CN105297138A - Furnace body adjusting device of diffusion furnace - Google Patents
Furnace body adjusting device of diffusion furnace Download PDFInfo
- Publication number
- CN105297138A CN105297138A CN201510720234.8A CN201510720234A CN105297138A CN 105297138 A CN105297138 A CN 105297138A CN 201510720234 A CN201510720234 A CN 201510720234A CN 105297138 A CN105297138 A CN 105297138A
- Authority
- CN
- China
- Prior art keywords
- furnace body
- bearing
- regulating block
- bolt
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a furnace body adjusting device of a diffusion furnace. The furnace body adjusting device comprises a fixed seat, an adjusting seat, a first supporting piece and a second supporting piece. The first supporting piece and the second supporting piece are used for supporting a furnace body of the diffusion furnace. The adjusting seat comprises a horizontal adjusting support and a height adjusting support. The first supporting piece is mounted on the horizontal adjusting support, the second supporting piece is mounted on the height adjusting support, the horizontal adjusting support is mounted on the fixed seat and can move along the fixed seat, the height adjusting support is mounted on the horizontal adjusting support and can move along the horizontal adjusting support, and the second supporting piece is driven to be close to or away from the first supporting piece. The furnace body adjusting device has the advantages of facilitating adjustment and being high in adjusting precision and accuracy.
Description
Technical field
The present invention relates to the diffusion processing technique field in solar cell preparation technology, particularly relate to a kind of diffusion furnace body of heater setting device.
Background technology
Diffusion furnace be mainly used in silicon chip solar device manufacture in diffusion, oxidizing process, body of heater be diffusion, oxidizing process reaction chamber, body of heater is cylindrical, needs to be fixed on supporting beam.For ensureing that pushing away boat feeding mechanism sends into body of heater smoothly, just body of heater and the relative position pushing away boat feeding mechanism must be aligned.Be fixed on feeding slipway owing to pushing away boat feeding mechanism, the relative position of it and body of heater cannot be regulated, therefore, want body of heater to align with it, just can only regulate body of heater position.Body of heater length is generally at about 2 meters, and external diameter is generally between 0.3-0.6 rice, and weight is about 50-100 kilogram, and build is larger and comparatively heavy, and manpower regulates very hard, also inaccurate.
Existing body of heater setting device is held up by four domatic supports and is fixed body of heater, and need with the domatic support of manpower movement, very require great effort, also very inaccurate, adjustable range is completely with range estimation; And need the domatic support regulating body of heater both sides, need by body of heater cabinet, the side of body of heater is open, opposite side is closed, regulate during the domatic support closing side and just can only operate from that open side inserter, therefore, regulate the triangular support block closing side just very inconvenient.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, provides that a kind of structure is simple, easy to adjust, sharpness of regulation and the high diffusion furnace body of heater setting device of accuracy.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of diffusion furnace body of heater setting device, comprise permanent seat, adjustment seat and for the first strut member of supporting described diffusion furnace body of heater and the second strut member, described adjustment seat comprises horizontal adjustment bearing and altitude mixture control bearing, described first strut member is installed on horizontal adjustment bearing, described second strut member is installed on altitude mixture control bearing, described horizontal adjustment bearing can be installed on permanent seat movably along permanent seat, described altitude mixture control bearing can be installed on movably on horizontal adjustment bearing along horizontal adjustment bearing and drive the second strut member near or away from the first strut member.
Further improvement as technique scheme:
Described first strut member and the second strut member are for supporting round bar.
Described permanent seat is provided with the first regulating block, one end of described horizontal adjustment bearing is provided with the second regulating block, be provided with between described first regulating block and the second regulating block and release bolt and retract bolt, the tail end of described release bolt through the first regulating block and horizontal adjustment bearing against, be thread fit between described release bolt and the first regulating block, describedly retract the first regulating block described in screw bolt passes and the second regulating block, describedly to retract for through hole coordinates between bolt with the first regulating block, and be thread fit between the second regulating block.
Described permanent seat is provided with the adjustment hole of waist type, is provided with the second standing bolt for being fixed on by horizontal adjustment bearing on permanent seat in described adjustment hole.
Height adjustment bolt is provided with between described second regulating block and altitude mixture control bearing, described height adjustment bolt is successively through the second regulating block and altitude mixture control bearing, it is thread fit between described height adjustment bolt and the second regulating block, with between described altitude mixture control bearing for through hole coordinates, described height adjustment bolt is provided with left nut and right nut, and described left nut and right nut are positioned at the both sides of the through hole of described altitude mixture control bearing.
