waste gas of the present invention, the dry type removal device 1 of harmful substance is by described single treatment operation, after preliminary removal sulfur and nitrogen oxides, utilize salt to generate the removal of agent secondary and residue in the sulfur and nitrogen oxides in the waste gas of described pretreatment procedure, thus can improve harmful substance removal efficiency.With reference to Fig. 1, described salt generates agent supply unit 3 and generates agent to the waste gas supply salt of discharging from described reacting part 2.Salt generates the nitrogen oxide that contains in agent and waste gas and oxysulfide to carry out reaction and generates alkali salt, thus realizes the after-treatment operation of described denitrification process and described sulfur removal technology simultaneously.
Described salt generates agent supply unit 3 and generates agent to from described reacting part 2 to the waste gas of described bag filter 4 movement supply salt.Now, described salt generation agent supply unit 3 can be connected with bag filter conduit 40.One end of described bag filter conduit 40 is connected with described reacting part 2, and the other end is connected with described bag filter 4.Waste gas, from after described reacting part 2 is discharged, is supplied to described bag filter 4 by described pocket type conduit 40.Described salt generates agent supply unit 3 and supplies salt generation agent to described bag filter conduit 40, to carry out after-treatment operation to the waste gas of discharging from described reacting part 2.
Although not shown, described salt generates agent supply unit 3 and can comprise: salt generates agent storage unit, stores salt and generates agent; And salt generates agent feed unit, the salt generated in agent storage unit for being stored in described salt to waste gas supply generates agent.In order to the quantity delivered regulating the salt to waste gas supply to generate agent, described salt generates agent feed unit and has air door, flow control valve etc.
With reference to Fig. 1 and Fig. 2, described salt generates agent supply unit 3 can comprise calcium hydroxide supply unit 31 (shown in Fig. 2).
Described calcium hydroxide supply unit 31 generates the calcium hydroxide of agent as salt to the waste gas supply of discharging from described reacting part 2.The nitrogen oxide contained in calcium hydroxide and waste gas and oxysulfide react and generate calcium salt, carry out after-treatment operation to realize described denitrification process and described sulfur removal technology simultaneously.Now, described after-treatment operation, according to following reaction equation 1 to reaction equation 3, realizes sulfur removal technology and denitrification process simultaneously.
[reaction equation 1]
[reaction equation 2]
[reaction equation 3]
Described reaction equation 1 relates to sulfur removal technology.After described single treatment operation, residue in the sulfur dioxide (SO in waste gas 2) according to reaction equation 1, generate calcium sulfate (CaSO with the calcium hydroxide reaction supplied from described calcium hydroxide supply unit 31 4).Thus, sulfur removal technology is carried out.Sulfur removal technology in described after-treatment operation, by realizing to carrying out plasma reaction at described reacting part 2 pairs of waste gas to carry out the waste gas supply calcium hydroxide of single treatment operation.Thus, in described after-treatment operation, sulfur removal technology can carry out in dry type mode under the low temperature of about 130 DEG C.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance supplies the moisture etc. of steam, heating to waste gas without the need to the waste gas in order to heat through described single treatment operation, can carry out sulfur removal technology in described after-treatment operation.Thus, the harmful substance that in waste gas of the present invention, the dry type removal device 1 of harmful substance can prevent generating steam, the burning of the required fuel such as moisture of heating brings, namely carbon dioxide produces again.
Described reaction equation 2 relates to denitrification process.After described pretreatment procedure, the nitrogen dioxide (NO contained in waste gas 2) according to reaction equation 2, the calcium hydroxide reaction supplied with described calcium hydroxide supply unit 31, generates calcium nitrate (Ca (NO 3) 2).Thus, denitrification process is carried out.
Described reaction equation 3 relates to denitrification process.When after described single treatment operation and described pretreatment procedure, in waste gas time residual nitric oxide (NO), this nitric oxide (NO) is according to reaction equation 3, the calcium hydroxide supplied with described calcium hydroxide supply unit 31 and the nitrogen dioxide contained in waste gas after described pretreatment procedure react, thus generate calcium nitrate.Thus, denitrification process is carried out.Thus, the dry type removal device 1 of harmful substance in waste gas of the present invention, even if still remain nitric oxide after described single treatment operation and described after-treatment operation, also calcium hydroxide can be utilized to carry out denitrification process to these nitric oxides, thus in described after-treatment operation, the efficiency utilizing the denitrification process of calcium hydroxide can be improved further.
Through after-treatment operation as above, the nitrogen oxide contained in waste gas and oxysulfide react according to reaction equation 1 to reaction equation 3 respectively and generate calcium salt, thus carry out sulfur removal technology and denitrification process simultaneously.
Described calcium hydroxide supply unit 31 can supply the calcium hydroxide corresponding with the amount of the harmful substance contained in waste gas to waste gas.When the amount of the harmful substance contained during the amount of the calcium hydroxide that described calcium hydroxide supply unit 31 supplies is relative to waste gas is too much, occur not reacting and the calcium hydroxide of slip away (Slip) with harmful substance in described after-treatment operation.When the amount of the harmful substance contained during the amount of the calcium hydroxide that described calcium hydroxide supply unit 31 supplies is relative to waste gas is very few, cause the residual harmful substance not forming calcium salt in described after-treatment operation.
In order to prevent this phenomenon, the stoichiometric proportion of calcium hydroxide (NSR:NormalizedStoichiometricRatio) can be adjusted to 1.5 ~ 5 and supply to waste gas by described calcium hydroxide supply unit 31.When described calcium hydroxide supply unit 31 is less than the calcium hydroxide of 1.5 to waste gas supply NSR, cause the residual harmful substance not forming calcium salt in described after-treatment operation.When described calcium hydroxide supply unit 31 is greater than the calcium hydroxide of 5 to waste gas supply NSR, appears at and do not react with harmful substance in described after-treatment operation and the calcium hydroxide of slipping away.Described calcium hydroxide supply unit 31 can supply to waste gas the amount that NSR is adjusted to the calcium hydroxide of 1.5 ~ 5, can realize the denitrification process according to chemical formula 2 and chemical formula 3 that carries out the nitrogen oxide through described pretreatment procedure and to residuing in through described single treatment operation the sulfur removal technology according to chemical formula 1 that the sulfur dioxide in waste gas carries out simultaneously.
Although not shown, described calcium hydroxide supply unit 31 can comprise: calcium hydroxide storage unit, stores calcium hydroxide; And calcium hydroxide feed unit, for supplying the calcium hydroxide be stored in described calcium hydroxide storage unit to waste gas.In order to regulate the quantity delivered of the calcium hydroxide to waste gas supply, described calcium hydroxide feed unit has air door, flow control valve etc.
With reference to Fig. 1 and Fig. 3, described salt generates agent supply unit 3 can comprise sodium acid carbonate supply unit 32 (shown in Fig. 3).
Described sodium acid carbonate supply unit 32 generates the sodium acid carbonate of agent as salt to the waste gas supply of discharging from described reacting part 2.Sodium acid carbonate generates sodium salt, to realize the after-treatment operation of described denitrification process and described sulfur removal technology simultaneously by reacting with the nitrogen oxide that contains in waste gas and oxysulfide.Now, described after-treatment operation, according to following reaction equation 4 and reaction equation 5, carries out sulfur removal technology and denitrification process simultaneously.
