CN105277419B - The nucleopore membranes Etaching device of circular filtration type - Google Patents
The nucleopore membranes Etaching device of circular filtration type Download PDFInfo
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- CN105277419B CN105277419B CN201510794297.8A CN201510794297A CN105277419B CN 105277419 B CN105277419 B CN 105277419B CN 201510794297 A CN201510794297 A CN 201510794297A CN 105277419 B CN105277419 B CN 105277419B
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Abstract
The invention discloses a kind of nucleopore membranes Etaching device of circular filtration type, this device is used for nucleopore membranes batch etching and processing, and main application fields include nucleopore membranes Product processing, nucleopore film preparation etc..A kind of nucleopore membranes Etaching device of circular filtration type, it is mainly characterized by the input port for including etching groove pipeline connection heating tank, and pipeline switchs provided with water route；The output of heating tank connects etching groove by being circulated throughout filter, heater is provided with heating tank, the thermosensitive probe of heater monitor etching solution temperature is arranged in etching groove；Agitator is provided with liquid pool, liquid pool is switched by water route and connects etching groove with liquid feeding filter pipeline；The concentration probe of concentration in monitoring heating tank is provided with fluid infusion groove, fluid infusion groove feeds etching solution into etching groove automatically.The device has automatic temperature-adjusting and concentration offsets, circulate, self-cleaning the advantages that, can efficiently carry out for a long time nucleopore membranes batch etch.
Description
Technical field
The present invention relates to a kind of nucleopore membranes batch Etaching device.This device is mainly used in nucleopore membranes batch etching and processing,
Main application fields include nucleopore membranes Product processing, nucleopore film preparation etc..
Background technology
Nucleopore membranes, also referred to as nuclear pore membrane or heavy ion microporous membrane, it is to be beaten using heavy ion on megohmite insulant film
Hole and then chemical etching reaming form.Etch process is mainly immersed in the membrane material after irradiation in the etching liquid of alkalescence.
Akaline liquid typically uses the sodium hydroxide solution of 2-8 mol/Ls, and etch temperature is typically at 50-80 DEG C.Due to being lost in identical
Under the conditions of quarter, nucleopore membrane aperture is directly proportional to etching period, and the nucleopore membranes of different pore size are produced generally according to etching period.Surely
Fixed etching condition is the key of nucleopore membranes etching technique.The etching condition of nucleopore membranes mainly includes composition, the concentration of etching solution
And temperature.
The large batch of etching and processing of nucleopore membranes typically makes nucleopore membranes complete by etching groove and rinse bath by pressure roller and spool
Into the process of cleaning and etching.Present etch process there is a problem in some links：
(1) do not washed clean clearly after nucleopore membranes etching, there is basic residual.
(2) cause etchant concentration to change due to reasons such as etching solution volatilizations in etching process, cause etching speed
Change, so as to cause nucleopore membrane aperture uneven.
(3) etching groove is typically heated by heater, is changed in different regional temperatures, the different etching speed of location of etch
Rate is different, causes to etch uneven.
(4) wound membrane machine drive failures are caused because film and etching solution reaction can produce residue in etching process；Etch simultaneously
Liquid becomes cloudy, and is attached to nucleopore membranes surface and hinders nucleopore membranes etching, causes etching aperture uneven.
In order to solve problem (4), there is patent to propose etching groove bottom beveling, to form the pipeline of blowdown, timing is cleared up
Dirt discharge groove clears up etch residue.
At present these the problem still exists annoyings nucleopore membranes etching and processing, affect the product quality of nucleopore membranes.In order to solve
Problem above this patent proposes that the mode of circulating filtration solves.
The content of the invention
It is an object of the invention to avoid the deficiency of existing apparatus, a kind of nucleopore membranes etching dress of circular filtration type is designed
Put.So that nucleopore membranes product aperture is precisely controlled.