Described altitude mixture control bearing is provided with the open holes of waist type, is provided with the first standing bolt for being fixed on by altitude mixture control bearing on described horizontal adjustment bearing in described open holes.
Described diffusion furnace body of heater setting device is set to two groups, arranges along described diffusion furnace body of heater axially spaced-apart.
Described first strut member and the second strut member are supporting-point roller or fulcrum ball.
Compared with prior art, the invention has the advantages that:
Diffusion furnace body of heater setting device of the present invention, by regulating the level attitude of horizontal adjustment bearing, thus diffusion furnace body of heater left and right adjusting can be regulated, by regulating the level attitude of altitude mixture control bearing, make the distance between the first strut member and the second strut member increase or reduce, thus the height of diffusion furnace body of heater can be regulated.
Further, diffusion furnace body of heater setting device of the present invention, only needs the side diffusion furnace body of heater is open to operate accordingly, simple to operate, convenient and swift; Adopt three bolts to regulate and regulate diffusion furnace body of heater level attitude and height location, very convenient, and the specific aim regulated diffusion furnace body of heater relative position is very strong, sharpness of regulation and accuracy high.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the structural representation released bolt in the present invention, retract bolt and height adjustment bolt.
In figure, each label represents:
1, permanent seat; 2, adjustment seat; 21, horizontal adjustment bearing; 22, altitude mixture control bearing; 3, the first strut member; 4, the second strut member; 51, the first regulating block; 52, the second regulating block; 61, bolt is released; 62, bolt is retracted; 63, height adjustment bolt; 71, left nut; 72, right nut; 81, open holes; 82, the first standing bolt; 83, adjustment hole; 84, the second standing bolt; 9, diffusion furnace body of heater.
Embodiment
Below in conjunction with Figure of description and specific embodiment, the present invention is described in further detail.
Fig. 1 and Fig. 2 shows a kind of embodiment of diffusion furnace body of heater setting device of the present invention, this diffusion furnace body of heater setting device comprises permanent seat 1, adjustment seat 2 and the first strut member 3 and the second strut member 4 for supporting diffusion furnace body of heater 9, adjustment seat 2 comprises horizontal adjustment bearing 21 and altitude mixture control bearing 22, first strut member 3 is installed on horizontal adjustment bearing 21, second strut member 4 is installed on altitude mixture control bearing 22, horizontal adjustment bearing 21 can be installed on permanent seat 1 along permanent seat 1 movably, altitude mixture control bearing 22 can be installed on movably on horizontal adjustment bearing 21 along horizontal adjustment bearing 21 and drive the second strut member 4 near or away from the first strut member 3.By regulating the level attitude of horizontal adjustment bearing 21, thus diffusion furnace body of heater 9 left and right adjusting can be regulated, by regulating the level attitude of altitude mixture control bearing 22, making the distance between the first strut member 3 and the second strut member 4 increase or reduce, thus the height of diffusion furnace body of heater 9 can be regulated.
In the present embodiment, the first strut member 3 and the second strut member 4, for supporting round bar, support the axis being parallel of round bar and diffusion furnace body of heater 9, adopt support round bar to support diffusion furnace body of heater 9, supporting & stablizing.