[reaction equation 4]
[reaction equation 5]
Described reaction equation 4 relates to sulfur removal technology.After described single treatment operation, residue in the sulfur dioxide (SO in waste gas 2) according to reaction equation 4, with the reaction of sodium bicarbonate supplied from described sodium acid carbonate supply unit 32, thus generate sodium sulphate (NaSO 4).Thus, sulfur removal technology is carried out.
Described reaction equation 5 relates to denitrification process.Nitrogen dioxide (the NO contained in waste gas after described pretreatment procedure 2) according to reaction equation 5, the reaction of sodium bicarbonate supplied with described sodium acid carbonate supply unit 32, generates sodium nitrate (NaNO 3).Thus, denitrification process is carried out.
By after-treatment operation as above, the nitrogen oxide contained in waste gas and oxysulfide react according to described reaction equation 4 and described reaction equation 5 respectively, generate sodium salt, thus carry out sulfur removal technology and denitrification process simultaneously.
Described sodium acid carbonate supply unit 32 can supply the sodium acid carbonate corresponding with the amount of the sulfur and nitrogen oxides contained in waste gas to waste gas.When the amount of the sulfur and nitrogen oxides contained during the amount of the sodium acid carbonate that described sodium acid carbonate supply unit 32 supplies is relative to waste gas is too much, produces and do not react with sulfur and nitrogen oxides in described after-treatment operation and the sodium acid carbonate of slipping away.When the amount of the sulfur and nitrogen oxides contained during the amount of the sodium acid carbonate that described sodium acid carbonate supply unit 32 supplies is relative to waste gas is very few, cause the residual sulfur and nitrogen oxides not forming calcium salt in described after-treatment operation.
In order to prevent this phenomenon, described sodium acid carbonate supply unit 32 can regulate the quantity delivered of the sodium acid carbonate to waste gas supply, to make nitrogen oxide and sodium acid carbonate with the stoichiometric proportion (NO of 1:1 x: NaHCO 3=1:1) react, make oxysulfide and sodium acid carbonate with the stoichiometric proportion (SO of 1:2 x: NaHCO 3=1:2) react.Described sodium acid carbonate supply unit 32 also can the quantity delivered of sodium acid carbonate of subtend waste gas supply regulate, to make nitrogen dioxide and sodium acid carbonate react with the stoichiometric proportion of 1:1, sulfur dioxide and sodium acid carbonate are reacted with the stoichiometric proportion of 1:2.The stoichiometric proportion of sodium acid carbonate (NSR:NormalizedStoichiometricRatio) can be adjusted to 1.0 ~ 2.5 and supply to waste gas by described sodium acid carbonate supply unit 32.When described sodium acid carbonate supply unit 32 is less than the sodium acid carbonate of 1.0 to waste gas supply NSR, the residual sulfur and nitrogen oxides not forming sodium salt in described after-treatment operation can be caused.When described sodium acid carbonate supply unit 32 is greater than the sodium acid carbonate of 2.5 to waste gas supply NSR, appears at and do not react with sulfur and nitrogen oxides in described after-treatment operation and the sodium acid carbonate of slipping away.
Although not shown, described sodium acid carbonate can comprise to portion 32: sodium acid carbonate storage unit, stores sodium acid carbonate; And sodium acid carbonate feed unit, for supplying the sodium acid carbonate be stored in described sodium acid carbonate storage unit to waste gas.In order to regulate the quantity delivered of the sodium acid carbonate to waste gas supply, described sodium acid carbonate feed unit has air door, flow control valve etc.
Referring to figs. 1 through Fig. 3, when containing hydrogen chloride (HCl) in the waste gas producing source 10 discharge from described waste gas, described salt generates agent supply unit 3 can generate agent to the waste gas supply salt of discharging from described reacting part 2, thus carry out after-treatment operation, with outside described denitrification process and described sulfur removal technology, carry out the dehydrochlorination technique that the hydrogen chloride contained in waste gas is carried out simultaneously.
When described salt generation agent supply unit 3 comprises described calcium hydroxide supply unit 31, described dehydrochlorination operation carries out described sulfur removal technology and described denitrification process according to following reaction equation 6 simultaneously.
[reaction equation 6]
Ca(OH) 2+2HCl→CaCl 2+2H 2O
The hydrogen chloride contained in waste gas is according to reaction equation 6, and the calcium hydroxide supplied with described calcium hydroxide supply unit 31 carries out reaction and generates calcium chloride (CaCl 2).Thus, dehydrochlorination technique is carried out.
When described salt generation agent supply unit 3 comprises described sodium acid carbonate supply unit 32, described dehydrochlorination technique carries out described sulfur removal technology and described denitrification process according to following reaction equation 7 simultaneously.
[reaction equation 7]
NaH(CO) 3+HCl→NaCl+2H 2O+CO 2
The hydrogen chloride contained in waste gas is according to reaction equation 7, and the sodium acid carbonate supplied with described sodium acid carbonate supply unit 31 carries out reaction and generates sodium chloride (NaCl).Thus, dehydrochlorination operation is carried out.
As mentioned above, in waste gas of the present invention, the dry type removal device 1 of harmful substance contains except nitrogen oxide and oxysulfide except removing in waste gas, can also remove the hydrogen chloride contained in waste gas.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can be applicable to the waste gas discharge source 10 of the waste gas containing various harmful substance, thus can improve application.
With reference to Fig. 1 and Fig. 5, described bag filter 4 is connected with described reacting part 2.Described bag filter 4 can pass through described bag filter conduit 40, is connected with described reacting part 2.Described bag filter 4 is liquid or solid matter by micro hole trapping, thus blocks passing through of liquid or solid matter.Thus, described bag filter 4 is captured in the ammonium salt formed in described single treatment operation and the alkali salt formed in described after-treatment operation from the waste gas that described reacting part 2 supplies simultaneously.
Thus, finally harmful substance is removed the waste gas that described bag filter 4 can supply from reacting part 2.The surface of described bag filter 4 can be coated with the material of the strainability excellences such as polytetrafluoroethylene (PTFE) (Teflon).Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can improve the removal efficiency that harmful substance removed by described bag filter 4 from waste gas.
Such as, described bag filter 4 can trap ammonium salt and calcium salt simultaneously, and wherein, described ammonium salt comprises the NH generated by NO by described single treatment operation 4nO 3and by SO 2the NH generated 4hSO 3, NH 4hSO 4, (NH 4) 2sO 3, (NH 4) 2sO 4, described calcium salt comprises by described after-treatment operation by NO and NO 2ca (the NO generated 3) 2, by SO 2the Ca generated 2sO 4and the CaCl to be generated by HCl 2.
Such as, described bag filter 4 can trap simultaneously comprise ammonium salt and sodium salt, and wherein, described ammonium salt comprises the NH generated by NO by described single treatment operation 4nO 3and by SO 2the NH generated 4hSO 3, NH 4hSO 4, (NH 4) 2sO 3, (NH 4) 2sO 4, described sodium salt comprises by described after-treatment operation by NO 2the NaNO generated 3, and by SO 2the Na generated 2sO 4.
