CN105277561B - 基于机器视觉的硅片和电池片整齐度检测装置及检测方法 - Google Patents
基于机器视觉的硅片和电池片整齐度检测装置及检测方法 Download PDFInfo
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- CN105277561B CN105277561B CN201510700669.6A CN201510700669A CN105277561B CN 105277561 B CN105277561 B CN 105277561B CN 201510700669 A CN201510700669 A CN 201510700669A CN 105277561 B CN105277561 B CN 105277561B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 145
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 144
- 239000010703 silicon Substances 0.000 title claims abstract description 144
- 238000001514 detection method Methods 0.000 title claims abstract description 103
- 235000012431 wafers Nutrition 0.000 claims description 36
- 238000012360 testing method Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 6
- 230000001788 irregular Effects 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims description 3
- 238000005303 weighing Methods 0.000 claims description 3
- 238000009659 non-destructive testing Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 150000003376 silicon Chemical class 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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CN201510700669.6A CN105277561B (zh) | 2015-10-26 | 2015-10-26 | 基于机器视觉的硅片和电池片整齐度检测装置及检测方法 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0685140B1 (en) * | 1993-02-16 | 1999-01-13 | Northeast Robotics, Inc. | Continuous diffuse illumination method and apparatus |
CN201570508U (zh) * | 2009-06-02 | 2010-09-01 | 上海圣微电子科技发展有限公司 | 太阳能硅片计数仪 |
CN103056759A (zh) * | 2012-12-24 | 2013-04-24 | 中国科学院自动化研究所 | 一种基于传感器反馈的机器人磨削系统 |
CN103669182A (zh) * | 2013-11-15 | 2014-03-26 | 上海嘉珏实业有限公司 | 基于相机与线激光器的路面裂缝识别装置及其识别方法 |
CN104634261A (zh) * | 2014-12-05 | 2015-05-20 | 浙江理工大学 | 基于线激光源的中厚板形貌检测系统及其方法 |
CN104713528A (zh) * | 2015-04-03 | 2015-06-17 | 江苏大学 | 基于机器视觉的硅片和电池片计数设备 |
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- 2015-10-26 CN CN201510700669.6A patent/CN105277561B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0685140B1 (en) * | 1993-02-16 | 1999-01-13 | Northeast Robotics, Inc. | Continuous diffuse illumination method and apparatus |
CN201570508U (zh) * | 2009-06-02 | 2010-09-01 | 上海圣微电子科技发展有限公司 | 太阳能硅片计数仪 |
CN103056759A (zh) * | 2012-12-24 | 2013-04-24 | 中国科学院自动化研究所 | 一种基于传感器反馈的机器人磨削系统 |
CN103669182A (zh) * | 2013-11-15 | 2014-03-26 | 上海嘉珏实业有限公司 | 基于相机与线激光器的路面裂缝识别装置及其识别方法 |
CN104634261A (zh) * | 2014-12-05 | 2015-05-20 | 浙江理工大学 | 基于线激光源的中厚板形貌检测系统及其方法 |
CN104713528A (zh) * | 2015-04-03 | 2015-06-17 | 江苏大学 | 基于机器视觉的硅片和电池片计数设备 |
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