In the present embodiment, permanent seat 1 is provided with the first regulating block 51, one end of horizontal adjustment bearing 21 is provided with the second regulating block 52, be provided with between first regulating block 51 and the second regulating block 52 and release bolt 61 and retract bolt 62, the tail end releasing bolt 61 through the first regulating block 51 and horizontal adjustment bearing 21 against, releasing between bolt 61 and the first regulating block 51 is thread fit, retract bolt 62 successively through the first regulating block 51 and the second regulating block 52, retract for through hole coordinates between bolt 62 with the first regulating block 51, and be thread fit between the second regulating block 52.Permanent seat 1 is provided with the adjustment hole 83 of waist type, is provided with the second standing bolt 84 for being fixed on by horizontal adjustment bearing 21 on permanent seat 1 in adjustment hole 83.Horizontal adjustment bearing 21 is waist hole with the adjustment hole 83 of permanent seat 1, and horizontal adjustment bearing 21 relatively permanent seat 1 can move left and right; During adjustment, unclamp the second standing bolt 84, release bolt 61 promotes horizontal adjustment bearing 21 and moves right, retracting bolt 62 pulls horizontal adjustment bearing 21 to left movement, two bolts are adopted to regulate the relative position regulated in diffusion furnace body of heater 9 horizontal direction, very convenient, and the specific aim regulated diffusion furnace body of heater 9 relative position is very strong, sharpness of regulation and accuracy high;
In the present embodiment, height adjustment bolt 63 is provided with between second regulating block 52 and altitude mixture control bearing 22, height adjustment bolt 63 is successively through the second regulating block 52 and altitude mixture control bearing 22, be thread fit between height adjustment bolt 63 and the second regulating block 52, with between altitude mixture control bearing 22 for through hole coordinates, height adjustment bolt 63 is provided with left nut 71 and right nut 72, and left nut 71 and right nut 72 are positioned at the both sides of the through hole of altitude mixture control bearing 22.Altitude mixture control bearing 22 is provided with the open holes 81 of waist type, is provided with the first standing bolt 82 for being fixed on by altitude mixture control bearing 22 on horizontal adjustment bearing 21 in open holes 81.Regulate the level attitude of altitude mixture control bearing 22 can realize the adjustment of diffusion furnace body of heater 9 height, have equally and regulate easy, sharpness of regulation and the high advantage of accuracy.
The concrete regulate process of diffusion furnace body of heater 9 is as follows:
1, level attitude regulates: unclamp the second standing bolt 84, tightens to the right to release bolt 61 and just can promote that horizontal adjustment bearing 21 is past to move right, thus realizes diffusion furnace body of heater 9 and to turn right adjustment; First unscrew left and release bolt 61, then unscrew left and retract bolt 62 horizontal adjustment bearing 21 just can be pulled to move left, thus realize diffusion furnace body of heater 9 and to turn left adjustment;
2, altitude mixture control: unclamp the first standing bolt 82, tighten right nut 72, unscrew left nut 71 again, unscrewing height adjustment bolt 63 left just can pull altitude mixture control bearing 22 toward moving left, now horizontal adjustment bearing 21 is motionless, thus diffusion furnace body of heater 9 moves toward lower left, and then realize diffusion furnace body of heater 9 and down regulate; Unclamp the first standing bolt 82, first unscrew right nut 72, tighten left nut 71 again, tightening height adjustment bolt 63 to the right just can pull altitude mixture control bearing 22 toward moving right, now base horizontal adjustment bearing 21 is motionless, thus diffusion furnace body of heater 9 moves toward upper right side, and then realize diffusion furnace body of heater 9 and up regulate.
The setting device of the present embodiment only needs the side diffusion furnace body of heater 9 is open to operate accordingly, simple to operate, convenient and swift, goes for the adjustment of all horizontally-mounted boiler tube relative positions.
The diffusion furnace body of heater setting device of the present embodiment is set to two groups, arranges along diffusion furnace body of heater 9 axially spaced-apart.Two groups of setting devices all need to regulate, and cooperatively interact and can regulate the axial location of diffusion furnace body of heater 9, are all positioned at the open side of diffusion furnace body of heater 9.
Except in the present embodiment, the first strut member 3 and the second strut member 4 can also be supporting-point roller or fulcrum ball.
Although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention.Any those of ordinary skill in the art, when not departing from technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or being revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments, equivalent variations and modification, all should drop in the scope of technical solution of the present invention protection.
Claims (8)
1. a diffusion furnace body of heater setting device, it is characterized in that, comprise permanent seat (1), adjustment seat (2) and for the first strut member (3) of supporting described diffusion furnace body of heater (9) and the second strut member (4), described adjustment seat (2) comprises horizontal adjustment bearing (21) and altitude mixture control bearing (22), described first strut member (3) is installed on horizontal adjustment bearing (21), described second strut member (4) is installed on altitude mixture control bearing (22), described horizontal adjustment bearing (21) can be installed on permanent seat (1) along permanent seat (1) movably, described altitude mixture control bearing (22) can along horizontal adjustment bearing (21) be installed on movably horizontal adjustment bearing (21) go up and drive the second strut member (4) near or away from the first strut member (3).
2. diffusion furnace body of heater setting device according to claim 1, is characterized in that, described first strut member (3) and the second strut member (4) are for supporting round bar.
