CN105301285A - 减少加速度计中的滞后效应 - Google Patents

减少加速度计中的滞后效应 Download PDF

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Publication number
CN105301285A
CN105301285A CN201510392868.5A CN201510392868A CN105301285A CN 105301285 A CN105301285 A CN 105301285A CN 201510392868 A CN201510392868 A CN 201510392868A CN 105301285 A CN105301285 A CN 105301285A
Authority
CN
China
Prior art keywords
raised
accelerometer
support structure
flexure
proof mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510392868.5A
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English (en)
Chinese (zh)
Inventor
P.德维尔
W.李
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of CN105301285A publication Critical patent/CN105301285A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B32B37/18—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of discrete sheets or panels only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B2037/1253—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives curable adhesive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/546—Flexural strength; Flexion stiffness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
CN201510392868.5A 2014-07-08 2015-07-07 减少加速度计中的滞后效应 Pending CN105301285A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/326224 2014-07-08
US14/326,224 US9658244B2 (en) 2014-07-08 2014-07-08 Reducing hysteresis effects in accelerometer

Publications (1)

Publication Number Publication Date
CN105301285A true CN105301285A (zh) 2016-02-03

Family

ID=53365935

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510392868.5A Pending CN105301285A (zh) 2014-07-08 2015-07-07 减少加速度计中的滞后效应

Country Status (4)

Country Link
US (1) US9658244B2 (enExample)
EP (1) EP2966450B1 (enExample)
JP (1) JP2016017962A (enExample)
CN (1) CN105301285A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10401378B2 (en) 2015-10-21 2019-09-03 Honeywell International Inc. Accelerometer
US10335897B2 (en) * 2016-07-28 2019-07-02 Applied Physics, Inc. Laser ablation of accelerometer proof mass
US10437616B2 (en) * 2016-12-31 2019-10-08 Intel Corporation Method, apparatus, system for optimized work submission to an accelerator work queue
KR101915770B1 (ko) * 2017-10-17 2018-11-06 국방과학연구소 열탄성 코일패드 내장형 가속도계
US10859593B2 (en) 2018-08-31 2020-12-08 Honeywell International Inc. Reducing thermal expansion induced errors in a magnetic circuit assembly
US11521772B2 (en) 2020-02-11 2022-12-06 Honeywell International Inc. Multilayer magnetic circuit assembly
US11169175B2 (en) * 2020-02-11 2021-11-09 Honeywell International Inc. Multilayer excitation ring
US20230290663A1 (en) * 2022-03-11 2023-09-14 X-Celeprint Limited Printing components suspended by frames

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4592234A (en) * 1984-06-11 1986-06-03 Sundstrand Data Control, Inc. Suspension system for a transducer
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
WO1996024853A1 (en) * 1995-02-09 1996-08-15 Alliedsignal Inc. Accelerometer with improved support rim isolation
EP2722676A1 (en) * 2012-10-19 2014-04-23 Honeywell International Inc. Acceleration sensor with stress reduction components

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4736629A (en) 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4697455A (en) 1986-04-16 1987-10-06 Sundstrand Data Control, Inc. Accelerometer coil mounting system
US4726228A (en) * 1986-04-16 1988-02-23 Sundstrand Data Control, Inc. Accelerometer proof mass interface
US4872342A (en) 1986-06-27 1989-10-10 Sundstrand Data Control, Inc. Translational accelerometer and accelerometer assembly method
US5095749A (en) 1986-08-25 1992-03-17 Hanson Richard A Proofmass suspension assembly for accelerometers
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
JP3142292B2 (ja) 1990-06-11 2001-03-07 サンドストランド・コーポレイション 絶縁した屈曲部を有する加速度計
US5090243A (en) 1990-06-11 1992-02-25 Sundstrand Data Control, Inc. Preload system for accelerometer
US5605598A (en) 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5289719A (en) 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5600067A (en) 1993-08-18 1997-02-04 Alliedsignal, Inc. Torque wire thermal strain relief
US5693882A (en) 1996-02-27 1997-12-02 Honeywell Inc. Force sensing device having breakout tabs
US5962784A (en) 1997-05-27 1999-10-05 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5905201A (en) 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
WO1999051991A1 (en) 1998-04-03 1999-10-14 Alliedsignal Inc. Clamshell cover accelerometer
US6389899B1 (en) 1998-06-09 2002-05-21 The Board Of Trustees Of The Leland Stanford Junior University In-plane micromachined accelerometer and bridge circuit having same
US7541214B2 (en) 1999-12-15 2009-06-02 Chang-Feng Wan Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
DE60213981T2 (de) * 2001-05-15 2007-08-30 Honeywell International Inc. Element zur spannungsentlastung für einen beschleunigungssensor
US6912902B2 (en) 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US20090205424A1 (en) * 2008-02-15 2009-08-20 Honeywell International Inc. Flexure type accelerometer and method of making same
US8528405B2 (en) * 2009-12-04 2013-09-10 The Charles Stark Draper Laboratory, Inc. Flexure assemblies and methods for manufacturing and using the same
US8516887B2 (en) 2010-04-30 2013-08-27 Qualcomm Mems Technologies, Inc. Micromachined piezoelectric z-axis gyroscope
IL215656A0 (en) * 2011-10-10 2011-11-30 Israel Aerospace Ind Ltd Accelerometer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3702073A (en) * 1969-02-28 1972-11-07 Sundstrand Data Control Accelerometer
US4182187A (en) * 1978-04-24 1980-01-08 Sundstrand Data Control, Inc. Force balancing assembly for transducers
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4592234A (en) * 1984-06-11 1986-06-03 Sundstrand Data Control, Inc. Suspension system for a transducer
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
WO1996024853A1 (en) * 1995-02-09 1996-08-15 Alliedsignal Inc. Accelerometer with improved support rim isolation
US5763779A (en) * 1995-02-09 1998-06-09 Alliedsignal, Inc. Accelerometer with improved support rim isolation
EP2722676A1 (en) * 2012-10-19 2014-04-23 Honeywell International Inc. Acceleration sensor with stress reduction components

Also Published As

Publication number Publication date
EP2966450B1 (en) 2017-05-24
US9658244B2 (en) 2017-05-23
EP2966450A1 (en) 2016-01-13
JP2016017962A (ja) 2016-02-01
US20160011229A1 (en) 2016-01-14

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Effective date of abandoning: 20200211