CN105300283B - A kind of one-dimensional air supporting raster scanning gauge head - Google Patents

A kind of one-dimensional air supporting raster scanning gauge head Download PDF

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Publication number
CN105300283B
CN105300283B CN201510776729.2A CN201510776729A CN105300283B CN 105300283 B CN105300283 B CN 105300283B CN 201510776729 A CN201510776729 A CN 201510776729A CN 105300283 B CN105300283 B CN 105300283B
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CN
China
Prior art keywords
seat
chaining pin
installing plate
blind hole
raster scanning
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Expired - Fee Related
Application number
CN201510776729.2A
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Chinese (zh)
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CN105300283A (en
Inventor
丁建军
张吉虎
刘阳鹏
曹靖舒
李兵
蒋庄德
毛丰
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Xi'an Qinchuan Siyuan Measuring Instrument Co Ltd
Xian Jiaotong University
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Xi'an Qinchuan Siyuan Measuring Instrument Co Ltd
Xian Jiaotong University
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Application filed by Xi'an Qinchuan Siyuan Measuring Instrument Co Ltd, Xian Jiaotong University filed Critical Xi'an Qinchuan Siyuan Measuring Instrument Co Ltd
Priority to CN201510776729.2A priority Critical patent/CN105300283B/en
Publication of CN105300283A publication Critical patent/CN105300283A/en
Application granted granted Critical
Publication of CN105300283B publication Critical patent/CN105300283B/en
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Abstract

The invention discloses a kind of one-dimensional air supporting raster scanning gauge head, including bearing, hold seat and be installed on the chaining pin on chaining pin seat;End seat is made up of biside plate and front end installing plate;Chaining pin seat is installed on, by tension Magnet, suction piece, steel ball occlusion, the lateral surface holding seat front end installing plate, is provided with air suspension shaft sleeve in end seat, and mandrel is installed between the biside plate of end seat, is provided with dynamometer spring between air suspension shaft sleeve and the side plate holding seat;The medial surface of end seat front end installing plate arranges grating scale and read head.The present invention is when chaining pin stress, chaining pin, chaining pin seat, end seat and mandrel can move together, the location variation of chaining pin is changed into the variable quantity of grating scale reading, do not rely on the Cleaning Principle of self neutralizing frequency, and it is dependent on mechanical drive principle and grating completes detection, not only detection sensitivity is high but also capacity of resisting disturbance is strong, simple in construction, easily realize, it is possible to achieve the measurement of probe location variable quantity reduce the measurement error that chaining pin deflection deformation brings in a big way.