3. diffusion furnace body of heater setting device according to claim 1 and 2, it is characterized in that, described permanent seat (1) is provided with the first regulating block (51), one end of described horizontal adjustment bearing (21) is provided with the second regulating block (52), be provided with between described first regulating block (51) and the second regulating block (52) and release bolt (61) and retract bolt (62), the tail end of described release bolt (61) through the first regulating block (51) and horizontal adjustment bearing (21) against, be thread fit between described release bolt (61) and the first regulating block (51), the described bolt (62) that retracts passes described first regulating block (51) and the second regulating block (52) successively, describedly to retract between bolt (62) with the first regulating block (51) as through hole coordinates, and be thread fit between the second regulating block (52).
4. diffusion furnace body of heater setting device according to claim 3, it is characterized in that, described permanent seat (1) is provided with the adjustment hole (83) of waist type, is provided with the second standing bolt (84) for being fixed on by horizontal adjustment bearing (21) on permanent seat (1) in described adjustment hole (83).
5. diffusion furnace body of heater setting device according to claim 1 and 2, it is characterized in that, height adjustment bolt (63) is provided with between described second regulating block (52) and altitude mixture control bearing (22), described height adjustment bolt (63) is successively through the second regulating block (52) and altitude mixture control bearing (22), be thread fit between described height adjustment bolt (63) and the second regulating block (52), with between described altitude mixture control bearing (22) for through hole coordinates, described height adjustment bolt (63) is provided with left nut (71) and right nut (72), described left nut (71) and right nut (72) are positioned at the both sides of the through hole of described altitude mixture control bearing (22).
6. diffusion furnace body of heater setting device according to claim 5, it is characterized in that, described altitude mixture control bearing (22) is provided with the open holes (81) of waist type, is provided with the first standing bolt (82) for being fixed on by altitude mixture control bearing (22) on described horizontal adjustment bearing (21) in described open holes (81).
7. diffusion furnace body of heater setting device according to claim 1 and 2, is characterized in that, described diffusion furnace body of heater setting device is set to two groups, arranges along described diffusion furnace body of heater (9) axially spaced-apart.
8. diffusion furnace body of heater setting device according to claim 1, is characterized in that, described first strut member (3) and the second strut member (4) are supporting-point roller or fulcrum ball.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510720234.8A CN105297138B (en) | 2015-10-30 | 2015-10-30 | A kind of diffusion furnace body regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510720234.8A CN105297138B (en) | 2015-10-30 | 2015-10-30 | A kind of diffusion furnace body regulating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105297138A true CN105297138A (en) | 2016-02-03 |
| CN105297138B CN105297138B (en) | 2018-06-22 |
Family
ID=55194927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510720234.8A Active CN105297138B (en) | 2015-10-30 | 2015-10-30 | A kind of diffusion furnace body regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105297138B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796006A (en) * | 2016-08-30 | 2018-03-13 | 江苏吉华化工有限公司 | Incinerator movable saddle during change is produced with raw material |
| CN113380668A (en) * | 2021-04-30 | 2021-09-10 | 北京北方华创微电子装备有限公司 | Position adjusting device of horizontal heating furnace tube |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11351449A (en) * | 1998-06-10 | 1999-12-24 | Nkk Corp | Centering device for execution of piping work |
| DE10235843B3 (en) * | 2002-08-05 | 2004-04-08 | EISENMANN Maschinenbau KG (Komplementär: Eisenmann-Stiftung) | Device for loading and unloading shelves of furnace trolleys has lift devices with vertically movable lift slides and a horizontally movable adjusting slide mechanically coupled |
| CN202643912U (en) * | 2012-06-05 | 2013-01-02 | 中国电子科技集团公司第四十八研究所 | Furnace body position adjusting device for diffusion furnace |