Described bag filter 4 can also trap dust (Dust) etc. from the waste gas supplied by described reacting part 2.Described bag filter 4 can also trap unreacted salt and generate agent.Although not shown, in waste gas of the present invention, the dry type removal device 1 of harmful substance can comprise for reclaiming the unreacted salt generation agent trapped by described bag filter 4.Described retracting device can store unreacted salt and generate agent.Described retracting device also can generate agent supply unit 3 to described salt and supply unreacted salt generation agent, to reuse unreacted salt generating agent.
Described bag filter 4, by discharge pipe 50, is connected with described chimney 20.After by described bag filter 4, by the waste gas of finally removing harmful substance, described discharge pipe 50 moves along the river, be disposed in air by described chimney 20.Described discharge pipe 50 can be combined with the second blower fan 200 for mobile waste gas.Described second blower fan 200 can move waste gas, so that from described bag filter 4 combustion gas, and the waste gas of discharging from described bag filter 4 is disposed to air by described chimney 20.
With reference to Fig. 1 and Fig. 4, in waste gas of the present invention, the dry type removal device 1 of harmful substance also comprises ammonia supply unit 5.
Described ammonia supply unit 5 is to the waste gas supply ammonia (NH being supplied to reacting part 2 3).Ammonia mixes with waste gas, and utilizes at the nitrogen oxide be contained in waste gas from described reacting part 2 by single treatment operation respectively and oxysulfide generation ammonium salt.By still residual nitrogen oxide in the waste gas after described reacting part 2, the amount of ammonia is adjusted to during waste gas supply ammonia by described ammonia supply unit 5, makes the nitrogen dioxide in nitrogen oxide residual in the waste gas of described pretreatment procedure reach more than 40%.Preferably, the amount of ammonia is adjusted to during waste gas supply ammonia by described ammonia supply unit 5, makes the nitrogen dioxide in nitrogen oxide residual in the waste gas of described pretreatment procedure reach more than 90%.
Described ammonia supply unit 5 supplies to waste gas after the NSR of ammonia can being adjusted to 0.05 ~ 0.8.Through the waste gas of so process, after the denitrification process to nitrogen oxide is carried out in the salt generation agent supplied by described salt generation agent supply unit 3, trapped by described bag filter 4, thus be removed from waste gas.
Described ammonia supply unit 5 can correspond to the ammonia of the amount of the sulfur and nitrogen oxides contained in waste gas to waste gas supply.When described ammonia supply unit 5 is greater than 0.8 to being adjusted to by the NSR of ammonia during waste gas supply ammonia, appearing at and not reacting with sulfur and nitrogen oxides in described single treatment operation and the ammonia of slipping away.When described ammonia supply unit 5 is less than 0.1 to being adjusted to by the NSR of ammonia during waste gas supply ammonia, the residual sulfur and nitrogen oxides not forming ammonium salt in described single treatment operation can be caused.
Described ammonia supply unit 5 also can to described reacting part 2 inside supply ammonia.Described ammonia supply unit 5 also can supply ammonia to described reacting part conduit 30.Now, described ammonia supply unit 5 is connected with described reacting part conduit 30.Although not shown, described ammonia supply unit 5 can comprise: ammonia storage unit, stores ammonia; And ammonia feed unit, for supplying the ammonia be stored in described ammonia storage unit to waste gas.In order to regulate the quantity delivered of the ammonia to waste gas supply, described ammonia feed unit has air door, flow control valve etc.
With reference to Fig. 1 and Fig. 4, in waste gas of the present invention, the dry type removal device 1 of harmful substance also comprises hydrocarbon supply unit 6.
Described hydrocarbon supply unit 6 is to the waste gas supply hydrocarbon being supplied to described reacting part 2.Such as, described hydrocarbon can be propylene (C 3h 6).Be supplied to the hydrocarbon of waste gas and the reaction such as oxygen atom, ozone of described reactor 3 inside, generate RO 2peroxide (R=H, CH 3, HCO 3, C 2h 3, C 2h 5deng).This RO 2oxidation of nitric oxide more effectively can be become nitrogen dioxide by peroxide, thus can improve the efficiency of described pretreatment procedure.In addition, RO 2oxidizing sulfur dioxide more effectively can be become sulfur trioxide by peroxide, thus can improve the efficiency of described single treatment operation.Thus, described hydrocarbon supply unit 6 raising is supplied to the efficiency of the described single treatment operation under the per unit energy density of the electric power of described reacting part 2, thus can reduce for generation of the electric power needed for described plasma.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can reduce operating cost.
Described hydrocarbon supply unit 6 can regulate the amount of hydrocarbon and supply to waste gas, so that the nitrogen dioxide in nitrogen oxide residual in the waste gas of described pretreatment procedure reaches more than 40%.Preferably, the amount of hydrocarbon can be adjusted to during waste gas supply hydrocarbon by described hydrocarbon supply unit 6, and the nitrogen dioxide in nitrogen oxide residual in the waste gas of described pretreatment procedure reaches more than 90%.
Described hydrocarbon supply unit 6 can be equivalent to the hydrocarbon of the amount of the NSR of 0.2 ~ 1.0 to waste gas supply.When described hydrocarbon supply unit 6 amount of hydrocarbon is adjusted to NSR be greater than 1.0 and supply to waste gas time, due to the hydrocarbon relative to described energy density glut, there will be the hydrocarbon of slipping away.When described hydrocarbon supply unit 6 amount of hydrocarbon is adjusted to NSR be less than 0.2 and supply to waste gas time, owing to supplying very few hydrocarbon relative to described energy density, thus the effect reducing described reacting part 2 required electric power amount reduces.The amount of propylene can be adjusted to the amount corresponding with the energy density of the electric power being supplied to described reacting part 2 and supply to waste gas by described hydrocarbon supply unit 6.
Described hydrocarbon supply unit 6 can to described reacting part 2 inside supply hydrocarbon.Described hydrocarbon supply unit 6 also can supply hydrocarbon to described reacting part conduit 30.Now, described hydrocarbon supply unit 6 is connected with described reacting part conduit 30.Described hydrocarbon supply unit 6 can be connected with described reacting part conduit 30 with on the position separated of described ammonia supply unit 5.Described hydrocarbon supply unit 6 to produce the mode between source 10 and described ammonia supply unit 5 at described waste gas, can be connected with described reacting part conduit 30.
Although not shown, described hydrocarbon supply unit 6 can comprise: hydrocarbon storage unit, stores hydrocarbon; And hydrocarbon feed unit, for supplying the hydrocarbon be stored in described hydrocarbon storage unit to waste gas.In order to regulate the quantity delivered of the hydrocarbon to waste gas supply, described hydrocarbon feed unit has air door, flow control valve etc.
With reference to Fig. 4, in waste gas of the present invention, the dry type removal device 1 of harmful substance also comprises test section 7.
