CN105305872A - 大行程高精度微纳驱动装置及其定位方法 - Google Patents
大行程高精度微纳驱动装置及其定位方法 Download PDFInfo
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- CN105305872A CN105305872A CN201410801643.6A CN201410801643A CN105305872A CN 105305872 A CN105305872 A CN 105305872A CN 201410801643 A CN201410801643 A CN 201410801643A CN 105305872 A CN105305872 A CN 105305872A
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CN201410801643.6A CN105305872B (zh) | 2014-12-22 | 2014-12-22 | 大行程高精度微纳驱动装置及其定位方法 |
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CN105305872A true CN105305872A (zh) | 2016-02-03 |
CN105305872B CN105305872B (zh) | 2017-08-15 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109813476A (zh) * | 2019-01-23 | 2019-05-28 | 广西大学 | 一种基于结构解耦的新型电容式力矩传感器 |
CN110832767A (zh) * | 2017-06-30 | 2020-02-21 | 物理仪器(Pi)两合有限公司 | 旋转超声电动机 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5239361A (en) * | 1991-10-25 | 1993-08-24 | Nicolet Instrument Corporation | Dynamic mirror alignment device for the interferometer of an infrared spectrometer |
CN201075845Y (zh) * | 2007-09-05 | 2008-06-18 | 清华大学 | 螺母型超声电机 |
CN1879232B (zh) * | 2003-09-08 | 2010-04-07 | 新测量科技有限公司 | 超声导螺杆电动机 |
CN103133488A (zh) * | 2013-03-12 | 2013-06-05 | 哈尔滨工业大学 | 夹心式自由梁扭转振动工作模式的可解锁螺母 |
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2014
- 2014-12-22 CN CN201410801643.6A patent/CN105305872B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5239361A (en) * | 1991-10-25 | 1993-08-24 | Nicolet Instrument Corporation | Dynamic mirror alignment device for the interferometer of an infrared spectrometer |
CN1879232B (zh) * | 2003-09-08 | 2010-04-07 | 新测量科技有限公司 | 超声导螺杆电动机 |
CN201075845Y (zh) * | 2007-09-05 | 2008-06-18 | 清华大学 | 螺母型超声电机 |
CN103133488A (zh) * | 2013-03-12 | 2013-06-05 | 哈尔滨工业大学 | 夹心式自由梁扭转振动工作模式的可解锁螺母 |
Non-Patent Citations (1)
Title |
---|
程廷海: "中空柱状定子二阶弯振的旋转直线超声电机", 《电机与控制学报》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110832767A (zh) * | 2017-06-30 | 2020-02-21 | 物理仪器(Pi)两合有限公司 | 旋转超声电动机 |
US11218089B2 (en) | 2017-06-30 | 2022-01-04 | Physik Instrumente (Pi) Gmbh & Co. Kg | Rotary motor with ultrasonic actuator |
CN109813476A (zh) * | 2019-01-23 | 2019-05-28 | 广西大学 | 一种基于结构解耦的新型电容式力矩传感器 |
CN109813476B (zh) * | 2019-01-23 | 2021-03-16 | 广西大学 | 一种基于结构解耦的电容式力矩传感器 |
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Inventor after: Cheng Tinghai Inventor after: Fu Xianpeng Inventor after: Wang Liang Inventor after: Wang Yingting Inventor after: He Meng Inventor after: Li Hengyu Inventor after: Zhang Bangcheng Inventor before: Cheng Tinghai Inventor before: Wang Liang Inventor before: Liu Xiaoyong Inventor before: He Lipeng Inventor before: Li Shaosong Inventor before: Zhang Bangcheng Inventor before: Wang Yingting |
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Effective date of registration: 20170719 Address after: 130012 Yanan street, Jilin, Chaoyang District, No. 2055, No. Applicant after: Changchun Polytechnic Univ. Address before: 130012 Yanan street, Jilin, No. 2055, No. Applicant before: Cheng Tinghai |
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