Description

A kind of one-dimensional air supporting raster scanning gauge head
[technical field]
The invention belongs to precision sweep fields of measurement, be specifically related to a kind of one-dimensional air supporting raster scanning gauge head.
[background technology]
At present, it is inductance type scanning feeler measuring the more commonly used gauge head on instrument, it is a kind of device that the change of the self neutralizing frequency utilizing coil realizes measuring, and can be subject to measurement power and make chaining pin offset, and deflection deformation can occur chaining pin in measurement process during chaining pin contact measured piece.Although such gauge head is simple and reliable for structure, operating environment requirements is not high, and resolving power is higher, but its shortcoming is chaining pin, and generation deflection deformation can bring bigger measurement error, and response frequency is low, should not be used in quick kinetic measurement, output signal is analog signals, is vulnerable to interference.
[summary of the invention]
It is an object of the invention to the shortcoming overcoming above-mentioned prior art, it is provided that a kind of one-dimensional air supporting raster scanning gauge head.
For reaching above-mentioned purpose, the present invention is achieved by the following technical solutions:
A kind of one-dimensional air supporting raster scanning gauge head, including bearing, holds seat and is installed on the chaining pin on chaining pin seat;End seat is made up of biside plate and front end installing plate;Chaining pin seat is installed on the lateral surface of end seat front end installing plate, is provided with air suspension shaft sleeve in end seat, and mandrel is installed between the biside plate of end seat, is provided with dynamometer spring between the side plate of air suspension shaft sleeve and end seat;The medial surface of end seat front end installing plate is provided with grating scale and read head.
The present invention is further improved by:
The lateral surface of described front end installing plate and the bottom surface of chaining pin seat all along the circumferential direction uniformly offer three blind holes, and the position of the blind hole on the bottom surface of the lateral surface of front end installing plate and chaining pin seat is oppositely arranged, in each blind hole, two steel balls are entered in riveting, the steel ball in three blind holes on the lateral surface of front end installing plate is radially uniform, and the steel ball in three blind holes on chaining pin seat bottom face is along the circumferential direction uniform;The lateral surface of front end installing plate be provided centrally with tension Magnet, the bottom center of chaining pin seat is provided with suction piece;When chaining pin seat is arranged on end seat, tension magnet adsorption suction piece, making four steel balls occlusions in two blind holes that the lateral surface of installing plate is three groups relative with on the bottom surface of chaining pin seat, now on chaining pin seat, in each blind hole, the line of centres of two steel balls is perpendicular with the line of centres of two steel balls in each blind hole on end seat.
Blind hole on described front end installing plate lateral surface and chaining pin seat bottom face is all opened on the circumference that diameter is 40mm.
The degree of depth of the blind hole on the installing plate lateral surface of described front end is 3mm, and the degree of depth of the blind hole on chaining pin seat bottom face is 2mm.
Steel ball on the installing plate lateral surface of described front end, riveting enter the volume in blind hole more than blind hole outside volume;Steel ball on chaining pin seat bottom face, riveting enter the volume in blind hole less than blind hole outside volume.
Described bearing is installed read head support, and between medial surface and the air suspension shaft sleeve of the front end installing plate of end seat;Read head is installed on read head support.
Described read head support is installed in the same direction with grating scale.
Offering a slot on described read head support, read head is arranged on one end of this slot.
Arranging two air suspension shaft sleeves in described end seat, each air suspension shaft sleeve is fixedly mounted on bearing each through screw.
Compared with prior art, the method have the advantages that
The one-dimensional air supporting raster scanning gauge head of the present invention, when chaining pin stress, chaining pin, chaining pin seat, end seat and mandrel can move together, and then cause the grating scale being arranged on end seat relative to the motion of grating reading head, thus the location variation of chaining pin being changed into the variable quantity of grating scale reading, realize the testing goal of gauge head, do not rely on the Cleaning Principle of self neutralizing frequency, and it is dependent on mechanical drive principle and grating completes detection, not only detection sensitivity is high but also capacity of resisting disturbance is strong, simple in construction, easily realize, the measurement of probe location variable quantity in a big way can be realized and reduce the measurement error that chaining pin deflection deformation brings.