Described test section 7 detects at least one in nitrogen oxide, oxysulfide and ammonia from the waste gas that described bag filter 4 is discharged.Detected value can be provided to described ammonia supply unit 5 by described test section 7.Described ammonia supply unit 5 can regulate the quantity delivered of the ammonia being supplied to waste gas according to the detected value provided by described test section 7.Such as, when the detected value of the ammonia that described test section 7 detects is greater than a reference value preset, described ammonia supply unit 5 can reduce the quantity delivered of the ammonia being supplied to waste gas.Thus, the ammonia that described ammonia supply unit 5 is not utilized by minimizing and slips away in institute's single treatment operation, thus the amount of the ammonia contained the waste gas of discharging from described bag filter 4 can be reduced.Such as, when the described nitrogen oxide of test section 7 detection or the detected value of oxysulfide are greater than a reference value preset, described ammonia supply unit 5 can be increased supply to the quantity delivered of the ammonia of described waste gas.Thus, described ammonia supply unit 5 is increased in the amount being generated ammonium salt in described single treatment operation by described nitrogen oxide and oxysulfide, thus can reduce the amount of nitrogen oxide or the oxysulfide contained the waste gas of discharging from described bag filter 4
Detected value can be provided to described salt and generate agent supply unit 3 by described test section 7.Described salt generates agent supply unit 3 and the salt being supplied to waste gas can be regulated according to the detected value provided by described test section 7 to generate the quantity delivered of agent.Such as, when the described nitrogen oxide of test section 7 detection or the detected value of oxysulfide are greater than a reference value preset, described salt generates agent supply unit 3 and can increase supply to the quantity delivered of the salt generation agent of described waste gas.Thus, described salt generates agent supply unit 3 by being increased in the amount being generated calcium salt in described after-treatment operation by described nitrogen oxide and oxysulfide, thus can reduce the amount of nitrogen oxide or the oxysulfide contained the waste gas of discharging from described bag filter 4.
Described test section 7 can be arranged between described bag filter 4 and described chimney 20.Described test section 7 can be arranged on described discharge pipe 50.Described test section 7 can detect by described discharge pipe 50, from described bag filter 4 at least one content in nitrogen oxide, oxysulfide and the ammonia the waste gas of described chimney 20 movement.Described test section 7 comprises at least one in oxysulfide analyzer, analysis of nitrogen oxide device and ammonia analyzer.Described test section 7 can also detect chlorination hydrogen amount, Dust Capacity, temperature, moisture etc. from the waste gas of being discharged by bag filter 4.
Referring to figs. 1 through Fig. 5, described reacting part 2 can comprise multiple reaction chambers 21,22 and multiple applying unit 23,24.
Described reaction chamber 21,22 produces source 10 with described waste gas and is connected.At least one in described reaction chamber 21,22, by described reacting part conduit 30, produces source 10 with described waste gas and is connected.Described chamber 21,22 is interconnected by connecting duct (not shown).After the waste gas of described waste gas generation source 10 discharge is supplied to described reaction chamber 21,22, after described reaction chamber 21,22, be supplied to described bag filter 4.
Described applying unit 23,24 applies voltage respectively to the discharge electrode 211,221 being arranged on described reaction chamber 21,22 inside.Described applying unit 23,24 can regulate the voltage putting on described discharge electrode 211,221.Thus, described applying unit 23,24 can make described reaction chamber 21,22 change between control of dust pattern and plasma reaction pattern respectively.Control of dust pattern is, by the dust contained in trap exhaust, to remove the pattern of dust from waste gas.Plasma reaction pattern is, carries out the pattern of described pretreatment procedure and described single treatment operation.
Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can carry out denitrification process to waste gas and sulfur removal technology simultaneously, but also can carry out removing the dust contained in waste gas.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance is relative to the prior art individually arranging desulphurization plant, denitrification equipment and dust-collecting equipment, by reducing the scale of setting area, thus can alleviate the impact that floor space brings.Thus, in waste gas of the present invention, the dry type removal device 1 of harmful substance can reduce the investment cost of the equipment for removing harmful substance from waste gas.
With reference to Fig. 2 and Fig. 5, described reacting part 2 can comprise the first reaction chamber 21 being provided with the first discharge electrode 211, the second reaction chamber 22 being provided with the second discharge electrode 221, for regulating the first applying unit 23 of the voltage putting on described first discharge electrode 211 and for regulating the second applying unit 24 of the voltage putting on described second discharge electrode 221.
Described first reaction chamber 21, by described reacting part conduit 30, produces source 10 with described waste gas and is connected.
Described first applying unit 23, by regulating the voltage putting on described first discharge electrode 211, makes described first reaction chamber 21 change between control of dust pattern and plasma reaction pattern.
When described first reaction chamber 21 is with plasma reaction work pattern, described first applying unit 23 applies positive polarity voltage pulses to described first discharge electrode 211.Thus, waste gas carries out plasma reaction in described first reaction chamber 21 inside, thus carries out described first treatment process and pretreatment procedure.Now, described first discharge electrode 211 is negative poles.Described first applying unit 23 by applying the positive polarity voltage pulses of 130 ~ 160kV to described first discharge electrode 211, thus can make described first reaction chamber 21 with plasma reaction work pattern.
When described first reaction chamber 21 is with control of dust work pattern, described first applying unit 23 applies cathode voltage pulse to described first discharge electrode 211.Thus, be attached to the surface of the dust contained in waste gas at the anion of described first discharge electrode 211 generation, make dust electronegative.The dust being attached with anion be attached to be arranged at described first reaction chamber 21 inside the first collecting plate (not shown) on, thus to be removed from waste gas.Now, described first discharge electrode 211 is negative poles, and described first collecting plate is positive pole.Described first applying unit 23 applies the cathode voltage pulse of 50 ~ 70kV to described first discharge electrode 211, thus described first reaction chamber 21 can be made with control of dust work pattern.Cathode voltage pulse and backward described first discharge electrode 211 of direct current cathode voltage superposition also can apply by described first applying unit 23, thus make described first reaction chamber 21 with control of dust work pattern.
Described first applying unit 23 can comprise the first direct current transformer 231, first Pulse Electric depressor 232, first switching mechanism 233.
Described first direct current transformer 231 is provided for the DC voltage applied to described first discharge electrode 211 to described first switching mechanism 233.When described first reaction chamber 21 is with control of dust work pattern, described first direct current transformer 231 can provide the DC voltage of-50kV to described first switching mechanism.
Described first Pulse Electric depressor 232 is provided for the pulse voltage applied to described first discharge electrode 211 to described first switching mechanism 233.Described first Pulse Electric depressor 232 can provide positive polarity voltage pulses to described first switching mechanism 233.
When described first reaction mechanism 21 is with control of dust work pattern, described first switching mechanism 233 by the direct current cathode voltage provided by described first direct current transformer 231 and provided by described first Pulse Electric depressor 232 pulse voltage superposition backward described first discharge electrode 211 apply.Now, described first switching mechanism 233 can convert the positive polarity voltage pulses provided by described first Pulse Electric depressor 232 to cathode voltage pulse, and superposes backward described first discharge electrode 211 with the direct current cathode voltage provided by described first direct current transformer 231 and apply.
When described first reaction chamber 21 is with plasma reaction work pattern, described first switching mechanism 233 provides the pulse voltage provided by described first Pulse Electric depressor 232 to described first discharge electrode 211.
Described second reaction chamber 22, by described connecting duct, is connected with described first reaction chamber 21.Produce the waste gas of discharging in source 10 from described waste gas and be supplied to described second reaction chamber 22 after described first reaction chamber 21.When producing source 10 as benchmark using described waste gas, described second reaction chamber 22 is arranged on the rear end of described first reaction chamber 21.Described first reaction chamber 21 is arranged on the front end of described second reaction chamber 22.