| CN202646920U (en) * | 2012-07-04 | 2013-01-02 | 中国十七冶集团有限公司 | Rolling rail car type pipeline support |
| CN203170967U (en) * | 2013-03-21 | 2013-09-04 | 宁波恒普真空技术有限公司 | Vacuum degreasing sintering furnace provided with sliding rails |
| CN103451740A (en) * | 2013-08-30 | 2013-12-18 | 深圳市捷佳伟创新能源装备股份有限公司 | Boat feeding mechanism of LED (Light Emitting Diode) alloy furnace |
| CN204664631U (en) * | 2015-05-14 | 2015-09-23 | 中国天辰工程有限公司 | The multi-functional adjustable support of a kind of horizontal pipe |
| CN204717151U (en) * | 2015-07-02 | 2015-10-21 | 孟虎林 | Hydraulic type oil and gas pipes stress compensation support device |
-
2015
- 2015-10-30 CN CN201510720234.8A patent/CN105297138B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11351449A (en) * | 1998-06-10 | 1999-12-24 | Nkk Corp | Centering device for execution of piping work |
| DE10235843B3 (en) * | 2002-08-05 | 2004-04-08 | EISENMANN Maschinenbau KG (Komplementär: Eisenmann-Stiftung) | Device for loading and unloading shelves of furnace trolleys has lift devices with vertically movable lift slides and a horizontally movable adjusting slide mechanically coupled |
| CN202643912U (en) * | 2012-06-05 | 2013-01-02 | 中国电子科技集团公司第四十八研究所 | Furnace body position adjusting device for diffusion furnace |
| CN202646920U (en) * | 2012-07-04 | 2013-01-02 | 中国十七冶集团有限公司 | Rolling rail car type pipeline support |
| CN203170967U (en) * | 2013-03-21 | 2013-09-04 | 宁波恒普真空技术有限公司 | Vacuum degreasing sintering furnace provided with sliding rails |
| CN103451740A (en) * | 2013-08-30 | 2013-12-18 | 深圳市捷佳伟创新能源装备股份有限公司 | Boat feeding mechanism of LED (Light Emitting Diode) alloy furnace |
| CN204664631U (en) * | 2015-05-14 | 2015-09-23 | 中国天辰工程有限公司 | The multi-functional adjustable support of a kind of horizontal pipe |
| CN204717151U (en) * | 2015-07-02 | 2015-10-21 | 孟虎林 | Hydraulic type oil and gas pipes stress compensation support device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796006A (en) * | 2016-08-30 | 2018-03-13 | 江苏吉华化工有限公司 | Incinerator movable saddle during change is produced with raw material |
| CN113380668A (en) * | 2021-04-30 | 2021-09-10 | 北京北方华创微电子装备有限公司 | Position adjusting device of horizontal heating furnace tube |
| CN113380668B (en) * | 2021-04-30 | 2024-02-27 | 北京北方华创微电子装备有限公司 | Position adjusting device of horizontal heating furnace tube |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105297138B (en) | 2018-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105297138A (en) | Furnace body adjusting device of diffusion furnace | |
| CN204881356U (en) | Section butt joint of large -scale body cabin and body tipping arrangement | |
| CN208358335U (en) | A kind of three column hydraulic tools for processing planet carrier | |
| CN104858685A (en) | Conical radome machining and fixing fixture | |
| CN209614956U (en) | A kind of feeding mechanism of drill bit process equipment | |
| CN202411906U (en) | Fast clamping mechanism | |
| CN208134851U (en) | A kind of curtain wall unit transport device | |
| CN104930096A (en) | Circular section spring mechanism with adjustable rigidity | |
| CN203836494U (en) | Adjustable protective frame for outdoor equipment box | |
| CN202750591U (en) | General environment-friendly fish weight bringing convenience to rapid adjustment of floater | |
| CN209772642U (en) | Adjustable vibration exciter tappet | |
| CN102784959A (en) | Automatic pipe cutting machine | |
| CN204097029U (en) | Companion ladder lockable mechanism | |
| CN201500753U (en) | Metal wire fixed length feeding mechanism | |
| CN202591762U (en) | Height adjustment mechanism of power head of table-type tapping machine | |
| CN206860605U (en) | A kind of multilayer plates locked mechanism | |
| CN109808758A (en) | A kind of textile reel carrier | |
| CN205918091U (en) | Scaffold frame or formwork support rod structure of adjustable length | |
| CN104948624A (en) | Square-section spring mechanism with adjustable rigidity | |
| CN206328492U (en) | A kind of PECVD device converter body support governor motion | |
| CN204237298U (en) | The adjustable material supporting rack of a kind of four-in-one multifunctional | |
| CN203764683U (en) | Fixing device of car body calibration instrument pull tower | |
| CN204420472U (en) | A kind of fine-tuning elevator mechanism | |
| CN201084823Y (en) | A telescopic rod for a direction adjustment of portable parabolic antenna | |
| CN207538445U (en) | A kind of stepless adjustment telescopic support |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |