CN206328492U - A kind of PECVD device converter body support governor motion - Google Patents
A kind of PECVD device converter body support governor motion Download PDFInfo
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- CN206328492U CN206328492U CN201621286245.6U CN201621286245U CN206328492U CN 206328492 U CN206328492 U CN 206328492U CN 201621286245 U CN201621286245 U CN 201621286245U CN 206328492 U CN206328492 U CN 206328492U
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Abstract
The utility model discloses a kind of PECVD device converter body support governor motion, including a pair of adjusting bases and a pair of support round bars, a pair of support round bars are installed vertically on a pair of adjusting bases, and the support round bar is parallel with the body of heater of PECVD device.The utility model has the advantages that simple in construction, bearing height is low in order to body of heater position adjustments.
Description
Technical field
The utility model is related to PECVD device, more particularly to a kind of PECVD device converter body support governor motion.
Background technology
PECVD （Plasma Enhanced Chemical Vapor Deposition, Chinese full name strengthens for gas ions
Chemical vapor deposition）Equipment is mainly used in the coating process of antireflective coating in the manufacture of silicon chip solar device, and body of heater is plated film work
The reaction chamber of skill is, it is necessary to be fixed in support beam.Smoothly enter body of heater to ensure to push away boat feeding mechanism, just must be by stove
Body is aligned with pushing away the relative position of boat feeding mechanism, is integrally fixed at due to pushing away boat feeding mechanism on feeding slipway, it is impossible to adjust,
Therefore body of heater position can only be adjusted.Body of heater is cylinder, and length is typically at 2 meters or so, and external diameter is typically at 0.3-0.6 meters
Between, about 100-200 kilograms of weight, volume is big, weight weight, and support beam can take certain height space, cause body of heater
Height it is higher, further increase the difficulty of body of heater position adjustments.
Existing converter body support adjusting means mainly includes four domatic supports being arranged in support beam, is needed during regulation
Operating personnel are wanted to move domatic support manually, extremely arduously, the distance of regulation needs the experience by operating personnel, is forbidden very much
Really.In addition, this method adjusts the distance on height and fore-and-aft direction by inclined-plane, both direction is to carry out simultaneously, is not had
There is independent adjustability, its regulation is not fully controllable.
Utility model content
The technical problems to be solved in the utility model be overcome the deficiencies in the prior art there is provided one kind it is simple in construction, support
It is highly low in order to the PECVD device converter body support governor motion of body of heater position adjustments.
In order to solve the above technical problems, the utility model uses following technical scheme：
A kind of PECVD device converter body support governor motion, including a pair of adjusting bases and a pair of support round bars, a pair of supports
Round bar is installed vertically on a pair of adjusting bases, and the support round bar is parallel with the body of heater of PECVD device.
It is used as the further improvement of above-mentioned technical proposal：
The adjusting base includes front and rear adjustment seat, upper lower adjusting seat and a pair of vertical beams, and a pair of vertical beams are divided into downward
The rear and front end of seat is saved, provided with adjusting part up and down between each vertical beam and upper lower adjusting seat, the front and rear adjustment seat is located at described
Front and rear adjusting part is provided with upper lower adjusting seat and between front and rear adjustment seat and upper lower adjusting seat, the support round bar is vertically pacified
In front and rear adjustment seat loaded on a pair of adjusting bases.
It is described up and down adjusting part include up and down regulation fixing bolt, up and down regulating block and up and down described in regulating bolt above and below
Adjustment seat is connected with the vertical beam by the fixing bolt of regulation up and down and opens up the waist arranged along the vertical direction in junction
Hole, the regulating block up and down is located on the downside of the upper lower adjusting seat and is fixedly connected with the vertical beam, the regulating bolt up and down
It is threadedly coupled and upper end offsets with the upper lower adjusting seat with the regulating block up and down.
The adjusting part up and down also includes adjusting lock nut up and down, and the adjusting lock nut up and down is located on described
In lower regulating bolt and on the downside of the regulating block up and down.
Before and after adjusting part includes before and after described before regulation fixing bolt, front and rear regulating block, forward-backward adjustment bolts and a pair
Adjusting lock nut afterwards, it is described before and after adjustment seat be connected by the front and rear regulation fixing bolt with the upper lower adjusting seat and in
Junction opens up the waist hole arranged along the longitudinal direction, and the front and rear regulating block is located on front side of the front and rear adjustment seat or rear side, institute
State front and rear regulating block to be fixedly connected with the upper lower adjusting seat, the forward-backward adjustment bolts connect with the front and rear regulating block screw thread
Connect, the forward-backward adjustment bolts are connected with the front and rear regulation block hole, and front and rear adjusting lock nut is located at described described in a pair
On forward-backward adjustment bolts and it is distributed in the front and rear both sides of through hole junction.
Compared with prior art, the utility model has the advantage of：PECVD device converter body support disclosed in the utility model
Governor motion, is arranged in parallel using a pair with body of heater（Arranged along body of heater length direction）Support round bar support body of heater, utilize tune
The position of base regulation support round bar is saved, it is simple in construction, it is tangent between support round bar and body of heater, the occupancy of height space is reduced,
So as to reduce the setting height(from bottom) of body of heater, be conducive to carrying out position adjustments to body of heater.
Brief description of the drawings
Fig. 1 is the main structure diagram of the utility model PECVD device converter body support governor motion.
Fig. 2 is the A-A schematic diagrames in Fig. 1.
Fig. 3 is Fig. 2 partial enlarged drawing.
Each label is represented in figure：1st, adjusting base；11st, front and rear adjustment seat；12nd, upper lower adjusting seat；13rd, vertical beam；14th, up and down
Adjusting part；141st, fixing bolt is adjusted up and down；142nd, regulating block up and down；143rd, regulating bolt up and down；144th, regulation is locked up and down
Tight nut；15th, front and rear adjusting part；151st, front and rear regulation fixing bolt；152nd, front and rear regulating block；153rd, forward-backward adjustment bolts；
154th, front and rear adjusting lock nut；2nd, round bar is supported；3rd, body of heater.
Embodiment
The utility model is described in further details below with reference to Figure of description and specific embodiment.
As shown in Figure 1, Figure 2 and Figure 3, the PECVD device converter body support governor motion of the present embodiment, including a pair of regulation bottoms
Seat 1 and a pair of support round bars 2, a pair of support round bars 2 are installed vertically on a pair of adjusting bases 1, and support round bar 2 and PECVD is set
Standby body of heater 3 is parallel.The PECVD device converter body support governor motion is arranged in parallel using a pair with body of heater 3（Along body of heater length side
To arrangement）Support round bar 2 support body of heater 3, using adjusting base 1 adjust support round bar 2 position, simple in construction, branch is held round
It is tangent between bar 2 and body of heater 3, so as to reduce the setting height(from bottom) of body of heater 3, be conducive to carrying out position adjustments to body of heater 3.
In the present embodiment, adjusting base 1 includes front and rear adjustment seat 11, upper lower adjusting seat 12 and a pair of vertical beams 13, and a pair perpendicular
Beam 13 is divided into the rear and front end of lower adjusting seat 12, provided with adjusting part up and down between each vertical beam 13 and upper lower adjusting seat 12
14, front and rear adjustment seat 11 is on upper lower adjusting seat 12 and between front and rear adjustment seat 11 and upper lower adjusting seat 12 provided with front and rear tune
Component 15 is saved, support round bar 2 is installed vertically on by bolt in the front and rear adjustment seat 11 of a pair of adjusting bases 1.Lowered using upper
Lower adjusting seat 12 on the integrated regulation of component 14, front and rear adjustment seat 11 and the height for supporting round bar 2 are saved, front and rear adjusting part 15 is utilized
Regulation before and after adjustment seat 11 and thereon support round bar 2 front and back position, the short transverse of body of heater 3 and the regulation of fore-and-aft direction are only
Vertical, controllable, regulation more facilitates, and position adjustments are more accurate.
In the present embodiment, adjusting part 14 includes regulation fixing bolt 141, up and down regulating block 142 and up and down up and down up and down
Lower adjusting seat 12 is connected with vertical beam 13 and opened up in junction along upper by regulation fixing bolt 141 up and down in regulating bolt 143
The waist hole of lower direction arrangement, up and down regulating block 142 be located at the upper downside of lower adjusting seat 12 and be fixedly connected with vertical beam 13, adjust up and down
Bolt 143 is threadedly coupled with regulating block 142 up and down and upper end offsets with upper lower adjusting seat 12.
In the present embodiment, adjusting part 14 also includes adjusting lock nut 144 up and down up and down, up and down adjusting lock nut
144 above and below in regulating bolt 143 and positioned at the downside of regulating block 142 up and down, further increasing up and down adjusting part 14
Reliability.
Front and rear adjusting part 15 includes front and rear regulation fixing bolt 151, front and rear regulating block 152, the and of forward-backward adjustment bolts 153
Adjusting lock nut 154 before and after a pair, front and rear adjustment seat 11 is connected by front and rear regulation fixing bolt 151 with upper lower adjusting seat 12
And the waist hole arranged along the longitudinal direction is opened up in junction, front and rear regulating block 152 is located at the front and rear front side of adjustment seat 11 or rear side, preceding
Regulating block 152 is fixedly connected with upper lower adjusting seat 12 afterwards, and forward-backward adjustment bolts 153 are threadedly coupled with front and rear regulating block 152, front and rear
Regulating bolt 153 is connected with the front and rear through hole of adjustment seat 11, and adjusting lock nut 154 is located at forward-backward adjustment bolts 153 before and after a pair
Go up and be distributed in the front and rear both sides of through hole junction.In the present embodiment, front and rear regulating block 152 is located at the front and rear front side of adjustment seat 11.
Operation principle of the present utility model is as follows：
When needing to adjust the height of body of heater 3：Unscrew regulation fixing bolt 141 up and down and up and down after adjusting lock nut 144,
Regulating bolt 143 can just promote lower adjusting seat 12 up to move above and below tightening, so as to realize that body of heater 3 is up adjusted；Conversely,
Regulating bolt 143 can just allow lower adjusting seat 12 to be moved down by gravity above and below unscrewing, so as to realize body of heater 3 toward downward
Section；After regulation is finished, adjusting lock nut 144 above and below locking are loosened with regulating bolt above and below preventing 143.
When needing to adjust the front and back position of body of heater 3, the front and rear regulation on rear side of fixing bolt 151 and through hole is adjusted before and after unscrewing
Locking nut 154, then tightening forward-backward adjustment bolts 153 can just promote front and rear adjustment seat 11 to move backward, so as to realize body of heater 3
Adjust backward；Conversely, the front and rear adjusting lock nut 154 before and after unscrewing on front side of regulation fixing bolt 151 and through hole, then before unscrewing
Regulating bolt 153 can just pull front and rear adjustment seat 11 to be moved along afterwards, so as to realize that body of heater 3 is adjusted forward.
Although the utility model is disclosed above with preferred embodiment, but it is not limited to the utility model.It is any
Those of ordinary skill in the art, in the case where not departing from technical solutions of the utility model scope, all using the disclosure above
Technology contents technical solutions of the utility model are made with many possible variations and modification, or be revised as the equivalent of equivalent variations
Embodiment.Therefore, every content without departing from technical solutions of the utility model, according to the utility model technical spirit to real above
Any simple modification, equivalent variation and modification that example is done are applied, all should be fallen in the range of technical solutions of the utility model protection.
Claims (5)
1. a kind of PECVD device converter body support governor motion, it is characterised in that：Including a pair of adjusting bases（1）And a pair of supports
Round bar（2）, a pair of support round bars（2）It is installed vertically on a pair of adjusting bases（1）On, the support round bar（2）With PECVD device
Body of heater（3）It is parallel.
2. PECVD device converter body support governor motion according to claim 1, it is characterised in that：The adjusting base（1）
Including front and rear adjustment seat（11）, upper lower adjusting seat（12）And a pair of vertical beams（13）, a pair of vertical beams（13）It is divided into lower adjusting seat
（12）Rear and front end, each vertical beam（13）With upper lower adjusting seat（12）Between provided with up and down adjusting part（14）, the front and rear tune
Save seat（11）Located at the upper lower adjusting seat（12）Upper and front and rear adjustment seat（11）With upper lower adjusting seat（12）Between provided with front and rear
Adjusting part（15）, the support round bar（2）It is installed vertically on a pair of adjusting bases（1）Front and rear adjustment seat（11）On.
3. PECVD device converter body support governor motion according to claim 2, it is characterised in that：The regulation group up and down
Part（14）Including regulation fixing bolt up and down（141）, regulating block up and down（142）Regulating bolt up and down（143）The upper downward
Save seat（12）Pass through the regulation fixing bolt up and down（141）With the vertical beam（13）Connect and open up vertically side in junction
To the waist hole of arrangement, the regulating block up and down（142）Positioned at the upper lower adjusting seat（12）Downside and with the vertical beam（13）Gu
Fixed connection, the regulating bolt up and down（143）With the regulating block up and down（142）Threaded connection and upper end and the regulation up and down
Seat（12）Offset.
4. PECVD device converter body support governor motion according to claim 3, it is characterised in that：The regulation group up and down
Part（14）Also include adjusting lock nut up and down（144）, the adjusting lock nut up and down（144）Located at the regulation spiral shell up and down
Bolt（143）Above and positioned at the regulating block up and down（142）Downside.
5. the PECVD device converter body support governor motion according to Claims 2 or 3 or 4, it is characterised in that：Before and after described
Adjusting part（15）Including front and rear regulation fixing bolt（151）, front and rear regulating block（152）, forward-backward adjustment bolts（153）With a pair
Front and rear adjusting lock nut（154）, the front and rear adjustment seat（11）Pass through the front and rear regulation fixing bolt（151）On described
Lower adjusting seat（12）Connect and the waist hole arranged along the longitudinal direction is opened up in junction, the front and rear regulating block（152）Positioned at institute
State front and rear adjustment seat（11）Front side or rear side, the front and rear regulating block（152）With the upper lower adjusting seat（12）It is fixedly connected, institute
State forward-backward adjustment bolts（153）With the front and rear regulating block（152）Threaded connection, the forward-backward adjustment bolts（153）With it is described
Front and rear adjustment seat（11）Through hole is connected, front and rear adjusting lock nut described in a pair（154）Located at the forward-backward adjustment bolts（153）
Go up and be distributed in the front and rear both sides of through hole junction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621286245.6U CN206328492U (en) | 2016-11-28 | 2016-11-28 | A kind of PECVD device converter body support governor motion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621286245.6U CN206328492U (en) | 2016-11-28 | 2016-11-28 | A kind of PECVD device converter body support governor motion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206328492U true CN206328492U (en) | 2017-07-14 |
Family
ID=59289157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621286245.6U Active CN206328492U (en) | 2016-11-28 | 2016-11-28 | A kind of PECVD device converter body support governor motion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206328492U (en) |
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2016
- 2016-11-28 CN CN201621286245.6U patent/CN206328492U/en active Active
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