Described second applying unit 24 regulates the voltage putting on described second discharge electrode 221.Described reacting part 2 makes described second reaction chamber 22 with plasma reaction work pattern, and according to the state of waste gas, described first reaction chamber 21 can be made to change between control of dust pattern and plasma reaction pattern.When the dust contained in waste gas amount too much or the amount of the nitrogen oxide contained in waste gas and oxysulfide is very few time, described first applying unit 23 can make described first reaction chamber 21 with control of dust work pattern.When the amount of the nitrogen oxide that the Dust Capacity contained in waste gas is very few or contain in waste gas and oxysulfide is too much, described first applying unit 23 can make described first reaction chamber 21 with plasma reaction work pattern.
Described second applying unit 24 also can, by regulating the voltage putting on described second discharge electrode 221, make described second reaction chamber 22 change between control of dust pattern and plasma reaction pattern.Now, described second applying unit 24, by applying positive polarity voltage pulses to described second discharge electrode 221, makes described second reaction chamber 22 with plasma reaction work pattern.Now, described second applying unit 24 can apply the positive polarity voltage pulses of 130 ~ 160kV to described second discharge electrode 221.Described second applying unit 24, by applying cathode voltage pulse to described second discharge electrode 221, makes described second reaction chamber 22 with control of dust work pattern.Now, described second applying unit 24 can apply the cathode voltage pulse of 50 ~ 70kV to described second discharge electrode 221.Described second applying unit 24 also can by cathode voltage pulse and after-applied extremely described second discharge electrode 221 of direct current cathode voltage superposition.
Described second applying unit 24 can comprise the second direct current transformer 241, second Pulse Electric depressor 242, second switching mechanism 243.
Described second direct current transformer 241 is provided for the DC voltage applied to described second discharge electrode 221 to described second switching mechanism 243.When described second reaction chamber 22 is with control of dust work pattern, described second direct current transformer 241 can provide the DC voltage of-50kV to described first switching mechanism.
Described second Pulse Electric depressor 242 is provided for the pulse voltage applied to described second discharge electrode 221 to described second switching mechanism 243.Described second Pulse Electric depressor 242 can provide positive polarity voltage pulses to described second switching mechanism 243.
When described second reaction mechanism 22 is with control of dust work pattern, described second switching mechanism 243 by the direct current cathode voltage provided by described second direct current transformer 241 and provided by described second Pulse Electric depressor 242 pulse voltage superposition backward described second discharge electrode 221 apply.Now, described second switching mechanism 243 can convert the positive polarity voltage pulses provided by described first Pulse Electric depressor 232 to cathode voltage pulse, and superposes backward described second discharge electrode 221 with the direct current cathode voltage provided by described second direct current transformer 241 and apply.
When described second reaction chamber 22 is with plasma reaction work pattern, described second switching mechanism 243 provides the pulse voltage provided by described second Pulse Electric depressor 242 to described second discharge electrode 221.
With reference to Fig. 3 and Fig. 5, described reacting part 2 also comprises the 3rd reaction chamber 25, the 3rd applying unit 26, the 4th reaction chamber 27 and the 4th applying unit 28.
Described 3rd reaction chamber 25 is connected with described second reaction chamber 22.Thus, waste gas, after described second reaction chamber 22, moves to described 3rd reaction chamber 25.
Described 3rd applying unit 26, by regulating the voltage putting on the 3rd discharge electrode (not shown) be arranged on described 3rd reaction chamber 25, makes described 3rd reaction chamber 25 change between control of dust pattern and plasma reaction pattern.Although not shown, described 3rd applying unit 26 can comprise the 3rd direct current transformer, the 3rd Pulse Electric depressor and the 3rd switching mechanism.Because the structure of described 3rd direct current transformer, described 3rd Pulse Electric depressor and described 3rd switching mechanism is identical with described first direct current transformer 231, described first Pulse Electric depressor 232 and described first switching mechanism 233 respectively, therefore omit specific description.
Described 4th reaction chamber 27 is connected with described 3rd reaction chamber 25.Thus, waste gas, after described 3rd reaction chamber 25, moves to described 4th reaction chamber 27.Described 4th reaction chamber 27 can be connected with described bag filter conduit 40.Now, waste gas, after described first reaction chamber 21, described second reaction chamber 22, described 3rd reaction chamber 25 and described 4th reaction chamber 26, moves to described bag filter conduit 40.
Described 4th applying unit 28, by regulating the voltage putting on the 4th discharge electrode (not shown) be arranged on described 4th reaction chamber 27, makes described 4th reaction chamber 27 change between control of dust pattern and plasma reaction pattern.Although not shown, described 4th applying unit 28 can comprise the 4th direct current transformer, the 4th Pulse Electric depressor and the 4th switching mechanism.Because the structure of described 4th direct current transformer, described 4th Pulse Electric depressor and described 4th switching mechanism is identical with described first direct current transformer 231, described first Pulse Electric depressor 232 and described first switching mechanism 233 respectively, therefore omit specific description.
As mentioned above, when described reacting part 2 comprises described first reaction chamber 21, described second reaction chamber 22, described 3rd reaction chamber 25 and described 4th reaction chamber 27, described reacting part 2 makes described 4th reaction chamber 27 be connected directly between on described bag filter conduit 40 work in the mode being fixed on plasma reaction pattern, and other reaction chambers 21,22,25 except described 4th reaction chamber 27 are changed between control of dust pattern and plasma reaction pattern.
Such as, described reacting part 2 can make described 4th reaction chamber 27 with plasma reaction work pattern, makes described first reaction chamber 21, described second reaction chamber 22 and described 3rd reaction chamber 25 with control of dust work pattern.
Such as, described reacting part 2 also can make described 3rd reaction chamber 25 and described 4th reaction chamber 27 with plasma reaction work pattern, makes described first reaction chamber 21 and described second reaction chamber 22 with control of dust work pattern.
Such as, described reacting part 2 also can make described second reaction chamber 22, described 3rd reaction chamber 25 and described 4th reaction chamber 27 with plasma reaction work pattern, makes described first reaction chamber 21 with control of dust work pattern.
Described reacting part 2 also can make the first reaction chamber 21 be connected directly between on described waste gas generation source 10 work in the mode being fixed on control of dust pattern, the 4th reaction chamber 27 be connected directly between on described bag filter 40 is worked in the mode being fixed into plasma reaction pattern, the reaction chamber 22,25 between described first reaction chamber 21 and described 4th reaction chamber 27 is changed respectively between control of dust pattern and plasma reaction pattern.
Although not shown, described reacting part 2 also can have the described reaction chamber of more than five and described applying unit respectively.Now, when being benchmark with described waste gas generation source 10, described reacting part 2 can make the reaction chamber being arranged on rear end with plasma reaction work pattern, and the chamber being arranged on front end is changed between control of dust pattern and plasma reaction pattern.Thus, described reacting part 2 changes with the reaction chamber quantity of control of dust work pattern and with the reaction chamber quantity of plasma reaction work pattern.
Described reacting part 2 according at least one in the amount of the oxysulfide contained in the amount of the nitrogen oxide contained in the amount of the dust contained in waste gas, waste gas and waste gas, can change with the quantity of the reaction chamber of described control of dust work pattern and with the quantity of the reaction chamber of described plasma reaction work pattern.Now, the applying unit be connected on described reaction chamber puts on the voltage of the discharge electrode be separately positioned on described reaction chamber by adjustment, thus can change with the quantity of the reaction chamber of control of dust work pattern and with the quantity of the reaction chamber of plasma reaction work pattern.Described reacting part conduit 30 can arrange the amount for detecting dust dust sensor, for detect the amount of oxysulfide oxysulfide analyzer, for detecting at least one in the analysis of nitrogen oxide device of the amount of nitrogen oxide.