To achieve the above object, the technical scheme taken of the present invention is：A kind of nucleopore membranes Etaching device of circular filtration type,
It is mainly characterized by the input port for including etching groove pipeline connection heating tank, and pipeline switchs provided with water route；Heating tank it is defeated
Go out and connect etching groove by being circulated throughout filter, heater is provided with heating tank, the temperature-sensitive of heater monitor etching solution temperature is visited
Head is arranged in etching groove；Agitator is provided with liquid pool, liquid pool is switched by water route and connects erosion with liquid feeding filter pipeline
Cutting；The concentration probe of concentration in monitoring heating tank is provided with fluid infusion groove, fluid infusion groove feeds etching solution into etching groove automatically.
Described circular filtration type nucleopore membranes Etaching device, also includes film transmission mechanism, includes putting of being sequentially provided with
Volume machine, etching groove, cleaning machine, dryer and winder, spool is unreeled provided with nucleopore membranes on unreeling machine；Set in etching groove
There is the etching pressure roller of conveying nucleopore membranes, the cleaning pressure roller of conveying nucleopore membranes is provided with cleaning machine；Conveying is provided with dryer
The drying pressure roller of nucleopore membranes；The winding pressure roller of nucleopore membranes is provided with winder.
Described circular filtration type nucleopore membranes Etaching device, described cleaning machine are sequentially provided with mutual disconnected acid-base neutralization
Groove, the first rinsing bowl, the second rinsing bowl and ultrasonic cleaning tank；Cleaning pressure roller is equipped with groove.
Described circular filtration type nucleopore membranes Etaching device, the width range of folding and unfolding film is 200 millimeters to 450 millimeters.
Described circular filtration type nucleopore membranes Etaching device, described etching groove use 316L or 304 stainless steel materials, work
Make temperature for room temperature to 90 DEG C.
Described circular filtration type nucleopore membranes Etaching device, the temperature of the hot-air seasoning of described dryer is 50 DEG C -100
℃。
Described circular filtration type nucleopore membranes Etaching device, described agitator are mechanical agitation, using 316L or 304 not
The propeller blade of rust steel.
Described circular filtration type nucleopore membranes Etaching device, described heating tank are heated using groups of heater；
Heating tank forms loop by pipeline and etching groove, is circulated throughout filter so that etching solution is constantly followed in etching groove and heating tank
Ring；The speed of etching solution flowing is circulation 1-20 times per hour.
Described circular filtration type nucleopore membranes Etaching device, described liquid feeding filter use filtering essence with filter is circulated throughout
The filter membrane of 0.5 micron -70 microns of degree, carry out multistage filtering；Filter band backwash head, can residue in periodic cleaning filter.
Described circular filtration type nucleopore membranes Etaching device, described fluid infusion groove, monitored using concentration probe in heating tank
The concentration of etching solution, the etching solution of deionized water or high concentration is supplemented from trend heating tank according to the height that concentration detects.
The beneficial effects of the invention are as follows：First, newly-built heating tank, heating tank and etching groove is allowed to form loop, etching solution is not
Disconnected circulation, such etching solution just can fully flow.The uniformity of temperature and concentration is considerably improved.Secondth, temperature monitoring and add
Hot device design can ensure that etching solution temperature reaches dynamic equilibrium, so as to ensure accuracy of temperature control.Add setting for groove and concentration probe
Meter, can allow the concentration of etching solution to be monitored；For etchant concentration once changing, solution will be added automatically to heating by adding groove
Groove, so as to ensure that the concentration of etching solution does not change.3rd, add filter in circulation loop, it is possible to which erosion is removed in timing
Residue caused by quarter process, filter is allowed to keep operating efficiency by backwash.4th, rinse bath is divided into four parts, neutralize,
Cleaning 1, cleaning 2 and ultrasonic cleaning, so that it is guaranteed that the nucleopore membranes after etching clean up completely.In addition, liquid pool is have also been devised,
Liquid pool band mechanical agitation, etching solution reinject etching groove after stirring so that are operated with liquid more convenient.
Brief description of the drawings：
The nucleopore membranes Etaching device film etching mechanism of Fig. 1 circular filtration types；
The nucleopore membranes Etaching device film transmission mechanism of Fig. 2 circular filtration types.
Embodiment
The principle and feature of the present invention are described with reference to embodiments, the given examples are served only to explain the present invention,
It is not intended to limit the scope of the present invention.Below with specific example, present disclosure is described in detail.
Embodiment 1：See Fig. 1, a kind of nucleopore membranes Etaching device of circular filtration type.The device mainly includes liquid pool 1, erosion
Cutting 2, heating tank 3 and fluid infusion groove 4.The pipeline of etching groove 2 connects the input port of heating tank 3, and pipeline is provided with water route switch 3.1；Add
The output of heat channel 3 connects etching groove 2 by being circulated throughout filter 3.3, is provided with heater 3.2 in heating tank 3, heater 3.2 is supervised
The thermosensitive probe 3.4 for surveying etching solution temperature is arranged in etching groove 2；Agitator 1.1 is provided with liquid pool 1, liquid pool 1 passes through water
Way switch 1.1 connects etching groove 2 with the pipeline of liquid feeding filter 1.2；The concentration of concentration in monitoring heating tank 3 is provided with fluid infusion groove 4
Probe 4.1, fluid infusion groove feed etching solution into etching groove 2 automatically.
Embodiment 2：See Fig. 2, a kind of nucleopore membranes Etaching device of circular filtration type.Film transmission mechanism, which includes, to be sequentially provided with
Unreeling machine 5, etching groove 2, cleaning machine 6, dryer 7 and winder 8, unreels spool provided with nucleopore membranes on unreeling machine 1
1.1；The etching pressure roller 2.1 of conveying nucleopore membranes is provided with etching groove 2, the cleaning pressure of conveying nucleopore membranes is provided with cleaning machine 3
Roller 6.1；The drying pressure roller 7.1 of conveying nucleopore membranes is provided with dryer 7；The winding pressure roller of nucleopore membranes is provided with winder 8
8.1.Described cleaning machine 6 is sequentially provided with mutual disconnected acid-base neutralization groove 6.2, the first rinsing bowl 6.3, the second rinsing bowl 6.4
With ultrasonic cleaning tank 6.5.
Described cleaning machine 6 is sequentially provided with mutual disconnected acid-base neutralization groove 6.2, the first rinsing bowl 6.3, the second rinsing bowl
6.4 and ultrasonic cleaning tank 6.5；Cleaning pressure roller 6.1 is equipped with groove.
Described circular filtration type nucleopore membranes Etaching device, the width of folding and unfolding film is 400 millimeters.
Described etching groove 2 uses 316L stainless steel materials, and operating temperature is 90 DEG C.
The temperature of the hot-air seasoning of described dryer 7 is 50 DEG C.
Described agitator 1.1 is mechanical agitation, using the propeller blade of 316L stainless steels.
Described heating tank 3 is heated using groups of heater 3.2；Heating tank 3 is formed by pipeline and etching groove 2
Loop, filter 3.3 is circulated throughout so that etching solution constantly circulates in etching groove 2 and heating tank 3；The speed of etching solution flowing is every
Hour circulation 20 times.
Described liquid feeding filter 1.3 uses 5 microns of filtering accuracy and 70 micron membrane filters with filter 3.3 is circulated throughout, and carries out
Multistage filtering；Filter band backwash head, can residue in periodic cleaning filter.
Described fluid infusion groove 4, the concentration of etching solution in heating tank is monitored using concentration probe 4.1, detected according to concentration
Height supplements the etching solution or deionized water of high concentration from trend heating tank 3.
Embodiment 3：See Fig. 1 and Fig. 2, a kind of nucleopore membranes Etaching device of circular filtration type.The device mainly includes film and lost
Carve mechanism and film transmission mechanism.Film etching mechanism includes liquid pool 1, etching groove 2, heating tank 3 and fluid infusion groove 4.The pipeline of etching groove 2
The input port of heating tank 3 is connected, pipeline is provided with water route switch 3.1；The output of heating tank 3 is by being circulated throughout the connection erosion of filter 3.3
Cutting 2, is provided with heater 3.2 in heating tank 3, and the thermosensitive probe 3.4 that heater 3.2 monitors etching solution temperature is arranged on etching
In groove 2；Agitator 1.1 is provided with liquid pool 1, liquid pool 1 connects erosion by water route switch 1.1 with the pipeline of liquid feeding filter 1.2
Cutting 2；The concentration probe 4.1 of concentration in monitoring heating tank 3, the automatic supply erosion into etching groove 2 of fluid infusion groove are provided with fluid infusion groove 4
Carve liquid.Film transmission mechanism includes the unreeling machine 5 being sequentially provided with, etching groove 2, cleaning machine 6, dryer 7 and winder 8, is putting
Volume machine 1 unreels spool 1.1 provided with nucleopore membranes；The etching pressure roller 2.1 of conveying nucleopore membranes is provided with etching groove 2, is being cleaned
Machine 3 is provided with the cleaning pressure roller 6.1 of conveying nucleopore membranes；The drying pressure roller 7.1 of conveying nucleopore membranes is provided with dryer 7；Receiving
Volume machine 8 is provided with the winding pressure roller 8.1 of nucleopore membranes.Described cleaning machine 6 be sequentially provided with mutual disconnected acid-base neutralization groove 6.2,
First rinsing bowl 6.3, the second rinsing bowl 6.4 and ultrasonic cleaning tank 6.5.Cleaning pressure roller 6.1 is equipped with groove.
Described circular filtration type nucleopore membranes Etaching device, the width of folding and unfolding film is 200 millimeters.
Described etching groove 2 uses 304 stainless steel materials, and operating temperature is 50 DEG C.
The temperature of the hot-air seasoning of described dryer 7 is 100 DEG C.
Described agitator 1.1 is mechanical agitation, using the propeller blade of 304 stainless steels.
Described heating tank 3 is heated using groups of heater 3-2；Heating tank 3 is formed by pipeline and etching groove 2
Loop, filter 3.3 is circulated throughout so that etching solution constantly circulates in etching groove 2 and heating tank 3；The speed of etching solution flowing is every
Hour circulation 1 time.
Described liquid feeding filter 1.3 and it is circulated throughout filter 3-3 and use 10 microns of filtering accuracy and 70 micron membrane filters, progress
Double-filtration；Filter band backwash head, can residue in periodic cleaning filter.
Described fluid infusion groove 4, the concentration of etching solution in heating tank is monitored using concentration probe 4.1, detected according to concentration
Height supplements the etching solution or deionized water of high concentration from trend heating tank 3.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc., it should be included in the scope of the protection.
Claims (5)
1. the nucleopore membranes Etaching device of a kind of circular filtration type, it is characterised in that include the defeated of etching groove pipeline connection heating tank
Entrance, pipeline switch provided with water route；The output of heating tank connects etching groove by being circulated throughout filter, and heating is provided with heating tank
Device, the thermosensitive probe of heater monitor etching solution temperature are arranged in etching groove；Agitator is provided with liquid pool, liquid pool passes through
Water route switch connects etching groove with liquid feeding filter pipeline；The concentration probe of concentration in monitoring heating tank is provided with fluid infusion groove, is mended
Liquid bath feeds etching solution into etching groove automatically；Also include film transmission mechanism, include the unreeling machine being sequentially provided with, etching
Groove, cleaning machine, dryer and winder, spool is unreeled provided with nucleopore membranes on unreeling machine；Conveying core is provided with etching groove
The etching pressure roller of pore membrane, the cleaning pressure roller of conveying nucleopore membranes is provided with cleaning machine；Conveying nucleopore membranes are provided with dryer
Dry pressure roller；The winding pressure roller of nucleopore membranes is provided with winder；Described cleaning machine is sequentially provided with mutual disconnected soda acid
With groove, the first rinsing bowl, the second rinsing bowl and ultrasonic cleaning tank；Cleaning pressure roller is equipped with groove；Described heating tank uses
Groups of heater is heated；Heating tank forms loop by pipeline and etching groove, is circulated throughout filter so that etching solution is being lost
Constantly circulated in cutting and heating tank；The speed of etching solution flowing is circulation 1-20 times per hour；Described liquid feeding filter and
The filter membrane that filter uses 0.5 micron -70 microns of filtering accuracy is circulated throughout, carries out multistage filtering；Filter band energy periodic cleaning mistake
The backwash head of residue in filter；Described fluid infusion groove, the concentration of etching solution in heating tank is monitored provided with concentration probe, according to dense
The height for spending detection supplements the etching solution of deionized water or high concentration from trend heating tank.
2. circular filtration type nucleopore membranes Etaching device as claimed in claim 1, it is characterised in that the width range of folding and unfolding film
For 200 millimeters to 450 millimeters.
3. circular filtration type nucleopore membranes Etaching device as claimed in claim 1, it is characterised in that the material of described etching groove
For 316L or 304 stainless steels, operating temperature is room temperature to 90 DEG C.
4. circular filtration type nucleopore membranes Etaching device as claimed in claim 1, it is characterised in that the hot blast of described dryer
The temperature of drying is 50 DEG C -100 DEG C.
5. circular filtration type nucleopore membranes Etaching device as claimed in claim 1, it is characterised in that described agitator is machinery
Stirring, the material of propeller blade is 316L or 304 stainless steels.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510794297.8A CN105277419B (en) | 2015-11-18 | 2015-11-18 | The nucleopore membranes Etaching device of circular filtration type |
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| CN201510794297.8A CN105277419B (en) | 2015-11-18 | 2015-11-18 | The nucleopore membranes Etaching device of circular filtration type |
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| CN105277419B true CN105277419B (en) | 2018-01-23 |
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| CN109778300B (en) * | 2019-01-23 | 2020-09-11 | 辉门环新（安庆）粉末冶金有限公司 | Automatic change metallurgical etching device |
| CN113050564B (en) * | 2021-03-12 | 2022-04-26 | 中国科学院近代物理研究所 | Nuclear track membrane etching line self-feedback linkage production control device |
| CN114516092B (en) * | 2022-01-13 | 2023-11-14 | 库仑核孔膜科技（枣庄）有限公司 | Nuclear track membrane etching device |
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| RU2029317C1 (en) * | 1991-11-19 | 1995-02-20 | Физико-энергетический институт | Method of producing nuclear filters |
| CN103155113A (en) * | 2010-07-23 | 2013-06-12 | 仓敷纺织株式会社 | Substrate processing device |
| CN104201094A (en) * | 2014-08-28 | 2014-12-10 | 李忠海 | Heavy-ion micro-porous membrane etching device |
| CN104193182A (en) * | 2014-08-25 | 2014-12-10 | 江苏亨通光电股份有限公司 | Accurate control method of etching technology in optical fiber preform production |
| CN104977198A (en) * | 2015-05-12 | 2015-10-14 | 中国科学院近代物理研究所 | Nuclear pore membrane small sample etching apparatus |
| CN205091172U (en) * | 2015-11-18 | 2016-03-16 | 武威科近新发技术有限责任公司 | Nuclear track membrane etching device of loop filter formula |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4062419B2 (en) * | 2002-05-21 | 2008-03-19 | セイコーエプソン株式会社 | Processing apparatus and method for manufacturing semiconductor device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2029317C1 (en) * | 1991-11-19 | 1995-02-20 | Физико-энергетический институт | Method of producing nuclear filters |
| CN103155113A (en) * | 2010-07-23 | 2013-06-12 | 仓敷纺织株式会社 | Substrate processing device |
| CN104193182A (en) * | 2014-08-25 | 2014-12-10 | 江苏亨通光电股份有限公司 | Accurate control method of etching technology in optical fiber preform production |
| CN104201094A (en) * | 2014-08-28 | 2014-12-10 | 李忠海 | Heavy-ion micro-porous membrane etching device |
| CN104977198A (en) * | 2015-05-12 | 2015-10-14 | 中国科学院近代物理研究所 | Nuclear pore membrane small sample etching apparatus |
| CN205091172U (en) * | 2015-11-18 | 2016-03-16 | 武威科近新发技术有限责任公司 | Nuclear track membrane etching device of loop filter formula |
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Effective date of registration: 20220921 Address after: No. 509, Nanchang Road, Lanzhou City, Gansu Province 730099 Patentee after: INSTITUTE OF MODERN PHYSICS, CHINESE ACADEMY OF SCIENCES Address before: Qingyuan Town, Liangzhou District, Wuwei City, Gansu Province, 733021 Patentee before: WUWEI KEJIN XINFA TECHNOLOGY Co.,Ltd. |
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