Further, the present invention is by adopting 3 the decussation of 4 steel balls is engaged installation between chaining pin seat with end seat, it is ensured that the stability of structure, motion stationarity;Meanwhile, chaining pin can be made to be only limited by only small frictional force in the process of motion, improve certainty of measurement.
Further, the present invention adopts the straight line air-float guide rail structure of a pair air-bearing composition to make mandrel be only limited by only small frictional force when moving in air suspension shaft sleeve, it may be achieved without friction and vibrationless smooth movement, have the features such as kinematic accuracy height, cleanliness without any pollution;Meanwhile, because of its Panel-corrected Model, higher guiding accuracy can be obtained by the relatively low accuracy of manufacture.And the seriality measured is realized by the deformation-recovery ability of dynamometer spring.
[accompanying drawing explanation]
Fig. 1 is the overall structure schematic diagram of the present invention;
Fig. 2 is the structural representation of end seat of the present invention;
Fig. 3 is the structural representation of chaining pin seat of the present invention;
Fig. 4 is chaining pin seat, end seat occlusion scheme of installation;
Fig. 5 be chaining pin move to forward (X+) spacing time schematic diagram;
Fig. 6 be chaining pin move to negative sense (X-) spacing time schematic diagram;
In figure: 1 is bearing;2 is gas path joint;3 is end seat;4 is mandrel;5 is read head;6 is read head support;7 is chaining pin;8 is chaining pin seat;9 is grating scale;10 is air suspension shaft sleeve;11 is dynamometer spring;12-1 is steel ball;12-2 is steel ball;13 is tension Magnet;14 is suction piece.
[detailed description of the invention]
Below in conjunction with accompanying drawing, the present invention is described in further detail:
Referring to Fig. 1 to Fig. 3, the present invention includes bearing 1, gas path joint 2, air suspension shaft sleeve 10, mandrel 4, dynamometer spring 11, read head 5, read head support 6, grating scale 9, end seat 3, tension Magnet 13, suction piece 14, steel ball 12, chaining pin seat 8, chaining pin 7.Described chaining pin 7 is contained on chaining pin seat 8, at chaining pin seat and hold what the steel ball on seat realized chaining pin to be engaged installation by the tension Magnet 13 being contained in suction piece 14 in chaining pin seat interstitial hole and be contained in end seat interstitial hole and riveting, grating scale 9 is arranged on the bottom of end seat upper surface, by screw, read head support 6 and bearing 1 are linked together, read head 5 is contained on read head support 6, it is connected by screw is fixing between air suspension shaft sleeve 10 with bearing 1, mandrel 4 in air suspension shaft sleeve is arranged between the biside plate of end seat 3, equipped with a dynamometer spring 11 between each air suspension shaft sleeve and end seat side plate.Being uniformly distributed three groups of degree of depth on described chaining pin seat 8 on the circumferencial direction of Φ 40 is the hole of 2mm, and often group has two, during installation steel ball 12-2 riveting enter the volume in blind hole less than blind hole outside volume;Same on end seat 3 on the circle of Φ 40 three groups of degree of depth of radially uniform distribution be the hole of 3mm, often group has two, during installation steel ball 12-1 riveting enter the volume in blind hole more than blind hole outside volume.Being positioned at when installing chaining pin and hold the suction piece 14 that the tension Magnet 13 in the middle of seat adsorbs the middle dress of chaining pin seat to make both contact, 4 steel balls occlusions in each two hole of correspondence are installed.With grating scale 9 in the same direction, read head support to have a rectangular hole when described read head support 6 is arranged on bearing 1, read head is arranged on porose one end.
The operation principle of the present invention is as follows:
Before the use, check chaining pin seat 8 with end seat 3 between whether be engaged installation compact, whether air suspension shaft sleeve 10 is inflated, whether dynamometer spring 11 works well, then whether make gauge head be subject to the power of an appropriateness, observing chaining pin 7, end seat 3 and mandrel 4 can together steadily, moves continuously.
During gauge head in use stress, chaining pin 7, chaining pin seat 8 and mandrel 4 can move along center within the specific limits, if positive movement, referring to Fig. 4, gauge head is by the power in X+ direction, chaining pin, chaining pin seat and mandrel can move along X+ direction together, the grating scale 9 being arranged on end seat moves together and collects the positional information of motion, and it is arranged on read head 5 transfixion on read head support 6, and then cause the grating scale 9 being arranged on end seat relative to the motion of grating reading head 5, thus the location variation of chaining pin being changed into the variable quantity of grating scale reading, realize the testing goal of gauge head;Meanwhile, on X+ direction, the dynamometer spring 11 between air suspension shaft sleeve 10 and end seat side plate will be compressed, and when stress reduces, dynamometer spring can recover deformation, and the deformation-recovery ability that can pass through dynamometer spring realizes the seriality of measurement.If negative movement, referring to Fig. 5, gauge head is by the power in X-direction, chaining pin 7, chaining pin seat 3 and mandrel 4 can move along X-direction together, the grating scale 9 being arranged on end seat moves together and collects the positional information of motion, and is arranged on read head 5 transfixion on reading head bracket 6, and then causes the motion relative to grating reading head of the grating scale 9 that is arranged on end seat, thus the location variation of chaining pin being changed into the variable quantity of grating scale reading, it is achieved the testing goal of gauge head;Meanwhile, on X-direction, the dynamometer spring 11 between air suspension shaft sleeve 10 end seat side plate will be compressed, and when stress reduces, dynamometer spring can recover deformation, and the deformation-recovery ability that can pass through dynamometer spring realizes the seriality of measurement.
Gauge head of the present invention at chaining pin seat and holds the steel ball on seat to make chaining pin seat be installed together with being engaged of seat of end with the tension Magnet being contained in end seat interstitial hole and riveting by the suction piece being contained in chaining pin seat interstitial hole, and provided tightening force by Magnet, mandrel is arranged between the biside plate of end seat, when chaining pin stress, chaining pin, chaining pin seat, end seat and mandrel can move together, the grating scale being simultaneously attached on end seat can move relative to grating reading head, thus the location variation of chaining pin being changed into the variable quantity of grating scale reading, realize the testing goal of gauge head, it does not rely on the Cleaning Principle of self neutralizing frequency, and it is dependent on mechanical drive principle and grating completes detection, not only detection sensitivity is high but also capacity of resisting disturbance is strong, simple in construction, easily realize, the measurement of probe location variable quantity in a big way can be realized.
It is that to be uniformly distributed three groups of degree of depth on chaining pin seat on the circumferencial direction of Φ 40 be the hole of 2mm that the occlusion of chaining pin is installed, and often group has two, during installation steel ball riveting enter the volume in blind hole less than blind hole outside volume;Same on end seat on the circle of Φ 40 three groups of degree of depth of radially uniform distribution be the hole of 3mm, often group has two, during installation steel ball riveting enter the volume in blind hole more than blind hole outside volume.Being positioned at the suction piece of dress in the middle of the tension magnet adsorption chaining pin seat in the middle of end seat when installing chaining pin makes both contact, 4 iron shot cross X-bites in each two hole 3 groups corresponding are made to install, now chaining pin seat is often organized two steel balls the line of centres can with end seat on often to organize the line of centres of two steel balls perpendicular, this mounting means ensure that the stationarity of the stability of structure, motion, and chaining pin can be made to be only limited by only small frictional force in the process of motion.
Straight line air-float guide rail structure adopts a pair air-bearing, is made up of two air-bearing shafts bearing sleeves, two mandrels and two gas path joints.Column part inwall at air suspension shaft sleeve has air film, mandrel can be made by gas path joint to float to air suspension shaft sleeve inflation, the air film of inwall can play lubrication, mandrel thus can be made to be only limited by only small frictional force in the motor process of air suspension shaft sleeve, can realize, without friction and vibrationless smooth movement, there is the features such as kinematic accuracy height, cleanliness without any pollution;Meanwhile, because of its Panel-corrected Model, higher guiding accuracy can be obtained by the relatively low accuracy of manufacture.In use it is noted that: air bearing belongs to sophisticated product, handles with care when installing and using, and forbids to beat and clash into, and otherwise can cause damaged products, can affect normal use;Compression air will through super-dry and filtration treatment, undressed compression air is forbidden to use, unclean air meeting blocking medium hole, particularly water, oil, impurity etc. can make bearing normally not use, even scrap, should installing protective cover additional, in order to avoid water dirt this product of contaminating erosion, impact normally uses and reduces life of product simultaneously.
Above content is only the technological thought that the present invention is described, it is impossible to limits protection scope of the present invention, every technological thought proposed according to the present invention, any change done on technical scheme basis with this, each falls within the protection domain of claims of the present invention.

Claims (8)

1. an one-dimensional air supporting raster scanning gauge head, it is characterised in that include bearing (1), end seat (3) and the chaining pin (7) being installed on chaining pin seat (8);End seat (3) is made up of biside plate and front end installing plate;Chaining pin seat (8) is installed on the lateral surface of end seat (3) front end installing plate, in end seat (3), air suspension shaft sleeve (10) is installed, mandrel (4) is installed between the biside plate of end seat (3), is provided with dynamometer spring (11) between the side plate of air suspension shaft sleeve (10) and end seat (3);The medial surface of end seat (3) front end installing plate is provided with grating scale (9) and read head (5);
The lateral surface of described front end installing plate and the bottom surface of chaining pin seat (8) all along the circumferential direction uniformly offer three blind holes, and the position of the blind hole on the bottom surface of the lateral surface of front end installing plate and chaining pin seat (8) is oppositely arranged, in each blind hole, two steel balls are entered in riveting, the steel ball (12-1) in three blind holes on the lateral surface of front end installing plate is radially uniform, and the steel ball (12-2) in three blind holes on chaining pin seat (8) bottom surface is along the circumferential direction uniform;The lateral surface of front end installing plate be provided centrally with tension Magnet (13), the bottom center of chaining pin seat (8) is provided with suction piece (14);Chaining pin seat (8) is arranged on when holding seat (3) upper, tension Magnet (13) absorption suction piece (14), making four steel balls occlusions in two blind holes that the lateral surface of installing plate is three groups relative with on the bottom surface of chaining pin seat (8), now in the upper each blind hole of chaining pin seat (8), the line of centres of two steel balls is perpendicular with the line of centres of two steel balls in the upper each blind hole of end seat (3).
2. one-dimensional air supporting raster scanning gauge head according to claim 1, it is characterised in that described front end installing plate lateral surface and the blind hole on chaining pin seat (8) bottom surface are all opened on the circumference that diameter is 40mm.
3. one-dimensional air supporting raster scanning gauge head according to claim 1 and 2, it is characterised in that the degree of depth of the blind hole on the installing plate lateral surface of described front end is 3mm, and the degree of depth of the blind hole on chaining pin seat (8) bottom surface is 2mm.
4. one-dimensional air supporting raster scanning gauge head according to claim 1 and 2, it is characterised in that the steel ball on the installing plate lateral surface of described front end, riveting enter the volume in blind hole more than blind hole outside volume;Steel ball on chaining pin seat (8) bottom surface, riveting enter the volume in blind hole less than blind hole outside volume.
5. one-dimensional air supporting raster scanning gauge head according to claim 1, it is characterized in that, the upper read head support (6) of installing of described bearing (1), and be positioned between medial surface and the air suspension shaft sleeve (10) of front end installing plate of end seat (3);Read head (5) is installed on read head support (6).
6. one-dimensional air supporting raster scanning gauge head according to claim 5, it is characterised in that described read head support (6) is installed in the same direction with grating scale (9).
7. the one-dimensional air supporting raster scanning gauge head according to claim 5 or 6, it is characterised in that offering a slot on described read head support (6), read head (5) is arranged on one end of this slot.
8. one-dimensional air supporting raster scanning gauge head according to claim 1, it is characterized in that, arranging two air suspension shaft sleeves (10) in described end seat (3), each air suspension shaft sleeve (10) is fixedly mounted on bearing (1) each through screw.
CN201510776729.2A 2015-11-12 2015-11-12 A kind of one-dimensional air supporting raster scanning gauge head Expired - Fee Related CN105300283B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631968B (en) * 2018-12-05 2020-05-19 西安交通大学 Magnetic levitation and air floatation combined action two-dimensional scanning measuring head

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Publication number Priority date Publication date Assignee Title
CN1512132A (en) * 2002-12-27 2004-07-14 中国航空工业总公司第三○三研究所 Direct super-precise measurer for part length
CN102538678A (en) * 2012-01-17 2012-07-04 北京工业大学 Measurement device of scanning probe
CN203887630U (en) * 2014-06-16 2014-10-22 北京凯奇数控设备成套有限公司 Air floating type linear grating ruler device
CN104197853A (en) * 2014-06-06 2014-12-10 苏州大学 Contact type scanning measuring head and measuring method thereof
CN104236599A (en) * 2014-09-19 2014-12-24 西安交通大学 One-dimensional raster scanning measuring head
CN204329896U (en) * 2014-12-09 2015-05-13 哈尔滨智达测控技术有限公司 Digital quantity scanning feeler accurate mechanical zero resetting device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5713660B2 (en) * 2010-12-21 2015-05-07 キヤノン株式会社 Shape measurement method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1512132A (en) * 2002-12-27 2004-07-14 中国航空工业总公司第三○三研究所 Direct super-precise measurer for part length
CN102538678A (en) * 2012-01-17 2012-07-04 北京工业大学 Measurement device of scanning probe
CN104197853A (en) * 2014-06-06 2014-12-10 苏州大学 Contact type scanning measuring head and measuring method thereof
CN203887630U (en) * 2014-06-16 2014-10-22 北京凯奇数控设备成套有限公司 Air floating type linear grating ruler device
CN104236599A (en) * 2014-09-19 2014-12-24 西安交通大学 One-dimensional raster scanning measuring head
CN204329896U (en) * 2014-12-09 2015-05-13 哈尔滨智达测控技术有限公司 Digital quantity scanning feeler accurate mechanical zero resetting device

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