Below, the preferred embodiment of the dry type minimizing technology of harmful substance in the waste gas that present invention will be described in detail with reference to the accompanying relates to.
Fig. 6 to Fig. 8 is the outline precedence diagram of the dry type minimizing technology of harmful substance of the present invention.
Referring to figs. 1 through Fig. 6, the dry type minimizing technology of harmful substance of the present invention produces the harmful substance in the waste gas of source 10 discharge for removing waste gas.The dry type minimizing technology of harmful substance of the present invention can the dry type removal device 1 of harmful substance of the application of the invention carry out.The dry type minimizing technology of harmful substance of the present invention comprises following process.
First, plasma reaction (S10) is carried out to producing the waste gas of discharging in source 10 by waste gas.This operation S10 can make the waste gas of described reacting part 2 inside discharge, and makes waste gas carry out plasma reaction.
The operation S10 making described waste gas carry out plasma reaction comprises the operation S11 carrying out single treatment operation and the operation S12 carrying out pretreatment procedure.
The described operation S11 carrying out single treatment operation can discharge by making waste gas, and in induction waste gas, the sulfur and nitrogen oxides that contains becomes plasmoid, and final and ammonia react and the mode that generates ammonium salt realizes.This operation S11 can complete in described reacting part 3 inside.Described single treatment operation can be carried out according to following reaction equation 8 and reaction equation 9.
[reaction equation 8]
[reaction equation 9]
In described reaction equation 8 and reaction equation 9, [O] represents dissimilar oxide.Such as, [O] is discharged by waste gas and induces into hydroxyl (OH), oxygen atom (O), the ozone (O that plasmoid formed 3) etc.The nitrogen oxide contained in waste gas and oxysulfide and [O] oxide react and oxidized after, and be present in the hydrone (H contained in the air of waste gas or described reacting part 3 inside 2o) or hydroxyl (OH) reaction, generate nitric acid (HNO respectively 3) and sulfuric acid (H 2sO 4).The nitric acid generated and sulfuric acid and ammonia (NH 3) reaction generate ammonium nitrate (NH respectively 4nO 3) and ammonium sulfate ((NH 4) 2sO 4), thus generate ammonium salt.Described ammonia also containing in the offgas, also can be supplied by ammonia supply unit 5.
By said process, the nitrogen oxide contained in waste gas and oxysulfide carry out reaction according to described reaction equation 8 and reaction equation 9 respectively and generate ammonia salt, thus carry out described single treatment operation.
Carry out in the operation S12 of described pretreatment procedure, in described after-treatment operation, utilizing salt to generate the efficiency of the denitrification process that agent is carried out in order to improving, by the nitric oxide (NO) contained in oxidation gaseous effluent, generating nitrogen dioxide (NO 2).The operation S12 carrying out described pretreatment procedure discharges by making waste gas, and the nitric oxide contained in waste gas is induced into plasmoid, thus makes nitric oxide generate nitrogen dioxide according to following reaction equation.
[reaction equation 10] e+O 2→ O+O+e
[reaction equation 11] e+O 2→ O+O ( 1d)+e
[reaction equation 12] O ( 1d)+H 2o → O+H 2o
[reaction equation 13] O ( 1d)+O 2→ O+O 2
[reaction equation 14] O ( 1d)+N 2→ O+N 2
[reaction equation 15] e+H 2o → OH+e
[reaction equation 16] O ( 1d)+H 2o → OH+OH
[reaction equation 17] OH+OH → H 2o+O
[reaction equation 18] O+O 2→ O 3
[reaction equation 19] NO+ (O, O 3) → NO 2
Detailed observing response formula 10 to reaction equation 12, along with the air being present in waste gas and described reacting part 3 inside induces into plasmoid at the internal discharge of described reacting part 2, the part oxygen molecule (O contained in waste gas or air 2) react according to reaction equation 10, generate oxygen atom (O).In addition, the part oxygen molecule (O contained in waste gas or air 2) react according to reaction equation 11, generate oxygen atom (O) and excitation state oxygen atom (O ( 1d)).
According to the part oxygen atom (O) that reaction equation 10 and reaction equation 11 are formed, react according to the nitric oxide (NO) contained in reaction equation 19 and waste gas and generate nitrogen dioxide (NO 2).In addition, according to the part oxygen atom (O) that reaction equation 10 and reaction equation 11 are formed, according to the oxygen molecule (O contained in reaction equation 18 and waste gas or air 2) react and generate ozone (O 3) after, react according to the nitric oxide (NO) contained in reaction equation 19 and waste gas and generate nitrogen dioxide (NO 2).
According to reaction equation 11 formed excitation state oxygen atom (O ( 1d)), according to reaction equation 12 to reaction equation 14, respectively with the hydrone (H that contains in waste gas or air 2o), oxygen molecule (O 2), nitrogen molecular (N 2) react and generate oxygen atom (O).According to the part oxygen atom (O) that reaction equation 12 to reaction equation 14 is formed, react according to reaction equation 19 and nitric oxide (NO) and generate nitrogen dioxide (NO 2).In addition, according to the part oxygen atom (O) that reaction equation 12 to reaction equation 14 is formed, according to the oxygen molecule (O contained in reaction equation 18 and waste gas or air 2) react and generate ozone (O 3) after, react according to the nitric oxide (NO) contained in reaction equation 19 and waste gas, thus generate nitrogen dioxide (NO 2).
In addition, along with the atmospherical discharges being present in described reacting part 3 inside induces into plasmoid, the hydrone (H contained in waste gas or air 2o), after reacting generation hydroxyl (OH) according to reaction equation 15, react according to reaction equation 17 and generate oxygen atom (O).According to the part oxygen atom (O) that reaction equation 15 and reaction equation 17 generate, react according to reaction equation 19 and nitric oxide (NO) and generate nitrogen dioxide (NO 2).According to the part oxygen atom (O) that reaction equation 15 and reaction equation 17 generate, according to the oxygen molecule (O contained in reaction equation 18 and waste gas 2) reaction generation ozone (O 3) after, react according to the nitric oxide (NO) contained in reaction equation 19 and waste gas and generate nitrogen dioxide (NO 2).Hydroxyl (OH) in reaction equation 17 can be according to reaction equation 11 formed excitation state oxygen atom O ( 1d) according to reaction equation 16 and hydrone (H 2o) reaction and formed.
By process as above, its result, the nitric oxide contained in waste gas, according to reaction equation 19 and oxygen atom (O) or ozone (O 3) reaction and oxidized, generate nitrogen dioxide thus, to carry out described pretreatment procedure (S12).
The operation S12 carrying out described pretreatment procedure and the operation S11 carrying out described single treatment operation can be performed in described reactor 3 inside simultaneously.Also can first realize the operation S12 carrying out described pretreatment procedure and arbitrary operation of carrying out in the operation S11 of described single treatment operation in described reactor 3 inside, realize another operation afterwards.When the operation S11 of described single treatment operation is carried out in execution in the ban, the operation S12 carrying out described pretreatment procedure also can be oxidized the nitric oxide still residued in waste gas after described single treatment, to generate nitrogen dioxide.
Describedly the energy density for generation of plasma can be adjusted to 1.5 ~ 5Wh/Nm to the operation S10 that waste gas carries out plasma reaction 3and supply to described reacting part 2.This operation can be realized by described applying unit 23,24.Thus, the dry type minimizing technology of harmful substance in waste gas of the present invention, can carry out described pretreatment procedure and reach more than 40% to make the nitrogen dioxide in the nitrogen oxide that contains in waste gas.
Secondly, after-treatment operation (S20) is carried out.This operation S20 can generate agent supply unit 3 with described salt and realize to the mode of discharging the waste gas supply salt generation agent that backward described bag filter 4 supplies from described reacting part 2.By carrying out the operation S20 of described after-treatment operation, carry out to the denitrification process carried out through the nitrogen oxide of described pretreatment procedure and to the sulfur removal technology residuing in the oxysulfide in waste gas carry out after described single treatment operation simultaneously.
Secondly, trapping ammonium salt and alkali salt (S30).This operation S30 can realize in the mode being trapped ammonium salt and alkali salt by described bag filter 4 from the waste gas through described after-treatment operation simultaneously.Thus, in waste gas of the present invention, the dry type minimizing technology of harmful substance can finally remove nitrogen oxide and oxysulfide.When to produce in the waste gas of discharging in source 10 containing hydrogen chloride from described waste gas, the operation S30 of described trapping ammonium salt and alkali salt can trapping nitrogen oxides, oxysulfide and hydrogen chloride simultaneously.The operation S30 of described trapping ammonium salt and alkali salt also can realize in the mode being trapped dust further by described bag filter 4, unreacted salt generates agent.Through the waste gas of the operation S30 of described trapping ammonium salt and alkali salt, be disposed in air by chimney 20.
With reference to Fig. 1 and Fig. 7, described in carry out after-treatment operation operation S20 can comprise the operation of supply calcium hydroxide.Can realize in the mode supplying calcium hydroxide to waste gas by described calcium hydroxide supply unit 31 in the operation of described supply calcium hydroxide.Thus, the dry type minimizing technology of harmful substance in waste gas of the present invention, carries out according to the sulfur removal technology of reaction equation 1 and according to reaction equation 2 and the denitrification process according to reaction equation 3 waste gas simultaneously.Now, the dehydrochlorination operation according to reaction equation 6 can also be carried out further.When the described operation S20 carrying out after-treatment operation comprises the operation of described supply calcium hydroxide, the operation S30 of described trapping ammonium salt and alkali salt can trap ammonium salt and calcium salt simultaneously.
With reference to Fig. 1 and Fig. 7, described in carry out after-treatment operation operation S20 can comprise the operation of supply sodium acid carbonate.Can realize in the mode supplying sodium acid carbonate to waste gas by described sodium acid carbonate supply unit 32 in the operation of described supply sodium acid carbonate.Thus, the dry type minimizing technology of harmful substance in waste gas of the present invention, carries out according to the sulfur removal technology of reaction equation 4 and the denitrification process according to reaction equation 5 waste gas simultaneously.Now, the dehydrochlorination operation according to reaction equation 7 can also be carried out further.When the described operation S20 carrying out after-treatment operation comprises the operation of described supply sodium acid carbonate, the operation S30 of described trapping ammonium salt and alkali salt can trap ammonium salt and sodium salt simultaneously.
Referring to figs. 1 through Fig. 7, in waste gas of the present invention, the dry type minimizing technology of harmful substance also comprises the operation S40 of supply ammonia.
The operation S40 of described supply ammonia can to discharge and the mode of the waste gas supply ammonia supplied to described reacting part 2 realizes to producing source 10 from described waste gas with described ammonia supply unit 5.Thus, waste gas is present in described reacting part 2 inside with the state mixed with ammonia.
Referring to figs. 1 through Fig. 7, in waste gas of the present invention, the dry type minimizing technology of harmful substance also comprises the operation S50 of supply hydrocarbon.
The operation S50 of described supply hydrocarbon can to discharge and the mode of the waste gas supply hydrocarbon supplied to described reacting part 2 realizes to producing source 10 from described waste gas with described hydrocarbon supply unit 6.Thus, waste gas is present in described reacting part 2 inside with the state mixed with hydrocarbon.The operation S50 of described supply hydrocarbon can after the operation S40 of described supply ammonia and described waste gas is carried out to the operation S10 of plasma reaction before carry out.
Referring to figs. 1 through Fig. 7, in waste gas of the present invention, the dry type minimizing technology of harmful substance can also comprise the operation S60 detecting at least one content in nitrogen oxide, oxysulfide and ammonia from waste gas.
The operation S60 of described detection level can realize in the mode being detected at least one content in nitrogen oxide, oxysulfide and the ammonia the waste gas of discharging from described bag filter 4 by described test section 7.The operation S60 of described detection level can carry out after the operation S30 of described trapping ammonium salt and alkali salt.The detected value of at least one in nitrogen oxide, oxysulfide and ammonia can be supplied at least one place in described ammonia supply unit 5 and described salt generation agent supply unit 3 by described test section 7.
Now, the operation S40 of described supply ammonia can comprise the operation of the quantity delivered regulating ammonia according to detected value.This operation can to regulate the mode of the quantity delivered of ammonia to realize by described ammonia supply unit 5.
The operation S20 of described process after-treatment operation can comprise the operation of the quantity delivered regulating salt according to detected value.This operation can generate agent supply unit 5 with described salt and regulate the mode of the quantity delivered of salt generation agent to realize.
With reference to Fig. 1, Fig. 5 and Fig. 8, in waste gas of the present invention, the dry type minimizing technology of harmful substance can also comprise the operation S70 for regulating the voltage putting on discharge electrode.
The operation S70 that described adjustment puts on the voltage of discharge electrode can regulate the mode putting on the voltage of the discharge electrode 211,221 be separately positioned on described reaction chamber 21,22 to realize with described applying unit 23,24.Thus, the operation S70 that described adjustment puts on the voltage of discharge electrode can change with the quantity of the reaction chamber of control of dust work pattern and with the quantity of the reaction chamber of plasma reaction work pattern.The operation S70 that described adjustment puts on the voltage of discharge electrode according at least one in the amount of the oxysulfide contained in the amount of the nitrogen oxide contained in the amount of the dust contained in waste gas, waste gas and waste gas, can change with the quantity of the reaction chamber of control of dust work pattern and with the quantity of the reaction chamber of plasma reaction work pattern.
The operation S70 that described adjustment puts on the voltage of discharge electrode can regulate the voltage putting on described discharge electrode 211,221, to make at least one reaction chamber with plasma reaction work pattern, and all or part of with control of dust work pattern in other reaction chambers.The operation S70 that described adjustment puts on the voltage of discharge electrode also can regulate the voltage putting on described discharge electrode 211,221, to make described reaction chamber 21,22 all with plasma reaction work pattern.
When at least one in described reaction chamber 21,22 is with control of dust work pattern, in waste gas of the present invention, the dry type minimizing technology of harmful substance can also comprise the operation S80 of trapping dust.
The operation S80 of described trapping dust can by carrying out with the reaction chamber of control of dust work pattern in described reaction chamber 21,22.The operation S80 of described trapping dust can carry out before the operation S10 described waste gas being carried out to plasma reaction.
The present invention described above is not defined in the above embodiments and accompanying drawing, and in the scope exceeding technological thought of the present invention, can carry out various displacement, distortion and change, this is apparent for a person skilled in the art.

Claims (13)

1. the dry type removal device of harmful substance in waste gas, is characterized in that, comprising:
Reacting part, utilizes plasma to carry out single treatment operation and pretreatment procedure, and the nitrogen oxide that described single treatment operation contains from waste gas and oxysulfide generate ammonium salt, and the nitric oxide that described pretreatment procedure contains from waste gas generates nitrogen dioxide;
Salt generates agent supply unit, agent is generated to the waste gas supply salt of discharging from described reacting part, to carry out the after-treatment operation comprising denitrification process and sulfur removal technology, wherein, this denitrification process carries out the nitrogen dioxide formed through described pretreatment procedure, and this sulfur removal technology carries out sulfur dioxide residual in the waste gas of described single treatment operation; And
Bag filter, is connected with described reacting part, for trapping the ammonium salt formed through described single treatment operation and the alkali salt formed through described after-treatment operation in the waste gas of discharging from described reacting part simultaneously.
2. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that,
Described salt generates agent supply unit and comprises calcium hydroxide supply unit for supplying calcium hydroxide, and the nitrogen oxide contained in described calcium hydroxide and waste gas and oxysulfide react and generate calcium salt,
Described calcium hydroxide supply unit is to the waste gas supply calcium hydroxide of discharging from described reacting part, and to carry out after-treatment operation, in this after-treatment operation, described denitrification process and described sulfur removal technology carry out simultaneously.
3. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that,
Described salt generates agent supply unit and comprises sodium acid carbonate supply unit for supplying sodium acid carbonate, and the nitrogen oxide contained in described sodium acid carbonate and waste gas and oxysulfide react and generate sodium salt,
Described sodium acid carbonate supply unit is to the waste gas supply sodium acid carbonate of discharging from described reacting part, and to carry out after-treatment operation, in this after-treatment operation, described denitrification process and described sulfur removal technology carry out simultaneously.
4. the dry type removal device of harmful substance in waste gas according to any one of claim 1 to 3, is characterized in that,
Described salt generates agent supply unit and generates agent to waste gas supply salt, to carry out after-treatment operation, in this after-treatment operation, carries out outside described denitrification process and described sulfur removal technology simultaneously, also carries out the dehydrochlorination operation to the hydrogen chloride contained in waste gas simultaneously.
5. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that, also comprise:
Reacting part conduit, produces source and described reacting part for connecting waste gas;
Hydrocarbon supply unit, to the waste gas supply hydrocarbon being supplied to described reacting part; And
Ammonia supply unit, to the waste gas supply ammonia being supplied to described reacting part.
6. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that,
Also comprise: ammonia supply unit, to the waste gas supply ammonia being supplied to described reacting part; And test section, from the waste gas that described bag filter is discharged, detect the content of at least one in nitrogen oxide, oxysulfide and ammonia,
Described ammonia supply unit regulates the quantity delivered of ammonia according to the detected value provided by described test section,
Described salt generates agent supply unit and regulates salt to generate the quantity delivered of agent according to the detected value provided by described test section.
7. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that,
Described reacting part comprises: the first reaction chamber, is connected with the waste gas source of generation; First applying unit, for applying voltage to the first discharge electrode being arranged on described first reaction chamber; Second reaction chamber, is connected with described first reaction chamber; And second applying unit, for applying voltage to the second discharge electrode being arranged on described second reaction chamber,
Described first applying unit regulates and puts on the voltage of described first discharge electrode, the control of dust pattern of the dust contained in trap exhaust to make described first reaction chamber and carry out described pretreatment procedure and described single treatment operation plasma reaction pattern between change.
8. the dry type removal device of harmful substance in waste gas according to claim 1, is characterized in that,
Described reacting part comprises: multiple reaction chamber, is connected with the waste gas source of generation; And multiple applying unit, the voltage that the discharge electrode being separately positioned on described multiple reaction chamber applies is regulated, the control of dust pattern of the dust contained in trap exhaust to make described multiple reaction chamber and carry out described pretreatment procedure and described single treatment operation plasma reaction pattern between change
Described applying unit, respectively according at least one in the sulfur oxides level in the dust content in waste gas, the amount of nitrogen oxides in waste gas and waste gas, changes with the quantity of the reaction chamber of described control of dust work pattern and with the quantity of the reaction chamber of described plasma reaction work pattern.
9. the dry type minimizing technology of harmful substance in waste gas, is characterized in that, comprise the following steps:
Carry out plasma reaction to waste gas, the nitrogen oxide contained from waste gas to carry out single treatment operation and oxysulfide generate the step of ammonium salt;
Generate agent to the waste gas supply salt through described single treatment operation, to carry out the step of after-treatment operation, this after-treatment operation comprises the denitrification process to nitrogen oxide and the sulfur removal technology to oxysulfide; And
Trap the step of the alkali salt formed in the ammonium salt formed in described single treatment operation and described after-treatment operation from the waste gas through described after-treatment operation simultaneously,
Described the step that waste gas carries out plasma reaction to be comprised: generating the efficiency of the denitrification process of agent to improve the salt that utilizes carried out in described after-treatment operation, is the pretreatment procedure of nitrogen dioxide by the oxidation of nitric oxide contained in waste gas; And in order to carry out described after-treatment operation in dry type mode, plasma reaction is carried out to carry out described single treatment operation to waste gas,
Carry out in the step of after-treatment operation described, carry out the denitrification process that the nitrogen oxide through described pretreatment procedure is carried out and the sulfur removal technology that oxysulfide residual in the waste gas of described single treatment operation is carried out simultaneously.
10. the dry type minimizing technology of harmful substance in waste gas according to claim 9, is characterized in that,
Described step of carrying out after-treatment operation comprises: supply calcium hydroxide makes the nitrogen oxide in waste gas and oxysulfide form calcium salt, to carry out the step of described denitrification process and described sulfur removal technology simultaneously,
Described bag filter traps the ammonium salt formed by described single treatment operation and the calcium salt formed by described after-treatment operation simultaneously.
In 11. waste gas according to claim 9, the dry type minimizing technology of harmful substance, is characterized in that,
Described step of carrying out after-treatment operation comprises: supply sodium acid carbonate makes the nitrogen oxide in waste gas and oxysulfide form sodium salt, to carry out the step of described denitrification process and described sulfur removal technology simultaneously,
Described bag filter traps the ammonium salt formed by described single treatment operation and the sodium salt formed by described after-treatment operation simultaneously.
In 12. waste gas according to any one of claim 9 to 11, the dry type minimizing technology of harmful substance, is characterized in that,
Described step of carrying out after-treatment operation comprises: generate agent, to carry out, outside described denitrification process and described sulfur removal technology, also the hydrogen chloride in waste gas being carried out to the step of dehydrochlorination operation simultaneously simultaneously to waste gas supply salt.
In 13. waste gas according to claim 9, the dry type minimizing technology of harmful substance, is characterized in that,
The voltage also comprised the discharge electrode that is separately positioned on described multiple reaction chamber applies regulates, to make the control of dust pattern of the dust of multiple reaction chambers in trap exhaust be connected with the waste gas source of generation and to carry out the step changed between the plasma reaction pattern of described pretreatment procedure and described single treatment operation.
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